Semiconductor intelligent logistics management method and system

Abstract

The invention belongs to the technical field of semiconductor manufacturing management, and provides a semiconductor intelligent logistics management method and system, and the method comprises the steps: obtaining the photoresist pre-delivery time in a plurality of historical logistics cycles according to the time needed by the real-time tracking of the wafer production of each stage on a wafer production line, according to the invention, the photoresist can be ensured to arrive on time when the wafer is produced, the storage cost increase caused by too early arrival or the influence on the production progress caused by too late arrival can be avoided, dynamic adjustment can be carried out according to the real-time production condition and the logistics state, the idle time generated by waiting for the photoresist in the wafer production process can be reduced, and the production efficiency can be improved. The effective use cycle of the photoresist is prevented from being missed, the photoresist pre-delivery time in the plurality of historical logistics cycles is subjected to pre-delivery matching degree analysis, whether the pre-delivery time is matched or not is evaluated, and a low-matching production line is screened out, so that the inventory level is reasonably arranged, and the production efficiency is improved. And the problem of inventory overstock caused by too early pre-delivery or inventory shortage caused by too late pre-delivery can be avoided.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor manufacturing management, and in particular to a semiconductor intelligent logistics management method and system. BACKGROUND

[0002] In the traditional semiconductor logistics management mode, the control of the time required for each stage of wafer production lacks real-time and dynamic nature. Since wafer production includes multiple processes and stages, the production time of each stage will be affected by factors such as equipment status, process parameters, and raw material quality, and will change. In the past, the way of arranging photoresist pre-delivery according to fixed time cannot adapt to this dynamic production environment, which leads to the photoresist may arrive too early at the production line, increasing the storage cost, because photoresist usually needs specific storage conditions, additional storage time means higher warehouse facility investment and energy consumption; it may also arrive too late, affecting the production schedule, causing production line downtime, increasing equipment idle cost and order delay risk.

[0003] In the prior art, the existing logistics management method lacks a scientific and effective matching degree analysis mechanism when evaluating the photoresist pre-delivery time, and does not fully consider various variable factors in actual production, resulting in frequent mismatch between pre-delivery time and actual production demand. When the pre-delivery time is not matched, it is difficult for the enterprise to reasonably arrange the inventory level. In the semiconductor production workshop, there are often multiple production lines running simultaneously, and the pre-delivery time arrangement of photoresist for each production line is prone to conflict. The traditional logistics management lacks an effective analysis and processing mechanism for pre-delivery conflicts, and cannot timely discover and solve the problem of overlapping pre-delivery periods. Once a pre-delivery conflict occurs, it may cause a production line to stop production due to waiting for photoresist, seriously affecting production efficiency and order delivery. At the same time, in terms of logistics transportation resource scheduling, since there is no clear minimum interval of pre-delivery time between pre-delivery conflict production lines, multiple pre-delivery tasks may compete for AGV and other transportation resources at the same time, resulting in low utilization of AGV, reduced transportation efficiency, and further exacerbating the risk of production interruption.

[0004] Therefore, the present application provides a semiconductor intelligent logistics management method and system. SUMMARY

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background art.

[0006] The technical solution adopted by the present application to solve its technical problems is: In a first aspect, a semiconductor intelligent logistics management method comprises: In a plurality of historical logistics cycles, according to the time required for each stage of wafer production on the wafer production line, the photoresist pre-delivery time is obtained; The pre-shipment matching degree of the photoresist pre-shipment time in multiple historical logistics cycles is analyzed, and whether the pre-shipment time matches is evaluated, and then the low-matching production line is screened out; The pre-shipment conflict analysis is performed on the historical pre-shipment process of each low-matching production line, and it is judged whether the pre-shipment strategy needs to be adjusted; If the pre-shipment adjustment is needed, the pre-shipment interval management value is obtained, and the pre-shipment time management is performed on the pre-shipment conflict production line.

