A mouthpiece rod for inhibiting deformation of a mouthpiece and improving air flow conduction and a control method thereof

Abstract

The present application relates to a kind of suction nozzle rod of inhibiting suction nozzle deformation and improving airflow conduction and control method thereof.The present application includes main bearing column, is provided with main bearing column hole along axial;Base, one end is connected with main bearing column and is provided with base hole;Honeycomb duct, one end is connected with the other end of base, honeycomb duct includes hollow outer tube, hollow inner tube and honeycomb structure, hollow inner tube is coaxially arranged in the inside of hollow outer tube, honeycomb structure includes the honeycomb unit that is distributed between outer tube and hollow inner tube along the axis of hollow inner tube ring direction, honeycomb duct can guide the airflow that part enters its inside into honeycomb unit;Compensation plate, one end is connected with the other end of honeycomb duct;Dynamic inhibit suction nozzle deformation module, the other end is connected with compensation plate, dynamic inhibit suction nozzle deformation module is provided with the plug-in hole for suction nozzle plug-in, and suction nozzle is fitted after plug-in with compensation plate hole fit.The present application solves the micron level deformation problem caused by the fact that the length-width ratio of traditional mounting machine is too large.

Description

Technical Field

[0001] This invention relates to the field of precision instrument manufacturing technology, and in particular to a nozzle rod that suppresses nozzle deformation and improves airflow conduction, and a method for controlling it. Background Technology

[0002] Currently, in semiconductor packaging processes, die mounter nozzles need to pick up, position, and place chips with micron-level precision. As chip aspect ratios increase, with some products increasing from the traditional 1:1 to over 4:1, traditional mounting bases generate an equivalent force of 320 MPa at the base where they engage with the nozzle, leading to nozzle bending and deformation. In practical applications, this bending and deformation (e.g.) Figure 9 The nozzle (as shown) cannot fully adhere to the chip surface, resulting in vacuum leakage during the pick-up process, unstable chip placement, or inability to pick up the target chip and thus inability to place the chip.

[0003] Furthermore, the standard nozzle rod features a hollow duct with airflow flowing from wide to narrow, designed as a top-wide, bottom-narrow structure. This structure is prone to causing air pressure fluctuations during the airflow phase, resulting in unstable air pressure at the nozzle end. During vacuum adsorption and release, the top-wide, bottom-narrow structure leads to poor air pressure stability, typically requiring longer adsorption and placement times to achieve stable placement results, thus impacting overall production efficiency. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the difficulty in achieving micron-level deformation suppression of the suction nozzle and stable control of the adsorption gas pressure in the prior art.

[0005] To solve the above-mentioned technical problems, the present invention provides a nozzle rod that suppresses nozzle deformation and improves airflow conduction, comprising:

[0006] The main load-bearing column has main load-bearing column holes arranged along the axial direction;

[0007] A base, one end of which is connected to the main load-bearing column and is provided with a base hole;

[0008] A honeycomb duct, one end of which is connected to the other end of the base, the honeycomb duct includes a hollow outer tube, a hollow inner tube and a honeycomb structure, the hollow inner tube is coaxially disposed inside the hollow outer tube, the honeycomb structure includes honeycomb units distributed circumferentially between the outer tube and the hollow inner tube along the central axis of the hollow inner tube, the honeycomb duct can guide part of the airflow entering its interior into the honeycomb units;

[0009] A compensation plate, one end of which is connected to the other end of the honeycomb pipe, and is provided with a compensation plate hole;

[0010] A dynamic nozzle deformation suppression module is connected to the other end of the compensation plate. The dynamic nozzle deformation suppression module is provided with a plug hole for nozzle insertion. After insertion, the nozzle fits into the hole of the compensation plate.

[0011] The main support column hole, the base hole, the hollow outer tube, the compensation plate hole, and the insertion hole are coaxially connected in sequence; the base hole is connected to one end of each of the honeycomb units and to the compensation plate hole through the hollow inner tube, and the compensation plate closes the other end of each of the honeycomb units; the diameter of the main support column hole and the diameter of the base hole are both larger than the diameter of the hollow inner tube.

