Actuator device

Abstract

The invention relates to an actuator device (1) comprising an actuator (2), a carrier plate (3), a cover plate (4) and conductor tracks (5) for electrically contacting the actuator, at least a part of the actuator being arranged between the carrier plate and the cover plate along a first and a second dimension of an m * n-dimensional array (6) in an electrically insulated manner from one another, a total of m + n conductor traces are arranged on the carrier plate and the cover plate in such a way that the m conductor traces arranged on the carrier plate each electrically connect the actuators arranged in the array to one another along a first dimension of the array, and such that the n conductor traces disposed on the cover plate each electrically connect the actuators arranged in the array to each other along a second dimension of the array.

Description

Technical Field

[0001] The present invention relates to an actuator device according to claim 1. Background Technology

[0002] Document US7091650B2 describes an actuator device in the form of a piezoelectric thick-layer element array, which includes at least one piezoelectric element structure with a thickness between 10 μm and 100 μm, the piezoelectric element structure being formed by a separation process. Summary of the Invention

[0003] The purpose of this invention is to provide a low-profile, scalable actuator device for high-precision execution and detection of position changes or stroke movements with localized changes in at least one spatial dimension.

[0004] This objective is achieved by an actuator device according to the independent claim, the actuator device comprising an actuator, a carrier plate, a cover plate, and conductor traces for electrically contacting the actuator, wherein at least a portion of the actuator is arranged electrically insulated from each other between the carrier plate and the cover plate along the first and second dimensions of an m×n dimensional array, and a total of m+n conductor traces are arranged on the carrier plate and the cover plate such that each of the m conductor traces disposed on the carrier plate electrically connects the actuators disposed in the array to each other along the first dimension of the array, and each of the n conductor traces disposed on the cover plate electrically connects the actuators disposed in the array to each other along the second dimension of the array.

[0005] The term "actuator" in this document should be understood as either an element that uses energy to perform changes in its external size or shape, or conversely, an element that generates a measurable electrical signal when an external force is applied to its shape. An element that combines both of these characteristics should also be understood as an actuator in this sense.

[0006] Because the layered structure of the actuator device has conductor traces arranged directly on the carrier plate and the cover plate for contacting the array of actuators arranged therebetween, it achieves the technical advantage of reducing or minimizing the structural height. At the same time, the matrix arrangement and control of the conductor traces allocated to the array rows and array columns enables targeted control of each actuator in the array and thus enables the execution of localized, narrow, and limited positional changes.

[0007] Furthermore, the array arrangement of actuators offers the technical advantage of simple scalability of the actuator device. On the one hand, there is flexibility in the size of the actuators in the array; the type, shape, and size of the actuators can be selected according to the requirements of the corresponding application (e.g., in terms of the required stroke, accuracy, required force, or spatial resolution of the offset). Simultaneously, the lateral expansion of the actuator device can be flexibly extended along one or two array dimensions by adding additional actuators and conductor traces, thus adapting the size of the drive surface to the application requirements.

[0008] Similarly, by increasing the actuator density within the array—that is, the number of rows and columns along one or two array dimensions while keeping the overall size of the actuator device constant—the technical advantage of high lateral spatial resolution for executable or detectable positional changes can be achieved. At the same time, the demand-based scalability of the actuator density within the array offers the advantage of reducing the material usage and energy consumption of the actuator device to the minimum required.

[0009] Similar to actuator density, the flexible distance between actuators in the array provides further degrees of freedom to influence the lateral spatial resolution, i.e. the effective range of positional changes locally executed or detected, and thereby achieve the required accuracy.

[0010] Furthermore, the accuracy of vertically actuated or detectable positional changes is increased by the technical advantages of the cover plate: this increases the stability of the entire actuator device to deformation and forms a continuous enclosure of the actuator device, where any possible surface irregularities, such as those caused by manufacturing tolerances of the actuators arranged in the array, can be minimized through appropriate surface finishing. Therefore, regardless of the actuator density, characteristics, and arrangement within the array, a particularly flat resting surface is produced for the actuator device, enabling the high-precision actuation or detection of localized positional changes on its surface. In addition, the cover plate provides protection for the actuator device located beneath it and the underlying conductor traces required for contact.

[0011] The technically advantageous embodiments are the subject of the dependent claims, the description and the drawings.

