Plasma detection method and device, electronic equipment and storage medium

Abstract

The invention belongs to the technical field of plasma detection, and discloses a plasma detection method and device, electronic equipment and a storage medium, and the method comprises the steps: obtaining the ion type of a to-be-detected plasma, and carrying out the detection of the to-be-detected plasma according to the ion type; corresponding plasma luminescence standard characteristics and any group of resonant cavity regulator standard adjustment parameters are extracted from a preset database, the resonant cavity regulator is adjusted based on the resonant cavity regulator standard adjustment parameters to obtain luminescence characteristics of the plasma to be detected, and the plasma luminescence standard characteristics and the luminescence characteristics are compared to obtain the plasma luminescence characteristic of the to-be-detected plasma. According to the plasma luminescence standard characteristics and the deviation degree of the luminescence characteristics, the resonant cavity regulator is secondarily regulated, so that the regulated luminescence characteristics tend to the plasma luminescence standard characteristics; the light-emitting characteristics of the to-be-detected plasma are adjusted according to the plasma light-emitting standard characteristics and the corresponding resonant cavity regulator standard adjustment parameters, so that the ionization degree of the plasma is detected, and the detection efficiency of the plasma is remarkably improved.

Description

Technical Field

[0001] This application relates to the technical field of plasma detection, and more specifically, to a plasma detection method, apparatus, electronic device, and storage medium. Background Technology

[0002] Remote Plasma Sources (RPS) are advanced plasma generation devices that play a crucial role in semiconductor manufacturing, material surface treatment, and thin film deposition processes. Their working principle is based on the generation of a high-frequency alternating electric field within a cavity using radio frequency or microwave electromagnetic waves, which ionizes gas molecules to generate plasma composed of ions and electrons. Thanks to the physical isolation barrier between the cavity and the processing area, the plasma can be safely transported to the target location, avoiding direct damage to sensitive components. However, plasma systems are inherently in a highly non-equilibrium state, with strong nonlinear coupling between their state parameters, such as electron temperature, electron density, and active radical concentration, and input conditions. Even with strictly fixed parameters such as power supply, gas composition, and chamber pressure, actual plasma behavior can still fluctuate significantly due to factors such as electrode / reactor contamination or aging (e.g., deposits altering the electric field distribution), fluctuations in gas purity (trace impurities can alter chemical reaction pathways), power supply stability issues (waveform distortion, impedance matching drift), and changes in ambient temperature and humidity. Therefore, even with identical input parameters during plasma decomposition, the same plasma state phase may not be obtained.

[0003] Currently, plasma state monitoring mainly relies on manual visual inspection. Operators need to use remote plasma sources (such as...) Figure 4 As shown, Figure 4 This is a schematic diagram of a remote plasma source, where a is the remote plasma source cavity, b is the cavity observation window, c is the resonant cavity, d is the resonant cavity regulator, e is the power supply device, and f is the power control device and the transmitter power receiver. The observation window of the cavity is used to subjectively interpret visual characteristics such as plasma emission color and brightness distribution based on personal experience, thereby assessing the degree of ionization and the completion of decomposition. This method has significant drawbacks: the detection process requires repeated interruptions of the process flow, consuming a large amount of manpower and time; the judgment results are highly dependent on the operator's professional competence and experience, and differences in standards among different personnel lead to poor repeatability; at the same time, manual methods cannot achieve continuous dynamic monitoring, making it difficult to capture instantaneous changes in the plasma state, resulting in lag in process control, low overall detection efficiency, and susceptibility to human error.

[0004] Therefore, in order to solve the technical problems of low efficiency, high subjectivity and inability to capture state changes in real time caused by the use of manual detection in existing plasma detection, there is an urgent need for a plasma detection method, device, electronic equipment and storage medium. Summary of the Invention

[0005] The purpose of this application is to provide a plasma detection method, device, electronic device, and storage medium. By adjusting the luminescence characteristics of the plasma to be detected through standard plasma luminescence characteristics and corresponding standard adjustment parameters of the resonant cavity modulator, the degree of ionization of the plasma can be detected. This solves the problems of low efficiency, strong subjectivity, and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0006] In a first aspect, this application provides a plasma detection method for detecting plasma, comprising the following steps: Obtain the ion type of the plasma to be detected; Based on the ion type, extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from a preset database; Based on the standard adjustment parameters of the resonant cavity modulator, the resonant cavity modulator is adjusted to obtain the luminescence characteristics of the plasma to be detected; The plasma emission standard feature and the emission feature are compared, and the resonant cavity regulator is adjusted a second time according to the degree of deviation between the plasma emission standard feature and the emission feature, so that the adjusted emission feature tends to the plasma emission standard feature.

[0007] The plasma detection method provided in this application can detect plasma. By adjusting the luminescence characteristics of the plasma to be detected through the standard characteristics of plasma luminescence and the corresponding standard adjustment parameters of the resonant cavity modulator, the degree of ionization of the plasma can be detected. This solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0008] Optionally, based on the ion type, corresponding plasma emission standard features and any set of resonant cavity tuner standard adjustment parameters are extracted from a preset database, including: Obtain the process target information for the current application scenario; Based on the ion type and the process target information, select the corresponding plasma emission standard characteristics and any set of resonant cavity regulator standard adjustment parameters from the preset database.

