Supercritical carbon dioxide heat sink experiment system

Abstract

The invention relates to the technical field of heat exchange experiment equipment, in particular to a supercritical carbon dioxide heat sink experiment system which comprises a main loop and a bypass used for installing an experiment section, and a working medium pump and a flow adjusting valve are arranged on the main loop; the input section is positioned in front of the working medium pump and connected with a gas source; the inlet end and the outlet end of the bypass are connected with the main loop and located on the two sides of the flow adjusting valve respectively, the pipe diameter of the bypass is smaller than that of the main loop, and the length of the bypass is larger than that of the main loop. A main loop and a bypass are arranged, the pipe diameter of the bypass is smaller than that of the main loop, the pipeline length of the bypass is larger than that of the main loop, a flow adjusting valve is arranged on the main loop, and an experiment section is arranged on the bypass. In the process of gradually reducing the opening of the flow regulating valve, the shunting proportion of the bypass is more sensitive to the change of the opening of the valve, so that the shunting regulation is finer, the working medium can be gradually introduced into an experimental section, the smooth transition of the working medium flow is realized, and the influence of sudden flow change on an experimental result is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat exchange experiment equipment, more particularly to a supercritical carbon dioxide heat sink experiment system. BACKGROUND

[0002] As the core of the electronic industry, semiconductor chips are widely used in communication, medical treatment, intelligent manufacturing and other fields. With the continuous progress of technology and the growth of market demand, chips are accelerating towards high integration, multi-function, high power and miniaturization, which brings a significant increase in power density and a growing problem of heat accumulation. If the thermal effect cannot be effectively controlled, it will lead to local overheating, seriously affecting the performance stability and service life of the device. According to research statistics, about 55% of electronic equipment failures are closely related to temperature problems. Therefore, under the background of continuous improvement of chip manufacturing process, efficient thermal management technology has become a key bottleneck that needs to be broken through. Micro-channel heat sink provides a feasible solution to this challenge with its high specific surface area and excellent heat dissipation performance.

[0003] In the thermal management system, the working medium is the core medium of heat transfer, and its thermophysical properties directly determine the operating efficiency and stability of the system. Supercritical pressure fluid is considered as a promising working medium due to its unique thermodynamic behavior. When the pressure of the fluid exceeds its critical value, it no longer has a clear phase boundary. With the increase of temperature, this kind of fluid will show a significant specific heat peak under constant pressure conditions, and will experience a continuous transition from high-density "liquid-like" to low-density "gas-like", during which a large amount of heat can be absorbed, thereby improving the compactness and heat transfer efficiency of the thermal management system. If combined with micro-channel heat sink, supercritical fluid is expected to build a high-performance heat dissipation solution to meet the increasingly stringent requirements of advanced chip systems for thermal control.

[0004] The micro-channel heat sink experiment system is used to explore the heat dissipation capacity of micro-channel heat sinks of different types or different shapes, and the heat dissipation capacity is determined by measuring the temperature of the heater. For example, the prior art discloses a supercritical carbon dioxide micro-channel heat exchange experiment system, which includes a carbon dioxide gas supply system for providing supercritical carbon dioxide working medium and a carbon dioxide working medium circulation test system. The carbon dioxide working medium circulation test system includes a mass flow meter, a preheater, a vertical micro-channel heat exchange experiment section, a horizontal micro-channel heat exchange experiment section, etc. The experiment section is heated by a plurality of distributed heating units, so that different fluid inlet conditions and heat sink bottom heating conditions can be simulated.

[0005] However, the heat exchange experiment section has high precision control requirements for the temperature, flow and pressure of the fluid, and in the above technical solution, the fluid regulation is not fine enough. Once the supercritical fluid is heated, the volume will expand sharply due to the sharp change of the physical properties, which will bring difficulties to the accurate regulation of the fluid. Moreover, when the experimental conditions change, the working fluid flow is not stable, which will affect the accuracy of the heat transfer performance measurement. SUMMARY

[0006] In view of the problem that the fluid regulation in the prior art is not fine enough and affects the accuracy of the experimental results, the present application provides a supercritical carbon dioxide heat sink experimental system which can more finely regulate the fluid flow entering the experimental section and improve the accuracy of the experimental results.

[0007] To solve the above technical problems, the technical solution provided by the present application is: A supercritical carbon dioxide heat sink experimental system, comprising a main loop and a bypass for installing an experimental section, wherein the main loop is connected with an input section, a working fluid pump and a flow regulating valve are arranged on the main loop; the input section is located before the working fluid pump for connecting a gas source; the inlet end and the outlet end of the bypass are connected with the main loop and are located on the two sides of the flow regulating valve respectively, the pipe diameter of the bypass is smaller than that of the main loop, and the length of the bypass is greater than that of the main loop.

