Electric adjustable light spot homogenizing equipment and data processing method thereof

Abstract

The invention relates to the technical field of optics, and discloses electric adjustable light spot homogenizing equipment and a data processing method thereof, so as to integrate light homogenizing and light spot size adjusting functions and realize automatic adjustment. The equipment comprises a first cylindrical lens array, a second cylindrical lens array, a third cylindrical lens array, a fourth cylindrical lens array and a focusing lens which are perpendicular to an optical axis and are arranged in sequence, the second cylindrical lens array, the third cylindrical lens array and a lens base of the focusing lens are fixed on the bottom plate; the axial directions of two adjacent cylindrical lens arrays are orthogonal; the lens bases of the first cylindrical lens array and the fourth cylindrical lens array are respectively limited on a linear guide rail parallel to the optical axis; the lens bases of the first cylindrical lens array and the fourth cylindrical lens array are respectively matched with two different lead screws; the two lead screws are respectively connected with output shafts of two different motors through couplings; and the main controller adjusts the form of a rectangular light spot on a focal plane corresponding to the focusing lens by adjusting the positions of the first cylindrical lens array and the fourth cylindrical lens array.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical technology, in particular to an electrically adjustable homogenized light spot device and a data processing method thereof. BACKGROUND

[0002] Optical devices and systems need to use homogenization function in some scenarios.

[0003] Most of the existing homogenization products are assembled after the completion of the whole, in addition to the pitch and / or yaw and other items, the light spot size is also fixed without adjustable freedom.

[0004] Among them, in the existing system, the homogenization and light spot size adjustment functions are realized by two independent function modules respectively. And there are often many other optical components between the two function modules, which cooperates to control the complexity of the precision. Therefore, there is no related device on the market that integrates homogenization and light spot size adjustment functions and realizes automatic adjustment. SUMMARY

[0005] The present application aims to disclose an electrically adjustable homogenized light spot device and a data processing method thereof, to integrate homogenization and light spot size adjustment functions and realize automatic adjustment.

[0006] To achieve the above purpose, the electrically adjustable homogenized light spot device disclosed by the present application comprises:

[0007] The first cylindrical lens array, the second cylindrical lens array, the third cylindrical lens array, the fourth cylindrical lens array and the focusing lens are arranged in sequence perpendicular to the optical axis; the mirror seat of the second cylindrical lens array, the third cylindrical lens array and the focusing lens is fixed on the bottom plate; each cylindrical lens array is adjacent to the series of cylindrical lens units parallel to the axial direction, and the axial direction of the adjacent two cylindrical lens arrays is orthogonal;

[0008] The mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array are respectively limited on the linear guide rail parallel to the optical axis; and the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array are respectively matched with two different lead screws; the two lead screws are respectively connected with the output shafts of two different motors through the shaft coupling;

[0009] The linear guide rail and the two motors are fixed on the bottom plate, and two groups of sensors are also disposed on the bottom plate;

[0010] A controller connected with the two motors and the two groups of sensors, configured to determine a starting zero position and a maximum displacement within a displacement range of a mirror seat of the first cylindrical lens array and a mirror seat of the fourth cylindrical lens array respectively according to the two groups of sensors, obtain sampling data and determine a mapping relationship between a spacing between the first cylindrical lens array and the second cylindrical lens array and a span of a rectangular light spot on a corresponding focal plane of the focusing lens in a corresponding dimension, and between a spacing between the fourth cylindrical lens array and the third cylindrical lens array and a span of the rectangular light spot in another dimension, and determine a position of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in a target rectangular light spot task according to the mapping relationship to drive the two motors to perform respectively.

[0011] Preferably, the main controller determines the position of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in the target rectangular light spot task according to the mapping relationship to drive the two motors to perform specifically comprises:

[0012] Step S1, obtaining a first group of sampling data and a second group of sampling data respectively after a collimated light beam is incident on the first cylindrical lens array;

