Depth of field compensation method for a flexible substrate stage and apparatus therefor

Abstract

The application discloses a depth-of-field compensation method and device of a flexible substrate platform, relates to the depth-of-field compensation technical field of ink drop defect detection in inkjet printing, and comprises the following steps: acquiring depth-of-field coordinates of the platform; the depth-of-field coordinates comprise three-dimensional coordinates of a depth-of-field point, and the three-dimensional coordinates comprise an X-axis coordinate, a Y-axis coordinate and a Z-axis coordinate; the X-axis coordinate is a coordinate of a line scanning camera in a scanning direction on the platform, the Y-axis coordinate is a coordinate of the line scanning camera in a moving direction on the platform, and the Z-axis coordinate is a coordinate of the depth-of-field point in a depth-of-field direction of the platform relative to a platform plane; acquiring a to-be-detected flexible substrate coordinate on the platform; planning a depth-of-field compensation path for the flexible substrate according to the to-be-detected flexible substrate coordinate; and any one passing point in the depth-of-field compensation path corresponds to a depth-of-field coordinate of a depth-of-field point. When a high-precision camera scans and photographs the flexible substrate, the flatness error of the platform is considered, and the depth-of-field compensation of the flexible substrate platform is performed.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of depth of field compensation for ink drop defect detection in inkjet printing, in particular to a depth of field compensation method for a flexible substrate stage and a device thereof. BACKGROUND

[0002] Currently, in the front stage (array stage) of the display panel process, particles / foreign matter (Particle) need to be detected. The size of the Particle defect is usually 1-10 μm, and at present there is a lack of equipment for detecting the array stage in China.

[0003] In addition, as the substrate size becomes larger, the size of the substrate stage also becomes larger. The flatness error of the stage of a large-size substrate (such as a G6 substrate) can reach hundreds of microns. When the stage carries a flexible substrate, the distance between the camera and the substrate is usually fixed when the camera scans and photographs the flexible substrate; due to the flatness error of the stage, the Particle defect on the substrate may not be within the depth of field range of the high-precision camera, and thus the photographed photo is blurred, and further detection of the defect on the substrate cannot be performed.

[0004] Therefore, how to perform depth of field compensation for a flexible substrate stage in the scenario of a high-precision camera photographing a flexible substrate on a stage has become a problem to be solved. SUMMARY

[0005] The present application provides a depth of field compensation method for a flexible substrate stage and a device thereof, which considers the flatness error of the stage and performs depth of field compensation for the flexible substrate stage when a high-precision camera scans and photographs a flexible substrate.

[0006] The present application discloses a depth of field compensation method for a flexible substrate stage, which comprises: acquiring a depth of field coordinate of the stage; the depth of field coordinate comprises a three-dimensional coordinate of a depth of field point, and the X-axis coordinate in the three-dimensional coordinate is a coordinate of the scanning direction of the line-scan camera on the stage, the Y-axis coordinate is a coordinate of the moving direction of the line-scan camera on the stage, and the Z-axis coordinate is a coordinate of the depth of field point in the depth of field direction of the stage relative to the plane of the stage; acquiring a coordinate of a flexible substrate to be detected on the stage; planning a depth of field compensation path for the flexible substrate according to the coordinate of the flexible substrate to be detected; and any passing point in the depth of field compensation path corresponds to a depth of field coordinate of a depth of field point.

[0007] In the above scheme, it is intended to illustrate how to perform depth of field compensation of the flexible substrate after considering the flatness error of the stage. The size of the flexible substrate is smaller than that of the stage, so it is necessary to first position the size of the substrate on the stage, and then select the depth of field coordinates in the positioning area to compensate the flexible substrate. In this application, the flexible substrate is considered to be able to reproduce the flatness error on the stage, so when the line scan camera scans the substrate, the thickness of the flexible substrate is directly added to the depth of field direction coordinates of the stage as the shooting height. The motion control mechanism can directly move the high-precision camera according to the depth of field compensation path to scan and obtain the image of the substrate.

[0008] In a possible implementation, before obtaining the depth of field coordinates of the stage, the depth of field compensation method further comprises: obtaining measurement point coordinates of the stage; the stage comprises a plurality of rows and a plurality of columns of measurement points, and the measurement point coordinates comprise three-dimensional coordinates of the measurement points; the stage is divided into a plurality of regions in the Y-axis direction; the Y-axis width of a region is the scanning width of the line scan camera in the Y-axis direction; the depth of field coordinates of the region are obtained; the depth of field coordinates of the region comprise a plurality of groups of depth of field coordinates in the X-axis direction, one group of depth of field coordinates corresponds to one X-axis coordinate, and any group of depth of field coordinates is the average value of the Z-axis coordinates of a plurality of measurement points in the corresponding X-axis coordinate, so as to subsequently construct the depth of field coordinates of the stage by using the depth of field coordinates of the plurality of regions.

[0009] In the above scheme, it is intended to illustrate how to obtain the depth of field coordinates of the stage. A plurality of measurement points are uniformly distributed on the stage, and the stage is divided into a plurality of regions according to the scanning width of the line scan camera in the Y-axis direction; then the depth of field coordinates of the region are obtained, so that the depth of field coordinates of the stage can be obtained. The depth of field coordinates of the region are divided into two parts, one part is the Z-axis coordinate of the depth of field direction corresponding to any X-axis coordinate in the region (i.e. the group depth of field coordinates), and the other part is the region depth of field coordinates composed of a plurality of X-axis coordinates. In addition, the depth of field coordinates in this application mainly refer to the X-axis coordinates and the Z-axis coordinates of the depth of field points. For a region, the Y-axis coordinates of the region can be considered to be the same.

[0010] In a possible implementation, after an overlap region is arranged in any two adjacent regions in the plurality of regions, any two adjacent regions comprise a first region and a second region, and the overlap region is arranged at the edge adjacent to the first region and the second region; the depth of field compensation method further comprises: obtaining the depth of field coordinates of the first region according to the first region except the overlap region; and obtaining the depth of field coordinates of the second region according to the second region except the overlap region.

[0011] In the above scheme, a method for obtaining a region depth-of-field coordinate is disclosed. In order to avoid missing scanning (which may cause defects of the flexible substrate not to be scanned) when the linear scanning camera scans the substrate, an overlap region can be arranged in two adjacent regions. After the overlap region is arranged, when obtaining the region depth-of-field coordinate, considering that the Y-axis width of the overlap region is relatively small, the three-dimensional coordinates of the measurement points in the overlap region can not be considered, and only the three-dimensional coordinates of the measurement points outside the overlap region are considered; thereby improving the scanning efficiency of the linear scanning camera, and being suitable for scenarios with high requirements for scanning efficiency. It should be noted that the linear scanning camera is used in the present application, and no planar scanning camera or other scanning camera is used, which is also considered to improve the scanning efficiency of the substrate.

