Monitoring device for laser signals and laser device

Abstract

The application relates to the technical field of laser signal monitoring, in particular to a laser signal monitoring device and laser equipment. The device comprises: a light splitting module, which is used for light splitting processing of a to-be-detected laser signal to obtain N laser signals; a laser detection module, which comprises N power detection circuits, the N power detection circuits correspond to the N laser signals one by one, and the N power detection circuits share a ground and a power supply; the N power detection circuits are all used for performing peak power detection on the corresponding laser signals to obtain N peak powers of the to-be-detected laser signal; each power detection circuit comprises a laser detection circuit, a power supply ripple sampling circuit and a controller; the output end of the laser detection circuit and the output end of the power supply ripple sampling circuit are both connected with the input end of the controller; the laser detection circuit and the power supply ripple sampling circuit share a ground and a power supply; and a control module is used for monitoring the to-be-detected laser signal based on the N peak powers of the to-be-detected laser signal.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser signal monitoring, in particular to a laser signal monitoring device and a laser device. BACKGROUND

[0002] In the related art, a common laser signal detection method is to detect the average power of the laser signal by using a power meter. However, in the application scenario of the laser signal, the peak power of the laser signal is needed to monitor the stability and safety of the laser signal. For the continuously emitted laser signal, the average power collected by the power meter is the peak power of the laser, but for the pulse emitted laser signal, the peak power of the laser cannot be obtained based on the collected average power. Directly monitoring the stability and safety based on the average power will cause misjudgment or omission. SUMMARY

[0003] The purpose of the present application is to provide a laser signal monitoring device and a laser device, which can accurately detect the peak power of the laser signal based on multiple detection circuits, thereby improving the accuracy of the monitoring result.

[0004] In a second aspect of the present application, a laser signal monitoring device is provided, comprising:

[0005] A light splitting module is configured to split and process the to-be-detected laser signal to obtain N laser signals, wherein N is an integer greater than 1.

[0006] The laser detection module comprises N power detection circuits corresponding to the N laser signals, and the N power detection circuits share a common ground and a common power supply; each of the N power detection circuits is configured to perform peak power detection based on the corresponding laser signal to obtain N peak powers of the laser signal to be detected; each of the power detection circuits comprises a laser detection circuit, a power supply ripple sampling circuit and a controller; the output end of the laser detection circuit and the output end of the power supply ripple sampling circuit are connected to the input end of the controller; the laser detection circuit and the power supply ripple sampling circuit share a common ground and a common power supply; the laser detection circuit is configured to convert the corresponding laser signal into a first voltage signal and perform sampling processing on the first voltage signal to obtain a first voltage signal sample value; the power supply ripple sampling circuit is configured to perform sampling processing on a second voltage signal determined based on a fixed resistance to obtain a second voltage signal sample value; the sampling processing manner of the power supply ripple sampling circuit on the signal is the same as the sampling processing manner of the laser detection circuit on the signal; the controller is configured to determine the peak power of the laser signal to be detected based on the first voltage signal sample value and the second voltage signal sample value; the process of determining the peak power of the laser signal to be detected based on the first voltage signal sample value and the second voltage signal sample value comprises: determining the difference between the first voltage signal sample value and the second voltage signal sample value; determining the signal value of the second voltage signal based on the voltage value of the power supply and the fixed resistance; obtaining the signal value of the first voltage signal based on the above difference and the signal value of the second voltage signal; obtaining the peak power of the laser signal to be detected based on the signal value of the first voltage signal.

[0007] The control module is connected to the output end of each of the power detection circuits; the control module is configured to monitor the laser signal to be detected based on the N peak powers of the laser signal to be detected.

[0008] In some embodiments, the laser detection circuit comprises a photodetector, a first amplification circuit and a first analog-to-digital converter; the photodetector is connected between a power supply and a ground; the split laser signal is irradiated to the photodetector; the signal output end of the photodetector is connected to the input end of the first amplification circuit; the output end of the first amplification circuit is connected to the input end of the first analog-to-digital converter; the output end of the first analog-to-digital converter is connected to the input end of the controller.

