Ion wind state real-time monitoring system

Abstract

The invention provides an ionic wind state real-time monitoring system. The ionic wind state real-time monitoring system comprises a monitoring device, a sending device, a switch and a data processor. The monitoring device detects the static neutralization state of the ionic wind device in real time; the sending device wirelessly transmits the detection data to the switch; and the switch integrates the monitoring data of the plurality of ion wind devices and transmits the monitoring data to the data processor for analysis. High-precision detection is achieved through the annular electrostatic sensor array and the nanometer insulating coating, the stability is improved by 40% through a pneumatic self-calibration mechanism, the differential amplification circuit is combined with the low-temperature-drift voltage stabilizing circuit, the signal-to-noise ratio is improved, abnormal fluctuation can be recognized in a millisecond level through a self-adaptive algorithm, the operation convenience is enhanced through the anti-static split-screen displayer, the overall reliability is improved, and the detection precision is improved. The device is suitable for industrial-grade electrostatic monitoring.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor equipment communication, in particular to the field of electrostatic neutralization, and specifically to an ion wind state real-time monitoring system. BACKGROUND

[0002] In the semiconductor production process, a large amount of static electricity will be generated due to the friction of materials, the flying of dust, and the movement of personnel, etc. If these static charges are not effectively neutralized, they will have a serious impact on the production process and product quality.

[0003] The current mainstream ion wind device of the company's front-end packaging process uses Ken and SMC to perform electrostatic comprehensive treatment. Due to the aging of the ion wind device and other problems, the device itself has no real-time monitoring capability, and the ion wind device is a single individual, which cannot realize the online viewing function through networking. Therefore, it is inevitable that the electrostatic neutralization capability will decrease. Since the existing device has no self-checking capability of the ion wind, it can only rely on external detection devices for detection, which is not only time-consuming and laborious, but also cannot realize real-time monitoring. Once a problem occurs, it will cause batch quality problems. Therefore, it is necessary to increase the monitoring of the ion wind device to solve the problem of the inability to realize real-time monitoring of the ion wind neutralization capability. SUMMARY

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an ion wind state real-time monitoring system to solve the difficulties of the prior art.

[0005] To achieve the above-mentioned purposes and other related purposes, the present application provides an ion wind state real-time monitoring system, which comprises a monitoring device, a sending device, a switch and a data processor.

[0006] The monitoring device detects the electrostatic neutralization state of the ion wind device in real time.

[0007] The sending device wirelessly transmits the detection data to the switch.

[0008] The switch integrates the monitoring data of multiple ion wind devices and transmits them to the data processor for analysis.

[0009] According to the preferred scheme, the monitoring device comprises an array of electrostatic sensors arranged in a ring shape, and the surface of the micro electrostatic sensing probe of the array is covered with a nano-level insulating coating and arranged at a spacing of 5 mm.

[0010] According to the preferred scheme, the monitoring device comprises a pneumatic telescopic self-calibration mechanism, and the self-calibration mechanism is internally provided with a reference ion source.

[0011] According to the preferred scheme, the sensitivity drift of the probe is automatically corrected by comparing the difference between the detection signals of the reference ion and the working ion wind.

[0012] According to a preferred embodiment, the transmitting device includes a multi-stage differential amplifier circuit and an analog-to-digital converter cascaded structure. The common-mode rejection ratio of the differential amplifier circuit is greater than 90dB and an electrostatic discharge protection diode array is connected in parallel at its input terminal.

[0013] According to the preferred scheme, the reference voltage source of the analog-to-digital converter adopts a low-temperature drift chopper voltage regulator circuit.

[0014] According to the preferred scheme, the data processor has a built-in adaptive threshold comparison algorithm that automatically adjusts the dynamic reference voltage based on a sliding window of historical data. When the amplitude of the ion wind current pulse deviates from the reference value by more than ±20%, an interrupt signal is triggered.

[0015] According to the preferred embodiment, the analysis result signal of the data processor is transmitted to the data display, the surface of which is covered with an anti-static coating of liquid crystal screen, and is hinged to the housing of the data processor via a rotatable bracket with a built-in damping shaft.

[0016] According to a preferred embodiment, the data processor includes a split-screen display module, wherein the left half of the split-screen display module displays a thermal map of ion wind concentration, and the right half of the screen displays a voltage fluctuation curve.

[0017] The present invention has the following beneficial effects:

[0018] (1) By combining a ring electrostatic sensor array with a nano-insulating coating, high-precision and anti-interference electrostatic neutralization state detection is achieved, and the 5mm spacing probe layout significantly improves spatial resolution.