[0013] Wherein, a three-axis coordinate system is defined with a Z-axis direction as an optical axis direction and a Y-axis direction perpendicular to a horizontal plane, when an axial direction of the first cylindrical lens array is mode one of a Y-axis direction, the first group of sampling data records a relationship between a span of a rectangular light spot in an X-axis direction on a focal plane of the focusing lens and a displacement of the first cylindrical lens array in a case of fixing the fourth cylindrical lens array, and the second group of sampling data records a relationship between a span of the rectangular light spot in the Y-axis direction and a displacement of the fourth cylindrical lens array in a case of fixing the first cylindrical lens array; if the axial direction of the first cylindrical lens array is mode two of an X-axis direction, the first group of sampling data records a relationship between a span of the rectangular light spot in the X-axis direction and a displacement of the fourth cylindrical lens array in a case of fixing the first cylindrical lens array, and the second group of sampling data records a relationship between a span of the rectangular light spot in the Y-axis direction and a displacement of the first cylindrical lens array in a case of fixing the fourth cylindrical lens array;

[0014] Step S2, fitting a first curve between a span of the rectangular light spot in the X-axis direction and a mirror seat displacement of the first cylindrical lens array in the mode one or the fourth cylindrical lens array in the mode two according to the first group of sampling data, and fitting a second curve between a span of the rectangular light spot in the Y-axis direction and a mirror seat displacement of the fourth cylindrical lens array in the mode one or the first cylindrical lens array in the mode two according to the second group of sampling data;

[0015] Step S3, when the span of the rectangular light spot expected output in the X-axis and Y-axis directions is A and B respectively, if the matching mode is the mode one, the displacement A1 of the first cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the fourth cylindrical lens array corresponding to B is determined according to the second curve; if the matching mode is the mode two, the displacement A1 of the fourth cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the first cylindrical lens array corresponding to B is determined according to the second curve; then the two motors are instructed to execute the corresponding displacement adjustment synchronously.

[0016] Preferably, the first cylindrical lens array, the second cylindrical lens array, the third cylindrical lens array and the fourth cylindrical lens array are perpendicular to the same straight line, and the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array share the linear guide rail.

[0017] Preferably, the first curve adopts Wherein, P1 is the displacement position of the first cylindrical lens array in the mode one or the displacement position of the fourth cylindrical lens array in the mode two, D1 is the span size of the light spot on the target position in the X-axis direction, C0, C1 and C2 are polynomial coefficients;

[0018] The second curve adopts Wherein, P2 is the displacement position of the fourth cylindrical lens array in the mode one or the displacement position of the first cylindrical lens array in the mode two, K0, K1 and K2 are polynomial coefficients, and D2 is the span size of the light spot on the target position in the Y-axis direction.

[0019] Preferably, the device further comprises a collimator located between the first cylindrical lens array and the light source.

[0020] Preferably, the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array extend outwardly with a touch rod; the front and rear two photoelectric sensors in the moving direction range of the mirror seat of the first cylindrical lens array form a group, and the front and rear two photoelectric sensors in the moving direction range of the mirror seat of the fourth cylindrical lens array form a group; the controller is used to determine the position of the touch rod captured by the photoelectric sensor as the corresponding initial zero position or maximum displacement;

[0021] Or: the matched structure formed by the photoelectric sensor and the touch rod is replaced by a limiting stop sheet with a pressure sensor fixed on the linear guide rail, and the connection relationship between the photoelectric sensor and the controller is replaced by the connection relationship between the pressure sensor and the controller.

[0022] Preferably, the first, second, third and fourth cylindrical lens arrays are of the same square cylindrical lens array with the same structure parameters and material.

[0023] Preferably, the square cylindrical lens array is formed by a single row of planar convex lenses with the same structure parameters and material, the second and third cylindrical lens arrays are arranged adjacent to two planes, the light beam in the first cylindrical lens array is incident from the convex surface, and the light beam in the fourth cylindrical lens array is incident from the plane.

[0024] Preferably, a protective window piece is further arranged in the direction of the outgoing light beam of the focusing lens.

[0025] To achieve the above-mentioned purposes, the application further discloses a data processing method of the electrically adjustable uniform light spot device, comprising:

[0026] In step S100, the starting zero position and the maximum displacement of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in the electrically adjustable uniform light spot device according to any one of claims 1 to 9 are determined in the displacement range.

[0027] In step S200, sampling data is obtained, and a mapping relationship between the interval between the first cylindrical lens array and the second cylindrical lens array and the span of the rectangular light spot on the corresponding focal plane corresponding to the focusing lens in the corresponding dimension, and the interval between the fourth cylindrical lens array and the third cylindrical lens array and the span of the rectangular light spot in another dimension is obtained according to the sampling data.