[0009] Optionally, comparing the plasma emission standard feature and the emission feature, and adjusting the resonant cavity regulator a second time based on the degree of deviation between the plasma emission standard feature and the emission feature, so that the adjusted emission feature tends to the plasma emission standard feature, includes: By comparing the described luminescence characteristics with the standard plasma luminescence characteristics, the degree of deviation is obtained; Determine whether the degree of deviation is less than a preset deviation threshold; if yes, determine that the luminescence characteristic tends to the standard plasma luminescence characteristic; if no, adjust the resonant cavity regulator according to the degree of deviation until the adjusted degree of deviation is less than the preset deviation threshold, and determine that the adjusted luminescence characteristic tends to the standard plasma luminescence characteristic.

[0010] The plasma detection method provided in this application can detect plasma and form a closed-loop feedback mechanism by cyclically executing adjustment and verification steps. This ensures that under the influence of interference factors such as electrode aging or changes in ambient temperature and humidity, it can continuously iterate until the deviation converges to an acceptable range, thereby achieving stable and accurate matching of luminescence characteristics in complex working conditions.

[0011] Optionally, the resonant cavity modulator is adjusted according to the degree of deviation until the adjusted deviation is less than a preset deviation threshold, and the adjusted luminescence characteristics are determined to be close to the standard plasma luminescence characteristics, including: Based on the degree of deviation, the resonant cavity modulator is tentatively adjusted to obtain the light emission characteristics after tentative adjustment; Based on the changing trend of the deviation before and after the trial adjustment, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined; Based on the adjustment direction and the adjustment amount, the resonant cavity regulator is adjusted until the degree of deviation after adjustment is less than the preset deviation threshold, and the luminescence characteristics after adjustment are determined to be close to the standard plasma luminescence characteristics.

[0012] The plasma detection method provided in this application can detect plasma and quickly verify the adjustment direction through small-amplitude perturbations, avoiding system oscillations caused by direct large-amplitude adjustments. At the same time, it directly converts trend analysis results into precise adjustment commands, effectively avoiding invalid iterations.

[0013] Optionally, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined based on the changing trend of the deviation before and after the trial adjustment, including: Calculate the new deviation between the experimentally adjusted luminescence characteristics and the standard plasma luminescence characteristics; Calculate the difference between the new deviation and the degree of deviation to determine the trend of the change in the degree of deviation before and after the trial adjustment; Based on the changing trend and the adjustment amount during trial adjustments, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined.

[0014] Optionally, the difference between the new deviation and the degree of deviation is calculated to determine the trend of change in the degree of deviation before and after the trial adjustment, including: The difference between the new deviation and the degree of deviation is calculated; Determine whether the deviation difference is less than zero; if yes, determine that the adjustment direction corresponding to the new deviation shows a positive trend, and obtain the trend of the deviation degree before and after the trial adjustment; if no, determine that the adjustment direction corresponding to the new deviation shows a negative trend, and obtain the trend of the deviation degree before and after the trial adjustment.

[0015] Optionally, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined based on the changing trend and the adjustment amount during trial adjustment, including: Based on the aforementioned trend, the adjustment direction of the resonant cavity modulator is determined; The adjustment amount of the resonant cavity regulator is determined based on the ratio of the deviation difference corresponding to the changing trend to the adjustment amount during trial adjustment.

[0016] Secondly, this application provides a plasma detection device for detecting plasma, comprising: The acquisition module is used to acquire the ion type of the plasma to be detected; The extraction module is used to extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from a preset database according to the ion type. An adjustment module is used to adjust the resonant cavity regulator based on the standard adjustment parameters of the resonant cavity regulator to obtain the luminescence characteristics of the plasma to be detected. The comparison module is used to compare the plasma emission standard feature and the emission feature, and adjust the resonant cavity regulator a second time according to the degree of deviation between the plasma emission standard feature and the emission feature, so that the adjusted emission feature tends to the plasma emission standard feature.

[0017] This plasma detection device adjusts the luminescence characteristics of the plasma to be detected by using standard plasma luminescence characteristics and corresponding standard adjustment parameters of the resonant cavity modulator to detect the degree of ionization of the plasma. It solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0018] Thirdly, this application provides an electronic device including a processor and a memory, the memory storing a computer program executable by the processor, wherein when the processor executes the computer program, it performs the steps of the plasma detection method described above.

[0019] Fourthly, this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, performs the steps of the plasma detection method described above.

[0020] Beneficial effects: The plasma detection method, device, electronic equipment and storage medium provided in this application adjust the luminescence characteristics of the plasma to be detected by using standard plasma luminescence characteristics and corresponding standard adjustment parameters of the resonant cavity modulator to detect the degree of ionization of the plasma. This solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection. Attached Figure Description

[0021] Figure 1 A flowchart of a plasma detection method provided in an embodiment of this application.

[0022] Figure 2 This is a schematic diagram of the plasma detection device provided in an embodiment of this application.

[0023] Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application.

[0024] Figure 4 This is a schematic diagram of the structure of a remote plasma source.

[0025] Labeling Explanation: 1. Acquisition Module; 2. Extraction Module; 3. Adjustment Module; 4. Comparison Module; 301. Processor; 302. Memory; 303. Communication Bus. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0027] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Please refer to Figure 1 , Figure 1 This application provides a plasma detection method in some embodiments, used for detecting plasma, comprising: Step S101: Obtain the ion type of the plasma to be detected; Step S102: Based on the ion type, extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from the preset database. Step S103: Based on the standard adjustment parameters of the resonant cavity modulator, adjust the resonant cavity modulator to obtain the luminescence characteristics of the plasma to be detected; Step S104: Compare the standard plasma emission characteristics and the emission characteristics, and adjust the resonant cavity regulator a second time according to the degree of deviation between the standard plasma emission characteristics and the emission characteristics, so that the adjusted emission characteristics tend to be similar to the standard plasma emission characteristics.