[0012] In one embodiment of the present invention, a plurality of the honeycomb cells are uniformly distributed circumferentially along the central axis of the hollow inner tube, and the honeycomb cells have a hollow tubular structure.

[0013] In one embodiment of the present invention, the diameter of the main bearing column hole ranges from 1.5mm ± 0.02mm; the diameter of the base hole ranges from 1.5mm ± 0.02mm; the diameter of the hollow inner tube ranges from 0.5mm ± 0.02mm; the diameter of the honeycomb unit ranges from 0.2mm ± 0.05mm, the wall thickness of the honeycomb unit ranges from 0.5mm ± 0.02mm; and the diameter of the insertion hole ranges from 0.5mm ± 0.02mm.

[0014] In one embodiment of the present invention, the main support column and the base are connected by welding, and a sealing ring is provided between the main support column and the base.

[0015] In one embodiment of the present invention, the sealing ring is made of perfluoroether rubber, the wall thickness of the main bearing column hole is in the range of 0.75mm±0.02mm, and the hole diameter of the sealing ring is in the range of 3.1mm±0.02mm.

[0016] In one embodiment of the present invention, the base is made of a magnetically conductive material, and the sidewall of the base is provided with a positioning groove for mounting on an external device.

[0017] In one embodiment of the present invention, the dynamic suction nozzle deformation suppression module includes a narrow diameter section and a wide diameter section coaxially connected and respectively cylindrical. The narrow diameter section is connected to the compensation plate, and the insertion hole is disposed through the narrow diameter section and the wide diameter section. The two ends of the wide diameter section are provided with chamfers.

[0018] In one embodiment of the present invention, the chamfer is C0.2mm, the narrow diameter section is 1mm long, and the overall length and width of the dynamic suppression nozzle deformation module are 2.6mm and 2.6mm respectively.

[0019] In one embodiment of the present invention, the honeycomb pipe is made of stainless steel, the compensation plate is made of TC4 titanium alloy, and the dynamic suction nozzle deformation suppression module is made of TC4 titanium alloy. Both the compensation plate and the dynamic suction nozzle deformation suppression module are formed by laser cladding process.

[0020] The present invention also provides a control method for the nozzle rod that suppresses nozzle deformation and improves airflow conduction, comprising:

[0021] S1. Adsorption stage: Insert the suction nozzle into the insertion hole set on the dynamic suction nozzle deformation suppression module, so that the suction nozzle rod forms an airflow channel through the main support column, base, honeycomb pipe, compensation plate and the dynamic suction nozzle deformation suppression module; control the suction nozzle rod to move directly above the chip to be suctioned, start the vacuum system, and the airflow returns to the internal pipe of the vacuum system through the airflow channel to establish a negative pressure zone;

[0022] S2, Pick-up stage: The nozzle is attached to the chip surface and the chip is adsorbed onto the end of the nozzle under the action of vacuum suction. At the same time, the compensation plate and the dynamic nozzle deformation suppression module work together to suppress the deformation of the nozzle in the middle and end during the adsorption process.

[0023] S3, Displacement Stage: The nozzle rod remains in a vacuum state and moves to directly above the target mounting area;

[0024] S4, Placement Stage: The vacuum system releases the vacuum, and the airflow is released through the internal channels of the vacuum system via the honeycomb pipe. The chip is detached from the bottom of the nozzle rod and the placement is completed.

[0025] The technical solution of the present invention has the following advantages compared with the prior art:

[0026] This invention relates to a suction rod and its control method for suppressing nozzle deformation and improving airflow conduction. It achieves micron-level deformation control and stabilizes air pressure through multi-directional support structure optimization, gradient stiffness material composite design, and honeycomb structure. It solves the problem of micron-level deformation caused by excessive aspect ratio of the suction nozzle in traditional die mounters, and optimizes the airflow distribution inside the suction rod, thereby achieving stable vacuum adsorption and release efficiency. It is suitable for high-precision chip mounting, optoelectronic device packaging, micro-sensor assembly and other scenarios.