[0028] In step S300, the positions of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in the target rectangular light spot task are determined according to the mapping relationship to drive the two motors to perform respectively.

[0029] The application has the following beneficial effects:

[0030] 1. The starting zero position and the maximum displacement of the first and fourth lenses based on sensor positioning can be displaced, as long as the position of the starting zero position sensor remains unchanged, the standard can be continued from the series of sampling data at the time of calibration to subsequent flexible switching based on the target light spot, and the accuracy of data processing in the working process can be ensured to be consistent through the standard unification.

[0031] 2、The spot shape of the target position is a rectangular spot, and the span size in the X-axis direction is essentially dominated by a group of adjacent and adjustable cylindrical lens arrays; and the span size in the Y-axis direction is dominated by another group of adjacent and adjustable cylindrical lens arrays, and the fitting of the first curve and the second curve essentially corresponds to the fusion of the theoretical calculation results of each component based on its own properties in the propagation process of the light beam and the assembly error between the components and the non-ideal characteristics of the components, which has better accuracy compared to pure theoretical derivation.

[0032] Wherein, the theoretical basis supporting the present application is: taking the first mode as an example, if the target position is the focal plane of the focusing lens behind the fourth cylindrical lens array, then the spot size D X of the target spot in the X-axis direction is:

[0033]

[0034] The spot size D Y of the target spot in the Y-axis direction is:

[0035]

[0036] Wherein, F is the focal length of the focusing lens; p is the unit width (the size of each lens unit) of the cylindrical lens array; f micro is the unit focal length of the cylindrical lens array; d0 is the distance between the first cylindrical lens array and the second cylindrical lens array; d fix is the fixed distance between the second cylindrical lens array and the third cylindrical lens array; d1 is the distance between the third cylindrical lens array and the fourth cylindrical lens array. In other words, the spans of the aforementioned target spot in the X-axis direction and the Y-axis direction are theoretically linearly related to d0 and d1, respectively, and have regular patterns. At the same time, based on the non-ideal characteristics of the cylindrical lens, rotating the cylindrical lens around the optical axis by 90° will cause the spot shape to rotate by 90° simultaneously, thereby generating the above two different modes.

[0037] The present application will be further described in detail below with reference to the accompanying drawings. DRAWINGS

[0038] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application, and are incorporated in and constitute a part of this application. The embodiments of the application illustrated in the drawings, and their description, are presented to explain the application and not to limit or define the application. In the drawings:

[0039] Figure 1 is a partial optical path schematic diagram of the electrically adjustable homogenized spot device disclosed in the embodiments of the present application. DETAILED DESCRIPTION

[0040] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways as defined and covered by the claims.

[0041] Example 1

[0042] This embodiment discloses an electrically adjustable uniform light spot device.

[0043] like Figure 1 As shown, the device in this embodiment includes:

[0044] The first cylindrical lens array 2, the second cylindrical lens array 3, the third cylindrical lens array 4, the fourth cylindrical lens array 5, and the focusing lens 6 are arranged perpendicular to the optical axis and in sequence. Each cylindrical lens array consists of a series of cylindrical lens units that are parallel in the axial direction and are arranged in adjacent rows. The axial directions of two adjacent cylindrical lens arrays are orthogonal (or it can be considered that the change of the latter cylindrical lens array compared to the former cylindrical lens is that it rotates 90° around the optical axis). The lens mounts of the second cylindrical lens array, the third cylindrical lens array, and the focusing lens are fixed on the base plate.

[0045] Preferably, in this embodiment, the first, second, third, and fourth cylindrical lens arrays are all square cylindrical lens arrays with the same structural parameters and materials. Each cylindrical lens array consists of a single row of plano-convex lenses with the same structural parameters and materials, arranged adjacent to each other. The two planes of the second and third cylindrical lens arrays are arranged adjacent to each other. In the first cylindrical lens array, the light beam is incident from the convex surface, and in the fourth cylindrical lens array, the light beam is incident from the plane. Preferably, in the structural parameters of each cylindrical lens as an array unit, R = 8.4 mm and P = 1.3 mm; where P is the distance between the central axes of two adjacent cylindrical lenses, and R is the radius of curvature.

[0046] Better, such as Figure 1 As shown, the device in this embodiment also includes a collimator 1 located between the first cylindrical lens array and the light source; a protective window is also provided in the direction of the emitted beam of the focusing lens; the first cylindrical lens array, the second cylindrical lens array, the third cylindrical lens array and the fourth cylindrical lens array are perpendicular to the same straight line, and the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array share a linear guide rail.

