Method for rapidly detecting center deviation of infrared meniscus lens

Abstract

The invention provides an infrared meniscus lens center deviation rapid detection method. The method comprises the following steps: establishing a vertical relation between a reference optical flat and a measurement rotating shaft; placing a to-be-measured lens after mounting a measuring lens, and enabling the mechanical reference axis to be parallel to the measuring axis; the optical center of the concave surface is aligned with the measuring shaft through fine adjustment of a lower light path; rotating the reference station and measuring a convex surface reflection image run-out circle radius through an upper light path to calculate a center deviation; and replacing the lens and repeatedly executing the detection step to complete batch measurement. The same meniscus lens is measured for multiple times, no instrument or tool is needed for adjustment, measurement can be completed only by taking down the previous meniscus lens after measurement, placing the lens according to the process and adjusting the coaxiality and measuring the center deviation, after the operation is skilled, the single detection time can be shortened to be within 2 min, and the detection efficiency is greatly improved. The speed is changed on the basis of not sacrificing the precision, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical part shape and position accuracy detection, in particular to a rapid detection method for center deviation of an infrared crescent lens. BACKGROUND

[0002] Infrared optical systems are widely used in military, security, automatic driving and other fields, among which, the crescent lens is a key element for correcting aberration, and its usage ratio is more than 80%. The center deviation (deviation of the lens optical axis from the mechanical axis) is a key indicator affecting the imaging quality, especially for aspheric lenses, the center deviation is determined at the processing stage and cannot be adjusted at the back end, so the detection accuracy requirement is extremely high (usually ≤1').

[0003] Currently, the main detection method is the reflection type detection method, because the infrared material (such as silicon and germanium) is not transparent in the visible light band. However, the existing reflection type detection method has a significant bottleneck: the process of accurately aligning the lens reference axis with the instrument rotation axis is extremely tedious and inefficient. The operator needs to observe the upper and lower light paths alternately, and adjust the tilt and translation of the object table in multiple dimensions. This "trial and error" process is highly dependent on experience, and due to the low reflectivity of the infrared material surface, the signal-to-noise ratio of the reflected image is poor, resulting in a long detection time for each detection. SUMMARY

[0004] In view of the above defects or deficiencies in the prior art, the present application aims to provide a rapid detection method for center deviation of an infrared crescent lens, which is realized based on a double light path center deviation measuring device. The double light path center deviation measuring device comprises a rotatable reference table, a four-dimensional adjustment table arranged on the reference table, and a binocular collimator for emitting a light beam. The rotation axis of the reference table is a measurement rotation axis, and its extension direction is a first direction. The binocular collimator comprises an upper light path collimator and a lower light path collimator arranged on the reference table along the first direction. The light beam directions of the upper light path collimator and the lower light path collimator are parallel to the first direction. The detection method comprises the following steps: S100. Placing a reference flat crystal on the four-dimensional adjustment table away from the reference table; S200. Adjusting the four-dimensional adjustment table until the extension direction of the normal line of the plane of the reference flat crystal is parallel to the first direction; S300. Installing an upper light path measuring lens and a lower light path measuring lens on the upper light path collimator and the lower light path collimator respectively; S400. Placing a lens to be measured on the reference flat crystal, so that the mechanical reference axis of the lens to be measured is parallel to the measurement rotation axis; S500. Emitting a probe light beam to the concave surface of the lens to be measured through the lower light path collimator, and adjusting the lower light path collimator and the four-dimensional adjustment table until the optical center of the concave surface of the lens to be measured is aligned with the measurement rotation axis; S600. Rotating the reference table to obtain a runout circle radius of the first reflected image received by the upper light path collimator, and calculating a center deviation value of the lens to be measured according to the runout circle radius; S700. Replacing the lens to be measured, and repeatedly performing steps S400-S600 to complete the detection of the center deviation of a plurality of lenses to be measured.

[0005] According to the technical scheme provided in the embodiments of the present application, the edge of the concave surface is provided with an edge platform, the edge platform is attached to the reference flat crystal, and the normal line thereof is parallel to the measurement rotation axis.

