Substrate processing apparatus

Abstract

The present invention relates to a substrate processing apparatus capable of discharging liquefied liquid, comprising: a reaction tube part having a reaction space formed therein for processing a plurality of substrates and having an open lower part; a carrier part which is formed inside the reaction tube part and on which the plurality of substrates are stacked in the vertical direction; a carrier support part for supporting the carrier part and raising and lowering the carrier part so that the carrier part is positioned in the reaction space of the reaction tube part; the carrier support part is formed in such a manner that at least a part of any one surface of the carrier support part has an inclined part so that the liquid liquefied in the reaction space is discharged downward.

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus, and more specifically, to a substrate processing apparatus for improving emission performance. Background Technology

[0002] A substrate processing apparatus is used to process substrates such as wafers. It raises a crystal boat in a loading area to load a predetermined number of substrates in order to perform substrate processing, or lowers a crystal boat to the loading area to unload substrates that have undergone substrate processing.

[0003] More specifically, the substrate processing apparatus includes: a processing section that forms a reaction space that contains the substrate and is isolated from the outside; a gas supply section that supplies process gases such as raw material gases, reaction gases, and carrier gases into the internal space of the processing section to regulate the pressure inside the processing section; and an exhaust section that discharges the supplied process gases to regulate the pressure inside the processing section.

[0004] On the other hand, during the substrate processing process of the aforementioned substrate processing apparatus, residues on the surface of the substrate or film can reduce yield, thus requiring the development of a method for removing residues from the surface of the substrate or film.

[0005] As a method for removing residues from the surface of such substrates or films, a method is being applied to remove residues and process the substrate by rapidly changing the temperature and pressure in the reaction space inside the processing unit. This conventional substrate processing apparatus has a vertical length, and because a heat-insulating barrel or heat-insulating plate is arranged at the bottom of the crystal boat to insulate the loading area and the reaction space in order to keep the temperature at the lower end relatively low, as the crystal boat rises, the temperature on the flange side of the cover that seals the reaction space drops sharply, thereby causing a problem of partial liquefaction of the process gas.

[0006] In particular, existing substrate processing equipment uses water vapor (H2O) during the process. Due to the low temperature on the lower end cover flange side, water liquefies on the cover flange and accumulates. The water generated at this time can cause corrosion of the internal structure or flow into the drainage tank, resulting in damage to the drainage tank. Summary of the Invention

[0007] The problem to be solved

[0008] This invention addresses various problems, including those described above, and aims to provide a substrate processing apparatus that, through structural improvements, prevents condensation inside the reaction space and the inside of the cover flange, effectively handles condensed liquids, and prevents corrosion of the internal structure. However, this problem is exemplary and should not be construed as limiting the scope of the invention.

[0009] Problem-solving methods

[0010] A substrate processing apparatus according to the present invention for solving the above-mentioned problems includes: a reaction tube section having a reaction space for processing a plurality of substrates formed therein and an open lower part; a carrier section having a carrier section formed inside the reaction tube section and having the plurality of substrates stacked in a vertical direction; and a carrier support section supporting the carrier section and raising and lowering the carrier section so that the carrier section is located in the reaction space of the reaction tube section; wherein the carrier support section is configured such that at least a portion of any side of the carrier support section may have an inclined portion so that liquid liquefied in the reaction space is discharged downward.

[0011] According to one embodiment of the present invention, the boat support portion may include: a heat-insulating cover formed in the lower part of the boat portion and forming a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support portion in the reaction space; a rotating flange disposed in the lower part of the heat-insulating cover and connected to a drive portion formed on the lower side of the boat support portion, rotating by the power of the drive portion and transmitting the rotational power of the drive portion to the heat-insulating cover and the boat portion; a cover flange formed below the rotating flange, engaging the drive portion at its center and supporting the entire boat support portion for lifting and lowering drive; and a sealing plate engaged on the upper part of the cover flange to protect the upper surface of the cover flange from corrosive gases.

[0012] According to one embodiment of the present invention, the boat support includes a heat-insulating cover formed in the lower part of the boat and forming a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support in the reaction space; wherein the heat-insulating cover may be formed to gradually decrease from the center of the lower part of the heat-insulating cover to the edge.

[0013] According to one embodiment of the present invention, the boat support includes a heat-insulating cover formed in the lower part of the boat and forming a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support in the reaction space; wherein the heat-insulating cover may form the inclined portion, the inclined portion being formed by at least a portion of the lower part of the heat-insulating cover having a first inclination.

