Ignition chamber of oxidation diffusion furnace system for hydrogen-oxygen synthesis

By dividing the ignition chamber of the oxidation diffusion furnace system into chamber areas and using the linkage control of the switching components and ignition device, the safety hazards and combustion instability caused by inaccurate hydrogen-oxygen mixing timing are solved, achieving more efficient and safer hydrogen-oxygen combustion.

CN120969834APending Publication Date: 2025-11-18北京凯德石英股份有限公司
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Patent Information

Application Number
CN202511296113.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-09-11
Publication Date
2025-11-18

AI Technical Summary

Technical Problem

The lack of precise control over the timing of hydrogen-oxygen mixing in the ignition chamber of the existing oxidation diffusion furnace system leads to safety hazards and poor combustion stability.

Method used

The chamber is divided into three independent but interconnected areas: an oxygen chamber, a combustion chamber, and a hot gas chamber. Through the linkage of the switching components and the ignition device, hydrogen and oxygen are physically isolated before combustion, and ignition is triggered when the oxygen supply is stable. Mechanical and electromagnetic components are used to control the opening and closing of the hydrogen channel to avoid the risk of hydrogen leakage and unburned hydrogen.

Benefits of technology

It improves the stability and safety of combustion, reduces the safety hazards caused by unburned gas mixing, and ensures the reliability of hydrogen-oxygen combustion and the safe operation of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to an oxidation diffusion furnace system ignition chamber for hydrogen-oxygen synthesis, and belongs to the technical field of semiconductor manufacturing equipment, the structure of the ignition chamber comprises a cavity, the cavity internally comprises an oxygen bin, a combustion bin and a hot air bin, the oxygen bin is arranged at one end of the cavity, the hot air bin is arranged at the other end of the cavity, and the combustion bin is arranged in the cavity; the combustion bin is arranged between the oxygen bin and the hot air bin and communicated with the oxygen bin and the hot air bin, an air inlet is formed in the top of the oxygen bin, a hydrogen pipe is arranged on a cavity at one end of the oxygen bin and penetrates through the cavity, one end of the hydrogen pipe is arranged at the combustion bin, and the other end of the hydrogen pipe is arranged on the outer side of the cavity. An ignition device is arranged on the inner wall of the combustion bin on one side of the hydrogen pipe outlet, a switch assembly is arranged at the hydrogen pipe outlet of the combustion bin, and an opening device used for controlling the switch assembly is arranged in the combustion bin; the method has the technical effects that the safety protection capability is enhanced, and the combustion stability is improved.
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Description

Technical Field

[0001] This application relates to the technical field of semiconductor manufacturing equipment, and in particular to an ignition chamber for an oxidation diffusion furnace system for hydrogen-oxygen synthesis. Background Technology

[0002] In precision manufacturing fields such as semiconductor wafer fabrication and photovoltaic material processing, the hydrogen-oxygen synthesis oxidation diffusion furnace system is a core piece of equipment for achieving key processes such as material surface oxidation and impurity diffusion. The ignition chamber, as the system's energy initiation center, is responsible for achieving precise hydrogen-oxygen ratios, stable ignition, and initial combustion control. Its operational status directly determines the temperature stability, reaction uniformity, and production safety of subsequent high-temperature processes, making it a fundamental element ensuring the efficient operation of the entire oxidation diffusion furnace system. Existing oxidation diffusion furnace systems for hydrogen-oxygen synthesis typically employ simple chamber structures for their ignition chambers. They usually supply gas to the combustion zone via separate hydrogen and oxygen pipes, with ignition achieved through a fixed ignition device. However, these designs generally suffer from weak safety features, such as a lack of precise control mechanisms for hydrogen-oxygen mixing, which can easily lead to premature mixing of unburned gases and create safety hazards. Regarding the aforementioned technologies, the applicant believes that they suffer from insufficient safety redundancy and poor combustion stability. Summary of the Invention

[0003] To address the aforementioned technical problems, this application provides an ignition chamber for an oxidation diffusion furnace system used in hydrogen-oxygen synthesis.