[0006] According to the technical scheme provided in the embodiments of the present application, the edge platform and the concave surface are formed by one-time clamping.

[0007] According to the technical scheme provided in the embodiments of the present application, before step S500 after step S400, the following step is further included: S410. Emitting a probe light beam to the convex surface of the lens to be measured through the upper light path collimator, and adjusting the upper light path collimator along the first direction until the optical center of the convex surface is preliminarily aligned with the measurement rotation axis.

[0008] According to the technical scheme provided in the embodiments of the present application, the four-dimensional adjustment table has a central through hole, and the light beam emitted by the lower light path collimator can pass through the central through hole to the reference flat crystal, and step S200 includes the following steps: S210. Emitting a light beam through the upper light path collimator, and covering the light outlet of the lower light path collimator; S220. Adjusting the inclination angle of the four-dimensional adjustment table until the runout amount of the second reflected image reflected by the reference flat crystal when the reference table is rotated is less than a first threshold value.

[0009] According to the technical scheme provided in the embodiments of the present application, the focal length of the lower light path measurement lens is greater than the focal length of the upper light path measurement lens, the sum of the focal length value of the lower light path measurement lens and the reference curvature radius of the concave surface is within a preset distance range, and the focal length value of the upper light path measurement lens is greater than the reference curvature radius of the convex surface. The reference curvature radius of the concave surface and the convex surface is the spherical curvature radius for a spherical surface, and is the vertex curvature radius for a non-spherical surface.

[0010] According to the technical scheme provided in the embodiments of the present application, step S410 includes the following steps: S411. Emitting a probe light beam to the convex surface of the lens to be measured through the upper optical path collimator; S412. Moving the upper optical path collimator to a first position along the first direction close to the reference flat crystal, the first position being a position where the focal plane of the first measurement lens coincides or approaches the vertex of the convex surface, to observe a third reflected image; S413. Continuing to move the upper optical path collimator to a second position along the first direction, the second position being a position where the beam convergence point coincides or approaches the optical center of the convex surface, to observe a fourth reflected image; S414. Rotating the four-dimensional adjustment table so that the fourth reflected image forms a runout circle; S415. Reducing the runout circle radius of the fourth reflected image to be less than a second threshold value by driving the translation dimension of the four-dimensional adjustment table.

[0011] According to the technical scheme provided by the embodiment of the present application, step S500 comprises the following steps: S510. Emitting a probe light beam to the concave surface of the lens to be measured through the lower optical path collimator; S520. Moving the lower optical path collimator to a third position along the first direction close to the reference flat crystal, the third position being a position where the focal plane of the second measurement lens coincides or approaches the vertex of the concave surface, to observe a fifth reflected image; S530. Continuing to move the lower optical path collimator to a fourth position along the first direction, the fourth position being a position where the beam convergence point coincides or approaches the optical center of the concave surface, to observe a sixth reflected image; S540. Reducing the runout circle radius of the sixth reflected image to be less than a third threshold value by driving the translation dimension of the four-dimensional adjustment table.

[0012] According to the technical scheme provided by the embodiment of the present application, the reference table is an air bearing turntable.

[0013] In summary, the present application proposes a rapid detection method for center deviation of an infrared meniscus lens, establishes the vertical relationship between the reference flat crystal and the measurement rotation axis; installs the measurement lens and places the lens to be measured, so that the mechanical reference axis is parallel to the measurement axis; adjusts the concave optical center to align with the measurement axis through the lower optical path; rotates the reference table and measures the runout circle radius of the convex reflected image through the upper optical path to calculate the center deviation; replaces the lens and repeats the detection steps to complete batch measurement. The present application measures the same meniscus lens multiple times without the need for adjustment of instruments and tools, only needs to remove the previous meniscus lens after measurement, place the lens according to the process and adjust the coaxial and measurement center deviation two links to operate, so that the measurement can be completed, after skilled operation, the single detection time can be shortened to within 2 minutes, the speed is obtained on the basis of not sacrificing the accuracy, and the detection efficiency is improved. Attached Figure Description

[0014] Figure 1 A flowchart of a rapid detection method for the center deviation of an infrared meniscus lens provided in an embodiment of this application; Figure 2 This is a schematic diagram of the structure of the dual-optical-path center deviation measuring device provided in the embodiments of this application.

