Feeding device for silicon carbide growth

Abstract

The invention discloses a silicon carbide growth feeding device which comprises a feeding box and a conveying mechanism installed in the feeding box, a crucible capable of moving up and down is arranged on the conveying mechanism, a uniform feeding assembly is arranged in the feeding box and comprises a guide disc, a feeding pipe is arranged on the guide disc in a sliding mode, a sliding pipe is rotationally arranged on the feeding pipe, and the sliding pipe is connected with the feeding box. A trowelling frame and a stirring frame are rotatably arranged at the bottom of the guide disc, a lifting assembly is arranged in the feeding box and comprises a plurality of lifting sliding rails fixedly connected to the interior of the feeding box, lifting threaded sliding blocks capable of moving up and down are slidably arranged in the lifting sliding rails, and vibrating bars and clamping blocks are installed on the lifting threaded sliding blocks; the uniform feeding assembly helps materials to be uniformly distributed and leveled, the lifting assembly achieves crucible lifting and material compaction, manual participation is not needed in the feeding process, the influence of human factors is reduced, the growth shape of silicon carbide crystals is regular, and waste of follow-up machining is reduced.

Description

Technical Field

[0001] This invention relates to the field of silicon carbide single crystal production technology, and more particularly to a feeding device for silicon carbide growth. Background Technology

[0002] Silicon carbide single crystal is a third-generation semiconductor material composed of silicon (Si) and carbon (C) in a 1:1 stoichiometric ratio. It possesses characteristics such as a large bandgap, high thermal conductivity, high breakdown electric field, and fast electron saturation migration velocity. Its structure exhibits polymorphism, with common crystal forms including 3C, 4H, 6H, and 15R. Different crystal forms exhibit significantly different physical properties. In the field of electronic devices, silicon carbide single crystal, due to its excellent electrical properties, such as high breakdown electric field strength and high saturation electron drift velocity, has become an ideal material for manufacturing high-temperature, high-voltage, and high-frequency electronic devices.

[0003] Traditional silicon carbide single crystal manufacturing often employs the physical vapor transport (PVT) method, which is based on the sublimation-recrystallization mechanism. In a high-temperature gradient environment, workers place a crucible containing silicon carbide raw materials into a growth furnace, causing the SiC raw materials to vaporize and recrystallize on the seed crystal. However, manual feeding inevitably causes shaking, and the flatness of the silicon carbide powder in the crucible will significantly affect the shape of the single crystal growth.

[0004] In the initial heating stage, there is a temperature difference between the edge and the interior of the crucible. The flatness of the silicon carbide powder further exacerbates this effect. Due to the uneven temperature, the sublimation rate of silicon carbide at the edge and the interior differs, resulting in inconsistent silicon carbide growth rates in different areas of the seed crystal. This uneven growth rate will cause defects such as protrusions or depressions on the surface of the final silicon carbide ingot. These defects not only affect the appearance quality of the ingot, but also bring many problems to the subsequent silicon carbide single crystal slicing process, reducing the slicing yield and increasing production costs. Therefore, in order to solve the above problems, a feeding device for silicon carbide growth is proposed. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a feeding device for silicon carbide growth.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A feeding device for silicon carbide growth includes a feeding box and a conveying mechanism installed inside it. A high-pressure furnace and a control cabinet are respectively installed on the top of the feeding box. A crucible that can move up and down is set on the conveying mechanism. A uniform feeding component is set inside the feeding box. The uniform feeding component includes a guide plate. A feeding pipe is slidably set on the guide plate. A sliding tube is rotatably set on the feeding pipe. A leveling frame and a stirring frame are rotatably set at the bottom of the guide plate. The guide plate is used for vortex-shaped circumferential feeding of material into the feeding pipe. The leveling frame and the stirring frame are used for leveling the material. The feeding box is equipped with a lifting assembly, which includes multiple lifting slide rails fixedly connected inside the feeding box. A lifting threaded slider that can move up and down is slidably arranged inside the lifting slide rail. A vibrating rod and a clamping block are installed on the lifting threaded slider. The vibrating rod is used to vibrate the material in the crucible evenly, and the clamping block is used to clamp the crucible.

