Multi-mode driving control multi-stator piezoelectric motor

Abstract

The invention relates to the technical field of precise driving and positioning, in particular to a multi-mode driving control multi-stator piezoelectric motor which comprises a first driving mechanism and a second driving mechanism which are symmetrically arranged in the left-right direction, and the first driving mechanism and the second driving mechanism are fixed to a base through stand columns. Each of the first driving mechanism and the second driving mechanism comprises an adjusting vibrator, a driving vibrator and a driving foot; a working sliding plate arranged in the length direction of the base is arranged beside the base, the upper plate face of the working sliding plate makes contact with driving feet of the first driving mechanism and the second driving mechanism at the same time, and the lower plate face of the working sliding plate is connected with a sliding block mounting plate through a sliding assembly. And the sliding block mounting plate is connected with a pre-tightening mechanism so as to adjust the contact force between the working sliding plate and the driving foot. Adjusting vibrators and driving vibrators of the driving mechanism work alternately in a matched mode, and the structure which is arranged in a bilateral symmetry mode can avoid the rollback phenomenon generated when the piezoelectric motor works.

Description

Technical Field

[0001] This invention relates to the field of precision drive and positioning technology, and specifically to a multi-stator piezoelectric motor with multi-modal drive control. Background Technology

[0002] A piezoelectric motor is a novel type of actuator that converts electrical energy into mechanical energy using the inverse piezoelectric effect of piezoelectric ceramic materials. By utilizing the inverse piezoelectric effect of piezoelectric ceramics, combined with appropriate mechanical structures and special excitation signals, piezoelectric motors can achieve linear micro-displacement and rotational angular displacement. Piezoelectric motors are simple in structure, have excellent output performance, good motion stability, and strong resistance to electromagnetic interference. They are widely used in precision displacement platforms, biomedical engineering, microrobotics, optical measurement, and other fields. Based on their working principle, piezoelectric motors can be classified into standing wave motors, traveling wave motors, inchworm motors, and inertial impact piezoelectric motors.

[0003] Traditional piezoelectric motor signal control is relatively simple, mostly using quasi-static asymmetric signal drive. This quasi-static operating mode fails to fully utilize the excellent performance of piezoelectric ceramics, and the friction and wear between the stator and mover shortens the motor's lifespan. Subsequent research has proposed using waveform synthesis to synthesize asymmetric mechanical signals from resonant sinusoidal signals to drive the motor, greatly enhancing the material properties of piezoelectric ceramics and improving motor output performance. However, the modal coupling of the dual stators increases design difficulty and does not solve the problem of backlash displacement. While asymmetric mechanical structures can be designed to enable resonant motion in piezoelectric motors, this method places excessive demands on structural design. Due to the limitations of its principle—specifically, the different stiffness on both sides of the mechanical structure—displacement differences arise during vibration. Accumulated displacement differences limit the piezoelectric motor to unidirectional motion, and backlash displacement is difficult to avoid during movement. Summary of the Invention

[0004] The purpose of this invention is to overcome the above-mentioned drawbacks and provide a multi-stator piezoelectric motor with multi-modal drive control.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: It includes a first driving mechanism and a second driving mechanism symmetrically arranged in a left-right direction. The first and second driving mechanisms are fixed to a base via columns. Each of the first and second driving mechanisms includes an adjusting vibrator, a driving vibrator, and a driving foot. A working slide plate is provided on the side of the base along the length of the base. The upper surface of the working slide plate contacts the driving feet of both the first and second driving mechanisms. The lower surface of the working slide plate is connected to a slider mounting plate via a sliding assembly. The sliding assembly includes components that interact with the working slide plate. The system includes a slide rail fixed to the plate and a slider fixed to the slider mounting plate, wherein the slide rail and the slider slide together. The slider mounting plate is connected to a pre-tightening mechanism to adjust the contact force between the working slide plate and the drive foot. The pre-tightening mechanism includes a pre-tightening side plate, a pre-tightening bolt, and a pre-tightening spring. The pre-tightening side plate is fixed to the side of the base. The pre-tightening bolt is arranged vertically and passes through the slider mounting plate before being threaded to the pre-tightening side plate. The pre-tightening spring is sleeved on the pre-tightening bolt, with one end of the pre-tightening spring abutting against the bolt head of the pre-tightening bolt and the other end of the pre-tightening spring abutting against the slider mounting plate.