[0012] In one advantageous embodiment of the actuator device, the cover plate or carrier plate has a regular surface structured portion. This surface structured portion offers several technical advantages: it can be used to separate metallization portions disposed on the cover plate and / or carrier plate for forming conductor traces; it can have a structure for housing and / or retaining the actuator; and it can reduce the rigidity of the cover plate or carrier plate relative to orthogonal deflection by the actuator. In particular, this last point can prove especially advantageous in order to transmit the deflection of the actuators in the array as directly as possible, i.e., with as little force or energy consumption as possible, to the cover plate, or conversely, to detect the minimum deflection on the cover plate very precisely by means of the actuator. Similarly, the strength of the lateral coupling between adjacent actuators in the array can be correspondingly affected by the surface structured portion of the cover plate or carrier plate connecting them.

[0013] Therefore, for example, the deep surface structuring of the cover plate can prove advantageous because it greatly reduces the lateral coupling of the actuator while increasing the flexibility relative to vertical deflection, so as to achieve laterally very localized, i.e., strongly spatially restricted, but vertically significant stroke movements of the cover plate by means of the actuator. In this case, the surface structuring of the cover plate helps to improve the lateral resolution of the possible stroke movements through the actuator.

[0014] In particular, the surface structuring of the cover plate seems significant because, for the purpose of high-precision positioning or detection by means of actuator devices, the actuators are used in combination with particularly small structural dimensions in the sub-millimeter range and high actuator density, because in this case, the high lateral resolution of the surface structuring is only available to a special degree due to the flexibility that comes with the cover plate.

[0015] The advantage of regularity in surface-structured parts lies in the regularity and predictability of the deflection or detection behavior of the actuator device: for example, in order to perform high-precision and predictable positional changes, a defined deflection behavior of the actuator device is required, which can be significantly easier to pre-calculate and evaluate when regularity exists, even regarding the expected mechanical loads on the individual components of the actuator device. Furthermore, regularity allows for easier, faster, and more cost-effective manufacture of actuator devices compared to irregular structures that can only be achieved at high operating costs.

[0016] Advantageously, the regular surface structured portion has a grid-like structure similar to the symmetry of the array. Thus, the symmetry of the array is reflected in the surface structured portion, thereby allowing for uniform offset or detection behavior of the actuator device along the dimensions of the actuator array.

[0017] Another technically advantageous embodiment includes at least one other actuator arranged on the carrier plate, thereby allowing the entire structure, consisting of the carrier plate, the array of actuators, and the cover plate, to be positioned in space as a single unit along at least one spatial direction. Thus, here, it can be an actuator that allows the unit to be positioned perpendicular to the array plane, or it can be two actuators that allow the unit to be displaced along one of the two array dimensions, respectively. Combinations of the two examples above, or other arrangements and directions of action of the actuators arranged on the carrier plate, are also conceivable. For example, an advantageous application of these actuators could be to achieve coarse positioning or pre-positioning of the unit along all three spatial directions, or conversely, to detect such displacement of the unit.

[0018] Furthermore, it is advantageous that at least one other actuator arranged on the carrier plate is configured as a planar shape. This allows for a particularly low structural height of the actuator device, while simultaneously combining the aforementioned advantages of the other actuator. Moreover, due to the planar design, it is possible to apply the advantageous effects of the other actuators, each along each spatial direction, planarly to the carrier plate using a single actuator, for example, one that is flush with and enclosed in size with the carrier plate, thereby achieving a very compact structure.

[0019] Additionally, it may be advantageous to have at least one other planar actuator formed by a shear actuator. This shear actuator is particularly suitable for achieving this purpose because it allows an array of actuators arranged on a carrier plate to be laterally displaced in another spatial dimension at the most compact structural height possible.

[0020] In particular, it is advantageous to arrange two planar shear actuators in a stacked manner on the carrier plate, wherein the shear actuators are configured or arranged such that shearing is performed along different spatial directions when controlled. Thus, simultaneous execution or detection of positional changes along three spatial directions can be achieved, for example, in a very compact form with minimal structural height and overall size.

[0021] In another advantageous embodiment of the actuator device, at least one of the actuators is formed of a piezoelectric actuator. Piezoelectric actuators have readily scalable advantages and offer considerable design flexibility in their forming. Furthermore, piezoelectric actuators allow for the execution and detection of length variations down to the picometer range. Thus, piezoelectric actuators are particularly suitable for achieving high-precision actuator devices with minimized structural height according to the objectives of the invention. For example, actuator dimensions of 1×1×1 mm or smaller can therefore be achieved with possible deflections up to 500 nm, resulting in an overall structural height of only 4-6 mm for the actuator device.

[0022] Furthermore, it is advantageous that the carrier plate or cover plate is formed of the same material as the actuator. This avoids deformation, stress, and fracture in the actuator device due to differences in the coefficient of thermal expansion. Similarly, since the material properties are identical, using the same material as the actuator during manufacturing has proven advantageous in terms of process technology.

