Coating device

Abstract

The purpose of the present invention is to provide a coating device capable of satisfying requirements with a simple adjustment operation. And the precision stone (15) is arranged on the coating support table (10) through the leveling block (16). The precision stone (15) is made by precisely machining stone such as granite. The flatness of the upper surface of the precision stone (15) is 10 [mu] m or less. High flatness of the upper surface of the coating plate (20) can be obtained through a simple adjustment operation of mounting the coating plate (20) on the upper surface of the precision stone (15). The inclination of the precision stone (15) is adjusted by a leveling block (16). Furthermore, an inlet plate (40) and an inlet frame part (35) are assembled on a stone flat plate which is separated from the coating device (1) as a module, and the module is arranged in a manner of being erected on the inlet support table (30) and the coating support table (10). Similarly, the outlet plate (60) and the outlet frame part (55) are assembled as a module, and the module is placed on a slide rail (69).

Description

Technical Field

[0001] This invention relates to a coating apparatus that, while levitating and transporting a substrate, applies a processing liquid such as a photoresist solution to the upper surface of the substrate. Substrates to be processed include, for example, glass substrates for liquid crystal display devices, glass substrates for organic EL displays, glass substrates for PDPs (plasma display panels), or glass substrates for photomasks. Background Technology

[0002] In the manufacturing process of liquid crystal display devices, a coating apparatus is used to supply a processing liquid such as a photoresist solution to the surface of a substrate and to coat the substrate with the processing liquid. For example, Patent Document 1 discloses a coating apparatus that, while transporting the substrate in a floating state, supplies photoresist solution in a strip form from a nozzle and uniformly coats the upper surface of the substrate with the photoresist solution.

[0003] In the coating apparatus described in Patent Document 1, a floating worktable for lifting and transporting a substrate is divided into a plurality of worktable blocks, and one or more worktable blocks are mounted on a frame that can be independently transported. Each worktable block is mounted on the frame via a height adjustment mechanism that includes a plurality of supports and adjusters.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2012-182308

[0005] In the coating apparatus described in Patent Document 1, since it is necessary to eliminate the step difference between worktable blocks, the height of each worktable block is adjusted manually by an adjustment mechanism. However, the adjustment work of multiple adjustment mechanisms on the platform increases the workload of the operator and reduces work efficiency.

[0006] In particular, for the workbench blocks that constitute coating areas requiring high precision, the adjustment work becomes complex and requires a lot of time because there are significantly more adjustment mechanisms than other workbench blocks. Summary of the Invention

[0007] The present invention was made in view of the above-mentioned problems, and its object is to provide a coating apparatus that can meet the requirements through simple adjustment operations.

[0008] To address the aforementioned problems, a first aspect of the present invention is a coating apparatus that, while levitating and transporting a substrate, coats a processing liquid onto the upper surface of the substrate. The coating apparatus comprises: a coating support platform; a block disposed on the coating support platform, the upper surface of which is flat; a coating plate mounted on the upper surface of the block, which sprays gas upwards to levitate the substrate; a slit nozzle that supplies the processing liquid to the upper surface of the substrate, which is levitated and transported above the coating plate; and a tilt adjustment mechanism that adjusts the tilt of the upper surface of the block relative to a horizontal plane.

[0009] Alternatively, in the second method, the block is formed from stone in the coating apparatus of the first method.

[0010] Alternatively, the third method involves using a coating apparatus similar to the second method, where the stone is granite.

[0011] In addition, the fourth method is that in any of the coating apparatuses of the first to third methods, the flatness of the upper surface of the block is less than 10 μm.

[0012] In addition, the fifth method is that in any of the first to fourth methods of the coating apparatus, the tilt adjustment mechanism includes a plurality of leveling blocks.

[0013] Furthermore, the sixth embodiment, in the coating apparatus of the first to fifth embodiments, further comprises: an inlet support platform disposed upstream of the coating support platform along the transport direction of the substrate; an outlet support platform disposed downstream of the coating support platform along the transport direction of the substrate; an inlet frame portion at least partially mounted on the inlet support platform; an outlet frame portion at least partially mounted on the outlet support platform; an inlet plate mounted on the inlet frame portion, which sprays gas upward to levitate the substrate; an outlet plate mounted on the outlet frame portion, which sprays gas upward to levitate the substrate; a first height adjustment mechanism for adjusting the height of the inlet plate relative to the inlet frame portion; and a second height adjustment mechanism for adjusting the height of the outlet plate relative to the outlet frame portion, wherein the substrate is transported from above the inlet plate via above the coating plate to the outlet plate.

[0014] In addition, in the seventh method, the inlet support platform and the outlet support platform are both set to be separated from the coating support platform by an interval of more than 50 cm and less than 1 m. The inlet frame is erected from the inlet support platform to the coating support platform, and the inlet plate is connected to the coating plate. The outlet frame is erected from the outlet support platform to the coating support platform, and the outlet plate is connected to the coating plate.

[0015] Furthermore, the eighth method is a coating apparatus in the seventh method, wherein the coating apparatus further includes a mechanism configured to pull the outlet frame portion and the outlet plate downstream in the transport direction of the substrate.