[0027] This invention employs a hollow coaxial tube structure and a circumferentially distributed honeycomb unit design to redirect and divert the airflow inside the nozzle rod from a top-wide to bottom-narrow form, thereby alleviating local airflow disturbances, avoiding pressure fluctuations during vacuum adsorption, improving the stability and response efficiency of the adsorption and release process, and shortening the mounting cycle.

[0028] This invention improves the nozzle's impact and deformation resistance by dispersing stress concentration through material layering and structural transition design between the compensation plate and the dynamic module, while maintaining the overall structural strength. Attached Figure Description

[0029] To make the content of this invention easier to understand, the invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0030] Figure 1 This is an exploded structural diagram of the nozzle rod for suppressing nozzle deformation and improving airflow conduction according to an embodiment of the present invention.

[0031] Figure 2 This is a structural schematic diagram of the main load-bearing column and base according to an embodiment of the present invention.

[0032] Figure 3 This is a top view of the structure after the main load-bearing column and the base are connected according to an embodiment of the present invention.

[0033] Figure 4 This is a schematic diagram of the structure of the honeycomb pipe according to an embodiment of the present invention.

[0034] Figure 5 This is a schematic diagram of the compensation plate according to an embodiment of the present invention.

[0035] Figure 6 This is a schematic diagram of the sealing ring according to an embodiment of the present invention.

[0036] Figure 7 This is a schematic diagram of the structure of the dynamic nozzle deformation suppression module according to an embodiment of the present invention.

[0037] Figure 8 This is a curve showing the trend of deformation of the suction surface of the nozzle under various combinations of structural parameters in embodiments of the present invention.

[0038] Figure 9 This is a photograph of the deformation of a traditional suction nozzle structure in its installed state.

[0039] Figure 10 This is a physical image of the suction nozzle under the structural optimization scheme proposed in the embodiment of the present invention.

[0040] Explanation of reference numerals in the instruction manual:

[0041] 100. Main load-bearing column; 110. Main load-bearing column hole;

[0042] 200, base; 210, base hole;

[0043] 300. Honeycomb pipe; 310. Hollow outer tube; 320. Hollow inner tube; 330. Honeycomb structure; 331. Honeycomb unit;

[0044] 400, Compensation plate; 410, Compensation plate hole;

[0045] 500. Dynamic nozzle deformation suppression module; 510. Insertion hole; 520. Narrow diameter section; 530. Wide diameter section;

[0046] 600. Sealing ring. Detailed Implementation

[0047] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.

[0048] In this invention, when directions (up, down, left, right, front, and back) are described, it is only for the convenience of describing the technical solution of this invention, and does not indicate or imply that the technical features referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this invention.

[0049] In this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc., are understood to exclude the stated number; "above," "below," "within," etc., are understood to include the stated number. In the description of this invention, the terms "first" and "second" are used only to distinguish technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0050] In this invention, unless otherwise explicitly defined, the terms "setting," "installing," and "connecting" should be interpreted broadly. For example, they can refer to a direct connection or an indirect connection through an intermediate medium; a fixed connection, a detachable connection, or an integrally formed connection; a mechanical connection, an electrical connection, or a connection capable of mutual communication; or the internal connection of two components or the interaction between two components. Those skilled in the art can reasonably determine the specific meaning of the above terms in this invention based on the specific content of the technical solution.

[0051] Reference Figure 1 , Figure 4 As shown, a nozzle rod of the present invention for suppressing nozzle deformation and improving airflow conduction includes:

[0052] The main load-bearing column 100 is provided with a main load-bearing column hole 110 along the axial direction;

[0053] The base 200 has one end connected to the main bearing column 100 and is provided with a base hole 210;

[0054] A honeycomb duct 300, one end of which is connected to the other end of the base 200, includes a hollow outer tube 310, a hollow inner tube 320, and a honeycomb structure 330. The hollow inner tube 320 is coaxially disposed inside the hollow outer tube 310. The honeycomb structure 330 includes honeycomb cells 331 distributed circumferentially between the outer tube and the hollow inner tube 320 along the central axis of the hollow inner tube 320. The honeycomb duct 300 can guide part of the airflow entering its interior into the honeycomb cells 331 to optimize the airflow distribution of the upper-wide and lower-narrow structure, thereby stabilizing vacuum adsorption and release efficiency.

