Cylindrical roller bearing outer ring carburizing device

Abstract

The application relates to the technical field of carburizing treatment, and discloses a cylindrical roller bearing outer ring carburizing treatment device, which comprises a carburizing furnace, wherein the carburizing furnace comprises a furnace body; a furnace base is installed in the inside of the furnace body; a shaking unit is arranged on the furnace base and comprises a base and a movable groove formed in the furnace base; a rotating shaft is connected to the movable groove, the rotating shaft is fixedly connected with the base, a first gear is installed on the rotating shaft, rack plates are connected to the two sides of the first gear in a meshed mode, and a reset assembly is arranged between the rack plates and the movable groove. In the application, the base reciprocatingly swings through the transmission of the convex block and the roller, effectively solving the problems of airflow shielding, low mass transfer efficiency and uneven temperature caused by the fixation of the workpiece in traditional static carburizing; the swinging of the base makes the surface of the bearing outer ring periodically exposed to the carburizing atmosphere, completely eliminates the gas flow dead zone, and simultaneously solves the problem of poor carburizing efficiency of the annular inner ring.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of carburizing treatment, and more particularly to a cylindrical roller bearing outer ring carburizing treatment device. BACKGROUND

[0002] In the field of semiconductor wafer processing (such as photoetching, etching, film deposition, etc.), the running precision of the equipment directly determines the wafer yield, and the cylindrical roller bearing adopted by the core components such as the main shaft and the transmission mechanism is a key basic part for ensuring the high-speed and stable operation of the equipment. Among them, the cylindrical roller bearing outer ring needs to have the composite properties of high surface hardness and high core toughness to avoid cracks under load impact. Carburizing treatment is the core process to achieve this performance requirement. Through high-temperature carburizing and quenching and tempering of the bearing outer ring in a controllable atmosphere, a uniform martensite structure can be formed on the surface layer, while the pearlite and ferrite structures of the core are retained, and the hardness and toughness are considered.

[0003] However, the existing cylindrical roller bearing outer ring carburizing treatment device adopts a technical scheme combining static heating and gas carburizing, including a furnace body, a radiation heater and a fixed workpiece support. However, when the bearing for semiconductor wafer processing is subjected to carburizing treatment, the following technical defects exist:

[0004] When the existing carburizing treatment device is in use, the bearing outer ring is placed on a fixed shelf in the traditional carburizing process, the outer ring bottom plane is attached to the shelf support surface, forming a gas flow dead zone; and when the outer ring annular curved surface is fixed on the shelf, only the upper surface is directly exposed to the carburizing gas flow, the side surface and the inner ring surface form a gas scouring blind area due to the fixed posture, resulting in lower carburizing gas concentration in the contact area than in the non-contact area, which seriously affects the uniformity of the bearing raceway surface hardness. SUMMARY

[0005] The present application provides a cylindrical roller bearing outer ring carburizing treatment device, which solves the technical problems of the related art that the outer ring bottom plane is attached to the shelf support surface, forming a gas flow dead zone; and when the outer ring annular curved surface is fixed on the shelf, only the upper surface is directly exposed to the carburizing gas flow, the side surface and the inner ring surface form a gas scouring blind area due to the fixed posture, which seriously affects the uniformity of the bearing raceway surface hardness.

[0006] The present application provides a cylindrical roller bearing outer ring carburizing treatment device, which includes a carburizing furnace, the carburizing furnace includes a furnace body; a furnace base installed inside the furnace body; a shaking unit including a base installed on the furnace base and an active slot opened on the furnace base; a rotating shaft connected in the active slot, and the rotating shaft is fixedly connected with the base; a first gear installed on the rotating shaft, and the two sides of the first gear are meshingly connected with rack plates; and a reset assembly is arranged between the rack plates and the active slot.

[0007] As a further optimization scheme of the present application, the inner part of the movable groove is rotatably connected with an outer gear ring through a bearing, and protrusions are installed on both sides of the inner part of the outer gear ring, a motor is installed on the furnace base, a second gear is installed on the output shaft of the motor, and the outer gear ring is meshingly connected with the second gear.

[0008] As a further optimization scheme of the present application, the protrusions are arranged in an arc-shaped structure with outer convex in the middle and inner concave on both sides, rollers are rotatably connected with the ends of the rack plate away from each other through bearings, the protrusions are in contact with the rollers, and the rollers can slide on the outside of the protrusions.