[0008] In the above technical solution, the experimental section is installed on the bypass. Before the experiment starts, the flow regulating valve is adjusted to the fully open state, and then a certain amount of working fluid is input into the main loop through the input section; because the pipe diameter of the bypass is smaller than that of the main loop, and the length of the bypass is greater than that of the main loop, the flow resistance of the working fluid is large, so the working fluid basically only circulates in the main loop at this time. When the experiment starts, the opening of the flow regulating valve is gradually reduced until the inlet flow of the bypass experimental section reaches the preset value. During the process of gradually reducing the opening of the flow regulating valve, the resistance of the main loop increases, while the bypass has small pipe diameter, large length and large resistance, so the shunt proportion is more sensitive to the change of the valve opening, which makes the shunt regulation more fine, and it is convenient to gradually introduce the working fluid into the experimental section to realize the smooth transition of the working fluid flow, avoiding the influence of flow mutation on the experimental results.

[0009] Preferably, the system further comprises a first circulation cooler, a second circulation cooler, a first water bath tank provided with a first water bath, and a second water bath tank provided with a second water bath; the inlet end and the outlet end of the first circulation cooler are both in communication with the first water bath, and the main circuit is at least partially located in the first water bath; the inlet end and the outlet end of the second circulation cooler are both in communication with the second water bath, and the bypass circuit is at least partially located in the second water bath. The first circulation cooler and the second circulation cooler are both prior art, and the specific structure and principle of the two will not be described in more detail in this specification. The first circulation cooler injects fluid at a set temperature into the first water bath, and the fluid absorbs heat and returns to the first circulation cooler through the inlet end of the first circulation cooler. The working process of the first circulation cooler is similar to that of the second circulation cooler. It can be understood that the temperature will have a certain impact on the state and pressure of the fluid, and the first water bath tank and the second water bath tank can stabilize the temperature and pressure of the fluid. Immersing the main circuit in the first water bath can ensure that the working medium in the main circuit is "liquid-like" with high density, thereby ensuring that the working medium pump can continue to operate normally, and at the same time, the working medium can flow more stably. The water temperature of the second water bath is lower than that of the first water bath, and immersing part of the bypass circuit in the second water bath can reduce the temperature of the fluid that has absorbed heat from the experimental section to a temperature close to that of the fluid in the main circuit, and then enter the main circuit to mix with other working media, thereby balancing the heat load between the two water baths and avoiding loss of control due to heat accumulation.

[0010] Preferably, a preheater is arranged on the bypass circuit, and the preheater is located between the inlet end of the bypass circuit and the second water bath. The preheater can heat the working medium to a set temperature required by the experiment, ensuring that the temperature of the working medium entering the experimental section is strictly consistent with the set value, thereby improving the accuracy of experimental data.

[0011] Preferably, the system further comprises an experimental section, the bypass circuit comprises a first pipe section and a second pipe section, the inlet end of the first pipe section and the outlet end of the second pipe section are both connected to the main circuit and are respectively connected to the two sides of the flow regulating valve, the outlet end of the first pipe section is in communication with the inlet end of the experimental section, and the inlet end of the second pipe section is in communication with the outlet end of the experimental section. The experimental section is used to install different types or different shapes of micro-channel heat sinks, so as to test the heat dissipation performance of different types or different shapes of micro-channel heat sinks.

[0012] Preferably, the experimental section comprises a bottom plate, a circuit board, a flow channel plate and a top plate connected in sequence; the top plate is provided with a first liquid inlet channel and a first liquid outlet channel; the flow channel plate comprises a plate main body and a filling block, the filling block is detachably connected with the plate main body, and a heat exchange flow channel is formed between the filling block and the plate main body; the inlet end of the first liquid inlet channel is in communication with the outlet end of the first pipe section, and the outlet end of the first liquid inlet channel is in communication with the inlet end of the heat exchange flow channel; the outlet end of the first liquid outlet channel is in communication with the inlet end of the second pipe section, and the inlet end of the first liquid outlet channel is in communication with the outlet end of the heat exchange flow channel. The filling block is used for mounting a micro-channel heat sink. During the experiment, the working medium enters the first liquid inlet channel from the first pipe section, then enters the heat exchange flow channel to contact and exchange heat with the micro-channel heat sink, and finally enters the second pipe section through the first liquid outlet channel.