[0055] The compensation plate 400 has one end connected to the other end of the honeycomb pipe 300 and is provided with a compensation plate hole 410.

[0056] The dynamic nozzle deformation suppression module 500 is connected to the other end of the compensation plate 400. The dynamic nozzle deformation suppression module 500 is provided with a plug hole 510 for nozzle insertion. After insertion, the nozzle fits into the hole 410 of the compensation plate. The dynamic nozzle deformation suppression module 500 and the compensation plate 400 cooperate with each other to keep the nozzle in a balanced and stable state, effectively suppressing nozzle deformation.

[0057] The main support column hole 110, the base hole 210, the hollow outer tube 310, the compensation plate hole 410, and the insertion hole 510 are coaxially connected in sequence; the base hole 210 is connected to one end of each of the honeycomb units 331 and to the compensation plate hole 410 through the hollow inner tube 320, and the compensation plate 400 closes the other end of each of the honeycomb units 331; the diameter of the main support column hole 110 and the diameter of the base hole 210 are both larger than the diameter of the hollow inner tube 320.

[0058] It should be noted that the honeycomb channel 300 is used to achieve pressure equalization and guidance control of the airflow inside the nozzle rod. Its structure includes a hollow outer tube 310, a hollow inner tube 320, and a honeycomb structure 330 located between the two. The hollow inner tube 320 is arranged along the main axis and connected to the vacuum system's air passage, serving as the main airflow channel. The honeycomb structure 330 is composed of multiple honeycomb units 331 evenly distributed circumferentially along the axial direction of the hollow inner tube 320. Each honeycomb unit 331 has a hollow tubular structure and is distributed in the annular cavity between the hollow outer tube 310 and the hollow inner tube 320. On one hand, the honeycomb units 331 form multiple micro-cavities, which can achieve local buffering, delay, and pressure relief functions during the adsorption or release of airflow. When the airflow enters the main channel, some of the airflow is guided into each honeycomb unit 331, realizing airflow diversion and regulation, avoiding drastic pressure fluctuations in the main channel, and effectively balancing the air pressure at each node. On the other hand, the honeycomb structure 330 has turbulence suppression capabilities. The porous channels of the honeycomb unit 331 can effectively weaken the turbulence and vortex structure in the high-speed airflow, stabilize the air pressure at the bottom of the nozzle, and help maintain the stability of the adsorption negative pressure.

[0059] Through the structural design of the aforementioned honeycomb channel 300, the negative pressure output at the nozzle end can be stabilized while maintaining the chip loading cycle time, thereby improving the adsorption reliability and repeatability during chip pickup and placement. Furthermore, the honeycomb channel 300 can be flexibly adapted to various package sizes and airflow specifications by adjusting parameters such as the shape, aperture, wall thickness, and distribution density of the honeycomb cells 331, thus enhancing its adaptability and versatility.

[0060] In one embodiment, refer to Figure 4 As shown, multiple honeycomb units 331 are evenly distributed circumferentially along the central axis of the hollow inner tube 320, and the honeycomb units 331 have a hollow tubular structure.

[0061] In one embodiment, refer to Figure 2 , Figure 3 As shown, the diameter of the main bearing column hole 110 1. The range is 1.5mm ± 0.02mm; the diameter of the base hole 210 2. The range is 1.5mm ± 0.02mm.

[0062] Reference Figure 4 As shown, the aperture of the hollow inner tube 320 3. The aperture range is 0.5mm ± 0.02mm; the aperture of the hollow outer tube 310 The 3' range is 1.5mm ± 0.02mm, and the overall outer diameter of the 300 honeycomb tube is... The aperture of the cellular unit 331 is within the range of 3mm ± 0.02mm. The thickness of the cellular cell 331 ranges from 0.2mm ± 0.05mm, and the wall thickness of the cellular cell 331 ranges from 0.5mm ± 0.02mm.

[0063] Reference Figure 5 As shown, the outer diameter of the compensation plate 400 5. The diameter of the hole 410 in the compensation plate is within the range of 3mm ± 0.02mm. 6. The range is 0.5mm ± 0.02mm.