[0029] This plasma detection method adjusts the luminescence characteristics of the plasma to be detected by using standard plasma luminescence characteristics and corresponding standard adjustment parameters of the resonant cavity modulator to detect the degree of ionization of the plasma. It solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0030] Specifically, in step S101, the ion type of the plasma to be detected is obtained, such as hydrogen ions, fluorine ions, etc., and plasmas of different ion types have different luminescence characteristics.

[0031] Before testing the plasma, a device is pre-built to record the real-time observation window of the remote plasma source cavity. This device consists of an imaging system (such as a high-definition camera) and a detection system (such as a trained machine learning algorithm model). When the gas inside the plasma source cavity is ionized, different ionization states can exhibit different colors. Furthermore, uneven ionization results in uneven color distribution within the observation window. Therefore, the imaging system can capture images of the observation window, and the detection system can determine the plasma ionization state based on the captured images. Then, based on the detection system's judgment, secondary adjustments or decompositions are performed to finalize the determination. This allows for real-time dynamic recording and storage of the remote plasma source's operating status without manual intervention, saving researchers significant time.

[0032] Specifically, in step S102, based on the ion type, the corresponding plasma emission standard features and any set of resonant cavity tuner standard adjustment parameters are extracted from a preset database, including: Obtain the process target information for the current application scenario; Based on the ion type and process target information, select the corresponding plasma emission standard characteristics and any set of resonant cavity regulator standard adjustment parameters from the preset database.

[0033] In step S102, the parameter selection mechanism is optimized through the synergistic effect of process target information and ion type. Process target information provides specific process requirements for the application scenario. For example, in plasma etching and plasma cleaning, even with the same ion type, the different purposes of cleaning and etching lead to different settings for key parameters such as power, pressure, gas ratio, and whether bias voltage is applied. These parameters directly determine the core characteristics of the final plasma generated in the cavity, such as density, ion energy, and chemical activity, resulting in the need for different plasma luminescence characteristics as targets. Ion type defines the basic physical laws of plasma luminescence. Both work together in the database query process, ensuring that the selected initial parameters simultaneously meet both basic characteristics and scenario-specific requirements. Because the process target information captures the specific constraints in the actual process, luminescence characteristics closer to the standard characteristics can be output during the initial adjustment stage, thereby reducing the initial deviation between the luminescence characteristics and the standard characteristics. This reduces the frequency and complexity of subsequent secondary adjustments, forming a complete technical chain from parameter selection to adjustment execution.

[0034] In a pre-defined database, through pre-conducted experiments, the standard luminescence characteristics (including text and image representations) of specific plasmas under different application scenarios and ideal conditions are systematically established. These characteristics are then correlated with the initial adjustment parameters of the resonant cavity regulator required to achieve the standard characteristics (multiple sets of initial adjustment parameters can be obtained through multiple experiments to achieve the standard characteristics, including combinations of parameters such as voltage, frequency, and power of the resonant cavity regulator or physical adjustment parameters (such as the combination of parameters of depth, spacing, and radius of the three adjustable pins in a three-pin tuner)). This forms a queryable correspondence, which is recorded in the database. This yields the standard luminescence characteristics of different plasmas under different application scenarios and ideal conditions, as well as multiple sets of standard adjustment parameters for the resonant cavity regulator. This provides data support and directional guidance for subsequent automated and precise adjustment, and is key to achieving systematic rather than blind adjustment.

[0035] Specifically, in step S103, the resonant cavity regulator is precisely adjusted based on the extracted standard adjustment parameters of the resonant cavity regulator. The luminescence characteristics of the plasma to be detected can be obtained through the imaging system. This process achieves initial adjustment through standard parameters, ensuring the reliability of the luminescence characteristic data.

[0036] Specifically, in step S104, the standard plasma emission characteristic and the emission characteristic are compared, and the resonant cavity regulator is adjusted a second time according to the degree of deviation between the standard plasma emission characteristic and the emission characteristic, so that the adjusted emission characteristic tends to the standard plasma emission characteristic, including: By comparing the luminescence characteristics with the standard characteristics of plasma luminescence, the degree of deviation is obtained; Determine whether the degree of deviation is less than the preset deviation threshold; if so, determine that the luminescence characteristics tend to the standard characteristics of plasma luminescence; if not, adjust the resonant cavity regulator according to the degree of deviation until the degree of deviation after adjustment is less than the preset deviation threshold, and determine that the luminescence characteristics after adjustment tend to the standard characteristics of plasma luminescence.