[0004] This application provides an ignition chamber for an oxidation diffusion furnace system used in hydrogen-oxygen synthesis, which adopts the following technical solution: An ignition chamber for an oxidation diffusion furnace system used for hydrogen-oxygen synthesis includes a cavity. The cavity contains an oxygen chamber, a combustion chamber, and a hot gas chamber. The oxygen chamber is located at one end of the cavity, and the hot gas chamber is located at the other end. The combustion chamber is located between the oxygen chamber and the hot gas chamber, and is connected to both chambers. An air inlet is located at the top of the oxygen chamber. A hydrogen pipe is installed on one end of the cavity, penetrating the cavity. One end of the hydrogen pipe is located at the combustion chamber, and the other end is located outside the cavity. An ignition device is installed on the inner wall of the combustion chamber on the side where the hydrogen pipe exits. A switching assembly is installed at the hydrogen pipe outlet of the combustion chamber, and an opening device for controlling the switching assembly is installed inside the combustion chamber.

[0005] By adopting the above technical solution, the cavity is divided into three independent yet interconnected areas: an oxygen chamber, a combustion chamber, and a hot gas chamber. This physically isolates oxygen and hydrogen before they enter the combustion chamber, reducing safety risks at the source. Oxygen enters from the top inlet of the oxygen chamber, while hydrogen reaches the combustion chamber directly through a hydrogen pipe that runs through the cavity. Simultaneously, the hot gas chamber can quickly exhaust the high-temperature gases after combustion. By installing a switch assembly at the hydrogen pipe outlet, in conjunction with the opening device inside the combustion chamber, the ignition device ignites when the oxygen supply is stable. The opening device triggers the switch assembly to open the hydrogen pipeline only when the ignition device ignites. This prevents hydrogen from prematurely leaking into the oxygen chamber or other areas of the cavity, forming a flammable and explosive mixture, or causing flame extinguishing or deflagration due to excessively fast or slow hydrogen supply, thus improving combustion stability.

[0006] Preferably, the ignition device includes a drive switch lever and an electric igniter. The drive switch lever is installed at the top of the connection between the oxygen chamber and the combustion chamber inside the cavity and is fixedly connected to the inside of the cavity. The electric igniter is fixedly connected to the bottom of the combustion chamber and is connected to the drive switch lever.

[0007] By adopting the above technical solution, the drive switch lever serves as a mechanical triggering component. The drive switch lever and the electric igniter form a physical and electrical linkage. The drive switch lever needs to be blown open by the oxygen flow from the oxygen chamber to trigger the electric igniter. This ensures that the electric igniter will only start igniting when there is sufficient oxygen flow to push the lever. This avoids releasing hydrogen and igniting it alone in the absence of oxygen or when oxygen is insufficient, fundamentally preventing the risk of unburned hydrogen leakage or deflagration due to excess hydrogen and insufficient oxygen.

[0008] Preferably, the switch assembly includes a baffle, a bracket, a support rod, and a first reset spring. One end of the bracket is fixedly connected to the top of the hydrogen pipe outlet, one end of the support rod is fixedly connected to the other end of the bracket, one end of the baffle is rotatably connected to the support rod, one end of the first reset spring is rotatably connected to the baffle, and the other end of the first reset spring is rotatably connected to the bracket.

[0009] By adopting the above technical solution, when the opening device is not triggered, the elastic force of the first reset spring will pull the baffle to fit against the hydrogen pipe outlet, forming a physical seal to prevent hydrogen from entering the combustion chamber without permission. This ensures that hydrogen cannot leak in the non-ignition state and avoids premature mixing with oxygen in the oxygen chamber to form a flammable and explosive environment. It is another key safety barrier after the ignition device. The baffle is rotatably connected to the bracket through the support rod. When the opening device is triggered, the baffle can rotate around the support rod to open, allowing hydrogen to enter the combustion chamber as needed.

