Device with scanning device

Abstract

The invention relates to a device (10, 10 ') for examining an object or scanning an eyeball (1), comprising a scanning device (2, 2a) having a reflecting surface (3) on which at least one light beam (4) emitted from a light source (8) can be emitted, a reflected light beam (5a) emitted from the reflecting surface (3) to the incident light beam (4) being pivotable by means of the scanning device (2) over a first angular range (6a), characterized in that an optical mechanism is provided, as a result, the emitted reflected light beam (5a) can be pivoted over a second angular range (6c), which is larger than the first angular range (6a), after passing through the optical mechanism.

Description

Technical Field

[0001] The present invention relates to a device as described in the subject matter portion of claim 1. Background Technology

[0002] Eye scanning equipment typically includes a scanning device with a scanning surface or a reflecting surface. An incident light beam is directed towards the reflecting surface, and the scanning device causes the reflected light beam, which travels from the reflecting surface to the incident light beam, to rotate within a certain angle range, known as the scanning angle. Structures can be inspected through beam scanning.

[0003] Against this backdrop, confocal laser scanning systems employing single-beam and point detectors are known. Furthermore, laser scanning systems employing linear illumination and linear detection are also known.

[0004] Conventional confocal laser scanning systems have limitations in terms of light intensity and speed. This limitation stems from the fact that characteristics such as scanning speed, scanning angle, and scanning area are interdependent to some extent and cannot be arbitrarily expanded.

[0005] Scanning devices with large scanning areas and large scanning angles tend to be relatively slow. Conversely, small scanning devices with small scanning angles are usually extremely fast.

[0006] The product of the scanning area or reflective area and the scanning angle is a decisive factor in light intensity and cannot be increased even through optical transformations. This can limit light intensity or speed, especially for wide-angle systems. Scanning devices with small scanning angles require long focal lengths to generate larger intermediate images. This increases the space required for optical components.

[0007] Laser scanning systems employing linear illumination and linear detection are only single-axis confocal, resulting in degraded image quality, relatively complex optics, and the need for highly sensitive linear scan cameras. Using multiple detectors and light sources, or employing beam extension paths, necessitates additional optics, further increasing costs. Summary of the Invention

[0008] In view of the above, the object of the present invention is to provide a device with a scanning apparatus, thereby enabling the amplification of the overall scanning angle as smoothly as possible without reducing the scanning area or the scanning speed.

[0009] To achieve the above objectives, the present invention provides the features described in claim 1.

[0010] First, the present invention recognizes the need for a wide-angle scanning system with high light intensity, fast scanning speed, and good image quality, especially a scanning system with an in-sight angle of ±30° or greater. It also recognizes that such a wide-angle scanning system should be as compact as possible to suit practical operation. Furthermore, it recognizes the need for a fast scanning system with a smaller scanning angle.

[0011] The present invention recognizes that an apparatus for examining an object or scanning an eyeball should include a scanning device with a reflective surface, wherein at least one beam of light emitted from a light source can be directed toward the reflective surface, wherein the reflected beam directed from the reflective surface toward the incident beam can be swung within a first angular range by means of the scanning device.

[0012] According to the present invention, an optical mechanism is provided such that the emitted reflected light beam can oscillate within a second angular range after passing through the optical mechanism, wherein the second angular range is greater than the first angular range. This enables the light beam (especially a laser beam) to pass through the same scanning surface or reflecting surface of the scanning device multiple times but from different angles, as in a loop, thereby increasing the overall scanning angle.

[0013] The light beam is deflected by a beam guiding component and re-mapped onto the same scanning or reflecting surface, or the scanning device performs autocollimation optical imaging. With the scanning area remaining constant, the scanning angle is increased, preferably doubled. This multiplies the product of area and angle, thereby enabling higher light intensity or faster speed in the system.

[0014] The device described in this article allows for more flexible selection of scanners. For wide-angle systems, increasing the scanning angle enables closer 1:1 imaging, which offers advantages in suppressing specific optical aberrations based on optical symmetry. Lower optical magnification results in a shorter focal length, which actually has a positive impact on space utilization.

