A spray device in a semiconductor cleaning equipment and the semiconductor cleaning equipment

Abstract

This invention relates to the field of spray device technology, and more particularly to a spray device and semiconductor cleaning equipment. The technical solution includes a body, within which a delivery pipe is rotatably mounted. It also includes multiple spray heads fixedly mounted on and connected to the delivery pipe, with multiple spray pipes rotatably mounted on each spray head, and a branch pressure regulating component connected to the delivery pipe and periodically adjusting the water pressure inside the delivery pipe. This invention effectively solves the problem of uneven cleaning effects between near and far areas caused by the three-dimensional structure of the quartz boat in semiconductor cleaning, significantly improving the impact force and cleaning effect of the cleaning solution on the far end. Simultaneously, it avoids the problems of overspraying at the near end, equipment damage, droplet splashing, and chemical waste caused by compensating for continuous high pressure at the far end, achieving a precise, efficient, and uniform cleaning process.

Description

Technical Field

[0001] This invention relates to the field of spray device technology, and more particularly to a spray device and semiconductor cleaning equipment in a semiconductor cleaning system. Background Technology

[0002] The spray system in semiconductor cleaning equipment is a key subsystem for ensuring chip manufacturing yield, and its technological development closely follows the stringent contamination control requirements of advanced processes. In core processes such as high-temperature diffusion and oxidation, high-purity quartz boats, as the core carriers of wafers, are crucial. If trace particles, metallic impurities, and organic residues on their surface are not thoroughly removed, they will directly transfer to the silicon wafer surface, leading to fatal defects such as short circuits and leakage, thus severely impacting the performance and yield of integrated circuits. Traditional immersion cleaning methods, due to inherent limitations such as cross-contamination and cleaning dead zones, are gradually being replaced by vertical rotating spray technology. This technology sprays ultrapure chemical solutions onto the three-dimensional complex surface of a rotating quartz boat, utilizing the synergistic effect of chemical dissolution and physical impact to achieve highly efficient cleaning.

[0003] Quartz boats have complex structures, with their precision grooves directly contacting the wafer. Any residual particles, metallic impurities, or organic matter can be directly transferred to the silicon wafer surface, leading to device failure. To thoroughly clean the inside of the grooves, the spraying device employs a reciprocating oscillating mechanism, designed to allow the chemical solution to penetrate deep into the groove at a specific angle. However, this technology faces a classic dilemma: due to significant distance differences between the nozzle and various parts of the three-dimensional quartz boat, the area near the nozzle plane is closest, while the top and bottom edges of the quartz boat are furthest. According to fluid dynamics principles, the kinetic energy of the solution decreases, the flow rate decreases, and the impact force weakens as the solution is sprayed to a distance, severely reducing the physical cleaning effect of removing stubborn particles. However, simply increasing the pump pressure to compensate for the flow rate at the far end would result in excessively high fluid impact pressure on the near-distance area. This could not only cause physical damage or microcracks to the delicate structure of the fragile quartz boat, such as the support teeth, but also exacerbate the risk of secondary particle contamination due to solution splashing, while significantly increasing the consumption of expensive chemicals. Summary of the Invention

[0004] The purpose of this invention is to address the problems existing in the prior art by proposing a spray device and a semiconductor cleaning device that can maintain a good cleaning effect on both the upper and lower sides of the quartz boat and prevent mechanical damage to the nearby quartz boat.

[0005] On one hand, this application proposes a spray device in a semiconductor cleaning equipment, including a body, in which a delivery pipe is rotatably mounted, and further comprising:

[0006] Multiple spray heads are fixedly installed on and connected to the conveying pipe, and multiple spray pipes are rotatably installed on the spray heads. An angle adjustment mechanism for driving the spray pipes to swing is installed inside the machine body.

[0007] A branch pressure regulating component, which is connected to the conveying pipe and periodically adjusts the water pressure inside the conveying pipe, the branch pressure regulating component includes a receiving box connected to the conveying pipe and a piston that is slidably and sealingly connected inside the receiving box;

[0008] A power unit installed inside the machine body that provides power to the angle adjustment mechanism and the branch pressure regulating component. The power unit drives the nozzle to reciprocate for one cycle and drives the piston to reciprocate for two cycles.

[0009] Optionally, the delivery pipe is provided with multiple sets of connection holes, the spray head includes a connection box, the connection box is provided with multiple liquid inlet holes communicating with the connection holes, the connection box is provided with multiple connection windows, the spray pipe is rotatably installed inside the connection window, and a flexible sealing plate is fixedly installed between the connection window and the spray pipe to seal the connection window.