[0023] In particular, it is advantageous that the actuator and the carrier plate or cover plate are formed of piezoelectric ceramic material, thereby complementing the two aforementioned advantages of the piezoelectric actuator and the same material properties to form a temperature and shape stable, easy-to-manufacture actuator device with a low structural height and capable of performing or detecting positional changes along at least one spatial direction, or even along three spatial directions when combined with the two piezoelectric shear actuators.

[0024] In another advantageous embodiment of the actuator device, at least a portion of the conductor trace is manufactured by vapor deposition, coating, printing, or implantation. This minimizes the structural height of the conductor trace required for contact and thus minimizes the overall structural height of the actuator device according to the invention.

[0025] Similarly, it can be advantageous for at least a portion of the conductor trace to be manufactured via metallization and subsequent structuring. In this case, the structural advantages of the low structural height of the conductor trace formed by metallization are combined with the advantages of the process technology: thus, for example, the configuration of the conductor trace on the carrier plate or cover plate can be combined with the step of surface structuring for the carrier plate or cover plate. Likewise, metallization eliminates the sensitive process steps for gluing and / or brazing electrical contacts and reduces the risk of possible subsequent contact detachment, for example, due to different thermal expansion.

[0026] In another advantageous embodiment of the actuator device, the carrier plate has a first section and a second section protruding relative to the cover plate, with conductor traces arranged on the carrier plate leading to the first section and conductor traces arranged on the cover plate leading to the second section. By leading the conductor traces of the cover plate and the carrier plate to the two protruding sections of the carrier plate, the conductor traces are more easily accessible and contactable from the outside to control the actuators of the array, so that the conductor traces can then be electrically contacted, for example by means of cables, flexible imprints, or other conductor forms, in a collected or bundled manner. Conversely, it is also conceivable to lead the conductor traces of the cover plate and the carrier plate to the two protruding sections of the cover plate instead of the carrier plate, and equivalent advantages will be achieved.

[0027] Furthermore, it is particularly advantageous that the conductor traces arranged on the cover plate are led to a second protruding section of the carrier plate via at least one adapter device, wherein the adapter device includes at least one platform section whose height substantially corresponds to the distance between the carrier plate and the cover plate, and which at least partially overlaps the cover plate. This allows for the conductor traces to be led out as compactly and efficiently as possible beneath the cover plate, while also providing technological advantages: the relevant surfaces of the adapter device can thus be configured with conductor traces, for example, during metallization or vapor deposition and subsequent structuring processes, such that electrical contact of the conductor traces on the cover plate is automatically made and led to the adapter device by overlapping the adapter device between the carrier plate and the cover plate, from which the conductor traces can then be contacted externally to control the actuators of the array. Moreover, the adapter device provides the possibility that the level of the led-out conductor traces can be advantageously adapted to technical and structural requirements by appropriately selecting the platform section, thereby achieving simple and trouble-free or structured contact.

[0028] In another advantageous embodiment, the gaps between the actuators arranged in the array are filled with a non-conductive material. This provides protection against environmental impact, further electrically insulates the actuators from each other, stabilizes the array, and prevents foreign matter or liquids from entering the gaps between the actuators. In particular, it is meaningful to provide additional stabilization through the non-conductive material in the gaps when the actuator density is low or when the actuator's base area is small relative to its height. Similarly, for example, it is conceivable to use a heat-dissipating material to keep the heating of the actuators in the array low during operation and thus avoid thermal effects on positioning and / or detection accuracy.

[0029] In another advantageous embodiment, the array is airtightly sealed by a non-conductive material. This protects the array from external environmental influences. Unlike the aforementioned seal that completely fills the gaps between actuators arranged in the array, this seal can also be, for example, a wraparound seal comprising a layered structure of a carrier plate, the array, and a cover plate, where the non-conductive properties ensure that no undesirable contact occurs between the cover plate and the carrier plate. Similarly, built-in seals are conceivable, which, for example, only seal the gaps between the outermost actuators of the array to achieve an airtight seal of the array.

[0030] Furthermore, it is advantageous for the actuator device to have perforations or recesses in the region of the gaps between the actuators arranged in the array. By using one or more perforations in the actuator device, in conjunction with the above embodiments, it is possible to suction and fix an object to be positioned on the cover plate by generating negative pressure on the carrier plate when the gaps between the array or the actuators of the array are otherwise airtightly filled or sealed. In particular, by using planar suction with multiple perforations distributed above the gaps between the actuators according to the characteristics of the object, synchronous deformation of the object is also caused when the cover plate is deformed by the actuators driving the array. Therefore, the actuator device can be used as a means for high-precision compensation of the surface unevenness of the object itself located on the cover plate. Alternatively, an advantage that can be achieved is that, in the absence of filling or sealing the gaps between the array or the array of actuators in an airtight manner, possible suction and deformation of the object on the cover plate can also be achieved by recesses arranged in the cover plate instead of perforations, and by causing air not to be drawn out through the carrier plate, but laterally through the gaps between the actuators via the edges of the actuator devices.