[0014] According to one embodiment of the present invention, the boat support includes a rotating flange connected to a drive portion formed on the lower side of the boat support, rotating under the power of the drive portion and transmitting the rotational power of the drive portion to the boat support. The rotating flange may include: an upper flange portion gradually decreasing in height from the center of the upper surface to the edge; a plurality of through portions radially and equally spaced from the center of the rotating flange through the upper and lower portions; and a side discharge portion extending from the inner side of the rotating flange through the sidewall portion of the flange, formed at a position corresponding to the upper flange portion, wherein the sidewall portion surrounds the outer contour of the rotating flange and is higher than the upper flange portion.

[0015] According to one embodiment of the present invention, the boat support includes a rotating flange connected to a drive unit formed on the lower side of the boat support, rotating by electricity from the drive unit and transmitting the rotational power of the drive unit to the boat support; wherein the rotating flange may form the inclined portion, the inclined portion being formed by at least a portion of the upper surface of the rotating flange having a second inclination.

[0016] According to one embodiment of the present invention, the boat support includes a sealing plate, which is coupled to the upper surface of the cover flange to protect the upper surface of the cover flange, which supports and drives the boat support, from corrosive gases. The sealing plate includes: a sealing upper portion having at least a portion of the inclined portion on its upper surface; and a sealing through portion formed at a predetermined distance from the center of the sealing plate and extending through it.

[0017] According to one embodiment of the present invention, the sealing through portion may be formed as a hole or a slit. The hole is a hole shape formed with the center of the sealing plate as a reference and radially through the upper and lower portions at equal intervals. The slit is a through portion formed as a slit.

[0018] According to one embodiment of the present invention, the sealing upper part may be formed by gradually lowering from the center of the sealing upper part to the sealing through part, and by gradually lowering from the edge of the sealing upper part to the sealing through part.

[0019] According to one embodiment of the present invention, the sealing plate may form the inclined portion, wherein at least a portion of the sealing surface of the sealing plate has a third inclination and another portion has at least a fourth inclination.

[0020] According to one embodiment of the present invention, the boat support includes a cover flange, which is a drive portion formed at the center of the lower side of the boat support and supports and drives the boat support to move up and down. The cover flange may include: a sealing mounting portion, on which the sealing plate is mounted; a drive connecting portion, which extends vertically through the center of the cover flange to engage the drive portion; a discharge guide groove portion, which is a ring-shaped groove formed with the center of the cover flange as the center point and a radius of a predetermined distance; and a lower discharge portion, which extends vertically through at least one point of the discharge guide groove portion through the cover flange.

[0021] The effects of the invention

[0022] According to a portion of the embodiments of the present invention configured as described above, the following effects are achieved: forming an inclined portion for downward flow of liquid in at least a portion prevents corrosion of the internal structure due to the generated liquid, and directing the liquefied liquid to the washer prevents damage to the drain tank during the cleaning process. Of course, this effect should not limit the scope of the invention. Attached Figure Description

[0023] Figure 1 This is a cross-sectional view showing a substrate processing apparatus according to an embodiment of the present invention.

[0024] Figure 2 This is a cross-sectional view showing the carrier support portion of a substrate processing apparatus according to an embodiment of the present invention.

[0025] Figure 3 This is an exploded perspective view showing the components of the carrier support portion of a substrate processing apparatus according to an embodiment of the present invention.

[0026] Figure 4 It is shown Figure 3 Detailed sectional view of the components of the support section of the boat.

[0027] Figure 5 This is a perspective view showing the heat-insulating cover of the boat support portion according to an embodiment of the present invention.

[0028] Figure 6 This is a cross-sectional view showing the heat-insulating cover of the boat support portion according to an embodiment of the present invention.

[0029] Figure 7 This is a perspective view showing the rotating flange of a boat support portion according to an embodiment of the present invention.

[0030] Figure 8 It is shown that Figure 7 A cross-sectional view of the section cut along the BB' direction.

[0031] Figure 9 It is shown that Figure 7 A cross-sectional view of a section cut along the CC' direction.

[0032] Figure 10 This is a perspective view showing the sealing plate of the boat support portion according to an embodiment of the present invention.

[0033] Figure 11 This is a cross-sectional view showing the sealing plate of the boat support portion according to an embodiment of the present invention.