[0016] According to the coating apparatus of the first to eighth methods, since the coating plate is mounted on the upper surface of the block whose upper surface is set to be flat, a high degree of flatness of the upper surface of the coating plate can be obtained by simple adjustment operation.

[0017] In particular, the coating apparatus according to the second method is easier to process because the block is formed of stone, and hardly any thermal expansion and contraction due to temperature changes occurs.

[0018] In particular, according to the coating apparatus of the fifth method, since the tilt adjustment mechanism includes a plurality of leveling blocks, the tilt of the block can be finely adjusted and the upper surface of the block can be set to a horizontal plane.

[0019] In particular, the coating apparatus according to the eighth method can pull the outlet frame and the outlet plate downstream in the substrate transport direction, thereby improving work efficiency during maintenance, etc. Attached Figure Description

[0020] Figure 1 This is a diagram illustrating an example of a substrate processing system including the coating apparatus of the present invention.

[0021] Figure 2 This is a diagram showing the overall structure of the coating apparatus of the present invention.

[0022] Figure 3 This is a top view of the inlet plate, outlet plate, and coating plate.

[0023] Figure 4 This is a side view of the coating apparatus viewed from the position of the coating plate.

[0024] Figure 5 This is a top-down view of the precision stone.

[0025] Figure 6 This is a diagram showing the structure and function of the leveling block.

[0026] Figure 7 This is a diagram showing the structure and function of the leveling block.

[0027] Figure 8 This diagram shows the state in which the inlet plate is installed on the inlet frame by adjusting the bolts.

[0028] Figure 9 This diagram shows the state after the exit frame and exit plate have been pulled out.

[0029] Figure 10 This is another example of the structure of a coating apparatus.

[0030] Explanation of reference numerals in the attached figures

[0031] 1.1a Coating apparatus

[0032] 10 Coating Support Tables

[0033] 15 Precision Stones

[0034] 16 leveling blocks

[0035] 20 Coated Board

[0036] 30 Entrance Support Platform

[0037] 35 Entrance Frame Section

[0038] 40 entrance board

[0039] 45 and 65 adjusting bolts

[0040] 50 Export Support Platform

[0041] 55 Export Framework Department

[0042] 60 Export Plate

[0043] 69 guide rail

[0044] 70 slit nozzle

[0045] 75 substrate handling section

[0046] 90 Control Department

[0047] G substrate Detailed Implementation

[0048] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Unless otherwise specified, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) not only strictly indicate the positional relationship but also indicate a state in which an angle or distance is relatively displaced within a tolerance range or within which the same level of functionality can be obtained. Unless otherwise specified, expressions indicating equivalent states (e.g., "same," "equivalent," "homogeneous," etc.) not only indicate a state of strict quantitative equality but also indicate a state in which there are differences in tolerance or within which the same level of functionality can be obtained. Furthermore, unless otherwise specified, expressions indicating shape (e.g., "circular," "quadrilateral," "cylindrical," etc.) not only strictly indicate the geometric shape but may also indicate a shape within a range where the same level of effect can be obtained, such as a shape with concave or convex features or chamfers. Additionally, expressions such as "having," "prepared," "equipped," "including," and "possessing" structural members are not exclusive expressions excluding the existence of other structural members. The expression “at least one of A, B and C” includes “only A”, “only B”, “only C”, “any two of A, B and C”, and “all of A, B and C”.

[0049] Figure 1 This diagram illustrates an example of a substrate processing system including the coating apparatus of the present invention. The substrate processing system includes: a coating apparatus 1 for coating a substrate G with a processing liquid such as a photoresist solution; a pretreatment apparatus 2 for performing a pre-processing step of the coating process performed by the coating apparatus 1; and a post-processing apparatus 3 for performing a post-processing step of the coating process. The substrate G to be processed is, for example, a flat rectangular glass substrate with dimensions, for example, 2160 mm × 2460 mm (G8). Furthermore, in... Figure 1 In the subsequent figures, for ease of understanding, the dimensions and quantities of each part are exaggerated or simplified as needed. Additionally, in Figure 2 In subsequent figures, to clarify their directional relationships, an XYZ orthogonal coordinate system with the Z-axis as the vertical direction and the XY plane as the horizontal plane is appropriately added.

[0050] The pretreatment process performed by the pretreatment apparatus 2 includes, for example, cleaning the surface of the substrate G and drying the cleaned substrate G. For example, the substrate G is transported from the pretreatment apparatus 2 to the coating apparatus 1 by rotating and driving a plurality of rollers. As will be described in detail later, the coating apparatus 1 floats and transports the substrate G while supplying a treatment liquid (in this embodiment, a photoresist liquid) to the upper surface of the substrate G for coating.

[0051] On the other hand, the post-processing steps performed by the post-processing apparatus 3 include, for example, depressurization drying, which dries the resist solution coated on the substrate G by reducing pressure, and heat treatment (pre-drying) to solidify the components contained in the resist solution and form a resist film on the substrate G. The post-processing apparatus 3 uses a handling robot to remove the coated substrate G from the coating apparatus 1.