[0010] Multiple first sealing rings are fixedly installed between the delivery pipe and the connecting box. The end of the nozzle is provided with a connector, which is detachably connected to either the high-pressure nozzle or the atomizing nozzle.

[0011] Optionally, the connecting box is provided with multiple sets of insertion holes corresponding to the nozzles, and pins are inserted into the insertion holes. The nozzles are rotatably connected to the connecting box through the pins.

[0012] Optionally, the angle adjustment mechanism includes an adjustment rod rotatably mounted on the nozzle, and multiple adjustment rods located on the same connecting box are rotatably mounted on a lifting block. The lifting block is coaxially arranged and slidably connected to the delivery pipe, and multiple rolling elements are rotatably mounted inside the lifting block.

[0013] The two nozzles located on the upper and lower sides and adjacent to each other are rotatably connected by a synchronizing rod. The synchronizing rod, the nozzles connected to it, and the connecting line of the upper and lower side pins form a parallelogram.

[0014] Optionally, a plurality of second sealing rings are fixedly installed on the piston.

[0015] Optionally, the power component includes a first motor fixedly mounted on the machine body and a transmission shaft fixedly mounted on the output shaft of the first motor and rotatably connected to the machine body;

[0016] A first crank is rotatably mounted on the machine body, a first connecting rod is rotatably mounted on the first crank, a first push rod is rotatably mounted on the first connecting rod, and the first push rod is fixedly connected to the piston and slidably connected to the receiving box.

[0017] A second crank is rotatably mounted on the machine body, a second connecting rod is rotatably mounted on the second crank, a second push rod is rotatably mounted on the second connecting rod and slidably connected to the machine body, a connecting plate is fixedly mounted on the second push rod, and a round rod is fixedly mounted on the uppermost lifting block, and the connecting plate is fixedly connected to the round rod.

[0018] The power unit further includes a first transmission assembly located between the drive shaft and the first crank, and a second transmission assembly located between the drive shaft and the second crank, wherein the transmission ratio of the second transmission assembly is twice that of the first transmission assembly.

[0019] Optionally, the first transmission assembly includes a first gear fixedly mounted on a transmission shaft, a second gear fixedly mounted on a first crank, and an idler gear rotatably mounted on the machine body and meshing with the first gear and the second gear, wherein the pitch circle diameter of the second gear is twice that of the first gear;

[0020] The second transmission assembly includes a third gear fixedly mounted on a transmission shaft and a fourth gear fixedly mounted on a second crank and meshing with the third gear, wherein the third gear and the fourth gear are gears of the same specification.

[0021] Optionally, a pressure compensation component is installed on the receiving box. The pressure compensation component additionally compensates the pressure in the delivery pipe during the latter half of the piston's movement. The pressure compensation component includes an air bladder fixedly installed on the piston and a flexible air storage chamber fixedly installed on the outside of the receiving box. The air bladder and the flexible air storage chamber are connected by a hose. A pressure plate is fixedly installed on the first push rod.

[0022] Optionally, the machine body is equipped with a pipe drive assembly for driving the conveying pipe to rotate. The pipe drive assembly includes a second motor fixedly mounted on the machine body, a fifth gear fixedly mounted on the output shaft of the second motor, and a sixth gear fixedly mounted on the conveying pipe. The fifth gear and the sixth gear mesh with each other.

[0023] On the other hand, this application proposes a semiconductor cleaning device, including a spray chamber, an equipment installation chamber, and a spray system disposed inside the spray chamber, wherein the spray system is the spray device in the semiconductor cleaning device described above.

[0024] In summary, this application includes at least one of the following beneficial technical effects:

[0025] This spray device effectively solves the problem of uneven cleaning effect between near and far areas caused by the three-dimensional structure of the quartz boat in semiconductor cleaning. It achieves precise synchronization and frequency multiplication of the nozzle oscillation and hydraulic adjustment under the drive of a single power source, ensuring that the system pressure is periodically increased each time the nozzle is aimed at the far area for spraying. This significantly improves the impact force of the liquid on the far end and the cleaning effect, while avoiding the problems of overspraying at the near end, equipment damage, droplet splashing and chemical waste caused by the continuous high pressure at the far end. It achieves a precise, efficient and uniform cleaning process. Attached Figure Description