[0034] Figure 12 This is a perspective view showing the cover flange of the boat support portion according to an embodiment of the present invention.

[0035] Figure 13 This is a cross-sectional view showing the cover flange of the boat support portion according to an embodiment of the present invention.

[0036] Figure 14 This is a diagram showing the discharge of liquid from a boat support section according to an embodiment of the present invention.

[0037] (Explanation of reference numerals in the attached diagram)

[0038] T1: First inclination T2: Second inclination

[0039] T3: Third Inclination T4: Fourth Inclination

[0040] W: Liquid 100: Reaction tube section

[0041] 200: Boat-carrying section; 300: Boat-carrying support section

[0042] 310: Insulation cover; 311: Lower part of the insulation cover

[0043] 320: Rotary flange; 321: Upper surface of flange

[0044] 322: Flange sidewall portion; 323: Multiple through portions

[0045] 324: Side exhaust section; 325: Drive shaft connection section

[0046] 330: Sealing plate; 331: Sealing upper surface

[0047] 332: Sealing the lower part; 333: Sealing the center part

[0048] 334: Sealing through section; 340: Cover flange

[0049] 341: Sealed mounting part; 342: Drive joint part

[0050] 343: Discharge guide groove 344: Lower discharge section

[0051] 345: Discharge port; 350: Cover frame

[0052] 360: Boat-carrying flange; 370: Drive unit

[0053] 1000: Substrate processing apparatus Detailed Implementation

[0054] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0055] The embodiments of the present invention are provided to more fully illustrate the invention to those skilled in the art. Various modifications can be made to the following embodiments, and the scope of the invention is not limited to these embodiments. Rather, these embodiments are provided to make the invention more comprehensive and complete, and to fully convey the spirit of the invention to those skilled in the art. Furthermore, for ease of explanation and clarity, the thickness or size of each layer is exaggerated in the accompanying drawings.

[0056] Hereinafter, embodiments of the invention will be described with reference to the accompanying drawings, which schematically illustrate ideal embodiments of the invention. In the drawings, deformations of the illustrated shapes can be predicted, for example, based on manufacturing techniques and / or tolerances. Therefore, embodiments derived from the spirit of the invention should not be interpreted as limited to the specific shape in the area shown in the invention, but should include, for example, shape variations caused during the manufacturing process.

[0057] Figure 1 This is a cross-sectional view showing a substrate processing apparatus 1000 according to an embodiment of the present invention; Figure 2 This is a cross-sectional view showing the boat support 300 of a substrate processing apparatus 1000 according to an embodiment of the present invention. Figure 3 This is an exploded perspective view of the components of the boat support section 300; Figure 4 This is a cross-sectional view showing the components of the boat support section 300.

[0058] First, such as Figure 1 As shown, a substrate processing apparatus 1000 according to a portion of the present invention may generally include a reaction tube section 100, a carrier section 200, and a carrier support section 300.

[0059] like Figure 1 As shown, the reaction tube section 100 may have a structure in which a reaction space A for processing multiple substrates is formed inside and the lower part is open. For example, the reaction tube section 100 may have an internal accommodating space that can accommodate multiple substrates or a carrier section 200 for placing substrates, and may have a gas supply device or an exhaust device, etc., to supply or discharge process gases or cleaning gases to such accommodating space.

[0060] Accordingly, the containing space can be the reaction space A.

[0061] Here, the multiple substrates or substrates that are the substrates to be processed may include semiconductor substrates, substrates used in display devices such as LEDs or LCDs, solar cell substrates, glass substrates, etc. In addition, various other types of substrates can also be used.

[0062] The reaction tube section 100 may be a furnace or a tube-shaped structure including a furnace, which may have a channel formed in the lower part for loading and unloading multiple substrates.

[0063] The reaction tube section 100 is equipped with a heater, and at least a portion of it may be made of a heat-resistant material such as quartz, metal, or ceramic, thereby maintaining the high-temperature environment generated by the heater. Preferably, the reaction tube section 100 may be formed of quartz.

[0064] The reaction tube section 100 is designed to form two layers due to the characteristics of the pressurized process.

[0065] like Figure 1 As shown, the carrier section 200 can be a structure formed inside the reaction tube section 100 and in which multiple substrates are stacked in a vertical direction.