[0007] Preferably, the photoresist pre-shipment time is obtained in the following manner: The entire wafer production workshop is divided according to the wafer production process to obtain multiple wafer production stages, the time corresponding to the wafer production stage in the historical logistics cycle is obtained as the unit stage time, the unit stage time corresponding to the same wafer production stage in the historical logistics cycle is compared in size, the maximum unit stage time and the minimum unit stage time are selected, and the sum average calculation is performed, and the same stage time is output; According to the wafer production stage corresponding to the same stage time, the sum calculation is performed in sequence, the stage production time is obtained, the photoresist logistics time in each historical logistics cycle is obtained, and the sum average calculation is performed to obtain the photoresist transportation average time. The stage production time and the photoresist transportation average time are subtracted to obtain the photoresist pre-shipment time.

[0008] Preferably, the pre-shipment matching degree analysis process is as follows: The photoresist pre-shipment time in each historical logistics cycle and the actual photoresist transportation time are subtracted, the absolute value is taken, and the ratio calculation is performed with the actual photoresist transportation time to obtain the pre-shipment time difference. If the pre-shipment time difference is greater than the pre-shipment time difference threshold, it is marked as a low-matching pre-shipment cycle; The proportion of the number of low-matching pre-shipment cycles in the total number of historical logistics cycles is extracted to obtain the low-matching number ratio; The pre-shipment time difference corresponding to each low-matching pre-shipment cycle is obtained, and the average calculation is performed to output the low-matching degree value; The low-matching number ratio and the low-matching degree value are multiplied to obtain the low-matching screening value.

[0009] Preferably, the screening method of the low-matching production line is as follows: If the low-matching screening value is greater than the low-matching screening threshold, it is marked as a low-matching production line; If the low-matching screening value is less than or equal to the low-matching screening threshold, it is marked as a high-matching production line.

[0010] Preferably, the pre-shipment conflict analysis is performed on the historical pre-shipment process of each low-matching production line, and the overlapping conflict value is obtained in the following manner: For the time period pre-delivery overlapping production line, the local time period of the photoresist pre-delivery time period overlapping corresponding to the two time period pre-delivery overlapping production lines in the historical logistics cycle is extracted, and the photoresist pre-delivery time period in the historical logistics cycle is processed by ratio, and the pre-delivery time period overlapping length ratio is obtained; The average of all pre-delivery time period overlapping length ratios is calculated, and the overlapping conflict value is output.

[0011] Preferably, the historical pre-delivery process of each low matching production line is analyzed for pre-delivery conflict, and the overlapping production line number ratio is obtained, and the process is as follows: In the same historical logistics cycle, the number of time period pre-delivery overlapping production lines is counted, and the ratio calculation is performed with the total number of low matching production lines, and the overlapping production line number ratio is output.

[0012] Preferably, the photoresist pre-delivery time period is obtained in the following way: The start time node of the historical logistics cycle is summed with the stage production time length to obtain the photoresist pre-delivery start time node; The photoresist pre-delivery start time node is summed with the photoresist pre-delivery time to obtain the photoresist pre-delivery end time node; The photoresist pre-delivery start time node is combined with the photoresist pre-delivery end time node to construct the photoresist pre-delivery time period.

[0013] Preferably, the process of determining whether the pre-delivery strategy needs to be adjusted is as follows: The overlapping production line number ratio is calculated by ratio with the overlapping conflict value, and the pre-delivery conflict analysis value is output, and if the pre-delivery conflict analysis value is greater than the pre-delivery conflict analysis threshold value, the pre-delivery adjustment signal is displayed.

[0014] Preferably, the pre-delivery interval management value is obtained, and the pre-delivery time management is performed on the pre-delivery conflict production line, and the process is as follows: The photoresist transportation average time corresponding to the target production line is extracted, multiplied by the pre-delivery time period overlapping length ratio, and summed with the photoresist transportation average time, and the basic interval adjustment value is output; The pre-delivery conflict analysis value is calculated by ratio with the pre-delivery conflict analysis threshold value, and the conflict influence coefficient is output; The basic interval adjustment value is multiplied by the conflict influence coefficient to obtain the pre-delivery interval management value; The photoresist pre-delivery time is summed with the pre-delivery interval management value to obtain the photoresist pre-delivery adjustment time.