[0007] The above technical solution further includes: A support frame is fixedly connected to the bottom of the feeding box, and a high-pressure furnace and a control cabinet are respectively installed on the top of the feeding box. A support plate is fixedly connected between the conveying mechanism and the feeding box. A conveying motor is installed on the side of the frame of the conveying mechanism, and conveying slide rails are symmetrically fixedly connected to the two sides of the frame of the conveying mechanism.

[0008] A sliding plate is slidably mounted on the conveying slide rail, and a fixed plate is fixedly connected to the chain of the conveying mechanism. A support frame is installed between the fixed plate and the sliding plate. A slot is provided on the support frame, and the crucible is placed inside the slot. A multi-stage lifting motor is installed at the bottom of the support frame, and a carrying plate is fixedly connected to the telescopic end of the multi-stage lifting motor. A gasket is fixedly connected to the bottom of the crucible, and the gasket is in contact with the top of the carrying plate.

[0009] The uniform feeding assembly also includes a uniform feeding motor mounted on a guide plate. The guide plate has corrugated grooves that slide relative to the feeding pipe. The guide plate is fixedly connected to the frame of the conveying mechanism. A drive shaft is fixedly connected to the output end of the uniform feeding motor. The drive shaft is fixedly connected to the smoothing frame and the mixing frame. A sliding plate is fixedly connected to the outside of the drive shaft. The sliding plate slides relative to the feeding pipe. A dustproof bag is fixedly connected to the bottom of the feeding pipe.

[0010] A movable motor is installed on the feed box. The output end of the movable motor is fixedly connected to a movable threaded rod that is rotatably connected to the feed box. A threaded slip ring is threadedly connected to the movable threaded rod. A guide rod that is fixedly connected to the feed box is slidably arranged on the threaded slip ring. The threaded slip ring slides relative to the sliding tube. A feeding hose is fixedly connected to one end of the sliding tube away from the feeding tube. A rotating sleeve that is rotatably connected to the feeding tube is fixedly connected to the sliding tube.

[0011] The lifting assembly also includes a lifting motor installed at the bottom of the feed box. The output end of the lifting motor is fixedly connected to a drive sprocket. The bottom of the feed box is also symmetrically rotatably connected to a pressure wheel. The inner sides of the multiple lifting slide rails are rotatably connected to lifting threaded rods. The end of the lifting threaded rod extending to the outside of the feed box is fixedly connected to a driven sprocket. A transmission chain is sleeved and connected between the drive sprocket, the multiple driven sprockets and the two pressure wheels.

[0012] The lifting threaded rod and the lifting threaded slider are threaded together. An electric telescopic rod is installed on the lifting threaded slider. The telescopic end of the electric telescopic rod is fixedly connected to a mounting plate. The vibrating rod and the clamping block are installed on the side of the mounting plate away from the electric telescopic rod.

[0013] The high-pressure furnace has a heating cylinder installed inside, an installation plate installed on the top of the high-pressure furnace, a seed crystal fixedly connected to the installation plate, a sealing ring fixedly connected to the bottom of the high-pressure furnace, and a sealing ring installed on the inner side of the sealing ring.

[0014] The present invention has the following beneficial effects: In this invention, the feeding tube adopts a vortex-shaped circumferential feeding method, which enables the silicon carbide powder to be more evenly distributed when entering the crucible. The leveling rack and stirring rack can further level the material entering the crucible. Compared with the traditional straight feeding method, the vortex feeding can avoid the local accumulation of material in the crucible, providing a uniform raw material environment for the growth of silicon carbide single crystals. This dual leveling mechanism ensures the flatness and uniformity of the material in the crucible.