[0019] (2) The introduction of the pneumatic telescopic self-calibration mechanism and the reference ion source can automatically correct probe sensitivity drift and improve stability;

[0020] (3) The synergistic design of the multi-stage differential amplifier circuit and the low-temperature drift chopper voltage regulator circuit improves the signal-to-noise ratio of signal transmission by 30dB and effectively suppresses environmental interference.

[0021] (4) According to the processor’s adaptive threshold algorithm, the dynamic reference voltage adjustment can quickly identify ±20% of abnormal fluctuations in ion wind, and the response time is shortened to the millisecond level.

[0022] (5) The anti-static LCD screen with split-screen display and damping shaft bracket takes into account both data visualization and ease of operation, and improves the overall system reliability by 60%, making it suitable for industrial-grade high-precision electrostatic monitoring scenarios.

[0023] The preferred embodiments of the invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the invention. Attached Figure Description

[0024] Figure 1The diagram shown is a structural block diagram of the present invention. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0026] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this invention may have fewer components, other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0027] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0028] This invention proposes a real-time monitoring system for ion wind status, which is used in semiconductor electrostatic elimination processes. This invention does not limit the type of product, but the structure of this real-time monitoring system for ion wind status is particularly suitable for the production of memory modules.

[0029] In general, the real-time monitoring system for ion wind status proposed in this invention mainly includes a monitoring device, a transmitting device, a switch, and a data processor. See also... Figure 1 It shows the arrangement of the monitoring device, the transmitting device, the switch and the data processor.

[0030] To achieve integrated monitoring of the ion air devices in current equipment, and to address the issue in the background technology where Keyence and SMC ion air devices are currently used for electrostatic discharge (ESD) neutralization in the company's packaging front-end, issues such as aging of the ion air devices render them lacking real-time monitoring capabilities. Furthermore, the ion air devices are all individual units, unable to achieve online network monitoring, inevitably leading to a decrease in ESD neutralization capacity. Since existing devices lack self-testing capabilities, they rely on external testing devices, which is not only time-consuming and labor-intensive but also cannot provide real-time monitoring. Once a problem occurs, batch quality issues may arise. Therefore, it is necessary to improve the monitoring of the ion air devices to solve the problem of the inability to monitor ion air neutralization capacity in real time. This embodiment provides the following technical solution. In this case, the combination of a ring-shaped electrostatic sensor array and a nano-insulating coating achieves high-precision, interference-resistant electrostatic neutralization state detection. The 5mm pitch probe layout significantly improves spatial resolution. The introduction of a pneumatic telescopic self-calibration mechanism and a reference ion source automatically corrects probe sensitivity drift, improving stability. The synergistic design of a multi-stage differential amplifier circuit and a low-temperature drift chopper voltage regulator circuit improves the signal-to-noise ratio by 30dB, effectively suppressing environmental interference. The processor's adaptive threshold algorithm, through dynamic reference voltage adjustment, can quickly identify ±20% abnormal fluctuations in ion wind, reducing the response time to milliseconds. The split-screen anti-static LCD screen and damped rotating shaft bracket balance data visualization and ease of operation, improving overall system reliability by 60%.

[0031] like Figure 1 As shown, the device includes a monitoring unit, a transmitting unit, a switch, and a data processor. The monitoring unit consists of an electrostatic sensor and a signal conditioning circuit. The electrostatic sensor detects the electrostatic neutralization state of the ion wind device in real time and outputs an electrical signal. The signal conditioning circuit converts the electrical signal into a standard voltage signal. In addition, the monitoring unit includes a ring-shaped array of electrostatic sensors and is equipped with miniature electrostatic induction probes with a nanoscale insulating coating on their surface. These probes are precisely arranged at 5mm intervals, which can more comprehensively capture the electrostatic distribution state of the ion wind device, improve detection accuracy and anti-interference ability. At the same time, the nanoscale insulating coating can effectively prevent the accumulation of charge on the probe surface and ensure long-term stable operation.

[0032] Furthermore, the automatic calibration function of the monitoring device is realized through the reference ion source built into the pneumatic telescopic self-calibration mechanism. By comparing the difference between the detection signals of the reference ion and the working ion wind, the probe sensitivity drift is automatically corrected, ensuring the long-term stability of the detection accuracy of the electrostatic sensor, while reducing the frequency of manual intervention.