[0031] Another advantage of multiple perforations or recesses lies in the possibility of actively cooling the actuator device by continuously introducing or removing a cooling medium, particularly a non-conductive liquid or gas, into or through the gaps between the actuators in the array via the perforations or openings, thereby creating a continuous flow of the medium and thus heat transfer within the gaps between the actuators. This cooling reduces the thermal impact on the actuator device, thereby maintaining constant positioning or detection accuracy. Furthermore, this cooling can also be used to simultaneously cool objects to be moved or deformed on the cover plate, thereby ensuring temperature stability on the object in temperature-critical applications and minimizing parasitic thermal effects.

[0032] Similarly, the flexibility of the cover plate can be affected by strategically placing multiple perforations or openings.

[0033] All features described in association with the various embodiments of the invention may be provided in different combinations within the subject matter of the invention in order to achieve their advantageous effects simultaneously, even if these effects are described for different embodiments. Attached Figure Description

[0034] Advantageous embodiments of the invention are illustrated in the accompanying drawings and described in more detail below. In the drawings:

[0035] Figure 1 A screenshot of an actuator device with a removable cover according to the present invention is shown;

[0036] Figure 2This is an internal view of the cover plate and the carrier plate, including according to Figure 1 The adapter device for the foldable actuator device;

[0037] Figure 3 A screenshot of a perforated actuator device according to the present invention is shown. Detailed Implementation

[0038] Figure 1 A screenshot of an actuator device 1 with a removable cover plate 4 according to the present invention is shown. The actuator device 1 consists of: two piezoelectric shear actuators 8.1; a carrier plate 3 having conductor traces 5 arranged thereon, an adapter device 11, and m×n piezoelectric actuators 2 arranged in an m×n dimensional array 6; and a closed cover plate 4, which is removed here for illustration, also having conductor traces 5 arranged thereon.

[0039] The two piezoelectric shear actuators 8.1 are oriented such that shearing is performed along the x-direction when the first shear actuator is controlled and shearing is performed along the y-direction when the second shear actuator is controlled, thereby enabling the overall positioning of the structure above it in the xy plane by these shearing actions.

[0040] For control purposes, each of the two planar shear actuators 8.1 has planar electrodes (not identifiable here) on its upper and lower sides. The contact and control of these planar electrodes are achieved through three outwardly guided conductor traces 5. Here, the conductor traces extending between the two shear actuators simultaneously form contact between the lower electrode of the upper shear actuator and the upper electrode of the lower shear actuator, such that these electrodes are all at the same potential.

[0041] Two planar shear actuators 8.1 are stacked on top of each other in a planar and precisely fitted manner. A carrier plate 3 with the same precise fit is placed on top of them.

[0042] The surface of the carrier plate 3 is metallized, and in addition to the protruding section 10 of the carrier plate, a surface structured section 7 is provided in the form of a longitudinal groove pointing to the matrix dimension n and interrupting the metallization of the carrier plate. The width of the longitudinal groove corresponds to the distance between the actuators 2 arranged in the array, and the longitudinal groove extends along the entire carrier plate along the dimension n of the array such that each longitudinal groove is located between the actuators 2 arranged in the array and thereby forms the conductor trace 5 required to contact the actuator from the carrier plate side.

[0043] On the carrier plate 3, m×n piezoelectric actuators are arranged in an array at uniform intervals along two array dimensions m and n below the cover plate 4 and together form an m×n dimensional array 6 composed of piezoelectric actuators. Each of these piezoelectric actuators is arranged on the m conductor traces 5 previously described on the carrier plate 3 by means of conductive adhesive and thereby each is in contact with the other along the array dimension n through the electrodes located on their respective sides.