[0012] In a possible implementation, after an overlap region is arranged in any two adjacent regions of a plurality of regions, the any two adjacent regions include a first region and a second region, and the overlap region is arranged at an edge adjacent to the first region and the second region; the depth-of-field compensation method further includes: obtaining a depth-of-field coordinate of the first region according to the first region; and obtaining a depth-of-field coordinate of the second region according to the second region.

[0013] In the above scheme, another method for obtaining a region depth-of-field coordinate is disclosed. After the overlap region is arranged, the three-dimensional coordinates of the measurement points in the overlap region are considered in both adjacent regions. This method can enable each region to obtain a region depth-of-field coordinate according to all the measurement point coordinates in the region, and the accuracy of the obtained region depth-of-field coordinate is better, and is suitable for scenarios with high requirements for the accuracy of the depth-of-field coordinate.

[0014] In a possible implementation, the depth-of-field coordinate of the region includes a plurality of groups of depth-of-field coordinates in the X-axis direction, and specifically includes: obtaining a plurality of groups of measurement point coordinates in a third region, the plurality of regions including the third region, and each group of measurement point coordinates including a plurality of measurement point coordinates; obtaining a plurality of groups of depth-of-field coordinates of the third region according to the plurality of groups of measurement point coordinates of the third region; the plurality of groups of depth-of-field coordinates including a first group of depth-of-field coordinates; if the first group of depth-of-field coordinates is not within a preset first coordinate range, the remaining depth-of-field coordinates of the third region except the first group of depth-of-field coordinates are taken as the depth-of-field coordinates of the third region; and the preset first coordinate range is determined by the flatness of the flexible substrate stage.

[0015] In the above scheme, a specific acquisition method of the area depth of field coordinates is disclosed. By presetting the first coordinate range, the noise (caused by dust or other particles, etc.) in the multiple group depth of field coordinates is removed; and the multiple group depth of field coordinates within the preset first coordinate range are selected as the area depth of field coordinates. Generally, the depth of field coordinates will not exceed the flatness of the flexible substrate stage; the preset first coordinate range can be set according to this characteristic; this method can further improve the accuracy of the area depth of field coordinates, and is suitable for scenarios with high requirements for the accuracy of the depth of field coordinates. In addition, such abnormal points are recorded for subsequent manual review and processing.

[0016] In a possible implementation, any one group of depth of field coordinates is the average value of the Z-axis coordinates of multiple measurement points in the corresponding Y-axis coordinates, and specifically includes: obtaining third group measurement point coordinates in a fifth region, the multiple regions include the fifth region, the fifth region includes multiple group measurement point coordinates, the multiple group measurement point coordinates include the third group measurement point coordinates, and the third group measurement point coordinates include multiple measurement point coordinates; if there is a measurement point coordinate in the third group measurement point coordinates that is not within a preset second coordinate range, then the average value of the Z-axis coordinates of the remaining measurement points in the third group measurement point coordinates, except for the measurement point not within the preset second coordinate range, is calculated to obtain the third group depth of field coordinates.

[0017] In the above scheme, a specific acquisition method of the area depth of field coordinates is disclosed. By presetting the first coordinate range, the noise (caused by dust or other particles, etc.) in the multiple group depth of field coordinates is removed; and the multiple group depth of field coordinates within the preset first coordinate range are selected as the area depth of field coordinates. Generally, the depth of field coordinates will not exceed the flatness of the flexible substrate stage; the preset first coordinate range can be set according to this characteristic; this method can further improve the accuracy of the area depth of field coordinates, and is suitable for scenarios with high requirements for the accuracy of the depth of field coordinates. In addition, such abnormal points are recorded for subsequent manual review and processing.

[0018] In a possible implementation, any one group of depth of field coordinates is the average value of the Z-axis coordinates of multiple measurement points in the corresponding Y-axis coordinates, and specifically includes: obtaining third group measurement point coordinates in a fifth region, the multiple regions include the fifth region, the fifth region includes multiple group measurement point coordinates, the multiple group measurement point coordinates include the third group measurement point coordinates, and the third group measurement point coordinates include multiple measurement point coordinates; if there is a measurement point coordinate in the third group measurement point coordinates that is not within a preset second coordinate range, then the average value of the Z-axis coordinates of the remaining measurement points in the third group measurement point coordinates, except for the measurement point not within the preset second coordinate range, is calculated to obtain the third group depth of field coordinates.

[0019] In the above scheme, another way of obtaining a set of depth coordinates is disclosed. This way is similar to the way of obtaining the area depth coordinates, and a preset second coordinate range is set. The preset second coordinate range is smaller than the preset first coordinate range, and the error of a single set of depth coordinates is smaller than the error of multiple sets of depth coordinates in an area.

[0020] In a possible implementation, the scanning width of the line scan camera in the Y-axis direction is the middle section of the field of view of the line scan camera in the Y-axis direction, and the scanning width of the line scan camera in the Y-axis direction = a*field of view of the line scan camera in the Y-axis direction.

[0021] In the above scheme, a way of setting the scanning width of the line scan camera is disclosed. The edge of the field of view of the line scan camera will have distortion, especially in the process of high-precision defect detection of the array section, which needs to be considered. Therefore, a coefficient a is added in the effective field of view of the line scan camera in the Y-axis direction, which can be set according to needs, such as a being set to 60%-90%, which is not limited.

[0022] In a possible implementation, the depth compensation path of the flexible substrate is planned according to the coordinates of the flexible substrate to be detected, specifically including: determining the corresponding area of the flexible substrate to be detected according to the coordinates of the flexible substrate to be detected; the line scan camera shoots adjacent two areas in an "S-shaped" connection manner in the corresponding area of the flexible substrate to be detected, to form the depth compensation path of the flexible substrate; wherein the "S-shaped" connection manner is that the line scan camera moves in the Y-axis direction to the adjacent and unswept area after scanning one area to directly scan the adjacent and unswept area.

[0023] In the above scheme, a way of improving the efficiency of the line scan camera is disclosed. The depth compensation path of the flexible substrate is planned in the "S-shaped" connection manner. Any adjacent two areas on the stage can be smoothly connected, which only needs to be moved in the Y-axis direction, to improve the scanning efficiency of the flexible substrate.