[0013] Preferably, the experimental section further comprises a first sealing ring, a second sealing ring and a third sealing ring; the plate main body is provided with a second liquid inlet channel and a second liquid outlet channel, the first liquid inlet channel is in communication with the heat exchange flow channel through the second liquid inlet channel, and the first liquid outlet channel is in communication with the heat exchange flow channel through the second liquid outlet channel; the first sealing ring and the second sealing ring are located between the top plate and the plate main body and abut against both, the outlet end of the first liquid inlet channel and the inlet end of the second liquid inlet channel are located in the inner ring of the first sealing ring, and the inlet end of the first liquid outlet channel and the outlet end of the second liquid outlet channel are located in the inner ring of the second sealing ring; the filling block is located in the inner ring of the third sealing ring; the plate main body is provided with a third mounting ring groove, and the third sealing ring is mounted on the third mounting ring groove. The volume of the experimental section after overall assembly is relatively small, generally palm-sized, and the working medium in the experimental section is prone to leakage during the flow of high-pressure working medium. The first sealing ring, the second sealing ring and the third sealing ring can greatly improve the sealing performance of the experimental section, so that the experimental section can work normally for a long time under high-pressure working conditions.

[0014] Preferably, the circuit board comprises a substrate and a voltage measurement circuit, the substrate is provided with a heating section, a positive electrode and a negative electrode, and the two ends of the heating section are connected with the positive electrode and the negative electrode respectively; the two ends of the voltage measurement circuit are connected with the positive electrode and the negative electrode respectively, and the voltage measurement circuit is provided with a voltage measurement component. The positive electrode and the negative electrode are connected with a direct current power supply, so that the heating section is electrified to generate heat, which can restore the working condition of the heat source (such as a micro-scale chip) to a greater extent, thereby improving the reliability of the experimental results. The voltage measurement component can measure the voltage across the heating section. The temperature of the heating section has a linear relationship with its resistance value. During the experiment, the resistance of the heating section is calculated by measuring the current and voltage values across the heating section, and the average temperature of the region where the heating section is located can be obtained according to the fitted relationship. The temperature of the heating section can be accurately calculated in this way to obtain more accurate experimental data.

[0015] Preferably, the heating section is in a serpentine shape on the substrate. The serpentine heating path can increase the heating area, reduce local cold / hot spots, and make the heating section closer to the actual chip heating condition.

[0016] Preferably, the main circuit is provided with a first pressure relief valve and a safety valve; the first pipe section is provided with a second stop valve, which is located between the inlet end of the first pipe section and the preheater; the second pipe section is provided with a second pressure relief valve and a third stop valve, both of which are located between the second water bath and the outlet end of the second pipe section. Before the experiment starts, closing the second stop valve and the third stop valve can block the communication between the main circuit and the bypass, which is convenient for checking the airtightness of the main circuit and the bypass. The pressure relief valve will gradually open after reaching the preset pressure threshold, releasing excess working medium to make the pressure fall to the preset value of the experiment. When the system pressure suddenly rises to a dangerous value due to a fault, the safety valve will instantaneously open fully to quickly discharge a large amount of working medium, avoiding explosion or pipe rupture. The setting of the first pressure relief valve, the second pressure relief valve and the safety valve can improve the safety of the system.

[0017] Preferably, the main circuit and the bypass are both provided with a pressure transmitter and a plurality of temperature sensors; further comprising a pressure measurement bypass, one end of the pressure measurement bypass is connected with the first pipe section and located on the inlet side of the experimental section, the other end of the pressure measurement bypass is connected with the second pipe section and located on the outlet side of the experimental section, and the pressure measurement bypass is provided with a differential pressure transmitter; at least two temperature sensors are located on the inlet side and the outlet side of the experimental section respectively. The temperature sensors are used to monitor the temperature of the working medium at different positions of the system to obtain the temperature distribution of the system. The pressure transmitter is used to monitor the fluid pressure at different positions of the system to obtain the pressure distribution of the system. The differential pressure transmitter is used to measure the fluid pressure difference between the inlet end and the outlet end of the experimental section to confirm the flow resistance of the microchannel, which is convenient for the structural optimization of the microchannel heat sink.

[0018] Preferably, a mass flow meter is arranged on the bypass. The mass flow meter is used to measure the flow rate of the bypass, so as to obtain the real flow rate of the experimental section for post-experiment analysis.

[0019] Preferably, a filter is arranged on the main circuit between the working medium pump and the input section. The filter can filter out impurities in the working medium, ensuring the purity of the working medium, and facilitating long-term stable operation of the system, protecting key components and improving data reliability.

[0020] The present application has the following advantages: 1. The main circuit and the bypass with smaller pipe diameter and longer pipe length than the main circuit are arranged, a flow regulating valve is arranged on the main circuit, and the experimental section is arranged on the bypass. In the process of gradually reducing the opening degree of the flow regulating valve, the shunt ratio of the bypass is more sensitive to the change of the valve opening degree, so that the shunt adjustment is more fine, the working medium can be gradually introduced into the experimental section, the smooth transition of the working medium flow is realized, and the influence of flow mutation on the experimental results is avoided.