[0015] Secondly, a semiconductor intelligent logistics management system comprises the following modules: Pre-delivery time acquisition module: according to the time required for each stage of wafer production on the real-time tracking wafer production line in multiple historical logistics cycles, the photoresist pre-delivery time is obtained; Low configuration production screening module: pre-delivery matching degree analysis is performed on the photoresist pre-delivery time in multiple historical logistics cycles, and whether the pre-delivery time matches is evaluated, and then a low matching production line is screened out; Low configuration conflict analysis module: pre-delivery conflict analysis is performed on the historical pre-delivery process of each low matching production line, and whether the pre-delivery strategy needs to be adjusted is judged; Low configuration pre-delivery adjustment module: if pre-delivery adjustment is needed, the pre-delivery interval management value is obtained, and the pre-delivery time management is performed on the pre-delivery conflict production line.

[0016] The beneficial effects of the present application are as follows: The present application can ensure that the photoresist arrives on time during wafer production, avoid the increase of storage cost caused by early arrival or the impact on production progress caused by late arrival, and can also be dynamically adjusted according to real-time production conditions and logistics state, which helps to reduce the idle time caused by waiting for photoresist during wafer production process, avoid missing the effective use period of photoresist, and evaluate whether the pre-delivery time matches by performing pre-delivery matching degree analysis on the photoresist pre-delivery time in multiple historical logistics cycles, and then a low matching production line is screened out, which not only helps to reasonably arrange the inventory level, but also avoids the problems of overstock caused by pre-delivery too early or shortage caused by pre-delivery too late, realizes accurate control of inventory, and reduces inventory cost; The present application can not only quickly adjust the pre-delivery time of photoresist according to the pre-delivery interval management value, ensure that the pre-delivery time of photoresist between production lines is reasonably staggered, avoid the situation that a production line stops production due to waiting for photoresist, but also clearly defines the minimum interval of pre-delivery time between pre-delivery conflict production lines, so that logistics management personnel can reasonably arrange the use order and time of AGV according to the value, avoid the situation that multiple pre-delivery tasks compete for AGV at the same time, and improve the utilization rate and transportation efficiency of AGV. BRIEF DESCRIPTION OF DRAWINGS

[0017] The present application will be further described below with reference to the accompanying drawings.

[0018] Figure 1 is a step flow chart of a semiconductor intelligent logistics management method of the present application; Figure 2is a judgment flow chart of a semiconductor intelligent logistics management method of the present application; Figure 3 is a schematic diagram of a semiconductor intelligent logistics management system of the present application. DETAILED DESCRIPTION

[0019] In order to make the technical means, creative features, purposes and effects of the present application easy to understand, the present application will be further described below in conjunction with specific embodiments.

[0020] Embodiment 1

[0021] Please refer to Figure 1 - Figure 2 The semiconductor intelligent logistics management method of the present application, as shown in the figure, comprises the following steps: Step one: in a plurality of historical logistics periods, according to the time required for real-time tracking of each stage of wafer production on the wafer production line, the photoresist pre-delivery time is obtained; It should be noted that the historical logistics period is the time required for each wafer manufacturing and flow to the photoresist coating stage on a wafer production line, wherein each wafer production line has a plurality of historical logistics periods; In some embodiments, the entire wafer production workshop is divided according to the wafer production process to obtain a plurality of wafer production stages; It should be noted that according to the wafer production process means that in the wafer production stage of the semiconductor wafer production factory, it specifically includes wafer pretreatment stage, bottom film deposition stage, film post-treatment stage, photoresist coating stage, etc. For example, the wafer production stage before the photoresist coating stage is analyzed for the time length, and the photoresist pre-delivery time process is as follows: Get the time corresponding to the wafer production stage in the historical logistics period as the unit stage time, compare the unit stage time corresponding to the same wafer production stage in the historical logistics period, select the maximum unit stage time and the minimum unit stage time, and calculate the sum average, output the same stage time length; According to the wafer production stage corresponding to the same stage time length, the stage production time length is obtained by sequentially adding and summing; Get the photoresist logistics time length in each historical logistics period and calculate the sum average to get the photoresist transportation average time length; The stage production time length and the photoresist transportation average time length are subtracted to obtain the photoresist pre-delivery time length; The significance of obtaining the pre-delivery time length of the photoresist lies in that, from the perspective of logistics material scheduling, since the use time node of the photoresist is accurately obtained in the semiconductor production process, the photoresist can be ensured to arrive on time when the wafer is produced, avoiding the increase of storage cost caused by early arrival or the impact on production progress caused by late arrival, and the dynamic adjustment can be made according to the real-time production situation and logistics state, which helps to reduce the idle time caused by waiting for the photoresist in the wafer production process and avoid missing the effective use period of the photoresist. The accurate pre-delivery time length can help the enterprise to reasonably control the inventory level of the photoresist, avoid the capital occupation and storage cost caused by excessive inventory, and prevent the production interruption caused by insufficient inventory, so as to realize the accurate control of the photoresist inventory through the intelligent logistics management system according to the pre-delivery time length and the actual production demand.