[0026] Figure 1 Schematic diagram of the spray device in semiconductor cleaning equipment Figure 1 ;

[0027] Figure 2 A schematic diagram of the internal structure of the spray device in a semiconductor cleaning equipment;

[0028] Figure 3 Schematic diagram of the spray device in semiconductor cleaning equipment Figure 2 ;

[0029] Figure 4 Schematic diagram of the spray device in semiconductor cleaning equipment Figure 3 ;

[0030] Figure 5 This is a schematic diagram of the conveying pipe structure;

[0031] Figure 6 for Figure 2 A magnified view of a section at point A in the middle;

[0032] Figure 7 for Figure 2 A magnified view of a section at point B in the middle;

[0033] Figure 8 for Figure 2 A magnified view of a section at point C;

[0034] Figure 9 for Figure 3 A magnified view of a section at point E in the middle;

[0035] Figure 10 for Figure 3 A magnified view of a section at point D;

[0036] Figure 11 for Figure 4 A magnified view of a section at point F.

[0037] Reference numerals: 1. Conveying pipe; 11. Connecting hole; 12. Rotary joint; 121. Connecting body; 122. Connecting block; 123. Sealing ring; 124. Connecting pipe; 125. Flange;

[0038] 2. Spray head; 21. Connecting box; 22. Liquid inlet; 23. Spray pipe; 24. Flexible sealing plate; 25. First sealing ring; 26. Connector; 27. Insertion hole; 28. Pin;

[0039] 3. Angle adjustment mechanism; 31. Adjusting rod; 32. Lifting block; 33. Rolling element; 34. Synchronizing rod; 35. Round rod;

[0040] 4. Branch pressure regulating component; 41. Receiving box; 42. Piston; 43. Second sealing ring;

[0041] 5. Power components; 51. First motor; 52. Drive shaft; 53. First crank; 531. First connecting rod; 532. First push rod; 54. Second crank; 541. Second connecting rod; 542. Second push rod; 543. Connecting plate; 55. First transmission assembly; 551. First gear; 552. Second gear; 553. Idler gear; 56. Second transmission assembly; 561. Third gear; 562. Fourth gear;

[0042] 6. Pipeline drive assembly; 61. Second motor; 62. Fifth gear; 63. Sixth gear;

[0043] 7. Pressure compensation assembly; 71. Airbag; 72. Flexible air reservoir; 73. Hoses; 74. Pressure plate;

[0044] 8. Equipment installation room; 81. Spray room. Detailed Implementation

[0045] The technical solution of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0046] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0047] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0048] In the description of this application, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0049] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0050] like Figure 1 , Figure 2 , Figure 5 , Figure 6 , Figure 7 As shown, this application proposes a spray device in a semiconductor cleaning equipment, including a body, a conveying pipe 1 rotatably installed inside the body, and a plurality of spray heads 2 fixedly installed on the conveying pipe and connected to the conveying pipe 1. A plurality of spray pipes 23 are rotatably installed on the spray heads 2. The chemical solution enters the interior of the spray head 2 through the conveying pipe 1 and is finally sprayed out through the plurality of spray pipes 23. The sprayed chemical solution will come into contact with the quartz boat and clean the quartz boat.

[0051] A rotary joint 12 is installed on the top of the delivery pipe 1. The rotary joint 12 includes a connector 121 fixedly installed on the top of the delivery pipe 1 and a connector 122 fixedly installed on the machine body. The connector 122 and the connector 121 are rotatably connected, and multiple sealing rings 123 are installed between the connector 122 and the connector 121. The sealing rings 123 can prevent the liquid medicine from flowing out through the connection between the connector 122 and the connector 121. The connector 122 is provided with a connecting pipe 124, and the connecting pipe 124 is provided with a flange 125. The flange 125 is used to connect to the liquid medicine delivery equipment, such as a delivery pump.

[0052] Furthermore, the delivery pipe 1 is provided with multiple sets of connection holes 11, and the spray head 2 includes a connection box 21. The connection box 21 is provided with multiple liquid inlet holes 22 that communicate with the connection holes 11. The liquid medicine entering the delivery pipe 1 will enter the connection box 21 through the connection holes 11 and the liquid inlet holes 22 in sequence, and finally be sprayed out through the spray pipe 23. The connection box 21 is provided with multiple connection windows, and the spray pipe 23 is rotatably installed inside the connection window. The connection window provides sufficient space for the rotation of the spray pipe 23. A flexible sealing plate 24 is fixedly installed between the connection window and the spray pipe 23 to block the connection window. The flexible sealing plate 24 allows the spray pipe 23 to rotate freely and prevents the liquid medicine from flowing out through the connection window.