[0066] For example, the carrier section 200 is such that, before entering the interior of the reaction tube section 100, multiple substrates are respectively loaded into multiple placement sections formed in the carrier section 200, and multiple substrates can be placed in a stacked shape.

[0067] The boat-carrying section 200 can be a structure formed of quartz.

[0068] According to a partial embodiment of the present invention, a temperature sensor may be formed on the side of the carrier portion 200. The temperature sensor measures the temperature of the reaction space A and can uniformly control the temperature of the reaction space A. For example, the temperature sensor may be a Pro-type thermocouple (T / C).

[0069] The boat support 300 can be a structure that supports the boat 200 and raises and lowers the boat 200 so that the boat 200 is located in the reaction space A of the reaction tube 100.

[0070] Specifically, before the carrier section 200 enters the interior of the reaction tube section 100, multiple substrates are placed in the carrier section 200. In order to process the multiple substrates placed in the carrier section 200, the carrier section 200 can be raised or lowered to be located inside the reaction tube section 100.

[0071] In addition, after processing multiple substrates in the reaction space A of the reaction tube section 100, the carrier section 200 can be lowered below the reaction tube section 100 to transport multiple substrates out from the carrier section 200.

[0072] At this time, the boat support 300 is positioned below the reaction tube 100 as the boat 200 rises into the reaction space A, thereby sealing the lower part of the reaction tube 100. That is, the boat support 300 can act as a cover for the reaction tube 100.

[0073] The substrate processing apparatus of the present invention is applicable to substrate processing processes that utilize process gases such as H2, NH3, O2, H2O, and F. More specifically, H2O can be utilized in the substrate processing process.

[0074] At this time, in order to prevent water accumulation due to liquefaction inside the boat support 300, which would reduce the exhaust performance, the boat support 300 can be configured to discharge liquids such as condensation.

[0075] For example, the boat support 300 may be formed by having an inclined portion on at least a part of any side of the boat support 300 so that the liquid liquefied in the reaction space A is discharged downward.

[0076] Specifically, such as Figures 2 to 4 As shown, the boat support 300 may include: an insulation cover 310, a rotating flange 320, a sealing plate 330, and a cover flange 340.

[0077] Figure 5 This is a perspective view showing the heat-insulating cover 310 of the boat support 300 according to an embodiment of the present invention; Figure 6 This is a cross-sectional view showing the heat insulation cover 310.

[0078] like Figure 5 and Figure 6 As shown, the heat-insulating cover 310 is formed on the lower part of the carrier portion 200 and can be formed into a tank shape that forms an internal heat-insulating area 312.

[0079] The heat insulation zone 312 can be formed of heat insulation material, which can block heat movement in the upper and lower parts of the heat insulation cover 310, and can be formed as an air layer to prevent convection by using only air to form a space.

[0080] A boat-carrying part 200 may be provided on the upper part of the heat insulation cover 310. When the boat-carrying support part 300 rises and the boat-carrying part 200 enters the reaction tube part 100, at least a portion of the upper part of the heat insulation cover 310 may be located inside the reaction tube part 100.

[0081] That is, in order to process the substrate in the reaction space A inside the reaction tube section 100, a high-temperature environment is required. At this time, the heat-insulating cover 310 in the shape of a can inside the reaction tube section 100 can prevent heat loss in the lower part of the reaction space A near the outer side of the carrier support section 300.

[0082] At the lower part of the insulation cover 310, i.e., the lower part 311 of the insulation cover, liquid formed by the vaporization and rising of H2O in the lower region of the carrier support 300 can condense. At this time, in order to discharge the liquid condensed at the lower part 311 of the insulation cover, the inclined part for the downward flow of liquid can be formed at the lower part 311 of the insulation cover.

[0083] Specifically, the insulation cover 310 may have at least a portion of the lower part 311 of the insulation cover 310 having the inclined portion formed by the first inclination T1.

[0084] For example, such as Figure 6 As shown, the heat insulation cover 310 can be formed such that it gradually decreases from the center of the lower part 311 of the heat insulation cover to the edge. Accordingly, the liquid that vaporizes and condenses in the lower part 311 of the heat insulation cover in the support part 300 flows along the first inclination T1 of the lower part 311 of the heat insulation cover towards the edge, and can then fall downwards.

[0085] The insulation cover 310 can be made of quartz.