[0009] As a further optimization scheme of the present application, the reset assembly comprises two groups of connecting seats arranged on the sides of the rack plate away from each other, a limiting rod is installed between the connecting seats, a limiting sleeve is slidably connected with the limiting rod, the limiting sleeve is fixedly connected with the rack plate, springs are arranged on the limiting rod, and the two ends of the springs are fixedly connected with the connecting seats and the limiting sleeve respectively.

[0010] As a further optimization scheme of the present application, a turbulence unit is further arranged on the base, the turbulence unit comprises an inner gear ring installed in the inner part of the movable groove, a plurality of third gears are meshingly connected with the inner part of the inner gear ring, a plurality of connecting shafts are arranged in the inner part of the base, the connecting shafts are fixedly connected with the third gears, and a plurality of impellers are installed on the connecting shafts.

[0011] As a further optimization scheme of the present application, an annular sliding groove is formed in the furnace base, an annular guide rail is slidably connected in the annular sliding groove, the annular guide rail is fixedly connected with the base, a transmission cavity is formed in the inner part of the annular guide rail, and the transmission cavity is in communication with the inner part of the annular sliding groove.

[0012] As a further optimization scheme of the present application, an air flow channel is formed in the inner part of the furnace base, the air flow channel is in communication with the inner part of the annular sliding groove, the air flow channel is in communication with the inner part of the transmission cavity through the annular sliding groove, and a connecting pipe is further installed on the furnace base and in communication with the inner part of the air flow channel.

[0013] As a further optimization scheme of the present application, a gas supply cavity is formed in the inner part of the base, an annular sliding block is installed on the connecting shaft, an annular sliding channel is formed in the gas supply cavity and matched with the annular sliding block, the annular sliding channel is slidably connected with the annular sliding block, and an air flow passage is formed in the inner part of the connecting shaft and in communication with the inner part of the gas supply cavity.

[0014] As a further optimization scheme of the present application, a dispersion groove is formed in the inner part of the impeller and in communication with the inner part of the air flow passage, a plurality of holes are formed in the impeller and in communication with the inner part of the dispersion groove.

[0015] As a further optimization scheme of the present application, a placing rack is mounted on the base, and a plurality of openings are formed in the interior of the placing rack.

[0016] The present application has the beneficial effect that in the present application, the shaking unit drives the outer gear ring to rotate through the motor, and the base reciprocates through the cam transmission of the protrusion and the roller, effectively solving the problems of airflow shielding, low mass transfer efficiency and uneven temperature caused by the fixation of the workpiece in traditional static carburizing, the periodic exposure of the surface of the bearing outer ring to the carburizing atmosphere, the reduction of the contact area between the workpiece and the bearing surface through the opening structure of the placing rack, the complete elimination of the gas flow dead zone, the significant improvement of the circumferential uniformity of the carburized layer, the formation of high-speed turbulent flow by the rotation of the base-driven impeller during the swinging process, the destruction of the stagnant flow layer on the surface of the workpiece, the strengthening of the mass transfer between the gas and the surface of the workpiece, the solution of the problem of poor carburizing efficiency of the inner ring of the ring structure, and the guarantee of the running accuracy of the equipment and the wafer processing yield. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a perspective structural schematic diagram of the present application;

[0018] Figure 2 is a perspective structural schematic diagram of the carburizing furnace of the present application;

[0019] Figure 3 is a perspective structural schematic diagram of the carburizing furnace of the present application;

[0020] Figure 4 is a perspective structural schematic diagram of the carburizing furnace of the present application;

[0021] Figure 5 is a perspective structural schematic diagram of the carburizing furnace of the present application;

[0022] Figure 6 is a perspective structural schematic diagram of the shaking unit and the turbulence unit of the present application;

[0023] Figure 7 is a perspective structural schematic diagram of the shaking unit and the reset assembly of the present application;

[0024] Figure 8 is a perspective structural schematic diagram of the reset assembly of the present application;

[0025] Figure 9 is a perspective structural schematic diagram of the present application;

[0026] Figure 10 is a perspective structural schematic diagram of the present application; Figure 9 is an enlarged view of structure A in the present application;

[0027] Figure 11 is a perspective structural schematic diagram of the turbulence unit of the present application.

