Breakage-proof crystal oscillator system for vacuum evaporator

Abstract

The invention relates to the technical field of crystal oscillation systems of vacuum evaporators, in particular to an anti-breakage crystal oscillation system for a vacuum evaporator, which comprises a first rotating mechanism and a support ring assembly mounted on the outer side of the lower end of the first rotating mechanism, and a carrier to be coated is connected to the interior of the lower part of the support ring assembly; a second rotating mechanism is arranged in an inner cavity of the first rotating mechanism in a sleeved mode, a rotating shaft of the second rotating mechanism is connected with a middle rotating shaft, the bottom end of the middle rotating shaft is connected with a crystal oscillator mechanism, a water cooling jacket used for storing cooling water is arranged in the water cooling shaft, and a position adjusting assembly is installed in the water cooling jacket. According to the breakage-proof crystal oscillation system for the vacuum evaporator, the temperature of cooling water in the water-cooling jacket is uniform, so that the cooling effect of the cooling water in the water-cooling jacket is improved, the breakage of the crystal oscillation sheet body caused by a high-temperature environment generated when the vacuum evaporator works is avoided, and the influence on the manufacturing of special electronic materials by the vacuum evaporator is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the crystal oscillator system technical field of vacuum evaporation machine, specifically to a kind of anti-breaking type crystal oscillator system for vacuum evaporation machine. BACKGROUND

[0002] Electronic special materials will be widely used in the process of manufacturing vacuum evaporation machine, and crystal oscillator system as a component of vacuum evaporation machine, mainly used for thin film deposition process key monitoring device, through the piezoelectric effect of quartz crystal realizes real-time thickness monitoring, ensures the uniformity and precision of coating, so as to make vacuum evaporation machine well for electronic special materials manufacturing work; For example, the patent application name "a crystal oscillator system of vacuum evaporation machine" disclosed in the prior art with the announcement number "CN120272864A", it discloses that the probe cap is connected with water cooling shaft, the water cooling shaft is provided with water cooling jacket, the water cooling jacket is annular hollow chamber, the water inlet of water cooling jacket is connected with water inlet pipe, the water outlet of water cooling jacket is connected with water outlet pipe, the water inlet and the water outlet are symmetrically arranged, the input end of water inlet pipe is connected with cooling water, the cooling water enters water cooling jacket from water inlet pipe and is discharged from water outlet pipe, forming circulating cooling water path, cooling the crystal oscillator piece mechanism, forming directional thermal radiation shielding of crystal oscillator piece mechanism.

[0003] The crystal oscillator system in the above-mentioned prior art, when using, is directly injecting cooling water into water cooling jacket for cooling operation, since the cooling water in water cooling jacket is in a static state, so that the temperature of cooling water below water cooling jacket is higher than that of cooling water above water cooling jacket, resulting in uneven temperature of cooling water in water cooling jacket, in turn, making the cooling effect of cooling water in water cooling jacket poor, which can cause the crystal oscillator piece body to break due to high temperature environment generated by vacuum evaporation machine during work, thus affecting the use of crystal oscillator piece body in later period, affecting the manufacture of electronic special materials by vacuum evaporation machine, therefore, we propose a kind of anti-breaking type crystal oscillator system for vacuum evaporation machine, in order to solve the problems raised in the above-mentioned. SUMMARY

[0004] The purpose of the present application is to provide a kind of anti-breaking type crystal oscillator system for vacuum evaporation machine, to solve the problems raised in the above-mentioned background art that the crystal oscillator system on the market is directly injecting cooling water into water cooling jacket for cooling operation when using, since the cooling water in water cooling jacket is in a static state, so that the temperature of cooling water below water cooling jacket is higher than that of cooling water above water cooling jacket, resulting in uneven temperature of cooling water in water cooling jacket, in turn, making the cooling effect of cooling water in water cooling jacket poor, which can cause the crystal oscillator piece body to break due to high temperature environment generated by vacuum evaporation machine during work, thus affecting the use of crystal oscillator piece body in later period, affecting the manufacture of electronic special materials by vacuum evaporation machine.