[0053] It is worth noting that multiple first sealing rings 25 are fixedly installed between the delivery pipe 1 and the connecting box 21. The end of the nozzle 23 is provided with a connector 26. The connector 26 is detachably connected to either the high-pressure nozzle or the atomizing nozzle. The high-pressure nozzle will spray out a jet, which will mainly enter the groove of the quartz boat to clean the inside of the groove. The atomizing nozzle will spray out a uniform mist of liquid, which will cover the entire quartz boat and clean the surface of the entire quartz boat.

[0054] The connecting box 21 is provided with multiple sets of insertion holes 27 corresponding to the nozzle 23. A pin 28 is inserted into the insertion hole 27. The nozzle 23 is rotatably connected to the connecting box 21 through the pin 28. The rotatable connection between the nozzle 23 and the connecting box 21 is completed through the pin 28, which facilitates the replacement of the nozzle 23.

[0055] As one implementation method, such as Figure 4 and Figure 11 As shown, a pipe drive assembly 6 is installed inside the machine body to drive the conveying pipe 1 to rotate. The pipe drive assembly 6 includes a second motor 61 fixedly installed on the machine body. A fifth gear 62 is fixedly installed on the output shaft of the second motor 61, and a sixth gear 63 is fixedly installed on the conveying pipe 1. The fifth gear 62 and the sixth gear 63 mesh with each other. By driving the fifth gear 62 through the second motor 61, the sixth gear 63 can be driven to rotate, which in turn drives the conveying pipe 1 to rotate. The rotating conveying pipe 1 can drive multiple connecting boxes 21 and spray nozzles 23 to rotate. The rotating spray nozzles 23 can evenly spray the quartz boats installed around the conveying pipe 1.

[0056] As one implementation method, such as Figure 3 and Figure 9As shown, the machine body is equipped with an angle adjustment mechanism 3 that drives the nozzle 23 to swing. By adjusting the spray angle of the nozzle 23 through the angle adjustment mechanism 3, the nozzle 23 can spray both the upper and lower sides of the quartz boat and spray the liquid at a certain angle, which makes it easier for the liquid to enter and contact the inner wall of the groove of the quartz boat. The angle adjustment mechanism 3 includes an adjustment rod 31 rotatably mounted on the nozzle 23. Multiple adjustment rods 31 located on the same connecting box 21 are rotatably mounted on a lifting block 32. The lifting block 32 is coaxially arranged and slidably connected to the delivery pipe 1. When the lifting block 32 slides up and down, it will drive the multiple adjustment rods 31 to swing. Through the transmission of the adjustment rods 31, the nozzle 23 can be driven to rotate. The rotating nozzle 23 can then spray the upper and lower sides of the quartz boat evenly. Multiple rolling elements 33 are rotatably mounted inside the lifting block 32. The setting of the rolling elements 33 can reduce the resistance encountered by the lifting block 32 when it rises and falls.

[0057] Furthermore, the two adjacent nozzles 23 located on the upper and lower sides are rotatably connected by a synchronizing rod 34. Since the connecting lines of the synchronizing rod 34, the nozzles 23 connected to it, and the pins 28 on the upper and lower sides form a parallelogram, the nozzles 23 on the upper and lower sides form two parallel sides of the parallelogram. These two sides will remain parallel and rotate synchronously. Through the transmission of the synchronizing rod 34, the nozzles 23 on the upper and lower sides can rotate synchronously. By setting multiple spray heads 2, spray heads 2 at different heights spray different height ranges of the quartz boat.

[0058] Furthermore, such as Figure 8 As shown, the spraying device in this embodiment also includes a branch pressure regulating component 4. The branch pressure regulating component 4 is connected to the conveying pipe 1 and periodically adjusts the water pressure inside the conveying pipe 1. This allows the hydraulic pressure inside the conveying pipe 1 to increase when the spray pipe 23 sprays towards the upper and lower sides, so that when spraying the sides of the quartz boat, the jet can be prevented from failing to effectively impact the inside of the groove of the quartz boat. The branch pressure regulating component 4 includes a receiving box 41 connected to the conveying pipe 1 and a piston 42 that is slidably and sealingly connected to the inside of the receiving box 41. Multiple second sealing rings 43 are fixedly installed on the piston 42. The second sealing rings 43 seal the tiny gap between the piston 42 and the receiving box 41. The effective volume inside the receiving box 41 can be changed by moving the piston 42.