[0086] Figure 7 This is a perspective view showing the rotating flange 320 of the boat support 300 according to an embodiment of the present invention; Figure 8 It is shown that Figure 7 A cross-sectional view of the section cut along the BB' direction; Figure 9 It is shown that Figure 7 A cross-sectional view of a section cut along the CC' direction.

[0087] like Figures 2 to 4 As shown, the rotating flange 320 can be located at the lower part of the heat insulation cover 310.

[0088] The rotating flange 320 is connected to the drive unit 370 formed on the lower side of the carrier support 300 and can be rotated by the power of the drive unit 370.

[0089] That is, the rotating flange 320 can be rotated by the rotational power of the drive unit 370. As the rotating flange 320 rotates, the rotational power of the drive unit 370 is transmitted to the heat insulation cover 310 and the carrier part 200, thereby rotating the heat insulation cover 310 on the upper part of the rotating flange 320.

[0090] like Figure 8 As shown, the rotating flange 320 can form at least a portion of the upper surface 321 of the flange with the inclined portion formed by the second inclination T2, so that the liquefied H2O can flow downward.

[0091] More specifically, the rotating flange 320 may include: an upper flange portion 321, a flange sidewall portion 322, a plurality of through portions 323, and a side discharge portion 324.

[0092] like Figure 7 and Figure 8 As shown, the upper surface 321 of the flange can be the upper surface of the main body of the circular rotary flange 320, excluding the multiple through portions 323.

[0093] The upper part 321 of the flange can be formed to gradually decrease from the center of the upper part of the rotating flange 320 to the edge. Accordingly, liquid falling from the heat preservation cover 310 can flow from the upper part 321 of the flange along the second inclination T2 to the edge of the upper part 321 of the flange.

[0094] like Figure 7 and Figure 8 As shown, the flange sidewall portion 322 may be formed to surround the outer contour of the rotating flange 320 and be higher than the flange upper portion 321. Specifically, the flange upper portion 321 may be formed along the second inclination T2 and the edge portion of the flange upper portion 321 may be lower than the center portion, while the flange sidewall portion 322, which is relatively higher than the edge portion of the flange upper portion 321, may be formed in a shape such as a wall.

[0095] like Figure 7 and Figure 9 As shown, the plurality of through portions 323 can be openings formed by penetrating the upper and lower parts of the rotating flange 320. Accordingly, liquid falling from the heat-insulating cover 310 can pass through the rotating flange 320 via the plurality of through portions 323.

[0096] Multiple through-sections 323 may be formed radially and equally spaced with respect to the center of the rotating flange 320. That is, multiple through-sections 323 are formed radially and equally spaced on the rotating flange 320, which is formed into a circular plate shape, and the whole is formed into a shape similar to a bicycle or car wheel, so that stable airflow can be maintained inside the boat support 300.

[0097] The upper portion 321 of the flange surrounding the multiple through portions 323 may be chamfered and inclined in the direction inward of the multiple through portions 323. Accordingly, liquid falling from the heat insulation cover 310 may flow to the edge of the upper portion 321 of the flange or to the multiple through portions 323.

[0098] like Figure 7 and Figure 8 As shown, the side discharge portion 324 may be formed by extending from the inner side portion to the outer side portion of the flange sidewall portion 322.

[0099] The side discharge portion 324 may be formed at a position corresponding to the upper portion 321 of the flange.

[0100] Accordingly, Figure 8As shown, the liquid flowing towards the edge along the second inclined T2 of the upper surface 321 of the flange is discharged to the outer side of the rotating flange 320 through the side discharge portion 324, thereby preventing the liquid from accumulating inside the side wall portion 322 of the flange.

[0101] The side discharge portion 324 can be formed into various shapes such as holes or slits that pass through the flange sidewall portion 322.

[0102] According to a partial embodiment of the present invention, the rotating flange 320 may have a drive shaft coupling portion 325 formed at its center.

[0103] The drive shaft coupling portion 325 may be formed as a through hole extending through the upper and lower portions of the center portion of the rotating flange 320, and may be connected to the drive shaft of the drive portion 370 coupled to the lower portion of the carrier support portion 300. Accordingly, the rotating flange 320 may be rotated as the drive portion 370 is driven.

[0104] Figure 10 This is a perspective view showing the sealing plate 330 of the boat support 300 according to an embodiment of the present invention; Figure 11 This is a cross-sectional view showing the sealing plate 330.

