Ion source detection device and detection method

Abstract

The present application relates to the technical field of ion source detection, and particularly relates to an ion source detection device and a detection method, aiming to solve the problem of probe interference detection accuracy of the existing detection device.The ion source detection device provided by the present application comprises a radial movement assembly, an axial movement assembly and Langmuir probes; a plurality of Langmuir probes are installed on the radial movement assembly and are annularly and uniformly distributed around the axis of the ion beam, and the radial movement assembly is installed on the axial movement assembly; the axial movement assembly is used to drive the radial movement assembly to move along the axial direction, and the radial movement assembly is used to drive the Langmuir probes to move along the radial direction to approach or move away from the axis of the ion beam.The present application ensures comprehensive detection of the ion beam through the annular array of Langmuir probes, and moving the annular array of Langmuir probes to different positions for detection through the axial movement assembly can avoid mutual interference of the Langmuir probes arranged along the length direction of the ion beam, thereby avoiding the problem of probe interference detection accuracy.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion source detection, in particular to an ion source detection device and a detection method. BACKGROUND

[0002] The basic function of an ion source is to ionize neutral atoms or molecules to form charged ions and focus them into a beam for subsequent processing or analysis. The parameters of the ion beam generated by the ion source device, such as the intensity of the ion beam, the energy distribution, the uniformity of the beam, the divergence angle of the beam, etc., have a crucial influence on the application effect of the ion beam.

[0003] The electron density of the ion beam generated by the existing ion source affects the transmission process, and in turn affects the quality and stability of the ion beam. When using Langmuir probes to detect the electron density, if multiple linear array type Langmuir probes are used for synchronous detection, the existence of the previous group of probes will cause changes in the characteristics of the ions (such as density, direction, energy distribution, etc.). This disturbance will propagate to the subsequent probes, thereby affecting the detection accuracy. SUMMARY

[0004] The purpose of the present application is to provide an ion source detection device and a detection method to solve the problem of probe interference with detection accuracy of the existing detection device.

[0005] To solve the above technical problems, the technical solution provided by the present application is as follows:

[0006] An ion source detection device, comprising a radial movement assembly, an axial movement assembly and a Langmuir probe; the axial direction of the ion beam is the axial direction, and the direction perpendicular to the axial direction of the ion beam is the radial direction;

[0007] A plurality of Langmuir probes are installed on the radial movement assembly and are evenly distributed in a ring around the axis of the ion beam, and the radial movement assembly is installed on the axial movement assembly;

[0008] The axial movement assembly is used to drive the radial movement assembly to move axially, and the radial movement assembly is used to drive the Langmuir probe to move radially towards or away from the axis of the ion beam.

[0009] Further, the radial movement assembly comprises a base, a probe seat and a chuck;

[0010] The Langmuir probe is installed on the probe seat, and a plurality of probe seats are slidingly installed on the base and are evenly distributed in a ring around the axis of the ion beam;

[0011] The chuck is rotatably installed on the base and is configured to be able to rotate around the axis of the ion beam;

[0012] The probe base is provided with a positioning pin, the base is provided with a radial slot extending in the radial direction, and the chuck is provided with an eccentric positioning slot; the positioning pin is simultaneously inserted into the radial slot and the eccentric positioning slot; the chuck rotates to make the eccentric positioning slot push the positioning pin to slide along the radial slot.

[0013] Further, the axial movement assembly comprises a cavity shell, a screw rod and a guide column;

[0014] The screw rod is installed on the cavity shell, the guide column is installed on the cavity shell and arranged in parallel with the screw rod, and the base is sleeved on the guide column and slides along the guide column;

[0015] The axial movement assembly further comprises a bevel gear; the bevel gear is rotationally installed on the base and engaged with the screw rod, and is configured to be able to rotate around its own axis to drive the base to move along the guide column.

[0016] Further, the radial movement assembly further comprises a worm and a worm wheel, and the worm wheel is sleeved on the chuck;

[0017] The worm is engaged with the worm wheel, and is configured to be able to rotate around its own axis to drive the worm wheel to rotate around its own axis, and further drive the chuck to rotate.

[0018] Further, the axial movement assembly further comprises a driving gear and a driven gear;

[0019] The driven gear is coaxially connected with the bevel gear, and the driving gear is engaged with the driven gear;

[0020] The driving gear is configured to be able to rotate around its own axis to drive the driven gear to rotate, and further drive the bevel gear to rotate.