[0015] The second angle range can be twice the first angle range. This allows for a very efficient increase in the overall scanning angle and optimization of its magnification.

[0016] An optical mechanism can return a reflected light beam emitted from a reflecting surface to the reflecting surface and then swing it within a second angular range as a returning beam. The beam swinging within the second angular range is a double-scanning beam. The scanning device or its scanning surface is collimated and self-collimated by optical components. The light to be scanned or detected passes through the scanning device multiple times, preferably through the same point or the same surface, thus performing multiple scans. This increases the overall scanning angle of the scanning system, while the beam diameter remains unchanged, and therefore its light intensity remains essentially constant. Specifically, the beam diameter remains the same, while the light intensity increases with the increase in the scanning angle. By employing an optical deflection mechanism, the product of the scanning angle and the scanning area can be increased.

[0017] The incident beam from the light source (i.e., the reference stationary beam) can be directed toward the reflecting surface at an angle different from the returning beam. By selecting other angles, the overall scanning angle can be adjusted.

[0018] The reflected light beam exiting the reflective surface can pass through the optical mechanism and re-enter the reflective surface before being guided from the reflective surface to the optical device or the object under inspection for scanning. The light beam transmitted through the optical device or the object under inspection can then form a wide-range overall scanning angle. The object under inspection can be examined using a wide-angle lens.

[0019] A detector, or only one detector, can be used to detect the beam of light returning from the optical device or the object under inspection, or the signal of the returning beam. Using only one detector allows for a compact design. The returning beam may be scattered and / or reflected by the object under inspection.

[0020] The returning light beam from the object under inspection can be directed to the reflecting surface, pass through the optical mechanism, and return to the reflecting surface, so as to be directed to the detector. This allows for high-intensity scanning of the object under inspection.

[0021] The stationary beam emitted from the light source and the returning beam returning to the detector can be guided parallel and / or collinearly. This allows for a compact device structure, eliminating the need for deflection mechanisms. Furthermore, the outgoing and returning beams can interfere relatively easily, enabling the capture of OCT images when necessary.

[0022] The optical mechanism may include at least two polarizers. Polarizers allow the light beam to be reliably and with minimal intensity loss around the angular radius. By properly arranging and spacing the polarizers, the overall scanning angle can be easily adjusted.

[0023] The optical mechanism may include at least two lenses or four lenses. Each pair of lenses may be arranged confocally to achieve a confocal structure for the device.

[0024] An optical mechanism may include at least one curved mirror. This curved mirror can both deflect light and converge light at a focal point.

[0025] The scanning device may include an X-scanning device or be configured as an X-scanning device with an additional Y-scanning device. This enables planar (i.e., lateral) scanning of the object. A two-dimensional representation of the object to be inspected can be created.

[0026] A Y-scanning device can be constructed as a polarizing mirror, which causes the emitted reflected light beam to return as a returning beam to the reflective surface after being reflected by two front polarizing mirrors. This beam can then be directed to the optical device or the object under inspection for scanning along the Y direction. This structure allows for the simultaneous use of two scanning devices and simultaneous scanning of the object in both the X and Y directions. In particular, this structure maps the X and Y scanners or scanning devices to each other, thereby obtaining an ideal scanning pupil.

[0027] Light incident on the Y-scanning device can be guided by the third lens before reaching the Y-scanning device, while light emitted from the Y-scanning device can be guided by the fourth lens. Thus, the third lens can be arranged confocally with the first lens, and the fourth lens can be arranged confocally with the second lens.

[0028] In this context, at least two lenses can be arranged confocally with each other and / or with the intervention of one or two polarizing lenses. By using polarizing lenses, the confocally arranged lenses can be arranged very compactly relative to each other. The coincident focal points of the two lenses used can easily be located next to or on the polarizing lens.