[0009] Optionally, the photodetector is a photodiode.

[0010] Optionally, the amplification coefficients of the N first amplification circuits in the laser detection module are the same.

[0011] In some embodiments, the power supply ripple sampling circuit comprises a first fixed resistor, a second fixed resistor, a second amplification circuit and a second analog-to-digital converter; the first fixed resistor is connected with a power supply and grounded through the second fixed resistor; a voltage signal output end of the second fixed resistor is connected with an input end of the second amplification circuit, and an output end of the second amplification circuit is connected with an input end of the second analog-to-digital converter; an output end of the second analog-to-digital converter is connected with an input end of the controller.

[0012] Optionally, amplification coefficients of the N second amplification circuits in the laser detection module are all the same.

[0013] Optionally, the light splitting module comprises a collimating mirror and N+1 lenses, and signal intensities of the N laser signals are the same.

[0014] As an example, the N is 2, the number of the N+1 lenses is 3, which are a first lens, a second lens and a third lens in sequence, and the two power detection circuits are a first power detection circuit and a second power detection circuit; the first lens is used for performing light splitting processing on the to-be-detected laser signal passing through the collimating mirror to generate first light splitting, the second lens is used for performing light splitting processing on the first light splitting to generate second light splitting and third light splitting, the second light splitting enters the first power detection circuit, and the third light splitting enters the second power detection circuit after being reflected by the third lens.

[0015] Optionally, a transmittance of the first lens is 97%-99%, a transmittance of the second lens is 40%-60%, and the third lens is a total reflection lens.

[0016] In the second aspect of the present application, a laser device is provided, comprising the laser signal monitoring device in the first aspect.

[0017] The laser signal monitoring device and the laser device provided by the present application have the following beneficial effects: on the one hand, the laser detection module comprises N power detection circuits, the N power detection circuits are all used for performing peak power detection based on corresponding laser signals to obtain N peak powers of the to-be-detected laser signal, the output end of each power detection circuit is connected with the control module, the to-be-detected laser signal can be monitored based on the N peak powers, the accuracy of monitoring can be improved through the redundant setting of the multiple power detection circuits, and the problems of false alarm or missed alarm caused by detection circuit failure can be avoided. On the other hand, each power detection circuit comprises a laser detection circuit, a power supply ripple sampling circuit and a controller, the influence of the power supply ripple signal on sampling can be excluded, the accuracy of the peak power output by the power detection circuit is improved, and the accuracy and reliability of laser signal monitoring are further improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description only aim at the embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of the provided drawings.

[0019] Figure 1 A structural schematic diagram of a laser signal monitoring device provided by an embodiment of the present application is shown in the figure.

[0020] Figure 2 A circuit schematic diagram of a power detection circuit for laser signal in an embodiment of the present application is shown in the figure.

[0021] Figure 3 A structural schematic diagram of another laser signal monitoring device provided by an embodiment of the present application is shown in the figure.

[0022] Figure 4 A structural schematic diagram of a laser signal monitoring device provided by an embodiment of the present application is shown in the figure.

[0023] Figure 5 An example diagram of a power detection circuit in an embodiment of the present application is shown in the figure. DETAILED DESCRIPTION

[0024] The technical solutions of the present application will be described clearly and completely below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without any creative effort belong to the protection scope of the present application.

[0025] Figure 1 A structural schematic diagram of a laser signal monitoring device provided by the present application is shown in the figure. Figure 1 As shown in the figure, the device comprises a light splitting module 1, a laser detection module 2 and a control module 3.

[0026] The light splitting module 1 is used for splitting and processing the laser signal to be detected to obtain N laser signals; wherein N is an integer greater than 1. The signal intensity of the N laser signals obtained after the splitting processing can be the same or different. Preferably, the signal intensity of the N laser signals obtained after the splitting processing can be the same.