[0052] Figure 2 This is a diagram showing the overall structure of the coating apparatus 1 of the present invention. The coating apparatus 1 is a slit coater that applies a photoresist liquid to the upper surface of a substrate G while lifting the substrate G and transporting it in the direction indicated by arrow AR1 (towards (+X)). The coating apparatus 1 includes three support platforms, three floating plates supported by the three support platforms, a slit nozzle 70, and a control unit 90.

[0053] The three support platforms—coating support platform 10, inlet support platform 30, and outlet support platform 50—are arranged in a row (along the X direction) on a flat surface 7 within the factory. The interval between the inlet support platform 30 and the coating support platform 10, and between the outlet support platform 50 and the coating support platform 10, is 50 cm or more and less than 1 m. Therefore, personnel can enter the spaces between the inlet support platform 30 and the coating support platform 10, and between the outlet support platform 50 and the coating support platform 10. The coating support platform 10, the inlet support platform 30, and the outlet support platform 50 are all constructed with frames, for example, made of stainless steel. Inside the frames of the coating support platform 10, the inlet support platform 30, and the outlet support platform 50, for example, are containers for motors or tanks containing processing fluid.

[0054] The coating support platform 10, the inlet support platform 30, and the outlet support platform 50 each have a plurality of feet 11, 31, and 51, and are mounted on the ground 7 via these feet. The feet 11, 31, and 51 are height-adjustable, thereby enabling level calibration of the coating support platform 10, the inlet support platform 30, and the outlet support platform 50.

[0055] A precision stone 15 is provided on the coating support 10, which is located in the middle of the three support platforms, and a coating plate 20 is mounted on the upper surface of the precision stone 15. An inlet plate 40 is provided on the inlet support 30 via an inlet frame 35, and the inlet support 30 is positioned upstream ((-X) side) of the coating support 10 in the transport direction of the substrate G. An outlet plate 60 is provided on the outlet support 50 via an outlet frame 55, and the outlet support 50 is positioned downstream ((+X) side) of the coating support 10 in the transport direction of the substrate G. Both the inlet plate 40 and the outlet plate 60 can be divided into a plurality of plates.

[0056] Figure 3This is a top view of the inlet plate 40, outlet plate 60, and coating plate 20. The inlet plate 40, outlet plate 60, and coating plate 20 are all box-shaped platforms made of aluminum (Al). The thickness (length along the Z direction) of the inlet plate 40 and outlet plate 60 is, for example, 30 mm. The thickness of the coating plate 20 is, for example, 50 mm. The inlet plate 40 and coating plate 20 are arranged in a substantially gapless contact state (in... Figure 1 , 3 (In the illustration, a small gap is provided for easy distinction between the two plates). The height difference between the upper surface of the inlet plate 40 and the upper surface of the coating plate 20 is less than tens of micrometers. Similarly, the outlet plate 60 and the coating plate 20 are also arranged in a substantially gapless contact state. The height difference between the upper surface of the outlet plate 60 and the upper surface of the coating plate 20 is also less than tens of micrometers. The inlet plate 40 is arranged in a substantially gapless connection with the outlet plate 60, which, along with the coating plate 20, constitutes a floating plate that makes the substrate G float.

[0057] like Figure 3 As shown, a plurality of nozzles 41 are arranged in a specific pattern and density on the inlet plate 40. Similarly, a plurality of nozzles 61 are arranged in a specific pattern and density on the outlet plate 60. On the other hand, a plurality of nozzles 21 and suction ports 22 are arranged in a specific pattern and density on the coating plate 20. The plurality of nozzles 21 and suction ports 22 are arranged uniformly and without deviation on the entire surface of the coating plate 20. For example, as Figure 3 As shown, preferably, the nozzles 21 and suction ports 22 are alternately arranged in a grid pattern. Typically, the density of nozzles 21 and suction ports 22 in the coating plate 20 is higher than the density of nozzles 41 and 61 in the inlet plate 40 and outlet plate 60.

[0058] An air supply mechanism 81 is connected to each of the inlet plate 40 and the outlet plate 60 via air supply piping. The air supply mechanism 81 supplies high-pressure air to each of the inlet plate 40 and the outlet plate 60. The high-pressure air supplied to the inlet plate 40 is evenly distributed to a plurality of nozzles 41 and ejected upwards from each nozzle 41. Similarly, the high-pressure air supplied to the outlet plate 60 is evenly distributed to a plurality of nozzles 61 and ejected upwards from each nozzle 61.