[0105] like Figures 2 to 4 As shown, the sealing plate 330 can be attached to the top of the cover flange 340 to protect the upper surface of the cover flange 340 from corrosive gases.

[0106] Specifically, the sealing plate 330 is formed of quartz and covers the top of the cover flange 340 formed of bonding metal, thereby protecting the cover flange 340 from the process gas flowing inside the carrier support 300.

[0107] Specifically, the sealing plate 330 may include: a sealing upper part 331, a sealing lower part 332, and a sealing through part 334.

[0108] like Figure 10 and Figure 11 As shown, at least a portion of the upper sealing portion 331 has the inclined portion on the upper surface of the sealing plate 330, thereby collecting liquid falling from above for downward discharge, and the lower sealing portion 332 on the lower surface of the sealing plate 330 can be coupled to the cover flange 340.

[0109] The sealing upper part 331 may form at least a portion of the inclined portion having a third inclination T3 and at least another portion having a fourth inclination T4.

[0110] For example, such as Figure 10 and Figure 11As shown, the sealing upper part 331 is formed to gradually decrease from the center of the sealing upper part 331 to the sealing through part 334, and may be formed to gradually decrease from the edge of the sealing upper part 331 to the sealing through part 334.

[0111] Accordingly, liquid that falls directly from the heat insulation cover 310 through the multiple through-holes 323 of the rotating flange 320 or from the multiple through-holes 323 and the side discharge portion 324 of the rotating flange 320 can flow from the edge or center of the sealing upper part 331 to the sealing through-hole 334.

[0112] like Figure 10 and Figure 11 As shown, the sealing through portion 334 is formed at a point spaced a predetermined distance from the center of the sealing plate 330, and can extend from the upper sealing portion 331 to the lower sealing portion 332.

[0113] The sealing through portion 334 can be formed as a hole or a slit. The hole is formed by radially penetrating the upper and lower parts at equal intervals with the center of the sealing plate 330 as a reference. The slit is formed by penetrating into a slit shape.

[0114] According to a portion of the embodiments of the present invention, the sealing plate 330 may include a sealing center portion 333.

[0115] The sealing center portion 333 can be formed as a through hole that passes through the upper and lower portions of the center portion of the sealing plate 330, allowing a portion of the drive portion 370 to pass through, so that the drive portion 370 attached to the lower portion of the carrier support portion 300 is connected to the upper rotating flange 320.

[0116] Figure 12 This is a perspective view showing the cover flange 340 of the boat support portion 300 according to an embodiment of the present invention; Figure 13 This is a cross-sectional view showing the cover flange 340.

[0117] like Figures 2 to 4 As shown, the cover flange 340 is located below the rotating flange 320 and can fully support and drive the lifting and lowering of the boat support 300.

[0118] The cover flange 340 may include: a sealing mounting portion 341, a drive engagement portion 342, a discharge guide groove portion 343, and a lower discharge portion 344.

[0119] like Figure 12 and Figure 13 As shown, the sealing mounting portion 341 may be the area on the top of the cover flange 340 where the sealing plate 330 is mounted.

[0120] For example, the sealing mounting portion 341 is a recessed circular groove formed on the upper surface of the cover flange 340, except for the edge portion, and the sealing plate 330 can be installed in the circular groove.

[0121] The discharge guide groove 343 can be formed as a ring-shaped groove with the center of the cover flange 340 as the center point and a predetermined distance as the radius.

[0122] like Figure 4 As shown, a discharge guide groove 343 is formed in the sealing mounting portion 341, and an annular groove can be formed at a position corresponding to the sealing through portion 334 of the sealing plate 330. Accordingly, liquid discharged through the sealing through portion 334 can only flow into the discharge guide groove 343 of the cover flange 340.

[0123] The discharge guide groove 343 is designed to form an inclined portion in the direction of the lower discharge portion 344. Accordingly, liquid discharged through the sealing through portion 334 can flow to the lower discharge portion 344.

[0124] The lower discharge portion 344 may be formed by extending the cover flange 340 through at least one point of the discharge guide groove portion 343.

[0125] Liquid flowing towards the discharge guide groove 343 can be discharged to the outside of the cover flange 340 through the lower discharge portion 344. At this time, the lower discharge portion 344 is connected to the discharge port 345 formed on the outside of the cover flange 340, which allows for easy discharge of liquid.