[0064] Reference Figure 6 As shown, the diameter of the insertion hole 510 8. The range is 0.5mm ± 0.02mm.

[0065] In one embodiment, the main support column 100 and the base 200 are connected by welding. The main support column 100 and the base 200 are segmented structures joined by laser welding technology. The interior is hollow to reduce weight, thereby reducing mass while maintaining equivalent stiffness. The holes in the support column and the base 200 are interconnected. The surface can be treated with a micro-arc oxidation layer to improve wear resistance, thereby improving the overall adaptability and stability of the loading rod under different working conditions.

[0066] Reference Figure 7 As shown, a sealing ring 600 is provided between the main support column 100 and the base 200. This ensures the seal between the nozzle rod and the vacuum system, preventing gas leakage and guaranteeing a sealing effect. In one embodiment, the sealing ring 600 is made of perfluoroether rubber (FFKM), which possesses excellent chemical corrosion resistance, high temperature resistance, and high vacuum environment resistance, making it suitable for sealing applications under harsh working conditions. The sealing ring 600 and the nozzle rod are detachable, installed by fitting it onto the main support column 100 and tightly fitting it to the base 200, facilitating replacement and maintenance. This achieves a highly efficient seal between the nozzle and the vacuum system, preventing gas leakage and ensuring the sealing integrity and operational stability of the system in a vacuum environment. The wall thickness of the main support column hole 110 ranges from 0.75mm ± 0.02mm, and the diameter of the sealing ring 600... 7. The range is 3.1mm ± 0.02mm.

[0067] In one embodiment, the main support column 100 is made of high-strength, lightweight aluminum alloy, such as AlSi10Mg (aluminum-silicon-magnesium alloy with 10% silicon content), which has good mechanical properties and corrosion resistance to improve overall mechanical properties and precision. The base 200 is made of a magnetically conductive material, such as martensitic stainless steel, which has high wear resistance and high temperature resistance. Its magnetic conductivity allows the entire nozzle rod to be effectively adsorbed into the mounting slot on the equipment. The side wall of the base 200 is provided with a positioning slot for installation on external equipment, and the length L1 of the positioning slot ranges from 4±0.02mm. This, combined with the equipment's own magnetic attraction system and positioning pins, secures the entire nozzle rod.

[0068] In one embodiment, refer to Figure 6 As shown, the dynamic nozzle deformation suppression module 500 includes a narrow diameter section 520 and a wide diameter section 530 that are coaxially connected and respectively columnar. The narrow diameter section 520 is connected to the compensation plate 400. The insertion hole 510 is disposed through the narrow diameter section 520 and the wide diameter section 530. The two axial ends of the wide diameter section 530 are provided with chamfers C.

[0069] In one embodiment, to effectively reduce the deformation of the suction surface of the nozzle during operation and improve the structural stability of the nozzle, the influence of the installation dimensions of the rubber nozzle on the deformation of the suction surface of the nozzle was studied. The deformation variation patterns of the old design and several new designs under different parameter configurations (including the groove width, i.e., the length P of the narrow diameter section 520, the cross-sectional dimensions M×N of the mounting post, i.e., the dynamic suppression of nozzle deformation module 500, and the chamfers C at both ends of the wide diameter section 530) were compared.

[0070] The relevant data for the old design are shown in Table 1. The groove width is 0, the mounting column size is 2.70mm × 2.70mm, no chamfer is provided, and the maximum deformation is measured to be 0.126mm, which is significant.

[0071] The relevant data for the new design are shown in Table 2. Deformation tests were conducted under multiple working conditions by introducing different groove widths (0.5mm, 1.0mm), different chamfer dimensions (C0.1, C0.2), and different overall dimensions (2.65×2.65mm, 2.60×2.60mm) of the mounting post (dynamically suppressing nozzle deformation module 500). The results show that different combinations of structural parameters have a significant impact on the deformation, with the minimum deformation reaching 0.0241mm.

