Power supply device of LLC topological structure capable of configuring resonant capacitor

Abstract

The invention discloses a power supply device of an LLC topological structure capable of configuring resonant capacitors. The resonant capacitors (Cr) of a resonant network comprise a plurality of resonant capacitors (Cr1, Cr2,..., Crn) which are connected in parallel and have different capacitances, and each resonant capacitor (Cr1, Cr2,..., Crn) is provided with an independent control switch (S1, S2,..., Sn); different load currents are detected through a CPU, the capacitance of a corresponding resonant capacitor (Cr) is calculated through hardware in advance, and then corresponding control switches (S1, S2,..., Sn) are directly gated through the CPU, so that a resonant cavity rapidly achieves resonance (that is, the resonant frequency is equal to the working frequency) through a hardware mode, the LLC topological structure rapidly works in a resonance state, and therefore, the reliability of the LLC topological structure is improved. The method effectively reduces the searching of resonant frequency points through a software algorithm, and greatly improves the working efficiency of the LLC topological structure.

Description

TECHNICAL FIELD

[0001] The present application relates to a power module, in particular to a power device with LLC topology and configurable resonant capacitor. BACKGROUND

[0002] With the market demand for power modules more and more extensive, the fast response of power output voltage loop, high stability, high dynamic response of load in the field of semiconductor equipment is particularly prominent. At present, there is a lack of a self-controllable, high dynamic response of load, high stability of direct current sputtering power device. PRIOR ART

[0003] The current high-power LLC topology has large power output, wide output voltage range, and high efficiency requirement. The LLC topology circuit is introduced as follows:

[0004] The main circuit structure of a complete full-bridge LLC resonant converter is shown in Figure 1 .

[0005] In the figure, Q1~Q4 are main power switch tubes, D1~D4 and C1~C4 are their body diodes and the parasitic capacitance between the drain and source thereof. Tr is a main power transformer. DR1 and DR2 are output rectifier diodes, Cf is an output filter capacitor, and RLd is a load resistor. The resonant inductance Lr (including the primary side leakage inductance of the transformer), the magnetizing inductance Lm and the resonant capacitor Cr form the resonant network of the LLC resonant converter. Among them, the magnetizing inductance Lm is integrated in the transformer; the resonant capacitor Cr is connected in series in the primary side loop, and simultaneously plays the role of a DC blocking capacitor.

[0006] After modularizing the main circuit of the converter, it can be divided into: inverter network, resonant network and rectifier filter network.

[0007] Brief introduction of LLC working principle:

[0008] As shown in Figure 2 , according to the size relationship between the switching frequency fs and the resonant frequency fr, the LLC resonant converter has the following three working modes:

[0009] Working mode 1: fs < fr, at this time the main working waveform of the converter is shown in Figure 2 (a). In this mode, when the resonant inductance current iLr resonates to be equal to the magnetizing inductance current iLm, as shown in [t2~t4] in the figure, the magnetizing inductance Lm participates in the resonance at this time, and the rectifier diode current is discontinuous, so the rectifier diode can realize ZCS turn-off.

[0010] Working mode 2: fs = fr, the main working waveform is shown in Figure 2(b) shown. The magnetizing inductance Lm no longer participates in resonance, and its voltage is clamped at nVo all the time. The rectifier diode current is critical continuous, so ZCS turn-off can also be achieved.

[0011] Mode 3: fs > fr, the operating waveform is as shown in Figure 2 (c) shown. In this mode, the magnetizing inductance Lm does not participate in resonance, and its voltage is clamped at nVo all the time. The rectifier diode current is continuous, and works in hard turn-off mode, so there is a reverse recovery problem.

[0012] Disadvantages of the prior art:

[0013] The disadvantages of the existing LLC topology are:

[0014] Lr is fixed, and Cr is also fixed, when the load is dynamically fluctuated from 0 to 25% to 50% to 75% to 100%, the CPU of the existing LLC topology finds the appropriate resonance frequency through the PID algorithm, which consumes a large amount of CPU calculation resources in the calculation process, resulting in fluctuations in the output voltage loop, which is unstable.