[0029] Using the device described herein, the scanning angle can be adaptively adjusted by imaging the scanning plane in a 4f manner. An additional scanning axis, implemented via a Y-scan device, can be integrated into the device and mapped onto an X-scan device, thereby achieving optimal scanning pupils without optical offset throughout the scanning system. Position feedback can be achieved using a compact intermediate image, allowing for simplification of the main optics or optical components as appropriate. Furthermore, the device described herein can improve image quality by increasing light intensity.

[0030] Using the device described herein, four times the light intensity can be output from the eye being examined, enabling dual scanning and achieving better numerical aperture or optical resolution. Lens reflection effects are reduced due to the potential for a larger beam diameter. The device described herein requires only one detector. There is no need to stitch together multiple single images or superimpose images. Detector integration time can be shortened at the same resolution. Multiple optical components can be placed in a single optical path. Scan angle expansion is achieved through multiple scans. Attached Figure Description

[0031] Figure 1 A functional structure diagram of a device with a static or undeflected scanning device is shown.

[0032] Figure 2 It shows Figure 1 The functional structure shown schematically illustrates the scanner deflection to represent the overall scanning angle;

[0033] Figure 3 The functional structure of another device with a static scanning apparatus is shown, in which an additional Y-axis scanning axis is implemented;

[0034] Figure 4 It shows Figure 3 The functional structure shown has its additional Y-axis scanning axis, which schematically illustrates the scanner deflection to present the overall scanning angle. Detailed Implementation

[0035] Figure 1 and Figure 2 The diagram schematically illustrates a device 10 for examining an object or scanning an eyeball 1, which includes a scanning device 2 with a reflective surface 3, to which at least one beam of light 4 emitted from a light source 8 can be directed. When the reflective surface 3 is deflected, the reflected beam 5a directed from the reflective surface 3 to the incident beam 4 can be swung through a first angle range 6a by means of the scanning device 2.

[0036] After reflection, the incident beam 4 becomes the outgoing reflected beam 5a, which oscillates within a first angular range 6a. This can be found in [reference needed]. Figure 2 The scanner deflection is schematically shown in the figure. The emitted reflected beam 5a is represented by a solid white line, indicating that the emitted reflected beam 5a is a single-scan beam.

[0037] By means of an optical mechanism, the emitted reflected beam 5a, after passing through the optical mechanism, can oscillate within a second angle range 6c, which is greater than the first angle range 6a. Specifically, the second angle range 6c is twice the first angle range 6a, representing the overall scanning angle of the device. This can also be found in [reference needed]. Figure 2 .

[0038] In this regard, the beam 5a, which swings through the second angle range 6c, is a double scanning beam because the beam is first reflected from the reflective surface 3 and directed to the optical mechanism, then returns to the same position on the reflective surface 3, and then swings through the second angle range 6c (i.e., the overall scanning angle) to the optical device 15 (especially the main optical device) or the object to be inspected.

[0039] Figure 2 Specifically, it illustrates how the first angular range 6a transforms into the second angular range 6c when the reflective surface 3 of the scanning device 2 is deflected. The beams 5a directed at and exiting the reflective surface 3 at different angles schematically show different ends, including rhombuses, circles, and arrows.

[0040] The optical mechanism allows each reflected beam 5a emitted from the reflecting surface 3 toward the optical mechanism to return to the reflecting surface 3 as a returning beam 5a, and from there it can swing within a second angle range 6c. This is reflected in the fact that each returning beam 5a is also represented by a solid white line.

[0041] The emitted reflected beam and the return beam 5a are initially single-scan beams, and then, after oscillating through the second angular range 6c, they are converted into double-scan beams 5a.

[0042] The incident beam 4 (also known as the stationary beam) on the reflecting surface 3 is directed toward the reflecting surface 3 at an angle different from that of the returning beam 5a. The reflected beam 5a emitted from the reflecting surface 3 is guided in an almost loop-like manner, first leaving the reflecting surface 3 so that it can be directed toward the reflecting surface 3 again after passing through the optical mechanism, and from there toward the optical device 15 or the object to be inspected.

[0043] The reflected beam 5a emitted from the reflecting surface 3, after passing through the optical mechanism, can be directed from the reflecting surface 3 to the optical device 15 or the object to be inspected for scanning.