[0059] On the other hand, the air supply mechanism 81 is connected to the coating plate 20 via an air supply pipe, and the suction mechanism 82 is connected to the coating plate 20 via an exhaust pipe. The air supply mechanism 81 supplies high-pressure air to the coating plate 20, and the suction mechanism 82 applies a negative pressure suction force to the coating plate 20. Inside the coating plate 20, there are independently provided manifolds and air passages for equally distributing the high-pressure air supplied from the air supply mechanism 81 to a plurality of nozzles 21, and manifolds and air passages for equally distributing the negative pressure suction force supplied from the suction mechanism 82 to a plurality of suction ports 22. The high-pressure air supplied from the air supply mechanism 81 to the coating plate 20 is equally distributed to the plurality of nozzles 21 and ejected upwards from each nozzle 21. The negative pressure suction force applied to the coating plate 20 by the suction mechanism 82 is equally distributed to the plurality of suction ports 22, and the negative pressure acts on each suction port 22. That is, on the upper surface of the coating plate 20, high-pressure air is ejected from a plurality of nozzles 21, and negative pressure attraction is generated from a plurality of suction ports 22.

[0060] return Figure 2 A coating plate 20 is mounted on a coating support table 10, with a precision stone 15 having a flat upper surface. The precision stone 15 is a rectangular parallelepiped formed by precision machining. The precision stone 15 is, for example, formed of granite. The dimensions of the precision stone 15 are, for example, a width (length in the Y direction) of 2000 mm, a length (length in the X direction) of 500 mm, and a height (length in the Z direction) of 300 mm. Furthermore, the width of the precision stone 15 can be any appropriate value corresponding to the dimensions of the substrate G to be processed. Each face of the rectangular parallelepiped of the precision stone 15 is precision machined using high-precision planar machining. In particular, the flatness of the upper surface of the precision stone 15 is set to be 3 μm or more and 10 μm or less (5 μm in this embodiment). Furthermore, flatness refers to the degree of deviation of the planar shape from a geometrically ideal plane; in short, it refers to the height difference between the most convex and the most concave parts of the upper surface of the precision stone 15.

[0061] Precision stone 15, formed from granite, exhibits almost no expansion or contraction due to temperature changes. Furthermore, it is relatively easy to process, making it suitable as a material for high-precision surface finishing.

[0062] The coating plate 20 is fastened to the upper surface of the precision stone 15, for example, by screws. Alternatively, a shim tape can be inserted between the precision stone 15 and the coating plate 20. The flatness of the upper surface of the precision stone 15 significantly affects the flatness of the upper surface of the coating plate 20 mounted thereon. By mounting the coating plate 20 on the upper surface of the precision stone 15, which has a flatness of less than 10 μm, the flatness of the upper surface of the coating plate 20 is also kept to a desirable, smaller value.

[0063] Figure 4 This is a side view of the coating apparatus 1 as seen from the position of the coating plate 20. Additionally, Figure 5 This is a top view of the Precision Stone 15. (As shown) Figure 5 As shown, a plurality of through holes 14 are provided in the precision stone 15. Each of the plurality of holes 14 is fitted with an air supply pipe connecting the air supply mechanism 81 and the coating plate 20, or an exhaust pipe connecting the suction mechanism 82 and the coating plate 20 (see reference). Figure 3 ).

[0064] The precision stone 15 is supported by the coating support table 10 via three leveling blocks 16. That is, the precision stone 15 is supported at three points by the three leveling blocks 16. Each leveling block 16 is a height-adjustable component. Figure 6 and Figure 7 This diagram illustrates the structure and function of the leveling block 16. The leveling block 16 comprises an adjusting bolt 25, an inner block 26, and a pair of outer blocks 27. The adjusting bolt 25 is connected to the inner block 26, and rotating the adjusting bolt 25 causes the inner block 26 to slide left and right. Conical surfaces that slide freely against each other are formed on the outer surface of the inner block 26 and the inner surface of the outer blocks 27. When the operator rotates the adjusting bolt 25 as indicated by arrow AR71, the inner block 26 moves to the left of the paper as indicated by arrow AR72. Consequently, the distance between the pair of outer blocks 27 widens as indicated by arrow AR73. When the operator rotates the adjusting bolt 25 in the opposite direction, the inner block 26 moves to the right of the paper, and the distance between the pair of outer blocks 27 narrows. The leveling block 16 is characterized by its ability to handle high loads with relatively low operating torque and its ability to perform fine height adjustments.

[0065] On the coating support table 10, with Figure 5 Three leveling blocks 16 are arranged in the indicated positional relationship. A precision stone 15 is placed on the outer block 27 of each of the three leveling blocks 16. The operator can independently adjust the height of each of the three leveling blocks 16 by rotating the adjusting bolts 25 of each block. This allows adjustment of the inclination of the precision stone 15 relative to the horizontal plane. In this embodiment, the inclination of the precision stone 15 is adjusted so that its upper surface is parallel to the horizontal plane. That is, the three leveling blocks 16 constitute a tilt adjustment mechanism for adjusting the inclination of the precision stone 15.

[0066] Back to Figure 2The coating plate 20 is supported by a precision stone 15, while the inlet plate 40 and outlet plate 60 are supported by an inlet frame portion 35 and an outlet frame portion 55, respectively. The inlet frame portion 35 and the outlet frame portion 55 are both constructed, for example, by assembling stainless steel frames. Both the inlet frame portion 35 and the outlet frame portion 55 can be constructed by connecting multiple frame structures. When the inlet plate 40 and the outlet plate 60 are divided into multiple plates, the inlet frame portion 35 and the outlet frame portion 55 can also be formed by connecting frame structures corresponding to the divided plates.