[0024] The second aspect of the present application discloses a depth compensation device of a flexible substrate stage, which comprises a processor, a memory, a user interface and a network interface. The memory is used to store instructions, and the user interface and the network interface are used to communicate with other devices. The processor is used to execute the instructions stored in the memory, so that the depth compensation device executes the following instructions:

[0025] Obtain the depth coordinates of the stage. The depth coordinates include the three-dimensional coordinates of the depth points, and the X-axis coordinate in the three-dimensional coordinates is the coordinate of the scanning direction of the line scan camera on the stage, the Y-axis coordinate is the coordinate of the moving direction of the line scan camera on the stage, and the Z-axis coordinate is the coordinate of the depth point in the depth direction of the stage relative to the plane of the stage.

[0026] Obtaining a coordinate of the flexible substrate to be detected on the stage;

[0027] Planning a depth-of-field compensation path for the flexible substrate according to the coordinate of the flexible substrate to be detected; any one of the points on the path corresponds to a depth-of-field coordinate of a depth-of-field point.

[0028] The application has the following advantages:

[0029] The size of the flexible substrate is smaller than that of the stage, so the size of the substrate on the stage needs to be positioned first, and then the depth-of-field coordinates in the positioning area are selected to compensate for the flexible substrate. In this application, the flexible substrate is considered to be able to reproduce the flatness error on the stage, so when the line-scan camera scans the substrate, the thickness of the flexible substrate is directly added to the depth-of-field direction coordinates of the stage as the shooting height. The motion control mechanism can directly move the high-precision camera according to the depth-of-field compensation path to scan and obtain the image of the substrate;

[0030] Uniformly distributing a plurality of measurement points on the stage, and dividing the stage into a plurality of regions according to the scanning width of the line-scan camera in the Y-axis direction; then obtaining the depth-of-field coordinates of the regions, so as to obtain the depth-of-field coordinates of the stage. The depth-of-field coordinates of the region are divided into two parts, one part is the Z-axis coordinate of the depth-of-field direction corresponding to any one X-axis coordinate in the region (i.e. the group depth-of-field coordinate), and the other part is the region depth-of-field coordinate composed of a plurality of X-axis coordinates;

[0031] In order to avoid missing scanning (missing scanning may cause defects of the flexible substrate not to be scanned) when the line-scan camera scans the substrate, an overlap area can be set in two adjacent regions. After setting the overlap area, when obtaining the depth-of-field coordinates of the region, considering that the Y-axis width of the overlap area is relatively small, the three-dimensional coordinates of the measurement points in the overlap area can not be considered, only the three-dimensional coordinates of the measurement points outside the overlap area are considered; thereby improving the scanning efficiency of the line-scan camera, which is suitable for scenes with high scanning efficiency requirements;

[0032] After setting the overlap area, the three-dimensional coordinates of the measurement points in the overlap area are considered in both adjacent regions. This way allows each region to obtain the region depth-of-field coordinates according to all the measurement point coordinates in the region, and the accuracy of the obtained region depth-of-field coordinates is better, which is suitable for scenes with high accuracy requirements for depth-of-field coordinates;

[0033] By presetting a first coordinate range, the noise (caused by dust or other particles, etc.) in the plurality of group depth-of-field coordinates is removed; and a plurality of group depth-of-field coordinates within the preset first coordinate range are selected as the region depth-of-field coordinates. Generally, the depth-of-field coordinates will not exceed the flatness of the flexible substrate stage; the preset first coordinate range can be set according to this characteristic; this way can further improve the accuracy of the region depth-of-field coordinates, which is suitable for scenes with high accuracy requirements for depth-of-field coordinates;

[0034] By sorting the measurement points in the group, the average value of the Z-axis coordinates of the preset proportion of the middle section is selected as the depth of field coordinate of the group. The preset proportion can be 40%-80%, which can be set as needed and is not limited; in general, the smaller the preset proportion, the more accurate the final depth of field coordinate of the group is. In this way, it is also to remove the case that the measurement points in a group may be noise (caused by dust or other particles, etc.); by directly screening in this way, the three-dimensional coordinates of the measurement points of the stage itself are retained for the calculation of the depth of field coordinate of the group;

[0035] The edge of the shooting field of view of the line scanning camera will have distortion, especially in the process of high-precision defect detection of the array section, which needs to be considered; therefore, a coefficient a is added in the effective field of view of the Y-axis direction of the above line scanning camera, which can be set as needed;

[0036] By the "S-shaped" connection mode, the depth of field compensation path of the flexible substrate is planned. As long as the Y-axis direction is moved, any two adjacent regions on the stage can be smoothly connected, thereby improving the scanning efficiency of the flexible substrate. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 A flowchart of a depth of field compensation method of a flexible substrate stage disclosed in the specification of the present application;

[0038] Figure 2a A partition principle schematic diagram of a flexible substrate stage disclosed in the specification of the present application;

[0039] Figure 2b A schematic diagram of a camera depth of field compensation path disclosed in the specification of the present application;

[0040] Figure 3 A schematic diagram of an overlapping region structure of adjacent regions disclosed in the specification of the present application;

[0041] Figure 4 A measurement point schematic diagram of a region disclosed in the specification of the present application;

[0042] Figure 5 A depth of field point schematic diagram of a region disclosed in the specification of the present application;

[0043] Figure 6 A schematic diagram of a depth of field compensation device structure of a flexible substrate stage disclosed in the specification of the present application. DETAILED DESCRIPTION

[0044] In order for those skilled in the art to better understand the technical solutions in the specification, the technical solutions in the specification will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the specification. Obviously, the described embodiments are only some of the embodiments of the present application, not all.

[0045] In the description of the embodiments of the present application, the words such as "for example" or "for instance" are used to represent an example, illustration or description. Any embodiment or design scheme described as "for example" or "for instance" in the embodiments of the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the words such as "for example" or "for instance" are intended to present the relevant concept in a specific manner.

[0046] In the description of the embodiments of the present application, the term "a plurality of" means two or more. For example, a plurality of systems means two or more systems, and a plurality of screen terminals means two or more screen terminals. In addition, the terms "first" and "second" are used for description purposes only and should not be interpreted as indicating or implying relative importance or implicitly indicating the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more features. The terms "include", "contain", "have" and their variants mean "include but are not limited to", unless otherwise specifically emphasized.

[0047] The present specification discloses a depth of field compensation method of a flexible substrate stage, as shown in Figure 1 The depth of field compensation method comprises steps S101-S103.

[0048] S101, obtain the depth of field coordinates of the stage; the depth of field coordinates comprise three-dimensional coordinates of the depth of field points, and the X-axis coordinate in the three-dimensional coordinates is the coordinate of the scanning direction of the line-scan camera on the stage, the Y-axis coordinate is the coordinate of the moving direction of the line-scan camera on the stage, and the Z-axis coordinate is the coordinate of the depth of field point in the depth of field direction of the stage relative to the stage plane.