[0015] The text labels in the image represent: 1. Four-dimensional adjustment stage; 2. Reference flat crystal; 3. Upper optical path collimator; 31. Upper optical path measuring lens; 4. Lower optical path collimator; 41. Lower optical path measuring lens; 5. Reference stage; 6. Linear guide rail; 7. Measuring stage; 8. Lens under test. Detailed Implementation

[0016] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0017] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0018] As mentioned in the background section, this application proposes a rapid detection method for the center deviation of an infrared meniscus lens, implemented using a dual-optical-path center deviation measurement device, such as... Figure 2 As shown, the dual-optical-path center deviation measuring device includes a rotatable reference platform 5, a four-dimensional adjustment platform 1 disposed on the reference platform 5, and a binocular collimator for emitting a light beam. The rotation axis of the reference platform 5 is the measurement rotation axis, and its extension direction is the first direction. The binocular collimator includes an upper optical path collimator 3 and a lower optical path collimator 4 disposed on the reference platform 5 along the first direction. The light beam directions of the upper optical path collimator 3 and the lower optical path collimator 4 are parallel to the first direction.

[0019] Optionally, the dual-optical-path center deviation measuring device is a dual-optical-path center deviation measuring instrument, OptiCentric 100 Dual of TRIOPTICS GmbH Company. The dual-optical-path center deviation measuring instrument is provided with a dual autocollimator, and the measurement accuracy of the dual autocollimator is ±1.3". The reference table 5 is arranged on the measuring table 7, and the four-dimensional adjustment table 1 includes an adjustment table and a follow-up table arranged on the adjustment table, and includes two groups of rotations, one of which is used for controlling tilting around an X axis or a Y axis, tilting around the X axis means that the adjustment table drives the follow-up table to perform a pitching motion, and the rotation axis is parallel to the X axis, that is, a horizontal axis in the left-right direction. Tilting around the Y axis means that the adjustment table drives the follow-up table to perform a rolling motion, and the rotation axis is parallel to the Y axis, that is, a horizontal axis in the front-back direction. The other group is used for controlling the adjustment table to drive the follow-up table to move in the XY direction. The four-dimensional adjustment table 1 has a diameter of 200 mm, and the tilting angle of the two right-angle axes is ±1.5°, and the sensitivity is ±1 arcsec. The displacement range of the two right-angle axes is ±5 mm, and the sensitivity is ±1 um. The detection environment is 20-23℃ in temperature and 30%-70% in humidity.

[0020] Specifically, the reference table 5 is an air bearing rotary table, and the axial / radial runout of the air bearing rotary table is less than 0.05 um. Compared with a traditional ball bearing, the air bearing completely eliminates dry friction, wear, creeping phenomenon and vibration caused by mechanical contact. Before starting the detection, the dual-optical-path center deviation measuring instrument is first started, including the following steps. Step 1: Connect 4-5 bar compressed air. The air bearing rotary table relies on the compressed air to form a uniform air film in the bearing gap, so that the rotary table is in a "non-contact" suspended state. If the air pressure is too low, the air film will be unstable or even unable to float, damaging the bearing. If the air pressure is too high, it may also affect the performance and pose a safety hazard.

[0021] Step 2: Turn on the main power supply, the control computer and the illumination light source of the dual autocollimator. The main power supply is used to power the core hardware of the rotary table drive and the motor of the four-dimensional adjustment table 1. The control computer runs the dedicated measurement and control software. The start of the illumination light source provides a detection beam for the autocollimator.

[0022] Step 3: Start the instrument control software, and reset the linear guide rail 6 and the air bearing rotary table. The software will automatically control the linear guide rail 6 (carrying the upper optical path collimator 3 and the lower optical path collimator 4) to move to the "zero position" or "safe starting position" defined mechanically, and at the same time, the air bearing rotary table will also be reset to the initial angle position.