[0047] In this embodiment, the mirror seats of the first and fourth cylindrical lens arrays are respectively limited on linear guides parallel to the optical axis; and the mirror seats of the first and fourth cylindrical lens arrays are respectively matched with different two lead screws; the two lead screws are respectively connected with the output shafts of different two motors through couplings. The linear guides and the two motors are fixed on a bottom plate, and two groups of sensors are also arranged on the bottom plate. The two motors and the two groups of sensors are respectively connected with a controller, which is configured to determine the starting zero position and the maximum displacement in the displacement range of the mirror seats of the first and fourth cylindrical lens arrays respectively according to the two groups of sensors, and then adjust the positions of the mirror seats of the first and fourth cylindrical lens arrays to adjust the shape of the rectangular light spot on the corresponding focal plane of the focusing lens. The rectangular light spot is the working condition required in the sample processing process.

[0048] Preferably, the mirror seats of the first and fourth cylindrical lens arrays extend outwardly with touch rods; the front and rear two photoelectric sensors in the moving direction range of the mirror seat of the first cylindrical lens array form a group, and the front and rear two photoelectric sensors in the moving direction range of the mirror seat of the fourth cylindrical lens array form a group; and the connecting line direction of the two sensors in the group is generally parallel to the optical axis direction and also parallel to the lead screw direction. In order to save space and make the internal structure of the device simple, the two motors are preferably arranged on the two sides of the optical axis. Correspondingly, the controller is configured to determine the position of the touch rod captured by the photoelectric sensor as the corresponding starting zero position or maximum displacement. As an equivalent alternative, the matching structure formed by the aforementioned photoelectric sensor and the touch rod can be replaced by a limiting stopper with a pressure sensor fixed on the linear guide, and the connection relationship between the photoelectric sensor and the controller is replaced by the connection relationship between the pressure sensor and the controller.

[0049] Based on the above structure, the main controller adjusts the positions of the mirror seats of the first and fourth cylindrical lens arrays to adjust the shape of the rectangular light spot on the corresponding focal plane of the focusing lens; the essence is to obtain the mapping relationship between the distance between the first and second cylindrical lens arrays and the span of the rectangular light spot on the corresponding focal plane corresponding to the focusing lens in the corresponding dimension, and the distance between the fourth and third cylindrical lens arrays and the span of the rectangular light spot in the other dimension, and then determine the positions of the mirror seats of the first and fourth cylindrical lens arrays in the target rectangular light spot task to drive the two motors to execute respectively. Preferably, an example of a specific technical implementation path is specifically included:

[0050] Step S1, after the collimated light beam is incident on the first cylindrical lens array, a first group of sampling data and a second group of sampling data are respectively obtained.

[0051] In this step, a three-axis coordinate system is defined with the Z-axis direction as the optical axis direction and the Y-axis direction perpendicular to the horizontal plane. When the axial direction of the first cylindrical lens array is mode one with the Y-axis direction, the first group of sampling data records the relationship between the span (or size) of the rectangular light spot in the X-axis direction on the focal plane of the focusing lens and the displacement of the first cylindrical lens array with the fourth cylindrical lens array fixed. The second group of sampling data records the relationship between the span of the rectangular light spot in the Y-axis direction and the displacement of the fourth cylindrical lens array with the first cylindrical lens array fixed. If the axial direction of the first cylindrical lens array is mode two with the X-axis direction, the first group of sampling data records the relationship between the span of the rectangular light spot in the X-axis direction and the displacement of the fourth cylindrical lens array with the first cylindrical lens array fixed. The second group of sampling data records the relationship between the span of the rectangular light spot in the Y-axis direction and the displacement of the first cylindrical lens array with the fourth cylindrical lens array fixed.

[0052] Optionally, the rectangular light spot on the focal plane of the focusing lens can be identified in the X-axis and Y-axis directions by a beam quality analyzer arranged on the focal plane and transmitted to the main controller.

[0053] In the sampling process corresponding to any one mode, the mapping relationship between the distance between the first cylindrical lens array and the second cylindrical lens array and the span of the rectangular light spot on the corresponding dimension on the focal plane of the focusing lens, and the distance between the fourth cylindrical lens array and the third cylindrical lens array and the span of the rectangular light spot on the other dimension can be intuitively observed and determined.