[0067] In this embodiment, although a portion of the inlet frame 35 is mounted on the inlet support platform 30, the (+X) side end of the inlet frame 35 is mounted on the coating support platform 10. That is, the inlet frame 35 is erected from the inlet support platform 30 to the coating support platform 10, and the inlet plate 40 is connected to the coating plate 20. Similarly, although a portion of the outlet frame 55 is mounted on the outlet support platform 50, the (-X) side end of the outlet frame 55 is mounted on the coating support platform 10. That is, the outlet frame 55 is erected from the outlet support platform 50 to the coating support platform 10, and the outlet plate 60 is connected to the coating plate 20. In other words, the inlet plate 40 and the outlet plate 60 are supported by a bridge structure, and the inlet frame 35 and the outlet frame 55 function as this bridge.

[0068] The inlet plate 40 is mounted to the inlet frame section 35 via a plurality of adjusting bolts 45. Similarly, the outlet plate 60 is mounted to the outlet frame section 55 via a plurality of adjusting bolts 65. Figure 8 This diagram shows the state in which the inlet plate 40 has been installed on the inlet frame portion 35 using adjusting bolts 45. The operator can increase or decrease the gap between the inlet plate 40 and the inlet frame portion 35 by rotating the threaded portion of the adjusting bolts 45, and can adjust this gap accordingly. By appropriately operating a plurality of adjusting bolts 45, the operator can achieve the flatness of the upper surface of the inlet plate 40 and adjust the upper surface to a horizontal plane.

[0069] Similarly, the operator can adjust the gap between the outlet plate 60 and the outlet frame 55 by operating the adjusting bolts 65. By appropriately operating a plurality of adjusting bolts 65, the operator can obtain the flatness of the outlet plate 60 and adjust the plane to be horizontal. Furthermore, since the movement of the threaded portion of the adjusting bolts 45 and 65 directly becomes the adjustment amount, the adjustment accuracy is inevitably coarser compared to the leveling block 16 mentioned above.

[0070] Furthermore, the outlet frame 55 and the outlet plate 60 can be pulled out downstream (+X) in the transport direction of the substrate G. Specifically, the inlet frame 35 is only mounted on the inlet support table 30 and the coating support table 10, while the outlet frame 55 is mounted on the guide rail 69 mounted on the outlet support table 50 and the coating support table 10. Thus, the outlet frame 55 and the outlet plate 60 can be pulled out downstream along the guide rail 69 in the transport direction of the substrate G.

[0071] Figure 9 This diagram shows the state after the outlet frame 55 and outlet plate 60 are pulled out. A gap of 50 cm or more and 1 m or less is provided between the outlet support table 50 and the coating support table 10. Therefore, by pulling out the outlet frame 55 and outlet plate 60 downstream along the guide rail 69 in the transport direction of the substrate G, a space sufficient for one operator to enter is formed between the outlet support table 50 and the coating support table 10.

[0072] A slit nozzle 70 is provided above the coating plate 20. Figure 2 , 4 The slit nozzle 70 is an elongated nozzle extending along the width direction (Y-axis direction) of the substrate G. Processing liquid (in this embodiment, a photoresist liquid) is supplied to the slit nozzle 70 from a processing liquid supply mechanism (not shown). The photoresist liquid supplied to the slit nozzle 70 is ejected downwards in a strip shape from a slit-shaped outlet located at the lower end of the slit nozzle 70. Furthermore, the width (length in the Y-direction) of this slit-shaped outlet is the same as the width of the substrate G.

[0073] Furthermore, the slit nozzle 70 can move above the coating plate 20 along the transport direction (X direction) of the substrate G via a drive mechanism (not shown). The slit nozzle 70 can also move up and down a short distance.

[0074] The substrate transport section 75 is configured such that a floating plate consisting of an inlet plate 40, a coating plate 20, and an outlet plate 60 is sandwiched between the left and right sides. Figure 2 , 4 The substrate transport unit 75 has a pair of left and right base portions 76 and adsorption holding portions 77. Using travel guides and linear motors (not shown) arranged parallel to the floating plate on both sides, the base portions 76 can travel linearly in the X direction. Adsorption holding portions 77 are provided on the base portions 76. Adsorption pads are provided at the upper end of the adsorption holding portions 77.

[0075] During substrate transport, the adsorption and holding portion 77 of the substrate transport unit 75 abuts against the four corners of the lower surface of the rectangular substrate G, which is floated by the levitation plate. By applying negative pressure to the adsorption pads of the adsorption and holding portion 77, the substrate transport unit 75 adsorbs and holds the four corners of the floated substrate G. Subsequently, in this state, the substrate transport unit 75 travels along the X direction by a linear motor, thereby transporting the substrate G in a state of floating above the levitation plate.