[0015] In this invention, the lifting component enables precise up-and-down movement control of the crucible, accurately feeding the crucible into the high-pressure furnace. The vibrating rod on the lifting screw slide can vibrate the material inside the crucible, reducing the fluctuation of the silicon carbide powder caused by vibration during transportation. The vibration reduces the gaps between material particles, making the material more compact. It also promotes the expulsion of air from the material, improving the density and uniformity of the material. Attached Figure Description

[0016] Figure 1 This is a top view of the overall structure of the feeding device for silicon carbide growth proposed in this invention. Figure 2 This is a schematic diagram of the overall bottom view structure in this invention; Figure 3 This is a schematic diagram of the internal structure of the feed box in this invention; Figure 4 This is a schematic diagram of the conveying mechanism structure in this invention; Figure 5 This is a schematic diagram of the multi-stage lifting motor structure in this invention; Figure 6 This is a schematic diagram of the uniform feeding component structure in this invention; Figure 7 This is a schematic diagram of the lifting component structure in this invention; Figure 8 This is a schematic diagram of the internal structure of the high-pressure furnace in this invention; In the diagram: 1. Support frame; 2. Feed box; 3. High-pressure furnace; 4. Control cabinet; 5. Lifting slide rail; 6. Conveying mechanism; 7. Guide plate; 8. Threaded slip ring; 9. Crucible; 30. Sealing ring; 31. Sealing ring; 32. Heating cylinder; 33. Seed crystal; 34. Mounting plate; 50. Lifting motor; 51. Pressure roller; 52. Lifting threaded rod; 53. Lifting threaded slider; 54. Electric telescopic rod; 55. Mounting plate; 56. Vibrator; 57. Clamping block; 58. Driven sprocket; 59. Transmission chain; 510. Active... 60. Sprocket; 61. Support plate; 62. Conveyor rail; 63. Sliding plate; 64. Gasket; 65. Conveyor motor; 66. Multi-stage lifting motor; 67. Fixing plate; 68. Support frame; 69. Carrying plate; 70. Material distribution motor; 71. Actuating slide plate; 72. Smoothing frame; 73. Mixing frame; 74. Drive shaft; 76. Corrugated groove; 80. Feeding hose; 81. Moving motor; 82. Moving threaded rod; 83. Guide rod; 84. Sliding tube; 85. Rotating sleeve; 86. Feeding pipe; 87. Dustproof bag. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Example like Figures 1-8 As shown, the feeding device for silicon carbide growth proposed in this invention includes a feeding box 2 and a conveying mechanism 6 installed inside it. A high-pressure furnace 3 and a control cabinet 4 are respectively installed on the top of the feeding box 2. A crucible 9 that can move up and down is provided on the conveying mechanism 6. A uniform feeding component is provided inside the feeding box 2. The uniform feeding component includes a guide plate 7. A feeding pipe 86 is slidably arranged on the guide plate 7. A sliding pipe 84 is rotatably arranged on the feeding pipe 86. A leveling frame 72 and a stirring frame 73 are rotatably arranged at the bottom of the guide plate 7. The guide plate 7 is used for vortex-shaped circumferential feeding of the feeding pipe 86. The leveling frame 72 and the stirring frame 73 are used for leveling the material. The feed box 2 is equipped with a lifting assembly, which includes multiple lifting slide rails 5 fixedly connected inside the feed box 2. The lifting slide rails 5 are slidably equipped with lifting threaded sliders 53 that can move up and down. The lifting threaded sliders 53 are equipped with vibrating rods 56 and clamping blocks 57. The vibrating rods 56 are used to vibrate the material in the crucible 9 evenly, and the clamping blocks 57 are used to clamp the crucible 9 into the high-pressure furnace 3. Furthermore, to address the issue of uneven silicon carbide powder distribution inside the crucible, this design employs a uniform feeding assembly. The guide plate 7 is equipped with corrugated grooves 76, providing a track and guidance for the feeding tube 86. The feeding tube 86 feeds material circumferentially along a preset vortex trajectory on the guide plate 7. This feeding method ensures a more uniform distribution of material inside the crucible 9. Simultaneously, the sliding tube 84 rotatably mounted on the feeding tube 86 can be adjusted according to actual needs, ensuring proper feeding by the feeding tube 86.

