Magnetic filtering plane electromagnetic arc coating device

Abstract

The invention relates to the technical field of coating, and discloses a magnetic filtering plane electromagnetic arc coating device which comprises a coating device body, a movable dustproof assembly, a positioning assembly and an adjustable cleaning assembly. Through the arrangement of the movable dustproof assembly and the adjustable cleaning assembly, the movable dustproof assembly can isolate dust in air, external dust is prevented from flowing into the vacuum coating chamber, and when the dust is attached to the surface of a dustproof net, the dust can be cleaned in a self-displacement mode; when the dustproof net is cleaned, the part needing to be cleaned is moved out of the gas circulation area of the gas inlet pipe and cleaned through the adjustable cleaning assembly, and the situation that in the dustproof net cleaning process, the cleaning plate conveys cleaned dust into the gas inlet pipe through holes of the dustproof net is avoided.

Description

Technical Field

[0001] This invention relates to the field of coating technology, specifically to a magnetic filter planar electromagnetic arc coating device. Background Technology

[0002] Vacuum cathodic arc ion plating is a commonly used surface modification method for depositing ultra-hard films on molds and wear-resistant parts, as well as for depositing wear-resistant and corrosion-resistant decorative films on everyday items. Vacuum cathodic arc plating primarily works by generating arc discharge on the surface of a cathode arc target, evaporating and ionizing the target to generate cathode arc target plasma. This method boasts high ionization rate, high energy, and high concentration, thus offering advantages such as high deposition rate, dense film, high hardness, and good adhesion.

[0003] According to Chinese Publication No. CN213924990U, a magnetic filtering arc coating device includes: a cathode arc source comprising an arc target holder, a target block, a permanent magnet, and a permanent magnet adjustment mechanism; the target block is mounted on the front end face of the target holder, and a columnar permanent magnet is placed at the center of the rear end face of the target holder near the target block; the permanent magnet adjustment mechanism is connected to the rear of the permanent magnet; a vacuum coating chamber, the chamber of which is vacuum-sealed; a magnetic filtering bend, one end of which is an inlet end connected to the front end of the cathode arc source, and the other end of which is an outlet end communicating with the inner cavity of the vacuum coating chamber; and further includes: a first excitation coil, mounted around the target block and located outside the cathode arc source; the first excitation coil is used to cooperate with the permanent magnet to change the magnetic field; and multiple coil modules, respectively disposed at the inlet end, bend, and outlet end of the magnetic filtering bend. This invention can reduce the generation of large particles in the cathode arc target plasma, resulting in a high deposition rate, good uniformity, and high quality of the film.

[0004] After the coating process is completed, external gas is slowly introduced by opening the valve on the pipeline. When the gas flows into the vacuum coating chamber, external dust and impurities are easily transported into the vacuum coating chamber. When the chamber contains dust, it is easy to cause contamination during subsequent coating processes. Summary of the Invention

[0005] The purpose of this invention is to provide a magnetic filter planar electromagnetic arc coating device to solve the problem mentioned in the background art that external dust and impurities are easily transported into the vacuum coating chamber, and when the chamber contains dust, subsequent coating processes are prone to contamination.

[0006] To achieve the above objectives, the present invention provides the following technical solution: The present invention provides a magnetic filter planar electromagnetic arc coating device, comprising: a coating device body, a movable dustproof component, a positioning component, and an adjustable cleaning component. The coating device body includes a vacuum coating chamber, a magnetic filter bend, a cathode arc discharge component, a vacuum pump, an air inlet pipe, and valves. The movable dustproof component is disposed at one end of the outer wall of the air inlet pipe. The positioning component is disposed on both sides of the front of the movable dustproof component. The adjustable cleaning component is disposed inside the positioning component.

[0007] By adopting the above technical solution, it is possible to separate dust from the outside air.

[0008] Preferably, one end of the magnetic filter bend is disposed on the outer wall of the vacuum coating chamber, the cathode arc discharge assembly is disposed on the other end of the magnetic filter bend, a vacuum pump is disposed on the top outer wall of the vacuum coating chamber, the air inlet of the vacuum pump is connected to the vacuum coating chamber through a pipe, and the other end is disposed on the outer wall of the vacuum coating chamber with an air inlet pipe and a valve disposed in the middle of the air inlet pipe.