[0072] Table 1: Old Design

[0073]

[0074] Table 2: New Design

[0075]

[0076] Figure 8 The figure shows the trend curves of the nozzle suction surface deformation under various combinations of structural parameters. The horizontal axis represents different combinations of structural parameters (from the old design to various new design variants), and the vertical axis represents the corresponding nozzle deformation (in mm). The curves show that the original design (no groove, no chamfer) has the largest deformation; after introducing a 0.5 mm groove width and a C0.1 chamfer, the deformation decreases significantly; as the chamfer increases to C0.2, the mounting post size decreases to 2.60 × 2.60 mm, and the narrow diameter section 520 length increases to 1.0 mm, the deformation continues to decrease; when the combination parameters are "chamfer C0.2, mounting post size 2.60 × 2.60 mm, groove width P is 1.0 mm", the deformation reaches its lowest point, at 0.0241 mm. This result indicates that increasing the chamfer size (C0.2), decreasing the mounting post size (2.60 × 2.60 mm), and increasing the narrow diameter section 520 length (1.0 mm) helps absorb structural stress and reduce nozzle deformation.

[0077] Therefore, the structural parameters of the dynamic nozzle deformation suppression module 500 are preferably set as follows:

[0078] The chamfer is C0.2mm, the length P of the narrow diameter section 520 is preferably 1mm, the overall length M of the dynamic suppression nozzle deformation module 500 is set to 2.6mm, and the overall width N is 2.6mm. The deformation under this parameter combination is the smallest, only 0.0241mm, which is significantly better than the original design and other combinations, and has good deformation suppression performance.

[0079] In one embodiment, the honeycomb channel 300 is made of stainless steel, such as 316L stainless steel, and its honeycomb structure 330 is precisely processed using laser cutting technology. This optimizes airflow distribution without affecting the nozzle rod's operation, stabilizes the air pressure in the upper-wide, lower-narrow structure, and maintains stable vacuum adsorption and release efficiency.

[0080] In one embodiment, the topology-optimized compensation plate 400 is made of TC4 titanium alloy and formed by selective laser melting (SLM) additive manufacturing process. It is connected to the honeycomb pipe 300 at the upper end and to the dynamic suppression nozzle deformation module 500 at the lower end. The components are alternately deposited and welded using laser cladding technology, forming a composite structure with gradient stiffness characteristics.

[0081] Specifically, the 400-hole compensation plate, through its close fit with the tail end of the nozzle, optimizes the distribution of force on the nozzle's stress area, providing effective support during nozzle operation. This helps suppress deformation caused by uneven force, improving the nozzle's working stability and accuracy.

[0082] Specifically, the dynamic nozzle deformation suppression module 500 is made of TC4 titanium alloy and formed based on selective laser melting (SLM) technology. The overall structure is in the shape of a "hammer" and is arranged along the nozzle axis and connected in series with the compensation plate 400. The connection interface is achieved by alternating deposition using laser cladding technology to achieve a stable bond.

[0083] Specifically, the insertion hole 510 of the dynamic nozzle deformation suppression module 500 (one end of the wide diameter section 530) is inserted into the root of the nozzle, which can effectively disperse and alleviate the deformation trend caused by working stress; at the same time, it works in conjunction with the compensation plate 400 to significantly suppress the vibration and structural deformation generated by the nozzle under high-speed movement, ensuring spraying accuracy and stability.

[0084] As a key piece of equipment in a precision sample handling system, the working accuracy of a slide mounter directly affects the reliability of subsequent experimental or production processes. In practical applications, traditionally mounted suction nozzles are prone to localized surface deformation (e.g., Figure 9 As shown in the image, this causes the nozzle to be unable to fully adhere to the chip surface when bent. This not only increases the difficulty of the placement operation but also significantly reduces the placement accuracy and consistency of the final product. Furthermore, the stability of airflow conduction within the nozzle rod is also a crucial factor affecting placement quality. Fluctuations or uneven distribution of air pressure will lead to unstable vacuum adsorption, thereby affecting the control accuracy of chip pickup and release.

[0085] Through the above structural design, the micro-deformation of the nozzle under high-speed operation or pressure can be effectively suppressed by coordinating the support method and material stiffness. At the same time, the internal airflow path is optimized by the honeycomb flow guide structure to achieve a stable distribution of air pressure inside the nozzle rod, thereby comprehensively improving the stability and yield of the patch operation.