[0006] The base is generally square, and the columns include a first column fixed in the middle of the base and a second column and a third column symmetrically arranged on both sides of the first column. The second column, the first column and the third column are arranged sequentially along the length of the base. The two ends of the adjusting vibrator of the first drive mechanism are respectively fixed on the second column and the first column, and the two ends of the adjusting vibrator of the second drive mechanism are respectively fixed on the first column and the third column.

[0007] The pre-tightening side plate is an inverted L-shaped plate, consisting of a first plate arranged vertically and a second plate arranged horizontally. The first plate abuts against the side of the base and the two are fixed by a first screw. The second plate is located below the working slide plate, and a square notch for avoiding the slider is provided in the middle of the second plate.

[0008] The slider mounting plate is an inverted L-shaped plate, consisting of a vertically arranged third plate and a horizontally arranged fourth plate. The third plate is attached to the surface of the first plate away from the base, and the third plate, the first plate, and the base are fixed by a second screw. The surface of the fourth plate is lower than that of the second plate, and the slider is fixed to the upper surface of the fourth plate.

[0009] The pre-tightening bolt passes through the surface of the fourth plate and is threadedly connected to the second plate. Both the fourth and second plates are provided with threaded holes that mate with the pre-tightening bolt. The third plate is provided with a waist-shaped hole that mates with the second screw.

[0010] The adjustable vibrator is arranged parallel to the base and has an overall square plate structure. The upper and lower plates of the adjustable vibrator are respectively provided with a first groove and a second groove in the middle section. The bottom of the first groove is fixed with a drive vibrator mounting plate, and the bottom of the second groove is attached with a first piezoelectric sheet. The plates on both sides of the first groove are symmetrically provided with a first rhomboid through hole, and a third groove is provided at the first rhomboid through hole. The first groove, the second groove and the third groove are all through grooves opened along the width direction of the adjustable vibrator. The lower plates on both sides of the first groove are stepped surfaces.

[0011] The driving vibrator is a square thin plate structure. One end of the driving vibrator is fixed to the driving vibrator mounting plate, and the other end of the driving vibrator is cantilevered and has a second rhomboid through hole and chamfer. A second piezoelectric sheet is attached to one side of the driving vibrator. The driving foot is a horizontally placed cylinder. The driving foot is fixed to the bottom of the driving vibrator and the side of the driving foot is in contact with the working slide plate.

[0012] The drive oscillator and the drive oscillator mounting plate are plug-in connected. The drive oscillator mounting plate is provided with a slot that mates with the drive oscillator. The drive oscillator is inserted into the slot and fixed by bolts. The drive oscillator mounting plate and the adjusting oscillator are integrally formed.

[0013] The ratio of the first-order resonant frequency to the second-order resonant frequency of the regulating oscillator and the driving oscillator is 1:3.

[0014] The first and second piezoelectric sheets are both made of lead zirconate titanate piezoelectric ceramics; the adjusting oscillator and the driving oscillator are both made of 65Mn steel; and the base, column, sliding assembly, working slide plate, and pre-tightening mechanism are all made of 45# steel.

[0015] The beneficial technical effects of this invention are as follows: 1. The driving mechanism of this invention consists of two main parts: an adjusting oscillator and a driving oscillator. By opening diamond-shaped holes in the two oscillators and changing the thickness of different parts, a ratio of 1:3 between the first-order resonant frequency and the second-order resonant frequency can be achieved. The alternating operation of the adjusting oscillator and the driving oscillator, along with their symmetrical arrangement, can avoid the backlash phenomenon generated by the piezoelectric motor during operation. Simultaneously, the displacement generated by the alternating operation of the two sets of driving oscillators allows the piezoelectric motor to move two steps within one cycle, reducing the backlash displacement opposite to the direction of movement during motion.

[0016] 2. The pre-tightening mechanism of the present invention can adjust the contact force between the working slide and the drive foot, and can adapt to linear motion in different working modes.