[0044] Furthermore, the carrier plate 3 has two protruding sections 9 and 10 relative to the cover plate 4. On the protruding section 9, the conductor traces previously described for connecting the actuators arranged in the array along the matrix dimension n are derived in their extension below the cover plate in such a way that the metallization and structuring of the carrier plate also continue on this protruding section 9. On the protruding section 10, each of the n adapter devices 11 is oriented along the array dimension m and arranged adjacent to each other with two platform sections 12, such that these adapter devices 11 are each located on a line of the row having the actuators arranged in the array pointing along the array dimension m. The adapter devices correspond in width to the width of the actuators in the array, and the adapter devices are designed in length such that the upper platform section 12 corresponds exactly in length to the distance between the closest actuator in the extension of the actuator device and the closed edge of the cover plate, i.e., it is completely covered by the cover plate, and the lower platform section 12 covers the remaining width of the protruding section 10. A vertical step exists between the two platform sections, the height of which does not exactly correspond to the actuator height of the actuators arranged in the array. The two platform sections and the step are metallized such that the upper platform section contacts the respective associated conductor traces arranged on the underside of the cover plate when the cover plate is fitted, and the lower platform section, due to its metallization, can be used as a contact surface for contacting the array rows outside the array dimension m.

[0045] The actuator 2 of array 6 is held from above by a cover plate 4, which has a surface-structured portion 7 and n conductor traces 5 extending along the array dimension m on its underside, i.e., the side facing the actuator. Detailed surface structure and the orientation of the conductor traces on the cover plate are described in... Figure 2 This can be seen more clearly in the image. Similar to the carrier plate, the actuator-facing side of the cover plate is also metallized. This metallization is interrupted by n longitudinal slots, each roughly the same width as the carrier plate but rotated 90° relative to it, i.e., along the array dimension m, thus forming conductive traces arranged on the cover plate. These conductive traces are positioned similarly to those on the carrier plate, such that when the cover plate is applied using conductive adhesive, each trace contacts all actuators row by row along the array dimension m via electrodes located on its upper side.

[0046] exist Figure 1In the illustrated embodiment, the carrier plate, cover plate, and adapter device are all made of the same piezoelectric material as the actuator, but in principle, other and potentially different materials can also be envisioned for these components. Therefore, for example, with respect to the carrier plate and cover plate, especially in the context of minimizing the desired structural height of the actuator device through conductor traces directly arranged on the carrier plate and cover plate, it seems meaningful to use non-conductive materials such as glass, ceramics, plastics, or silicone to ensure sufficient electrical insulation and largely eliminate the need for additional insulating layers or measures, thus facilitating a lower structural height.

[0047] Figure 1 The actuator device 1 shown has a total structural height of only 3 mm and is formed by: a carrier plate 3 with a structural height of 0.5 mm, two planar shear actuators 8.1 each with a structural height of 0.5 mm, actuators 2 arranged in an array with dimensions of 1 × 1 × 1 mm and a structural height of 1 mm, which is equivalent to that of the adapter device 11, and a cover plate 4 with a structural height of 0.5 mm. The total dimensions of the actuator device shown are 50 × 50 × 3 mm. With the described structure, high-precision positional variations in the nanometer range are possible, up to 500 nm in the z-direction and 5 μm in both the x and y directions. Similarly, it is possible to cascade up to four samples of the actuator devices shown adjacent to each other to obtain a total actuable area of ​​100 × 100 mm. Due to the simple scalability of the actuator device, many other embodiments with individual component dimensions also significantly different from those mentioned herein are also conceivable. In particular, for example, the actuators arranged in the array can be configured with an actuator height corresponding to 20 times the length of their base side, thereby achieving a significant increase in vertical stroke while maintaining a consistently high lateral spatial resolution of the actuator device. Similarly, the base area of ​​the actuators arranged in the array can be further reduced, for example, to further increase the actuator density in the array and thus the lateral spatial resolution.

[0048] Figure 2 The diagram shows an internal view of the cover plate 4 and the carrier plate 3, including... Figure 1 The adapter device 11 of the foldable actuator device. Figure 1 The actuator 2 shown is hidden here so that the surface structured part 7 is more clearly visible.

[0049] The surface structuring of the carrier plate, such as for Figure 1 The implementation is as follows: Here, these surface-structured portions refer to equidistant longitudinal grooves that extend along their expansion direction through the entire side of the carrier plate facing the cover plate, thereby dividing the metallized portion of the carrier plate into m individual conductor traces 5, such that these conductor traces 5 correspond in their width to Figure 1The width of the actuator 2 in the m×n dimensional array 6 shown is such that the width of the longitudinal slots substantially corresponds to the distance between the actuators arranged in the array. The surface-structured portion is arranged on the carrier plate such that, in the assembled state of the actuator device, all n actuators are always in electrical contact along the dimension n of the m×n dimensional array through the conductor traces of the carrier plate.