[0010] Preferably, the opening device includes an electromagnetic component and a locking component. The locking component is fixedly connected to the inner wall of the combustion chamber below the baffle, and the electromagnetic component is fixedly connected to the inner wall of the combustion chamber. The electromagnetic component is connected to the ignition device.

[0011] Preferably, the locking assembly includes a first cylinder, a first piston, a second return spring, and a first push rod. The first cylinder is fixedly connected to the inner wall of the combustion chamber, the first piston is slidably connected to the first cylinder, one end of the first push rod is fixedly connected to one end of the first piston, and the other end of the first push rod passes through the top of the first cylinder. The first push rod is slidably connected to the first cylinder. In its natural state, one end of the second return spring is fixedly connected to the inside of the combustion chamber, and the other end of the second return spring is fixedly connected to the other end of the first piston.

[0012] By adopting the above technical solution, after the electromagnetic component opens the baffle, hydrogen and oxygen burn in the combustion chamber to generate high-temperature and high-pressure gas, which pushes the first piston in the first cylinder to stretch the second return spring, causing the first push rod to extend and press against the baffle. At this time, even if the electromagnetic coil is de-energized, the baffle can still remain open under the mechanical support of the push rod, without the need to continuously consume power to keep the hydrogen passage open, which saves energy and avoids the risk of the electromagnetic component being energized for a long time.

[0013] Preferably, the electromagnetic component includes an electromagnetic coil, a controller, and a main power supply. The input terminal of the controller is connected to the electric igniter, and the output terminal of the controller is controlled by the main power supply. The electromagnetic coil is connected to the main power supply and is fixedly connected to the inner wall of the combustion chamber near the baffle. The controller and the main power supply are fixedly connected to the outside of the cavity.

[0014] By adopting the above technical solution, the controller input is directly connected to the electric igniter. When the electric igniter is activated, the electrical signal is transmitted to the controller in real time. The controller immediately triggers the main power supply to power the electromagnetic coil. After the electromagnetic coil is energized, it generates magnetic force, which directly attracts the baffle to open the hydrogen passage, avoiding the safety hazards of hydrogen entering prematurely or delayedly. This rapid response can be synchronized with the ignition action of the electric igniter, ensuring that the hydrogen is ignited by the flame as soon as it enters the combustion chamber, fundamentally eliminating the risk of deflagration caused by gas accumulation and ignition.

[0015] Preferably, a reset assembly is provided on the hot air chamber on one side of the drive switch paddle. The reset assembly includes a second cylinder, a second piston, a third reset spring, a second push rod, and a base plate. One end of the base plate is fixedly connected to the inner wall of the hot air chamber. The second cylinder is installed on the inner wall of the combustion chamber between the drive switch paddle and the base plate. The second cylinder is fixedly connected to the inner wall of the combustion chamber. The second piston is slidably connected to the second cylinder. One end of the second push rod is fixedly connected to one end of the second piston. The other end of the second push rod passes through the top of the second cylinder and is slidably connected to the second cylinder. In its natural state, one end of the third reset spring is fixedly connected to the base plate, and the other end of the third reset spring is fixedly connected to the other end of the second piston.

[0016] By adopting the above technical solution, after hydrogen and oxygen are stably combusted, high-temperature and high-pressure gas is formed in the combustion chamber and hot gas chamber. This gas pushes the second piston in the second cylinder to stretch the third return spring, causing the second push rod to extend and push against the drive switch lever, forcing the drive switch lever to reset and directly cutting off the working signal of the electric igniter. This achieves ignition stabilization and shutdown, preventing the electric igniter from working continuously. The triggering of the reset component depends on the high-temperature and high-pressure gas generated by combustion. The reset is only triggered when the flame is stable, ensuring that the electric igniter works continuously in the early stage of ignition and is shut off in time after combustion stabilizes.