[0022] Step two: pre-delivery matching degree analysis is performed on the pre-delivery time of the photoresist in multiple historical logistics periods, and whether the pre-delivery time is matched is evaluated, and then a low-matching production line is selected; In some embodiments, the pre-delivery time length of the photoresist in each historical logistics period and the actual transportation time length of the photoresist are obtained, and the difference is taken, and the absolute value is calculated, and then the ratio calculation is performed with the actual transportation time length of the photoresist, to obtain the pre-delivery time length difference; If the pre-delivery time length difference is greater than the pre-delivery time length difference threshold, it indicates that the pre-delivery time length matching degree of the photoresist in the analyzed historical logistics period is low, and it is marked as a low-matching pre-delivery period; If the pre-delivery time length difference is less than or equal to the pre-delivery time length difference threshold, it indicates that the pre-delivery time length matching degree of the photoresist in the analyzed historical logistics period is high, and it is marked as a high-matching pre-delivery period; The proportion of the number of low-matching pre-delivery periods in the total number of historical logistics periods is extracted, to obtain a low-matching number ratio; The pre-delivery time length difference corresponding to each low-matching pre-delivery period is obtained, and the mean value calculation is performed, to output a low-matching degree value; The low-matching number ratio and the low-matching degree value are multiplied to obtain a low-matching screening value; It can be understood that the meaning of the low-matching screening value is that the frequency of the low-matching condition and the deviation degree of each low-matching are considered comprehensively. On the one hand, the low-matching number ratio reflects the frequency of the low-matching condition of the photoresist pre-delivery of the analyzed wafer production line in multiple historical logistics periods, and on the other hand, the low-matching degree value reflects the deviation degree of the low-matching condition of the photoresist pre-delivery of the analyzed wafer production line in multiple historical logistics periods; The low-matching screening value is compared with the low-matching screening threshold, and the process is as follows: If the low-configuration screening value is greater than the low-configuration screening threshold value, it indicates that the photoresist pre-delivery matching degree of the analyzed wafer production line in multiple historical logistics cycles is low, and the wafer production line is marked as a low-matching production line. If the low-matching screening value is less than or equal to the low-matching screening threshold value, it indicates that the photoresist pre-delivery matching degree of the analyzed wafer production line in multiple historical logistics cycles is high, and the wafer production line is marked as a high-matching production line. It should be noted that the significance of the low-matching production line is that from the perspective of logistics efficiency, the photoresist pre-delivery time does not match the actual production line demand, resulting in a high probability of production waiting or interruption. Screening these production lines not only helps to reasonably arrange the inventory level, but also avoids the problems of inventory accumulation due to early pre-delivery or inventory shortage due to late pre-delivery, realizes precise control of inventory, and reduces inventory cost. From the perspective of production quality, timely supply of photoresist is the basis for ensuring the quality of semiconductor production. Low-matching production lines may affect the stability of production processes due to unstable photoresist supply, thereby affecting product quality. Screening and optimizing these production lines can ensure timely and accurate supply of photoresist, ensuring the stability of semiconductor production.

