Air floating table

Abstract

The invention relates to the technical field of semiconductors, in particular to an air bearing table. The air bearing table comprises a base, a rotary table, a rotation driving mechanism and a lifting driving mechanism, the base comprises a base and a guide part which are connected, the guide part extends in the vertical direction, the rotary table comprises a shaft body part and a cover body part, one end of the shaft body part is connected with the cover body part, the shaft body part is movably arranged in the guide part, and the lifting driving mechanism is arranged on the rotary table. The other end of the shaft body part is connected with the output end of the rotary driving mechanism, the rotary driving mechanism can drive the shaft body part to rotate in the vertical direction, the cover body part is arranged at the output end of the lifting driving mechanism, and the lifting driving mechanism can drive the cover body part and the shaft body part to reciprocate in the vertical direction. The air bearing table can simultaneously realize rotation and lifting motion, adopts an integrated coupling design, improves the integration level of equipment, and is simple in structure and ingenious in design, so that the performances of high rotation speed, high precision and high response speed are obtained.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to an air floating table. BACKGROUND

[0002] In the field of semiconductor manufacturing, the stability and precision of the equipment are extremely high during wafer detection and processing, and the air floating table, as a key supporting component, is widely used due to its characteristics of no friction and low vibration. The air floating tables on the market are mainly divided into two categories: one type is an air floating table with lifting function, which controls the change of air film thickness through a pneumatic system to realize vertical displacement adjustment, and is commonly used in wafer loading and unloading and height calibration scenes; the other type is an air floating table with rotation function, which uses the principle of gas static pressure to support the worktable, and can realize high-precision rotary motion, and is suitable for wafer surface omnidirectional detection and processing.

[0003] However, the above two types of air floating tables are independent of each other, and it is difficult to simultaneously realize the rotation and lifting functions, resulting in low equipment integration. In actual production, complex detection and processing procedures of wafers often require multi-dimensional motion control at the same time, for example, in the wafer surface defect detection process, the worktable needs to be rotated to cover the entire detection area, and the detection height needs to be adjusted in real time according to the detection accuracy requirements. In order to realize the combined motion of rotation and lifting of the air floating table, a stacked air floating table is provided in the related technology, that is, the lifting air floating and the rotating air floating are simply stacked and combined to realize function integration, but this stacked air floating table has the disadvantages of cumulative error, complex and bulky structure, and is difficult to meet the increasing demand for high precision production in the semiconductor industry.

[0004] Therefore, there is an urgent need for an air floating table to solve the above problems. SUMMARY

[0005] The purpose of the present application is to provide an air floating table that can simultaneously realize rotation and lifting motion, and is designed as an integrated coupling, thereby improving the integration of the equipment, and having a simple structure and ingenious design, thereby obtaining high speed, high precision, and high response speed.

[0006] To achieve the above purpose, the following technical solutions are provided:

[0007] An air floating table, comprising:

[0008] a base comprising a base and a guide part connected to each other, the guide part extending in a vertical direction;

[0009] a turntable comprising a shaft body part and a cover body part, one end of the shaft body part being connected to the cover body part, the shaft body part being movably arranged in the guide part;

[0010] A rotation driving mechanism, one end of the shaft body part is connected with an output end of the rotation driving mechanism, and the rotation driving mechanism can drive the shaft body part to rotate around the vertical direction;

[0011] A lifting driving mechanism, the cover body part is arranged at an output end of the lifting driving mechanism, and the lifting driving mechanism can drive the cover body part and the shaft body part to reciprocate along the vertical direction.

[0012] As an option, the lifting driving mechanism comprises:

[0013] A lifting driving assembly arranged on the base;

[0014] A first mounting arranged at an output end of the lifting driving assembly, and the lifting driving assembly drives the cover body part to reciprocate along the vertical direction through the first mounting.

[0015] As an option, the lifting driving assembly comprises:

[0016] A lifting driving part arranged on the base, and the first mounting is connected with an output end of the lifting driving part;

[0017] An elastic part sleeved on the lifting driving part, one end of the elastic part abuts against the base, and the other end abuts against the first mounting.

[0018] As an option, the air floating table further comprises:

[0019] A rotation inhibiting mechanism configured to inhibit the first mounting from rotating around the vertical direction.