[0015] The disadvantages of the existing LLC PID algorithm are:

[0016] When the load fluctuates in a large case, as the output voltage of the power module continuously decreases, after adjusting the output voltage through the PID algorithm, the equivalent impedance Lm, the resonance inductance Lr and the resonance frequency of the resonance capacitor reflected from the secondary side to the primary side are calculated, and then the frequency of the PWM is adjusted to stabilize the output voltage. The output voltage drops by about 5% from 100%, and then adjusts back, causing the output voltage to fluctuate between 100% and 95% of the output voltage. This cannot quickly meet the demand of the load current, so the traditional LLC PID algorithm cannot meet the requirements of the semiconductor equipment mechanical arm for high stability of the output voltage loop.

[0017] Therefore, the present application is proposed. SUMMARY

[0018] The purpose of the present application is to provide a power supply device with a configurable resonant capacitor LLC topology to solve the above technical problems in the prior art.

[0019] The purpose of the present application is achieved by the following technical solutions:

[0020] The power supply device of the LLC topology structure with configurable resonant capacitor of the application comprises an inverter network, a resonant network and a rectification filter network, the resonant network comprises an LLC resonant converter composed of a resonant inductor Lr, an excitation inductor Lm and a resonant capacitor Cr, the resonant capacitor Cr comprises a plurality of resonant capacitors (Cr1, Cr2, …, Crn) with different capacitances in parallel, and each resonant capacitor (Cr1, Cr2, …, Crn) is provided with a separate control switch (S1, S2, …, Sn);

[0021] Through the detection of different load currents by the CPU, the capacitance of the resonant capacitor Cr is calculated by the pre-hardware, and then the corresponding control switch (S1, S2, …, Sn) is directly gated by the CPU.

[0022] Compared with the prior art, the power supply device of the LLC topology structure with configurable resonant capacitor provided by the application configures the resonant capacitor inside the resonant cavity according to different load levels, so that the resonant cavity quickly reaches resonance (i.e. the resonant frequency is equal to the working frequency) in a hardware manner, the LLC topology structure quickly works in the resonant state, the resonant frequency point is effectively reduced by the software algorithm, and the working efficiency of the LLC topology structure is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a full-bridge LLC resonant converter topology structure in the prior art;

[0024] Figure 2 It is a LLC working principle schematic diagram in the prior art;

[0025] Figure 3 It is a power supply device principle diagram of the LLC topology structure with configurable resonant capacitor provided by the embodiment of the application. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application; obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application, which does not constitute a limitation on the application. Based on the embodiments of the application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the application.

[0027] Firstly, the terms possibly used in the text are described as follows:

[0028] The terms “include”, “contain”, “have”, “possess” or other similar semantic descriptions should be interpreted as non-exclusive inclusion.

[0029] The contents not described in detail in the embodiments of this invention are prior art known to those skilled in the art. Where specific conditions are not specified in the embodiments of this invention, they shall be performed according to conventional conditions in the art or conditions recommended by the manufacturer. Where the manufacturers of the reagents or instruments used in the embodiments of this invention are not specified, they are all conventional products that can be purchased commercially.

[0030] The present invention discloses a power supply device with a configurable resonant capacitor LLC topology, comprising an inverter network, a resonant network, and a rectifier filter network. The resonant network includes an LLC resonant converter composed of a resonant inductor Lr, a magnetizing inductor Lm, and a resonant capacitor Cr. The resonant capacitor Cr includes multiple resonant capacitors (Cr1, Cr2, ..., Crn) connected in parallel with different capacitance values. Each resonant capacitor (Cr1, Cr2, ..., Crn) is provided with a separate control switch (S1, S2, ..., Sn).

[0031] The CPU detects different load currents and calculates the capacitance of the corresponding resonant capacitor Cr in advance through hardware. Then, the CPU directly selects the corresponding control switches (S1, S2, ..., Sn).

[0032] The resonant capacitor Cr includes five resonant capacitors connected in parallel (Cr1, Cr2, Cr3, Cr4, Cr5), and each resonant capacitor is equipped with a separate control switch (S1, S2, S3, S4, S5).

[0033] When the CPU detects that the load current is no load, that is, the load is 0, the CPU calculates the capacitance of the resonant capacitor Cr1 through hardware; then the CPU directly connects S1, and the resonant circuit is in the resonant state.