[0017] 3. The piezoelectric motor of this invention can operate under various control signals. Under a first-order resonant sinusoidal excitation signal, it can achieve medium-speed motion; under a second-order resonant sinusoidal excitation signal, it can achieve low-speed, high-resolution motion; and by simultaneously inputting a mechanical square wave synthesized from first-order and second-order resonant sinusoidal signals, it can achieve ultra-high-speed motion. By changing the phase difference of the control signal, the above three operating modes can achieve reverse linear motion. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the structure of the present invention. Figure 2 ; Figure 3 This is a schematic diagram of the installation of the base, slider mounting plate and pre-tightening side plate of the present invention; Figure 4 This is a schematic diagram of the structure of the first driving mechanism of the present invention; Figure 5 This is a schematic diagram of the structure of the driving oscillator of the present invention; Figure 6 This is a schematic diagram of the structure of the adjustable oscillator of the present invention; Figure 7 This is a schematic diagram of the slider mounting plate of the present invention; Figure 8 This is a schematic diagram of the pre-tightening side plate of the present invention; Figure 9 This is a schematic diagram of the installation of the base, slider mounting plate and pre-tightening side plate of the present invention; Figure 10 This is an installation diagram of the working slide plate, sliding assembly, slider mounting plate and pre-tightening side plate of the present invention; Figure 11 yes Figure 10 A schematic diagram of the decomposed structure; Figure 12 This is an installation diagram of the base, working slide plate, sliding assembly, slider mounting plate and pre-tightening side plate of the present invention; Figure 13 This is a diagram of the sinusoidal excitation electrical signal of the motor in this invention; Figure 14 This is a diagram of the square wave excitation electrical signal synthesized by the motor of the present invention; Figure 15 This is a schematic diagram illustrating the working principle of the motor's directional motion in this invention.

[0019] The markings in the above figures are as follows: First drive mechanism 1A, Second drive mechanism 1B, Adjusting vibrator 11, First groove 111, Second groove 112, Drive vibrator mounting plate 113, Slot 1131, First diamond-shaped through hole 114, Third groove 115, Drive vibrator 12, Second diamond-shaped through hole 121, Chamfer 122, Drive foot 13, Base 2, First column 21, Second column 22, Third column 23, First screw 24, Second screw 25, Working slide plate 3, Slider mounting plate 4, Third plate 41, Waist-shaped hole 411, Fourth plate 42, Slide rail 5, Slider 6, Pre-tightening mechanism 7, Pre-tightening side plate 71, First plate 711, Second plate 712, Square notch 713, Pre-tightening bolt 72, Pre-tightening spring 73, First piezoelectric piece 8, Second piezoelectric piece 9. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings: like Figure 1 , Figure 2 The multi-stator piezoelectric motor with multi-mode drive control shown includes a first drive mechanism 1A and a second drive mechanism 1B arranged symmetrically in the left-right direction. The first drive mechanism 1A and the second drive mechanism 1B are fixed to the base 2 by columns. The first drive mechanism 1A and the second drive mechanism 1B work alternately, which can reduce the back displacement in the opposite direction of movement during motion.

[0021] Furthermore, such as Figure 4 As shown, both the first drive mechanism 1A and the second drive mechanism 1B include an adjusting oscillator 11, a driving oscillator 12, and a driving foot 13. The specific structure of the first drive mechanism 1A will be described below as an example, and the structure of the second drive mechanism 1B will not be described in detail here.

[0022] Specifically, such as Figure 6 As shown, the adjusting vibrator 11 is set parallel to the base 2 and has a square plate structure. The upper plate and the lower plate of the adjusting vibrator 11 are respectively provided with a first groove 111 and a second groove 112 in the middle section. The bottom of the first groove 111 is fixed with a drive vibrator mounting plate 113, and the bottom of the second groove 112 is attached with a first piezoelectric sheet 8. The plates on both sides of the first groove 111 are symmetrically provided with first rhomboid through holes 114, and a third groove 115 is provided at the first rhomboid through hole 114. The first groove 111, the second groove 112 and the third groove 115 are all through grooves opened along the width direction of the adjusting vibrator 11. The lower plate surfaces of the plates on both sides of the first groove 111 are stepped surfaces.