[0023] Step 4: Select the dual-optical-path reflection type measurement mode in the control software. Since the lens to be measured 8 is made of infrared lens material, it is not transparent to visible light, so the reflection of light on the lens surface is used for detection, and the dual-optical-path reflection type measurement mode is selected.

[0024] As shown in Figure 1 the detection method comprises the following steps: S100. Place the reference flat 2 on the four-dimensional adjustment table 1 away from the reference table 5 side; Optionally, the reference flat 2 is placed on a follow-up table, and the reference flat 2 is a 2nd grade quartz glass parallel flat with an aperture of 100 mm, a flatness of ≤0.1 μm, and a parallelism of ≤0.1 μm; S200. Adjust the four-dimensional adjustment table 1 until the extension line direction of the plane normal of the reference flat 2 is parallel to the first direction; The four-dimensional adjustment table 1 has a central through hole, and the light beam emitted by the lower light path collimator 4 can pass through the central through hole to the reference flat 2, and step S200 comprises the following steps: S210. Emit a light beam through the upper light path collimator 3, and cover the light outlet of the lower light path collimator 4; ensure that the upper light path collimator 3 is not installed with a measuring lens, and use its own parallel light outlet. Use the light shielding cover matched with the instrument to tightly cover the light outlet of the lower light path collimator 4 to prevent the stray light from interfering with the measurement; S220. Adjust the inclination angle of the four-dimensional adjustment table 1 until the runout of the second reflected image reflected by the reference flat 2 when rotating the reference table 5 is less than a first threshold value. The second reflected image is a cross-shaped wire image reflected from the upper surface of the reference flat 2 to the upper light path collimator 3; the operator observes the movement track of the second reflected image in the monitor of the upper light path collimator 3. The image forms a runout circle. The operator alternately adjusts the X-axis inclination and Y-axis inclination knobs of the four-dimensional adjustment table 1 to gradually reduce the radius of the runout circle. Through the real-time reading of the instrument software, when the radius value is stable and less than the "first threshold value" (such as 1 μm), the adjustment is completed. This method provides a direct and quantitative means to establish an accurate vertical reference. Covering the lower light path avoids light path crosstalk, ensuring the singleness and accuracy of the adjustment. Setting a clear "first threshold value" makes the adjustment process have a basis, ensuring that all subsequent measurements are carried out under a unified high-precision reference.

[0025] S300. Install an upper light path measuring lens 31 and a lower light path measuring lens 41 on the upper light path collimator 3 and the lower light path collimator 4, respectively; In a preferred embodiment, the focal length of the lower light path measuring lens 41 is greater than the focal length of the upper light path measuring lens 31, and the sum of the focal length value of the lower light path measuring lens 41 and the reference curvature radius of the concave surface is within a preset distance range; the focal length value of the upper light path measuring lens 31 is greater than the reference curvature radius of the convex surface; wherein the reference curvature radius of the concave surface and the convex surface is the spherical curvature radius for a spherical surface, and the vertex curvature radius for a non-spherical surface.

[0026] The preset distance range is an empirical range determined according to the mechanical structure and optical path design of a specific instrument (such as OptiCentric), and is usually 250 mm to 350 mm. The operator can obtain the reference curvature radius of the concave surface and the convex surface of the lens according to the design drawing or the measured value, and the lower optical path rule is to meet the "conjugate distance" requirement of the instrument to ensure that the light beam can pass through the center through hole without obstruction and converge at the optical center of the concave surface to form the brightest and sharpest reflected image, thereby obtaining the highest measurement sensitivity. The selection table of the lower optical path measurement lens 41 is shown in Table 1: Table 1

[0027] The upper optical path collimator 3 only considers that the convex spherical radius or the aspherical vertex curvature radius is slightly smaller than the focal length of the upper optical path measurement lens 31. Considering the convenience of continuous multiple measurement operations, the focal length of the upper optical path measurement lens 31 should be greater than the convex spherical radius or the aspherical vertex curvature radius by more than 50 mm. If the convex spherical radius or the aspherical vertex curvature radius is in the range of 0-50 mm, a 100 mm focal length is selected; if it is in the range of 50-100 mm, a 150 mm focal length is selected. The selected measurement lens is installed on the upper optical path autocollimator.