[0021] 2. The first water bath tank and the second water bath tank are arranged, at least part of the main circuit is immersed in the first water bath tank, which can ensure that the working medium in the main circuit is "liquid-like" with high density, thereby ensuring that the working medium pump can operate normally and continuously, and the working medium can flow more stably; at least part of the bypass is immersed in the second water bath tank, so that the temperature of the fluid absorbing heat from the experimental section can be reduced to be close to the temperature of the fluid in the main circuit, and then the fluid enters the main circuit to mix with other working medium, thereby balancing the heat load between the two water bath tanks.

[0022] 3. The first sealing ring, the second sealing ring and the third sealing ring arranged in the experimental section can greatly improve the sealing performance of the experimental section, so that the experimental section can operate normally for a long time under high pressure working conditions.

[0023] 4. The circuit board adopts a unique structure and wiring method, which can not only accurately calculate the heating temperature of the heating section, but also highly simulate the heating condition of the micro-scale chip, thereby improving the reliability of the experimental results. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 Fig. 1 is a structural schematic diagram of a supercritical carbon dioxide heat sink experimental system according to the present application; the arrow direction in the figure is the working medium flow direction; Figure 2 Fig. 2 is a structural schematic diagram of an experimental section; Figure 3 Fig. 3 is an exploded view of the experimental section; Figure 4 Fig. 4 is a sectional view of the experimental section; Figure 5 Fig. 5 is a structural schematic diagram of the bottom of a top plate; Figure 6is an exploded view of the flow channel plate; Figure 7 is a structural schematic view of the circuit board; Figure 8 is a structural schematic view of the heating section.

[0025] In the drawings: 1-main loop; 2-bypass; 201-first pipe section; 202-second pipe section; 3-input section; 4-flow regulating valve; 5-first circulating cooler; 6-first water bath tank; 601-first water bath; 7-second circulating cooler; 8-second water bath tank; 801-second water bath; 9-preheater; 10-bottom plate; 11-circuit board; 1101-substrate; 1102-voltage measurement circuit; 1103-heating section; 1104-positive electrode; 1105-negative electrode; 1106-voltage measurement assembly; 12-top plate; 1201-first liquid inlet channel; 1202-first liquid outlet channel; 1203-first mounting ring groove; 1204-second mounting ring groove; 13-plate body; 1301-heat exchange flow channel; 1302-second liquid inlet channel; 1303-second liquid outlet channel; 1304- accommodating groove; 1305-third mounting ring groove; 14-filling block; 15-first sealing ring; 16-second sealing ring; 17-third sealing ring; 18-first pressure relief valve; 19-safety valve; 20-second pressure relief valve; 21-second stop valve; 22-third stop valve; 23-pressure transmitter; 24-temperature sensor; 25-pressure measuring bypass; 26-pressure difference transmitter; 27-micro-channel heat sink; 28-filter; 29-mass flow meter; 30-working medium pump; 31-direct current power supply; 32-ammeter; 33-first stop valve. DETAILED DESCRIPTION

[0026] The drawings are only used for illustrative description, and cannot be understood as limiting the patent; in order to better illustrate the embodiment, some components in the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted. The positional relationship described in the drawings is only used for illustrative description, and cannot be understood as limiting the patent.

[0027] The same or similar reference numerals in the drawings of the embodiments of the present application correspond to the same or similar components; in the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "long" and "short" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the positional relationship in the drawings are only used for illustrative description, and cannot be understood as limiting the patent, and for those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0028] The technical solution of the present invention will be further described in detail below through specific embodiments and with reference to the accompanying drawings: Example 1 This embodiment is the first embodiment of a supercritical carbon dioxide heat sink experimental system, such as... Figure 1 As shown, it includes a main circuit 1 with a larger diameter and a bypass 2 with a smaller diameter. The length of the bypass 2 is greater than the length of the main circuit 1. The main circuit 1 is connected to an input section 3, and a working fluid pump 30 and a flow regulating valve 4 are installed on the main circuit 1. The input section 3 is located between the working fluid pump 30 and the gas source. A first shut-off valve 33 is installed on the input section 3. The first shut-off valve 33 is a needle valve. The inlet and outlet ends of the bypass 2 are connected to the main circuit 1 and are located on both sides of the flow regulating valve 4.

[0029] The diameter of bypass 2 is preferably within 50% of the diameter of main circuit 1. In this embodiment, the diameter of bypass 2 is 25% of the diameter of main circuit 1.