[0017] Preferably, an air outlet is provided on one side of the upper part of the hot air chamber, a pressure sensor is provided on the cavity on one side of the air outlet, a pressure relief valve is provided on the air outlet, and the pressure sensor is connected to the pressure relief valve.

[0018] By adopting the above technical solution, the pressure sensor is installed on the side of the gas outlet, which can monitor the gas pressure in the hot gas chamber in real time. When the pressure exceeds the preset safety threshold, the pressure sensor immediately sends a signal to the pressure relief valve, triggering the pressure relief valve to open and release excess gas, quickly reducing the pressure to a safe range, avoiding serious safety accidents such as cavity deformation, weld cracking or gas backflow caused by excessive pressure. It is especially suitable for scenarios such as hydrogen-oxygen combustion that may generate instantaneous high pressure.

[0019] Preferably, the bottom of the hot air chamber is provided with a drain outlet, and a one-way valve is provided on the drain outlet.

[0020] By adopting the above technical solution, one of the main products of hydrogen-oxygen combustion is water. When the high-temperature combustion gas flows in the hot gas chamber, it will condense into liquid water if it encounters the cavity wall or a lower temperature area. The drain outlet can promptly discharge this condensate into the hot gas chamber to prevent water from accumulating at the bottom. The one-way valve ensures that the drainage path is unobstructed in one direction, preventing external moisture or impurities from seeping back into the hot gas chamber through the drain outlet.

[0021] Preferably, a flame arrester is installed inside the hydrogen pipe.

[0022] By adopting the above technical solution, the core function of the flame arrester is to use its internal flame-arresting element to quickly absorb flame energy and prevent the flame from continuing to spread through mechanisms such as heat dissipation and the wall effect. When the flame in the combustion chamber accidentally backfires, the flame arrester can extinguish the backfire flame in the hydrogen pipe, preventing the flame from spreading backward along the hydrogen pipe to the external hydrogen supply system, avoiding the explosion or combustion accident of the entire hydrogen source, and fundamentally blocking the chain of danger diffusion.

[0023] In summary, this application includes at least one of the following beneficial technical effects: The chamber is divided into three independent yet interconnected areas: an oxygen chamber, a combustion chamber, and a hot gas chamber. This physically isolates oxygen and hydrogen before they enter the combustion chamber, reducing safety risks at the source. Oxygen enters through the top inlet of the oxygen chamber, while hydrogen flows directly to the combustion chamber through a hydrogen pipe that runs through the chamber. Simultaneously, the hot gas chamber rapidly exhausts the high-temperature gases after combustion. By installing a switch assembly at the hydrogen pipe outlet, in conjunction with an opening device inside the combustion chamber, the ignition device ignites the hydrogen when the oxygen supply is stable. The opening device triggers the switch assembly to open the hydrogen pipeline only when the ignition device ignites and the opening device is activated simultaneously. This prevents hydrogen from prematurely leaking into the oxygen chamber or other areas of the chamber, forming a flammable and explosive mixture, or causing flame extinguishing or deflagration due to an excessively fast or slow hydrogen supply, thus improving combustion stability.

[0024] When the opening device is not triggered, the elastic force of the first reset spring will pull the baffle to fit against the hydrogen pipe outlet, forming a physical seal to prevent hydrogen from entering the combustion chamber without permission. This ensures that hydrogen cannot leak when not ignited, and avoids premature mixing with oxygen in the oxygen chamber to form a flammable and explosive environment. It is another key safety barrier after the ignition device. The baffle is rotatably connected to the bracket through the support rod. When the opening device is triggered, the baffle can rotate around the support rod to open, allowing hydrogen to enter the combustion chamber as needed. Attached Figure Description

[0025] Figure 1 This is a cross-sectional schematic diagram of the interior of the overall structure in the embodiment.

[0026] Figure 2 yes Figure 1 Enlarged view of part A in the middle.