[0009] By adopting the above technical solution, a filter-type surface coating process can be achieved.

[0010] Preferably, the movable dustproof assembly includes a first slide rail welded to the outer wall of the other end of the air inlet pipe, a frame slidably disposed inside the first slide rail, and a dustproof net welded to the inner wall of the frame.

[0011] By adopting the above technical solution, it is possible to provide a stable horizontal displacement of the frame and internal structure on the No. 1 slide rail.

[0012] Preferably, the mobile dustproof assembly further includes a drive motor fixed to the bottom outer wall of the first slide rail, a lever mounted on the output end of the drive motor via a shaft, the lever having a slotted hole inside, and a positioning rod welded to the inner wall of the frame, the positioning rod being located inside the slotted hole of the lever.

[0013] By adopting the above technical solution, the position of the positioning rod is changed by rotating the toggle block.

[0014] Preferably, the positioning component includes connecting rods welded to both ends of the outer wall of the first slide rail, and a mounting plate welded to the connecting rods, wherein a threaded hole is provided in the center of the mounting plate.

[0015] By adopting the above technical solution, structural connections can be provided.

[0016] Preferably, the positioning component further includes a first groove formed on both sides of the mounting plate, a second groove formed on the inner wall of the first groove, and a fixing plate welded to the inner wall of the second groove, wherein the fixing plate has a round hole.

[0017] By adopting the above technical solution, it is possible to provide a structural sliding arrangement inside the first and second grooves.

[0018] Preferably, the positioning component further includes a guide rod that is vertically slidably disposed in the circular hole of the fixing plate. The bottom end of the guide rod is integrally formed with a protrusion. A locking block is welded to the top end of the guide rod. The locking block is shaped like a right-angled trapezoid. A spring is sleeved on the guide rod. The two ends of the spring are respectively attached to the outer wall of the fixing plate and the locking block.

[0019] By adopting the above technical solution, the spring itself can be used to push the block to move.

[0020] Preferably, the adjustable cleaning assembly includes a mounting rod slidably disposed inside the first groove, one end of the mounting rod being integrally formed with a protrusion, and the other end of the mounting rod being provided with a cleaning plate, the brush surface of the cleaning plate being attached to the outer surface of the dustproof mesh.

[0021] By adopting the above technical solution, the cleaning plate can be attached to the surface of the dustproof net, thereby realizing the cleaning work.

[0022] Preferably, the adjustable cleaning assembly further includes a second slide rail integrally formed on the back of the cleaning plate, a threaded rod rotatably disposed in the threaded hole of the mounting plate, a handle provided at one end of the threaded rod, and a cylindrical block integrally formed at the other end of the threaded rod, the cylindrical block of the threaded rod being disposed inside the second slide rail.

[0023] By adopting the above technical solution, a change in position can be achieved through rotation.

[0024] In summary, the present invention has at least the following beneficial effects: (1) By setting up a movable dustproof component and an adjustable cleaning component, the movable dustproof component can isolate dust in the air and prevent external dust from flowing into the interior of the vacuum coating chamber. When dust adheres to the surface of the dustproof net, it can move the part that needs to be cleaned out of the gas flow area of ​​the air inlet pipe by its own displacement. The adjustable cleaning component can clean it, so as to prevent the cleaning plate from conveying the cleaned dust into the interior of the air inlet pipe through the holes of the dustproof net during the cleaning process.

[0025] (2) By setting up a positioning component and an adjustable cleaning component, the cleaning plate of the adjustable cleaning component will wear due to friction during long-term cleaning. At this time, the positioning component can be used to quickly disassemble and replace the adjustable cleaning component without the aid of external tools.

[0026] (3) In this invention, the drive motor drives the paddle to rotate, and the drive frame moves back and forth on the first slide rail, so that the dustproof net can achieve periodic displacement. This design breaks through the limitation of traditional fixed dustproof nets that require manual disassembly and cleaning. Through mechanical automation, the dustproof net can achieve a "movement-centralized cleaning" cycle, which significantly improves maintenance efficiency.