[0054] Preferably, in the process of acquiring the sampling data, when the first cylindrical lens array is adjusted in displacement, the fourth cylindrical lens array is fixed at the middle value of the span range it determines, and similarly, when the fourth cylindrical lens array is adjusted in displacement, the first cylindrical lens array is fixed at the middle value of the span range it determines.

[0055] In step S2, the first curve between the span of the rectangular light spot in the X-axis direction and the displacement of the first cylindrical lens array in mode one or the fourth cylindrical lens array in mode two is fitted according to the first group of sampling data, and the second curve between the span of the rectangular light spot in the Y-axis direction and the displacement of the fourth cylindrical lens array in mode one or the first cylindrical lens array in mode two is fitted according to the second group of sampling data.

[0056] Step S3, when the span of the rectangular light spot expected output in the X-axis and Y-axis directions is A and B respectively, if the matching mode is mode one, the displacement A1 of the first cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the fourth cylindrical lens array corresponding to B is determined according to the second curve; if the matching mode is mode two, the displacement A1 of the fourth cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the first cylindrical lens array corresponding to B is determined according to the second curve; then the two motors are instructed to execute the corresponding displacement adjustment synchronously.

[0057] The principle based on the above steps is: taking the first mode as an example, if the target position is the focal plane of the focusing lens behind the fourth cylindrical lens array, then the spot size D X of the target light spot in the X-axis direction is:

[0058]

[0059] The spot size D Y of the target light spot in the Y-axis direction is:

[0060] Wherein, F is the focal length of the focusing lens; p is the unit width (the size of each lens unit) of the cylindrical lens array; f micro is the unit (or "cylindrical lens unit") focal length of the cylindrical lens array; d0 is the interval between the first cylindrical lens array and the second cylindrical lens array; d fix is the fixed interval between the second cylindrical lens array and the third cylindrical lens array; d1 is the interval between the third cylindrical lens array and the fourth cylindrical lens array. In other words, the span of the aforementioned target light spot in the X-axis and Y-axis directions is theoretically linearly related to d0 and d1 respectively, and is independent of the size of the incident light spot (preferably spanning at least 3 cylindrical lens units but not more than the size of the cylindrical lens array) and the interval between the third cylindrical lens array and the focusing lens (providing great convenience for the deployment of the focusing lens, in different devices, if the interval between the focusing lens and the third cylindrical lens array changes, the focal plane where the focusing lens is located also changes accordingly, which itself has a regular pattern). At the same time, based on the non-ideal characteristics of the cylindrical lens, rotating 90° around the optical axis itself will drive the light spot shape to rotate 90° synchronously, thereby generating the above two different modes one and mode two.

[0061] In the present application, the spot shape of the target position is a rectangular spot, and the span size in the X-axis direction is essentially dominated by a group of adjacent and adjustable cylindrical lens arrays, and the span size in the Y-axis direction is essentially dominated by another group of adjacent and adjustable cylindrical lens arrays. By fitting the first curve and the second curve, the theoretical calculation results of each component based on its own properties in the propagation process of the light beam, the assembly errors between the components, and the non-ideal characteristics of the components are fused, which has better accuracy compared to pure theoretical derivation.

[0062] Preferably, the first curve adopts wherein P1 is the displacement position of the first cylindrical lens array in mode one or the displacement position of the fourth cylindrical lens array in mode two, D1 is the span size of the spot on the target position in the X-axis direction, C0, C1 and C2 are polynomial coefficients; the second curve adopts wherein P2 is the displacement position of the fourth cylindrical lens array in mode one or the displacement position of the first cylindrical lens array in mode two, K0, K1 and K2 are polynomial coefficients, and D2 is the span size of the spot on the target position in the Y-axis direction.

[0063] Embodiment 2

[0064] The present embodiment discloses a data processing method of an electrically adjustable uniformization spot device, comprising:

[0065] Step S100, determining the starting zero position and the maximum displacement in the displacement range of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in the electrically adjustable uniformization spot device according to two groups of sensors.

[0066] Step S200, obtaining sampling data and obtaining the mapping relationship between the span of the rectangular spot on the corresponding focal plane in the corresponding dimension and the interval between the first cylindrical lens array and the second cylindrical lens array, and the interval between the fourth cylindrical lens array and the third cylindrical lens array and the span of the rectangular spot in the other dimension.