[0021] Further, the ion source detection device further comprises a driving assembly, and the driving assembly comprises a central shaft, a spline shaft and a spline sleeve;

[0022] The central shaft is coaxially connected with the spline shaft, the spline sleeve is sleeved on the spline shaft and is in sliding connection with the spline shaft, and the spline sleeve is coaxially connected with the driving gear;

[0023] The central shaft is configured to be able to rotate around its own axis to drive the spline shaft, the spline sleeve and the driving gear to rotate.

[0024] Further, the driving assembly further comprises a tip seat and a limiting rod, and the tip seat is coaxially arranged with the spline shaft and rotationally installed on the spline shaft;

[0025] The radial movement assembly further comprises a catch cylinder, the worm is sleeved on and connected with the catch cylinder, a spiral groove is formed on the inner wall of the catch cylinder, a positioning pin is arranged on the end head seat, and the positioning pin is inserted into and moves along the spiral groove;

[0026] The central shaft is configured to be movable along its own axis to drive the end head seat to move, thereby driving the catch cylinder to rotate to drive the worm to rotate;

[0027] The limiting rod is connected with the end head seat, the limiting rod is inserted into the base and is slidingly installed on the base, and is used for preventing the end head seat from rotating.

[0028] Further, the driving assembly further comprises a driving shaft, the driving shaft is sleeved on the central shaft, a homologous pin is arranged on the central shaft, and a V-shaped groove is formed on the driving shaft;

[0029] The homologous pin is inserted into and slides along the V-shaped groove, and the driving shaft is configured to be rotatable around its own axis to drive the central shaft to rotate or move along its own axis direction through the V-shaped groove.

[0030] Further, the driving assembly further comprises a positioning cylinder, the positioning cylinder is sleeved on the central shaft, a U-shaped groove is formed on the central shaft, and a position blocking pin is arranged on the positioning cylinder;

[0031] The position blocking pin is inserted into and slides along the U-shaped groove.

[0032] In another aspect of the present application, an ion source detection method is provided, which uses the ion source detection device described above, and comprises the following steps:

[0033] Device inspection: check whether the ion source device is normally running, ensure that it can stably generate an ion beam, check whether the Langmuir probe is intact, clean, and free of oxidation or contamination, to ensure the measurement accuracy;

[0034] Parameter setting: according to the experimental requirements, set the acquisition frequency and voltage scanning range parameters of the terminal module, to ensure that the current-voltage characteristic curve of the Langmuir probe can be accurately obtained;

[0035] Ion beam detection: the axial movement assembly changes the position of the Langmuir probe in the axial direction, and drives the Langmuir probe to move to different positions on the ion beam propagation path, so as to detect different positions; during detection, the radial movement assembly changes the distance between the Langmuir probe and the ion beam axis, as the Langmuir probe gradually extends into the ion beam, the terminal module starts to collect the electric signal of the Langmuir probe, records the current-voltage characteristic curve of the ion beam at different depth positions, and after detection is completed, the Langmuir probe returns to the initial position;

[0036] Parameter extraction: the terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam, analyzes the uniformity of the ion density and energy distribution parameters of the ion beam at different depth positions and propagation paths, and judges whether the performance of the ion source device meets the requirements.

[0037] Based on the above technical solutions, the technical effects that can be achieved by the present application are as follows:

[0038] 1. The ion source detection device ensures comprehensive detection of the ion beam through the ring array of Langmuir probes, and moving the ring array of Langmuir probes to different positions for detection through the axial movement assembly can avoid mutual interference of the Langmuir probes arranged along the length direction of the ion beam, affecting the detection results, and avoiding the problem of probe interference with detection accuracy.

[0039] 2. The driving assembly can separately drive the axial movement assembly and the radial movement assembly, so that the Langmuir probe reciprocally moves in the axial and radial directions to complete detection at two positions. Two separate drives can be switched through the limiting guidance of the V-shaped groove and the U-shaped groove and the forward and reverse rotation of the driving shaft, and they do not affect each other. At the same time, the V-shaped groove and the U-shaped groove can reliably limit the movement distance of the Langmuir probe in the axial and radial directions, and the repeated positioning accuracy is high, which can ensure consistent detection position each time, improve detection accuracy and recheck effect, and is conducive to comparing detection results. Especially after replacing or adjusting parts of the ion source device, the detection position can be ensured to be consistent with the last time, so as to make accurate comparison with the last detection effect, and then confirm the adjustment effect and rule, thereby improving the debugging efficiency of the ion source device. Moreover, the mechanical action is reliable and stable, and compared with electrical control, it can avoid the problem that sensors are easily disturbed, which is conducive to further improving the detection accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0040] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0041] Figure 1 The structure schematic diagram of the ion source detection device provided by the embodiment of the present application is shown in the figure;