[0126] like Figure 2 As shown, a drive engagement portion 342 for engaging the drive portion 370 can be formed at the center of the cover flange 340. Specifically, the drive engagement portion 342 is formed as a through hole that extends vertically through the center of the cover flange 340, thereby engaging the drive portion 370.

[0127] At this time, the drive unit 370 can be formed as a sealed structure that is sealed inside the carrier support unit 300 so that the reaction space A inside the reaction tube unit 100 can be sealed from the outside.

[0128] Figure 14 This is a diagram showing the discharge of liquid from a boat support 300 according to an embodiment of the present invention.

[0129] like Figure 14 As shown, the liquid formed by the vaporization and rising H2O in the lower region of the boat support 300 can condense on the lower part 311 of the insulation cover 310.

[0130] At this time, the liquid flows from the lower part 311 of the insulation cover 310 along the first inclined T1 to the edge of the lower part 311 of the insulation cover, and then falls downward.

[0131] Liquid falling downwards flows from the upper flange portion 321 of the rotating flange 320 along the second inclination T2 to the edge of the upper flange portion 321, and then falls downwards through the side discharge portion 324 or directly to the sealing plate 330.

[0132] Liquid that falls onto the sealing plate 330 flows downwards along the third inclined section T3 or the fourth inclined section T4, and can then pass through the sealing through section 334.

[0133] Liquid flowing from the sealing plate 330 to the discharge guide groove 343 of the cover flange 340 can be discharged from the discharge guide groove 343 to the lower discharge section 344.

[0134] Then, the liquid discharged from the boat support section 300 can be discharged into the drain tank through the scrubber.

[0135] The carrier support portion 300 of the substrate processing apparatus 1000 according to the present invention may include a heat-insulating cover 310, a rotating flange 320, a sealing plate 330, and a cover flange 340, but is not limited thereto, and may be formed by combining one or more of the above structures. In addition, the inclined portion of the carrier support portion 300 may include at least one of a first inclined T1, a second inclined T2, a third inclined T3, and a fourth inclined T4.

[0136] According to a portion of the embodiments of the present invention, the boat support portion 300 may include a boat flange 360 ​​located in the middle region of the heat insulation cover 310.

[0137] The carrier flange 360 ​​can form a reaction tube placement portion 361. When the carrier support portion 300 rises and is attached below the reaction tube portion 100, the reaction tube placement portion 361 can be placed at the lower part of the reaction tube portion 100. At this time, the carrier flange 360 ​​can be located in the middle region of the insulation cover 310, so that the upper region of the insulation cover 310 can be located in the reaction space of the reaction tube portion 100.

[0138] The boat-mounted flange 360 ​​can be engaged with the cover flange 340 via a cylindrical cover frame 345. That is, the lower region of the heat-insulating cover 310 can be located inside the cover frame 345.

[0139] like Figure 2 As shown, the cover frame 345 is attached to the upper part of the cover flange 340 and can be formed to cover at least a portion of the edge of the sealing plate 330.

[0140] like Figure 2 As shown, according to a portion of the embodiments of the present invention, the boat support 300 may include: a side heating portion H1, a bottom heating portion H2, and a manifold M.

[0141] The side heating element H1 may include a heater formed on the outside of the cover frame 345, and the bottom heating element H2 may include a heater formed on the lower part of the cover flange 340. The side heating element H1 and the bottom heating element H2 increase the temperature inside the carrier support 300, promote the vaporization of H2O and mitigate liquefaction, and prevent heat loss from the lower part of the carrier support 300. Furthermore, they prevent the manifold M formed inside the carrier support 300 from reacting and solidifying to form powder.

[0142] The manifold M is formed inside the cover frame 345 and may include a port for supplying process gas to the reaction space A or for discharging treated gas.

[0143] According to the present invention, the carrier support 300 of the substrate processing apparatus 1000 is formed with an inclined portion for allowing liquid to flow downward in at least a portion, thereby preventing corrosion of the internal structure due to the generated liquid, and allowing the liquefied liquid to flow into the scrubber, thereby preventing damage to the drain tank during the cleaning process.

[0144] The invention has been described with reference to embodiments shown in the accompanying drawings; however, these are merely illustrative, and it will be understood by those skilled in the art that various modifications and equivalent embodiments can be achieved therefrom. Therefore, the true scope of protection of this invention should be defined by the technical concept of the claims.