[0050] The surface structured portion 7 of the cover plate 4 also has m longitudinal grooves that are congruent to the carrier plate 3 in the folded state and extend through the entire cover plate along its expansion direction. These longitudinal grooves are orthogonally cut by n-1 transverse grooves that are equal in width to the longitudinal grooves and are spaced at equal intervals. These transverse grooves also extend through the entire inner side of the cover plate. Unlike the carrier plate, the cover plate is metallized only after structuring by means of the longitudinal grooves, so that in the case of the cover plate, the conductor traces 5 are formed only retroactively by introducing transverse grooves, so that all m actuators in the assembled state of the adapter device are always in electrical contact along the dimension m of the m×n dimensional array. In the example shown, the depth of the longitudinal grooves is less than the depth of the retroactively introduced transverse grooves of the cover plate for manufacturing reasons to ensure sufficient electrical separation of adjacent conductor traces.

[0051] The adapter device 11 arranged on the protruding section 10 of the carrier plate 3 is metallized on its surface and is shaped and arranged such that the correspondingly higher platform section 12 of the two platform sections 12 in the assembled state of the adapter device is exactly located on the conductor trace of the cover plate, so that when the cover plate is placed, the conductor trace of the cover plate is made to contact the outside of the correspondingly lower platform section 12.

[0052] Similarly, the conductor trace 5 extending from the first protruding segment 9 of the cover plate 4 to the carrier plate 3 allows for external electrical contact to enable row-by-row external control of the actuators arranged on it in an m×n dimensional array.

[0053] By using the grid-like surface structure 7 of the cover plate 4, which is similar in symmetry to the array 6, the cover plate achieves increased flexibility relative to the deformation of the actuators 2 arranged thereon (not shown here). More precisely, the deformation of the actuators is isolated from each other as much as possible, for example by pressure or applied voltage. This makes it possible to more precisely influence or detect very localized and limited deformation of the cover plate by deflection of the individual actuators of the array.

[0054] Figure 3 It shows the relationship with Figure 1Similarly, in a rectangular cross-section of the actuator device 1 according to the invention, the actuator device 1 further has circular perforations 14 in the region of the gaps 13 between the actuators 2 arranged in the m×n dimensional array 6. The circular perforations are arranged in a grid pattern along the array dimensions m and n, equidistant from the actuators, such that these perforations lie along the array dimension n in the gaps of the non-conductor traces of the carrier plate 3 between the actuators in the array, and are each centrally located along the array dimension m between two opposing side surfaces of the actuators arranged in the array. The diameter of the circular perforations corresponds to the distance between the actuators arranged in the array, such that the perforations do not affect the shape of these actuators.

[0055] This invention discloses the possibility of implementing an actuator device for high-precision execution or detection of localized positional changes, which, unlike prior art, integrates several technical advantages: the actuator device possesses extremely flexible scalability, involving not only lateral expansion but also the precision and orders of magnitude of localized positional changes that can be executed or detected using this actuator device; the actuator device has a reduced structural height through its structure; the actuator is embedded between a carrier plate and a cover plate, providing stability to the actuator device; and precision is improved through appropriate surface finishing, thus improving the flatness of the cover plate, while providing protection against external environmental influences. Here, the cover plate, with its special structure and shape, performs multiple functions simultaneously: the cover plate contacts the array of actuators through conductor traces arranged thereon and covers the actuator device, but at the same time does not significantly affect the freedom of movement of the array of actuators.

[0056] Furthermore, perforations in the actuator device can ensure cooling of the device during operation, or, in the case of gaps between actuators arranged in an array or an airtight seal of the entire array, perforations can be used to achieve the intake or retention of objects and thus the high-precision deformation of objects located thereon.

[0057] Furthermore, since the cover plate, carrier plate, and actuator are constructed from the same material, thermal deformation of the actuator device caused by different coefficients of thermal expansion can be minimized, thereby further improving the accuracy of the actuator device.

[0058] In addition to the advantageous embodiments described above, other advantageous improvements to the invention are conceivable. Some of these improvements will be illustratively described below, but other advantageous combinations, configurations, and modifications of the invention are also conceivable.

[0059] In an advantageous improvement, at least some of the actuators in the actuator device can be formed of multilayer piezoelectric actuators to achieve an increase in maximum stroke.

[0060] Similarly, it is conceivable to repeat the structure consisting of a carrier plate, actuator, cover plate and conductor traces located therebetween at least once along the z-direction, i.e. along the stacking direction, to increase the total stroke of the actuator device.

[0061] For sustainability purposes, the actuator of the actuator device can also be formed from lead-free piezoelectric ceramics. This allows the precision of the piezoelectric actuator to be combined with the better environmental compatibility of lead-free materials, and the actuator device can be implemented in a particularly sustainable manner.