[0042] Figure 2 The structure schematic diagram in the hollow shell is shown in the figure;

[0043] Figure 3 The structure schematic diagram of the base related parts is shown in the figure;

[0044] Figure 4 Fig. 1 is a schematic diagram of an ion source apparatus according to an embodiment of the present application; Figure 3 Fig. 2 is an enlarged schematic diagram of part A in Fig. 1; Fig. 3 is a schematic diagram of a radial movement assembly according to an embodiment of the present application;

[0045] Fig. 4 is a schematic diagram of a driving assembly according to an embodiment of the present application; Figure 5 Fig. 5 is a schematic diagram of a structure of a helical gear related part; Fig. 6 is a schematic diagram of a structure of a driving assembly according to another embodiment of the present application;

[0046] Fig. 7 is a schematic diagram of a structure of a driving assembly according to another embodiment of the present application; Figure 6 Fig. 8 is a schematic diagram of a structure of a driving assembly according to another embodiment of the present application; Fig. 9 is an enlarged schematic diagram of part B in Fig. 1.

[0047] Fig. 10 is a schematic diagram of an ion source apparatus according to another embodiment of the present application. Figure 7 Fig. 11 is a schematic diagram of a radial movement assembly according to another embodiment of the present application. Fig. 12 is a schematic diagram of a driving assembly according to another embodiment of the present application.

[0048] Fig. 13 is a schematic diagram of a driving assembly according to another embodiment of the present application. Figure 8 Fig. 14 is a schematic diagram of a driving assembly according to another embodiment of the present application. Figure 7 Fig. 15 is an enlarged schematic diagram of part B in Fig. 1. Fig. 16 is a schematic diagram of an ion source apparatus according to another embodiment of the present application.

[0049] Fig. 17 is a schematic diagram of a radial movement assembly according to another embodiment of the present application. DETAILED DESCRIPTION

[0050] In order to make the objects, technical solutions, and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings for the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0051] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0052] The following will be combined with the accompanying drawings to make a detailed description of some embodiments of the present application. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0053] The electron density of the ion beam 10 affects the transmission process of the ion beam 10, and further affects the quality and stability of the ion beam 10 when the existing ion source generates the ion beam 10. When the Langmuir probe 300 is used to detect the electron density, if a plurality of linear array type Langmuir probes 300 are used for synchronous detection, the existence of the previous group of probes will cause the characteristics of the ions such as density, direction, energy distribution and the like to change, and the disturbance will propagate to the subsequent probes, thereby affecting the detection accuracy.

[0054] Therefore, the present application provides an ion source detection device, which comprises a radial movement assembly 100, an axial movement assembly 200 and a Langmuir probe 300; the axial direction of the ion beam 10 is the axial direction, and the direction perpendicular to the axial direction of the ion beam 10 is the radial direction; a plurality of Langmuir probes 300 are installed on the radial movement assembly 100 and are uniformly distributed in a ring shape around the axial line of the ion beam 10, and the radial movement assembly 100 is installed on the axial movement assembly 200; the axial movement assembly 200 is used to drive the radial movement assembly 100 to move along the axial direction, and the radial movement assembly 100 is used to drive the Langmuir probe 300 to move along the radial direction and approach or move away from the axial line of the ion beam 10.

[0055] The ion source detection device provided by the present application ensures comprehensive detection of the ion beam 10 through the ring array of Langmuir probes 300, and the Langmuir probes 300 arranged along the length direction of the ion beam 10 can avoid mutual interference and affect the detection results by moving the ring array of Langmuir probes 300 to different positions for detection through the axial movement assembly 200, thereby avoiding the problem of probe interference affecting the detection accuracy.

[0056] The following will be described in detail Figures 1-8 The structure and shape of the ion source detection device provided by the present embodiment will be described in detail:

[0057] In an optional solution of the present embodiment, the radial movement assembly 100 comprises a base 110, a probe seat 120 and a chuck 130, as shown in Figure 3 、 Figure 4 The Langmuir probe 300 is installed on the probe seat 120, a plurality of probe seats 120 are slidingly installed on the base 110 and are uniformly distributed in a ring shape around the axial line of the ion beam 10; the chuck 130 is rotationally installed on the base 110 and is configured to be able to rotate around the axial line of the ion beam 10; the probe seat 120 is provided with a positioning pin 121, the base 110 is provided with a radial slot extending along the radial direction, and the chuck 130 is provided with an eccentric positioning slot 131; the positioning pin 121 is simultaneously inserted into the radial slot and the eccentric positioning slot 131; the chuck 130 is rotated to make the eccentric positioning slot 131 push the positioning pin 121 to slide along the radial slot.