[0049] In the present specification, a height sensor can be used to measure the Z-axis coordinates point by point on the stage, and then a mapping relationship is constructed between the Z-axis coordinates and the X-axis and Y-axis coordinates of the point to form the depth of field coordinates. Obviously, the more points measured, the more depth of field coordinates on the stage; compared with the case of measuring fewer points, the more accurate depth of field coordinates obtained. Moreover, the Z-axis coordinates use coordinates relative to the stage platform, such as +50μm and -60μm. This coordinate setting mode facilitates the subsequent motion controller to raise or lower the line-scan camera to perform depth of field compensation of the flexible substrate stage.

[0050] S102, obtain the coordinates of the flexible substrate to be detected on the stage.

[0051] S103, according to the coordinates of the flexible substrate to be detected, planning a depth of field compensation path for the flexible substrate; any one passing point in the depth of field compensation path corresponds to the depth of field coordinates of a depth of field point.

[0052] In this example, the size of the flexible substrate is smaller than the size of the stage, so it is necessary to first position the substrate on the stage, and then select the depth of field coordinates in the positioning area to compensate for the flexible substrate. Therefore, the stage in this specification can adapt to substrates of various sizes, such as G6 substrates 1500mm x 1850mm and G8.5 substrates 2200mm x 2500mm. As shown, the starting coordinates of the substrate 200 (the lower right corner of the flexible substrate) can be aligned with the starting coordinates of the stage 100 (the lower right corner of the stage), and then the coordinates of the flexible substrate on the stage (i.e. the position of the flexible substrate on the stage) can be confirmed. Figure 2a

[0053] And, in this specification Figures 3-5 The region in the stage 100 is an example, and the entire region in the stage 100 is processed in this way. Therefore, the stage 100 can be applied to substrates 200 of various sizes.

[0054] At this time, the depth of field compensation path 201 can be planned according to the position of the flexible substrate on the stage, which can be planned in a way of connecting the depth of field coordinates of the stage in sequence, thereby improving the accuracy of planning; or a group of adjacent several columns or several rows of depth of field coordinates (and the Z-axis coordinates of these depth of field coordinates are within a set error range) can be formed as a whole "group depth of field coordinates" for planning, thereby improving the planning efficiency. In this example, the way of planning the depth of field compensation path is not limited.

[0055] In addition, the flexible substrate in this specification is considered to be able to reproduce the flatness error on the stage, so when the line scan camera scans the substrate, the thickness of the flexible substrate is directly added to the depth of field direction coordinates of the stage as the shooting height. The motion control mechanism can directly move the high-precision camera according to the depth of field compensation path to scan and obtain the image of the substrate; any one passing point in the depth of field compensation path is the depth of field coordinates of a depth of field point, that is, the X-axis, Y-axis and Z-axis are kept synchronous. As shown, the motion mechanism 500 drives the line scan camera 400 to move in the Z-axis direction (depth of field direction) with a single depth of field compensation path 202 ( Figure 2b Figure 2a The depth of field compensation path 201 in the stage 100 includes a plurality of single depth of field compensation paths 202); so that the distance between the line scan camera 400 and the stage plane 160 remains unchanged, and the distance is within the depth of field range of the high-precision line scan camera.

[0056] The depth of field compensation path is discussed below, and several preferred schemes are disclosed.​​

[0057] In one example, before obtaining the depth coordinates of the stage, the depth compensation method further includes: obtaining the coordinates of measurement points on the stage; the stage includes multiple rows and columns of measurement points, and the coordinates of the measurement points include the three-dimensional coordinates of the measurement points; dividing the stage into multiple regions in the Y-axis direction; the Y-axis width of a region is the scanning width of the line scan camera on the Y-axis; obtaining the depth coordinates of the region; the depth coordinates of the region include multiple sets of depth coordinates in the X-axis direction, each set of depth coordinates corresponding to an X-axis coordinate, and any set of depth coordinates is the average value of the Z-axis coordinates of multiple measurement points in its corresponding X-axis coordinate, so as to facilitate the subsequent construction of the depth coordinates of the stage using the depth coordinates of multiple regions.

[0058] In the example above, multiple measurement points are evenly distributed on the platform. Based on the scanning width of the line scan camera in the Y-axis direction, the platform is divided into multiple regions. Then, by obtaining the depth coordinates of the regions, the depth coordinates of the platform can be obtained. Furthermore, the depth coordinates of the regions are divided into two parts: one part is the Z-axis coordinate corresponding to any X-axis coordinate in the depth direction (i.e., the aforementioned group depth coordinates), and the other part is the region depth coordinates composed of multiple X-axis coordinates.

[0059] It is important to note that these two parts can improve the efficiency of depth-of-field planning paths. The number of groups in the region is determined by the width setting of each group on the X-axis. The X-axis width of the group can be set as needed, or it can be an empirical value. Furthermore, after setting the X-axis width of the group, a portion of the groups (not necessarily all groups) can be selected as the depth-of-field points of the region's depth-of-field coordinates. The number of selected groups can be set as needed, or it can be an empirical value.

[0060] In addition, the depth coordinates in this specification mainly refer to the X-axis and Z-axis coordinates of the depth point. For a region, the Y-axis coordinates of the region can be considered to be the same. Generally, the geometric center line of the region in the Y-axis direction can be selected as the Y-axis coordinate of the region.

[0061] like Figure 2a As shown, four regions are illustrated on the stage: region 110, region 120, region 130, and region 140. The example shows a flexible substrate situated within regions 110-140, but the X-axis does not completely cover the X-axis coordinates of the stage. The Y-axis width of the region is 150, the scanning width of the line scan camera.

[0062] In one example, the scanning width of the line scan camera on the Y-axis is the middle segment of the field of view captured by the line scan camera in the Y-axis direction, and the scanning width of the line scan camera on the Y-axis = a * the field of view of the line scan camera in the Y-axis direction.

[0063] At this time, considering that the edge of the shooting field of view of the line scan camera will have distortion, especially in the process of high-precision defect detection of the substrate array section. Therefore, in the effective field of view of the Y-axis direction of the above line scan camera, a coefficient a is added, which can be set as needed, such as: a is set to 60%-90%, which is not limited.

[0064] In the above example, no overlap area is set in two adjacent regions, and compared with setting an overlap area in two adjacent regions, not setting an overlap area can improve the planning efficiency of the depth of field path. In some scenarios where the accuracy or precision of the depth of field path is required to be high, an overlap area can be set to avoid missing defect scanning of the edges of two regions by the camera.