[0023] Specifically, such as Figure 5As shown, the driving oscillator 12 is a square thin plate structure. One end of the driving oscillator 12 is fixed to the driving oscillator mounting plate 113, and the other end of the driving oscillator 12 is cantilevered and has a second rhomboid through hole 121 and a chamfer 122. A second piezoelectric sheet 9 is attached to one side of the driving oscillator 12. More specifically, the driving oscillator 12 and the driving oscillator mounting plate 113 are plugged into each other. The driving oscillator mounting plate 113 has a slot 1131 that mates with the driving oscillator 12. The driving oscillator 12 is inserted into the slot 1131 and fixed by bolts. The driving oscillator mounting plate 113 and the adjusting oscillator 11 are integrally formed structures.

[0024] Specifically, the drive foot 13 is a horizontally placed cylinder, which is fixed to the bottom of the drive oscillator 12 and the side of the drive foot 13 is in contact with the working slide plate 3.

[0025] In this embodiment, the dimensions of the first rhomboid through hole 114, the first groove 111, the second groove 112, the third groove 115, the second rhomboid through hole 121, the chamfer 122, and the thickness of each part of the driving oscillator 12 and the adjusting oscillator 11 can all be changed. The fundamental purpose of adjusting the dimensions is to make the ratio of the first-order resonant frequency and the second-order resonant frequency of the adjusting oscillator 11 and the driving oscillator 12 both 1:3. When a first-order sine wave signal and a second-order sine wave signal are passed to the piezoelectric sheet, this ratio can synthesize the two sine wave signals into a square wave signal, so that the output performance of the motor can be better.

[0026] Furthermore, such as Figure 3 As shown, the base 2 is generally square. The columns include a first column 21 fixed in the middle of the base 2 and a second column 22 and a third column 23 symmetrically arranged on both sides of the first column 21. The second column 22, the first column 21 and the third column 23 are arranged sequentially along the length of the base 2. The two ends of the adjusting vibrator 11 of the first drive mechanism 1A are fixed on the second column 22 and the first column 21 respectively. The two ends of the adjusting vibrator 11 of the second drive mechanism 1B are fixed on the first column 21 and the third column 23 respectively. That is, the close ends of the first drive mechanism 1A and the second drive mechanism 1B are jointly fixed on the first column 21.

[0027] Furthermore, such as Figure 10 , Figure 11 As shown, a working slide plate 3 is provided on the side of the base 2 along the length of the base 2. The upper surface of the working slide plate 3 is in contact with the driving feet 13 of the first driving mechanism 1A and the second driving mechanism 1B. The lower surface of the working slide plate 3 is connected to the slider mounting plate 4 through a sliding assembly.

[0028] Specifically, the sliding assembly includes a slide rail 5 fixed to the working slide plate 3 and a slider 6 fixed to the slider mounting plate 4. The slide rail 5 and the slider 6 cooperate to slide. Figure 7As shown, the slider mounting plate 4 is an inverted L-shaped plate, consisting of a vertically arranged third plate 41 and a horizontally arranged fourth plate 42. The third plate 41 is attached to the plate surface of the first plate 711 away from the base 2, and the third plate 41, the first plate 711 and the base 2 are fixed by the second screw 25. The plate surface of the fourth plate 42 is lower than the second plate 712, and the slider 6 is fixed on the upper plate surface of the fourth plate 42.

[0029] Furthermore, such as Figure 9 , Figure 12 As shown, the slider mounting plate 4 is connected to the pre-tightening mechanism 7 to adjust the contact force between the working slide plate 3 and the drive foot 13. The pre-tightening mechanism 7 includes a pre-tightening side plate 71, a pre-tightening bolt 72, and a pre-tightening spring 73. The pre-tightening side plate 71 is fixed to the side of the base 2. The pre-tightening bolt 72 is arranged vertically and passes through the slider mounting plate 4, then is threadedly connected to the pre-tightening side plate 71. The pre-tightening spring 73 is sleeved on the pre-tightening bolt 72, with one end of the pre-tightening spring 73 abutting against the bolt head of the pre-tightening bolt 72, and the other end of the pre-tightening spring 73 abutting against the slider mounting plate 4. By rotating the pre-tightening bolt 72 to compress the pre-tightening spring 73, the height of the slider mounting plate 4 is changed, and the height of the working slide plate 3 is adjusted synchronously through the sliding assembly, thereby changing the contact force between the working slide plate 3 and the drive foot 13. After adjustment, the slider mounting plate 4 is locked with the second screw 25 to optimize the motor's motion performance.