[0058] Specifically, the extension direction of the eccentric adjustment groove 131 is neither parallel to nor perpendicular to the radial direction, so that when the clamp 130 rotates, the eccentric adjustment groove 131 applies a thrust to the adjustment pin 121, causing the probe seat 120 to move radially, thereby changing the distance between the Langmuir probe 300 and the ion beam 10.

[0059] In this embodiment, the axial movement assembly 200 includes a cavity housing 210, a screw 220, and a guide post 230, such as Figure 3 As shown; the screw 220 is installed in the cavity housing 210, the guide post 230 is installed in the cavity housing 210 and is arranged parallel to the screw 220, the base 110 is fitted on the guide post 230 and slides along the guide post 230; the axial movement assembly 200 also includes a helical gear 240; the helical gear 240 is rotatably installed on the base 110 and the axis of rotation is perpendicular to the screw 220; the helical gear 240 meshes with the screw 220 and is configured to be able to rotate around its own axis to drive the base 110 to move along the guide post 230, thereby driving the radial movement assembly 100 and the Langmuir probe 300 to move axially and change the detection position.

[0060] Alternatively, the helical gear 240 can be replaced with a spur gear, and the screw 220 can be replaced with a rack. Transmission can be achieved through gear and rack meshing, but the stability of the engagement is slightly worse than that of the screw 220 and the helical gear 240.

[0061] Specifically, the radial movement assembly 100 also includes a worm gear 140 and a worm wheel 150, with the worm wheel 150 fitted onto the chuck 130. The worm gear 140 and worm wheel 150 are meshed and rotatably mounted on the base 110, configured to rotate around their own axis to drive the worm wheel 150 to rotate around its own axis, thereby driving the chuck 130 to rotate around its own axis to push the probe holder 120. That is, the worm wheel 150 is connected to and coaxially arranged with the chuck 130.

[0062] Furthermore, the axial movement assembly 200 also includes a driving gear 250 and a driven gear 260; the driven gear 260 is coaxially connected to the helical gear 240, and the driving gear 250 meshes with the driven gear 260; the driving gear 250 is configured to rotate about its own axis to drive the driven gear 260 to rotate, thereby driving the helical gear 240 to rotate. Specifically, as... Figure 5 As shown, both the driving gear 250 and the driven gear 260 are rotatably mounted on the base 110. The driving gear 250 is a sector gear to avoid interference with other parts.

[0063] In an optional solution of the embodiment, the ion source detection device further comprises a driving assembly 400, which comprises a central shaft 410, a spline shaft 420, and a spline sleeve 430; the central shaft 410 is coaxially connected with the spline shaft 420, the spline sleeve 430 is sleeved on the spline shaft 420 and is in sliding connection with the spline shaft 420, and the spline sleeve 430 is coaxially connected with the driving gear 250; the central shaft 410 is configured to be able to rotate around its own axis to drive the spline shaft 420, the spline sleeve 430, and the driving gear 250 to rotate. Specifically, the driving gear 250 is sleeved on the spline sleeve 430, and the spline sleeve 430 is rotationally installed on the base 110.

[0064] Further, the driving assembly 400 further comprises an end seat 440 and a limiting rod 450, as shown in Figure 7 、 Figure 8 The end seat 440 is coaxially arranged with the spline shaft 420 and is rotationally installed on the spline shaft 420; the radial movement assembly 100 further comprises a catch cylinder 160, which is rotationally installed on the base 110, and the worm 140 is sleeved on the catch cylinder 160 and is connected with the catch cylinder 160; the inner wall of the catch cylinder 160 is provided with a spiral groove 161, and the end seat 440 is provided with a positioning pin 441, which is inserted into the spiral groove 161 and moves along the spiral groove 161; the central shaft 410 is configured to be able to move along its own axis to drive the end seat 440 to move, thereby driving the catch cylinder 160 to rotate to drive the worm 140 to rotate.

[0065] In the embodiment, the limiting rod 450 is connected with the end seat 440, the limiting rod 450 is inserted into the base 110 and is slidingly installed on the base 110, and is used to prevent the end seat 440 from rotating. Specifically, the limiting rod 450 is arranged as a square rod, and other shapes such as a triangular cross section, a spline cross section, and a polygonal cross section can also be used. The rotation of the end seat 440 is avoided by the arrangement of the limiting rod 450, thereby ensuring that the catch cylinder 160 rotates to drive the worm 140 to rotate, and further driving the worm gear 150 to rotate and driving the Langmuir probe 300 to move radially.