[0005] In order to achieve the above object, the present application provides the following technical scheme: a kind of anti-break type crystal oscillator system for vacuum evaporation machine, including first rotating mechanism and the support ring assembly of installation in its lower end outside, and the lower inside of support ring assembly is connected with the carrier to be plated, the second rotating mechanism is sleeved in the internal cavity of first rotating mechanism, and the rotating shaft of second rotating mechanism is connected with intermediate rotating shaft, and the bottom end of intermediate rotating shaft is connected with crystal oscillator piece mechanism, and the water-cooled shaft of being located in the upper of crystal oscillator piece mechanism is sleeved in the lower outside of intermediate rotating shaft, and the inside of water-cooled shaft is provided with water-cooled jacket for storing cooling water, the inside of water-cooled jacket is mounted with positioner assembly.

[0006] Preferably, the crystal oscillator piece mechanism includes crystal oscillator piece fixed seat, and the upper surface middle part of crystal oscillator piece fixed seat is fixed with fixed seat connecting rod for being locked with the bottom end of intermediate rotating shaft, and the inside of crystal oscillator piece fixed seat is provided with first through-hole for placing crystal oscillator body, and first through-hole is used as the passage of detecting film material, the outside of fixed seat connecting rod is slidably connected with crystal oscillator three-claw fixing disc for fixing crystal oscillator body, and crystal oscillator three-claw fixing disc is located in the upper part of crystal oscillator piece fixed seat.

[0007] Preferably, the lower outside of intermediate rotating shaft is fixed with vertical rod, and the lower end of vertical rod is in abutting contact with the upper surface of crystal oscillator three-claw fixing disc, and the inner side wall of crystal oscillator three-claw fixing disc is mounted with lug, and lug is slidably connected with the groove of fixed seat connecting rod outside, and the groove of fixed seat connecting rod outside is mounted with reset spring connected with lug.

[0008] Preferably, the lower part of crystal oscillator body is provided with probe cap connected with the bottom surface of water-cooled shaft, and the inside of probe cap is provided with second through-hole, by rotating crystal oscillator piece mechanism and crystal oscillator body driven by intermediate rotating shaft, so that one of crystal oscillator body is completely matched with the position of second through-hole, and the plating thickness of the vacuum evaporation machine under current state is monitored by the plating amount of one of crystal oscillator body.

[0009] Preferably, the upper part of crystal oscillator three-claw fixing disc is mounted with crystal oscillator detection device mounting block, and the inside of crystal oscillator detection device mounting block is provided with third through-hole, and the position of third through-hole is one-to-one corresponding with the position of first through-hole, and the detection end of crystal oscillator detection device is connected at third through-hole.

[0010] Preferably, the water inlet of the water-cooled jacket is connected with a water inlet pipe, and the water outlet of the water-cooled jacket is connected with a water outlet pipe, the top of the water-cooled shaft is connected with a protective sleeve sleeved outside the intermediate rotating shaft, and the top of the protective sleeve is connected with the bottom of the external adapter device, the water inlet pipe and the water outlet pipe are connected with the external adapter device through the interlayer between the protective sleeve and the intermediate rotating shaft, and the external connection end of the crystal vibration detection device is connected with the external crystal vibration detection mechanism through the interlayer between the protective sleeve and the intermediate rotating shaft.