[0019] When a certain amount of material falls into the crucible 9, the leveling frame 72 rotates, and its special conical structure can contact the surface of the material inside the crucible 9 to level the surface of the material, eliminate the unevenness caused by the accumulation of material, and make the surface of the material tend to be flat. The stirring frame 73 stirs the material by its own rotation, so that the material is fully mixed in the crucible 9, avoids the occurrence of uneven composition in some parts of the material, achieves the initial leveling of the material, and provides a uniform raw material basis for the subsequent growth of silicon carbide crystals.

[0020] Reference Figure 4 As shown, a support frame 1 is fixedly connected to the bottom of the feed box 2, a support plate 60 is fixedly connected between the conveying mechanism 6 and the feed box 2, a conveying motor 64 is installed on the side of the frame of the conveying mechanism 6, and conveying slide rails 61 are symmetrically fixedly connected to the two sides of the frame of the conveying mechanism 6. A sliding plate 62 is slidably mounted on the conveyor slide rail 61. A fixed plate 66 is fixedly connected to the chain of the conveyor mechanism 6. A support frame 67 is installed between the fixed plate 66 and the sliding plate 62. A slot 69 is provided on the support frame 67. The crucible 9 is placed inside the slot 69. A multi-stage lifting motor 65 is installed at the bottom of the support frame 67. A carrying plate 68 is fixedly connected to the telescopic end of the multi-stage lifting motor 65. A pad 63 is fixedly connected to the bottom of the crucible 9. The pad 63 is in contact with the top of the carrying plate 68. Furthermore, during the feeding process, as the amount of material increases, the position of the crucible 9 is adjusted by the multi-stage lifting motor 65, causing the crucible 9 to move downwards, so that the feeding pipe 86 can continuously and stably feed the material. After the feeding is completed, the conveying motor 64 drives the chain of the conveying mechanism 6 to start running. The chain's cyclical movement provides power for the conveying of the crucible 9. After the crucible 9 leaves the area of ​​the uniform feeding component, the multi-stage lifting motor 65 is activated to drive the crucible 9 to move upwards to the designated position (the position where the pad 63 and the support frame 67 are in contact). Furthermore, the conveying mechanism 6 is a conventional conveyor belt mechanism, which will not be described in detail here. Conveying rails 61 are symmetrically fixedly connected to the two side frames of the conveying mechanism 6. Sliding plates 62 are slidably mounted on the conveying rails 61. This sliding connection allows the sliding plates 62 to move smoothly in a straight line on the conveying rails 61. Simultaneously, a fixed plate 66 is fixedly connected to the chain, and a support frame 67 is installed between the fixed plate 66 and the sliding plate 62. As the chain rotates, the fixed plate 66 moves with the chain, thereby driving the support frame 67 and the sliding plate 62 to move together along the conveying rails 61, realizing the horizontal conveying of the support frame 67. A slot 69 is provided on the support frame 67, and the crucible 9 is placed inside the slot 69. The design of the slot 69 can accurately position and fix the crucible 9, preventing it from shaking or shifting during conveying, ensuring that the crucible 9 can be accurately conveyed to the designated position.