[0020] As an option, the rotation inhibiting mechanism comprises a first rotation inhibiting part and a second rotation inhibiting part, the first rotation inhibiting part is connected with the base, the second rotation inhibiting part is movably arranged in the first rotation inhibiting part, and the second rotation inhibiting part is connected with the first mounting;

[0021] Or, the rotation inhibiting mechanism is a plate type rotation inhibiting part, the plate type rotation inhibiting part is fixed with the base, and an outer circumferential surface of the first mounting is provided with a matching plane extending along the vertical direction, and the plate type rotation inhibiting part matches with the matching plane.

[0022] Or, the rotation inhibiting mechanism comprises a guide rail and a sliding block, the guide rail extends along the vertical direction, one of the guide rail and the sliding block is fixed with the base, and the other is fixed with the first mounting, and the guide rail and the sliding block are in sliding cooperation.

[0023] As an option, the base is provided with a containing groove, and the rotation driving mechanism is arranged in the containing groove.

[0024] As an option, the air floating table further comprises:

[0025] A first detection mechanism configured to detect the position of the rotating table in the vertical direction;

[0026] And / or, a second detection mechanism configured to detect the angle of rotation of the rotating table around the vertical direction.

[0027] As an option, the number of the first detection mechanisms is at least two, and the at least two first detection mechanisms are arranged in a circumferential direction of the shaft body;

[0028] And / or, the number of the second detection mechanisms is at least two, and the at least two second detection mechanisms are arranged in a circumferential direction of the cover body.

[0029] As an option, the air floating table further comprises:

[0030] A mounting mechanism comprising a second mounting member and a slip ring connected with each other, the second mounting member is connected with the lifting driving mechanism, the slip ring is provided with an air passage, the cover body is provided with an adsorption hole, and the adsorption hole is in communication with the air passage.

[0031] As an option, the second mounting member is provided with a mounting groove, and the mounting groove is in communication with the air passage.

[0032] As an option, a first air film passage is defined between the guide portion and the shaft body, and the first air film passage can be filled with compressed gas to form a first air film;

[0033] And / or, a second air film passage is defined between the lifting driving mechanism and the cover body, and the second air film passage can be filled with compressed gas to form a second air film.

[0034] Compared with the prior art, the air floating table has the following advantages:

[0035] The air floating table provided by the application drives the rotating table to rotate through the rotating driving mechanism and drives the rotating table to lift through the lifting driving mechanism, so that the rotating table can realize rotation and lifting movement at the same time, the integration degree of the equipment is improved, the performance of high rotation speed, high precision and high response speed is obtained, and the strict requirements of the semiconductor system on the air floating table are met; the guide portion is arranged to guide the rotating and lifting movement of the rotating table, on the one hand, the coupling degree of the integrated coupling design air floating table is higher, the integration degree of the air floating table is further improved, and the movement precision is improved, the rotating and lifting guiding movement of the air floating table is realized through air floating between the guide portion and the shaft body, and the structure is simple and the design is ingenious; on the other hand, the stroke of the rotating table in the vertical direction is expanded. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments of the present application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of the contents of the embodiments of the present application and the drawings.

[0037] Figure 1 The first structural schematic diagram of the air floating table provided by the embodiment one of the present application;

[0038] Figure 2 The second structural schematic diagram of the air floating table provided by the embodiment one of the present application;

[0039] Figure 3 The Figure 2 sectional view at A-A in FIG. 1;

[0040] Figure 4 The Figure 2 sectional view at B-B in FIG. 1;

[0041] Figure 5 The partial structural schematic diagram of the air floating table provided by the embodiment one of the present application;

[0042] Figure 6 The structural schematic diagram of the air floating table provided by the embodiment two of the present application;

[0043] Figure 7 The sectional view of the air floating table provided by the embodiment two of the present application.