[0034] When the CPU detects that the load current is 25%, it calculates the capacitance of the resonant capacitors Cr1+Cr2 through hardware; then the CPU directly connects S1 and S2, and the resonant circuit is in a resonant state.

[0035] When the CPU detects that the load current is 50%, it calculates the capacitance of the resonant capacitor Cr1+Cr2+Cr3 through hardware; then the CPU directly connects S1, S2, and S3, at which point the resonant circuit is in a resonant state.

[0036] When the CPU detects that the load current is 75%, it calculates the capacitance of the resonant capacitor Cr1+Cr2+Cr3+Cr4 through hardware; then the CPU directly connects S1, S2, S3, and S4, and the resonant circuit is in a resonant state.

[0037] When the CPU detects that the load current is 100%, it calculates the capacitance of the resonant capacitors Cr1+Cr2+Cr3+Cr4+Cr5 through hardware; then the CPU directly connects S1, S2, S3, S4, and S5, at which point the resonant circuit is in a resonant state.

[0038] When the load fluctuates arbitrarily among the above five load states, the CPU detects the corresponding load state and switches to the corresponding load state through switches S1, S2, S3, S4, and S5. This keeps the resonant circuit working in the resonant state and avoids a large amount of calculation by the CPU.

[0039] In summary, the power supply device with configurable resonant capacitor LLC topology of the present invention enables the resonant cavity to quickly reach resonance (i.e., the resonant frequency equals the operating frequency) through hardware by configuring the resonant capacitor in the resonant cavity according to different load levels. This allows the LLC topology to quickly operate in a resonant state, effectively reducing the need to find the resonant frequency point through software algorithms and greatly improving the working efficiency of the LLC topology.

[0040] To more clearly demonstrate the technical solution and its effects provided by the present invention, the embodiments of the present invention will be described in detail below with reference to specific examples.

[0041] Example 1

[0042] like Figure 3 As shown:

[0043] This is a schematic diagram of a power supply device with a configurable resonant capacitor LLC topology, wherein:

[0044] When the CPU detects that the load current is no load, that is, the load is 0, the CPU calculates the capacitance of the resonant capacitor Cr1 through hardware; then the CPU directly connects S1, and the resonant circuit is in the resonant state.

[0045] When the CPU detects that the load current is 25%, it calculates the capacitance of the resonant capacitors Cr1+Cr2 through hardware; then the CPU directly connects S1 and S2, and the resonant circuit is in a resonant state.

[0046] When the CPU detects that the load current is 50%, it calculates the capacitance of the resonant capacitor Cr1+Cr2+Cr3 through hardware; then the CPU directly connects S1, S2, and S3, at which point the resonant circuit is in a resonant state.

[0047] When the CPU detects that the load current is 75%, it calculates the capacitance of the resonant capacitor Cr1+Cr2+Cr3+Cr4 through hardware; then the CPU directly connects S1, S2, S3, and S4, and the resonant circuit is in a resonant state.

[0048] When the CPU detects that the load current is 100%, it calculates the capacitance of the resonant capacitors Cr1+Cr2+Cr3+Cr4+Cr5 through hardware; then the CPU directly connects S1, S2, S3, S4, and S5, at which point the resonant circuit is in a resonant state.

[0049] Similarly, when the load fluctuates arbitrarily among these four load states, the CPU detects the corresponding load state and switches to the corresponding load state via switches S1, S2, S3, S4, and S5. This keeps the resonant circuit working in the resonant state and avoids a large amount of computation by the CPU.

[0050] By detecting the above load conditions through the CPU, the corresponding resonant capacitance is calculated in advance by the hardware. Then, the CPU directly selects the switch. Of course, there are some special cases. In actual working conditions, the load switching state may not be implemented in the manner of 0%-25%-50%-75%-100% to achieve load state fluctuation. This technical solution only provides a method. In actual working conditions, the load may also have similar five load state fluctuations, or even more load state fluctuations. In this case, the resonant capacitance of the corresponding load state is set according to the actual working conditions to keep the resonant circuit in the resonant state when the load state is quickly switched. In this way, the LLC topology always works at the highest efficiency point, saving the CPU from running PID voltage loop and PID current loop continuously, which wastes a lot of CPU resources. The output voltage is still in a fluctuating state to achieve rapid load fluctuation.