[0027] As shown in the figure, Figure 1As shown, the laser detection module 2 includes N power detection circuits, which are power detection circuit 21, power detection circuit 22, …, and power detection circuit 2N. The N power detection circuits correspond to the N laser signals one by one, and the N power detection circuits share the ground and the power supply. After splitting, each laser signal is irradiated to the corresponding power detection circuit for power detection. The N power detection circuits are all used for peak power detection based on the corresponding laser signal to obtain N peak powers of the to-be-detected laser signal. Each power detection circuit includes a laser detection circuit, a power supply ripple sampling circuit, and a controller; the output end of the laser detection circuit and the output end of the power supply ripple sampling circuit are both connected to the input end of the controller; the laser detection circuit and the power supply ripple sampling circuit share the ground and the power supply.

[0028] That is, the constituent elements and connection modes of the N power detection circuits are all the same. For example, Figure 1 As shown, the first power detection circuit 21 is taken as an example for introduction, which includes a laser detection circuit 211, a power supply ripple sampling circuit 212, and a controller 213; the output end of the laser detection circuit 211 and the output end of the power supply ripple sampling circuit 212 are both connected to the input end of the controller 213; the laser detection circuit 211 and the power supply ripple sampling circuit 212 share the ground and the power supply.

[0029] In some embodiments, the laser detection circuit 211 is used for converting the corresponding laser signal into a first voltage signal and performing sampling processing on the first voltage signal to obtain a first voltage signal sample value. The power supply ripple sampling circuit 212 is used for performing sampling processing on a second voltage signal determined based on a fixed resistance to obtain a second voltage signal sample value. The sampling processing mode of the power supply ripple sampling circuit 212 on the signal is the same as the sampling processing mode of the laser detection circuit 211 on the signal; and the controller 213 is used for determining the peak power of the to-be-detected laser signal based on the first voltage signal sample value and the second voltage signal sample value.

[0030] In some embodiments, the output end of each power detection circuit is connected to the input end of the control module 3. The control module 3 is used for monitoring the to-be-detected laser signal based on the N peak powers of the to-be-detected laser signal.

[0031] As an example, the laser detection circuit can include a photodetector and an analog-to-digital converter. The laser signal is emitted to the photodetector to be converted into a first voltage signal, and the first voltage signal is sampled by the analog-to-digital converter to obtain a first voltage signal sample value.

[0032] As an example, the power supply ripple sampling circuit can include a plurality of fixed resistors and an analog-to-digital converter. After the plurality of fixed resistors are connected in series to the power supply, the voltage signal at the set position can be input to the analog-to-digital converter to obtain a second voltage signal sample value.

[0033] For high peak power laser, the detection can be made by a photodiode based on the circuit diagram as shown in Figure 2 Due to the small range of the photodiode probe, in order to avoid damage to the probe, the high peak power laser can be first split into a small part, such as 2%, and then the diffuse light obtained after homogenization is irradiated on the photodiode probe. As shown in Figure 2 The photodiode probe can convert the relatively weak laser signal into an electric signal, so the converted electric signal is also relatively weak. In order to improve the measurement accuracy, the electric signal can be amplified by an amplification circuit, and then transmitted to an ADC (Analog-to-Digital Converter) and finally transmitted to an MCU (Microcontroller Unit) or an FPGA (Field-Programmable Gate Array) for data reading and processing. However, the peak power of the laser signal obtained by the above scheme will be disturbed by the power supply ripple signal, especially after the amplification circuit, the power supply ripple signal will also be amplified to form an interference signal. Although a filter circuit is introduced in the circuit, it cannot completely filter all frequency bands of the interference ripple, so the signal received at the MCU end contains the power supply ripple signal, making the obtained power inaccurate.