[0066] In the embodiment, the driving assembly 400 further comprises a driving shaft 460, as shown in Figure 6 The driving shaft 460 is sleeved on the central shaft 410, the central shaft 410 is provided with a same-position pin 411, and the driving shaft 460 is provided with a V-shaped groove 461; the same-position pin 411 is inserted into the V-shaped groove 461 and slides along the V-shaped groove 461; the driving shaft 460 is configured to be able to rotate around its own axis to drive the central shaft 410 to rotate around its own axis or move along its own axis direction through the V-shaped groove 461.

[0067] Further, the driving assembly 400 further comprises a positioning cylinder 470 sleeved on the central shaft 410, the central shaft 410 is provided with a U-shaped groove 412, and the positioning cylinder 470 is provided with a blocking pin 471; the blocking pin 471 is inserted into the U-shaped groove 412 and slides along the U-shaped groove 412. Specifically, the U-shaped groove 412 comprises a longitudinal groove extending along the axis direction of the central shaft 410 and a circumferential groove extending along the circumferential direction of the central shaft 410, and the two longitudinal grooves are connected with two ends of the circumferential groove to form the U-shaped groove 412. The driving shaft 460 is connected with the motor to rotate the driving shaft 460 around its axis by the motor; the positioning cylinder 470 is installed on the base 110, and the driving shaft 460 is rotatably installed on the positioning cylinder 470.

[0068] The driving assembly 400 provided by the embodiment is used for driving the radial movement assembly 100 and the axial movement assembly 200 respectively, so that the two assemblies act independently.

[0069] Specifically, in the initial state, the blocking pin 471 is located at the corner of the U-shaped groove 412, and the homing pin 411 is located at the bottom of the V-shaped groove 461, that is, the turning position, as shown in Figure 6 .

[0070] In work, the driving shaft 460 rotates, and under the limitation of the blocking pin 471, the central shaft 410 cannot rotate, but moves along the axis direction of itself under the cooperation of the V-shaped groove 461 and the homing pin 411, at this time, the blocking pin 471 slides along the longitudinal groove, and further drives the spline shaft 420 and the end head base 440 to move, so as to drive the retainer cylinder 160 to rotate through the cooperation of the positioning pin 441 and the spiral groove 161, and further drives the worm 140 to rotate, the worm 140 drives the worm wheel 150 and the chuck 130 to rotate, and finally pushes the Langmuir probe 300 to move in the radial direction to the direction close to the ion beam 10 to insert into the ion beam 10 for detection.

[0071] After detection is completed, the driving shaft 460 reversely rotates, and correspondingly drives the Langmuir probe 300 to reset to the initial position, at this time, the positions of the blocking pin 471 and the homing pin 411 are as shown in Figure 6 . Subsequently, the driving shaft 460 continues to rotate, the homing pin 411 enters the other side of the V-shaped groove 461, at this time, the blocking pin 471 slides along the circumferential groove, that is, is limited by the circumferential groove, the central shaft 410 cannot move along the axis direction of itself, but can rotate, so as to drive the central shaft 410, the spline shaft 420, the spline sleeve 430 and the driving gear 250 to rotate through the cooperation of the homing pin 411 and the V-shaped groove 461, and further drives the driven gear 260 and the bevel gear 240 to rotate in sequence, so as to make the base 110 move in the axial direction to change the detection position.

[0072] When the blocking pin 471 reaches the other corner of the U-shaped groove 412, the central shaft 410 stops rotating, and the base 110 stops moving. The blocking pin 471 slides along the other longitudinal groove, i.e., the central shaft 410 moves along its axis, so that the radial movement assembly 100 works, and the Langmuir probe 300 moves radially to the direction of approaching the ion beam 10 to insert into the ion beam 10, so as to complete the detection of another position of the ion beam 10.

[0073] After the detection is completed, the driving shaft 460 reversely rotates, and the Langmuir probe 300 returns to the initial position. If the driving shaft 460 continues to rotate, the blocking pin 471 and the same-position pin 411 return to the Figure 6 initial state shown, so as to facilitate the next reciprocating movement and detection.

[0074] The driving assembly 400 of the embodiment can drive the axial movement assembly 200 alone, and then drive the radial movement assembly 100 and the Langmuir probe 300 to reciprocate along the axis at two positions. When the reciprocating end point is reached, the driving assembly 400 can drive the radial movement assembly 100 alone to drive the Langmuir probe 300 to approach the ion beam 10 for detection and return to the starting position. The two separate driving modes can be switched by the limiting and guiding of the V-shaped groove 461 and the U-shaped groove 412 and the forward and reverse rotation of the driving shaft 460, and the two modes do not affect each other.