[0044] Reference signs:

[0045] 100, air floating table;

[0046] 10, base; 11, pedestal; 111, containing groove; 12, guide part;

[0047] 20, rotary table; 21, shaft body part; 22, cover body part; 221, adsorption hole;

[0048] 30, rotary driving mechanism;

[0049] 40, lifting driving mechanism; 41, lifting driving assembly; 411, lifting driving piece; 412, elastic piece; 42, first mounting piece; 421, matching plane;

[0050] 50, rotation inhibiting mechanism; 51, first rotation inhibiting piece; 52, second rotation inhibiting piece; 53, plate type rotation inhibiting piece;

[0051] 60, first detecting mechanism; 61, third mounting piece; 62, first reading head; 63, linear grating ruler;

[0052] 70, second detecting mechanism; 71, fourth mounting member; 72, second reading head;

[0053] 80, mounting mechanism; 81, second mounting member; 811, mounting groove; 82, slip ring; 821, air channel; 822, annular groove; 823, annular groove. DETAILED DESCRIPTION

[0054] In order to make the above objectives, features and advantages of the present application more apparent, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art, that the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the spirit of the present application, and it is therefore intended that the present application not be limited to the embodiments disclosed below.

[0055] In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0056] In addition, if the terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0057] In the present application, unless otherwise specifically defined and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be interpreted broadly. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication or interaction relationship of two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0058] In this application, unless otherwise explicitly specified and limited, if there is a description such as "on" or "under" or the like between a first feature and a second feature, it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is higher in horizontal height than the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is lower in horizontal height than the second feature.

[0059] It should be noted that if an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in this application are only for illustrative purposes and do not represent the only implementation.

[0060] Embodiment one

[0061] Air floating table is widely used in ultra-precision machine tool, precision positioning system, semiconductor detection, laser cutting and angle measurement system and other fields. For the application of air floating table in the field of semiconductors, the air floating table in the related art cannot meet the demand of combined rotation and lifting motion.

[0062] Based on the above problems, the present application provides an air floating table capable of realizing combined rotation and lifting motion, thereby improving the motion accuracy and detection efficiency of the equipment to improve the above problems.

[0063] As shown in Figures 1-4 The present embodiment provides an air floating table 100, which comprises a base 10, a rotary table 20, a rotary driving mechanism 30 and a lifting driving mechanism 40. The base 10 comprises a base 11 and a guide part 12 connected with each other. The guide part 12 extends in the vertical direction. The rotary table 20 comprises a shaft body part 21 and a cover part 22. One end of the shaft body part 21 is connected with the cover part 22. The shaft body part 21 is movably arranged in the guide part 12. The other end of the shaft body part 21 is connected with the output end of the rotary driving mechanism 30. The rotary driving mechanism 30 can drive the shaft body part 21 to rotate around the vertical direction. The cover part 22 is arranged at the output end of the lifting driving mechanism 40. The lifting driving mechanism 40 can drive the cover part 22 and the shaft body part 21 to reciprocate along the vertical direction.

[0064] The air floating table 100 provided by the embodiment drives the rotating table 20 to rotate through the rotating driving mechanism 30 and drives the rotating table 20 to lift through the lifting driving mechanism 40, so that the rotating table 20 can realize the rotation and lifting movement at the same time, the integration of the equipment is improved, the performance of high rotating speed, high precision and high response speed is obtained, and the strict requirements of the semiconductor system on the air floating table 100 are met; the guiding of the rotating and lifting movement of the rotating table 20 is realized through the guide part 12. On the one hand, the coupling degree of the air floating table 100 of the integrated coupling design is higher, the integration of the air floating table 100 is further improved, and the movement precision is improved. The rotating and lifting guiding movement of the air floating table 100 is realized through the air floating between the guide part 12 and the shaft body part 21, and the structure is simple and the design is ingenious. On the other hand, the stroke of the rotating table 20 in the vertical direction is expanded. According to the verification of the inventor, the stroke of the air floating table 100 in the vertical direction can reach more than 15 mm.

[0065] Optionally, the first gas film channel is defined between the guide part 12 and the shaft body part 21, and compressed gas can be introduced into the first gas film channel to form a first gas film, which is beneficial to the control of the precision of the lifting of the shaft body part 21, improves the lifting stability, and can realize the frictionless relative movement between the guide part 12 and the shaft body part 21.

[0066] Optionally, as shown in Figures 3-5 the lifting driving mechanism 40 includes a lifting driving assembly 41 and a first mounting piece 42. The lifting driving assembly 41 is arranged on the base 11, and the first mounting piece 42 is arranged on the output end of the lifting driving assembly 41. The lifting driving assembly 41 drives the cover body part 22 to reciprocate in the vertical direction through the first mounting piece 42. When the lifting driving assembly 41 works, the first mounting piece 42 is pushed to move up and down in the vertical direction, and then the rotating table 20 is pushed to move up and down. The lifting direction of the lifting driving assembly 41 is the same as the lifting guiding direction of the guide part 12 to the shaft body part 21, which improves the precision of the lifting movement of the air floating table 100.