[0027] (4) This invention utilizes the cooperation between the threaded rod and the No. 2 slide rail. By rotating the threaded rod, the cleaning plate can be pushed to stick tightly to the surface of the dustproof net. When the dustproof net moves with the frame, the cleaning plate continuously scrapes off the surface dust, forming a linkage mechanism of "moving dustproof + dynamic cleaning". This upgrades passive dustproof to active cleaning, and maintenance can be completed without stopping the machine, solving the problem of production interruption caused by cleaning in traditional coating equipment.

[0028] (5) In the positioning component of the present invention, the locking block slides along the guide rod by the elastic force of the spring. When the mounting rod is inserted into the first groove, the locking block automatically locks the mounting rod protrusion to achieve rapid positioning. This structure eliminates the cumbersome steps of traditional screw fixing and only requires "push-lock" to complete the installation. The adaptive adjustment capability of the spring can accommodate mounting rods of different sizes, improving the versatility of the device.

[0029] (6) The card block set in this invention adopts a right-angled trapezoidal shape. When the mounting rod is subjected to force, the inclined structure can convert the vertical pressure into horizontal friction force, which, together with the spring thrust, forms a double lock to avoid loosening caused by vibration. This design significantly improves the connection stability through mechanical structure optimization.

[0030] (7) The magnetic filter bend tube set in this invention uses Lorentz force to filter large particulate impurities in the plasma, while the dustproof-cleaning system of the air inlet pipe prevents external dust from entering the vacuum coating chamber, forming a dual purification mechanism of "internal filtration + external dustproof". Attached Figure Description

[0031] Figure 1 This is a three-dimensional top view of the structure of the present invention; Figure 2 This is a frontal three-dimensional structural diagram of the mobile dustproof component, positioning component, and adjustable cleaning component of the present invention; Figure 3 For the present invention Figure 2 3D back structure diagram; Figure 4 This is a three-dimensional structural diagram of the positioning component and the adjustable cleaning component of the present invention; Figure 5 This is a three-dimensional unfolded structural diagram of the positioning component and the adjustable cleaning component of the present invention.

[0032] In the picture: 1. Vacuum coating chamber; 2. Magnetic filter bend; 3. Cathode arc discharge assembly; 4. Vacuum pump; 5. Inlet pipe; 6. Valves; 7. Movable dustproof assembly; 701. No. 1 slide rail; 702. Frame; 703. Dustproof net; 704. Drive motor; 705. Pulley; 706. Positioning rod; 8. Positioning assembly; 801. Connecting rod; 802. Mounting plate; 803. Groove No. 1; 804. Groove No. 2; 805. Fixing plate; 806. Guide rod; 807. Locking block; 808. Spring; 9. Adjustable cleaning assembly; 901. Mounting rod; 902. Cleaning plate; 903. No. 2 slide rail; 904. Threaded rod. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] The following is in conjunction with the appendix Figure 1-5 The embodiments of the present invention will be described in further detail below.

[0035] Example 1: Please see Figures 1-5 This embodiment provides a technical solution: a magnetic filter planar electromagnetic arc coating device, comprising: a vacuum coating chamber 1, a magnetic filter bend 2, a cathode arc discharge assembly 3, a vacuum pump 4, an air inlet pipe 5, a valve 6, a movable dustproof assembly 7, a positioning assembly 8, and an adjustable cleaning assembly 9. The main body of the coating device includes a vacuum coating chamber 1, a magnetic filter bend 2, a cathode arc discharge assembly 3, a vacuum pump 4, an air inlet pipe 5, and a valve 6. One end of the magnetic filter bend 2 is located on the outer wall of the vacuum coating chamber 1, and the cathode arc discharge assembly 3 is located on the other end of the magnetic filter bend 2. The vacuum pump 4 is located on the top outer wall of the vacuum coating chamber 1. The air inlet of the vacuum pump 4 is connected to the vacuum coating chamber 1 through a pipe. The other end is located on the outer wall of the vacuum coating chamber 1, and the valve 6 is located in the middle of the air inlet pipe 5. The above is the prior art and will not be described in detail below.