[0030] Furthermore, it also includes an experimental section (not labeled in the figure). Bypass 2 is divided into a first pipe section 201 and a second pipe section 202. The inlet end of the first pipe section 201 and the outlet end of the second pipe section 202 are both connected to the main circuit 1 and respectively connected to both sides of the flow regulating valve 4. The outlet end of the first pipe section 201 is connected to the inlet end of the experimental section, and the inlet end of the second pipe section 202 is connected to the outlet end of the experimental section. The experimental section is used to install microchannel heat sinks of different types or shapes to test the heat dissipation performance of microchannel heat sinks of different types or shapes.

[0031] Furthermore, the working fluid pump 30 is a gear pump. Compared with other pumps, gear pumps have the characteristic of more stable output flow, and pressure and flow can be more precisely regulated through external speed adjustment or valve control, resulting in higher operational reliability.

[0032] Furthermore, a mass flow meter 29 is installed on bypass 2. The mass flow meter 29 is used to measure the flow rate of bypass 2, thereby obtaining the actual flow rate data of bypass 2 for post-experiment analysis.

[0033] Furthermore, a filter 28 is installed on the main circuit 1, located between the working fluid pump 30 and the input section 3. The filter 28 can remove impurities from the working fluid, ensuring its purity, which is beneficial for the long-term stable operation of the system, protecting critical components, and improving data reliability.

[0034] The working principle or workflow of the embodiment: bypass 2 is used for installing the experimental section. Before the experiment starts, the flow regulating valve 4 is adjusted to the fully open state, then the first stop valve 33 is opened, a certain amount of working medium is input into the main loop 1 through the input section 3, and then the first stop valve 33 is closed; since the pipe diameter of the bypass 2 is smaller than that of the main loop 1, and the length of the bypass 2 pipeline is greater than that of the main loop 1 pipeline, the working medium flow resistance is large, so at this time the working medium basically only circulates in the main loop 1. When the experiment starts, gradually reduce the opening of the flow regulating valve 4 until the bypass experimental section inlet flow reaches the preset value. During the process of gradually reducing the opening of the flow regulating valve, the resistance of the main loop 1 gradually increases, while the bypass 2 is small in diameter, long in length, and large in resistance, so its shunt ratio is more sensitive to the change of the valve opening, making the shunt adjustment more delicate, which is convenient for gradually introducing the working medium into the experimental section, realizing the smooth transition of the working medium flow, and avoiding the influence of flow mutation on the experimental results.

[0035] Embodiment 2 The second embodiment of the supercritical carbon dioxide heat sink experimental system, which is similar to embodiment 1, differs in that, as shown in Figure 1 The first circulating cooler 5, the second circulating cooler 7, the first water bath box 6 provided with the first water bath 601, and the second water bath box 8 provided with the second water bath 801 are further included; the inlet end and the outlet end of the first circulating cooler 5 are in communication with the first water bath 601, and most of the main loop 1 is located in the first water bath 601; the inlet end and the outlet end of the second circulating cooler 7 are in communication with the second water bath 801, and a part of the bypass 2 located at the outlet end of the experimental section is located in the second water bath 801. The first circulating cooler 5 and the second circulating cooler 7 are both prior art, and the specific structure and principle of the two will not be described in more detail in this embodiment. The first circulating cooler 5 injects fluid at a set temperature into the first water bath 601, and these fluids return to the first circulating cooler 5 through the inlet end of the first circulating cooler 5 after absorbing heat. The working process of the first circulating cooler 5 is similar to that of the second circulating cooler 7. It can be understood that the temperature will have a certain influence on the state and pressure of the fluid, and the setting of the first water bath box 6 and the second water bath box 8 can stabilize the temperature and pressure of the fluid. Immersing the main loop 1 in the first water bath 601 can ensure that the working medium in the main loop 1 is all "liquid-like" with high density, thereby ensuring that the working medium pump 30 can continue to operate normally, and at the same time making the working medium flow more stably. The water temperature of the second water bath 801 is lower than that of the first water bath 601, and immersing part of the bypass 2 in the second water bath 801 can reduce the temperature of the fluid that has absorbed the heat of the experimental section to a temperature close to that of the fluid in the main loop 1, and then enter the main loop 1 to mix with other working medium, thereby balancing the heat load between the two water bath boxes and avoiding the loss of control caused by heat accumulation.

[0036] Further, the first pipe section 201 is provided with a preheater 9, which is located between the inlet end of the first pipe section 201 and the second water bath box 8. The preheater 9 can heat the working medium to the set temperature required by the experiment, ensuring that the temperature of the working medium entering the experimental section is strictly consistent with the set value, thereby improving the accuracy of the experimental data.