[0023] The specific scheme of the embodiment is: in multiple historical logistics cycles, the photoresist pre-delivery time is obtained according to the time required for each stage of wafer production on the wafer production line, which can ensure that the photoresist arrives on time when the wafer is produced, avoid early arrival leading to increased storage cost or late arrival affecting production progress, and also can be dynamically adjusted according to real-time production conditions and logistics state, which helps to reduce the idle time caused by waiting for photoresist during wafer production process, avoid missing the effective use period of photoresist, and perform pre-delivery matching degree analysis on the photoresist pre-delivery time in multiple historical logistics cycles to evaluate whether the pre-delivery time is matched, and screen out low-matching production lines. This not only helps to reasonably arrange the inventory level, but also avoids the problems of inventory accumulation due to early pre-delivery or inventory shortage due to late pre-delivery, realizes precise control of inventory, and reduces inventory cost.

[0024] Embodiment 2

[0025] Please refer to Figure 1 - Figure 2 As shown in the figure, the semiconductor intelligent logistics management method of the embodiment of the application further includes the following steps: Step three: pre-delivery conflict analysis is performed on the historical pre-delivery process of each low-matching production line to determine whether the pre-delivery strategy needs to be adjusted. It should be noted that the historical pre-delivery process includes: from the pre-delivery path, it is necessary to consider whether there is local pre-delivery route overlap in the pre-delivery photoresist route, from the pre-delivery time dimension, it is necessary to consider the conflict between the route time window and the resource scheduling, that is, the execution of the pre-delivery route depends on the "time window" (such as the available period of AGV, the reservation period of warehouse out-of-warehouse), analyze whether there is "time window conflict" in the historical route: for example, a pre-delivery route needs to use AGV from "10:00-10:30", but the AGV is occupied by the pre-delivery route of other production line at this time, which causes the delay of the route, and further causes the pre-delivery time difference to exceed the standard; In some embodiments, one low matching production line is extracted as a target production line, and the photoresist pre-delivery period of the target production line in the historical logistics cycle is obtained, and the photoresist pre-delivery period of the target production line in the historical logistics cycle is compared with the photoresist pre-delivery period of the other low matching production line in the historical logistics cycle, and the process is as follows: The target production line and any one low matching production line in the same historical logistics cycle are overlapped and paired, and if the photoresist pre-delivery periods of the two low matching production lines in the same historical logistics cycle overlap, the analyzed low matching production line is taken as a time period pre-delivery overlap production line; If there is no overlap between the photoresist pre-delivery periods of the two low matching production lines in the same historical logistics cycle, no subsequent operation is performed; For the time period pre-delivery overlap production line, the local time period of the photoresist pre-delivery period overlap of the two time period pre-delivery overlap production lines in the same historical logistics cycle is extracted, and the photoresist pre-delivery period of the target production line in the historical logistics cycle is processed by ratio to obtain the pre-delivery period overlap length ratio; The average of all pre-delivery period overlap length ratios is calculated to output the overlap conflict value; It should be noted that the photoresist pre-delivery period is obtained by the obtained photoresist pre-delivery time and the stage production time; Specifically, the start time node of the historical logistics cycle is summed with the stage production time to obtain the photoresist pre-delivery start time node; The photoresist pre-delivery start time node is summed with the photoresist pre-delivery time to obtain the photoresist pre-delivery end time node; The photoresist pre-delivery start time node is combined with the photoresist pre-delivery end time node to construct the photoresist pre-delivery period; In the same historical logistics cycle, the number of time period pre-delivery overlap production lines is counted, and the ratio calculation is performed with the total number of low matching production lines to output the overlap production line number ratio; The overlap production line number ratio is calculated by ratio with the overlap conflict value to output the pre-delivery conflict analysis value; It can be understood that the significance of the pre-delivery conflict analysis value is to measure the severity of the pre-delivery conflict between each low-matching production line and other low-matching production lines in the historical pre-delivery process. On the one hand, the number of overlapping production lines reflects the proportion of production lines that have pre-delivery conflicts with the target production line among all low-matching production lines, indicating the conflict range of the target production line. On the other hand, the overlapping conflict value reflects the difference in pre-delivery time overlap between the target production line and other low-matching production lines; Specifically, in semiconductor intelligent logistics, the reasonable allocation of transportation resources (such as AGV) is crucial. The pre-delivery conflict analysis value can reveal the transportation resource conflict situation caused by the pre-delivery time overlap between low-matching production lines. By analyzing this value, management