[0076] The control unit 90 of the coating apparatus 1 controls various operating mechanisms installed in the coating apparatus 1. The hardware structure of the control unit 90 is the same as that of a general computer. That is, the control unit 90 has: a CPU (Central Processing Unit) that performs various arithmetic operations; a ROM (Read Only Memory) that stores the basic program; a RAM (Random Access Memory) that stores various information; and a storage unit (e.g., a hard disk or SSD) that stores control software and data. The CPU of the control unit 90 executes a prescribed processing program to perform the processing in the coating apparatus 1. Specifically, the control unit 90 controls the supply of high-pressure air to the inlet plate 40 and the outlet plate 60, the supply of high-pressure air and negative pressure suction to the coating plate 20, the movement of the substrate transport unit 75, and the supply of processing liquid to the slit nozzle 70.

[0077] When assembling the coating apparatus 1, the precision stone 15, on which the coating plate 20 is mounted, is placed on three leveling blocks 16 provided on the coating support table 10. The operator operates these three leveling blocks 16 to adjust the inclination of the upper surface of the precision stone 15. In this embodiment, the inclination of the precision stone 15 is adjusted using the three leveling blocks 16 so that the upper surface of the precision stone 15 is parallel to the horizontal plane. Because the leveling blocks 16 can be finely adjusted, the inclination of the precision stone 15 can be adjusted with high precision.

[0078] Furthermore, in a different work environment than the coating apparatus 1 (e.g., on a stone slab), the inlet plate 40 and the inlet frame 35 are assembled as modules, and the adjustment of multiple adjusting bolts 45 is performed to obtain the flatness of the upper surface of the inlet plate 40, and this upper surface is set to a horizontal plane. Compared to mounting the inlet plate 40 and the inlet frame 35 on the inlet support platform 30 before performing the work, it is possible to significantly improve work efficiency by assembling them as modules on a separate stone slab and then adjusting them. Moreover, the setup work is completed simply by placing the inlet plate 40 and the inlet frame 35, which are assembled as modules, on the inlet support platform 30 and the coating support platform 10.

[0079] Similarly, in a different work area than the coating apparatus 1, the outlet plate 60 and outlet frame 55 are assembled as modules, and the adjustment of multiple adjusting bolts 65 is performed to obtain the flatness of the upper surface of the outlet plate 60, and this flatness is set to a horizontal plane. Compared to performing the work after mounting the outlet plate 60 and outlet frame 55 on the outlet support platform 50, it is much more efficient to perform the adjustment work after assembling them as modules on a separate stone plate. Furthermore, the setup work is completed simply by placing the outlet plate 60 and outlet frame 55, which are assembled as modules, on the guide rail 69.

[0080] When the substrate G is processed using the coating apparatus 1, firstly, in the pretreatment apparatus 2, the substrate G, having completed previous processing steps (cleaning, etc.), is transported to the coating apparatus 1 using rollers. In the coating apparatus 1, the substrate G is transported while being lifted. Specifically, high-pressure air is supplied from the air supply mechanism 81 to each of the inlet plate 40, the outlet plate 60, and the coating plate 20, and a suction mechanism 82 applies negative pressure suction to the coating plate 20.

[0081] High-pressure air supplied from the air supply mechanism 81 to the inlet plate 40 is evenly distributed to a plurality of nozzles 41 and ejected upward from each nozzle 41. Similarly, high-pressure air supplied from the air supply mechanism 81 to the outlet plate 60 is evenly distributed to a plurality of nozzles 61 and ejected upward from each nozzle 61. As a result, the substrate G floats up from the upper surfaces of the inlet plate 40 and the outlet plate 60.

[0082] On the other hand, the high-pressure air supplied to the coating plate 20 from the air supply mechanism 81 is evenly distributed to a plurality of nozzles 21 and ejected upward from each nozzle 21. Simultaneously, the negative pressure attraction applied to the coating plate 20 from the suction mechanism 82 is evenly distributed to a plurality of suction ports 22, attracting the negative pressure of the surrounding gas environment to act on each suction port 22. Therefore, in the coating plate 20, the high-pressure air ejected from the plurality of nozzles 21 exerts an upward pushing force on the substrate G, while the negative pressure attraction generated from the plurality of suction ports 22 exerts a downward pulling force on the substrate G. Through the balance between the pushing force of the high-pressure air and the attraction force of the negative pressure attraction, the substrate G floats at a constant distance from the upper surface of the coating plate 20, and as a result, the distance from the outlet of the slit nozzle 70 to the substrate G also remains constant.

[0083] The four corners of the substrate G, which floats above the inlet plate 40, are held by the adsorption and holding parts 77 of the substrate transport section 75. The substrate transport section 75 holds the floating substrate G and moves it at a constant speed... Figure 2The substrate G travels in the direction (+X) indicated by arrow AR1. The substrate transport unit 75 lifts the substrate G from the inlet plate 40 above the coating plate 20 and transports it above the outlet plate 60.

[0084] As the substrate G, being floated and transported, passes above the coating plate 20, the resist liquid is sprayed downwards in a ribbon shape from the slit nozzle 70. Thus, the resist liquid is coated on the upper surface of the substrate G, which is being transported in the direction indicated by arrow AR1. At this time, the slit nozzle 70 can either remain stationary or move in the X direction. If the slit nozzle 70 moves, it can move either in the opposite direction (-X) to the transported substrate G or in the same direction (+X) as the substrate G at a speed lower than that of the substrate G. That is, any movement relative to the slit nozzle 70 from which the resist liquid is sprayed is acceptable.