[0037] In step S104, the quantifiable degree of deviation between the luminescence characteristics and the standard plasma luminescence characteristics is calculated by comparing the spectral data (e.g., calculating their root mean square error and relative root mean square error based on the spectral data) or chromaticity space coordinates (e.g., calculating their deviation in color space based on the chromaticity space coordinates) at the observation window positions of each cavity. A logical judgment is made based on a preset deviation threshold. If the deviation at each observation window position is less than the preset deviation threshold, the adjustment process is immediately terminated, confirming that the error between them is within an acceptable range and that the luminescence characteristics tend towards the standard plasma luminescence characteristics, avoiding redundant operations. If any observation window position has a deviation greater than or equal to the preset deviation threshold, an adjustment action is triggered. The adjustment amount is dynamically determined based on the magnitude of the deviation, ensuring that the adjusted deviation is less than the preset deviation threshold. This process forms a closed-loop feedback mechanism by cyclically executing the adjustment and verification steps, ensuring continuous iteration until the deviation converges to an acceptable range under the influence of interference factors such as electrode aging or changes in ambient temperature and humidity, thereby stably achieving accurate matching of luminescence characteristics in complex working conditions. The preset deviation threshold can be set according to actual needs. Spectral data or chromaticity space coordinates are existing technologies and will not be described in detail here.

[0038] Specifically, in step S104, the resonant cavity regulator is adjusted according to the degree of deviation until the adjusted deviation is less than a preset deviation threshold, and the adjusted luminescence characteristics are determined to be close to the standard characteristics of plasma luminescence, including: Based on the degree of deviation, the resonant cavity modulator is adjusted tentatively to obtain the luminescence characteristics after tentative adjustment; Based on the changing trend of the deviation before and after the trial adjustment, determine the adjustment direction and adjustment amount of the resonant cavity adjuster; Based on the adjustment direction and adjustment amount, the resonant cavity regulator is adjusted until the degree of deviation after adjustment is less than the preset deviation threshold, and the luminescence characteristics after adjustment are determined to be close to the standard characteristics of plasma luminescence.

[0039] In step S104, a trial adjustment is performed based on the degree of deviation to obtain real-time response data, thereby obtaining the luminescence characteristics after the trial adjustment. The trial adjustment refers to performing a small-amplitude perturbation operation on the resonant cavity modulator, with the aim of safely obtaining the system response characteristics without inducing large oscillations.

[0040] Specifically, in step S104, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined based on the changing trend of the deviation before and after the trial adjustment, including: Calculate the new deviation between the luminescence characteristics after trial adjustment and the standard plasma luminescence characteristics; Calculate the difference between the new deviation and the degree of deviation to determine the trend of the degree of deviation before and after the trial adjustment; Based on the changing trend and the adjustment amount during trial adjustments, determine the adjustment direction and adjustment amount of the resonant cavity regulator.

[0041] In step S104, after the trial adjustment, the luminescence characteristics of the plasma under test will change, resulting in a change in the deviation between the adjusted luminescence characteristics and the standard plasma luminescence characteristics. Therefore, the new deviation between the adjusted luminescence characteristics and the standard plasma luminescence characteristics is calculated.

[0042] Specifically, in step S104, the difference between the new deviation and the degree of deviation is calculated to determine the trend of change in the degree of deviation before and after the trial adjustment, including: The difference between the new deviation and the degree of deviation is calculated; Determine if the deviation difference is less than zero; if so, determine that the adjustment direction corresponding to the new deviation shows a positive trend, and obtain the trend of the deviation degree before and after the trial adjustment; if not, determine that the adjustment direction corresponding to the new deviation shows a negative trend, and obtain the trend of the deviation degree before and after the trial adjustment.

[0043] In step S104, the deviation change after the trial adjustment is quantified into a specific value by calculating the deviation difference between the new deviation and the degree of deviation. Based on the sign judgment mechanism of the deviation difference, the trend of change is directly determined by comparing the deviation difference with zero: when the deviation difference is less than zero, it indicates that the new deviation is smaller than the original deviation, the adjustment direction is effective, and it is determined to be a positive trend; when the deviation difference is not less than zero, it indicates that the new deviation is larger than the original deviation, the adjustment direction is ineffective, and it is determined to be a negative trend.

[0044] Specifically, in step S104, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined based on the changing trend and the adjustment amount during trial adjustment, including: Based on the changing trend, the adjustment direction of the resonant cavity modulator is determined; The adjustment amount of the resonant cavity regulator is determined based on the ratio of the deviation difference corresponding to the trend of change and the adjustment amount during trial adjustment.

[0045] In step S104, the adjustment direction is locked by the result of the trend determination, ensuring that subsequent adjustment operations are always carried out in the direction of reducing deviation (i.e., each adjustment shows a positive trend), avoiding oscillation or divergence in the adjustment process, thereby guiding the plasma luminescence characteristics to stably approach the standard characteristics.

[0046] Based on the determined adjustment direction, the adjustment magnitude is further quantified. By calculating the proportional relationship between the deviation difference and the tentative adjustment amount, it can be inferred how much adjustment is needed to bring the deviation to a preset threshold under the current trend. This proportional relationship can be linear or a more complex nonlinear relationship, depending on the response characteristics of the plasma system. By analyzing the proportional relationship between the deviation difference and the tentative adjustment amount, the "gain" or "sensitivity" of the current adjustment parameter can be evaluated, thereby determining the adjustment amount of the resonant cavity regulator. For example, if a small tentative adjustment amount leads to a large deviation change, it indicates that the parameter has a significant and sensitive impact on the luminescence characteristics, and the subsequent adjustment amount should be reduced accordingly to avoid overshoot; conversely, if a large tentative adjustment amount only leads to a small deviation change, it indicates that the parameter has low sensitivity, and the subsequent adjustment amount can be appropriately increased to accelerate convergence. Determining the adjustment amount based on the proportional relationship allows the adjustment process to adaptively adjust the step size, achieving rapid convergence when the deviation is large and precise fine-tuning when the deviation is small, thereby achieving fast and stable convergence under complex nonlinear or coupled relationships, ensuring accurate calibration of the plasma luminescence characteristics.