personnel can understand which production lines have resource competition in pre-delivery arrangement, and then adjust the pre-delivery strategy, reasonably plan the use time and route of AGV, and also help identify the warehouse resource shortage problem caused by pre-delivery time conflict; In a semiconductor factory, there are usually multiple production lines running simultaneously, and timely supply of photoresist is the key to ensuring production continuity. The pre-delivery conflict analysis value helps to coordinate the production rhythm between production lines. When pre-delivery conflicts are found between multiple low-matching production lines, the pre-delivery time can be adjusted to make the photoresist supply of each production line more balanced, avoiding the situation that some production lines produce too fast or too slow due to pre-delivery conflict, and achieving the coordination and optimization of the overall production plan. The pre-delivery conflict analysis value is compared with the pre-delivery conflict analysis threshold value, and the process is as follows: If the pre-delivery conflict analysis value is greater than the pre-delivery conflict analysis threshold value, it means that the conflict range of the target production line is large, and the difference in pre-delivery time overlap between the target production line and other low-matching production lines is small, which is displayed as a pre-delivery adjustment signal. If the pre-delivery conflict analysis value is less than or equal to the pre-delivery conflict analysis threshold value, it means that the conflict range of the target production line is small, and the difference in pre-delivery time overlap between the target production line and other low-matching production lines is large, which is displayed as a pre-delivery non-adjustment signal. Step four: if pre-delivery adjustment is needed, obtain the pre-delivery interval management value, and manage the pre-delivery time of the pre-delivery conflict production line; In some embodiments, the photoresist transportation average duration corresponding to the target production line is extracted, multiplied by the pre-delivery time overlap duration ratio, and then summed with the photoresist transportation average duration to output the base interval adjustment value; The pre-delivery conflict analysis value is compared with the pre-delivery conflict analysis threshold value, and the process is as follows: The base interval adjustment value is multiplied by the conflict influence coefficient to output the pre-delivery interval management value; The photoresist pre-delivery time is summed with the pre-delivery interval management value to obtain the photoresist pre-delivery adjustment time; It should be noted that the significance of obtaining the pre-delivery interval management value lies in that the pre-delivery interval management value is a key indicator for quantifying the minimum interval of pre-delivery time between conflict production lines, from the perspective of logistics transportation efficiency, in a semiconductor factory, the number of transportation resources such as AGVs (Automatic Guided Vehicles) is limited, and the pre-delivery interval management value determines the minimum interval of pre-delivery time between conflict production lines, so that logistics managers can reasonably arrange the order and time of AGV use according to the value, avoid the situation that multiple pre-delivery tasks compete for AGVs at the same time, and improve the utilization rate and transportation efficiency of AGVs; From the perspective of production plan execution, in the semiconductor production process, the production plan may be dynamically adjusted according to market demand, equipment status and other factors, and the pre-delivery interval management value provides flexible space for the adjustment of the production plan. When the production plan needs to be changed, logistics managers can quickly adjust the pre-delivery time of photoresist according to the pre-delivery interval management value, so as to ensure that the pre-delivery time of photoresist between production lines is reasonably staggered, and avoid the situation that a production line is shut down due to waiting for photoresist caused by pre-delivery conflict; From the perspective of production and inventory management, the pre-delivery interval management value can ensure that photoresist is delivered to production lines on time when needed, reducing the phenomenon of inventory accumulation or shortage caused by unreasonable pre-delivery time. Since inventory accumulation will increase the warehouse cost and capital occupation cost of the enterprise, and shortage will lead to production interruption and order delay, when photoresist can be delivered to production lines in time according to the requirements of the pre-delivery interval management value and used, the turnover speed of inventory will be accelerated; The specific scheme of the embodiment is: performing pre-delivery conflict analysis on the historical pre-delivery process of each low-matching production line to determine whether the pre-delivery strategy needs to be adjusted. If pre-delivery adjustment is needed, the pre-delivery interval management value is obtained to manage the pre-delivery time of conflict production lines. Not only can the pre-delivery time of photoresist be quickly adjusted according to the pre-delivery interval management value to ensure that the pre-delivery time of photoresist between production lines is reasonably staggered, and the situation that a production line is shut down due to waiting for photoresist caused by pre-delivery conflict is avoided, but also the minimum interval of pre-delivery time between conflict production lines is determined, so that logistics managers can reasonably arrange the order and time of AGV use according to the value, avoid the situation that multiple pre-delivery tasks compete for AGVs at the same time, and improve the utilization rate and transportation efficiency of AGVs.