[0067] Optionally, the number of the lifting driving assemblies 41 is multiple, and the multiple lifting driving assemblies 41 are arranged at intervals on the circumferential side of the guide part 12, so as to improve the stability of the lifting movement of the rotating table 20.

[0068] Optionally, the second gas film channel is defined between the lifting driving mechanism 40 (specifically the first mounting piece 42) and the cover body part 22, and compressed gas can be introduced into the second gas film channel to form a second gas film. The cover body part 22 is provided with vertical support through the formed second gas film, which is beneficial to the stability of the cover body part 22 during rotation, and can realize the frictionless relative movement between the cover body part 22 and the first mounting piece 42.

[0069] Optionally, the lifting driving assembly 41 comprises a lifting driving member 411 and an elastic member 412, the lifting driving member 411 is arranged on the base 11, the first mounting member 42 is connected with an output end of the lifting driving member 411, and the elastic member 412 is sleeved on the lifting driving member 411, one end of the elastic member 412 abuts against the base 11, and the other end abuts against the first mounting member 42. In work, the lifting driving member 411 drives the first mounting member 42 to move up and down, and the control accuracy of the force of the lifting movement is improved through the elastic member 412, and the balance force can be adjusted in real time according to different load weights; the elastic member 412 is sleeved on the lifting driving member 411, on the one hand, the lifting driving member 411 can provide guidance for the elastic member 412 to ensure the accuracy of the elastic force provided by the elastic member 412, and on the other hand, the integration is higher. In addition, by selecting the elastic member 412 as the gravity balance mechanism, compared with the selection of the cylinder in the related art, there is no friction, the response is fast, it is suitable for scenes requiring high-speed feedback, such as focus pursuit demand, the movement distance is also long, the focus pursuit can be performed at different positions, and the large-stroke positioning movement can also be completed, and it is suitable for different working conditions.

[0070] Optionally, the lifting driving member 411 can be a small-sized voice coil motor, which has the advantages of small size, low price and fast response speed.

[0071] Optionally, the elastic member 412 can be a spring, which has low material cost and thus reduces production cost.

[0072] Optionally, the air floating table 100 further comprises a rotation inhibition mechanism 50, and the rotation inhibition mechanism 50 is used for inhibiting the first mounting member 42 from rotating around the vertical direction.

[0073] Optionally, the rotation inhibition mechanism 50 comprises a first rotation inhibition member 51 and a second rotation inhibition member 52, the first rotation inhibition member 51 is connected with the base 11, and the second rotation inhibition member 52 is movably arranged in the first rotation inhibition member 51 and connected with the first mounting member 42. Through the above arrangement, on the one hand, the rotation inhibition effect on the first mounting member 42 is realized; on the other hand, the first rotation inhibition member 51 and the second rotation inhibition member 52 can assist the first mounting member 42 in the vertical direction.

[0074] In the embodiment, the number of the rotation inhibition mechanisms 50 is two, and the two rotation inhibition mechanisms 50 are arranged on the circumferential side of the guide portion 12 in a spaced manner, so that the first mounting member 42 is balanced in force. In other embodiments, the number of the rotation inhibition mechanisms 50 can also be three, four or more, and the designer can adaptively select according to actual needs.

[0075] Optionally, a third gas film passage is defined between the first rotation inhibiting member 51 and the second rotation inhibiting member 52, and the third gas film passage is capable of being communicated with the compressed gas to form a third gas film, so as to realize the frictionless relative movement between the first rotation inhibiting member 51 and the second rotation inhibiting member 52.

[0076] Optionally, the air floating table 100 further comprises a mounting mechanism 80, the mounting mechanism 80 comprises a second mounting member 81 and a sliding ring 82 connected with each other, the second mounting member 81 is connected with the lifting driving mechanism 40 (specifically, the first mounting member 42), the sliding ring 82 is provided with a gas passage 821 and an annular groove 823 communicated with the gas passage 821, the cover body 22 is provided with an adsorption hole 221, the adsorption hole 221 is communicated with the gas passage 821 through the annular groove 823, and the gas passage 821 is used for being connected with a negative pressure device. The negative pressure device is capable of providing stable negative pressure, so that the adsorption hole 221 on the cover body 22 can adsorb a wafer. Through the above arrangement, the turntable 20 can maintain a certain required negative pressure value at different rotating speeds, and can also adapt to different vertical height requirements during the movement of the turntable 20 along the vertical direction, and maintain stable pressure requirements. Optionally, the negative pressure device can be an existing vacuum pump or a vacuum generator.