[0085] After the substrate G coated with resist solution is floated and transported above the exit plate 60, it is removed from the coating device 1 by the handling robot of the post-processing device 3. The following processes are performed in the post-processing device 3: depressurized drying of the resist solution coated on the substrate G; and heat treatment to solidify the components contained in the resist solution to form a resist film on the substrate G.

[0086] In this embodiment, a coating plate 20 is mounted on the upper surface of a precision stone 15 that has been precisely machined to be flat. The flatness of the upper surface of the precision stone 15 is 10 μm or less. If the precision stone 15 is made of granite or other stone, a flatness of 10 μm or less on the upper surface can be achieved relatively easily through machining. From the viewpoint that the substrate G needs to be raised at a constant and uniform interval from the nozzle outlet of the slit nozzle 70, a high flatness is required on the upper surface of the coating plate 20. For this purpose, conventionally, the flatness of the coating plate 20 is obtained by adjusting multiple adjustment mechanisms. However, in this embodiment, the high flatness of the upper surface of the coating plate 20 can be obtained simply by mounting the coating plate 20 on the upper surface of the precision stone 15, which has been precisely machined to have a flatness of 10 μm or less. That is, compared with the conventional method, a high flatness of the upper surface of the coating plate 20 can be obtained through a significantly simplified adjustment operation.

[0087] In addition, granite and other stones are not only relatively easy to process, but also produce almost no thermal expansion or contraction due to temperature changes. Therefore, if a coating plate 20 is installed on the upper surface of the precision stone 15, a high degree of flatness can be stably maintained on the upper surface of the coating plate 20.

[0088] Furthermore, in this embodiment, the tilt of the precision stone 15 is adjusted using three leveling blocks 16. The operator only needs to operate the three leveling blocks 16 to make the upper surface of the precision stone 15 parallel to the horizontal plane. If the upper surface of the precision stone 15 is horizontal, the upper surface of the coating plate 20 can also be parallel to the horizontal plane. That is, the upper surface of the coating plate 20 can be set to a horizontal plane through a relatively simple adjustment operation.

[0089] Furthermore, in this embodiment, on a stone plate separately from the coating apparatus 1, after assembling the inlet plate 40 and the inlet frame portion 35 as a module and adjusting a plurality of adjusting bolts 45, the module is mounted on the inlet support platform 30 and the coating support platform 10. Thus, compared to mounting the inlet plate 40 and the inlet frame portion 35 onto the coating apparatus 1 and then performing adjustments, the flatness of the upper surface of the inlet plate 40 can be achieved through a simple adjustment operation, and the upper surface can be set to a horizontal plane, significantly improving work efficiency.

[0090] Similarly, on a stone plate separate from the coating apparatus 1, after assembling the outlet plate 60 and outlet frame 55 as a module and adjusting the multiple adjusting bolts 65, the module is placed on the guide rail 69. Thus, compared to mounting the outlet plate 60 and outlet frame 55 onto the coating apparatus 1 and then performing adjustments, the flatness of the top surface of the outlet plate 60 can be achieved through a simple adjustment operation, and the top surface can be set to a horizontal plane, significantly improving work efficiency.

[0091] Furthermore, in this embodiment, the outlet frame 55 and the outlet plate 60 are configured to be pulled out to the downstream (+X) side in the transport direction of the substrate G. By pulling out the outlet frame 55 and the outlet plate 60, a space sufficient for one operator to enter is formed between the outlet support table 50 and the coating support table 10. Thus, for example, during maintenance of the coating apparatus 1, an operator can enter between the outlet support table 50 and the coating support table 10 to perform operations on the coating plate 20 or the slit nozzle 70, thereby improving work efficiency.

[0092] The embodiments of the present invention have been described above, but various modifications can be made to the present invention in addition to the above-described methods as long as they do not depart from its spirit. For example, in the above embodiments, the precision stone 15 is formed from stone such as granite, but it is not limited to this. A metal block or a ceramic block with a flat upper surface can also be used instead of the precision stone 15. That is, as long as the coating plate 20 is mounted on a block with a flat upper surface. However, generally, compared with stone, it is difficult to improve the surface precision of metal materials, and ceramics are prone to damage, so it is preferable to use the precision stone 15 made of stone.

[0093] Furthermore, in the above embodiment, three leveling blocks 16 are used to adjust the tilt of the precision stone 15, but four or more leveling blocks 16 can also be used to adjust the tilt of the precision stone 15. The more leveling blocks 16 there are, the more precisely the tilt of the precision stone 15 can be adjusted, but the adjustment operation becomes more complicated.

[0094] Alternatively, the precision stone 15 can be supported at three points using a support member without height adjustment function and two leveling blocks 16. In this case, the tilt adjustment mechanism consisting of the two leveling blocks 16 and the support member cannot adjust the height of the precision stone 15, but can only adjust the tilt of the precision stone 15.