[0075] Meanwhile, the V-shaped groove 461 and the U-shaped groove 412 can reliably limit the axial and radial movement distances of the Langmuir probe 300, i.e., control in a mechanical manner, so that the repeated positioning accuracy is high, the detection position is consistent each time, the detection accuracy and the rechecking effect are improved, and the comparison of detection results each time is facilitated. Especially after the ion source device 20 parts are replaced or adjusted, the detection position can be consistent with the last time, so as to facilitate the accurate comparison with the last detection effect, and then confirm the adjustment effect and the law, and improve the ion source device 20 debugging efficiency. Moreover, the mechanical action is reliable and stable, and compared with electrical control, the problem that sensors are easily disturbed can be avoided, and the detection accuracy is further improved.

[0076] The Langmuir probes 300 are arranged in a ring array around the central axis 410 of the ion beam 10. The ring array arrangement provides good symmetry, thereby enabling uniform collection of ions and electrons in the plasma, and thus providing more comprehensive and uniform measurement results. The spacing and number of the Langmuir probes 300 can be adjusted according to actual requirements to achieve high spatial resolution measurement, which is suitable for detailed analysis of the local characteristics of the plasma. The spacing of the Langmuir probes 300 from the central axis 410 of the ion beam 10 can be changed to measure the ion density, energy distribution and other characteristics of the ion beam 10 at different depth positions, so that the ion source device 20 components or operating parameters can be replaced or adjusted in time to ensure the uniformity of the ion beam 10 at different depth positions, and the application effect and efficiency of the ion beam 10 are improved.

[0077] In actual use, when the radial movement assembly 100 is at the two end positions of the axial stroke, the Langmuir probes 300 can be gradually extended into the ion beam 10 to complete the detection process of different depths at the same cross-sectional position of the ion beam 10, and after detection at one position is completed, the Langmuir probes 300 can be restored to the initial position to facilitate detection at another position and avoid the Langmuir probes 300 moving axially in contact with the ion beam 10, thereby further ensuring the detection accuracy by measuring the ion density distribution of the ion beam 10 at different positions during propagation.

[0078] It should be noted that when the Langmuir probes 300 extend into the ion beam 10, a sheath layer structure will be formed around the Langmuir probes 300. Therefore, in actual use, the spacing of the multiple Langmuir probes 300 should avoid mutual influence of their sheath layer structures, thereby further ensuring the detection accuracy.

[0079] When the Langmuir probes 300 are inserted into the ion beam 10, a sheath layer will be formed on the surface of the Langmuir probes 300 due to the potential difference between the Langmuir probes 300 and the surrounding plasma. Electrons, which are light in mass and fast in speed, first reach the surface of the Langmuir probes 300 and make it negatively charged. The electric field generated by the accumulation of electrons repels electrons and attracts ions until a dynamic balance is reached where the flow rates of electrons and ions are equal. By applying an adjustable positive / negative bias voltage, the Langmuir probes 300 can selectively collect electron or ion current, thereby obtaining a current-voltage characteristic curve of the measured ion beam 10 position within a voltage range. Subsequently, by analyzing and calculating the current-voltage characteristic curve, the key parameters of the ion beam 10 are extracted to achieve the purpose of detecting the parameters and performance of the ion beam 10 generated by the ion source device 20.

[0080] The ion source detection device provided by the embodiment can adjust the relative position of the Langmuir probe 300 and the ion beam 10, including adjustment of the axial and radial positions, can realize multiple detections of different positions of the ion beam 10, and thus increase the flexibility of detection and further improve the reliability and efficiency of detection. Meanwhile, the multiple Langmuir probes 300 arranged in a ring array at equal distances around the central axis 410 of the ion beam 10 can uniformly collect ions and electrons in the plasma, provide more uniform and accurate measurement results, and ensure the detection accuracy.

[0081] Based on the ion source detection device provided by the embodiment, an ion source detection method is provided, which adopts the ion source detection device and includes the following steps.

[0082] Device inspection: The ion source device 20 is inspected to ensure that it can stably generate the ion beam 10, and the Langmuir probe 300 is inspected to ensure that it is intact, clean, and free of oxidation or contamination, so as to ensure the measurement accuracy.

[0083] Parameter setting: According to the experimental requirements, the acquisition frequency and voltage scanning range parameters of the terminal module are set to ensure that the current-voltage characteristic curve of the Langmuir probe 300 can be accurately obtained.