[0044] Specifically, only one detector 7 is used to detect the signal of the beam 5b returned from the optical device 15 or the object under inspection. The returned beam 5b is a beam scattered or reflected back from the object under inspection.

[0045] The beam of light returning from the optical device 15 or the object under inspection is represented by a white dashed line.

[0046] The returning beams 5b, directed at and exiting the reflecting surface 3 at different angles, schematically show different ends, including rhombuses, circles, and arrows.

[0047] Each returning beam 5b can be directed toward the reflecting surface 3, pass through the optical mechanism, and return to the reflecting surface 3, so as to be directed toward the detector 7.

[0048] Thus, especially when a reference arm is present, the beam 4 emitted from the light source 8 and the returning beam 5b can interfere to facilitate structural inspection. The beam 4 emitted from the light source 8 and the returning beam 5b from the detector 7 can be guided parallel and / or collinearly.

[0049] Figure 1 and Figure 2 The optical mechanism shown includes at least two polarizers 16a and 16b. The reflected light beam 5a directed from the reflecting surface 3 to the optical mechanism is deflected by two angles or turns by the polarizers 16a and 16b, and is then directed back to the reflecting surface 3 as a returning light beam 5a.

[0050] The optical mechanism also includes two confocal lenses 12a and 12b, whose focal points coincide between polarizers 16a and 16b, thus giving the device a confocal structure. Specifically, a first lens 12a and a second lens 12b are provided, meaning only two lenses are used.

[0051] Figure 3 and Figure 4 Another device 10' for examining an object or scanning an eyeball 1 is shown, wherein the scanning device 2 includes an X-scanning device 2a with a reflective surface 3, and at least one beam 4 emitted from a light source 8 (not shown) can be directed toward the reflective surface 3, wherein the reflected beam 5a directed from the reflective surface 3 toward the incident beam 4 can be swung through a first angle range 6a by means of the scanning device 2, 2a.

[0052] Similar to Figure 2 The emitted reflected beam 5a is represented by a solid white line.

[0053] By means of the optical mechanism, the emitted reflected beam 5a can be swung through a second angle range 6c, which is greater than the first angle range 6a, after passing through the optical mechanism.

[0054] Specifically, the second angle range 6c is twice the first angle range 6a, representing the overall scanning angle of the device.

[0055] The optical mechanism ensures that all reflected beams 5a emitted from the reflecting surface 3 toward the optical mechanism can return to the reflecting surface 3 as returning beams 5a, and from there they can swing within a second angle range 6c. This is reflected in the fact that the returning beams 5a are also represented by solid white lines.

[0056] The incident beam 4 on the reflecting surface 3 can be directed toward the reflecting surface 3 at a different angle than the returning beam 5a. The beam 5a is guided in an almost loop, first leaving the reflecting surface 3 so that it can be directed toward the reflecting surface 3 again after passing through the optical mechanism, and from there toward the optical device 15 or the object to be inspected.

[0057] The reflected beam 5a emitted from the reflecting surface 3, after passing through the optical mechanism, is guided from the reflecting surface 3 as a return beam 5a to the optical device 15 or the object to be inspected for scanning.

[0058] Specifically, only one detector 7 (not shown) is set to detect the beam 5b returning from the optical device 15 or the object under inspection, or the signal of the returning beam 5b.

[0059] The beam 5b returning from the optical device 15 or the object under inspection is indicated by a white dashed line. Each returning beam 5b can be directed to the reflecting surface 3, pass through the optical mechanism, and return to the reflecting surface 3, so as to be directed to the detector 7.

[0060] In this way, the beam 4 emitted from the light source 8 (also referred to as the stationary beam) and the returning beam 5b can interfere, in particular, to inspect the structure. The beam 4 emitted from the light source 8 and the returning beam 5b of the returning detector 7 can be guided parallel and / or collinearly.

[0061] Figure 3 and Figure 4 The optical mechanism shown includes two polarizers 16a and 16b, which deflect the outgoing reflected beam 5a and the returning beam 5b by two angles or turns, respectively.