[0028] S400. Place the lens to be measured 8 on the reference flat crystal 2, so that the mechanical reference axis of the lens to be measured 8 is parallel to the measurement rotation axis; In a preferred embodiment, the edge of the concave surface is provided with an edge platform, and the normal line of the edge platform is parallel to the measurement rotation axis.

[0029] The edge platform refers to an annular reference plane formed outside the optical area of the lens concave surface through precision machining. This plane is used for mechanical positioning design, and the flatness requirement is high, but it is irrelevant to the optical performance. The operator needs to ensure that the entire edge platform surface is in full and smooth contact with the upper surface of the reference flat crystal 2 when placing the lens to be measured 8. Since the reference flat crystal 2 has been leveled by step S200, the normal line of the edge platform attached thereto is naturally parallel to the measurement rotation axis.

[0030] In a preferred embodiment, the edge platform and the concave surface are formed by one-time clamping.

[0031] Wherein, on the single-point diamond lathe, the concave optical surface is machined first after the workpiece is clamped once, and then the edge platform is machined without changing the state of the workpiece. The "one-time clamping forming" ensures that the optical surface and the positioning platform are manufactured in the same spatial coordinate system, thereby ensuring the high coincidence of the axes of the two. This means that after the machining is completed, the mechanical reference axis (the platform normal line) can represent the concave optical axis, and when the edge platform is attached to the reference flat crystal 2, the mechanical reference axis is parallel to the measurement rotation axis, which is essentially equivalent to making the concave optical axis parallel to the measurement rotation axis.

[0032] In a preferred embodiment, after step S400 and before step S500, the method further comprises the following steps: S410. Emitting a probe light beam to the convex surface of the lens to be measured 8 through the upper light path collimator 3, and adjusting the upper light path collimator 3 along the first direction until the optical center of the convex surface is preliminarily aligned with the measurement rotation axis. The step includes the following steps: S411. Emitting a probe light beam to the convex surface of the lens to be measured 8 through the upper light path collimator 3; S412. Moving the upper light path collimator 3 to a first position close to the reference flat crystal 2 along the first direction, the first position being a position where the focal plane of the first measurement lens coincides or approaches the vertex of the convex surface, so as to observe the third reflected image; the purpose of this step is not measurement, but to quickly establish the light path connection and find the target by taking advantage of the large field of view of the short focal length lens; S413. Continuing to move the upper light path collimator 3 to a second position along the first direction, the second position being a position where the beam convergence point of the upper light path collimator 3 coincides or approaches the optical center of the convex surface, so as to observe the fourth reflected image; this position switches the system to "measurement mode", with a small field of view and a high sensitivity to deviation, which can magnify micron-level center deviation into a jumping circle visible to the naked eye; S414. Rotating the four-dimensional adjustment table 1 to make the fourth reflected image form a jumping circle; converting invisible deviation into visual and measurable signals; S415. Reducing the jumping circle radius of the fourth reflected image to be less than a second threshold value by driving the translation dimension of the four-dimensional adjustment table 1. The jumping circle radius is reduced by driving the adjustment table to drive the follower to translate along the X-axis or the Y-axis, and after preliminary adjustment, the optical center of the convex surface is limited within a smaller deviation range, which ensures that the "long focal length lens" of the lower light path can easily find the reflected image of the concave surface in subsequent fine adjustment, thereby improving the detection efficiency.