[0034] As shown in Figure 1 The first voltage signal sample value obtained by the laser detection circuit 211 in the power detection circuit 21 contains the power supply ripple signal, and the second voltage signal sample value obtained by the power supply ripple sampling circuit 212 is the sample value of the second voltage signal and the sample value of the power supply ripple signal. The sample value of the second voltage signal can be determined based on a fixed value resistor, so the controller 213 in the power detection circuit 21 can strip the power supply ripple signal based on the first voltage signal sample value and the second voltage signal sample value, and obtain the peak power not disturbed by the power supply ripple signal, thereby improving the accuracy of the peak power of the laser signal to be measured.

[0035] As a possible implementation, for the scenario where the laser detection circuit and the power supply ripple sampling circuit both include an amplification circuit and the amplification coefficients are consistent, the process of determining the peak power of the laser signal to be measured by each controller based on the first voltage signal sample value and the second voltage signal sample value can include: determining the difference between the first voltage signal sample value and the second voltage signal sample value; determining the signal value of the second voltage signal based on the voltage value of the power supply and the fixed value resistor; obtaining the signal value of the first voltage signal based on the above difference and the signal value of the second voltage signal; and obtaining the peak power of the laser signal to be measured based on the signal value of the first voltage signal.

[0036] Specifically, as formula (1) below, the first voltage signal and the power supply ripple signal are processed by amplification to obtain the first voltage signal sample value; as formula (2) below, the second voltage signal and the power supply ripple signal are processed by amplification to obtain the second voltage signal sample value; the expression of the difference between the first voltage signal sample value and the second voltage signal sample value is obtained by combining formula (1) and formula (2), as shown in formula (3) below; based on the power supply voltage value in the power supply ripple sampling circuit and the fixed value resistance, the signal value of the second voltage signal can be obtained, which is substituted into formula (3), and the amplification coefficient of the amplification circuit is a known quantity, so that the signal value of the first voltage signal can be obtained; based on formula (4) below, the peak power of the to-be-measured voltage signal can be obtained.

[0037] (1);

[0038] (2);

[0039] (3);

[0040] (4);

[0041] Wherein, is the first voltage signal sample value; is the second voltage signal sample value; is the signal value of the first voltage signal; is the signal value of the second voltage signal; is the power supply ripple signal value; is the amplification coefficient; P is the peak power of the to-be-measured laser signal; is the responsivity of the laser detection circuit, which is related to the split glass of the laser signal splitting and the proportion of the laser homogenization irradiation on the probe, and can be determined based on the calibration test.

[0042] As another possible implementation, the process of determining the peak power of the to-be-measured laser signal based on the first voltage signal sample value and the second voltage signal sample value by each controller can include: determining the power supply ripple signal value based on the second voltage signal sample value; determining the peak power of the to-be-measured laser signal based on the power supply ripple signal value and the first voltage signal sample value.

[0043] As an example, the signal value of the second voltage signal can be determined based on the fixed value resistance first, and the power supply ripple signal value can be determined based on the signal value of the second voltage signal and the second voltage signal sample value; the signal value of the first voltage signal can be determined based on the first voltage signal sample value and the power supply ripple signal value; the peak power of the to-be-measured laser signal can be determined based on the signal value of the first voltage signal and the responsivity of the laser detection circuit.

[0044] In some embodiments, the control module 3 can perform size comparison based on the received N peak powers to exclude abnormal values; compare the remaining peak powers with a first peak power threshold and a second peak power threshold; and if the number of peak powers greater than the first peak power threshold or less than the second peak power threshold is greater than or equal to a threshold, issue a warning signal, which not only excludes the influence of device abnormalities, but also makes the monitoring result more reliable, and realizes accurate monitoring of the to-be-tested laser signal. The first peak power threshold is greater than the second peak power threshold.

[0045] In other embodiments, the control module 3 can also perform size comparison based on the received N peak powers, and if there is an abnormal value, issue a failure warning to timely inform relevant staff of a failure of the power detection circuit in the laser detection module.