[0059] When piston 42 retracts into container 41, it is equivalent to instantly increasing the total effective volume of the pipeline system. Liquid will instantly fill this newly opened space. In order to fill this space, the overall flow rate of liquid in the main pipeline will decrease.

[0060] When piston 42 pushes outward into container 41, it is equivalent to instantly reducing the total effective volume of the piping system. This action will squeeze the liquid in the branch and push it back into the main pipe, which is equivalent to instantly injecting an additional flow into the main pipe, causing the overall flow velocity of the liquid in the main pipe to increase instantly.

[0061] like Figure 3 , Figure 8 , Figure 9 , Figure 10 As shown, the spraying device also includes a power unit 5 installed inside the machine body, which provides power to the angle adjustment mechanism 3 and the branch pressure regulating component 4. When the nozzle 23 moves up and down for one cycle, that is, moves from the top to the bottom and then back to the top, it will spray the upper half and the lower half twice. The upper half and the lower half are symmetrical, that is, the distance from the top and the bottom are equal. Without considering the influence of gravity, when sweeping from the middle to the top, that is, when the piston 42 needs to complete one movement from the bottom to the top, the power unit 5 needs to drive the nozzle 23 to swing back and forth for one cycle and drive the piston 42 to move back and forth for two cycles.

[0062] Furthermore, the power component 5 includes a first motor 51 fixedly mounted on the machine body and a transmission shaft 52 fixedly mounted on the output shaft of the first motor 51 and rotatably connected to the machine body. The first motor 51 will drive the transmission shaft 52 to rotate. A first crank 53 is rotatably mounted on the machine body. A first connecting rod 531 is rotatably mounted on the first crank 53. A first push rod 532 is rotatably mounted on the first connecting rod 531. The first push rod 532 is fixedly connected to the piston 42 and slidably connected to the housing 41. When the first crank 53 rotates, it will drive the first connecting rod 531 to rotate, and then drive the piston 42 to reciprocate through the first push rod 532.

[0063] A second crank 54 is rotatably mounted on the machine body. A second connecting rod 541 is rotatably mounted on the second crank 54. A second push rod 542, which is slidably connected to the machine body, is rotatably mounted on the second connecting rod 541. A connecting plate 543 is fixedly mounted on the second push rod 542. A round rod 35 is fixedly mounted on the uppermost lifting block 32. The connecting plate 543 is fixedly connected to the round rod 35. Rotating the second crank 54 will drive the second connecting rod 541 to rotate, which in turn will drive the connecting plate 543 to move up and down through the second push rod 542. And through the transmission of the round rod 35, the uppermost lifting block 32 will move up and down.

[0064] In order for the piston 42 to reciprocate for two cycles when the nozzle 23 reciprocates for one cycle, the angular velocity of the first crank 53 needs to be twice that of the second crank 54.

[0065] like Figure 10As shown, in this embodiment, the power component 5 further includes a first transmission component 55 located between the transmission shaft 52 and the first crank 53, and a second transmission component 56 located between the transmission shaft 52 and the second crank 54. The transmission ratio of the second transmission component 56 is twice that of the first transmission component 55. By changing the transmission ratio through the first transmission component 55 and the second transmission component 56, the angular velocity of the first crank 53 can be made twice that of the second crank 54.

[0066] Furthermore, the first transmission assembly 55 includes a first gear 551 fixedly mounted on the transmission shaft 52, a second gear 552 fixedly mounted on the first crank 53, and an idler gear 553 rotatably mounted on the machine body and meshing with the first gear 551 and the second gear 552. The first gear 551 drives the second gear 552 to rotate, and since the pitch circle diameter of the first gear 551 is twice that of the second gear 552, the rotational speed of the second gear 552 is twice that of the first gear 551.

[0067] The second transmission assembly 56 includes a third gear 561 fixedly mounted on the transmission shaft 52 and a fourth gear 562 fixedly mounted on the second crank 54 and meshing with the third gear 561. The third gear 561 and the fourth gear 562 are gears of the same specification, so that the rotational speeds of the third gear 561 and the fourth gear 562 are equal. Since the third gear 561 and the first gear 551 rotate coaxially, the rotational speeds of the third gear 561 and the first gear 551 are equal. That is, the rotational speed of the second gear 552 is twice that of the fourth gear 562, and the rotational speed of the first crank 53 is twice that of the second crank 54.