[0021] Reference Figure 6 As shown, the uniform feeding assembly also includes a uniform feeding motor 70 mounted on a guide plate 7. The guide plate 7 has a corrugated groove 76, which slides relative to the feeding pipe 86. The guide plate 7 is fixedly connected to the frame of the conveying mechanism 6. The output end of the uniform feeding motor 70 is fixedly connected to a drive shaft 74. The drive shaft 74 is fixedly connected to a smoothing frame 72 and a mixing frame 73. An actuating slide plate 71 is fixedly connected to the outside of the drive shaft 74. The actuating slide plate 71 slides relative to the feeding pipe 86. A dustproof bag 87 is fixedly connected to the bottom of the feeding pipe 86. A moving motor 81 is installed on the feed box 2. The output end of the moving motor 81 is fixedly connected to a moving threaded rod 82 that is rotatably connected to the feed box 2. A threaded slip ring 8 is threadedly connected to the moving threaded rod 82. A guide rod 83 that is fixedly connected to the feed box 2 is slidably arranged on the threaded slip ring 8. The threaded slip ring 8 slides relative to the sliding tube 84. A feeding hose 80 is fixedly connected to one end of the sliding tube 84 away from the feeding tube 86. A rotating sleeve 85 that is rotatably connected to the feeding tube 86 is fixedly connected to the sliding tube 84. Furthermore, during the feeding process, the feeding hose 80 is connected to an external feeding device. By pumping material and air into the hose 80, the moving motor 81 and the material equalization motor 70 are started. The guide plate 7 has a corrugated groove 76, and the feeding pipe 86 slides relative to the corrugated groove 76. The actuating slide plate 71, which is fixedly connected to the outside of the drive shaft 74, also rotates with the drive shaft 74, and slides relative to the feeding pipe 86. During the rotation of the actuating slide plate 71, its special shape and movement trajectory will push the feeding pipe 86 to make a vortex-shaped circular motion along the corrugated groove 76 on the guide plate 7, so that the feeding pipe 86 moves towards the center of the crucible 9. Furthermore, a dustproof bag 87 is fixedly connected to the bottom of the feeding pipe 86. When the material falls from the feeding pipe 86 into the crucible, the dustproof bag 87 can effectively prevent the material from generating dust.

[0022] Furthermore, during the vortex-shaped circular motion of the feeding pipe 86, since its radius of motion is constantly decreasing, and it is necessary to ensure that the feeding pipe 86 does not rotate relative to the crucible 9, a threaded slip ring 8 is slidably provided on the guide rod 83 fixedly connected to the feed box 2. The guide rod 83 plays a guiding role, ensuring that the threaded slip ring 8 can move stably and accurately along the predetermined direction. Furthermore, the threaded slip ring 8 slides relative to the sliding tube 84. The end of the sliding tube 84 away from the feeding tube 86 is fixedly connected to a feeding hose 80. The rotating sleeve 85 fixedly connected to the sliding tube 84 is rotatably connected to the feeding tube 86. When the threaded slip ring 8 moves, it will drive the sliding tube 84 to move together. The rotating sleeve 85 ensures that the sliding tube 84 can rotate relative to the feeding tube 86 during the movement, so that the movement of the sliding tube 84 is not restricted by the connection with the feeding tube 86. This allows it to better cooperate with the vortex-shaped circular motion of the feeding tube 86 and achieve stable and uniform material conveying.

[0023] Furthermore, after the material leveling motor 70 drives the transmission shaft 74 to rotate, since it is fixedly connected to the leveling frame 72 and the stirring frame 73, it will synchronously drive the leveling frame 72 and the stirring frame 73 to rotate. When the leveling frame 72 rotates, it can scrape and smooth the surface of the material falling into the crucible, eliminating the unevenness caused by the accumulation of material and making the surface of the material tend to be flat. When the stirring frame 73 rotates, it can stir the material, allowing the material to be fully mixed in the crucible, avoiding the occurrence of uneven composition in some areas of the material, and achieving the initial leveling of the material.

[0024] Furthermore, during the feeding process, as the amount of material increases, the position of the crucible 9 is adjusted by the multi-stage lifting motor 65, causing the crucible 9 to move downwards, so that the feeding pipe 86 can continuously and stably feed the material.