[0047] In step S104, the adjustment direction and adjustment amount are determined based on the changing trend of the deviation before and after the trial adjustment. The resonant cavity regulator is adjusted until the deviation after adjustment is less than a preset deviation threshold, and the luminescence characteristics after adjustment are determined to be close to the standard characteristics of plasma luminescence. The adjustment direction and adjustment amount are quickly verified by small-amplitude perturbation, avoiding system oscillations caused by direct large-amplitude adjustment. At the same time, the trend analysis results are directly converted into precise adjustment commands, effectively avoiding invalid iterations.

[0048] As can be seen from the above, this plasma detection method obtains the ion type of the plasma to be detected, extracts the corresponding standard plasma luminescence characteristics and any set of standard adjustment parameters of the resonant cavity regulator from a preset database based on the ion type, adjusts the resonant cavity regulator based on the standard adjustment parameters to obtain the luminescence characteristics of the plasma to be detected, compares the standard plasma luminescence characteristics with the luminescence characteristics, and adjusts the resonant cavity regulator a second time according to the degree of deviation between the standard plasma luminescence characteristics and the luminescence characteristics, so that the adjusted luminescence characteristics tend to be closer to the standard plasma luminescence characteristics. Thus, by adjusting the luminescence characteristics of the plasma to be detected through the standard plasma luminescence characteristics and the corresponding standard adjustment parameters of the resonant cavity regulator, the degree of ionization of the plasma can be detected. This solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the detection efficiency of plasma.

[0049] refer to Figure 2This application provides a plasma detection device for detecting plasma, comprising: Acquisition module 1 is used to acquire the ion type of the plasma to be detected; Extraction module 2 is used to extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from a preset database according to the ion type. Adjustment module 3 is used to adjust the resonant cavity regulator based on the standard adjustment parameters of the resonant cavity regulator to obtain the luminescence characteristics of the plasma to be detected; Comparison module 4 is used to compare the standard plasma emission characteristics and the emission characteristics, and to adjust the resonant cavity regulator a second time according to the degree of deviation between the standard plasma emission characteristics and the emission characteristics, so that the adjusted emission characteristics tend to be similar to the standard plasma emission characteristics.

[0050] This plasma detection device adjusts the luminescence characteristics of the plasma to be detected by using standard plasma luminescence characteristics and corresponding standard adjustment parameters of the resonant cavity modulator to detect the degree of ionization of the plasma. It solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0051] Specifically, when module 1 is executed, it acquires the ion type of the plasma to be detected, such as hydrogen ions, fluorine ions, etc., and plasmas of different ion types have different luminescent characteristics.

[0052] Before testing the plasma, a device is pre-built to record the real-time observation window of the remote plasma source cavity. This device consists of an imaging system (such as a high-definition camera) and a detection system (such as a trained machine learning algorithm model). When the gas inside the plasma source cavity is ionized, different ionization states can exhibit different colors. Furthermore, uneven ionization results in uneven color distribution within the observation window. Therefore, the imaging system can capture images of the observation window, and the detection system can determine the plasma ionization state based on the captured images. Then, based on the detection system's judgment, secondary adjustments or decompositions are performed to finalize the determination. This allows for real-time dynamic recording and storage of the remote plasma source's operating status without manual intervention, saving researchers significant time.

[0053] Specifically, when extraction module 2 extracts the corresponding plasma emission standard features and any set of resonant cavity tuner standard adjustment parameters from a preset database based on the ion type, it performs the following: Obtain the process target information for the current application scenario; Based on the ion type and process target information, select the corresponding plasma emission standard characteristics and any set of resonant cavity regulator standard adjustment parameters from the preset database.

[0054] During execution, extraction module 2 optimizes the parameter selection mechanism through the synergistic effect of process target information and ion type. Process target information provides specific process requirements for the application scenario. For example, in plasma etching and plasma cleaning, even with the same ion type, the different purposes of cleaning and etching lead to different settings for key parameters such as power, pressure, gas ratio, and whether bias voltage is applied. These parameters directly determine the core characteristics of the final plasma generated in the cavity, such as density, ion energy, and chemical activity, necessitating different plasma luminescence characteristics as targets. Ion type defines the basic physical laws of plasma luminescence. Both work together in the database query process, ensuring that the selected initial parameters simultaneously meet both basic characteristics and scenario-specific requirements. Because the process target information captures the specific constraints in the actual process, luminescence characteristics closer to the standard characteristics can be output during the initial adjustment stage, thereby reducing the initial deviation between the luminescence characteristics and the standard characteristics. This reduces the frequency and complexity of subsequent secondary adjustments, forming a complete technical chain from parameter selection to adjustment execution.

[0055] In a pre-defined database, through pre-conducted experiments, the standard luminescence characteristics (including text and image representations) of specific plasmas under different application scenarios and ideal conditions are systematically established. These characteristics are then correlated with the initial adjustment parameters of the resonant cavity regulator required to achieve the standard characteristics (multiple sets of initial adjustment parameters can be obtained through multiple experiments to achieve the standard characteristics, including combinations of parameters such as voltage, frequency, and power of the resonant cavity regulator or physical adjustment parameters (such as the combination of parameters of depth, spacing, and radius of the three adjustable pins in a three-pin tuner)). This forms a queryable correspondence, which is recorded in the database. This yields the standard luminescence characteristics of different plasmas under different application scenarios and ideal conditions, as well as multiple sets of standard adjustment parameters for the resonant cavity regulator. This provides data support and directional guidance for subsequent automated and precise adjustment, and is key to achieving systematic rather than blind adjustment.

