一种压电调谐的麦克风传感器及制作方法
By using a piezoelectrically tuned microphone sensor fabrication method, the problems of low testing accuracy and complex processes of electrostatically driven MEMS optical microphones have been solved, achieving high sensitivity, low noise, and large operating bandwidth, and possessing the advantage of consistent production.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
- Filing Date
- 2025-09-25
- Publication Date
- 2026-07-17
AI Technical Summary
Existing electrostatically driven MEMS optical microphones suffer from low testing accuracy, complex manufacturing processes, and poor consistency in mass production.
The method for fabricating a microphone sensor using piezoelectric tuning includes forming an etch barrier layer, a diaphragm material layer, a sacrificial layer, a grating material layer, a first electrode material layer, a piezoelectric material layer, and a second electrode material layer on a substrate. A piezoelectric driving structure is formed by etching to control the distance between the grating structure and the diaphragm structure, avoiding the attraction effect caused by electrostatic driving. The grating structure and the diaphragm structure are then integrated through surface processing.
It improves the sensitivity and signal-to-noise ratio of the microphone sensor, reduces process complexity, achieves high integration and large operating bandwidth, avoids failures caused by electrostatic control, and has the advantage of mass production consistency.
Smart Images
Figure CN120957071B_ABST