[0077] Optionally, in order to realize the frictionless relative movement between the sliding ring 82 and the cover body 22, a gap is arranged between the sliding ring 82 and the cover body 22, so that there is no contact and no particles between the sliding ring 82 and the cover body 22, and there is no dust risk, and long-life high-precision operation can be realized. However, the existence of the gap will cause the vacuum leakage between the gas passage 821 and the adsorption hole 221. In order to solve this problem, as shown in Figure 3 and Figure 4 The inner wall of the sliding ring 82 is provided with an annular groove 822, and the annular groove 822 is a micro-pressure relief labyrinth seal structure, so as to slow down the speed of the vacuum leakage between the sliding ring 82 and the cover body 22. In the embodiment, the number of the annular grooves 822 is six, the six annular grooves 822 are arranged at intervals along the axial direction of the sliding ring 82, and are uniformly arranged on both sides of the gas passage 821. By controlling the air volume of the negative pressure device, the distance between the adjacent two annular grooves 822 and the size of the gap between the sliding ring 82 and the cover body 22, the air extraction amount and the air inlet amount are balanced, so as to form a pressure maintaining cavity between the sliding ring 82 and the cover body 22 while the turntable 20 rotates at high speed. The pressure value of the pressure maintaining cavity can reach-80kpa. In other embodiments, the number of the annular grooves 822 can also be one, two, three or more, and the designer can select adaptively according to actual needs.

[0078] Optionally, the number of air passages 821 is multiple, and the multiple air passages 821 are arranged along the circumference of the slip ring 82, and the multiple air passages 821 can be respectively communicated with the negative pressure device or the positive pressure device to provide the positive pressure / negative pressure interface requirement. The positive pressure device can be an existing blowing device.

[0079] In another optional embodiment, the number of air passages 821 is one to three.

[0080] Optionally, the second mounting member 81 is provided with a mounting groove 811, and the mounting groove 811 is communicated with the air passage 821. The mounting groove 811 is arranged to facilitate the layout of the pipeline of the negative pressure device, so that the structure of the air floating table 100 is more compact.

[0081] Optionally, the air floating table 100 further comprises a first detection mechanism 60, and the first detection mechanism 60 is configured to detect the position of the turntable 20 in the vertical direction. The first detection mechanism 60 is arranged to provide position feedback for the lifting movement of the turntable 20 when the turntable 20 is lifted.

[0082] In this embodiment, the number of first detection mechanisms 60 is two, and the two first detection mechanisms 60 are arranged along the circumference of the shaft body 21. The difference between the positions of the turntable 20 in the lifting movement detected by the two first detection mechanisms 60 provides a basis for judging the movement accuracy of the turntable 20 in the lifting movement. In other embodiments, the number of first detection mechanisms 60 can also be three, four or more, and the designer can make adaptive selection according to actual needs.

[0083] Optionally, the first detection mechanism 60 comprises a third mounting member 61, a first reading head 62 and a linear grating ruler 63. The third mounting member 61 is arranged on the base 11, the first reading head 62 is arranged on the third mounting member 61, and the linear grating ruler 63 is arranged on the first mounting member 42. In operation, the first reading head 62 reads the value of the linear grating ruler 63 on the first mounting member 42 to judge the position of the first mounting member 42 in the vertical direction, and further judge the position of the turntable 20 in the vertical direction.

[0084] Optionally, the air floating table 100 further comprises a second detection mechanism 70, and the second detection mechanism 70 is configured to detect the angle of the turntable 20 rotating around the vertical direction. The second detection mechanism 70 is arranged to provide position feedback for the rotating movement of the turntable 20 when the turntable 20 rotates.