[0068] like Figure 8 As shown, in this embodiment, a pressure compensation component 7 is installed on the receiving box 41. The pressure compensation component 7 additionally compensates the pressure in the delivery pipe 1 during the latter half of the piston's movement. The pressure compensation component 7 includes an air bladder 71 fixedly installed on the piston 42 and a flexible air storage chamber 72 fixedly installed on the outside of the receiving box 41. The air bladder 71 and the flexible air storage chamber 72 are connected by a hose 73. A pressure plate 74 is fixedly installed on the first push rod 532. Because the sprayed liquid is affected by gravity, when spraying upwards, the liquid needs to be subjected to greater pressure. The force causes the pressure inside the delivery pipe 1 to not bend and maintain a symmetrical state when the nozzle 23 moves upward from the middle and downward from the middle. At this time, the air bag 71 supplements the pressure inside the delivery pipe 1 when the nozzle 23 rotates upward. When the nozzle 23 rotates upward, the pressure plate 74 will squeeze the flexible air storage chamber 72, which can input gas into the air bag 71, increase the air pressure of the air bag 71, and act on the liquid medicine through the air bag 71, thereby increasing the speed at which the nozzle 23 sprays liquid medicine when it rises.

[0069] On the other hand, this application proposes a semiconductor cleaning device, including a spray chamber 81, an equipment installation chamber 8, and a spray system disposed inside the spray chamber 81, wherein the spray system is the spray device in the semiconductor cleaning device described above.

[0070] In this embodiment, the internal hydraulic pressure of the delivery pipe 1 is periodically adjusted by a branch pressure regulating component 4. The branch pressure regulating component 4 consists of a piston 42 that can slide within a receiving box 41. Its reciprocating motion achieves pressure regulation by changing the effective volume of the system: the piston 42 retracts to increase the volume, thereby reducing the flow velocity in the main pipe; the piston 42 extends to reduce the volume, squeezing the liquid back to increase the flow velocity in the main pipe. The power component 5 is driven by a single first motor 51, which is coordinated and controlled by the first transmission component 55 and the second transmission component 56, so that the nozzle 23 swings for a complete cycle. When spraying once in the upper and lower areas, the piston 42 completes exactly two reciprocating motions, that is, it provides a boost of pressure when the nozzle swings up and down. In order to further overcome the influence of gravity when the liquid is sprayed upward, a pressure compensation component 7 is provided. In the second half of the piston 42's movement, the pressure is supplemented to the system through the compressed air bag 71, thereby achieving additional pressure compensation when the nozzle 23 swings upward to spray. Ultimately, it achieves the purpose of uniform, effective and non-damaging cleaning of different areas, especially the upper and lower edges of the quartz boat.

[0071] The above specific embodiments are merely several optional embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A spray device in a semiconductor cleaning equipment, comprising a body, wherein a conveying pipe (1) is rotatably mounted within the body, characterized in that, Also includes: Multiple spray heads (2) are fixedly installed on the conveying pipe and connected to the conveying pipe (1). Multiple spray pipes (23) are rotatably installed on the spray heads (2). An angle adjustment mechanism (3) for driving the spray pipes (23) to swing is installed in the machine body. Branch pressure regulating component (4), the branch pressure regulating component (4) is connected to the conveying pipe (1) and periodically adjusts the water pressure inside the conveying pipe (1). The branch pressure regulating component (4) includes a receiving box (41) connected to the conveying pipe (1) and a piston (42) that is slidably and sealingly connected inside the receiving box (41). The power unit (5) is installed inside the machine body and provides power to the angle adjustment mechanism (3) and the branch pressure regulating component (4). The power unit (5) drives the nozzle (23) to swing back and forth for one cycle and drives the piston (42) to move back and forth for two cycles. The power unit (5) includes a first motor (51) fixedly mounted on the machine body and a transmission shaft (52) fixedly mounted on the output shaft of the first motor (51) and rotatably connected to the machine body. A first crank (53) is rotatably mounted on the machine body, a first connecting rod (531) is rotatably mounted on the first crank (53), a first push rod (532) is rotatably mounted on the first connecting rod (531), and the first push rod (532) is fixedly connected to the piston (42) and slidably connected to the housing (41). A second crank (54) is rotatably mounted on the machine body. A second connecting rod (541) is rotatably mounted on the second crank (54). A second push rod (542) that is slidably connected to the machine body is rotatably mounted on the second connecting rod (541). A connecting plate (543) is fixedly mounted on the second push rod (542). A round rod (35) is fixedly mounted on the uppermost lifting block (32). The connecting plate (543) is fixedly connected to the round rod (35). The power unit (5) further includes a first transmission assembly (55) located between the drive shaft (52) and the first crank (53), and a second transmission assembly (56) located between the drive shaft (52) and the second crank (54), wherein the transmission ratio of the second transmission assembly (56) is twice that of the first transmission assembly (55); The first transmission assembly (55) includes a first gear (551) fixedly mounted on the transmission shaft (52), a second gear (552) fixedly mounted on the first crank (53), and an idler gear (553) rotatably mounted on the machine body and meshing with the first gear (551) and the second gear (552). The pitch circle diameter of the second gear (552) is twice that of the first gear (551). The second transmission assembly (56) includes a third gear (561) fixedly mounted on a transmission shaft (52) and a fourth gear (562) fixedly mounted on a second crank (54) and meshing with the third gear (561). The third gear (561) and the fourth gear (562) are gears of the same specification.