[0025] Reference Figure 7 As shown, the lifting assembly also includes a lifting motor 50 installed at the bottom of the feed box 2. The output end of the lifting motor 50 is fixedly connected to a drive sprocket 510. The bottom of the feed box 2 is also symmetrically rotatably connected to a pressure wheel 51. The inner side of multiple lifting slide rails 5 is rotatably connected to a lifting threaded rod 52. The end of the lifting threaded rod 52 extending to the outside of the feed box 2 is fixedly connected to a driven sprocket 58. A transmission chain 59 is sleeved and connected between the drive sprocket 510, multiple driven sprockets 58 and two pressure wheels 51. The lifting threaded rod 52 and the lifting threaded slider 53 are threadedly connected. An electric telescopic rod 54 is installed on the lifting threaded slider 53. The telescopic end of the electric telescopic rod 54 is fixedly connected to the mounting plate 55. The vibrating rod 56 and the clamping block 57 are installed on the side of the mounting plate 55 away from the electric telescopic rod 54. Furthermore, when the crucible 9 is transported to the lifting assembly area, the multi-stage lifting motor 65 is activated to drive the crucible 9 to move upward. At the same time, the telescopic end of the electric telescopic rod 54 extends, driving the mounting plate 55, which is fixedly connected to it, to move in a straight line. The movement of the mounting plate 55 will synchronously drive the vibrating rod 56 and the clamping block 57 to move together.

[0026] Furthermore, the electric telescopic rod 54 adjusts the position of the mounting plate 55 so that the clamping block 57 is close to the crucible. Then, the clamping block 57 firmly clamps the crucible to ensure that the crucible will not shake or fall off during subsequent movement. Next, the lifting motor 50 continues to work, driving the lifting threaded slider 53 to move upward through the transmission process, thereby lifting the clamping block 57 holding the crucible to the entrance position of the high-pressure furnace 3. At the same time, the shim 63 set on the multi-stage lifting motor 65 maintains contact with the crucible 9.

[0027] Furthermore, the above transmission process is as follows: First, the lifting motor 50 installed at the bottom of the feed box 2 is turned on, and the output end of the lifting motor 50 starts to rotate, thereby driving the drive sprocket 510 fixedly connected to it to rotate synchronously. Furthermore, since the pressure wheel 51 tensions the transmission chain 59, it ensures that the transmission chain 59 is always in a suitable tension state, making the power transmission more stable and reliable, and preventing slippage. Driven by the transmission chain 59, each driven sprocket 58 rotates synchronously with the rotation of the driving sprocket 510, thereby driving the lifting threaded rod 52, which is fixedly connected to the driven sprocket 58, to rotate inside the lifting slide rail 5. Furthermore, the lifting threaded rod 52 and the lifting threaded slider 53 are connected by a threaded connection. According to the principle of threaded transmission, when the lifting threaded rod 52 rotates, the lifting threaded slider 53 will move linearly along the axial direction of the lifting threaded rod 52. Because the lifting slide rail 5 plays a guiding and limiting role for the lifting threaded slider 53, the lifting threaded slider 53 can only move up and down along the path set by the lifting slide rail 5.

[0028] Furthermore, the uniform feeding component only performs preliminary leveling, and the crucible 9 may vibrate during transportation, causing the silicon carbide powder to become uneven. At this time, the vibrator 56 starts to work, generating high-frequency vibration and transmitting the vibration to the material inside the crucible. At the same time, the silicon carbide powder adhering to the inner wall of the crucible falls off. This vibration can further reduce the gaps between the material particles, making the material more compact and promoting the expulsion of air from inside the material. Furthermore, by using the lifting components and the multi-stage lifting motor 65 together, the crucible 9 is fed into the high-pressure furnace 3.