[0056] Specifically, when the adjustment module 3 is executed, it precisely adjusts the resonant cavity regulator based on the extracted standard adjustment parameters of the resonant cavity regulator. The luminescence characteristics of the plasma to be detected can be obtained through the imaging system. This process achieves initial adjustment through standard parameters, ensuring the reliability of the luminescence characteristic data.

[0057] Specifically, when comparing the standard plasma emission characteristics and the emission characteristics, and adjusting the resonant cavity regulator a second time based on the degree of deviation between the standard plasma emission characteristics and the emission characteristics, so that the adjusted emission characteristics tend to be closer to the standard plasma emission characteristics, the comparison module 4 performs the following: By comparing the luminescence characteristics with the standard characteristics of plasma luminescence, the degree of deviation is obtained; Determine whether the degree of deviation is less than the preset deviation threshold; if so, determine that the luminescence characteristics tend to the standard characteristics of plasma luminescence; if not, adjust the resonant cavity regulator according to the degree of deviation until the degree of deviation after adjustment is less than the preset deviation threshold, and determine that the luminescence characteristics after adjustment tend to the standard characteristics of plasma luminescence.

[0058] During execution, comparison module 4 calculates the quantifiable degree of deviation between the luminescence characteristics and the standard plasma luminescence characteristics at various cavity observation window positions by comparing spectral data (e.g., calculating their root mean square error and relative root mean square error based on spectral data) or chromaticity space coordinates (e.g., calculating their deviation in color space based on chromaticity space coordinates). Based on a preset deviation threshold, logical judgment is performed. If the deviation at each cavity observation window position is less than the preset deviation threshold, the adjustment process is immediately terminated, confirming that the error is within an acceptable range and that the luminescence characteristics are converging towards the standard plasma luminescence characteristics, avoiding redundant operations. If any cavity observation window position has a deviation greater than or equal to the preset deviation threshold, an adjustment action is triggered. The adjustment amount is dynamically determined based on the magnitude of the deviation, ensuring that the adjusted deviation is less than the preset deviation threshold. This process forms a closed-loop feedback mechanism by cyclically executing adjustment and verification steps, ensuring continuous iteration until the deviation converges to an acceptable range under the influence of interference factors such as electrode aging or changes in environmental temperature and humidity, thereby stably achieving accurate matching of luminescence characteristics in complex operating conditions. The preset deviation threshold can be set according to actual needs. Spectral data or chromaticity space coordinates are existing technologies and will not be described in detail here.

[0059] Specifically, the comparison module 4 adjusts the resonant cavity regulator according to the degree of deviation until the adjusted deviation is less than a preset deviation threshold. When it is determined that the adjusted luminescence characteristics tend to be similar to the standard characteristics of plasma luminescence, the following steps are executed: Based on the degree of deviation, the resonant cavity modulator is adjusted tentatively to obtain the luminescence characteristics after tentative adjustment; Based on the changing trend of the deviation before and after the trial adjustment, determine the adjustment direction and adjustment amount of the resonant cavity adjuster; Based on the adjustment direction and adjustment amount, the resonant cavity regulator is adjusted until the degree of deviation after adjustment is less than the preset deviation threshold, and the luminescence characteristics after adjustment are determined to be close to the standard characteristics of plasma luminescence.

[0060] During execution, comparison module 4 makes tentative adjustments based on the degree of deviation to obtain real-time response data and acquire the luminescence characteristics after tentative adjustment. This tentative adjustment refers to applying small-amplitude perturbations to the resonant cavity modulator to safely obtain the system response characteristics without inducing large oscillations.

[0061] Specifically, when comparing module 4 to determine the adjustment direction and amount of the resonant cavity adjuster based on the changing trend of the deviation before and after the trial adjustment, it performs the following: Calculate the new deviation between the luminescence characteristics after trial adjustment and the standard plasma luminescence characteristics; Calculate the difference between the new deviation and the degree of deviation to determine the trend of the degree of deviation before and after the trial adjustment; Based on the changing trend and the adjustment amount during trial adjustments, determine the adjustment direction and adjustment amount of the resonant cavity regulator.

[0062] When comparison module 4 is executed, the luminescence characteristics of the plasma under test change after trial adjustments, resulting in a change in the deviation between the adjusted luminescence characteristics and the standard plasma luminescence characteristics. Therefore, a new deviation between the adjusted luminescence characteristics and the standard plasma luminescence characteristics is calculated.

[0063] Specifically, when comparing module 4 to calculate the difference between the new deviation and the degree of deviation, in order to determine the trend of the change in the degree of deviation before and after the trial adjustment, the following is executed: The difference between the new deviation and the degree of deviation is calculated; Determine if the deviation difference is less than zero; if so, determine that the adjustment direction corresponding to the new deviation shows a positive trend, and obtain the trend of the deviation degree before and after the trial adjustment; if not, determine that the adjustment direction corresponding to the new deviation shows a negative trend, and obtain the trend of the deviation degree before and after the trial adjustment.