2. The spray device in a semiconductor cleaning equipment according to claim 1, characterized in that, The delivery pipe (1) is provided with multiple sets of connection holes (11), the spray head (2) includes a connection box (21), the connection box (21) is provided with multiple liquid inlet holes (22) communicating with the connection holes (11), the connection box (21) is provided with multiple connection windows, the spray pipe (23) is rotatably installed inside the connection window, and a flexible sealing plate (24) is fixedly installed between the connection window and the spray pipe (23) to seal the connection window. Multiple first sealing rings (25) are fixedly installed between the delivery pipe (1) and the connecting box (21). The end of the nozzle (23) is provided with a connector (26), which is detachably connected to either the high-pressure nozzle or the atomizing nozzle.

3. The spray device in a semiconductor cleaning equipment according to claim 2, characterized in that, The connecting box (21) is provided with multiple sets of insertion holes (27) corresponding to the nozzle (23). A pin (28) is inserted into the insertion hole (27), and the nozzle (23) is rotatably connected to the connecting box (21) through the pin (28).

4. The spray device in a semiconductor cleaning equipment according to claim 3, characterized in that, The angle adjustment mechanism (3) includes an adjustment rod (31) rotatably mounted on the nozzle (23). Multiple adjustment rods (31) located on the same connecting box (21) are rotatably mounted on a lifting block (32). The lifting block (32) is coaxially arranged and slidably connected to the conveying pipe (1). Multiple rolling elements (33) are rotatably mounted inside the lifting block (32). The two nozzles (23) located on the upper and lower sides and adjacent to each other are rotatably connected by a synchronizing rod (34). The synchronizing rod (34), the nozzle (23) connected to it, and the connecting line of the upper and lower side pins (28) form a parallelogram.

5. The spray device in a semiconductor cleaning equipment according to claim 4, characterized in that, Multiple second sealing rings (43) are fixedly installed on the piston (42).

6. The spray device in a semiconductor cleaning equipment according to claim 5, characterized in that, The receiving box (41) is equipped with a pressure compensation component (7), which compensates the pressure in the delivery pipe (1) in the second half of the piston movement. The pressure compensation component (7) includes an air bladder (71) fixedly installed on the piston (42) and a flexible air storage chamber (72) fixedly installed on the outside of the receiving box (41). The air bladder (71) and the flexible air storage chamber (72) are connected by a hose (73). A pressure plate (74) is fixedly installed on the first push rod (532).

7. The spray device in a semiconductor cleaning equipment according to claim 6, characterized in that, The machine body is equipped with a pipe drive assembly (6) for driving the conveying pipe (1) to rotate. The pipe drive assembly (6) includes a second motor (61) fixedly installed on the machine body. A fifth gear (62) is fixedly installed on the output shaft of the second motor (61), and a sixth gear (63) is fixedly installed on the conveying pipe (1). The fifth gear (62) and the sixth gear (63) mesh with each other.

8. A semiconductor cleaning apparatus, comprising a spray chamber (81) and an equipment installation chamber (8), and a spray system disposed inside the spray chamber (81), characterized in that, The spray system is the spray device in the semiconductor cleaning equipment according to any one of claims 1-7.

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