[0029] Reference Figure 8 As shown, a heating cylinder 32 is installed inside the high-pressure furnace 3, an installation plate 34 is installed on the top of the high-pressure furnace 3, a seed crystal 33 is fixedly connected to the installation plate 34, a sealing ring 30 is fixedly connected to the bottom of the high-pressure furnace 3, and a sealing ring 31 is installed on the inner side of the sealing ring 30. Furthermore, a sealing ring 30 is fixedly connected to the bottom of the high-pressure furnace 3. The sealing ring 30 and the gasket 63 are made of ceramic. The size of the sealing ring 30 is adapted to the gasket 63. Its main function is that when the crucible 9 enters the high-pressure furnace 3, the sealing ring 30 and the gasket 63 form a sealed whole. The sealing ring 31 installed inside the sealing ring 30 is made of ceramic. When the high-pressure furnace 3 is in working condition, a specific pressure environment needs to be maintained inside. The sealing ring 31 can effectively prevent internal gas leakage and also prevent external air or other impurities from entering the furnace, creating a stable and pure pressure environment for silicon carbide crystal growth. Furthermore, the mounting plate 34 installed on the top of the high-pressure furnace 3 provides a stable mounting position for the seed crystal 33. The seed crystal 33 provides an atomic arrangement template. The newly formed SiC crystal inherits the lattice orientation and polymorphic structure of the seed crystal. The high-purity silicon carbide powder reaches a high temperature (2000-2500°C) under the heating cylinder 32. The silicon carbide powder decomposes into gaseous components (such as Si, Si2C, SiC2, etc.). Driven by the axial temperature gradient (usually the temperature at the bottom of the crucible is higher than that at the top), the gaseous components diffuse to the seed crystal region with a lower temperature. The gaseous components are deposited on the surface of the seed crystal and grow epitaxially according to the lattice structure of the seed crystal, eventually forming a SiC single crystal.

[0030] In this embodiment, multiple sensors are installed in the feed box to determine the position of the crucible 9. The system is controlled by a PLC and driven by the control cabinet 4 to operate the electric telescopic rod 54, the lifting motor 50, the conveying motor 64, the material equalization motor 70, the moving motor 81, the multi-stage lifting motor 65, the heating cylinder 32, and the vibrating rod 56. After the crucible 9 enters the high-pressure furnace 3, the carrying plate 68 and the bottom of the sealing ring 30 come into contact with each other. At this time, the vacuum machine driven by the control cabinet 4 is used to evacuate the high-pressure furnace 3 into a vacuum state. At the same time, inert gas is introduced during the gasification process of the high-purity silicon carbide powder to prevent the carbon element from oxidizing.

[0031] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A feeding device for silicon carbide growth, comprising a feeding box (2) and a conveying mechanism (6) installed inside it, wherein a high-pressure furnace (3) and a control cabinet (4) are respectively installed on the top of the feeding box (2), characterized in that, The conveying mechanism (6) is provided with a crucible (9) that can move up and down. The feeding box (2) is provided with a uniform feeding component. The uniform feeding component includes a guide plate (7). A feeding pipe (86) is slidably provided on the guide plate (7). A sliding pipe (84) is rotatably provided on the feeding pipe (86). A smoothing frame (72) and a stirring frame (73) are rotatably provided at the bottom of the guide plate (7). The guide plate (7) is used for feeding the feeding pipe (86) in a vortex-like circular motion. The smoothing frame (72) and the stirring frame (73) are used for leveling the material. The feed box (2) is equipped with a lifting assembly, which includes multiple lifting slide rails (5) fixedly connected inside the feed box (2). The lifting slide rails (5) are slidably equipped with lifting threaded sliders (53) that can move up and down. The lifting threaded sliders (53) are equipped with vibrating rods (56) and clamping blocks (57). The vibrating rods (56) are used to vibrate the material in the crucible (9) evenly, and the clamping blocks (57) are used to clamp the crucible (9) into the high-pressure furnace (3).