[0067] Step S300, determining the position of the mirror seat of the first cylindrical lens array and the mirror seat of the fourth cylindrical lens array in the target rectangular spot task to drive the two motors to execute respectively. Similarly, the specific execution of this step can refer to steps S1 to S3 described above, and will not be repeated here.

[0068] In summary, the electrically adjustable uniformization spot device and the data processing method thereof disclosed in the above two embodiments of the present application have at least the following beneficial effects:

[0069] 1、Based on the sensor positioning displacement of the first and fourth lens starting zero position and maximum displacement, as long as the starting zero sensor position is unchanged, the standard can be continued from the series of sampling data at the calibration time to the subsequent flexible switching based on the target spot, and the accuracy of data processing in the working process can be ensured through the standard unification.

[0070] 2、The spot shape of the target position is a rectangular spot, the span size in the X-axis direction is essentially dominated by a group of adjacent and adjustable cylindrical lens arrays, and the span size in the Y-axis direction is dominated by another group of adjacent and adjustable cylindrical lens arrays, and the essence of fitting the first curve and the second curve is equivalent to fusing the theoretical calculation results of each component based on its own properties in the propagation process of the light beam and the assembly error between the components and the non-ideal characteristics of the components, which has better accuracy compared with pure theoretical derivation.

[0071] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An electrically adjustable light spot homogenizing device, characterized in that, include: A first cylindrical lens array, a second cylindrical lens array, a third cylindrical lens array, a fourth cylindrical lens array, and a focusing lens are arranged perpendicular to the optical axis and in sequence; the lens mounts of the second cylindrical lens array, the third cylindrical lens array, and the focusing lens are fixed on the base plate; each cylindrical lens array consists of a series of cylindrical lens units arranged in parallel axial directions, with the axial directions of two adjacent cylindrical lens arrays being orthogonal. The lens mounts of the first cylindrical lens array and the fourth cylindrical lens array are respectively positioned on linear guide rails parallel to the optical axis; and the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array are respectively engaged with two different lead screws; the two lead screws are respectively connected to the output shafts of two different motors via couplings. The linear guide rail and the two motors are fixed on the base plate, and two sets of sensors are also deployed on the base plate; The controller, connected to the two motors and the two sets of sensors, is used to determine the initial zero position and maximum displacement within the displacement range of the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array, respectively, based on the two sets of sensors; acquire sampling data and obtain the mapping relationship between the distance between the first cylindrical lens array and the second cylindrical lens array and the span of the rectangular light spot on the focal plane corresponding to the focusing lens in the corresponding dimension, and the distance between the fourth cylindrical lens array and the third cylindrical lens array and the span of the rectangular light spot in another dimension, based on the sampling data; and then determine the position of the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array in the target rectangular light spot task based on the mapping relationship to drive the two motors to execute respectively.

2. The electrically adjustable homogenizing light spot device according to claim 1, characterized in that, The first cylindrical lens array, the second cylindrical lens array, the third cylindrical lens array, and the fourth cylindrical lens array are perpendicular to the same straight line, and the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array share the same linear guide rail.

3. The electrically adjustable homogenizing light spot device according to claim 1 or 2, characterized in that, The main controller determines the positions of the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array in the target rectangular light spot task according to the mapping relationship, so as to drive the two motors to perform specific actions including: Step S1: After the collimated beam is incident on the first cylindrical lens array, the first set of sampling data and the second set of sampling data are acquired respectively; In this system, a three-axis coordinate system is defined with the Z-axis as the optical axis and the Y-axis perpendicular to the horizontal plane. When the axial direction of the first cylindrical lens array is the Y-axis (mode one), the first set of sampling data, with the fourth cylindrical lens array fixed, records the relationship between the span of the rectangular light spot formed on the focal plane of the focusing lens in the X-axis direction and the displacement of the first cylindrical lens array. The second set of sampling data, with the first cylindrical lens array fixed, records the relationship between the span of the rectangular light spot in the Y-axis direction and the displacement of the fourth cylindrical lens array. If the axial direction of the first cylindrical lens array is the X-axis (mode two), the first set of sampling data, with the first cylindrical lens array fixed, records the relationship between the span of the rectangular light spot in the X-axis direction and the displacement of the fourth cylindrical lens array. The second set of sampling data, with the fourth cylindrical lens array fixed, records the relationship between the span of the rectangular light spot in the Y-axis direction and the displacement of the first cylindrical lens array. Step S2: Fit a first curve between the span of the rectangular light spot in the X-axis direction and the lens displacement of the first cylindrical lens array in Mode 1 or the fourth cylindrical lens array in Mode 2 based on the first set of sampling data; and fit a second curve between the span of the rectangular light spot in the Y-axis direction and the lens displacement of the fourth cylindrical lens array in Mode 1 or the first cylindrical lens array in Mode 2 based on the second set of sampling data. Step S3: When the expected output span of the rectangular light spot in the X-axis and Y-axis directions is obtained as A and B respectively; if the matching mode is mode one, the displacement A1 of the first cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the fourth cylindrical lens array corresponding to B is determined according to the second curve; if the matching mode is mode two, the displacement A1 of the fourth cylindrical lens corresponding to A is determined according to the first curve, and the displacement B1 of the first cylindrical lens array corresponding to B is determined according to the second curve; then the two motors are instructed to synchronously perform the corresponding displacement adjustment.