[0086] Figure 9 This is a photograph of the deformation of a traditional nozzle structure in the installed state. It is clearly visible in the image that the bottom of the nozzle exhibits significant bending deformation, preventing it from achieving full adhesion to the surface of the chip being mounted. This deformation mainly stems from insufficient rigidity of the nozzle rod structure, localized stress concentration, and a lack of effective support for the nozzle body, thus affecting vacuum adsorption stability and mounting accuracy.

[0087] Figure 10 This is a physical image of the suction nozzle under the structural optimization scheme proposed in this embodiment of the invention (using the corresponding dimensional parameters described above). By introducing a multi-directional support structure, a gradient stiffness transition design, and a honeycomb flow guiding structure inside the suction nozzle rod, micron-level deformation suppression at the bottom of the suction nozzle is achieved. As can be seen from the image, the end face of the suction nozzle maintains good flatness, and the fit is significantly better than... Figure 9 The traditional solution shown effectively improves the positioning accuracy and adsorption reliability during the mounting process.

[0088] Through the integrated application of the above-mentioned multi-directional support structure optimization, gradient stiffness configuration, and honeycomb airflow guidance design, the micron-level deformation of the suction rod after the rubber suction nozzle is installed is effectively suppressed, and the synergistic optimization of deformation control and airflow stability is achieved. This technical solution ensures structural rigidity while also taking into account flexible buffering, effectively improving the stability and reliability of the suction system in high-speed operating environments.

[0089] In one embodiment, a method for controlling the nozzle rod that suppresses nozzle deformation and improves airflow conduction is provided, comprising:

[0090] S1, Adsorption Stage (t=0-0.1s): The suction nozzle is inserted into the insertion hole 510 on the dynamic suction nozzle deformation suppression module 500, so that the suction nozzle rod forms an airflow channel through the main support column 100, base 200, honeycomb pipe 300, compensation plate 400 and the dynamic suction nozzle deformation suppression module 500; the suction nozzle rod is controlled to move directly above the chip to be suctioned, the vacuum system is started, and the airflow flows back to the internal pipe of the vacuum system through the airflow channel to establish a negative pressure zone;

[0091] S2, Pick-up stage (t=0.1-0.2s): The nozzle is attached to the chip surface and the chip is adsorbed onto the end of the nozzle under the action of vacuum suction. At the same time, the compensation plate 400 and the dynamic nozzle deformation suppression module 500 work together to suppress the deformation of the middle and end of the nozzle during the adsorption process.

[0092] S3, Displacement Stage (t=0.2-0.4s): The nozzle rod remains in a vacuum state and moves to directly above the target mounting area;

[0093] S4, Placement Stage (t=0.4-0.6s): The vacuum system releases the vacuum, and the airflow is released through the internal channel of the vacuum system via the honeycomb tube 300. The chip is detached from the bottom of the nozzle rod and the placement is completed.

[0094] Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to examples, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A nozzle rod that suppresses nozzle deformation and improves airflow conduction, characterized in that, include: The main load-bearing column (100) is provided with a main load-bearing column hole (110) along the axial direction. The base (200) has one end connected to the main bearing column (100) and is provided with a base hole (210). A honeycomb duct (300) is connected at one end to the other end of the base (200). The honeycomb duct (300) includes a hollow outer tube (310), a hollow inner tube (320), and a honeycomb structure (330). The hollow inner tube (320) is coaxially disposed inside the hollow outer tube (310). The honeycomb structure (330) includes honeycomb cells (331) distributed circumferentially between the outer tube and the hollow inner tube (320) along the central axis of the hollow inner tube (320). The honeycomb duct (300) can guide part of the airflow that enters its interior into the honeycomb cells (331). The compensation plate (400) has one end connected to the other end of the honeycomb pipe (300) and is provided with a compensation plate hole (410). A dynamic nozzle deformation suppression module (500) is connected to the other end of the compensation plate (400). The dynamic nozzle deformation suppression module (500) is provided with a plug hole (510) for nozzle insertion. After insertion, the nozzle fits into the hole (410) of the compensation plate. The main support column hole (110), the base hole (210), the hollow outer tube (310), the compensation plate hole (410), and the insertion hole (510) are coaxially connected in sequence; the base hole (210) is connected to one end of each of the honeycomb units (331) and to the compensation plate hole (410) through the hollow inner tube (320); the compensation plate (400) closes the other end of each of the honeycomb units (331); the diameter of the main support column hole (110) and the diameter of the base hole (210) are both larger than the diameter of the hollow inner tube (320).

2. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 1, characterized in that, Multiple cellular units (331) are evenly distributed circumferentially along the central axis of the hollow inner tube (320), and the cellular units (331) have a hollow tubular structure.

3. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 1, characterized in that, The diameter of the main bearing column hole (110) is in the range of 1.5mm ± 0.02mm; the diameter of the base hole (210) is in the range of 1.5mm ± 0.02mm; the diameter of the hollow inner tube (320) is in the range of 0.5mm ± 0.02mm; the diameter of the honeycomb unit (331) is in the range of 0.2mm ± 0.05mm, and the wall thickness of the honeycomb unit (331) is in the range of 0.5mm ± 0.02mm; the diameter of the insertion hole (510) is in the range of 0.5mm ± 0.02mm.

4. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 3, characterized in that, The main support column (100) and the base (200) are connected by welding, and a sealing ring (600) is provided between the main support column (100) and the base (200).

5. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 4, characterized in that, The sealing ring (600) is made of perfluoroether rubber, the wall thickness of the main bearing column hole (110) is in the range of 0.75mm±0.02mm, and the hole diameter of the sealing ring (600) is in the range of 3.1mm±0.02mm.

6. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 1, characterized in that, The base (200) is made of magnetic material, and the side wall of the base (200) is provided with positioning grooves for installation on external equipment.

7. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 1, characterized in that, The dynamic nozzle deformation suppression module (500) includes a narrow diameter section (520) and a wide diameter section (530) that are coaxially connected and respectively columnar. The narrow diameter section (520) is connected to the compensation plate (400). The insertion hole (510) is disposed through the narrow diameter section (520) and the wide diameter section (530). The two ends of the wide diameter section (530) are provided with chamfers.

8. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 7, characterized in that, The chamfer is C0.2mm, the narrow diameter section (520) is 1mm long, and the overall length and width of the dynamic suppression nozzle deformation module (500) are 2.6mm and 2.6mm respectively.

9. A suction rod for suppressing nozzle deformation and improving airflow conduction according to claim 1, characterized in that, The honeycomb pipe (300) is made of stainless steel, the compensation plate (400) is made of TC4 titanium alloy, and the dynamic suppression nozzle deformation module (500) is made of TC4 titanium alloy. Both the compensation plate (400) and the dynamic suppression nozzle deformation module (500) are formed by laser cladding process.

10. A method for controlling a nozzle rod that suppresses nozzle deformation and improves airflow conduction as described in any one of claims 1-9, characterized in that, include: S1, Adsorption stage: Insert the suction nozzle into the insertion hole (510) on the dynamic suppression suction nozzle deformation module (500), so that the suction nozzle rod forms an airflow channel through the main support column (100), base (200), honeycomb pipe (300), compensation plate (400) and the dynamic suppression suction nozzle deformation module (500); control the suction nozzle rod to move directly above the chip to be suctioned, start the vacuum system, and the airflow returns to the internal pipe of the vacuum system through the airflow channel to establish a negative pressure zone; S2, Pick-up stage: The nozzle is attached to the chip surface and the chip is adsorbed to the end of the nozzle under the action of vacuum suction. At the same time, the compensation plate (400) and the dynamic nozzle deformation suppression module (500) work together to suppress the deformation of the nozzle in the middle and end during the adsorption process. S3, Displacement Stage: The nozzle rod remains in a vacuum state and moves to directly above the target mounting area; S4, Placement Stage: The vacuum system releases the vacuum, and the airflow is released through the internal channel of the vacuum system via the honeycomb pipe (300). The chip is detached from the bottom of the nozzle rod and the placement is completed.

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