[0011] Preferably, the outside of the water-cooled shaft is sleeved with a probe outer cylinder, the probe outer cylinder extends upward to be connected with the third rotating mechanism, the lower part of the probe outer cylinder is connected with a light control structure for detecting the refractive index or light transmittance of the coating on the light control structure, the third rotating mechanism is used for rotating the light control structure, and the bottom of the probe outer cylinder is flush with the probe cap; The upper end of the first rotating mechanism is connected with the lower end of the shaft of the magnetic fluid through two rotating gears connected with each other, the upper end of the shaft of the magnetic fluid is connected with the external driver through a chain wheel assembly, a multi-stage transmission system is formed, the stable rotation of the first rotating mechanism is ensured, and the upper ends of the first rotating mechanism, the second rotating mechanism, the third rotating mechanism, the magnetic fluid and the external adapter device all penetrate into the inside of the dustproof outer shell; The upper end of the third rotating mechanism is connected with the motor through two control gears installed in the dustproof outer shell to form a rotating structure.

[0012] Preferably, the water-cooled jacket is a hollow chamber in the shape of a circular ring, the position adjusting assembly comprises a single-rotation reciprocating screw rod installed in the inside of the water-cooled jacket, a fan body is fixed to the upper side of the single-rotation reciprocating screw rod, a water inlet pipe is arranged on the left side of the fan body, the transverse center line of the water inlet pipe is not on the same horizontal line as the transverse center line of the single-rotation reciprocating screw rod, an annular plate is threadedly connected to the outside of the single-rotation reciprocating screw rod, rotating rods are installed on the inner side and the outer side of the annular plate at equal intervals, swing plates are installed on the outside of the rotating rods, a spiral spring is embedded on the outside of one end of the rotating rod, and a fixed rod is installed in the inside of the water-cooled jacket.

[0013] Preferably, water changing cavities are installed in the inside of the water-cooled jacket at equal intervals, a piston assembly is attached to the inside of the water changing cavities, the upper end of the piston assembly is connected with the bottom surface of the annular plate, a water inlet pipe and a water outlet pipe are installed in the lower part of the water changing cavities, the upper end of the water inlet pipe in the shape of an "L" penetrates the inside of the annular plate, and the highest point of the water inlet pipe is higher than the highest point of the annular plate.

[0014] Preferably, the bottom surface of the annular plate is equidistantly provided with air storage bags, and the bottom surface of the air storage bag is connected with the inside of the water cooling jacket.

[0015] Compared with the prior art, the crystal oscillator system for the vacuum evaporation machine has the advantages that the temperature of the cooling water in the water cooling jacket is uniform, the cooling effect of the cooling water in the water cooling jacket is improved, the high-temperature environment generated during the operation of the vacuum evaporation machine does not cause the crystal oscillator body to break, and the vacuum evaporation machine does not affect the manufacturing of electronic special materials, and the specific contents are as follows: (1) The water in the water inlet pipe drives the fan body and the single-rotation reciprocating screw rod to rotate, the single-rotation reciprocating screw rod drives the annular plate to reciprocatingly lift, and the fixed rod drives the swing plate to reciprocatingly swing, so that the swing plate stirs the water in the water cooling jacket up and down, the temperature of the cooling water in the water cooling jacket is uniform, the cooling effect of the cooling water in the water cooling jacket is improved, the high-temperature environment generated during the operation of the vacuum evaporation machine does not cause the crystal oscillator body to break, and the vacuum evaporation machine does not affect the manufacturing of electronic special materials. (2) Further, the annular plate drives the piston assembly to lift up and down at the same time, so that the water in the bottom surface of the water cooling jacket is intermittently pumped into the water cooling jacket and sprayed upward through the water spraying pipe, the water below and the water above are well mixed, and the temperature uniformity of the cooling water in the water cooling jacket is further improved. (3) Further, the annular plate reciprocatingly presses the air storage bag at the same time of lifting, so that the volume of the air storage bag expands, the air storage bag can further stir the water in the water cooling jacket, and the temperature uniformity of the cooling water in the water cooling jacket is further improved.