[0065] In one example, after setting an overlap area in any two adjacent regions in a plurality of regions, the any two adjacent regions include a first region and a second region, and the overlap area is set at the edge adjacent to the first region and the second region; the depth of field compensation method further comprises: acquiring the depth of field coordinates of the first region according to the first region excluding the overlap area; and acquiring the depth of field coordinates of the second region according to the second region excluding the overlap area.

[0066] At this time, in order to avoid missing scanning (missing scanning may cause defects of the flexible substrate to be missed) when the line scan camera scans the substrate, an overlap area can be set in two adjacent regions. After setting the overlap area, when acquiring the region depth of field coordinates, considering that the Y-axis width of the overlap area is relatively small, the three-dimensional coordinates of the measurement points in the overlap area can not be considered, and only the three-dimensional coordinates of the measurement points outside the overlap area are considered; thereby improving the scanning efficiency of the line scan camera, which is suitable for scenarios where the scanning efficiency is required to be high. As shown in Figure 3 It can be seen that the measurement points in the overlap area 300 can not be considered by the region 110 and the region 120; considering that the number of measurement points is reduced, the scanning efficiency of the camera can be improved.

[0067] It should be noted that in the present specification, a line scan camera is used, and a surface scan camera or other is not used, which is also considered to improve the scanning efficiency of the substrate.

[0068] In one example, after setting an overlap area in any two adjacent regions in a plurality of regions, the any two adjacent regions include a first region and a second region, and the overlap area is set at the edge adjacent to the first region and the second region; the depth of field compensation method further comprises: acquiring the depth of field coordinates of the first region according to the first region; and acquiring the depth of field coordinates of the second region according to the second region.

[0069] At this time, after the overlap area is set, both of the two adjacent areas consider the three-dimensional coordinates of the measurement points in the overlap area. In this way, each area can obtain the area depth coordinate according to all the measurement point coordinates in the area, and the accuracy of the obtained area depth coordinate is better, and it is suitable for scenes with high requirements for the accuracy of the depth coordinate. Figure 3 As shown in FIG. 11B, both the area 110 and the area 120 consider the measurement points in the overlap area 300. The more measurement points considered, the higher the accuracy of the depth coordinate.

[0070] The three-dimensional coordinates of the measurement points and the depth point coordinates will be described below.

[0071] In one example, the depth coordinate of the area includes a plurality of groups of depth coordinates in the X-axis direction, and specifically includes: obtaining a plurality of groups of measurement point coordinates in a third area, the plurality of areas including the third area, each group of measurement point coordinates including a plurality of measurement point coordinates; obtaining a plurality of groups of depth coordinates of the third area according to the plurality of groups of measurement point coordinates of the third area; the plurality of groups of depth coordinates include a first group of depth coordinates; if the first group of depth coordinates is not within a preset first coordinate range, the remaining depth coordinates in the third area except the first group of depth coordinates are taken as the depth coordinates of the third area; wherein the preset first coordinate range is determined by the flatness of the flexible substrate stage.

[0072] At this time, by the preset first coordinate range, the noise (caused by dust or other particles, etc.) in the plurality of groups of depth coordinates is removed; and the plurality of groups of depth coordinates within the preset first coordinate range are selected as the area depth coordinates. Generally, the depth coordinate (mainly the Z-axis coordinate) will not exceed the flatness of the flexible substrate stage; the preset first coordinate range can be set according to this characteristic; in this way, the accuracy of the area depth coordinate can be further improved, and it is suitable for scenes with high requirements for the accuracy of the depth coordinate. For example: the flatness of the flexible substrate stage is 120 μm, i.e. ± 60 μm; at this time, the preset first coordinate range can be set to ± 60 μm. As shown in FIG. 11C, four small groups are shown in the area 110, which are group 1, group 2, group 3 and group 4; wherein the group 2 is an abnormal depth point, i.e. the Z-axis coordinate of the group 2 depth point is greater than the preset coordinate range value, and the area depth coordinate will remove it, and the depth coordinates of the group 1, the group 3 and the group 4 are retained as the area depth coordinates. Figure 5

[0073] In addition, such depth abnormal points will be recorded for subsequent manual review and processing.

[0074] ​In one example, any set of depth coordinates is the average value of the Z-axis coordinates of multiple measurement points in its corresponding Y-axis coordinates. Specifically, this includes: obtaining the coordinates of the second set of measurement points in a fourth region, wherein the multiple regions include the fourth region, the fourth region includes multiple sets of measurement point coordinates, the multiple sets of measurement point coordinates include the second set of measurement point coordinates, and the second set of measurement point coordinates includes multiple measurement point coordinates; sorting the Z-axis coordinates of the multiple measurement points in the second set of measurement points from smallest to largest; and selecting the Z-axis coordinates of the middle segment with a preset proportion from the sorted Z-axis coordinates of the second set of measurement points for average value calculation to obtain the second set of depth coordinates.

[0075] At this point, by sorting the measurement points of this group, the average Z-axis coordinate of the middle segment at a preset ratio is selected as the depth coordinate of this group. The preset ratio can be 40%-80%, and this ratio can be set as needed without limitation; generally, the smaller the preset ratio, the more accurate and precise the final depth coordinates of this group may be. This method also aims to eliminate situations where the measurement points in a group may be affected by noise (i.e., dust or other particles); by directly filtering them out in this way and retaining the three-dimensional coordinates of the platform's own measurement points for calculating the depth coordinates of this group, the efficiency of obtaining the depth coordinates is relatively high.

[0076] like Figure 4 As shown, four groups are illustrated in region 110, each group corresponding to an X-axis coordinate; when the group includes multiple columns of measurement points, the X-axis coordinate can be the coordinate of the geometric center point of the group in the X direction. Figure 4 One group only provides an example of a series of measurement points. Taking group 2 as an example, sort the Z-axis of each measurement point in group 2 from smallest to largest (or from largest to smallest). The measurement points at both ends can be removed, and the average Z-axis coordinate of the measurement points in the middle section can be taken as the depth coordinate of the depth point of group 2. The X-axis coordinate of the depth point of group 2 is the X-axis coordinate of each measurement point in group 2, and its Y-axis coordinate can be the coordinate of the geometric center point in the Y-axis direction of group 2.

[0077] Furthermore, the calculation of the average value also considers the overall Z-axis situation of each measurement point, aiming to compensate all measurement points within the depth of field of the line scan camera as much as possible. Additionally, the depth of field coordinates at the two ends of the sorting are removed, as these may or may not be the coordinates of abnormal measurement points.