[0036] The movable dustproof component 7 is located at one end of the outer wall of the air inlet pipe 5, the positioning component 8 is located on both sides of the front of the movable dustproof component 7, and the adjustable cleaning component 9 is located inside the positioning component 8.

[0037] The substrate is placed inside the vacuum coating chamber 1. At this time, the vacuum pump 4 evacuates the interior of the vacuum coating chamber 1. The cathode arc discharge component 3 filters the plasma through the magnetic filter bend 2. When the plasma generated by the cathode arc discharge component 3 passes through the magnetic filter bend 2, under the action of the magnetic field, the charged particles are subjected to the Lorentz force and move in a spiral motion along the center line of the magnetic filter bend 2. Large particles, due to their large mass and low or no charge, are basically unaffected by the magnetic field and are filtered out by impacting the inner wall of the magnetic filter bend 2. Charged ions can pass through smoothly and deposit on the surface of the substrate to form a film. Then, by opening the valve 6 on the air inlet pipe 5, the gas is delivered into the interior of the vacuum coating chamber 1, which facilitates the removal of the coated substrate. When the gas is delivered through the air inlet pipe 5, the adjustable cleaning component 9 can be fixed on both sides of the movable dustproof component 7 by the positioning component 8. At this time, the displacement of the movable dustproof component 7 brings it into contact with the movable dustproof component 7, achieving effective dust removal.

[0038] Example 2: Please see Figures 1-2 This embodiment provides a technical solution: a magnetic filter planar electromagnetic arc coating device, comprising: a first slide rail 701, a frame 702, a dustproof net 703, a drive motor 704, a toggle block 705, and a positioning rod 706; The mobile dustproof assembly 7 includes a first slide rail 701 welded to the outer wall of the other end of the air inlet pipe 5, a frame 702 slidably disposed inside the first slide rail 701 and a dustproof net 703 welded to the inner wall of the frame 702, a drive motor 704 fixed to the bottom outer wall of the first slide rail 701, a lever 705 mounted on the output end of the drive motor 704 via a shaft, the lever 705 having a strip-shaped hole inside, and a positioning rod 706 welded to the inner wall of the frame 702, the positioning rod 706 being disposed inside the strip-shaped hole of the lever 705.

[0039] Start the drive motor 704, which can drive the output end of the lever 705 to reciprocate. When the lever 705 rotates, it can drive the positioning rod 706 and the frame 702 connected to the positioning rod 706 to move stably inside the first slide rail 701. At this time, the dustproof net 703 can be cleaned after being moved to the designated position.

[0040] Example 3: Please see Figures 3-5 This embodiment provides a technical solution: a magnetic filter planar electromagnetic arc coating device, comprising: a connecting rod 801, a mounting plate 802, a first groove 803, a second groove 804, a fixing plate 805, a guide rod 806, a locking block 807, and a spring 808; The positioning component 8 includes connecting rods 801 welded to both ends of the outer wall of the first slide rail 701, mounting plate 802 welded to the connecting rods 801, threaded hole in the center of the mounting plate 802, first groove 803 on both sides of the mounting plate 802, second groove 804 on the inner wall of the first groove 803, fixing plate 805 welded to the inner wall of the second groove 804, round hole in the fixing plate 805, guide rod 806 vertically sliding in the round hole of the fixing plate 805, protrusion integrally formed at the bottom end of the guide rod 806, locking block 807 welded to the top of the guide rod 806, locking block 807 is in the shape of a right trapezoid, spring 808 sleeved on the guide rod 806, the two ends of the spring 808 respectively attached to the outer wall of the fixing plate 805 and the locking block 807.

[0041] Because the mounting plate 802 can be connected to the first slide rail 701 via the connecting rod 801, when the mounting rod 901 slides into the first groove 803 of the mounting plate 802, the locking block 807 in the second groove 804 can be pushed by the spring 808, so that the locking block 807 can maintain stable displacement through the guide rod 806 in the fixing plate 805, thereby achieving rapid positioning of the mounting rod 901.