[0064] During execution, comparison module 4 quantifies the change in deviation after tentative adjustment into a specific numerical value by calculating the difference between the new deviation and the degree of deviation. Based on the sign determination mechanism of the deviation difference, the trend of change is directly determined by comparing the deviation difference with zero: when the deviation difference is less than zero, it indicates that the new deviation is smaller than the original deviation, the adjustment direction is effective, and it is determined to be a positive trend; when the deviation difference is not less than zero, it indicates that the new deviation is larger than the original deviation, the adjustment direction is ineffective, and it is determined to be a negative trend.

[0065] Specifically, when comparing module 4 to determine the adjustment direction and amount of the resonant cavity adjuster based on the changing trend and the adjustment amount during trial adjustments, the following is executed: Based on the changing trend, the adjustment direction of the resonant cavity modulator is determined; The adjustment amount of the resonant cavity regulator is determined based on the ratio of the deviation difference corresponding to the trend of change and the adjustment amount during trial adjustment.

[0066] When the comparison module 4 is executed, it locks the adjustment direction by judging the trend of change, ensuring that subsequent adjustment operations are always carried out in the direction of reducing deviation (i.e., each adjustment shows a positive trend of change), avoiding oscillation or divergence in the adjustment process, thereby guiding the plasma luminescence characteristics to stably approach the standard characteristics.

[0067] Based on the determined adjustment direction, the adjustment magnitude is further quantified. By calculating the proportional relationship between the deviation difference and the tentative adjustment amount, it can be inferred how much adjustment is needed to bring the deviation to a preset threshold under the current trend. This proportional relationship can be linear or a more complex nonlinear relationship, depending on the response characteristics of the plasma system. By analyzing the proportional relationship between the deviation difference and the tentative adjustment amount, the "gain" or "sensitivity" of the current adjustment parameter can be evaluated, thereby determining the adjustment amount of the resonant cavity regulator. For example, if a small tentative adjustment amount leads to a large deviation change, it indicates that the parameter has a significant and sensitive impact on the luminescence characteristics, and the subsequent adjustment amount should be reduced accordingly to avoid overshoot; conversely, if a large tentative adjustment amount only leads to a small deviation change, it indicates that the parameter has low sensitivity, and the subsequent adjustment amount can be appropriately increased to accelerate convergence. Determining the adjustment amount based on the proportional relationship allows the adjustment process to adaptively adjust the step size, achieving rapid convergence when the deviation is large and precise fine-tuning when the deviation is small, thereby achieving fast and stable convergence under complex nonlinear or coupled relationships, ensuring accurate calibration of the plasma luminescence characteristics.

[0068] During execution, comparison module 4 determines the adjustment direction and amount based on the changing trend of the deviation before and after the trial adjustment. It then adjusts the resonant cavity regulator until the deviation after adjustment is less than a preset deviation threshold, confirming that the luminescence characteristics after adjustment tend to conform to the standard characteristics of plasma luminescence. By quickly verifying the adjustment direction and amount through small-amplitude perturbations, it avoids system oscillations caused by direct large-amplitude adjustments. At the same time, it directly converts the trend analysis results into precise adjustment commands, effectively avoiding ineffective iterations.

[0069] As can be seen from the above, this plasma detection device acquires the ion type of the plasma to be detected, extracts the corresponding standard plasma luminescence characteristics and any set of standard adjustment parameters of the resonant cavity regulator from a preset database based on the ion type, adjusts the resonant cavity regulator based on the standard adjustment parameters, obtains the luminescence characteristics of the plasma to be detected, compares the standard plasma luminescence characteristics with the luminescence characteristics, and adjusts the resonant cavity regulator a second time according to the degree of deviation between the standard plasma luminescence characteristics and the luminescence characteristics, so that the adjusted luminescence characteristics tend to be the standard plasma luminescence characteristics. Thus, by adjusting the luminescence characteristics of the plasma to be detected through the standard plasma luminescence characteristics and the corresponding standard adjustment parameters of the resonant cavity regulator, the degree of ionization of the plasma can be detected. This solves the problems of low efficiency, strong subjectivity and inability to capture state changes in real time caused by manual detection in existing plasma detection methods. It can automatically identify plasma characteristics and dynamically adjust detection parameters to eliminate dependence on human experience and improve the efficiency of plasma detection.

[0070] Please refer to Figure 3 , Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. The electronic device includes a processor 301 and a memory 302. The processor 301 and the memory 302 are interconnected and communicate with each other through a communication bus 303 and / or other forms of connection mechanism (not shown). The memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the plasma detection method in any optional implementation of the above embodiment, so as to achieve the following functions: obtaining the ion type of the plasma to be detected; extracting the corresponding plasma luminescence standard features and any set of resonant cavity regulator standard adjustment parameters from a preset database according to the ion type; adjusting the resonant cavity regulator based on the resonant cavity regulator standard adjustment parameters to obtain the luminescence features of the plasma to be detected; comparing the plasma luminescence standard features and the luminescence features; and adjusting the resonant cavity regulator a second time according to the degree of deviation between the plasma luminescence standard features and the luminescence features, so that the adjusted luminescence features tend to be the plasma luminescence standard features.