[0037] Further, in combination with Figures 1 to 6 As shown in the drawings, the experimental section includes, from bottom to top, a bottom plate 10, a circuit board 11, a flow channel plate, and a top plate 12; the bottom plate 10 and the top plate 12 are both made of 316L stainless steel, and the top plate 12 is provided with a first liquid inlet passage 1201 and a first liquid outlet passage 1202; the material of the flow channel plate needs to meet the requirements of low thermal conductivity (reducing heat leakage), high temperature resistance, and high strength at the same time, so the flow channel plate of the present embodiment is made of PEEK (polyether ether ketone) material, and the flow channel plate includes a plate body 13 and a filling block 14, the plate body 13 is provided with a receiving groove 1304 at the bottom, the filling block 14 is detachably connected with the plate body 13 by being installed on the receiving groove 1304, and a heat exchange flow channel 1301 is formed between the filling block 14 and the inner wall of the receiving groove 1304 of the plate body 13; the inlet end of the first liquid inlet passage 1201 is in communication with the outlet end of the first pipe section 201, and the outlet end of the first liquid inlet passage 1201 is in communication with the inlet end of the heat exchange flow channel 1301; the outlet end of the first liquid outlet passage 1202 is in communication with the inlet end of the second pipe section 202, and the inlet end of the first liquid outlet passage 1202 is in communication with the outlet end of the heat exchange flow channel 1301. The filling block 14 is used for installing the micro-channel heat sink 27. During the experiment, the working medium enters the first liquid inlet passage 1201 from the first pipe section 201, then enters the heat exchange flow channel 1301 to contact and exchange heat with the micro-channel heat sink 27, and finally enters the second pipe section 202 through the first liquid outlet passage 1202.

[0038] Further, the experimental section further comprises a first sealing ring 15, a second sealing ring 16 and a third sealing ring 17, the first sealing ring 15 and the second sealing ring 16 are fluorine rubber O-rings, and the third sealing ring 17 is a PTFE sealing ring; the plate body 13 is provided with a second liquid inlet channel 1302 and a second liquid outlet channel 1303, the first liquid inlet channel 1201 communicates with the heat exchange channel 1301 through the second liquid inlet channel 1302, and the first liquid outlet channel 1202 communicates with the heat exchange channel 1301 through the second liquid outlet channel 1303; the plate body 13 is provided with a first mounting ring groove 1203 and a second mounting ring groove 1204 at the bottom, and the first sealing ring 15 and the second sealing ring 16 are respectively mounted on the first mounting ring groove 1203 and the second mounting ring groove 1204; the outlet end of the first liquid inlet channel 1201 and the inlet end of the second liquid inlet channel 1302 are located in the inner ring of the first sealing ring 15, and the inlet end of the first liquid outlet channel 1202 and the outlet end of the second liquid outlet channel 1303 are located in the inner ring of the second sealing ring 16; the filling block 14 is located in the inner ring of the third sealing ring 17; the plate body 13 is provided with a third mounting ring groove 1305 at the bottom, and the third sealing ring 17 is mounted on the third mounting ring groove 1305. The volume of the experimental section after overall assembly is small, generally the size of a palm, and the working medium in the experimental section is prone to leakage during the flow of the high-pressure working medium. The first sealing ring 15, the second sealing ring 16 and the third sealing ring 17 can greatly improve the sealing performance of the experimental section, so that the experimental section can work normally for a long time under high-pressure working conditions.

[0039] Further, the main circuit 1 is provided with a first pressure relief valve 18 and a safety valve 19; the first pipe section 201 is provided with a second stop valve 21, the second stop valve 21 is a needle valve, and the second stop valve 21 is located between the inlet end of the first pipe section 201 and the preheater 9; the second pipe section 202 is provided with a second pressure relief valve 20 and a third stop valve 22, the third stop valve 22 is a ball valve, and the second pressure relief valve 20 and the third stop valve 22 are located between the second water bath box 8 and the outlet end of the second pipe section 202. Before the experiment starts, closing the second stop valve 21 and the third stop valve 22 can block the communication between the main circuit 1 and the bypass 2, which is convenient for checking the airtightness of the main circuit 1 and the bypass 2. The pressure relief valve will gradually open after the preset pressure threshold, release the excess working medium, and make the pressure fall to the experimental preset value. When the system pressure suddenly rises to a dangerous value due to a fault, the safety valve 19 is instantly fully opened to quickly discharge a large amount of working medium, thereby avoiding explosion or pipe rupture. The first pressure relief valve 18, the second pressure relief valve 20 and the safety valve 19 can improve the safety of the system.