4. The electrically adjustable homogenizing light spot device according to claim 3, characterized in that, The first curve adopts Wherein, P1 is the displacement position of the first cylindrical lens array in mode one or the displacement position of the fourth cylindrical lens array in mode two, D1 is the span of the light spot at the target position in the X-axis direction, and C0, C1 and C2 are polynomial coefficients. The second curve adopts Wherein, P2 is the displacement position of the fourth cylindrical lens array in Mode 1 or the displacement position of the first cylindrical lens array in Mode 2, K0, K1 and K2 are polynomial coefficients, and D2 is the span of the light spot at the target position in the Y-axis direction.

5. The electrically adjustable homogenizing light spot device according to claim 1 or 2, characterized in that, It also includes a collimator located between the first cylindrical lens array and the light source.

6. The electrically adjustable homogenizing light spot device according to claim 1 or 2, characterized in that, The lens mounts of the first cylindrical lens array and the fourth cylindrical lens array extend outwards with contact rods; the first cylindrical lens array has two photoelectric sensors in front and behind within the range of the movement direction forming a group, and the fourth cylindrical lens array has two photoelectric sensors in front and behind within the range of the movement direction forming a group; the controller is used to determine the position of the contact rod captured by the photoelectric sensor as the corresponding starting zero position or maximum displacement. Alternatively: the matching structure formed by the photoelectric sensor and the contact rod is replaced with a limiting baffle with a pressure sensor fixed on the linear guide rail, and the connection relationship between the photoelectric sensor and the controller is replaced with the connection relationship between the pressure sensor and the controller.

7. The electrically adjustable homogenizing light spot device according to claim 1 or 2, characterized in that, The first cylindrical lens array, the second cylindrical lens array, the third cylindrical lens array, and the fourth cylindrical lens array are all square cylindrical lens arrays with the same structural parameters and materials.

8. The electrically adjustable homogenizing light spot device according to claim 7, characterized in that, The square cylindrical lens array consists of a row of plano-convex lenses with the same structural parameters and materials, arranged adjacent to each other. The second cylindrical lens array and the third cylindrical lens array are arranged with their two planes adjacent to each other. In the first cylindrical lens array, the light beam is incident from the convex surface, and in the fourth cylindrical lens array, the light beam is incident from the plane.

9. The electrically adjustable homogenizing light spot device according to claim 8, characterized in that, A protective window is also provided in the direction of the emitted beam of the focusing lens.

10. A data processing method for an electrically adjustable homogenizing light spot device, characterized in that, include: Step S100: Determine the starting zero position and maximum displacement of the lens mounts of the first and fourth cylindrical lens arrays in the electrically adjustable homogenizing spot device as described in any one of claims 1 to 9 based on the two sets of sensors. Step S200: Obtain sampling data and obtain the mapping relationship between the distance between the first cylindrical lens array and the second cylindrical lens array and the span of the rectangular light spot on the focal plane corresponding to the focusing lens in the corresponding dimension, and between the distance between the fourth cylindrical lens array and the third cylindrical lens array and the span of the rectangular light spot in another dimension based on the sampling data; Step S300: Determine the positions of the lens mounts of the first cylindrical lens array and the fourth cylindrical lens array in the target rectangular light spot task according to the mapping relationship, so as to drive the two motors to perform respectively.

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