[0028] In the figure: 100, carburizing furnace; 110, furnace body; 120, furnace cavity; 130, heat collecting cover; 140, heater; 200, furnace cover; 300, control device; 400, furnace base; 500, shaking unit; 510, base; 520, rotating shaft; 530, first gear; 540, rack plate; 550, reset component; 551, connecting seat; 552, limiting rod; 553, limiting sleeve; 554, spring; 560, outer gear ring; 570, protrusion; 580, roller; 590, second gear; 600, motor; 700, spoiler unit; 710, inner gear ring; 720, third gear; 730, connecting shaft; 740, impeller; 750, annular guide rail; 760, air flow channel; 770, connecting pipe; 780, annular slider; 790, hole; 800, placing rack. DETAILED DESCRIPTION

[0029] The subject matter described herein will now be discussed with reference to example implementations. It should be understood that the discussion of these implementations is merely meant to provide a better understanding of the subject matter described herein and can be changed in function and arrangement without departing from the scope of the disclosure. Various processes or components can be omitted, substituted, or added according to desired implementations. Additionally, features described with respect to some examples can be combined in other examples.

[0030] According to the accompanying Figure 1 to the accompanying Figure 4 As shown in the figure, a cylindrical roller bearing outer ring carburizing treatment device for carburizing treatment of bearings used for semiconductor wafer processing includes a carburizing furnace 100, the carburizing furnace 100 includes a furnace body 110, and the inside of the furnace body 110 is provided with a furnace cavity 120, the inside of the furnace cavity 120 is provided with a heat collecting cover 130, and the heat collecting cover 130 and the furnace cavity 120 are provided with a heater 140; further including a furnace cover 200 and a control device 300, the furnace cover 200 is located directly above the furnace cavity 120 to control the opening or closing of the furnace cavity 120; the control device 300 is installed on the furnace body 110, and the furnace cover 200 is moved by the control device 300 to open or close the furnace cavity 120; and a furnace base 400; the furnace base 400 is installed inside the furnace body 110.

[0031] It should be noted that when the furnace cavity 120 needs to be opened, the control device 300 drives the furnace cover 200 to rotate, thereby exposing the opening of the furnace cavity 120. At this time, the cylindrical roller bearing outer ring to be carburized is placed on the furnace base 400, after the bearing outer ring is placed, the control device 300 acts again to drive the furnace cover 200 to rotate again until the furnace cover 200 tightly fits with the furnace body 110, thereby closing the furnace cavity 120 and forming a relatively closed space to ensure the stability of the furnace atmosphere and temperature during the carburizing process.

[0032] Subsequently, the heater 140 starts to work. Since the heat collecting cover 130 is arranged inside the furnace cavity 120 and there is the heater 140 between the furnace cavity 120 and the heat collecting cover 130, part of the heat generated by the heater 140 is directly radiated to the furnace cavity 120, and the other part is absorbed by the heat collecting cover 130. The heat collecting cover 130 uniformly reflects and conducts the absorbed heat to the furnace cavity 120, so that the temperature distribution in the furnace cavity 120 is more uniform, avoiding the occurrence of local overheating or overcooling. During the carburizing process, carburizing gas is introduced into the furnace. Under high temperature environment, the carburizing gas decomposes to produce carbon atoms. The carbon atoms enter the surface of the cylindrical roller bearing outer ring through diffusion to form a carburized layer.

[0033] When the carburizing treatment is completed, the control device 300 controls the furnace cover 200 to open again, and the treated bearing outer ring is taken out, completing the entire carburizing treatment process.

[0034] In an embodiment, according to the accompanying drawings Figure 5 to the accompanying drawings Figure 7 As shown in the accompanying drawings, the inside of the furnace base 400 is provided with a shaking unit 500. The shaking unit 500 includes a base 510 arranged on the furnace base 400, and a movable slot opened on the furnace base 400. A rotating shaft 520 is connected to the movable slot through a bearing, and the rotating shaft 520 is fixedly connected with the base 510. A first gear 530 is installed on the rotating shaft 520, and a rack plate 540 is connected to both sides of the first gear 530 in a meshing manner. A reset assembly 550 is arranged between the rack plate 540 and the movable slot.