[0071] This application provides a computer-readable storage medium storing a computer program. When the computer program is executed by a processor, it executes the plasma detection method in any optional implementation of the above embodiments to achieve the following functions: obtaining the ion type of the plasma to be detected; extracting the corresponding plasma luminescence standard features and any set of resonant cavity regulator standard adjustment parameters from a preset database according to the ion type; adjusting the resonant cavity regulator based on the resonant cavity regulator standard adjustment parameters to obtain the luminescence features of the plasma to be detected; comparing the plasma luminescence standard features and the luminescence features; and adjusting the resonant cavity regulator a second time according to the degree of deviation between the plasma luminescence standard features and the luminescence features, so that the adjusted luminescence features tend to be the plasma luminescence standard features. The storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as Static Random Access Memory (SRAM), Electrically Erasable Programmable Read-Only Memory (EEPROM), Erasable Programmable Read Only Memory (EPROM), Programmable Red-Only Memory (PROM), Read-Only Memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk.

[0072] In the embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0073] Furthermore, the units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment, depending on actual needs.

[0074] Furthermore, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0075] In this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations.

[0076] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A plasma detection method for detecting plasma, characterized in that, Including the following steps: Obtain the ion type of the plasma to be detected; Based on the ion type, extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from a preset database; Based on the standard adjustment parameters of the resonant cavity modulator, the resonant cavity modulator is adjusted to obtain the luminescence characteristics of the plasma to be detected; The plasma emission standard feature and the emission feature are compared, and the resonant cavity regulator is adjusted a second time according to the degree of deviation between the plasma emission standard feature and the emission feature, so that the adjusted emission feature tends to the plasma emission standard feature.

2. The plasma detection method according to claim 1, characterized in that, Based on the ion type, the corresponding plasma emission standard features and any set of resonant cavity tuner standard adjustment parameters are extracted from a preset database, including: Obtain the process target information for the current application scenario; Based on the ion type and the process target information, select the corresponding plasma emission standard characteristics and any set of resonant cavity regulator standard adjustment parameters from the preset database.

3. The plasma detection method according to claim 1, characterized in that, Comparing the plasma emission standard feature with the emission feature, and based on the degree of deviation between the plasma emission standard feature and the emission feature, adjusting the resonant cavity regulator a second time to make the adjusted emission feature tend towards the plasma emission standard feature, including: By comparing the described luminescence characteristics with the standard plasma luminescence characteristics, the degree of deviation is obtained; Determine whether the degree of deviation is less than a preset deviation threshold; if yes, determine that the luminescence characteristic tends to the standard plasma luminescence characteristic; if no, adjust the resonant cavity regulator according to the degree of deviation until the adjusted degree of deviation is less than the preset deviation threshold, and determine that the adjusted luminescence characteristic tends to the standard plasma luminescence characteristic.

4. The plasma detection method according to claim 3, characterized in that, Based on the degree of deviation, the resonant cavity modulator is adjusted until the adjusted deviation is less than a preset deviation threshold, and the adjusted luminescence characteristics are determined to tend towards the standard plasma luminescence characteristics, including: Based on the degree of deviation, the resonant cavity modulator is tentatively adjusted to obtain the light emission characteristics after tentative adjustment; Based on the changing trend of the deviation before and after the trial adjustment, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined; Based on the adjustment direction and the adjustment amount, the resonant cavity regulator is adjusted until the degree of deviation after adjustment is less than the preset deviation threshold, and the luminescence characteristics after adjustment are determined to be close to the standard plasma luminescence characteristics.

5. The plasma detection method according to claim 4, characterized in that, Based on the changing trend of the deviation before and after the trial adjustment, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined, including: Calculate the new deviation between the experimentally adjusted luminescence characteristics and the standard plasma luminescence characteristics; Calculate the difference between the new deviation and the degree of deviation to determine the trend of the change in the degree of deviation before and after the trial adjustment; Based on the changing trend and the adjustment amount during trial adjustments, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined.

6. The plasma detection method according to claim 5, characterized in that, Calculating the difference between the new deviation and the degree of deviation to determine the trend of change in the degree of deviation before and after the trial adjustment includes: The difference between the new deviation and the degree of deviation is calculated; Determine whether the deviation difference is less than zero; if yes, determine that the adjustment direction corresponding to the new deviation shows a positive trend, and obtain the trend of the deviation degree before and after the trial adjustment; if no, determine that the adjustment direction corresponding to the new deviation shows a negative trend, and obtain the trend of the deviation degree before and after the trial adjustment.

7. The plasma detection method according to claim 5, characterized in that, Based on the changing trend and the adjustment amount during trial adjustments, the adjustment direction and adjustment amount of the resonant cavity adjuster are determined, including: Based on the aforementioned trend, the adjustment direction of the resonant cavity modulator is determined; The adjustment amount of the resonant cavity regulator is determined based on the ratio of the deviation difference corresponding to the changing trend to the adjustment amount during trial adjustment.

8. A plasma detection device for detecting plasma, characterized in that, include: The acquisition module is used to acquire the ion type of the plasma to be detected; The extraction module is used to extract the corresponding plasma emission standard features and any set of resonant cavity modulator standard adjustment parameters from a preset database according to the ion type. An adjustment module is used to adjust the resonant cavity regulator based on the standard adjustment parameters of the resonant cavity regulator to obtain the luminescence characteristics of the plasma to be detected. The comparison module is used to compare the plasma emission standard feature and the emission feature, and adjust the resonant cavity regulator a second time according to the degree of deviation between the plasma emission standard feature and the emission feature, so that the adjusted emission feature tends to the plasma emission standard feature.

9. An electronic device, characterized in that, It includes a processor and a memory, the memory storing a computer program executable by the processor, which, when executing the computer program, performs the steps of the plasma detection method as described in any one of claims 1-7.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it performs the steps of the plasma detection method as described in any one of claims 1-7.

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