[0026] Embodiment 3

[0027] Please refer to Figure 3 The semiconductor intelligent logistics management system according to the embodiment of the application includes the following modules: A pre-delivery time obtaining module: obtaining the photoresist pre-delivery time according to the time required for each stage of wafer production on the wafer production line in multiple historical logistics cycles. Low configuration production screening module: pre-shipment matching degree analysis is performed on the pre-shipment time of photoresist in multiple historical logistics cycles, whether the pre-shipment time is matched is evaluated, and then low matching production lines are screened out; Low configuration conflict analysis module: pre-shipment conflict analysis is performed on the historical pre-shipment process of each low matching production line, and whether the pre-shipment strategy needs to be adjusted is judged; Low configuration pre-shipment adjustment module: if pre-shipment adjustment is needed, pre-shipment interval management value is obtained, and pre-shipment time management is performed on the pre-shipment conflict production line.

[0028] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A semiconductor intelligent logistics management method, characterized in that: include: The photoresist pre-delivery time is obtained by tracking the time required for each stage of wafer production on the wafer production line in real time over multiple historical logistics cycles. A pre-delivery matching degree analysis was performed on the photoresist pre-delivery time in multiple historical logistics cycles to assess whether the pre-delivery time matched, and then the production lines with low matching were screened out. Perform a pre-feed conflict analysis on the historical pre-feed process of each low-matching production line to determine whether the pre-feed strategy needs to be adjusted. If pre-delivery adjustments are required, obtain the pre-delivery interval management value and manage the pre-delivery time for production lines with pre-delivery conflicts.

2. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The method for obtaining the photoresist pre-feed time is as follows: The entire wafer production workshop is divided according to the wafer production process, resulting in multiple wafer production stages. The time corresponding to each wafer production stage within the historical logistics cycle is obtained as the unit stage time. The unit stage times corresponding to the same wafer production stage within the historical logistics cycle are compared, and the maximum and minimum unit stage times are selected. The summation and average are calculated to output the duration of the same stage. According to the wafer production stages corresponding to the same stage duration, the production time of each stage is calculated by summing the values. The production time of the photoresist in each historical logistics cycle is obtained and the average value is calculated to obtain the average photoresist transportation time. The difference between the stage production time and the average photoresist transportation time is calculated to obtain the photoresist pre-delivery time.

3. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The pre-send matching degree analysis process is as follows: Extract the photoresist pre-delivery time and the actual photoresist transportation time in each historical logistics cycle, calculate the difference, take the absolute value, and then calculate the ratio with the actual photoresist transportation time to obtain the pre-delivery time difference. If the pre-delivery time difference is greater than the pre-delivery time difference threshold, it is marked as a low-matching pre-delivery cycle. Extract the proportion of low-match pre-delivery cycle quantity to the total number of historical logistics cycles to obtain the low-match quantity ratio. Obtain the pre-send duration difference corresponding to each low-match pre-send cycle, perform average calculation, and output the low-match degree value; The low-match ratio is calculated by multiplying the low-match degree value to obtain the low-match screening value.