[0040] Further, the main circuit 1 and the bypass circuit 2 are provided with pressure transmitters 23 and a plurality of temperature sensors 24, and the first water bath tank 601 and the second water bath tank 801 are each provided with a temperature sensor 24, wherein the pressure transmitter 23 is "P" in the figure, and the temperature sensor 24 is "T" in the figure. A pressure measuring bypass 25 is further included, one end of the pressure measuring bypass 25 is connected to the first pipe section 201 and located at the inlet side of the experimental section, the other end of the pressure measuring bypass 25 is connected to the second pipe section 202 and located at the outlet side of the experimental section, and the pressure measuring bypass 25 is provided with a differential pressure transmitter 26; two of the temperature sensors 24 are respectively located at the inlet side and the outlet side of the experimental section. The temperature sensors 24 are used to monitor the working medium temperature at different positions of the system to obtain the temperature distribution of the system. The pressure transmitters 23 are used to monitor the fluid pressure at different positions of the system to obtain the pressure distribution of the system. The differential pressure transmitter 26 is used to measure the fluid pressure difference between the inlet end and the outlet end of the experimental section to confirm the flow resistance of the micro-channel heat sink 27, so as to facilitate the structural optimization of the micro-channel heat sink 27.

[0041] The other features, working principles and beneficial effects of the embodiment are consistent with those of embodiment 1.

[0042] Embodiment 3 The embodiment is a third embodiment of a supercritical carbon dioxide heat sink experimental system, which is similar to embodiment 2, and the difference lies in that Figure 7 and Figure 8 As shown in the figures, the circuit board 11 includes a substrate 1101 and a voltage measurement circuit 1102, the substrate 1101 is provided with a heating section 1103, a positive electrode 1104 and a negative electrode 1105, the heating section 1103 is a copper wire, two ends of the heating section 1103 are connected to the positive electrode 1104 and the negative electrode 1105 respectively, and the heating section 1103 is located directly below the heat exchange flow channel 1301; two ends of the voltage measurement circuit 1102 are connected to the positive electrode 1104 and the negative electrode 1105 respectively, the voltage measurement circuit 1102 is provided with a voltage measurement component 1106, and the voltage measurement component 1106 is a voltage acquisition card in the prior art. The direct current power supply 31 is used to connect the positive electrode 1104 and the negative electrode 1105, so that the heating section 1103 is electrified to generate heat, which can restore the working condition of heat generation of a heat source (such as a micro-scale chip) to a greater extent, thereby improving the reliability of experimental results. The ammeter 32 is used to measure the current in the circuit, and the voltage measurement component 1106 is used to measure the voltage across the heating section 1103. The temperature of the heating section 1103 has a linear relationship with its resistance value, and in the experimental process, the resistance of the heating section 1103 is calculated by measuring the current and voltage values of the heating section 1103, and then the average temperature of the region where the heating section 1103 is located is obtained according to the fitted relationship. The temperature of the heating section 1103 can be accurately calculated in this way, so as to obtain more accurate experimental data.

[0043] Further, the heating segments 1103 are distributed in a serpentine manner on the substrate 1101. The serpentine heating path can increase the heating area and reduce local cold / hot spots, making the heating segments 1103 closer to the actual chip heat generation situation.

[0044] The other features, working principles and beneficial effects of this embodiment are consistent with those of Embodiment 2.

[0045] In the specific contents of the foregoing specific embodiments, each technical feature can be combined arbitrarily without contradiction. To make the description concise, all possible combinations of the foregoing technical features are not described, but as long as the combinations of the technical features do not contradict, they shall be considered as falling within the scope of the present disclosure.

[0046] Obviously, the above-described embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art, and here it is not necessary or possible to exhaust all the implementation modes. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A supercritical carbon dioxide heat sink experimental system, characterized in that, It includes a main circuit (1) and a bypass (2) for installing the experimental section. The main circuit (1) is connected to an input section (3). The main circuit (1) is equipped with a working fluid pump (30) and a flow regulating valve (4). The input section (3) is located before the working fluid pump (30) and is used to connect to the gas source. The inlet and outlet ends of the bypass (2) are connected to the main circuit (1) and are located on both sides of the flow regulating valve (4). The pipe diameter of the bypass (2) is smaller than that of the main circuit (1), and the length of the bypass (2) is greater than that of the main circuit (1).

2. The supercritical carbon dioxide heat sink experimental system according to claim 1, characterized in that, It also includes a first circulating cooler (5), a second circulating cooler (7), a first water bath tank (6) with a first water bath tank (601) and a second water bath tank (8) with a second water bath tank (801); the inlet and outlet of the first circulating cooler (5) are both connected to the first water bath tank (601), and the main circuit (1) is at least partially located in the first water bath tank (601); the inlet and outlet of the second circulating cooler (7) are both connected to the second water bath tank (801), and the bypass (2) is at least partially located in the second water bath tank (801).