[0046] In some embodiments, the laser detection circuit and the power supply ripple sampling circuit can each include a filter circuit.

[0047] Optionally, the above-mentioned controller and control module can be an MCU or a PFGA.

[0048] The laser signal monitoring device according to the present application, on the one hand, since the laser detection module includes N power detection circuits, each of the N power detection circuits is used for performing peak power detection based on a corresponding laser signal to obtain N peak powers of the to-be-tested laser signal, and the control module is connected with the output end of each power detection circuit, and can monitor the to-be-tested laser signal based on the N peak powers, and the redundancy of the multiple power detection circuits can improve the accuracy of monitoring and avoid false positives or false negatives caused by detection circuit failure. On the other hand, each power detection circuit includes a laser detection circuit, a power supply ripple sampling circuit and a controller, which can exclude the influence of the power supply ripple signal on sampling and improve the accuracy of the peak power output by the power detection circuit, thereby further improving the accuracy and reliability of the laser signal monitoring.

[0049] Figure 3 Another structure diagram of the laser signal monitoring device provided by the present application is shown. Since the constituent elements and connection modes of each power detection circuit are the same, Figure 3 Take the first power detection circuit 21 in the laser detection module 2 as an example. As shown in FIG. 2, the first power detection circuit 21 includes a laser detection circuit 211, a power supply ripple sampling circuit 212 and a controller 213. Figure 3As shown, the laser detection circuit 211 includes a photodetector 211-1, a first amplification circuit 211-2, and a first analog-to-digital converter 211-3; the photodetector 211-1 is connected between a power supply and a ground, the split laser signal is irradiated to the photodetector 211-1, the signal output end of the photodetector 211-1 is connected with the input end of the first amplification circuit 211-2, the output end of the first amplification circuit 211-2 is connected with the input end of the first analog-to-digital converter 211-3, and the output end of the first analog-to-digital converter 211-3 is connected with the input end of the controller 213.

[0050] In some embodiments, the photodetector 211-1 can be a photodiode. The amplification coefficients of the N first amplification circuits in the laser detection module 2 can be the same or different. Preferably, the amplification coefficients of the N first amplification circuits in the laser detection module 2 are the same.

[0051] In some embodiments, as shown, Figure 3 As shown, the power supply ripple sampling circuit 212 includes a first fixed resistor 212-1, a second fixed resistor 212-2, a second amplification circuit 212-3, and a second analog-to-digital converter 212-4; the first fixed resistor 212-1 is connected with a power supply and grounded through the second fixed resistor 212-2; the voltage signal output end of the second fixed resistor 212-2 is connected with the input end of the second amplification circuit 212-3, the output end of the second amplification circuit 212-3 is connected with the input end of the second analog-to-digital converter 212-4; and the output end of the second analog-to-digital converter 212-4 is connected with the input end of the controller 213.

[0052] In some embodiments, the amplification coefficients of the N second amplification circuits in the laser detection module 2 can be the same or different. Preferably, the amplification coefficients of the N second amplification circuits are the same. The amplification coefficients of the N first amplification circuits and the amplification coefficients of the N second amplification circuits can be the same or different.

[0053] In some embodiments, the light splitting module includes a collimating mirror and N+1 lenses, and the signal strengths of the N laser signals are the same. The to-be-detected laser signal is irradiated to the collimating mirror to convert the to-be-detected laser signal into a straight laser signal, the straight laser signal is reflected by the N+1 lenses to obtain the N laser signals. Since the range of the photodetector is small, the straight laser signal is usually split by 2% by a lens first, and the 2% laser signal is reflected by the N lenses to obtain the N laser signals.

[0054] Next, the laser signal monitoring device in the embodiment of the application is introduced by taking N=2 as an example.