[0035] Specifically, according to the accompanying drawings Figure 6 and the accompanying drawings Figure 7 As shown in the accompanying drawings, an outer gear ring 560 is rotatably connected to the inside of the movable slot through a bearing, and protrusions 570 are installed on both sides of the inside of the outer gear ring 560. A motor 600 is installed on the furnace base 400, and a second gear 590 is installed on the output shaft of the motor 600. The outer gear ring 560 is connected to the second gear 590 in a meshing manner.

[0036] The shaking unit 500 drives the outer gear ring 560 to rotate through the motor 600, and uses the cam transmission of the protrusions 570 and the rollers 580 to make the base 510 reciprocate. This movement mode periodically changes the posture of the bearing outer ring during the carburizing process, solving the problem of insufficient carburizing caused by airflow shielding when the workpiece is placed statically.

[0037] Further, the protrusions 570 are arranged in an arc-shaped structure with the middle part protruding outward and the two sides recessed inward. Rollers 580 are rotatably connected to the ends of the rack plate 540 away from each other through bearings. The protrusions 570 are in contact with the rollers 580, and the rollers 580 can move slidingly outside the protrusions 570.

[0038] It should be noted that after the motor 600 starts, the output shaft drives the second gear 590 to rotate. Since the second gear 590 is engaged with the outer gear ring 560, the outer gear ring 560 will rotate around its axis with the rotation of the second gear 590, and the protrusions 570 on both sides of the inner part of the outer gear ring 560 will rotate with the outer gear ring 560.

[0039] The protrusion 570 is an arc-shaped structure with a convex middle part and concave sides. When the protrusion 570 rotates to contact the roller 580, the convex part of the protrusion 570 will press the roller 580, pushing the rack plate 540 to move away from the protrusion 570. The roller 580 slides on the surface of the protrusion 570, converting the circular motion of the protrusion 570 into the linear reciprocating motion of the rack plate 540. The rack plates 540 on both sides are engaged with the first gear 530.

[0040] When any one side of the rack plate 540 is pressed and moved by the protrusion 570, the rack plate 540 drives the first gear 530 to rotate, and in turn drives the rotating shaft 520 coaxial with the first gear 530 to rotate. The rotating shaft 520 is fixedly connected with the base 510, so the base 510 rotates synchronously with the rotating shaft 520, realizing the shaking action. The workpiece shaking promotes the convection circulation of the carburizing gas in the furnace, enhancing the mass transfer between the gas and the surface of the workpiece.

[0041] When the protrusion 570 rotates past the roller 580, the reset component 550 pulls the rack plate 540 back to its original position, causing the first gear 530 to rotate in the opposite direction, and the base 510 swings back, forming reciprocating shaking. The reciprocating shaking causes the bearing outer ring to form intermittent shaking during the carburizing process, and the surface regions are periodically exposed to the carburizing atmosphere, avoiding the problem of insufficient carburizing at the bottom of the workpiece due to static placement.

[0042] The continuous rotation of the outer gear ring 560 causes the protrusion 570 to periodically press the rollers 580 on both sides, causing the rack plate 540 to move alternately and reciprocally, and driving the base 510 to shake left and right at a certain frequency. This changes passive carburizing to active carburizing, allowing the bearing outer ring to obtain better carburizing quality in a dynamic environment.

[0043] In another embodiment, according to the accompanying drawings Figure 8 As shown, the reset component 550 includes two sets of connecting seats 551 arranged on the side of the rack plate 540 away from the protrusion 570. A limiting rod 552 is installed between the connecting seats 551, and a limiting sleeve 553 is slidably connected to the limiting rod 552. The limiting sleeve 553 is fixedly connected with the rack plate 540. A spring 554 is also arranged on the limiting rod 552, and the two ends of the spring 554 are fixedly connected with the connecting seats 551 and the limiting sleeve 553, respectively. In this embodiment, the periodic turning of the workpiece is realized by the reset component 550, eliminating the static shadow area and avoiding local insufficient or excessive carburizing, so that the bearing outer ring obtains a more stable dynamic environment during the carburizing process.