[0030] Specifically, such as Figure 8 As shown, the pre-tightening side plate 71 is an inverted L-shaped plate, consisting of a vertically arranged first plate 711 and a horizontally arranged second plate 712. The first plate 711 abuts against the side of the base 2 and the two are fixed by the first screw 24. The second plate 712 is located below the working slide plate 3, and a square notch 713 for avoiding the slider 6 is provided in the middle of the second plate 712. The pre-tightening bolt 72 passes through the surface of the fourth plate 42 and is threadedly connected to the second plate 712. Both the fourth plate 42 and the second plate 712 are provided with threaded holes that mate with the pre-tightening bolt 72. The third plate 41 is provided with an oblong hole 411 that mates with the second screw 25.

[0031] In this embodiment, the first piezoelectric sheet 8 and the second piezoelectric sheet 9 are both made of lead zirconate titanate piezoelectric ceramic; the adjusting oscillator 11 and the driving oscillator 12 are both made of 65Mn steel; and the base 2, column, sliding assembly, working slide plate 3, and pre-tightening mechanism 7 are all made of 45# steel.

[0032] Taking the first drive mechanism 1A as an example, during operation, when a first harmonic excitation signal is supplied to the first piezoelectric element 8 of the adjusting oscillator 11 and the second piezoelectric element 9 of the driving oscillator 12, the first drive mechanism 1A resonates. When the adjusting oscillator 11 vibrates downwards, the driving foot 13 presses against the working slide plate 3. At this time, when the driving oscillator 12 swings unidirectionally, it will cause the working slide plate 3 to generate a displacement difference. Through the alternating operation of the first drive mechanism 1A and the second drive mechanism 1B, the piezoelectric motor can achieve non-retrograde displacement movement within one cycle.

[0033] The working principle of this invention is as follows: The piezoelectric motor of this invention can operate under various control signals. Under a first-order resonant sinusoidal excitation signal, it can achieve medium-speed motion; under a second-order resonant sinusoidal excitation signal, it can achieve low-speed, high-resolution motion; and by simultaneously inputting a composite signal of first-order and second-order resonant sinusoidal signals as the excitation signal, it can achieve ultra-high-speed motion. By changing the phase difference of the control signal, the reverse linear motion of the above three operating modes can be achieved.

[0034] Figure 13 This is the sinusoidal excitation signal for the piezoelectric motor of the present invention. Figure 14 The piezoelectric motor of this invention uses a square wave excitation signal.

[0035] like Figure 15 The diagram shows the working principle of the resonant directional motion of the piezoelectric motor when a sinusoidal excitation signal and a synthesized square wave excitation signal are input.

[0036] Specifically, at times t0 to t1, the driving oscillator of the first driving mechanism 1A remains bent to the left under the action of a negative voltage, and the adjusting oscillator of the first driving mechanism 1A remains bent downward under the action of a voltage U, with the driving oscillator of the first driving mechanism 1A in close contact with the working slide plate 3. The driving oscillator of the second driving mechanism 1B remains bent to the right under the action of a voltage U, and the adjusting oscillator of the second driving mechanism 1B remains bent upward under the action of a voltage -U, with the driving oscillator of the second driving mechanism 1B disengaging from the working slide plate 3.

[0037] At times t1 to t2, the voltage of the driving oscillator of the first driving mechanism 1A changes from -U to U. At this time, the adjusting oscillator of the first driving mechanism 1A remains bent downward under the action of voltage U, and the working slide plate 3 can swing from left to right with the driving oscillator of the first driving mechanism 1A, moving a small displacement X. The voltage of the driving oscillator of the second driving mechanism 1B changes from U to -U. At this time, the adjusting oscillator of the second driving mechanism 1B remains bent upward under the action of voltage -U, and the driving oscillator of the second driving mechanism 1B also swings from right to left under the action of voltage.