[0055] As shown, Figure 4As shown, the monitoring device of the laser signal comprises a collimating mirror, three lenses, two power detection circuits and an MCU / PFGA. The three lenses are a first lens, a second lens and a third lens in sequence, and the two power detection circuits are a first power detection circuit and a second power detection circuit; the first lens is used for splitting the laser signal to be detected passing through the collimating mirror to generate a first split light, the second lens is used for splitting the first split light to generate a second split light and a third split light, the second split light enters the first power detection circuit, and the third split light enters the second power detection circuit after being reflected by the third lens.

[0056] In some embodiments, the transmittance of the first lens is 97%-99%, the transmittance of the second lens is 40%-60%, and the third lens is a total reflection lens.

[0057] Taking the transmittance of the first lens as 98% and the transmittance of the second lens as 50% as an example, the laser signal to be detected passes through the collimating mirror and irradiates to the first lens, 2% of the first lens (first split light) enters the second lens, 50% of the laser signal of the second lens (second split light) enters the first power detection circuit for power detection, and the laser signal (third split light) transmitted by the second lens enters the second power detection circuit for power detection after being reflected by 100% by the third lens, and the output ends of the first power detection circuit and the second power detection circuit are connected with the input end of the MCU / FGPA.

[0058] Wherein, the signal intensity of the laser signal to be detected is Pp, the intensity of the laser signal (first split light) after being split by 2% of the first lens is Pp1=2%Pp, the signal intensity of the laser signal (second split light) after being split by 50% of the second lens is Pp2=50%Pp1=1%Pp, the signal intensity of the laser signal (third split light) transmitted by the second lens is Pp3=50%Pp1=1%Pp, and the signal intensity of the laser signal after being split by 100% by the third lens to the laser signal (third split light) transmitted by the second lens is Pp4=100%Pp3=50%Pp1=1%Pp.

[0059] Exemplarily, Figure 5 is an example diagram of a power detection circuit in the embodiments of the present application. As shown in the figure, Figure 5As shown, each power detection circuit in the laser signal monitoring device comprises a laser detection circuit, a power ripple sampling circuit and an MCU / FPGA. The laser detection circuit comprises a photodiode, a signal filter amplification circuit 1 and an ADC 1, and the power ripple sampling circuit comprises a constant resistor R3, a constant resistor R4, a signal filter amplification circuit 2 and an ADC 2. The laser detection circuit and the power ripple sampling circuit share a power supply and a ground, the cathode of the photodiode is connected to the power supply through a bias resistor R1, the anode is grounded through a grounding resistor R2, the signal output end of the photodiode is connected to the input end of the signal filter amplification circuit 1, and the output end of the signal filter amplification circuit 1 is connected to the ADC 1. The constant resistor R3 is connected to the power supply and grounded through the constant resistor 4, the voltage signal output end of the constant resistor R4 is connected to the input end of the signal filter amplification circuit 2, and the output end of the signal filter amplification circuit 2 is connected to the ADC 2. The output ends of the ADC 1 and the ADC 2 are connected to the MCU / FPGA. The amplification coefficient of the signal filter amplification circuit 1 and the amplification coefficient of the signal filter amplification circuit 2 can be the same or different. The resistance values of R4 and R2 can be the same or different. The voltage of the power supply can also be determined based on actual needs. Figure 5 The power supply in the above embodiment is 5V.

[0060] The application further provides a laser device comprising the laser signal monitoring device in the above embodiment. The laser device can be a laser processing device, a laser medical device or the like. Since the laser signal monitoring device can accurately monitor the laser signal, the safety and stability of the laser device are improved.