[0016] (4) When the vertical rod is separated from the crystal oscillator three-claw fixing disc, the crystal oscillator three-claw fixing disc is automatically driven upward by the force storage of the return spring, so that the fixing of the crystal oscillator three-claw fixing disc to the crystal oscillator body is automatically released, and the crystal oscillator body is convenient to replace later. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a three-dimensional structure schematic diagram of the present application; Figure 2 It is a three-dimensional structure schematic diagram of the first rotating mechanism of the present application; Figure 3 It is a sectional structure schematic diagram of the first rotating mechanism of the present application; Figure 4 It is a sectional structure schematic diagram of the water cooling shaft of the present application; Figure 5 It is a bottom structure schematic diagram of the water cooling shaft of the present application; Figure 6 It is a sectional structure schematic diagram of the crystal oscillator plate mechanism of the present application; Figure 7 Figure 1 is a schematic diagram of the crystal oscillator fixing seat and crystal oscillator three claw fixing disc separation structure of the present application; Figure 8 Figure 2 is a schematic diagram of the water cooling jacket horizontal cross-sectional structure of the present application; Figure 9 Figure 3 is a schematic diagram of the water cooling jacket main cross-sectional structure of the present application; Figure 10 Figure 4 is a schematic diagram of the present application Figure 9 Figure 5 is an enlarged structure schematic diagram of the present application Figure 11 Figure 6 is a schematic diagram of the annular plate three-dimensional structure of the present application; Figure 12 Figure 7 is a schematic diagram of the present application Figure 11 Figure 8 is an enlarged structure schematic diagram of the present application Figure 13 Figure 9 is a schematic diagram of the water exchange cavity cross-sectional structure of the present application; Figure 14 Figure 10 is a schematic diagram of the present application Figure 6 Figure 11 is an enlarged structure schematic diagram of the present application.

[0018] In the figure: 1, first rotating mechanism; 101, support ring assembly; 2, second rotating mechanism; 201, intermediate rotating shaft; 202, vertical rod; 3, crystal oscillator piece mechanism; 301, crystal oscillator piece fixing seat; 302, crystal oscillator three claw fixing disc; 303, fixing seat connecting rod; 304, crystal oscillator piece body; 305, first through hole; 306, probe cap; 307, second through hole; 308, protruding block; 309, return spring; 4, water cooling shaft; 401, water cooling jacket; 402, protective sleeve; 403, external adapter device; 404, water inlet pipe; 405, water outlet pipe; 5, probe outer cylinder; 6, third rotating mechanism; 7, light control structure; 8, dustproof outer shell; 9, magnetic fluid; 10, rotating gear; 11, crystal oscillator detection device mounting block; 111, third through hole; 12, annular plate; 121, rotating rod; 122, swing plate; 123, vortex spring; 13, single rotating reciprocating screw rod; 131, fan body; 14, water exchange cavity; 141, piston assembly; 142, water suction pipe; 143, water spray pipe; 15, gas storage air bag; 16, fixing rod. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0020] Please refer to Figures 1-14 The present application provides the following technical solutions: Embodiment one: the anti-breaking crystal oscillator system for the vacuum evaporation machine in the embodiment can further improve the temperature uniformity of the cooling water in the water-cooled jacket 401, thereby improving the cooling effect of the cooling water in the water-cooled jacket 401, avoiding the fracture of the crystal oscillator body 304 caused by the high-temperature environment during the operation of the vacuum evaporation machine, and avoiding the influence on the manufacturing of electronic special materials by the vacuum evaporation machine. For specific structure, please refer to the attached Figures 1-13 As shown, it comprises a first rotating mechanism 1 and a support ring assembly 101 mounted on the outer side of the lower end thereof, and a carrier to be coated is connected below the inner side of the support ring assembly 101, a second rotating mechanism 2 is sleeved in the inner cavity of the first rotating mechanism 1, the rotating shaft of the second rotating mechanism 2 is connected with an intermediate rotating shaft 201, the bottom end of the intermediate rotating shaft 201 is connected with a crystal oscillator mechanism 3, a water-cooled shaft 4 located above the crystal oscillator mechanism 3 is sleeved on the outer side below the intermediate rotating shaft 201, and a water-cooled jacket 401 for storing cooling water is arranged in the inner side of the water-cooled shaft 4, a positioning assembly is mounted in the inner side of the water-cooled jacket 401, the crystal oscillator mechanism 3 comprises a crystal oscillator fixed seat 301, a fixed seat connecting rod 303 for locking connection with the bottom end of the intermediate rotating shaft 201 is fixed on the upper surface of the middle part of the crystal oscillator fixed seat 301, a first through hole 305 for placing a crystal oscillator body 304 is formed in the inner side of the crystal oscillator fixed seat 301, the first through hole 305 serves as a channel for detecting film material, a crystal oscillator three-claw fixing disc 302 for fixing the crystal oscillator body 304 is slidably connected on the outer side of the fixed seat connecting rod 303, and the crystal oscillator three-claw fixing disc 302 is located on the upper part of the crystal oscillator fixed seat 301.