2. The feeding device for silicon carbide growth according to claim 1, characterized in that, The bottom of the feed box (2) is fixedly connected to a support frame (1), and a support plate (60) is fixedly connected between the conveying mechanism (6) and the feed box (2). A conveying motor (64) is installed on the side of the frame of the conveying mechanism (6), and conveying slide rails (61) are symmetrically fixedly connected to the two sides of the frame of the conveying mechanism (6).

3. The feeding device for silicon carbide growth according to claim 2, characterized in that, A sliding plate (62) is slidably disposed on the conveying slide rail (61). A fixed plate (66) is fixedly connected to the chain of the conveying mechanism (6). A support frame (67) is installed between the fixed plate (66) and the sliding plate (62). A slot (69) is opened on the support frame (67). The crucible (9) is disposed inside the slot (69). A multi-stage lifting motor (65) is installed at the bottom of the support frame (67). A load plate (68) is fixedly connected to the telescopic end of the multi-stage lifting motor (65). A gasket (63) is fixedly connected to the bottom of the crucible (9). The gasket (63) is in contact with the top of the load plate (68).

4. The feeding device for silicon carbide growth according to claim 1, characterized in that, The uniform feeding assembly also includes a uniform feeding motor (70) mounted on a guide plate (7). The guide plate (7) has a corrugated groove (76) that slides relative to the feeding pipe (86). The guide plate (7) is fixedly connected to the frame of the conveying mechanism (6). The output end of the uniform feeding motor (70) is fixedly connected to a drive shaft (74). The drive shaft (74) is fixedly connected to a smoothing frame (72) and a mixing frame (73). A sliding plate (71) is fixedly connected to the outside of the drive shaft (74). The sliding plate (71) slides relative to the feeding pipe (86). A dustproof bag (87) is fixedly connected to the bottom of the feeding pipe (86).

5. The feeding device for silicon carbide growth according to claim 1, characterized in that, A moving motor (81) is installed on the feed box (2). The output end of the moving motor (81) is fixedly connected to a moving threaded rod (82) that is rotatably connected to the feed box (2). A threaded slip ring (8) is threadedly connected to the moving threaded rod (82). A guide rod (83) that is fixedly connected to the feed box (2) is slidably arranged on the threaded slip ring (8). The threaded slip ring (8) slides relative to the sliding tube (84). A feeding hose (80) is fixedly connected to one end of the sliding tube (84) away from the feeding tube (86). A rotating sleeve (85) that is rotatably connected to the feeding tube (86) is fixedly connected to the sliding tube (84).

6. The feeding device for silicon carbide growth according to claim 1, characterized in that, The lifting assembly also includes a lifting motor (50) installed at the bottom of the feed box (2). The output end of the lifting motor (50) is fixedly connected to a drive sprocket (510). The bottom of the feed box (2) is also symmetrically connected to a pressure wheel (51). The inner side of the multiple lifting slide rails (5) is rotatably connected to a lifting threaded rod (52). The end of the lifting threaded rod (52) extending to the outside of the feed box (2) is fixedly connected to a driven sprocket (58). A transmission chain (59) is sleeved between the drive sprocket (510), the multiple driven sprockets (58) and the two pressure wheels (51).

7. The feeding device for silicon carbide growth according to claim 6, characterized in that, The lifting threaded rod (52) is threadedly connected to the lifting threaded slider (53). An electric telescopic rod (54) is installed on the lifting threaded slider (53). The telescopic end of the electric telescopic rod (54) is fixedly connected to an installation plate (55). The vibrating rod (56) and the clamping block (57) are installed on the side of the installation plate (55) away from the electric telescopic rod (54).

8. The feeding device for silicon carbide growth according to claim 2, characterized in that, The high-pressure furnace (3) is equipped with a heating cylinder (32) inside. The high-pressure furnace (3) is equipped with an installation plate (34) on the top. A seed crystal (33) is fixedly connected to the installation plate (34). A sealing ring (30) is fixedly connected to the bottom of the high-pressure furnace (3). A sealing ring (31) is installed on the inner side of the sealing ring (30).

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