[0042] Example 4: Please see Figures 2-3 This embodiment provides a technical solution: a magnetic filter planar electromagnetic arc coating device, comprising: a mounting rod 901, a cleaning plate 902, a second slide rail 903, and a threaded rod 904; The adjustable cleaning component 9 includes a mounting rod 901 slidably disposed inside a first groove 803. One end of the mounting rod 901 has an integrally formed protrusion, and the other end of the mounting rod 901 is provided with a cleaning plate 902. The brush surface of the cleaning plate 902 is attached to the outer surface of the dustproof net 703. A second slide rail 903 is integrally formed on the back of the cleaning plate 902. A threaded rod 904 is threadedly rotatably disposed in a threaded hole in the mounting plate 802. One end of the threaded rod 904 is provided with a handle, and the other end of the threaded rod 904 is integrally formed with a cylindrical block. The cylindrical block of the threaded rod 904 is disposed inside the second slide rail 903.

[0043] The cleaning plate 902 is slid into the first groove 803 of the mounting plate 802 via the mounting rod 901. At this time, the second slide rail 903 of the cleaning plate 902 will slide to the outside of the cylindrical block of the threaded rod 904. Then, by rotating the threaded rod 904, the cleaning plate 902 is pushed to keep it in contact with the surface of the dustproof net 703. At this time, during the subsequent displacement of the dustproof net 703, it can contact the cleaning plate 902 to carry out the cleaning work.

[0044] The implementation principle of the magnetic filtering planar electromagnetic arc coating device of the present invention is as follows: First, the substrate is placed inside the vacuum coating chamber 1. The vacuum pump 4 then evacuates the interior of the vacuum coating chamber 1. The cathode arc discharge assembly 3 filters the plasma through the magnetic filter bend 2. As the plasma generated by the cathode arc discharge assembly 3 passes through the magnetic filter bend 2, charged particles, under the influence of the magnetic field, undergo a Lorentz force and spiral along the centerline of the magnetic filter bend 2. Large particles, due to their large mass and low or no charge, are largely unaffected by the magnetic field and are filtered out upon impact with the inner wall of the magnetic filter bend 2. Charged ions, however, can pass through smoothly and deposit on the substrate surface to form a film. Then, by opening the valve 6 on the air inlet pipe 5, gas is delivered into the vacuum coating chamber 1, facilitating the removal of the coated substrate. While the gas is being delivered through the air inlet pipe 5, the adjustable cleaning assembly 9 is fixed to both sides of the movable dustproof assembly 7 via the positioning assembly 8. The displacement of the movable dustproof assembly 7 allows it to contact the dustproof assembly 7, effectively cleaning the dust.

[0045] Secondly, start the drive motor 704. The drive motor 704 can drive the output end of the dial block 705 to reciprocate. When the dial block 705 rotates, it can drive the positioning rod 706 and the frame 702 connected to the positioning rod 706 to move stably inside the first slide rail 701. At this time, the dustproof net 703 can be cleaned after being moved to the designated position.

[0046] Finally, the cleaning plate 902 is slid into the first groove 803 of the mounting plate 802 via the mounting rod 901. At this time, the second slide rail 903 of the cleaning plate 902 will slide to the outside of the cylindrical block of the threaded rod 904. The rotation of the threaded rod 904 will push the cleaning plate 902 to keep it in contact with the surface of the dustproof net 703. During the subsequent displacement of the dustproof net 703, it can contact the cleaning plate 902 to perform cleaning work. Because the mounting plate 802 can be connected to the first slide rail 701 via the connecting rod 801, when the mounting rod 901 slides into the first groove 803 of the mounting plate 802, the locking block 807 in the second groove 804 can be squeezed and pushed by the spring 808, so that the locking block 807 can maintain stable displacement through the guide rod 806 in the fixing plate 805, thereby achieving rapid positioning of the mounting rod 901.