[0085] In this embodiment, the number of the second detection mechanisms 70 is two, and the two second detection mechanisms 70 are arranged along the circumference of the cover body 22 at intervals. The difference in the angle of the rotary table 20 in the rotary motion detected by the two second detection mechanisms 70 provides a basis for judging the motion accuracy of the rotary table 20 in the rotary motion. In other embodiments, the number of the second detection mechanisms 70 can also be three, four or more, and the designer can make adaptive selection according to actual needs.

[0086] Optionally, the second detection member includes a fourth mounting member 71, a second reading head 72 and a rotary encoder disc (not shown in the figure), the fourth mounting member 71 is arranged on the first mounting member 42, the second reading head 72 is arranged on the fourth mounting member 71, and the rotary encoder disc is arranged on the outer periphery of the cover body 22. In operation, the value of the rotary encoder disc on the cover body 22 is read by the second reading head 72 to judge the angle of rotation of the cover body 22, and further to judge the angle of rotation of the rotary table 20.

[0087] Optionally, the base 11 is provided with a receiving groove 111, and the rotary driving mechanism 30 is arranged in the receiving groove 111 to reduce the size of the air floating table 100 in the vertical direction, so as to realize the miniaturization design of the air floating table 100.

[0088] Optionally, the rotary driving mechanism 30 can be a DD motor, which has the advantages of low energy consumption, high efficiency, low noise, low failure rate and compact structure. Specifically, the rotary driving mechanism 30 includes a stator and a rotor. The stator is fixed to the base 11, and the rotor is arranged in the stator. The rotor is fixed to the shaft body 21, and the stator can drive the rotor to rotate, thereby driving the shaft body 21 to rotate. It can be understood that when the lifting driving mechanism 40 drives the rotary table 20 to lift, the rotor moves up and down with the shaft body 21, and at the same time does not affect the rotary motion of the rotor.

[0089] Optionally, the upper surface of the cover body 22 is a high-precision plane, which is used as a reference surface for the vertical motion error of the wafer in the horizontal direction. The surface flatness of the high-precision plane can reach 1 um, the normality error between the high-precision plane and the shaft body 21 is less than 2 um, and the axial rotary motion error (end jump) of the shaft body 21 is less than 50 nm. Therefore, the vertical error of the air floating table 100 in the rotary motion process is less than ±1 um.

[0090] Embodiment two

[0091] This embodiment provides an air floating table 100, which has basically the same specific structure as the air floating table 100 provided in embodiment one, except that the specific structure of the rotary suppression mechanism 50 is different.

[0092] Specifically, as shown in Figure 6 and Figure 7As shown, the rotation inhibiting mechanism 50 provided by the embodiment is a plate-type rotation inhibiting piece 53, which is fixed to the base 11. The outer circumferential surface of the first mounting piece 42 is provided with a matching plane 421 extending in the vertical direction. The plate-type rotation inhibiting piece 53 matches with the matching plane 421, thereby preventing the second mounting piece 81 from rotating around the vertical direction.

[0093] Optionally, a fourth gas film passage is defined between the plate-type rotation inhibiting piece 53 and the matching plane 421. The fourth gas film passage can be filled with compressed gas to form a fourth gas film, so as to realize the frictionless relative movement between the plate-type rotation inhibiting piece 53 and the matching plane 421.

[0094] In the embodiment, the number of plate-type rotation inhibiting pieces 53 is two. The matching plane 421 is provided in one-to-one correspondence with the plate-type rotation inhibiting pieces 53. The two plate-type rotation inhibiting pieces 53 are arranged at intervals on the circumferential side of the first mounting piece 42, so as to improve the rotation inhibiting effect on the first mounting piece 42. In other embodiments, the number of plate-type rotation inhibiting pieces 53 can also be one, three or more. Designers can adaptively adjust according to actual layout requirements.

[0095] Embodiment Three

[0096] The embodiment provides a gas floating table 100, which has basically the same specific structure as the gas floating table 100 provided by the first embodiment. The difference lies in that the specific structure of the rotation inhibiting mechanism 50 is different.

[0097] Specifically, the rotation inhibiting mechanism 50 provided by the embodiment includes a guide rail and a sliding block. One of the guide rail and the sliding block is fixed to the base 10, and the other is fixed to the first mounting piece 42. The guide rail and the sliding block are in sliding cooperation, thereby preventing the second mounting piece 81 from rotating around the vertical direction.