4. The semiconductor intelligent logistics management method according to claim 3, characterized in that: The screening method for low-match production lines is as follows: If the low-match screening value is greater than the low-match screening threshold, it is marked as a low-match production line; If the low-match filter value is less than or equal to the low-match filter threshold, it is marked as a high-match production line.

5. The semiconductor intelligent logistics management method according to claim 1, characterized in that: For each low-match production line, a pre-feed conflict analysis is performed on the historical pre-feed process to obtain the overlapping conflict value. The process is as follows: Extract a low-match production line as the target production line, obtain the photoresist pre-delivery time period of the target production line in the historical logistics cycle, and compare it with the photoresist pre-delivery time periods of other low-match production lines in the historical logistics cycle. If there is an overlap of photoresist pre-delivery time periods of two low-match production lines in the same historical logistics cycle, the low-match production line analyzed is taken as the production line with overlapping time periods. For production lines with overlapping pre-delivery periods, extract the local time period where the pre-delivery periods of the photoresist pre-delivery overlaps between the two production lines with overlapping pre-delivery periods within the same historical logistics cycle, and compare it with the photoresist pre-delivery period of the target production line within the historical logistics cycle to obtain the pre-delivery period overlap ratio. The overlap ratio of all pre-send periods is averaged to output the overlap conflict value.

6. The semiconductor intelligent logistics management method according to claim 1, characterized in that: For each low-match production line, a pre-feed conflict analysis is performed on the historical pre-feed process to obtain the ratio of overlapping production lines. The process is as follows: Within the same historical logistics cycle, the number of overlapping production lines pre-delivered during the statistical period is calculated and compared with the total number of low-matching production lines to output the ratio of overlapping production line numbers.

7. The semiconductor intelligent logistics management method according to claim 5, characterized in that: The method for obtaining the photoresist pre-delivery time period is as follows: The starting time of the historical logistics cycle is summed with the production duration of each stage to obtain the starting time of the photoresist pre-delivery. The photoresist pre-delivery start time and the photoresist pre-delivery time are summed to obtain the photoresist pre-delivery end time. The photoresist pre-delivery start time node and the photoresist pre-delivery end time node are combined to construct the photoresist pre-delivery period.

8. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The process for determining whether the pre-delivery strategy needs adjustment is as follows: The ratio of overlapping production line quantity to overlapping conflict value is calculated to obtain the pre-feed conflict analysis value. If the pre-feed conflict analysis value is greater than the pre-feed conflict analysis threshold, it is displayed as a pre-charge adjustment signal.

9. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The process of obtaining the pre-delivery interval management value and managing the pre-delivery time for production lines with pre-delivery conflicts is as follows: Extract the average photoresist transport time corresponding to the target production line, multiply it by the overlap time ratio of the pre-delivery period, and sum it with the average photoresist transport time to output the basic time interval adjustment value. The ratio of the pre-sent conflict analysis value to the pre-sent conflict analysis threshold is calculated, and the conflict impact coefficient is output. The pre-send interval management value is obtained by multiplying the basic interval adjustment value with the conflict impact coefficient. The photoresist pre-feed time is summed with the pre-feed interval management value to obtain the photoresist pre-feed adjustment time.

10. A semiconductor intelligent logistics management system, characterized in that: Includes the following modules: Pre-delivery time acquisition module: Based on the real-time tracking of the time required for each stage of wafer production on the wafer production line within multiple historical logistics cycles, the photoresist pre-delivery time is obtained. Low-configuration production screening module: Analyzes the pre-delivery matching degree of photoresist pre-delivery time in multiple historical logistics cycles, evaluates whether the pre-delivery time matches, and screens out low-matching production lines. Low-match conflict analysis module: Performs pre-feed conflict analysis on the historical pre-feed process of each low-match production line to determine whether the pre-feed strategy needs to be adjusted; Low-configuration pre-delivery adjustment module: If pre-delivery adjustment is required, the pre-delivery interval management value is obtained to manage the pre-delivery time for production lines with pre-delivery conflicts.

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