[0027] Explanation of reference numerals in the attached drawings: 1. Cavity; 11. Oxygen chamber; 111. Air inlet; 12. Combustion chamber; 13. Hot gas chamber; 131. Air outlet; 132. Pressure sensor; 133. Pressure relief valve; 134. Drain outlet; 135. One-way valve; 14. Hydrogen pipe; 141. Flame arrester; 2. Ignition device; 21. Switch lever; 22. Electric igniter; 3. Switch assembly; 31. Baffle; 32. Bracket; 33. Support rod; 34. First return spring; 4. Opening device; 41. Electromagnetic assembly; 411. Electromagnetic coil; 412. Controller; 413. Main power supply; 42. Locking assembly; 421. First cylinder; 422. First piston; 423. Second return spring; 424. First push rod; 5. Return assembly; 51. Second cylinder; 52. Second piston; 53. Third return spring; 54. Second push rod; 55. Base plate. Detailed Implementation

[0028] The following is in conjunction with the appendix Figure 1-2 This application will be described in further detail.

[0029] This application discloses an ignition chamber for an oxidation diffusion furnace system used in hydrogen-oxygen synthesis. (Refer to...) Figure 1 and Figure 2 The system includes a cavity 1, which contains an oxygen chamber 11, a combustion chamber 12, and a hot gas chamber 13. The oxygen chamber 11 is located at one end of the cavity 1, and the hot gas chamber 13 is located at the other end. The combustion chamber 12 is located between the oxygen chamber 11 and the hot gas chamber 13, and is connected to both. An air inlet 111 is located on the top of the oxygen chamber 11. A hydrogen pipe 14 is installed on one end of the cavity 1 at the oxygen chamber 11, passing through the cavity 1. One end of the hydrogen pipe 14 is located at the combustion chamber 12, and the other end is located outside the cavity 1. A flame arrester 141 is installed inside the hydrogen pipe 14. 41 To prevent backfire during hydrogen ignition, an outlet 131 is provided on one side of the upper part of the hot gas chamber 13. A pressure sensor 132 is provided on the cavity 1 on one side of the outlet 131. A pressure relief valve 133 is provided on the outlet 131. The pressure relief valve 133 is bolted to the outlet 131. The pressure sensor 132 is connected to the pressure relief valve 133. When the pressure exceeds the safety threshold, the pressure sensor 132 sends a signal to the connected pressure relief valve 133, triggering the pressure relief valve 133 to open and release excess gas. A drain outlet 134 is provided at the bottom of the hot gas chamber 13. A one-way valve 135 is provided on the drain outlet 134 to discharge the water vapor formed through the drain outlet 134.

[0030] An ignition device 2 is installed on the inner wall of the combustion chamber 12 on one side of the hydrogen pipe 14 outlet. The ignition device 2 includes a drive switch 21 and an electric igniter 22. The drive switch 21 is installed at the top of the connection between the oxygen chamber 11 and the combustion chamber 12 inside the cavity 1. The drive switch 21 is fixedly connected to the inside of the cavity 1. The electric igniter 22 is fixedly connected to the bottom of the combustion chamber 12. The drive switch 21 is connected to the electric igniter 22. Oxygen enters through the air inlet 111 to form an airflow. The airflow blows the drive switch 21 to open the electric igniter 22 for ignition.

[0031] A switch assembly 3 is installed at the outlet of the hydrogen pipe 14. An opening device 4 for controlling the switch assembly 3 is installed inside the combustion chamber 12. The switch assembly 3 includes a baffle 31, a bracket 32, a support rod 33, and a first return spring 34. One end of the bracket 32 ​​is fixedly connected to the top of the outlet of the hydrogen pipe 14, and one end of the support rod 33 is fixedly connected to the other end of the bracket 32. One end of the baffle 31 is hinged to the support rod 33. One end of the first return spring 34 is rotatably connected to the baffle 31, and the other end is rotatably connected to the bracket 32. The elastic force of the first return spring 34 pulls the baffle 31 to fit against the outlet of the hydrogen pipe 14, forming a physical seal. The opening device 4 includes an electromagnetic component 41... The system includes a locking component 42, wherein the electromagnetic component 41 includes an electromagnetic coil 411, a controller 412, and a main power supply 413. The input terminal of the controller 412 is connected to the electric igniter 22, and the output terminal of the controller 412 is controlled by the main power supply 413. The electromagnetic coil 411 is connected to the main power supply 413 and is fixedly connected to the inner wall of the combustion chamber 12 near the baffle 31. The controller 412 and the main power supply 413 are fixedly connected to the outside of the cavity 1. When the controller 412 receives the working signal from the electric igniter 22, it drives the main power supply 413 to supply power to the electromagnetic coil 411, causing the electromagnetic coil 411 to generate magnetic force to attract the baffle 31 to rotate and open the hydrogen pipe 14 so that the hydrogen enters the combustion chamber 12 and is immediately ignited by the electric igniter 22.