[0084] Ion beam 10 detection: The axial movement assembly 200 changes the position of the Langmuir probe 300 in the axial direction, and drives the Langmuir probe 300 to move to different positions on the propagation path of the ion beam 10, so as to detect different positions. During detection, the radial movement assembly 100 changes the distance between the Langmuir probe 300 and the axis of the ion beam 10. As the Langmuir probe 300 gradually extends into the ion beam 10, the terminal module starts to collect the electric signal of the Langmuir probe 300, records the current-voltage characteristic curve of the ion beam 10 at different depth positions, and after the detection is completed, the Langmuir probe 300 returns to the initial position.

[0085] Parameter extraction: The terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam 10, analyzes the uniformity of the ion density and energy distribution parameters of the ion beam 10 at different depth positions and propagation paths, and judges whether the performance of the ion source device 20 meets the requirements.

[0086] In the preparation stage, the initial distance of the Langmuir probe 300 is adjusted according to the expected characteristics of the ion beam 10 to avoid mutual influence of the sheath structures. When reaching the detection position, the radial movement assembly 100 is started to gradually extend the Langmuir probe 300 into the ion beam 10, the terminal module collects the current-voltage characteristic curve, and after the detection is completed, the radial movement assembly 100 drives the Langmuir probe 300 to separate from the ion beam 10, so as to return to the initial position.

[0087] In the embodiment, the terminal module stores the current-voltage characteristic curve data of the collected Langmuir probe 300 for subsequent analysis and processing, analyzes and calculates the current-voltage characteristic curve of each detection position, and extracts key parameters of the ion beam 10, such as ion density and energy distribution. Specifically, the ion saturation current can be determined by the current value of the ion saturation region, the electron saturation current can be determined by the current value of the electron saturation region, and the electron temperature can be calculated by the current and voltage relationship of the transition region. By analyzing the uniformity of the ion density, energy distribution and other parameters of the ion beam 10 at different depth positions and propagation paths, it is determined whether the performance of the ion source device 20 meets the requirements, and the parts or operating parameters of the ion source device 20 are replaced or adjusted in time according to the detection results to ensure the uniformity of the ion beam 10 at different depth positions and propagation paths, and to improve the application effect and efficiency of the ion beam 10.

[0088] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An ion source detection apparatus, characterized by, The radial moving assembly (100), the axial moving assembly (200) and the Langmuir probe (300); the axial direction of the ion beam (10) is the axial direction, and the direction perpendicular to the axial line of the ion beam (10) is the radial direction; A plurality of the Langmuir probes (300) are installed on the radial moving assembly (100) and are evenly distributed in a ring around the axial line of the ion beam (10), and the radial moving assembly (100) is installed on the axial moving assembly (200); The axial moving assembly (200) is used to drive the radial moving assembly (100) to move along the axial direction, and the radial moving assembly (100) is used to drive the Langmuir probe (300) to move along the radial direction to approach or move away from the axial line of the ion beam (10); The radial moving assembly (100) comprises a base (110), a probe seat (120) and a chuck (130); The Langmuir probe (300) is installed on the probe seat (120), and a plurality of the probe seats (120) are slidingly installed on the base (110) and are evenly distributed in a ring around the axial line of the ion beam (10); The chuck (130) is rotationally installed on the base (110) and is configured to be able to rotate around the axial line of the ion beam (10); The probe seat (120) is provided with a positioning pin (121), the base (110) is provided with a radial slot extending along the radial direction, and the chuck (130) is provided with an eccentric positioning slot (131); the positioning pin (121) is simultaneously inserted into the radial slot and the eccentric positioning slot (131); the chuck (130) is rotated to make the eccentric positioning slot (131) push the positioning pin (121) to slide along the radial slot; The axial moving assembly (200) comprises a cavity shell (210), a screw rod (220) and a guide column (230); The screw rod (220) is installed on the cavity shell (210), the guide column (230) is installed on the cavity shell (210) and is arranged in parallel with the screw rod (220), and the base (110) is sleeved on the guide column (230) and slides along the guide column (230); The axial moving assembly (200) further comprises a helical gear (240); the helical gear (240) is rotationally installed on the base (110) and is engaged with the screw rod (220) and is configured to be able to rotate around its own axial line to drive the base (110) to move along the guide column (230).

2. The ion source detection apparatus of claim 1, wherein The radial moving assembly (100) further comprises a worm (140) and a worm wheel (150), and the worm wheel (150) is sleeved on the chuck (130); The worm (140) is engaged with the worm wheel (150) and is configured to be able to rotate around its own axial line to drive the worm wheel (150) to rotate around its own axial line, thereby driving the chuck (130) to rotate.