[0033] S500. Emitting a probe light beam to the concave surface of the lens to be measured 8 through the lower light path collimator 4, and adjusting the lower light path collimator 4 and the four-dimensional adjustment table 1 until the optical center of the concave surface of the lens to be measured 8 is aligned with the measurement rotation axis; Step S500 comprises the following steps: S510. Emitting a probe light beam to the concave surface of the lens under test 8 through the lower light path collimator 4; S520. Moving the lower light path collimator 4 to a third position close to the reference flat 2 in the first direction, the third position being a position where the focal plane of the second measurement lens coincides or approaches the vertex of the concave surface, to observe a fifth reflected image; the purpose is the same as the initial search for the image; S530. Continue to move the lower light path collimator 4 to a fourth position in the first direction, the fourth position being a position where the beam convergence point coincides or approaches the optical center of the concave surface, to observe a sixth reflected image; the system enters a high-sensitivity measurement state; S540. Reduce the runout circle radius of the sixth reflected image to less than a third threshold value by driving the translation dimension of the four-dimensional adjustment table 1. By driving the adjustment table to drive the follow-up table to translate along the X axis or the Y axis, the optical center of the concave surface is finally realized to be accurately coaxial with the measurement rotation axis.

[0034] S600. Rotate the reference table 5 to obtain the runout circle radius of the first reflected image received by the upper light path collimator 3, and calculate the center deviation value of the lens under test 8 according to the runout circle radius; Wherein, the center deviation value is calculated by the following formula:

[0035] Wherein, θ represents the center deviation value, R is the runout circle radius of the first reflected image, R C is the reference curvature radius of the convex surface.

[0036] S700. Replace the lens under test 8, and repeat steps S400-S600 to complete the detection of the center deviation of a plurality of lenses under test 8. Since the reference flat 2 is used for positioning, the same batch of lenses under test 8 has very high repeat positioning accuracy. Therefore, in batch detection, after replacing the lens under test 8, there is no need to re-establish the reference, and only steps S400 to S600 need to be repeated, so that the detection can be quickly completed.

[0037] The application is same kind of meniscus multiple measurement, without instrument and tooling adjustment, only need to measure after the previous meniscus is taken down, according to the process of placing the lens and adjusting the coaxial and measuring center deviation two links operation, can complete the measurement. The adjustment operation only has according to the jumping circle of binocular collimator reflection image adjustment four-dimensional adjustment table 1 X axis translation and Y axis translation two dimensions, after operation skilled, single detection time can be shortened to 2 min within. The application is not to sacrifice the precision to obtain the speed, but through the ingenious light path design (double light path reflection type), structure design (edge platform) and process design (step alignment), in the guarantee even enhance the detection precision (≤5″) at the same time, the detection efficiency is improved by an order of magnitude (≤2 minutes / piece).

[0038] The above description is only the preferred embodiment of the application and the explanation of the applied technical principles. Those skilled in the art should understand that the application range involved in the application is not limited to the technical solutions formed by the specific combination of the above technical features, and should also cover other technical solutions formed by the combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the technical solutions formed by the mutual replacement of the above features and the technical features disclosed in the application (but not limited to) with similar functions.

Claims

1. A rapid detection method for the center deviation of an infrared meniscus lens, based on a dual-optical-path center deviation measuring device, wherein the dual-optical-path center deviation measuring device includes a rotatable reference stage (5), a four-dimensional adjustment stage (1) disposed on the reference stage (5), and a binocular collimator for emitting a beam. The rotation axis of the reference stage (5) is the measurement rotation axis, and its extension direction is a first direction. The binocular collimator includes an upper optical path collimator (3) and a lower optical path collimator (4) disposed on the reference stage (5) along the first direction. The beam directions of the upper optical path collimator (3) and the lower optical path collimator (4) are parallel to the first direction. The detection method includes the following steps: S100. Place the reference flat crystal (2) on the side of the four-dimensional adjustment stage (1) away from the reference stage (5); S200. Adjust the four-dimensional adjustment stage (1) until the extension of the plane normal of the reference flat crystal (2) is parallel to the first direction; S300. Install an upper optical path measuring lens (31) and a lower optical path measuring lens (41) on the upper optical path collimator (3) and the lower optical path collimator (4), respectively. S400. Place the lens to be tested (8) on the reference flat crystal (2) so that the mechanical reference axis of the lens to be tested (8) is parallel to the measurement rotation axis; S500. A probe beam is emitted to the concave surface of the lens under test (8) through the lower optical path collimator (4), and the lower optical path collimator (4) and the four-dimensional adjustment stage (1) are adjusted until the optical center of the concave surface of the lens under test (8) is aligned with the measurement rotation axis. S600. Rotate the reference stage (5) to obtain the radius of the jumping circle of the first reflected image received by the upper optical path collimator (3), and calculate the center deviation value of the lens under test (8) based on the radius of the jumping circle; S700. Replace the lens under test (8) and repeat steps S400-S600 to complete the detection of the center deviation of multiple lenses under test (8).

2. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, The concave surface has an edge platform at its edge, which is in contact with the reference flat crystal (2), and its normal is parallel to the measurement rotation axis.

3. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 2, characterized in that, The edge platform and the concave surface are formed by a single clamping process.

4. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, The steps following step S400 and before step S500 include the following steps: S410. A probe beam is emitted onto the convex surface of the lens to be tested (8) through the upper optical path collimator (3), and the upper optical path collimator (3) is adjusted along the first direction until the optical center of the convex surface is initially aligned with the measurement rotation axis.

5. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, The four-dimensional adjustment stage (1) has a central through hole, through which the light beam emitted by the lower optical collimator (4) can pass to the reference flat crystal (2). Step S200 includes the following steps: S210. A light beam is emitted through the upper optical collimator (3) and the light outlet of the lower optical collimator (4) is covered; S220. Adjust the tilt angle of the four-dimensional adjustment stage (1) until the jump of the second reflected image reflected by the reference flat crystal (2) is less than the first threshold when the reference stage (5) is rotated.

6. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, The focal length of the lower optical path measuring lens (41) is greater than the focal length of the upper optical path measuring lens (31), and the sum of the focal length of the lower optical path measuring lens (41) and the reference radius of curvature of the concave surface is within a preset distance range; the focal length of the upper optical path measuring lens (31) is greater than the reference radius of curvature of the convex surface; wherein, the reference radius of curvature of the concave surface and the convex surface is, for a sphere, its spherical radius of curvature, and for an aspherical surface, its vertex radius of curvature.

7. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 4, characterized in that, Step S410 includes the following steps: S411. A probe beam is emitted onto the convex surface of the lens to be tested (8) through the upper optical collimator (3); S412. Move the upper optical collimator (3) to a first position along the first direction near the reference flat crystal (2), the first position being the position where the focal plane of the first measuring lens coincides with or is close to the vertex of the convex surface, so as to observe the third reflected image; S413. Continue to move the upper optical collimator (3) along the first direction to the second position, where the beam convergence point coincides with or is close to the optical center of the convex surface, in order to observe the fourth reflected image; S414. Rotate the four-dimensional adjustment stage (1) to make the fourth reflected image form a jumping circle; S415. By driving the translation dimension of the four-dimensional adjustment stage (1), the radius of the jumping circle of the fourth reflected image is reduced to less than the second threshold.

8. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, Step S500 includes the following steps: S510. A probe beam is emitted onto the concave surface of the lens under test (8) using a lower optical path collimator (4); S520. Move the lower optical collimator (4) to a third position along the first direction, closer to the reference flat crystal (2), the third position being the position where the focal plane of the second measuring lens coincides with or is close to the vertex of the concave surface, so as to observe the fifth reflected image; S530. Continue to move the lower optical collimator (4) along the first direction to the fourth position, where the fourth position is the position where the beam convergence point coincides with or is close to the optical center of the concave surface, so as to observe the sixth reflection image; S540. By driving the translation dimension of the four-dimensional adjustment stage (1), the radius of the jumping circle of the sixth reflection image is reduced to less than the third threshold.

9. The rapid detection method for the center deviation of an infrared meniscus lens according to claim 1, characterized in that, The reference platform (5) is an air bearing turntable.

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