[0062] The reflected light beam 5a from the reflecting surface 3 is deflected by the first polarizer 16a and then guided by the first lens 12a to the second polarizer 16b. The reflected light beam 5a exiting from the second polarizer 16b is guided through another third lens 12c.

[0063] The first lens 12a and the third lens 12c are arranged confocally, so that their focal points are adjacent to or exactly coincide with each other on the second polarizer 16b.

[0064] The additional third lens 12c guides the emitted reflected beam 5a onto the Y-scanning device 2b, which is associated with and / or electronically connected to the scanning device 2 for synchronous control. Therefore, the scanning device 2 includes an X-scanning device 2a and an additional Y-scanning device 2b. The X-scanning device 2a operates at a faster speed than the Y-scanning device 2b.

[0065] The Y-scanning device 2b is constructed as a polarizing mirror, through which the emitted reflected beam 5a is reflected by two front polarizing mirrors 16a and 16b and returned to the reflecting surface 3, so that it can be guided to the optical device 15 or the object to be inspected for scanning along the Y direction.

[0066] Therefore, both the emitted reflected beam 5a and the returned beam 5b are deflected by three angles or rotations.

[0067] The reflected beam 5a emitted from the Y-scanning device 2b first passes through the fourth lens 12d and then through the second lens 12b, and then is redirected back onto the reflecting surface 3 as a returning beam 5a.

[0068] The second lens 12b and the fourth lens 12d are arranged confocally so that their focal points coincide. Then, the X-ray scanning device 2a directs the returned beam 5a toward the optical device 15 or the object to be inspected.

[0069] Similar to Figure 2 , Figure 4 The scanner deflection of scanning device 2 is shown.

[0070] exist Figure 3 and Figure 4 middle, Figure 1 and Figure 2 The basic structure of the device shown is extended to include an additional scanning mirror, namely the Y-scanning device 2b. The Y-scanning device 2b is imaged onto the X-scanning device 2a via 4f imaging, thereby obtaining an optimal scanning pupil without optical offset. Furthermore, a complete and compact XY intermediate image is also available for position feedback.

[0071] Figure 2 and Figure 4 The functional structure of the device is presented based on the schematic depiction of scanner deflection.

[0072] Imaging does not necessarily have to be created through the optical lens shown in the figure. Alternatively, other optical components, such as curved mirrors, can be used.

[0073] The principle of the device described in this article is as follows:

[0074] The beam 4 is directed onto the scanning device 2 and is variably deflected or scanned by the scanning device. Through imaging with 4f, which includes two lenses 12a and 12b and two polarizers 16a and 16b, the scanning surface or reflecting surface of the scanning device 2 achieves self-mapping.

[0075] Due to the polarizers 16a and 16b, the returning beam 5a is directed at the scanning device 2 at a different angle than the emitted reflected beam 5a. Therefore, the beam 5a passes through the same scanning surface twice, thereby doubling the overall scanning angle 6c.

[0076] This method of increasing the overall scanning angle by 6c while keeping the beam diameter constant offers several advantages. This gain (i.e., the product of angle and area) can be used to achieve fast scanning systems with faster scanning rates or stronger light output.

[0077] The following examples will illustrate this point, aiming to demonstrate the technical effects of the invention described herein based on existing products:

[0078] Example 1: Improve light intensity / image quality

[0079] CRS 4kHz, scanning area 10mm², optical scanning angle + / - 10°

[0080] 60°, 4kHz scanning system

[0081]

[0082]

[0083] Example 2: Increase scanning speed

[0084] 30°, 12kHz scanning system

[0085]

[0086] The technology described in this article can be used in wide-angle systems. The resulting high light intensity leads to better image quality. It also allows for faster scanning speeds. These technical features are key prerequisites for the practicality of equipment operation.