[0061] In the description of the present application, it should be noted that the terms "upper", "lower", "front", "horizontal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0062] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the term "mounting" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected, it can be mechanically connected, or electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, or it can be the communication between two elements. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0063] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application; although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions recorded in the above embodiments can be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A monitoring device of a laser signal, characterized in that, include: The beam splitting module is used to split the laser signal under test into N laser signals; where N is an integer greater than 1. A laser detection module includes N power detection circuits, each corresponding one-to-one with one of the N laser signals. The N power detection circuits share a common ground and power supply. Each of the N power detection circuits is used to detect the peak power of the corresponding laser signal, obtaining N peak powers of the laser signal under test. Each power detection circuit includes a laser detection circuit, a power ripple sampling circuit, and a controller. The output terminals of the laser detection circuit and the power ripple sampling circuit are both connected to the input terminal of the controller. The laser detection circuit and the power ripple sampling circuit share a common ground and power supply. The laser detection circuit converts the corresponding laser signal into a first voltage signal and samples the first voltage signal to obtain a sampled value. The power ripple sampling circuit is used to sample a second voltage signal determined based on a fixed resistor. The voltage signal is sampled to obtain a second voltage signal sample value; the power supply ripple sampling circuit processes the signal in the same way as the laser detection circuit; the controller is used to determine the peak power of the laser signal under test based on the first voltage signal sample value and the second voltage signal sample value. The process of the controller determining the peak power of the laser signal under test based on the first voltage signal sample value and the second voltage signal sample value includes: determining the difference between the first voltage signal sample value and the second voltage signal sample value; determining the signal value of the second voltage signal based on the power supply voltage value and the fixed resistor; obtaining the signal value of the first voltage signal based on the above difference and the signal value of the second voltage signal; and obtaining the peak power of the laser signal under test based on the signal value of the first voltage signal. The control module is configured such that the output of each power detection circuit is connected to the input of the control module; the control module is used to monitor the laser signal under test based on N peak powers of the laser signal under test.

2. The apparatus of claim 1, wherein, The laser detection circuit includes a photodetector, a first amplifier circuit, and a first analog-to-digital converter. The photodetector is connected between the power supply and the ground wire. The split laser signal illuminates the photodetector. The signal output terminal of the photodetector is connected to the input terminal of the first amplifier circuit. The output terminal of the first amplifier circuit is connected to the input terminal of the first analog-to-digital converter. The output terminal of the first analog-to-digital converter is connected to the input terminal of the controller.

3. The apparatus of claim 2, wherein, The photodetector is a photodiode.

4. The apparatus of claim 2, wherein, The amplification factor of all N first amplifier circuits in the laser detection module is the same.

5. The apparatus of claim 1, wherein, The power supply ripple sampling circuit comprises a first fixed resistor, a second fixed resistor, a second amplification circuit and a second analog-to-digital converter; the first fixed resistor is connected with a power supply and grounded through the second fixed resistor; a voltage signal output end of the second fixed resistor is connected with an input end of the second amplification circuit, and an output end of the second amplification circuit is connected with an input end of the second analog-to-digital converter; an output end of the second analog-to-digital converter is connected with an input end of the controller.

6. The apparatus of claim 5, wherein, The amplification coefficients of the N second amplification circuits in the laser detection module are all the same.

7. The apparatus of claim 1, wherein, The light splitting module comprises a collimating mirror and N+1 lenses, and the signal strengths of the N laser signals are the same.

8. The apparatus of claim 7, wherein, The N is 2, the number of the N+1 lenses is 3, and the lenses are a first lens, a second lens and a third lens in sequence, and the two power detection circuits are a first power detection circuit and a second power detection circuit; the first lens is used for performing light splitting processing on the to-be-measured laser signal passing through the collimating mirror to generate first light splitting, the second lens is used for performing light splitting processing on the first light splitting to generate second light splitting and third light splitting, the second light splitting enters the first power detection circuit, and the third light splitting enters the second power detection circuit after being reflected by the third lens.

9. The apparatus of claim 8, wherein, The transmittance of the first lens is 97%-99%, the transmittance of the second lens is 40%-60%, and the third lens is a total reflection lens.

10. A laser apparatus, characterized by comprising: The monitoring device of the laser signal comprises the laser signal monitoring device according to any one of the preceding claims 1 to 9. The monitoring device of the laser signal comprises the laser signal monitoring device according to any one of the preceding claims 1 to 9.

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