[0047] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A magnetic filter planar electromagnetic arc coating device, characterized in that, Include: Coating device main body, the coating device main body includes vacuum coating chamber (1), magnetic filtering elbow (2), cathode arc discharge assembly (3), vacuum pump (4), air inlet pipe (5) and valve (6); Mobile dustproof assembly (7), the mobile dustproof assembly (7) is arranged at the outer wall one end of air inlet pipe (5); Positioning assembly (8), the positioning assembly (8) is arranged at the front of mobile dustproof assembly (7) both sides; Adjustable cleaning assembly (9), the adjustable cleaning assembly (9) is arranged at the inside of positioning assembly (8).

2. The magnetic filtering planar electromagnetic arc plating film device according to claim 1, characterized in that: One end of the magnetic filtering elbow (2) is arranged on the outer wall of the vacuum coating chamber (1), the cathode arc discharge assembly (3) is arranged at the other end of the magnetic filtering elbow (2), the vacuum pump (4) is arranged on the outer wall of the top of the vacuum coating chamber (1), the air inlet of the vacuum pump (4) is connected with the vacuum coating chamber (1) through pipeline, the other end of the air inlet pipe (5) is arranged on the outer wall of the vacuum coating chamber (1), and the valve (6) is arranged at the central part of the air inlet pipe (5).

3. The magnetic filtering planar electromagnetic arc plating film device according to claim 1, characterized in that: The mobile dustproof assembly (7) includes a No. The slide rail (701) is welded on the other end of the outer wall of the air inlet pipe (5), the frame (702) is slidably arranged in the No. The dust screen (703) is welded on the inner wall of the frame (702).

4. The magnetic filtering planar electro-magnetic arc plating film device according to claim 3, characterized in that: The mobile dustproof assembly (7) further includes a drive motor (704) fixed on the bottom outer wall of the No. The block (705) is provided on the output end of the drive motor (704) through the shaft, a strip-shaped hole is formed in the inside of the block (705), a positioning rod (706) is welded on the inner wall of the frame (702), and the positioning rod (706) is arranged in the strip-shaped hole of the block (705).

5. The magnetic filtering planar electromagnetic arc plating film device according to claim 1, characterized in that: The positioning assembly (8) includes a connecting rod (801) welded on the outer wall of the No. The installation plate (802) is welded on the connecting rod (801), and a threaded hole is formed in the central part of the installation plate (802).

6. The magnetic filtering planar electro-magnetic arc plating apparatus of claim 5, wherein: The positioning assembly (8) further includes a No. The second recess (804) is formed in the inner wall of the No. The fixed plate (805) is welded on the inner wall of the second recess (804), and a circular hole is formed in the fixed plate (805).

7. The magnetic filtering planar electromagnetic arc plating apparatus of claim 6, wherein: The positioning assembly (8) further includes a guide rod (806) vertically and slidably arranged in the circular hole of the fixed plate (805), the bottom end of the guide rod (806) is integrally formed with a lug, a clamping block (807) is welded on the top end of the guide rod (806), the clamping block (807) is shaped as a right-angle trapezoidal shape, a spring (808) is sleeved on the guide rod (806), and the two ends of the spring (808) are respectively attached to the outer walls of the fixed plate (805) and the clamping block (807).

8. The magnetic filtering planar electro-magnetic arc vapor deposition apparatus of claim 1, wherein: The adjustable cleaning assembly (9) comprises a mounting rod (901) slidingly arranged in a first recess (803), one end of the mounting rod (901) is integrally formed with a protrusion, the other end of the mounting rod (901) is provided with a cleaning plate (902), and the brush surface of the cleaning plate (902) is attached to the outer surface of the dust screen (703).

9. The magnetic filtering planar electro-magnetic arc plating apparatus of claim 8, wherein: The adjustable cleaning assembly (9) further comprises a second sliding rail (903) integrally formed on the back of the cleaning plate (902), a threaded rod (904) screwedly arranged in a threaded hole of the mounting plate (802), one end of the threaded rod (904) is provided with a handle, the other end of the threaded rod (904) is integrally formed with a cylindrical block, and the cylindrical block of the threaded rod (904) is arranged in the second sliding rail (903).

Images