[0021] The lower part of the crystal vibration piece body 304 is provided with a probe cap 306 connected with the bottom surface of the water-cooled shaft 4, and the inside of the probe cap 306 is provided with a second through hole 307. The crystal vibration piece mechanism 3 and the crystal vibration piece body 304 are driven to rotate through the intermediate rotating shaft 201, so that one of the crystal vibration piece bodies 304 is completely matched with the position of the second through hole 307. The plating film thickness of the vacuum evaporation machine under the current state is monitored through the plating film amount of one of the crystal vibration piece bodies 304. The upper part of the crystal vibration three-claw fixing disc 302 is provided with a crystal vibration detection device mounting block 11, and the inside of the crystal vibration detection device mounting block 11 is provided with a third through hole 111. The position of the third through hole 111 corresponds to the position of the first through hole 305 one by one, and the detection end of the crystal vibration detection device is connected at the third through hole 111. The water inlet in the water-cooled jacket 401 is connected with a water inlet pipe 404, and the water outlet in the water-cooled jacket 401 is connected with a water outlet pipe 405. The top of the water-cooled shaft 4 is locked with a protective sleeve 402 sleeved outside the intermediate rotating shaft 201, and the top of the protective sleeve 402 is locked and connected with the bottom of the external adapter equipment 403. The water inlet pipe 404 and the water outlet pipe 405 are connected with the external adapter equipment 403 through the interlayer between the protective sleeve 402 and the intermediate rotating shaft 201. The external connection end of the crystal vibration detection device is connected with the external crystal vibration detection mechanism through the interlayer between the protective sleeve 402 and the intermediate rotating shaft 201. The outside of the water-cooled shaft 4 is sleeved with a probe outer cylinder 5, which extends upward to be connected with a third rotating mechanism 6. The lower part of the probe outer cylinder 5 is connected with a light control structure 7 for detecting the refractive index or light transmittance of the plating film on the light control structure 7. The third rotating mechanism 6 is used for rotating the light control structure 7, and the bottom of the probe outer cylinder 5 is flush with the probe cap 306. The upper end outside of the first rotating mechanism 1 is connected with the lower end of the shaft of the magnetic fluid 9 through two rotating gears 10 connected with each other. The upper end of the shaft of the magnetic fluid 9 is connected with an external driver through a chain wheel assembly, forming a multi-stage transmission system to ensure stable rotation of the first rotating mechanism 1. The upper ends of the first rotating mechanism 1, the second rotating mechanism 2, the third rotating mechanism 6, the magnetic fluid 9 and the external adapter equipment 403 all penetrate into the inside of the dustproof outer shell 8; The upper end of the third rotating mechanism 6 is connected with the motor through two control gears installed in the dustproof shell 8, the water-cooled jacket 401 is a hollow cavity in a circular ring shape, the position adjusting assembly comprises a single-rotation reciprocating screw rod 13 installed in the water-cooled jacket 401, a fan body 131 is fixed to the upper side of the single-rotation reciprocating screw rod 13, a water inlet pipe 404 is arranged on the left side of the fan body 131, the transverse center line of the water inlet pipe 404 is not on the same horizontal line as the transverse center line of the single-rotation reciprocating screw rod 13, an annular plate 12 is threadedly connected to the outer side of the single-rotation reciprocating screw rod 13, rotating rods 121 are installed on the inner side and the outer side of the annular plate 12 at equal intervals, swing plates 122 are installed on the outer sides of the rotating rods 121, vortex springs 123 are connected to the outer sides of one end of the rotating rods 121, a fixed rod 16 is installed in the water-cooled jacket 401, the swing plates 122 are arranged in an inclined manner on the upper side of the fixed rod 16, the swing plates 122 form a reciprocating swing structure through the fixed rod 16, water changing cavities 14 are installed in the water-cooled jacket 401 at equal intervals, piston assemblies 141 are connected to the inner sides of the water changing cavities 14, the upper end of the piston assembly 141 is connected to the bottom surface of the annular plate 12, water injection pipes 143 and water suction pipes 142 are installed in the lower inner side of the water changing cavities 14, the upper end of the water injection pipe 143 in the "L" shape penetrates the inner side of the annular plate 12, the highest point of the water injection pipe 143 is higher than the highest point of the annular plate 12, air storage air bags 15 are installed on the bottom surface of the annular plate 12 at equal intervals, and the bottom surface of the air storage air bag 15 is connected to the inner side of the water-cooled jacket 401.