Claims

1. A substrate processing apparatus, comprising: The reaction tube section forms a reaction space inside that processes multiple substrates and has an open lower part; A carrier section is formed inside the reaction tube section, and the plurality of substrates are stacked in a vertical direction; A boat support unit supports the boat section and raises and lowers the boat section so that the boat section is located in the reaction space of the reaction tube section; The boat support is formed by having at least a portion of an inclined portion on any one side, so that the liquid liquefied in the reaction space is discharged downward.

2. The substrate processing apparatus according to claim 1, characterized in that, The boat support unit includes: A heat-insulating cover is formed in the lower part of the boat-carrying part and forms a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat-carrying support part in the reaction space; A rotating flange is provided at the lower part of the heat preservation cover and is connected to a drive unit formed on the lower side of the boat support part. It rotates by the power of the drive unit and transmits the rotational power of the drive unit to the heat preservation cover and the boat part. A cover flange is formed below the rotating flange, and the drive unit is joined at the center, and the entire boat support unit is supported for lifting and lowering drive. A sealing plate is attached to the upper part of the cover flange to protect the upper surface of the cover flange from corrosive gases.

3. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes an insulated cover. The heat insulation cover is formed at the lower part of the boat-carrying part and forms a heat insulation area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat-carrying support part in the reaction space. The heat-insulating cover is formed such that it gradually decreases from the center of the lower part of the heat-insulating cover to the edge part.

4. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes an insulated cover. The heat insulation cover is formed at the lower part of the boat-carrying part and forms a heat insulation area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat-carrying support part in the reaction space. The heat-insulating cover forms the inclined portion. The inclined portion is formed by at least a portion of the lower part of the heat-insulating cover having a first inclination.

5. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes a rotating flange. The rotating flange is connected to the drive unit formed on the lower side of the boat support, rotates by the power of the drive unit, and transmits the rotational power of the drive unit to the boat. The rotating flange includes: The upper part of the flange gradually decreases from the center of the upper part of the rotating flange to the edge part; Multiple through sections are formed by radially and equally spaced sections passing through the upper and lower parts with the center of the rotating flange as a reference. The side discharge portion extends from the inner side of the rotating flange to the outer side through the flange sidewall portion and is formed at a position corresponding to the upper surface of the flange. The flange sidewall portion surrounds the outer contour of the rotating flange and is higher than the upper surface of the flange.

6. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes a rotating flange. The rotating flange is connected to the drive unit formed on the lower side of the boat support, rotates by electricity from the drive unit, and transmits the rotational power of the drive unit to the boat. The rotating flange forms the inclined portion. The inclined portion is formed by at least a portion of the upper surface of the flange of the rotating flange having a second inclination.

7. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes a sealing plate. The sealing plate is attached to the upper surface of the cover flange to protect the upper surface of the cover flange that supports and lifts the boat support from corrosive gases. The sealing plate includes: The upper sealing surface is formed by having the inclined portion on the upper surface of the sealing plate in at least a portion. The sealing through portion is formed at a point spaced a predetermined distance from the center of the sealing plate and extends through the sealing plate.

8. The substrate processing apparatus according to claim 7, characterized in that, The sealing through portion is formed as a hole or a slit. The hole is a hole shape formed by radially penetrating the upper and lower parts at equal intervals with the center of the sealing plate as a reference. The slit is a through portion formed as a slit shape.

9. The substrate processing apparatus according to claim 7, characterized in that, The sealing upper part is formed by gradually decreasing from the center of the sealing upper part to the sealing through part, and by gradually decreasing from the edge of the sealing upper part to the sealing through part.

10. The substrate processing apparatus according to claim 7, characterized in that, The sealing plate forms the inclined portion. The inclined portion is formed by at least a third inclination and at least a fourth inclination of at least a portion of the sealing surface of the sealing plate.

11. The substrate processing apparatus according to claim 1, characterized in that, The boat support includes a cover flange. The cover flange is the drive part formed at the center on the lower side of the boat support, and supports and drives the boat support to move up and down. The cover flange includes: A sealing mounting part, wherein the sealing plate is mounted on the upper part of the cover flange; A drive engagement portion is formed by extending vertically through the center of the cover flange to engage the drive portion; The discharge guide groove is a ring-shaped groove with the center of the cover flange as the center point and a predetermined distance as the radius; The lower discharge portion is formed by extending vertically through the cover flange at at least one point of the discharge guide groove.

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