[0098] Note that in the description of the present specification, the description referring to the terms “some embodiments”, “other embodiments”, and the like means that the specific features, structures, materials or characteristics described in the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0099] The above merely describes the preferred embodiments of the present application and the principles of the applied technology. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, modifications and substitutions can be made by those skilled in the art without departing from the scope of the present application. Therefore, although the present application has been described in detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. An air bearing table, characterized by, The air floating table comprises: a base (10) comprising a bottom (11) and a guide portion (12) connected to each other, the guide portion (12) extending in a vertical direction; a rotating table (20) comprising a shaft body portion (21) and a cover body portion (22), one end of the shaft body portion (21) being connected to the cover body portion (22), the shaft body portion (21) being movably arranged in the guide portion (12), and a first air film being arranged between the guide portion (12) and the shaft body portion (21); a rotating driving mechanism (30), the other end of the shaft body portion (21) being connected to an output end of the rotating driving mechanism (30), the rotating driving mechanism (30) being capable of driving the shaft body portion (21) to rotate around the vertical direction; a lifting driving mechanism (40), the cover body portion (22) being arranged at an output end of the lifting driving mechanism (40), the lifting driving mechanism (40) being capable of driving the cover body portion (22) and the shaft body portion (21) to reciprocate along the vertical direction.

2. The air bearing table of claim 1, wherein, The lifting driving mechanism (40) comprises: a lifting driving assembly (41) arranged on the bottom (11); a first mounting member (42) arranged at an output end of the lifting driving assembly (41), the lifting driving assembly (41) driving the cover body portion (22) to reciprocate along the vertical direction through the first mounting member (42).

3. The air bearing table of claim 2, wherein, The lifting driving assembly (41) comprises: a lifting driving member (411) arranged on the bottom (11), the first mounting member (42) being connected to an output end of the lifting driving member (411); a resilient member (412) sleeved on the lifting driving member (411), one end of the resilient member (412) being abutted against the bottom (11), and the other end being abutted against the first mounting member (42).

4. The air bearing table of claim 2, wherein, The air floating table further comprises: a rotating inhibiting mechanism (50) configured to inhibit the first mounting member (42) from rotating around the vertical direction.

5. The air bearing table of claim 4, wherein, The rotating inhibiting mechanism (50) comprises a first rotating inhibiting member (51) connected to the bottom (11) and a second rotating inhibiting member (52) movably arranged in the first rotating inhibiting member (51) and connected to the first mounting member (42); or, the rotating inhibiting mechanism (50) is a plate-type rotating inhibiting member (53) fixed to the bottom (11), an outer circumferential surface of the first mounting member (42) being provided with a matching plane (421) extending in the vertical direction, the plate-type rotating inhibiting member (53) being matched with the matching plane (421); or, the rotating inhibiting mechanism (50) comprises a guide rail and a sliding block, one of the guide rail and the sliding block being fixed to the base (10), and the other being fixed to the first mounting member (42), the guide rail and the sliding block being in sliding cooperation.

6. The air bearing table of claim 1, wherein, The base (11) is provided with a containing groove (111), and the rotary driving mechanism (30) is arranged in the containing groove (111).

7. The air bearing table of any of claims 1-6, wherein, The air floating table further comprises: A first detection mechanism (60) configured to detect the position of the rotary table (20) in the vertical direction; And / or, a second detection mechanism (70) configured to detect the angle of rotation of the rotary table (20) around the vertical direction.

8. The air bearing table of claim 7, wherein, The number of the first detection mechanisms (60) is at least two, and the at least two first detection mechanisms (60) are arranged in a circumferential direction of the shaft body (21) at intervals. And / or, the number of the second detection mechanisms (70) is at least two, and the at least two second detection mechanisms (70) are arranged in a circumferential direction of the cover body (22) at intervals.

9. The air bearing table of any of claims 1-6, wherein, The air floating table further comprises: A mounting mechanism (80) comprising a second mounting member (81) and a slip ring (82) connected with each other, the second mounting member (81) is connected with the lifting driving mechanism (40), the slip ring (82) is provided with an air channel (821), the cover body (22) is provided with an adsorption hole (221), and the adsorption hole (221) is in communication with the air channel (821).

10. The air bearing table of claim 9, wherein, The second mounting member (81) is provided with a mounting groove (811), and the mounting groove (811) is in communication with the air channel (821).

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