[0022] The upper side of the dustproof shell 8 is connected with the top of the vacuum evaporation machine, the entire crystal oscillator system is connected to the top of the vacuum evaporation machine, the carrier to be plated is installed in the lower inner side of the support ring assembly 101, the crystal oscillator piece mechanism 3 is arranged in the cavity formed in the middle part of the carrier, the crystal oscillator piece mechanism 3 does not interfere with the cavity formed in the middle part of the carrier, then the vacuum evaporation machine starts the plating operation, in this process, the external driver drives the magnetic fluid 9 to rotate, the magnetic fluid 9 drives the first rotating mechanism 1 to rotate through the rotating gear 10, the first rotating mechanism 1 drives the support ring assembly 101 and the carrier to rotate, and the first through hole 305 serves as a channel for detecting the film material.

[0023] Meanwhile, the cooling water in the water-cooled jacket 401 cools the crystal oscillator wafer mechanism 3 below, the water in the water inlet pipe 404 drives the fan blade body 131 and the single-rotation reciprocating screw rod 13 to rotate, the single-rotation reciprocating screw rod 13 drives the annular plate 12 and the swing plate 122 to reciprocatingly lift and drop, when the swing plate 122 drops to contact the upper end of the fixed rod 16 and continues to drop, the fixed rod 16 swings the swing plate 122 reciprocatingly by the force storage of the vortex spring 123, so that the swing plate 122 stirs the water in the water-cooled jacket 401 up and down, the temperature of the cooling water in the water-cooled jacket 401 is uniform, the cooling effect of the cooling water in the water-cooled jacket 401 is improved, the high-temperature environment generated during the operation of the vacuum evaporation machine is avoided to cause the crystal oscillator wafer body 304 to break, the influence of the vacuum evaporation machine on the manufacturing of electronic special materials is avoided, and when the annular plate 12 lifts and drops, the piston assembly 141 lifts and drops together, so that the water in the bottom surface of the water-cooled jacket 401 is intermittently pumped into the water replacement cavity 14 and sprayed upward through the water spraying pipe 143, the water below and the water above are well mixed, and the temperature uniformity of the cooling water in the water-cooled jacket 401 is further improved.

[0024] When the annular plate 12 lifts and drops, the reciprocatingly squeezed storage gas bag 15 expands, so that the storage gas bag 15 can further stir the water in the water-cooled jacket 401, and the temperature uniformity of the cooling water in the water-cooled jacket 401 is further improved.