[0078] In one example, any one set of depth of field coordinates is the average of the Z-axis coordinates of the corresponding Y-axis coordinates of multiple measurement points, specifically including: obtaining the third set of measurement point coordinates in the fifth region, the multiple regions including the fifth region, the fifth region including multiple sets of measurement point coordinates, the multiple sets of measurement point coordinates including the third set of measurement point coordinates, and the third set of measurement point coordinates including multiple measurement point coordinates; if there is a measurement point coordinate in the third set of measurement point coordinates that is not within the preset second coordinate range, then calculate the average of the Z-axis coordinates of the remaining measurement points in the third set of measurement point coordinates except for the measurement point not within the preset second coordinate range to obtain the third set of depth of field coordinates.

[0079] At this time, this way is similar to the above-mentioned way of obtaining the region depth of field coordinates, and a preset second coordinate range is set; the preset second coordinate range is smaller than the preset first coordinate range, and the error of a single group of depth of field coordinates is smaller than the error of multiple groups of depth of field coordinates in a region. Because the positions of the measurement points involved in a single group of depth of field coordinates are close, and the positions of the measurement points involved in the depth of field coordinates of each group in the region are far apart. As an example above: if the preset first coordinate range is set to ±60μm, the preset second coordinate range can be set to ±30μm or ±20μm; as above, here the Z-axis coordinates of the measurement points are mainly compared.

[0080] As shown in Figure 4 , one measurement point coordinate of the small group 1 is judged as an abnormal measurement point by the preset second coordinate range, and the Z-axis coordinate of the abnormal measurement point is excluded from the group depth of field coordinates of the small group 1; only the Z-axis coordinates of the other measurement points in the small group 1 are considered.

[0081] In one example, the depth of field compensation path is planned for the flexible substrate according to the coordinates of the flexible substrate to be detected; specifically including: determining the corresponding region of the flexible substrate to be detected according to the coordinates of the flexible substrate to be detected; in the corresponding region of the flexible substrate to be detected, the line scan camera shoots adjacent two regions in an "S-shaped" connection manner to form the depth of field compensation path of the flexible substrate; wherein the "S-shaped" connection manner is that the line scan camera scans one region and then moves in the Y-axis direction to the adjacent region that has not been scanned to directly scan.

[0082] At this time, the depth of field compensation path of the flexible substrate is planned through the "S-shaped" connection manner. Any two adjacent regions on the stage can be smoothly connected by moving in the Y-axis direction only, thereby improving the scanning efficiency of the flexible substrate.

[0083] As shown in Figure 2aAn example of a depth of field compensation path is presented in an "S" shape; two adjacent regions, for example, region 110 and region 120, can be moved in the Y-axis direction; region 120 and region 130 can be moved in the Y-axis direction. The coordinates of the depth of field points (or depth of field compensation points) involved in the depth of field compensation path are the paths of the motion control mechanism moving the camera.

[0084] The present specification discloses a depth of field compensation device of a flexible substrate stage, the depth of field compensation device comprising a processor, a memory, a user interface and a network interface, the memory being configured to store instructions, the user interface and the network interface being configured to communicate with other devices, and the processor being configured to execute the instructions stored in the memory to cause the depth of field compensation device to perform the following instructions:

[0085] Obtaining depth of field coordinates of the stage; the depth of field coordinates comprising three-dimensional coordinates of depth of field points, and the X-axis coordinate in the three-dimensional coordinates being a coordinate of a scanning direction of a line scanning camera on the stage, the Y-axis coordinate being a coordinate of a moving direction of the line scanning camera on the stage, and the Z-axis coordinate being a coordinate of the depth of field point in a depth of field direction of the stage relative to a plane of the stage;

[0086] Obtaining coordinates of a flexible substrate to be detected on the stage;

[0087] Planning a depth of field compensation path for the flexible substrate according to the coordinates of the flexible substrate to be detected; any one of the points on the depth of field compensation path corresponding to a depth of field coordinate of a depth of field point.

[0088] In one example, before obtaining the depth of field coordinates of the stage, the depth of field compensation method further comprises: obtaining measurement point coordinates of the stage; the stage comprising a plurality of rows and a plurality of columns of measurement points, and the measurement point coordinates comprising three-dimensional coordinates of the measurement points; dividing the stage into a plurality of regions in the Y-axis direction; the Y-axis width of a region being a scanning width of the line scanning camera in the Y-axis direction; obtaining depth of field coordinates of the region; the depth of field coordinates of the region comprising a plurality of groups of depth of field coordinates in the X-axis direction, one group of depth of field coordinates corresponding to one X-axis coordinate, and any one group of depth of field coordinates being an average value of the Z-axis coordinates of a plurality of measurement points in the corresponding X-axis coordinate, so as to subsequently construct the depth of field coordinates of the stage by using the depth of field coordinates of the plurality of regions.

[0089] In one example, after setting an overlap region in any two adjacent regions in the plurality of regions, any two adjacent regions comprising a first region and a second region, and setting the overlap region at an edge adjacent to the first region and the second region; the depth of field compensation method further comprises: obtaining the depth of field coordinates of the first region according to the first region excluding the overlap region; and obtaining the depth of field coordinates of the second region according to the second region excluding the overlap region.

[0090] In one example, after any two adjacent regions of the plurality of regions are provided with the overlap region, the any two adjacent regions include a first region and a second region, and the overlap region is provided at an edge adjacent to the first region and the second region; the depth-of-field compensation method further includes: obtaining the depth-of-field coordinates of the first region according to the first region; and obtaining the depth-of-field coordinates of the second region according to the second region.

[0091] In one example, the depth-of-field coordinates of the region include a plurality of groups of depth-of-field coordinates in the X-axis direction, and specifically include: obtaining a plurality of groups of measurement point coordinates in a third region, the plurality of regions including the third region, each group of measurement point coordinates including a plurality of measurement point coordinates; obtaining a plurality of groups of depth-of-field coordinates of the third region according to the plurality of groups of measurement point coordinates of the third region; the plurality of groups of depth-of-field coordinates include a first group of depth-of-field coordinates; if the first group of depth-of-field coordinates is not within a preset first coordinate range, the remaining depth-of-field coordinates of the third region except the first group of depth-of-field coordinates are taken as the depth-of-field coordinates of the third region; and the preset first coordinate range is determined by the flatness of the flexible substrate stage.