[0032] The locking assembly 42 includes a first cylinder 421, a first piston 422, a second return spring 423, and a first push rod 424. The first cylinder 421 is fixedly connected to the inner wall of the combustion chamber 12. The first piston 422 is slidably connected inside the first cylinder 421. When hydrogen is ignited, it generates high-pressure, high-temperature gas, which pushes the first piston 422 to slide inside the first cylinder 421. One end of the first push rod 424 is fixedly connected to one end of the first piston 422, and the other end of the first push rod 424 passes through the top of the first cylinder 421. The sliding of the first piston 422 causes the first push rod 424 to slide on the first cylinder 421, so that the push rod presses against one side of the baffle. This prevents the baffle from falling back and blocking the outlet of the hydrogen pipe 14 when power to the electromagnetic coil 411 is stopped. In its natural state, one end of the second return spring 423 is fixedly connected to the inside of the combustion chamber 12, and the other end of the second return spring 423 is fixedly connected to the other end of the first piston 422. When the supply of hydrogen stops, the combustion inside cavity 1 ceases, the pressure decreases, and the first piston 422 is reset by the second reset spring 423.

[0033] A reset assembly 5 is provided on the hot air chamber 13 on one side of the drive switch lever 21. The reset assembly 5 includes a second cylinder 51, a second piston 52, a third reset spring 53, a second push rod 54, and a base plate 55. One end of the base plate 55 is fixedly connected to the inner wall of the hot air chamber 13. The second cylinder 51 is installed on the inner wall of the combustion chamber 12 between the drive switch lever 21 and the base plate 55. The second cylinder 51 is fixedly connected to the inner wall of the combustion chamber 12. The second piston 52 is slidably connected inside the second cylinder 51. The hydrogen is ignited to generate high-pressure and high-temperature gas, which pushes the second piston 52 to slide inside the second cylinder 51. One end of the second push rod 54 is fixedly connected to the second piston. One end of the second piston 52 and the other end of the second push rod 54 pass through the top of the second cylinder 51. The second piston 52 slides, causing the second push rod 54 to slide inside the second cylinder 51. The other end of the second push rod 54 presses against the drive switch lever 21, causing the drive switch lever 21 to reset and shut down the electric igniter 22, preventing the electric igniter 22 from working continuously. In its natural state, the third return spring 53 has one end fixedly connected to the base plate 55 and the other end fixedly connected to the other end of the second piston 52. When the hydrogen supply stops, the cavity 1 no longer burns, the pressure decreases, and the second piston 52 resets through the third return spring 53.