[0062] Similarly, in the case of actuators made of polycrystalline, ferroelectric-piezoelectric materials, it is advantageous to control these actuators using methods described in document EP3365926B1. By means of polarizing only a small portion of the domain with short voltage pulses each time, extremely small and, in this case, precise length changes of the actuator can be induced, and these length changes can be maintained even when the voltage disappears (i.e., no energy). Thus, the energy used to operate the actuator device is drastically reduced. One possible application for this is the persistent compensation of unevenness in localized variations or the persistent deformation of elements arranged on a cover plate, such as wafers.

[0063] Furthermore, it is conceivable to construct an array of actuators in an actuator device comprising different types of actuators, for example, one part consisting of actuators with varying shapes or lengths, i.e., driven actuators, and another part consisting of inductive, i.e., measuring actuators. These two types of actuators can, for example, be uniformly distributed within the array, such that when an element is placed or positioned on a cover, the inductive actuator detects a pressure difference caused by the unevenness of the element's placement, i.e., the surface, and based on this information, either offsets the driven actuator so that the cover adapts to the unevenness of the element, i.e., compensates for the detected pressure difference caused by the unevenness of the placed element, or initiates a corrective offset of the driven actuator to compensate for the detected unevenness of the placed element itself. Of course, for the example outlined herein, both types of actuators, i.e., driven and measuring, can also be used, combining both characteristics simultaneously and thus falling within the definition of the term "actuator" as used herein.

[0064] Besides the aforementioned applications of the actuator device as a positioning device, for compensating for local unevenness, for local deformation of elements located on a cover plate, or as a high-resolution pressure sensor, other applications are conceivable: Therefore, the actuator device can also be used, for example, to generate precise, highly localized tactile feedback. For instance, if a touch-sensitive display is mounted on the cover plate, the actuator device can be used to send tactile feedback to the toucher based on the content of the display and the touch location. This can be achieved, for example, by configuring the actuator of the actuator device as a piezoelectric actuator, which is subjected to vibration through appropriate control and thus provides the user with spatially defined and perceptible vibrational feedback. Similarly, the content displayed on the display, even potentially three-dimensional content such as terrain, structure, or visual manipulation elements, can also be tactilely perceived very precisely when swiping or touching the display using a high-resolution actuator device—that is, an actuator device with a sufficiently high actuator density in an array and a sufficiently small actuator structural size. This can also be used, for example, to facilitate operation of the device by visually impaired individuals.

[0065] Another conceivable application is the possibility of positioning or translating objects on a cover plate of an actuator device using surface acoustic waves. Thus, by properly controlling actuators arranged in an array, directional surface waves can be generated running on the cover plate, causing the same directional translation of an object located on the cover plate at a sufficient frequency. In particular, for example, it is conceivable to perform targeted cleaning, i.e., removal of impurities, on sensitive surfaces such as optical elements, sensors, mirrors, or wafers using actuator devices by placing the object to be cleaned on the cover plate.

[0066] It is also advantageous that the carrier plate and cover plate are formed of a non-conductive material to ensure adequate insulation of the conductor traces of the actuator device relative to each other. Similarly, it is advantageous to insert one or more insulating layers or plates between the carrier plate and any other actuators arranged on the carrier plate to achieve better electrical insulation between these components if necessary.

[0067] Furthermore, it should be clearly pointed out that in the actuator device according to the invention, not all positions in the m×n dimensional array must be occupied by the actuator; rather, positions can be selectively left unoccupied. Therefore, for example, it may be advantageous, in certain cases, for the actuators of the actuator device arranged in the array not to completely fill the array to form a rectangular shape, but rather to form a substantially circular shape, i.e., the array positions are selectively left unoccupied, or the positions are selectively and evenly distributed to allow for additional or larger perforations or recesses, or for positioning other components such as sensors, support elements, etc., in these positions.

[0068] Similarly, any perforations or recesses need not be evenly or regularly distributed throughout the entire actuator device or extend through the entire cover plate, but can be located only in a defined area of ​​the actuator device. This can be advantageous, for example, by means of perforations or recesses arranged in the actuator device to hold a circular object, such as a wafer, by means of negative pressure and to deform or orient it by the actuator. In this case, it is meaningful that the perforations or recesses on the cover plate extend only through the area covered by the element to be held or oriented, to ensure proper holding by negative pressure.

[0069] Furthermore, it should be mentioned that the carrier plate and cover plate, referred to as plates in this invention, do not necessarily have to be flat. Therefore, curved shapes or other surface topography are also conceivable, for example, to adapt the actuator device to the object to be deformed or to place it directly on the object, as long as this does not result in contact or unwanted contact between the actuator or conductor traces.