3. The supercritical carbon dioxide heat sink experimental system according to claim 2, characterized in that, The bypass (2) is equipped with a preheater (9), which is located between the inlet end of the bypass (2) and the second water bath (8).

4. The supercritical carbon dioxide heat sink experimental system according to claim 3, characterized in that, It also includes an experimental section. The bypass (2) includes a first pipe section (201) and a second pipe section (202). The inlet end of the first pipe section (201) and the outlet end of the second pipe section (202) are both connected to the main circuit (1) and respectively connected to both sides of the flow regulating valve (4). The outlet end of the first pipe section (201) is connected to the inlet end of the experimental section, and the inlet end of the second pipe section (202) is connected to the outlet end of the experimental section.

5. The supercritical carbon dioxide heat sink experimental system according to claim 4, characterized in that, The experimental section includes a base plate (10), a circuit board (11), a flow channel plate, and a top plate (12) connected in sequence. The top plate (12) is provided with a first liquid inlet channel (1201) and a first liquid outlet channel (1202). The flow channel plate includes a plate body (13) and a filler block (14). The filler block (14) is detachably connected to the plate body (13), and a heat exchange flow channel (1301) is formed between the filler block (14) and the plate body (13). The inlet end of the first liquid inlet channel (1201) is connected to the outlet end of the first pipe section (201), and the outlet end of the first liquid inlet channel (1201) is connected to the inlet end of the heat exchange flow channel (1301). The outlet end of the first liquid outlet channel (1202) is connected to the inlet end of the second pipe section (202), and the inlet end of the first liquid outlet channel (1202) is connected to the outlet end of the heat exchange flow channel (1301).

6. The supercritical carbon dioxide heat sink experimental system according to claim 5, characterized in that, The experimental section also includes a first sealing ring (15), a second sealing ring (16), and a third sealing ring (17); the main body of the plate (13) is provided with a second liquid inlet channel (1302) and a second liquid outlet channel (1303), the first liquid inlet channel (1201) is connected to the heat exchange channel (1301) through the second liquid inlet channel (1302), and the first liquid outlet channel (1202) is connected to the heat exchange channel (1301) through the second liquid outlet channel (1303); the first sealing ring (15) and the second sealing ring (16) are both located on the top plate (12) and the main body of the plate. The body (13) is between and in contact with both of them. The outlet end of the first liquid inlet channel (1201) and the inlet end of the second liquid inlet channel (1302) are both located inside the inner ring of the first sealing ring (15). The inlet end of the first liquid outlet channel (1202) and the outlet end of the second liquid outlet channel (1303) are both located inside the inner ring of the second sealing ring (16). The filling block (14) is located inside the inner ring of the third sealing ring (17). The bottom of the plate body (13) is provided with a third mounting ring groove (1305), and the third sealing ring (17) is installed on the third mounting ring groove (1305).

7. The supercritical carbon dioxide heat sink experimental system according to claim 5, characterized in that, The circuit board (11) includes a substrate (1101) and a voltage measurement line (1102). The substrate (1101) is provided with a heating section (1103), a positive electrode (1104) and a negative electrode (1105). The two ends of the heating section (1103) are respectively connected to the positive electrode (1104) and the negative electrode (1105). The two ends of the voltage measurement line (1102) are respectively connected to the positive electrode (1104) and the negative electrode (1105). The voltage measurement line (1102) is provided with a voltage measurement component (1106).

8. The supercritical carbon dioxide heat sink experimental system according to claim 7, characterized in that, The heating section (1103) is distributed in a serpentine pattern on the substrate (1101).

9. The supercritical carbon dioxide heat sink experimental system according to claim 4, characterized in that, The main circuit (1) is provided with a first pressure relief valve (18) and a safety valve (19); the first pipe section (201) is provided with a second shut-off valve (21), which is located between the inlet end of the first pipe section (201) and the preheater (9); the second pipe section (202) is provided with a second pressure relief valve (20) and a third shut-off valve (22), which are both located between the second water bath (8) and the outlet end of the second pipe section (202).

10. A supercritical carbon dioxide heat sink experimental system according to any one of claims 4 to 9, characterized in that, The main circuit (1) and the bypass (2) are each equipped with a pressure transmitter (23) and multiple temperature sensors (24); it also includes a pressure bypass (25), one end of which is connected to the first pipe section (201) and located at the inlet side of the experimental section, and the other end of which is connected to the second pipe section (202) and located at the outlet side of the experimental section. The pressure bypass (25) is equipped with a differential pressure transmitter (26); at least two of the temperature sensors (24) are located at the inlet side and the outlet side of the experimental section, respectively.

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