[0038] Between times t2 and t3, the driving oscillator of the first driving mechanism 1A continues to bend to the right under the action of voltage U. At this time, the voltage input to the adjusting oscillator of the first driving mechanism 1A changes from U to -U, and the adjusting oscillator B-I also bends upward accordingly, causing the driving oscillator of the first driving mechanism 1A to detach from the working slide plate 3. The driving oscillator of the second driving mechanism 1B continues to bend to the left under the action of voltage -U. The input voltage in the adjusting oscillator of the second driving mechanism 1B also changes from -U to U. At this time, the driving oscillator of the second driving mechanism 1B bends downward along with the adjusting oscillator of the second driving mechanism 1B, and the driving oscillator of the second driving mechanism 1B comes into close contact with the working slide plate 3.

[0039] Between times t3 and t4, the input voltage of the driving oscillator of the first driving mechanism 1A changes from U to -U, causing the driving oscillator of the first driving mechanism 1A to swing to the right. Under the influence of voltage -U, the adjusting oscillator of the first driving mechanism 1A continues to bend upwards, and the driving oscillator of the first driving mechanism 1A detaches from the working slide plate 3. The input voltage of the driving oscillator of the second driving mechanism 1B changes from -U to U, causing the driving oscillator of the second driving mechanism 1B to swing to the right. At this time, under the influence of voltage U, the adjusting oscillator of the second driving mechanism 1B remains bent downwards. The driving oscillator of the second driving mechanism 1B and the working slide plate 3 remain in close contact, and the working slide plate 3 swings with the driving oscillator of the second driving mechanism 1B, moving a displacement X to the right.

[0040] In this embodiment, two sets of driving oscillators are used for alternating driving control. Each driving oscillator can achieve two steps of movement within one cycle, and remains in a clamped state throughout the entire cycle, maintaining motion stability. The driving oscillators can also achieve reverse movement by changing the order of the input control signals.

[0041] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A multi-stator piezoelectric motor with multi-mode drive control, characterized in that: The system includes a first drive mechanism (1A) and a second drive mechanism (1B) arranged symmetrically in the left-right direction. The first drive mechanism (1A) and the second drive mechanism (1B) are fixed to the base (2) by a column. The first drive mechanism (1A) and the second drive mechanism (1B) each include an adjusting vibrator (11), a driving vibrator (12), and a driving foot (13). A working slide plate (3) is provided on the side of the base (2) along the length of the base (2). The upper surface of the working slide plate (3) is in contact with the driving feet (13) of both the first drive mechanism (1A) and the second drive mechanism (1B). The lower surface of the working slide plate (3) is connected to the slider mounting plate (4) through a sliding assembly. The sliding assembly includes a slide rail (5) fixed to the working slide plate (3) and a slider mounting plate. (4) A fixed slider (6), the slide rail (5) and the slider (6) slide together; the slider mounting plate (4) is connected to the pre-tightening mechanism (7) to adjust the contact force between the working slide plate (3) and the driving foot (13). The pre-tightening mechanism (7) includes a pre-tightening side plate (71), a pre-tightening bolt (72) and a pre-tightening spring (73). The pre-tightening side plate (71) is fixed to the side of the base (2). The pre-tightening bolt (72) is arranged in a vertical direction. The pre-tightening bolt (72) passes through the slider mounting plate (4) and is threaded to the pre-tightening side plate (71). The pre-tightening spring (73) is sleeved on the pre-tightening bolt (72), and one end of the pre-tightening spring (73) abuts against the bolt head of the pre-tightening bolt (72). The other end of the pre-tightening spring (73) abuts against the slider mounting plate (4).

2. The multi-stator piezoelectric motor with multi-mode drive control according to claim 1, characterized in that: The base (2) is square in shape. The columns include a first column (21) fixed in the middle of the base (2) and a second column (22) and a third column (23) symmetrically arranged on both sides of the first column (21). The second column (22), the first column (21) and the third column (23) are arranged sequentially along the length of the base (2). The two ends of the adjusting vibrator (11) of the first drive mechanism (1A) are fixed on the second column (22) and the first column (21) respectively. The two ends of the adjusting vibrator (11) of the second drive mechanism (1B) are fixed on the first column (21) and the third column (23) respectively.