[0070] Similarly, it is conceivable that actuators arranged in an array have a basic size that varies along one or both of the array dimensions m and n and / or a varying interval or gap.

[0071] Furthermore, the actuators arranged in the array can be manufactured by 3D printing or printed directly onto a carrier plate or cover plate, which, for example, allows the actuator geometry and shape to be specifically adapted to the requirements of the respective application.

[0072] Explanation of reference numerals in the attached figures:

[0073] 1 Actuator device

[0074] 2 actuators

[0075] 3 carrier plates

[0076] 4 cover plates

[0077] 5 conductor traces

[0078] 6m×n dimensional array

[0079] 7 Surface Structured Part

[0080] 8 actuators

[0081] 8.1 Shear Actuator

[0082] 9 (the first protruding section of carrier plate 3)

[0083] 10 (the second protruding section of carrier plate 3)

[0084] 11. Adapter device

[0085] 12 Platform section of the adapter device

[0086] 13. Gap between drivers arranged in the array

[0087] 14. Perforation

Claims

1. An actuator device (1) comprising an actuator (2), a carrier plate (3), a cover plate (4) and conductor tracks (5) for electrically contacting the actuator, wherein, At least one part of the actuators is arranged between the carrier plate and the cover plate along the first and second dimension of the m x n-dimensional array (6) electrically insulated from one another, and a total of m + n conductor tracks are arranged on the carrier plate and the cover plate such that the m conductor tracks arranged on the carrier plate each electrically connect the actuators arranged in the array to one another along the first dimension of the array, and such that the n conductor tracks arranged on the cover plate each electrically connect the actuators arranged in the array to one another along the second dimension of the array.

2. The actuator device (1) according to claim 1, characterized in that The cover plate (4) or the carrier plate (3) has a regular surface structuring (7).

3. The actuator device (1) according to claim 2, characterized in that The surface structuring (7) has a grid-shaped structure similar to the symmetry of the array (6).

4. The actuator device (1) according to any one of the preceding claims, characterized in that At least one further actuator (8) is arranged on the carrier plate (3).

5. The actuator device (1) according to claim 4, characterized in that The at least one further actuator (8) is formed as a planar shape.

6. The actuator device (1) according to claim 5, characterized in that The at least one planar actuator is formed by a shear actuator (8.1).

7. The actuator device (1) according to claim 6, characterized in that Two shear actuators (8.1) are arranged on the carrier plate (3) in a stacked manner, wherein the shear actuators are formed or arranged such that, when controlled, a shear in different spatial directions takes place.

8. The actuator device (1) according to any one of the preceding claims, characterized in that At least one of the actuators (2) is formed by a piezoelectric actuator.

9. The actuator device (1) according to any one of the preceding claims, characterized in that The carrier plate (3) or the cover plate (4) is formed from the same material as the actuators (2).

10. The actuator device (1) according to claim 9, characterized in that The actuators (2) and the carrier plate (3) or the cover plate (4) are formed from a piezoceramic material.

11. An actuator device (1) according to any one of the preceding claims, characterized in that At least one part of the conductor tracks (5) is produced by a vapor deposition method or a coating method or a printing method or an implantation method.

12. The actuator device (1 ) according to any one of claims 1 to 10, characterized in that At least one part of the conductor tracks (5) is produced by metallization and subsequent structuring.

13. An actuator device (1) according to any one of the preceding claims, characterized in that The carrier plate (3) has a first section (9) projecting relative to the cover plate (4) and a second section (10) projecting relative to the cover plate (4), the conductor tracks (5) arranged on the carrier plate (3) being led out to the first section (9) and the conductor tracks (5) arranged on the cover plate (4) being led out to the second section (10).

14. The actuator device (1) according to claim 13, characterized in that The conductor tracks (5) arranged on the cover plate (4) are led out to the second projecting section (10) of the carrier plate (3) by at least one adapter device (11), wherein the adapter device comprises at least one platform section (12) which substantially corresponds in its height to the distance between the carrier plate (3) and the cover plate (4) and which at least partially overlaps the cover plate (4).

15. An actuator device (1) according to any one of the preceding claims, characterized in that The gaps (13) between the actuators (2) arranged in the array (6) are filled with a non-conductive material.

16. An actuator device (1) according to any one of the preceding claims, characterized in that The array (2) is sealed in an air-tight manner from a non-conductor material.

17. An actuator device (1) according to any one of the preceding claims, characterized in that The actuator device (1) has perforations (14) or recesses in the region of the gaps (13) between the actuators (2) arranged in the array (6).

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