[0044] Need to understand that when the bump 570 extrusion roller 580 push rack plate 540 move, limit sleeve 553 with rack plate 540 synchronous sliding, spring 554 in the stretched state, store elastic potential energy; bump 570 after the roller 580, spring 554 release elastic potential energy, pull limit sleeve 553 reverse sliding, driving rack plate 540 reset, but also can avoid the impact of rigid transmission may be generated vibration, both to ensure that the workpiece surface is fully exposed to carburizing atmosphere, but also prevent the workpiece collision damage caused by violent shaking.

[0045] In an embodiment, according to the attached Figure 6 and attached Figure 9 As shown, the base 510 is also provided with a spoiler unit 700, the spoiler unit 700 includes the inner tooth ring 710 mounted inside the movable slot, and the inner tooth ring 710 is meshed with a plurality of third gears 720 inside, the base 510 is provided with a plurality of connecting shafts 730 inside, and the connecting shafts 730 are fixedly connected with the third gears 720, and a plurality of impellers 740 are mounted on the connecting shafts 730.

[0046] It should be noted that when the base 510 swings with the rotating shaft 520, the annular guide rail 750 fixed to the base 510 slides synchronously in the annular sliding groove, the annular guide rail 750 drives the connecting shaft 730 and the third gear 720 to make planetary motion around the inner tooth ring 710, the meshing of the third gear 720 with the inner tooth ring 710 forces the connecting shaft 730 to rotate, driving the impeller 740 to rotate.

[0047] Specifically, according to the attached Figure 10 As shown, the furnace base 400 is provided with an annular sliding groove, and the annular guide rail 750 is slidably connected in the annular sliding groove, and the annular guide rail 750 is fixedly connected with the base 510; the inside of the furnace base 400 is provided with an air flow channel 760, and the air flow channel 760 is in communication with the inside of the annular sliding groove; the inside of the annular guide rail 750 is provided with a transmission cavity, and the transmission cavity is in communication with the inside of the annular sliding groove; the air flow channel 760 is in communication with the inside of the transmission cavity through the annular sliding groove; the furnace base 400 is also provided with a connecting pipe 770, and the connecting pipe 770 is in communication with the inside of the air flow channel 760.

[0048] Further, according to the attached Figure 10 As shown, the inside of the base 510 is provided with a gas supply cavity, the connecting shaft 730 is provided with an annular sliding block 780, the gas supply cavity is provided with an annular sliding channel matched with the annular sliding block 780, and the annular sliding channel is slidably connected with the annular sliding block 780, the inside of the connecting shaft 730 is provided with an air flow channel, and the air flow channel is in communication with the inside of the gas supply cavity.

[0049] In still another embodiment, according to the attached Figure 11As shown, the inner part of the impeller 740 is provided with a dispersion groove, and the dispersion groove is connected with the inner part of the airflow channel. The impeller 740 is provided with a plurality of holes 790, and the holes 790 are connected with the inner part of the dispersion groove. Through the arrangement of the impeller 740, when the impeller 740 rotates, the inner part of the furnace cavity 120 can be disturbed.

[0050] It should be noted that the external air source, such as the carburizing gas generator, injects air into the airflow channel 760 through the connecting pipe 770. The airflow enters the transmission cavity of the annular guide rail 750 through the annular chute, and then enters the impeller 740 through the gas supply cavity, the annular sliding block 780 and the airflow channel.

[0051] The rotating impeller 740 makes the gas form directional injection through the dispersion groove and the holes 790, and forms turbulent flow around the workpiece. The turbulent flow generated by the impeller 740 destroys the boundary layer on the surface of the workpiece, so that the carburizing gas more uniformly contacts the surface, and the carbon potential gradient is reduced. In addition, the high-speed airflow sprayed by the impeller 740 improves the mass transfer coefficient of carbon atoms to the surface of the workpiece.

[0052] In other embodiments, the connecting pipe 770 can not only be connected with the carburizing gas generator, but also be connected with an external cooling device, so as to cool the inner part.

[0053] In an embodiment, according to the drawings Figure 5 As shown, the base 510 is provided with a placing rack 800, and the inner part of the placing rack 800 is provided with a plurality of openings. The openings in the inner part of the placing rack 800 form a porous medium channel, which reduces the contact area of the workpiece, so that the carburizing gas can vertically pass through the workpiece, and the airflow can pass through the openings from the bottom and contact the bottom of the workpiece.