[0092] In one example, any one group of depth-of-field coordinates is the average value of the Z-axis coordinates of a plurality of measurement points in the corresponding Y-axis coordinates, and specifically includes: obtaining a second group of measurement point coordinates in a fourth region, the plurality of regions including the fourth region, the fourth region including a plurality of groups of measurement point coordinates, the plurality of groups of measurement point coordinates including the second group of measurement point coordinates, the second group of measurement point coordinates including a plurality of measurement point coordinates; sorting the Z-axis coordinates of a plurality of measurement points in the second group of measurement point coordinates from small to large; and selecting the Z-axis coordinates of a preset proportion of the middle section from the sorted Z-axis coordinates of the second group of measurement points to calculate the average value, thereby obtaining the second group of depth-of-field coordinates.

[0093] In one example, any one group of depth-of-field coordinates is the average value of the Z-axis coordinates of a plurality of measurement points in the corresponding Y-axis coordinates, and specifically includes: obtaining a third group of measurement point coordinates in a fifth region, the plurality of regions including the fifth region, the fifth region including a plurality of groups of measurement point coordinates, the plurality of groups of measurement point coordinates including the third group of measurement point coordinates, the third group of measurement point coordinates including a plurality of measurement point coordinates; if there is a measurement point coordinate in the third group of measurement point coordinates that is not within a preset second coordinate range, calculating the average value of the Z-axis coordinates of the remaining measurement points in the third group of measurement point coordinates except the measurement point not within the preset second coordinate range, thereby obtaining the third group of depth-of-field coordinates.

[0094] In one example, the scanning width of the line-scan camera in the Y-axis direction is the middle section of the field of view of the line-scan camera in the Y-axis direction, and the scanning width of the line-scan camera in the Y-axis direction = a*the field of view of the line-scan camera in the Y-axis direction.

[0095] In one example, the depth-of-field compensation path is planned for the flexible substrate according to the coordinates of the flexible substrate to be detected; specifically comprising: determining the corresponding area of the flexible substrate to be detected according to the coordinates of the flexible substrate to be detected; in the corresponding area of the flexible substrate to be detected, the line-scan camera shoots two adjacent areas in an "S-shaped" connection manner to form the depth-of-field compensation path of the flexible substrate; wherein the "S-shaped" connection manner is that the line-scan camera scans one area and then moves to the adjacent and unswept area in the Y-axis direction to directly scan.

[0096] It should be noted that: the device provided in the above embodiment is only exemplified by the above division of functional modules when realizing its function, and in actual application, the above functions can be completed by different functional modules according to needs, that is, the internal structure of the device is divided into different functional modules to complete all or part of the above described functions. In addition, the device and method embodiments provided in the above embodiments belong to the same concept, and the specific implementation process is detailed in the method embodiments, which will not be repeated here.

[0097] The disclosure also discloses a computer-readable storage medium, which stores instructions that, when executed, perform the above method.

[0098] The embodiment also discloses a depth-of-field compensation device of a flexible substrate stage, which can be an automated optical inspection (AOI) device to perform the above method. Referring to Figure 6 , the depth-of-field compensation device can include at least one processor 601, at least one communication bus 602, a display 603, a network interface 604, and at least one memory 605.

[0099] The communication bus 602 is used to realize the connection and communication between the components.

[0100] The display 603 can include a display screen (Display) and a camera (Camera).

[0101] The network interface 604 can optionally include a standard wired interface and a wireless interface (such as a WI-FI interface).

[0102] The processor 601 can include one or more processing cores. The processor 601 connects various parts within the server through various interfaces and lines, performs various functions of the server and processes data by running or executing instructions, programs, code sets or instruction sets stored in the memory 605, and calling data stored in the memory 605. Optionally, the processor 601 can be implemented in at least one of a hardware form of a digital signal processing (DSP), a field-programmable gate array (FPGA), and a programmable logic array (PLA). The processor 601 can integrate a combination of one or more of a central processing unit (CPU), a graphics processing unit (GPU), and a modem. Among them, the CPU mainly processes operating systems, user interfaces, and application programs; the GPU is responsible for rendering and drawing the content to be displayed on the display screen; and the modem is used for processing wireless communication. It can be understood that the above-mentioned modem can also not be integrated into the processor 601, but can be realized by a separate chip.

[0103] The memory 605 can include a random access memory (RAM) and a read-only memory (ROM). Optionally, the memory 605 includes a non-transitory computer-readable storage medium. The memory 605 can be used to store instructions, programs, codes, code sets or instruction sets. The memory 605 can include a program storage area and a data storage area, wherein the program storage area can store instructions for implementing an operating system, instructions for at least one function (such as a touch function, a sound playing function, an image playing function, etc.), instructions for implementing the above-mentioned various method embodiments, etc.; the data storage area can store data involved in the above-mentioned various method embodiments, etc. The memory 605 can also be at least one storage device located away from the aforementioned processor 601. As shown, the memory 605 as a computer storage medium can include an operating system, a network communication module, and an application program of a display module.

[0104] In Figure 6The display 603 is mainly configured to provide an interface for the user to input, and acquire the data input by the user. The processor 601 can be configured to invoke an application stored in the storage 605, and when executed by the one or more processors 601, the depth compensation device performs the method of one or more of the above embodiments.

[0105] It should be noted that, for the foregoing method embodiments, for the sake of simple description, they are all described as a series of action combinations, but those skilled in the art should know that the present application is not limited to the order of the actions described, because according to the present application, some steps can be performed in other order or at the same time. Secondly, those skilled in the art should know that the embodiments described in the specification all belong to preferred embodiments, and the actions and modules involved are not necessarily required by the present application.

[0106] In the above embodiments, the description of each embodiment has its own focus, and the parts not described in detail in a certain embodiment can be referred to the related description of other embodiments.

[0107] In several embodiments provided in the present application, it should be understood that the disclosed apparatus can be implemented in other ways. For example, the apparatus embodiments described above are merely schematic, and the division of units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another system, or some features can be omitted or not executed. In addition, the coupling or direct coupling or communication connection between the units or components shown or discussed can be indirect coupling or communication connection through some service interface, apparatus or unit, and can be electrical or other forms.

[0108] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, that is, they can be located in one place, or can be distributed on a plurality of network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the embodiment.

[0109] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0110] The integrated unit, if implemented in the form of a software function unit and sold or used as an independent product, can be stored in a computer readable memory 605. Based on such understanding, the technical solutions of the present application essentially or the part that contributes to the prior art or the whole or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a memory 605, including a plurality of instructions for causing a computer device (which can be a personal computer, a server or a network device, etc.) to execute all or part of the steps of the embodiments of the present application. The aforementioned memory 605 includes: a U disk, a mobile hard disk, a magnetic or optical disk, and various media that can store program codes.