[0095] Alternatively, multiple shims without height adjustment function can be sandwiched between the coating support 10 and the precision stone 15, and the upper surface of the precision stone 15 can be set as a horizontal plane.

[0096] In addition, in the above embodiment, the coating plate 20 is supported by the precision stone 15, and the inlet plate 40 and the outlet plate 60 are supported by the inlet frame portion 35 and the outlet frame portion 55, respectively. However, it is not limited to this, and the inlet plate 40 and the outlet plate 60 may also be supported by the precision stone. Figure 10 These are diagrams illustrating other examples of the structure of a coating apparatus. Figure 10 In the coating apparatus 1a shown, in addition to the coating plate 20, the inlet plate 40 and the outlet plate 60 are also supported by precision stones 15. Similar to the embodiment described above, each precision stone 15 is a type of stone with a flat upper surface. Furthermore, each precision stone 15 is supported by a plurality of leveling blocks 16 to adjust its tilt. Figure 10 As shown, if the inlet plate 40, outlet plate 60 and coating plate 20 are all supported by the precision stone 15, the upper surface of the entire plate can be set as a high-precision plane through a simple adjustment operation.

[0097] However, the precision stone 15 made of precision-machined granite is expensive. Therefore, from the viewpoint of suppressing cost increases, as in the above embodiment, it is preferable that the coating plate 20 is supported by the precision stone 15, and the inlet plate 40 and outlet plate 60 are supported by the inlet frame portion 35 and the outlet frame portion 55, respectively. Compared with the surface finish of the upper surface of the coating plate 20 supported by the precision-machined precision stone 15, the surface finish of the upper surfaces of the inlet frame portion 35 and the outlet frame portion 55 formed by the assembly frame, and the inlet plate 40 and the outlet plate 60 adjusted by the adjusting bolts 45 and 65, is necessarily lower. However, compared with the surface finish required for the coating plate 20 to perform the coating process from the slit nozzle 70 to the substrate G, even a lower surface finish of the inlet plate 40 and the outlet plate 60 is sufficient, as long as the surface finish is sufficient to lift and transport the substrate G.

[0098] Furthermore, in the above embodiment, the outlet frame 55 and outlet plate 60 are configured to be pulled out to the downstream (+X) side in the transport direction of the substrate G. However, the inlet frame 35 and inlet plate 40 can also be configured to be pulled out to the upstream (-X) side in the transport direction of the substrate G. Specifically, for example, similar to the above embodiment, a guide rail is mounted on the inlet support table 30 and the coating support table 10, and the inlet frame 35 and inlet plate 40 are placed on the guide rail. In this way, for example, during maintenance, the operator can also enter between the inlet support table 30 and the coating support table 10.

Claims

1. A coating apparatus that, while levitating and transporting a substrate, applies a treatment liquid to the upper surface of the substrate, wherein... The coating apparatus has the following features: Coating support table; The block is set on the coating support platform, and its upper surface is a flat surface; A coating plate is mounted on the upper surface of the block, and gas is sprayed upwards to make the substrate float. A slit nozzle supplies the treatment liquid to the upper surface of the substrate, which is being carried and floated above the coating plate; and The tilt adjustment mechanism adjusts the tilt of the upper surface of the block relative to the horizontal plane.

2. The coating apparatus according to claim 1, wherein, The block is formed of stone.

3. The coating apparatus according to claim 2, wherein, The stone is granite.

4. The coating apparatus according to claim 1, wherein, The flatness of the upper surface of the block is less than 10 μm.

5. The coating apparatus according to claim 1, wherein, The tilt adjustment mechanism includes a plurality of leveling blocks.

6. The coating apparatus according to claim 1, wherein, The coating apparatus also has: The inlet support platform is positioned upstream of the coating support platform along the transport direction of the substrate. The outlet support platform is positioned further downstream than the coating support platform along the transport direction of the substrate. At least a portion of the entrance frame is mounted on the entrance support platform; The export frame section, at least a portion of which is mounted on the export support platform; An inlet plate, installed on the inlet frame, sprays gas upwards to make the substrate float. An outlet plate, installed on the outlet frame, sprays gas upwards to make the substrate float. The first height adjustment mechanism adjusts the height of the entrance plate relative to the entrance frame portion; as well as The second height adjustment mechanism adjusts the height of the outlet plate relative to the outlet frame portion. The substrate is lifted from the inlet plate and transported via the coating plate to the outlet plate.

7. The coating apparatus according to claim 6, wherein, Both the inlet support platform and the outlet support platform are set at a distance of more than 50cm and less than 1m from the coating support platform. The inlet frame is erected from the inlet support platform to the coating support platform, and the inlet plate is connected to the coating plate. The outlet frame is mounted from the outlet support platform to the coating support platform, and the outlet plate is connected to the coating plate.

8. The coating apparatus according to claim 7, wherein, The coating apparatus also has a mechanism configured to pull the outlet frame and the outlet plate downstream of the substrate in the transport direction.

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