3. The multi-stator piezoelectric motor with multi-mode drive control according to claim 1, characterized in that: The pre-tightening side plate (71) is an inverted L-shaped plate, consisting of a first plate (711) arranged vertically and a second plate (712) arranged horizontally. The first plate (711) abuts against the side of the base (2) and the two are fixed by the first screw (24). The second plate (712) is located below the working slide plate (3), and a square notch (713) for avoiding the slider (6) is provided in the middle of the second plate (712).

4. The multi-stator piezoelectric motor with multi-mode drive control according to claim 3, characterized in that: The slider mounting plate (4) is an inverted L-shaped plate, consisting of a vertically arranged third plate (41) and a horizontally arranged fourth plate (42). The third plate (41) is attached to the plate surface of the first plate (711) away from the base (2), and the third plate (41), the first plate (711) and the base (2) are fixed by a second screw (25). The plate surface of the fourth plate (42) is lower than that of the second plate (712), and the slider (6) is fixed on the upper plate surface of the fourth plate (42).

5. The multi-stator piezoelectric motor with multi-mode drive control according to claim 4, characterized in that: The pre-tightening bolt (72) passes through the surface of the fourth plate (42) and is threadedly connected to the second plate (712). Both the fourth plate (42) and the second plate (712) are provided with threaded holes that cooperate with the pre-tightening bolt (72). The third plate (41) is provided with a waist-shaped hole (411) that cooperates with the second screw (25).

6. The multi-stator piezoelectric motor with multi-mode drive control according to claim 1, characterized in that: The adjustable vibrator (11) is set parallel to the base (2) and has a square plate structure. The upper plate and the lower plate of the adjustable vibrator (11) are respectively provided with a first groove (111) and a second groove (112) in the middle section. The bottom of the first groove (111) is fixed with a drive vibrator mounting plate (113), and the bottom of the second groove (112) is attached with a first piezoelectric sheet (8). The plates on both sides of the first groove (111) are symmetrically provided with a first rhomboid through hole (114), and a third groove (115) is provided at the first rhomboid through hole (114). The first groove (111), the second groove (112) and the third groove (115) are all through grooves opened along the width direction of the adjustable vibrator (11). The lower plate surfaces of the plates on both sides of the first groove (111) are stepped surfaces.

7. The multi-stator piezoelectric motor with multi-mode drive control according to claim 6, characterized in that: The driving vibrator (12) is a square thin plate structure. One end of the driving vibrator (12) is fixed to the driving vibrator mounting plate (113). The other end of the driving vibrator (12) is cantilevered and has a second rhomboid through hole (121) and a chamfer (122). A second piezoelectric sheet (9) is pasted on one side of the driving vibrator (12). The driving foot (13) is a horizontally placed cylinder. The driving foot (13) is fixed to the bottom of the driving vibrator (12) and the side of the driving foot (13) is in contact with the working slide plate (3).

8. The multi-stator piezoelectric motor with multi-mode drive control according to claim 6, characterized in that: The drive oscillator (12) and the drive oscillator mounting plate (113) are plug-in connected. The drive oscillator mounting plate (113) is provided with a slot (1131) that cooperates with the drive oscillator (12). The drive oscillator (12) is inserted into the slot (1131) and fixed by bolts. The drive oscillator mounting plate (113) and the adjusting oscillator (11) are integrally formed.

9. The multi-stator piezoelectric motor with multi-mode drive control according to claim 1, characterized in that: The ratio of the first-order resonant frequency to the second-order resonant frequency of the regulating oscillator (11) and the driving oscillator (12) is 1:

3.

10. The multi-stator piezoelectric motor with multi-mode drive control according to claim 7, characterized in that: The first piezoelectric sheet (8) and the second piezoelectric sheet (9) are both made of lead zirconate titanate piezoelectric ceramic; the adjusting oscillator (11) and the driving oscillator (12) are both made of 65Mn steel; the base (2), column, sliding assembly, working slide plate (3), and pre-tightening mechanism (7) are all made of 45# steel.

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