[0034] The working principle of the ignition chamber of the oxidation diffusion furnace system for hydrogen-oxygen synthesis in this application is as follows: Oxygen enters the cavity 1 through the air inlet 111 at the top of the oxygen chamber 11, forming an airflow. The airflow blows the drive switch lever 21, which is connected to the electric igniter 22, thereby turning on the electric igniter 22. The hydrogen pipe 14 passes through the cavity 1, with one end of the hydrogen pipe 14 located at the combustion chamber 12 and the other end of the hydrogen pipe 14 outside the cavity 1. A flame arrester 141 is installed inside the hydrogen pipe 14 to prevent backfire. The switch assembly 3 at the outlet of the hydrogen pipe 14 consists of a baffle 31, a bracket 32, a support rod 33, and a first return spring 34. The elastic force of the baffle 31 causes it to fit against the outlet of the hydrogen pipe 14, forming a physical seal. When the electric igniter 22 is working, the controller 412 receives a signal and drives the main power supply 413 to supply power to the electromagnetic coil 411. The electromagnetic coil 411 generates a magnetic force that attracts the baffle 31 to rotate, opening the hydrogen pipe 14 and allowing hydrogen to enter the combustion chamber 12. After entering the combustion chamber 12, the hydrogen is immediately ignited by the electric igniter 22, causing the hydrogen to undergo a combustion reaction in the combustion chamber 12, producing high-pressure, high-temperature gas. This gas pushes the first piston 422 to slide within the first cylinder 421. The first piston 422 drives the first push rod 424 to slide, causing the push rod to press against the baffle 31, thus stopping the supply of power to the electromagnetic coil 411. With power supplied, the baffle 31 will not fall back to block the outlet of the hydrogen pipe 14, ensuring a continuous supply of hydrogen for combustion. Simultaneously, high-temperature gas enters the second cylinder 51, pushing the second piston 52 to slide away from the base plate 55 within the cylinder. The sliding of the second piston 52 causes the connected second push rod 54 to move synchronously, causing its other end to protrude from the top of the second cylinder 51 and press against the drive switch paddle 21, preventing the electric igniter 22 from continuously operating during combustion. The heat generated by combustion raises the gas temperature, and the hot gas enters the hot gas chamber 13. The pressure sensor 132 on the upper side of the hot gas chamber 13 monitors the pressure in real time. When the pressure exceeds the safety threshold, it releases pressure. Valve 133 sends a signal to trigger the pressure relief valve 133 to open and release excess gas to ensure equipment safety. The drain outlet 134 at the bottom of the hot gas chamber 13 is equipped with a one-way valve 135, which can discharge excess water vapor formed during combustion. When the hydrogen supply stops, the combustion inside the chamber 1 stops and the pressure decreases. The first piston 422 is reset by the second return spring 423, which causes the baffle 31 to physically seal the outlet of the hydrogen pipe 14. The second piston 52 is reset by the third return spring 53. The second push rod 54 no longer presses against the drive switch lever 21. When oxygen enters again through the air inlet 111, the airflow pushes the drive switch lever 21 again, which turns on the electric igniter 22.

[0035] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An oxidation diffusion furnace system ignition chamber for hydrogen oxygen synthesis, characterized by: The application relates to a hydrogen-oxygen fuel cell, which comprises a cavity (1) internally provided with an oxygen tank (11), a combustion tank (12) and a hot gas tank (13), wherein the oxygen tank (11) is arranged at one end of the cavity (1), the hot gas tank (13) is arranged at the other end of the cavity (1), the combustion tank (12) is arranged between the oxygen tank (11) and the hot gas tank (13), the combustion tank (12) is communicated with the oxygen tank (11) and the hot gas tank (13), an air inlet (111) is arranged on the top of the oxygen tank (11), a hydrogen pipe (14) is arranged on the cavity (1) at one end of the oxygen tank (11), the hydrogen pipe (14) penetrates through the cavity (1), one end of the hydrogen pipe (14) is arranged at the combustion tank (12), the other end of the hydrogen pipe (14) is arranged outside the cavity (1), a lighting device (2) is arranged on the inner wall of the combustion tank (12) at the outlet side of the hydrogen pipe (14), a switch assembly (3) is arranged on the hydrogen pipe (14) outlet of the combustion tank (12), and an opening device (4) for controlling the switch assembly (3) is arranged in the combustion tank (12).

2. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: The lighting device (2) comprises a driving switch tab (21) and an electric lighter (22), the driving switch tab (21) is arranged on the top of the connection between the oxygen tank (11) and the combustion tank (12) in the cavity (1), the driving switch tab (21) is fixedly connected with the cavity (1), the electric lighter (22) is fixedly connected to the bottom of the combustion tank (12), and the driving switch tab (21) is connected with the electric lighter (22).

3. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: The switch assembly (3) comprises a baffle (31), a support (32), a supporting rod (33) and a first reset spring (34), one end of the support (32) is fixedly connected to the top of the hydrogen pipe (14) outlet, one end of the supporting rod (33) is fixedly connected to the other end of the support (32), one end of the baffle (31) is rotationally connected to the supporting rod (33), one end of the first reset spring (34) is rotationally connected to the baffle (31), and the other end of the first reset spring (34) is rotationally connected to the support (32).

4. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: The opening device (4) comprises an electromagnetic assembly (41) and a locking assembly (42), the locking assembly (42) is fixedly connected to the inner wall of the combustion tank (12) below the baffle (31), the electromagnetic assembly (41) is fixedly connected to the inner wall of the combustion tank (12), and the electromagnetic assembly (41) is connected with the lighting device (2).

5. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 4, characterized in that: The locking assembly (42) comprises a first cylinder (421), a first piston (422), a second reset spring (423) and a first push rod (424), the first cylinder (421) is fixedly connected to the inner wall of the combustion chamber (12), the first piston (422) is slidingly connected in the first cylinder (421), one end of the first push rod (424) is fixedly connected to one end of the first piston (422), the other end of the first push rod (424) penetrates the top of the first cylinder (421), the first push rod (424) is slidingly connected with the first cylinder (421), the second reset spring (423) is fixedly connected to the inside of the combustion chamber (12) at one end in the natural state, and the other end of the second reset spring (423) is fixedly connected to the other end of the first piston (422).

6. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 4, characterized in that: The electromagnetic assembly (41) comprises an electromagnetic coil (411), a controller (412) and a main power supply (413), the input end of the controller (412) is connected with the electric igniter (22), the output end of the controller (412) controls the main power supply (413), the electromagnetic coil (411) is connected with the main power supply (413), the electromagnetic coil (411) is fixedly connected to the inner wall of the combustion chamber (12) close to the baffle (31), and the controller (412) and the main power supply (413) are fixedly connected to the outside of the cavity (1).

7. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 2, characterized in that: The hot gas chamber (13) on one side of the driving switch paddle (21) is provided with a reset assembly (5), the reset assembly (5) comprises a second cylinder (51), a second piston (52), a third reset spring (53), a second push rod (54) and a bottom plate (55), one end of the bottom plate (55) is fixedly connected to the inner wall of the hot gas chamber (13), the second cylinder (51) is mounted on the inner wall of the combustion chamber (12) between the driving switch paddle (21) and the bottom plate (55), and the second cylinder (51) is fixedly connected with the inner wall of the combustion chamber (12), the second piston (52) is slidingly connected in the second cylinder (51), one end of the second push rod (54) is fixedly connected to one end of the second piston (52), the other end of the second push rod (54) penetrates the top of the second cylinder (51), and the second push rod (54) is slidingly connected with the second cylinder (51), the third reset spring (53) is fixedly connected to the bottom plate (55) at one end in the natural state, and the other end of the third reset spring (53) is fixedly connected to the other end of the second piston (52).

8. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: An air outlet (131) is arranged on one side of the upper portion of the hot gas chamber (13), a pressure sensor (132) is arranged on one side of the cavity (1) of the air outlet (131), a pressure relief valve (133) is arranged on the air outlet (131), and the pressure sensor (132) is connected with the pressure relief valve (133).

9. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: A drain port (134) is arranged at the bottom of the hot gas chamber (13), and a one-way valve (135) is arranged on the drain port (134).

10. An ignition chamber for an oxidation diffusion furnace system for hydrogen and oxygen synthesis according to claim 1, characterized in that: The hydrogen pipe (14) is internally provided with a flame arrester (141).