[0025] Embodiment two: the anti-breaking crystal oscillator system for the vacuum evaporation machine in the embodiment, on the basis of embodiment one, the clamping operation of the crystal oscillator wafer body 304 can be automatically contacted in the later period, and the specific structure is referred to the drawings Figure 6 and Figure 14 The lower outer side of the intermediate rotating shaft 201 is fixed with a vertical rod 202, the lower end of the vertical rod 202 is in abutting contact with the upper surface of the crystal oscillator three-claw fixing disc 302, the inner side wall of the crystal oscillator three-claw fixing disc 302 is installed with a protrusion 308, the protrusion 308 is in sliding connection with the groove formed in the outer side of the fixed seat connecting rod 303, and the groove formed in the outer side of the fixed seat connecting rod 303 is installed with a reset spring 309 connected with the protrusion 308.

[0026] When the intermediate rotating shaft 201 is moved upward to separate from the fixed seat connecting rod 303, the vertical rod 202 separates from the crystal oscillator wafer fixing seat 301, then the protrusion 308 and the crystal oscillator three-claw fixing disc 302 are automatically driven upward by the force storage of the reset spring 309, so that the crystal oscillator three-claw fixing disc 302 separates from the crystal oscillator wafer body 304, so that the fixing of the crystal oscillator three-claw fixing disc 302 to the crystal oscillator wafer body 304 can be automatically released, and the crystal oscillator three-claw fixing disc 302 is convenient to replace in the later period.

[0027] Although the present application has been described in detail with reference to the foregoing embodiments, the technical solutions recorded in the foregoing embodiments can be modified, or some of the technical features can be replaced by equivalent features, by those skilled in the art, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A kind of anti-break type crystal oscillator system for vacuum evaporation machine, including first rotating mechanism (1) and the support ring assembly (101) being installed in its lower end outside, and the support ring assembly (101) is connected with the carrier to be plated in the lower inside, it is characterized by: The first rotating mechanism (1) is internally sleeved with a second rotating mechanism (2), the rotating shaft of the second rotating mechanism (2) is connected with an intermediate rotating shaft (201), the bottom end of the intermediate rotating shaft (201) is connected with a crystal vibration piece mechanism (3), a water cooling shaft (4) is sleeved on the upper side of the crystal vibration piece mechanism (3) below the intermediate rotating shaft (201), and the inside of the water cooling shaft (4) is provided with a water cooling jacket (401) for storing cooling water.

2. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 1, wherein: The crystal vibration piece mechanism (3) comprises a crystal vibration piece fixing seat (301), a fixing seat connecting rod (303) for locking connection with the bottom end of the intermediate rotating shaft (201) is fixed to the middle of the upper surface of the crystal vibration piece fixing seat (301), a first through hole (305) for placing a crystal vibration piece body (304) is formed in the inside of the crystal vibration piece fixing seat (301), the first through hole (305) is a channel for detecting film material, a crystal vibration three-claw fixing disc (302) for fixing the crystal vibration piece body (304) is slidably connected to the outside of the fixing seat connecting rod (303), and the crystal vibration three-claw fixing disc (302) is located on the upper part of the crystal vibration piece fixing seat (301).

3. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 2, wherein: The lower outer side of the intermediate rotating shaft (201) is fixedly connected with a vertical rod (202), the lower end of the vertical rod (202) is in abutting contact with the upper surface of the crystal vibration three-claw fixing disc (302), a protruding block (308) is mounted on the inner side wall of the crystal vibration three-claw fixing disc (302), the protruding block (308) is slidably connected with a groove formed on the outside of the fixing seat connecting rod (303), and a reset spring (309) connected with the protruding block (308) is mounted in the groove.

4. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 3, wherein: The lower part of the crystal vibration piece body (304) is provided with a probe cap (306) connected with the bottom surface of the water cooling shaft (4), a second through hole (307) is formed in the inside of the probe cap (306), the crystal vibration piece mechanism (3) and the crystal vibration piece body (304) are rotated by the intermediate rotating shaft (201), so that one of the crystal vibration piece bodies (304) is completely matched with the position of the second through hole (307), and the film coating thickness of the vacuum evaporation machine under the current state is monitored by the film coating amount of the crystal vibration piece body (304).

5. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 4, wherein: The upper part of the crystal vibration three-claw fixing disc (302) is mounted with a crystal vibration detection device mounting block (11), a third through hole (111) is formed in the inside of the crystal vibration detection device mounting block (11), the positions of the third through holes (111) are one-to-one corresponding to the positions of the first through holes (305), and the detection ends of the crystal vibration detection device are connected at the third through holes (111).

6. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 5, wherein: The water inlet pipe (404) and the water outlet pipe (405) are connected with the external adapter device (403) through the interlayer between the protective sleeve (402) and the intermediate rotating shaft (201).

7. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 6, wherein: The outer side of the water-cooled shaft (4) is sleeved with a probe outer cylinder (5), which extends upward to be connected with a third rotating mechanism (6), and the lower part of the probe outer cylinder (5) is connected with a light control structure (7) for detecting the refractive index or light transmittance of the coating on the light control structure (7), and the third rotating mechanism (6) is used for rotating the light control structure (7), and the bottom of the probe outer cylinder (5) is flush with a probe cap (306); The upper end of the first rotating mechanism (1) is connected with the lower end of the shaft of the magnetic fluid (9) through two rotating gears (10) connected with each other, and the upper end of the shaft of the magnetic fluid (9) is connected with an external driver through a chain wheel assembly, forming a multi-stage transmission system to ensure stable rotation of the first rotating mechanism (1), and the upper ends of the first rotating mechanism (1), the second rotating mechanism (2), the third rotating mechanism (6), the magnetic fluid (9) and the external adapter device (403) all penetrate into the interior of the dustproof outer shell (8); The upper end of the third rotating mechanism (6) is connected with the motor through two control gears installed in the dustproof outer shell (8) to form a rotating structure.

8. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 1, wherein: The water-cooled jacket (401) is a circular hollow chamber, and the position adjusting assembly includes a single-rotation reciprocating screw rod (13) installed in the interior of the water-cooled jacket (401), a fan body (131) is fixed to the upper side of the single-rotation reciprocating screw rod (13), a water inlet pipe (404) is arranged on the left side of the fan body (131), the transverse center line of the water inlet pipe (404) and the transverse center line of the single-rotation reciprocating screw rod (13) are not on the same horizontal line, an annular plate (12) is threadedly connected to the outer side of the single-rotation reciprocating screw rod (13), rotating rods (121) are arranged on the inner side and the outer side of the annular plate (12) at equal intervals, swing plates (122) are installed on the outer sides of the rotating rods (121), a vortex spring (123) is nestedly connected to the outer side of one end of the rotating rod (121), and a fixed rod (16) is installed in the interior of the water-cooled jacket (401), and an inclined swing plate (122) is arranged on the upper side of the fixed rod (16), and the swing plate (122) and the fixed rod (16) form a reciprocating swing structure.

9. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 8, wherein: The inside of the water-cooled jacket (401) is installed with water changing cavities (14) at equal intervals, the inside of the water changing cavity (14) is connected with a piston assembly (141) in close contact, the upper end of the piston assembly (141) is connected with the bottom surface of the annular plate (12), the inside below the water changing cavity (14) is installed with a water spraying pipe (143) and a water suction pipe (142) in penetration, the upper end of the "L"-shaped water spraying pipe (143) penetrates the inside of the annular plate (12), and the highest point of the water spraying pipe (143) is higher than the highest point of the annular plate (12).

10. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 8, wherein: The bottom surface of the annular plate (12) is installed with air storage air bags (15) at equal intervals, and the bottom surface of the air storage air bag (15) is connected with the inside of the water-cooled jacket (401).

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