3. The ion source detection apparatus of claim 2, wherein The axial moving assembly (200) further comprises a driving gear (250) and a driven gear (260); The driven gear (260) is coaxially connected with the helical gear (240), and the driving gear (250) is engaged with the driven gear (260). The driving gear (250) is configured to rotate around its own axis to drive the driven gear (260) to rotate, and further drive the bevel gear (240) to rotate.

4. The ion source detection apparatus of claim 3, wherein The driving assembly (400) comprises a central shaft (410), a spline shaft (420) and a spline sleeve (430); The central shaft (410) is coaxially connected with the spline shaft (420), the spline sleeve (430) is sleeved on the spline shaft (420) and is in sliding connection with the spline shaft (420), and the spline sleeve (430) is coaxially connected with the driving gear (250); The central shaft (410) is configured to rotate around its own axis to drive the spline shaft (420), the spline sleeve (430) and the driving gear (250) to rotate.

5. The ion source detection apparatus of claim 4, wherein, The driving assembly (400) further comprises a head seat (440) and a limiting rod (450), the head seat (440) is coaxially arranged with the spline shaft (420) and is rotationally installed on the spline shaft (420); The radial movement assembly (100) further comprises a link cylinder (160), the worm (140) is sleeved on the link cylinder (160) and is connected with the link cylinder (160); a spiral groove (161) is formed in the inner wall of the link cylinder (160), a positioning pin (441) is arranged on the head seat (440), the positioning pin (441) is inserted into the spiral groove (161) and moves along the spiral groove (161); The central shaft (410) is configured to move along its own axis to drive the head seat (440) to move, and further drive the link cylinder (160) to rotate to drive the worm (140) to rotate; The limiting rod (450) is connected with the head seat (440), the limiting rod (450) is inserted into the base (110) and is slidingly installed on the base (110), and is used for preventing the head seat (440) from rotating.

6. The ion source detection apparatus of claim 5, wherein, The driving assembly (400) further comprises a driving shaft (460), the driving shaft (460) is sleeved on the central shaft (410), a same-position pin (411) is arranged on the central shaft (410), and a V-shaped groove (461) is formed in the driving shaft (460); The same-position pin (411) is inserted into the V-shaped groove (461) and slides along the V-shaped groove (461); the driving shaft (460) is configured to rotate around its own axis to drive the central shaft (410) to rotate around its own axis or move along its own axis direction through the V-shaped groove (461).

7. The ion source detection apparatus of claim 6, wherein, The driving assembly (400) further comprises a positioning cylinder (470), the positioning cylinder (470) is sleeved on the central shaft (410), a U-shaped groove (412) is formed in the central shaft (410), and a position-limiting pin (471) is arranged on the positioning cylinder (470); The position-limiting pin (471) is inserted into the U-shaped groove (412) and slides along the U-shaped groove (412).

8. An ion source detection method using the ion source detection apparatus according to any one of claims 1 to 7, characterized by, The method comprises the following steps: Device inspection: check whether the ion source device (20) is running normally, ensure that it can stably generate ion beam (10), check whether the Langmuir probe (300) is intact, clean, non-oxidized or contaminated, to ensure measurement accuracy; the ion source device (20) is located at the exit end of the ion beam (10), and the ion source detection device is located downstream of the ion beam (10) in the exit direction; Parameter setting: according to the experimental requirements, set the acquisition frequency and voltage scanning range parameters of the terminal module to ensure that the current-voltage characteristic curve of the Langmuir probe (300) can be accurately obtained; Ion beam (10) detection: the axial moving assembly (200) changes the position of the Langmuir probe (300) in the axial direction, and drives the Langmuir probe (300) to move to different positions on the propagation path of the ion beam (10), so as to detect different positions; during detection, the radial moving assembly (100) changes the distance between the Langmuir probe (300) and the axis of the ion beam (10), as the Langmuir probe (300) gradually extends into the ion beam (10), the terminal module starts to collect the electric signal of the Langmuir probe (300), records the current-voltage characteristic curve of the ion beam (10) at different depth positions, and after the detection is completed, the Langmuir probe (300) returns to the initial position; Parameter extraction: the terminal module analyzes and calculates the current-voltage characteristic curve of each detection position, extracts the key parameters of the ion beam (10), analyzes the uniformity of the ion density and energy distribution parameters of the ion beam (10) at different depth positions and propagation paths, and judges whether the performance of the ion source device (20) meets the requirements.

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