[0054] The above describes the embodiments of the present embodiment, but the present embodiment is not limited to the above-described specific embodiments. The above-described specific embodiments are only illustrative, but not limited. Those skilled in the art can make many forms under the inspiration of the present embodiment, which are all within the protection scope of the present embodiment.

Claims

1. A carburizing treatment device for the outer ring of a cylindrical roller bearing, characterized in that, include: A carburizing furnace (100) includes a furnace body (110). A furnace base (400) is installed inside the furnace body (110); The shaking unit (500) includes a base (510) disposed on the furnace base (400) and a movable groove formed on the furnace base (400); The rotating shaft (520) is connected to the bearing in the movable groove, and the rotating shaft (520) is fixedly connected to the base (510). A first gear (530) is installed on the rotating shaft (520), and rack plates (540) are meshed on both sides of the first gear (530). A reset assembly (550) is provided between the rack plate (540) and the movable groove. The interior of the movable groove is rotatably connected to an external gear ring (560) via a bearing, and both sides of the external gear ring (560) are equipped with protrusions (570). A motor (600) is installed on the furnace base (400), and a second gear (590) is installed on the output shaft of the motor (600). The external gear ring (560) and the second gear (590) are meshed and connected. The protrusion (570) is configured as an arc-shaped structure with a central outward protrusion and two concave sides. The ends of the rack plate (540) that are far apart are rotatably connected to rollers (580) through bearings. The protrusion (570) is in contact with the rollers (580), and the rollers (580) can slide and move outside the protrusion (570).

2. The apparatus for carburizing the outer ring of a cylindrical roller bearing according to claim 1, characterized in that, The reset assembly (550) includes two sets of connecting seats (551) disposed on the side away from the rack plate (540). A limit rod (552) is installed between the connecting seats (551), and a limit sleeve (553) is slidably connected on the limit rod (552). The limit sleeve (553) is fixedly connected to the rack plate (540). A spring (554) is also provided on the limit rod (552), and the two ends of the spring (554) are fixedly connected to the connecting seat (551) and the limit sleeve (553) respectively.

3. The apparatus for carburizing the outer ring of a cylindrical roller bearing according to claim 1, characterized in that, The base (510) is also provided with a turbulence unit (700), the turbulence unit (700) includes an internal gear ring (710) installed inside the movable groove, and the internal gear ring (710) is internally meshed with multiple sets of third gears (720). The base (510) is provided with multiple sets of connecting shafts (730), and the connecting shafts (730) are fixedly connected to the third gears (720). Multiple sets of impellers (740) are installed on the connecting shafts (730).

4. The apparatus for carburizing the outer ring of a cylindrical roller bearing according to claim 3, characterized in that, The furnace base (400) is provided with an annular groove, and an annular guide rail (750) is slidably connected in the annular groove. The annular guide rail (750) is fixedly connected to the base (510). The annular guide rail (750) is provided with a transmission cavity inside, and the transmission cavity is connected to the inside of the annular groove.

5. The carburizing treatment device for the outer ring of a cylindrical roller bearing according to claim 3, characterized in that, An air flow channel (760) is provided inside the furnace base (400), and the air flow channel (760) is connected to the inside of the annular slide groove. The air flow channel (760) is connected to the inside of the transmission cavity through the annular slide groove. A connecting pipe (770) is also installed on the furnace base (400), and the connecting pipe (770) is connected to the inside of the air flow channel (760).

6. The carburizing treatment device for the outer ring of a cylindrical roller bearing according to claim 3, characterized in that, The base (510) has an air supply chamber inside, and an annular slider (780) is installed on the connecting shaft (730). An annular slide is provided in the air supply chamber to match the annular slider (780), and the annular slide is slidably connected to the annular slider (780). An air flow groove is provided inside the connecting shaft (730), and the air flow groove is connected to the inside of the air supply chamber.

7. The apparatus for carburizing the outer ring of a cylindrical roller bearing according to claim 3, characterized in that, The impeller (740) has a dispersion groove inside, and the dispersion groove is connected to the airflow groove. The impeller (740) has several holes (790) inside, and the holes (790) are connected to the dispersion groove.

8. The apparatus for carburizing the outer ring of a cylindrical roller bearing according to claim 1, characterized in that, A placement rack (800) is installed on the base (510), and the placement rack (800) has several openings inside.

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