[0111] The above are only exemplary embodiments of the present disclosure, and cannot limit the scope of the present disclosure. That is, any equivalent changes and modifications made in accordance with the teachings of the present disclosure are still within the scope of the present disclosure. Other embodiments of the present disclosure will be readily apparent to those skilled in the art upon considering the specification and practicing the true principles of the present disclosure. The present application is intended to cover any variations, uses or adaptive changes of the present disclosure that follow the general principles of the present disclosure and include common knowledge or conventional technical means in the technical field not disclosed by the present disclosure. The specification and examples are only considered as exemplary, and the scope and spirit of the present disclosure are defined by the claims.

Claims

1. A depth of field compensation method for a flexible substrate stage, the method comprising: The depth-of-field compensation method comprises: Obtaining a depth-of-field coordinate of the carrier; the depth-of-field coordinate comprises a three-dimensional coordinate of a depth-of-field point, and the three-dimensional coordinate comprises an X-axis coordinate of a scanning direction of the line scanning camera on the carrier, a Y-axis coordinate of a moving direction of the line scanning camera on the carrier, and a Z-axis coordinate of the depth-of-field point in a depth-of-field direction of the carrier relative to a plane of the carrier; Obtaining a coordinate of a flexible substrate to be detected on the carrier; Planning a depth-of-field compensation path for the flexible substrate according to the coordinate of the flexible substrate to be detected; any passing point in the depth-of-field compensation path corresponds to a depth-of-field coordinate of a depth-of-field point; Before obtaining the depth-of-field coordinate of the carrier, the depth-of-field compensation method further comprises: obtaining a measurement point coordinate of the carrier; the carrier comprises a plurality of rows and a plurality of columns of measurement points, and the measurement point coordinate comprises a three-dimensional coordinate of the measurement point; in the Y-axis direction, the carrier is divided into a plurality of regions; the Y-axis width of a region is the scanning width of the line scanning camera in the Y-axis direction; obtaining a depth-of-field coordinate of the region; the depth-of-field coordinate of the region comprises a plurality of groups of depth-of-field coordinates in the X-axis direction, one group of depth-of-field coordinates corresponds to one X-axis coordinate, and any group of depth-of-field coordinates is the average value of the Z-axis coordinates of a plurality of measurement points in the corresponding X-axis coordinate, so as to subsequently construct the depth-of-field coordinate of the carrier through the depth-of-field coordinates of the plurality of regions; The depth-of-field coordinate of the region comprises a plurality of groups of depth-of-field coordinates in the X-axis direction, and specifically comprises: obtaining a plurality of groups of measurement point coordinates in a third region; the plurality of regions comprise the third region, and each group of measurement point coordinates comprises a plurality of measurement point coordinates; obtaining a plurality of groups of depth-of-field coordinates of the third region according to the plurality of groups of measurement point coordinates of the third region; the plurality of groups of depth-of-field coordinates comprise a first group of depth-of-field coordinates; if the first group of depth-of-field coordinates is not within a preset first coordinate range, the remaining depth-of-field coordinates of the third region except the first group of depth-of-field coordinates are taken as the depth-of-field coordinates of the third region; wherein the preset first coordinate range is determined by the flatness of the flexible substrate carrier.

2. The depth of field compensation method of claim 1, wherein, After setting an overlap area in any two adjacent regions in the plurality of regions, the any two adjacent regions comprise a first region and a second region, and the overlap area is set on the adjacent edge of the first region and the second region; The depth-of-field compensation method further comprises: Obtaining a depth-of-field coordinate of the first region according to the first region except the overlap area; Obtaining a depth-of-field coordinate of the second region according to the second region except the overlap area.

3. The depth of field compensation method of claim 1, wherein, After setting an overlap area in any two adjacent regions in the plurality of regions, the any two adjacent regions comprise a first region and a second region, and the overlap area is set on the adjacent edge of the first region and the second region; The depth-of-field compensation method further comprises: Obtaining a depth-of-field coordinate of the first region according to the first region; Obtaining a depth-of-field coordinate of the second region according to the second region.

4. The depth of field compensation method of any of claims 1-3, wherein, Any group of depth-of-field coordinates is the average value of the Z-axis coordinates of a plurality of measurement points in the corresponding X-axis coordinate, and specifically comprises: Obtaining a second group of measurement point coordinates in a fourth region; the plurality of regions comprise the fourth region, the fourth region comprises a plurality of groups of measurement point coordinates, and the plurality of groups of measurement point coordinates comprise the second group of measurement point coordinates; the second group of measurement point coordinates comprise a plurality of measurement point coordinates; Sort the Z-axis coordinates of the plurality of measurement points in the second group of measurement points from small to large; Calculate the average value of the Z-axis coordinates of the middle section of the second group of measurement points to obtain the second group of depth of field coordinates.

5. The depth of field compensation method of any of claims 1-3, wherein, Any one group of depth of field coordinates is the average value of the Z-axis coordinates of the plurality of measurement points in the corresponding X-axis coordinate, specifically including: Obtain the third group of measurement point coordinates in the fifth region, the plurality of regions including the fifth region, the fifth region including a plurality of measurement point coordinates, the plurality of measurement point coordinates including the third group of measurement point coordinates, the third group of measurement point coordinates including a plurality of measurement point coordinates; If the third group of measurement point coordinates exists outside the preset second coordinate range, the Z-axis coordinates of the remaining measurement points in the third group of measurement point coordinates are calculated to obtain the third group of depth of field coordinates, and the preset second coordinate range is smaller than the preset first coordinate range.

6. The depth of field compensation method of any of claims 1-3, wherein, The scanning width of the line scan camera in the Y-axis direction is the middle section of the field of view of the line scan camera in the Y-axis direction, and the scanning width of the line scan camera in the Y-axis direction=a*the field of view of the line scan camera in the Y-axis direction, a is a coefficient.

7. The depth of field compensation method of any of claims 1-3, wherein, The method comprises the following steps: According to the coordinates of the flexible substrate to be detected, the corresponding region of the flexible substrate to be detected is determined; In the corresponding region of the flexible substrate to be detected, the line scan camera scans adjacent two regions in an "S-shaped" connection mode to form the depth of field compensation path of the flexible substrate; wherein the "S-shaped" connection mode is that the line scan camera scans one region and then moves to the adjacent region in the Y-axis direction for scanning.

8. A depth-of-field compensation device for a flexible substrate stage, characterized in that, The depth of field compensation device includes a processor, a memory, a user interface and a network interface, the memory is used to store instructions, the user interface and the network interface are used to communicate with other devices, and the processor is used to execute the instructions stored in the memory to make the depth of field compensation device execute the depth of field compensation method of the flexible substrate stage as claimed in any one of claims 1-7.

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