[0051] This invention configures the resonant capacitors inside the resonant cavity according to different load levels, enabling the resonant cavity to quickly reach resonance (i.e., the resonant frequency equals the operating frequency) through hardware. This allows the LLC topology to quickly operate in a resonant state, effectively reducing the need to find the resonant frequency point through software algorithms and greatly improving the working efficiency of the LLC topology.

[0052] Compared to traditional PID algorithms for achieving resonance of resonant inductors and capacitors, this invention provides a power supply device with a configurable resonant capacitor and an LLC topology, which saves the CPU time spent on complex real-time sampling and calculations, improves the response time of output voltage feedback, and ensures stable and reliable output voltage. Furthermore, it provides a very fast output voltage loop control method for capacitive loads (charger loads) and inductive loads (robotic arm loads) under different load characteristics, demonstrating high practical and promotional value.

[0053] Key technical points of this invention:

[0054] The output voltage loop has a fast dynamic response when the load fluctuates;

[0055] It does not rely on complex calculations of software PID;

[0056] It reduces output voltage oscillation, quickly adjusts to load dynamics, and improves output voltage stability.

[0057] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims. The information disclosed in the background section is intended only to enhance the understanding of the overall background technology of the present invention and should not be construed as an admission or implication in any way that such information constitutes prior art known to those skilled in the art.

Claims

1. A power supply device with a configurable resonant capacitor LLC topology, comprising an inverter network, a resonant network, and a rectifier filter network, wherein the resonant network comprises an LLC resonant converter composed of a resonant inductor (Lr), a magnetizing inductor (Lm), and a resonant capacitor (Cr), characterized in that, The resonant capacitor (Cr) includes multiple resonant capacitors (Cr1, Cr2, ..., Crn) connected in parallel with different capacitance values, and each resonant capacitor (Cr1, Cr2, ..., Crn) is equipped with a separate control switch (S1, S2, ..., Sn); The CPU detects different load currents and calculates the capacitance of the corresponding resonant capacitor (Cr) in advance through hardware. Then, the CPU directly selects the corresponding control switches (S1, S2, ..., Sn).

2. The power supply device with a configurable resonant capacitor LLC topology according to claim 1, characterized in that, The resonant capacitor (Cr) includes five resonant capacitors connected in parallel (Cr1, Cr2, Cr3, Cr4, Cr5), and each resonant capacitor is equipped with a separate control switch (S1, S2, S3, S4, S5). When the CPU detects that the load current is no load, that is, the load is 0, the CPU calculates the capacitance of the resonant capacitor (Cr1) through hardware; then the CPU directly turns on the control switch (S1), and the resonant circuit is in the resonant state. When the CPU detects that the load current is 25%, it calculates the capacitance of the resonant capacitor (Cr1+Cr2) through hardware; then the CPU directly turns on the control switches (S1, S2), and the resonant circuit is in a resonant state. When the CPU detects that the load current is 50%, it calculates the capacitance of the resonant capacitor (Cr1+Cr2+Cr3) through hardware; then the CPU directly turns on the control switches (S1, S2, S3), and the resonant circuit is in a resonant state. When the CPU detects that the load current is 75%, it calculates the capacitance of the resonant capacitor (Cr1+Cr2+Cr3+Cr4) through hardware; then the CPU directly turns on the control switches (S1, S2, S3, S4), and the resonant circuit is in a resonant state. When the CPU detects that the load current is 100%, it calculates the capacitance of the resonant capacitor (Cr1+Cr2+Cr3+Cr4+Cr5) through hardware; then the CPU directly turns on the control switches (S1, S2, S3, S4, S5), and the resonant circuit is in a resonant state.

3. The power supply device with a configurable resonant capacitor LLC topology according to claim 2, characterized in that, When the load fluctuates arbitrarily among the above five load states, the CPU detects the corresponding load state and switches to the corresponding load state through the control switches (S1, S2, S3, S4, S5). This keeps the resonant circuit working in the resonant state and avoids a large amount of calculation by the CPU.

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