[0087] Figure Labels

[0088] 1. Eyeball or subject to examination

[0089] 2. Scanning device

[0090] 2a X-ray scanning device

[0091] 2b Y scanning device

[0092] 3. Reflecting surface of the scanning device (X-ray scanning device)

[0093] 4. Incident beam from the light source to the reflecting surface

[0094] 5a Reflected beam from the reflecting surface to the incident beam

[0095] 5a A beam of light that oscillates from the reflecting surface within a second angular range

[0096] 5b The beam of light returning from the eyeball or the object being examined

[0097] 6a First angular range of the reflected beam

[0098] 6c Second angular range of the reflected beam

[0099] 7 detectors

[0100] 8 light sources

[0101] 10, 10' equipment

[0102] 12a First Lens

[0103] 12b Second Lens

[0104] 12c Third Lens

[0105] 12d Fourth Lens

[0106] 15. Optical devices or main optical components

[0107] 16a First Polarizing Filter

[0108] 16b Second Polarizing Filter

Claims

1. A device (10, 10') for examining an object or scanning an eyeball (1), comprising a scanning device (2, 2a) having a reflective surface (3), wherein at least one beam of light (4) emitted from a light source (8) is directed toward the reflective surface (3), wherein, By means of the scanning device (2), the reflected beam (5a) directed from the reflecting surface (3) towards the incident beam (4) can be swung within a first angle range (6a). Its features are, An optical mechanism is provided so that the emitted reflected beam (5a) can swing within a second angle range (6c) after passing through the optical mechanism, the second angle range (6c) being greater than the first angle range (6a).

2. The device according to claim 1, characterized in that, The second angle range (6c) is twice the first angle range (6a).

3. The device according to claim 1 or 2, characterized in that, The optical mechanism enables the reflected beam (5a) emitted from the reflecting surface (3) to return to the reflecting surface (3) and to swing from there through the second angle range (6c).

4. The device according to claim 3, characterized in that, The incident beam (4) can be directed onto the reflecting surface (3) at an angle different from that of the returning beam (5a).

5. The device according to any one of claims 1 to 4, characterized in that, The emitted reflected beam (5a) can be directed from the reflective surface (3) to the optical device (15) or the object to be inspected after passing through the optical mechanism so as to scan it.

6. The device according to claim 5, characterized in that, A detector (7) or only one detector (7) is set to detect the signal of the beam (5b) returned from the optical device (15) or the object under test or the returned beam (5b).

7. The device according to claim 6, characterized in that, The returning beam (5b) can be directed toward the reflecting surface (3), pass through the optical mechanism, and return to the reflecting surface (3) so as to be directed toward the detector (7).

8. The device according to claim 7, characterized in that, The outgoing beam (4) and the returning beam (5b) to the detector (7) can be guided in parallel and / or collinear.

9. The device according to any one of the preceding claims, characterized in that, The optical mechanism includes at least two polarizers (16a, 16b).

10. The device according to any one of the preceding claims, characterized in that, The optical mechanism includes at least two lenses (12a, 12b) or four lenses (12a, 12b, 12c, 12d).

11. The device according to any one of the preceding claims, characterized in that, The optical mechanism includes at least one curved mirror.

12. The device according to any one of the preceding claims, characterized in that, The scanning device (2) includes an X scanning device (2a) or is configured as an X scanning device (2a), wherein a Y scanning device (2b) is additionally provided.

13. The device according to claim 12, characterized in that, The Y-scanning device (2b) is constructed as a polarizing mirror, through which the outgoing reflected beam (5a) is reflected by two front polarizing mirrors (16a, 16b) and returned to the reflecting surface (3), so that it can be directed to the optical device (15) or the object to be inspected for scanning along the Y direction.

14. The device according to claim 12 or 13, characterized in that, It can guide the incident light on the Y scanning device (2b) through the lens (12c) or the third lens (12c), and can guide the outgoing light of the Y scanning device (2b) through another lens (12d) or the fourth lens (12d).

15. The device according to any one of the preceding claims, characterized in that, At least two lenses (12a, 12b, 12c, 12d) are arranged confocally to each other and / or are arranged confocally to each other with the intervention of one polarizer (16b) or two polarizers (16a, 16b).

Images