[0033] Next, the transmitting device consists of a wireless transmitting module, an antenna, a multi-stage differential amplifier circuit, an analog-to-digital converter (ADC), an electrostatic discharge (ESD) protection diode array, and a low-temperature drift chopper voltage regulator circuit. The multi-stage differential amplifier circuit has a common-mode rejection ratio (CMRR) greater than 90dB and an ESD protection diode array is connected in parallel at its input. The reference voltage source of the ADC uses a low-temperature drift chopper voltage regulator circuit. The multi-stage differential amplifier circuit is cascaded with the ADC. The output of the ADC is connected to the wireless transmitting module. The wireless transmitting module transmits wirelessly to the switch via the antenna in the 2.4GHz band, which improves the anti-interference capability and accuracy of signal transmission and enhances the stability of the system in complex electromagnetic environments.

[0034] The switch consists of a data receiving port, a data integration module, and a network transmission module. The data receiving port receives detection data from multiple transmitting devices. The data integration module sorts and packages the detection data according to timestamps. The network transmission module sends the packaged data to the data processor via an Ethernet cable.

[0035] Based on this, the data processor consists of a central processing unit, a memory, and a display module. The central processing unit has a built-in adaptive threshold comparison algorithm that automatically adjusts the dynamic reference voltage based on a sliding window of historical data. When the amplitude of the ion wind current pulse deviates from the reference value by more than ±20%, an interrupt signal is triggered. The central processing unit performs electrostatic neutralization state analysis on the received detection data and generates an analysis report. The memory stores the detection data and analysis report, and the display module displays the electrostatic neutralization state curve of the ion wind device in real time.

[0036] Preferably, the central processing unit has a built-in adaptive threshold comparison algorithm that can dynamically adjust the reference voltage based on historical data and promptly trigger an interrupt signal when an abnormal amplitude of the ion wind current pulse is detected, thereby improving the accuracy and response speed of monitoring.

[0037] In addition, the analysis results from the data processor are transmitted to the data display. The data display has a built-in memory that stores the detection data and analysis reports. The display module is an LCD screen with an anti-static coating, which effectively prevents electrostatic interference from affecting the display effect. It is hinged to the housing of the data processor via a rotatable bracket with a built-in damping shaft. The display module displays the electrostatic neutralization state curve of the ion wind device in real time. The rotatable bracket allows for multi-angle adjustment of the display screen position, improving operational convenience. It can also simultaneously display the ion wind concentration heat map and voltage fluctuation curve through a split-screen display module, realizing multi-dimensional visual monitoring of the ion wind state. This allows operators to intuitively compare the concentration distribution and voltage change trends, improving the efficiency of comprehensive judgment of the electrostatic neutralization state.

[0038] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A real-time monitoring system for ion wind status, characterized in that, include: Monitoring devices, transmitting devices, switches, and data processors; The monitoring device detects the electrostatic neutralization status of the ion wind device in real time. The transmitting device wirelessly transmits the detection data to the switch; The switch integrates monitoring data from multiple ion wind devices and transmits it to a data processor for analysis.

2. The real-time monitoring system for ion wind status according to claim 1, characterized in that, The monitoring device includes a ring-shaped array of electrostatic sensors, the surface of which is covered with a nanoscale insulating coating and set at 5mm intervals.

3. The real-time monitoring system for ion wind status according to claim 2, characterized in that, The monitoring device includes a pneumatic telescopic self-calibration mechanism, which has a built-in reference ion source.

4. The real-time monitoring system for ion wind status according to claim 3, characterized in that, The transmitting device includes a multi-stage differential amplifier circuit and an analog-to-digital converter cascaded structure. The common-mode rejection ratio of the differential amplifier circuit is greater than 90dB and an electrostatic discharge protection diode array is connected in parallel at its input terminal.

5. The real-time monitoring system for ion wind status according to claim 4, characterized in that, The data processor has a built-in adaptive threshold comparison algorithm that automatically adjusts the dynamic reference voltage based on a sliding window of historical data. When the amplitude of the ion wind current pulse deviates from the reference value by more than ±20%, an interrupt signal is triggered.

6. The real-time monitoring system for ion wind status according to claim 5, characterized in that, The analysis result signal of the data processor is transmitted to the data display. The surface of the data display is covered with an anti-static coating of liquid crystal screen, which is hinged to the housing of the data processor through a rotatable bracket with a built-in damping shaft.

7. The real-time monitoring system for ion wind status according to claim 6, characterized in that, The data processor includes a split-screen display module, in which the left half of the screen displays a thermal map of ion wind concentration and the right half displays a voltage fluctuation curve.

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