A droplet collection structure, cavity, wafer processing equipment, and droplet collection method.

Abstract

This invention discloses a droplet collection structure, cavity, wafer processing equipment, and droplet collection method, belonging to the field of semiconductor manufacturing technology. The droplet collection structure includes multiple protrusions arranged in an array or at equal intervals along a first direction. The maximum width of any protrusion along the first direction is M, and the height of any protrusion along a second direction is H. A channel extending linearly along a third direction and opening downwards is formed between any two adjacent protrusions. The cross-sectional shape of the channel is the same as or similar to the cross-sectional shape of the protrusion, and the maximum width N of the channel is less than or equal to the width M of the protrusion. The first, second, and third directions are arranged at angles to each other. H is greater than or equal to 1.1N and less than or equal to 20N, and N is less than or equal to 1mm. The droplet collection structure, cavity, wafer processing equipment, and droplet collection method of this invention can capture sputtered droplets and guide their directional flow along the channel, preventing the droplets from falling randomly.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a droplet collection structure, cavity, wafer processing equipment, and droplet collection method. Background Technology

[0002] Before the electroplating process, wafers undergo pretreatment, typically including pre-cleaning and pre-wetting. Pre-cleaning involves cleaning one or more recessed features on the wafer surface to be electroplated to remove impurities. Pre-wetting involves immersing one or more recessed features on the wafer surface to be electroplated with a pre-wetting solution to remove air bubbles from the wafer's plating surface, ensuring that no air bubbles are generated in the metal layer plated on the recessed features during subsequent electroplating.

[0003] During the pre-wetting process, the nozzle sprays cleaning fluid onto the wafer surface. Droplets of cleaning fluid splashed onto the inner surface of the wetting chamber (such as the top cover) often adhere to this surface. Under gravity, these droplets can fall irregularly onto the wafer surface, affecting the wetting effect and potentially causing localized oxidation and wafer failure. Furthermore, when the robotic arm enters the pre-wetting chamber to pick up or place wafers, droplets remaining on the inner surface of the top cover can drip onto the robotic arm, causing contamination and corrosion.

[0004] To address these issues, one approach in related technologies is to use a hydrophobic / superhydrophobic coating on the cavity surface to reduce droplet adhesion. However, this coating has poor durability in the humid environment of the cavity. Another approach involves constructing micro / nanostructures on the cavity surface. These structures can form cavitation between the droplet and the solid-liquid interface of the material, creating an air gap that achieves hydrophobicity. However, when the cavity is evacuated, the gas in the cavitation may be extracted, causing the cavitation to disappear and allowing the droplet to directly contact the material surface, thus negating the water-blocking effect.

[0005] Therefore, there is an urgent need for a droplet collection structure, cavity, wafer processing equipment, and droplet collection method to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to provide a droplet collection structure, cavity, wafer processing equipment, and droplet collection method that can effectively capture sputtered droplets and direct them to flow along the channel to prevent them from falling.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] A droplet collection structure, comprising:

[0009] Multiple protrusions, wherein the multiple protrusions are arranged in an array or at equal intervals along a first direction;

[0010] Along the first direction, the maximum width of any one of the protrusions is M;

[0011] Along the second direction, the height H between any of the protrusions and the highest point of the protrusion from the plane in which the protrusions are arrayed or equally spaced along the first direction, and the second direction is set at an angle to the first direction;

[0012] A channel is formed between any two adjacent protrusions, extending in a straight line along a third direction and opening downwards. The shape of the cross-section of the channel is the same as or similar to the shape of the cross-section of the protrusion, and the maximum width N of the channel is less than or equal to the maximum width M of the protrusion. The third direction is set at an angle to both the first direction and the second direction.

[0013] Wherein, H is greater than or equal to 1.1N and less than or equal to 20N, and the maximum width N of the channel is less than or equal to 1mm;

[0014] The droplet collection structure also includes an air blowing assembly, which includes a plurality of air blowing tubes, with the air blowing holes of the air blowing tubes facing the first end of the channel.

[0015] In some embodiments, the protrusion is a triangular protrusion, and two adjacent triangular protrusions are connected to each other, such that the channel formed by two adjacent triangular protrusions is a triangular channel, and the maximum width N of the triangular channel is related to the width M of the triangular protrusion as follows: N is greater than or equal to 0.2M.

[0016] In some embodiments, the included angle at the top of the triangular protrusion is 45° to 75°.

[0017] In some embodiments, the protrusion is a rectangular protrusion, and the relationship between the width N of the channel formed between two adjacent rectangular protrusions and the width M of the rectangular protrusion is: N is greater than or equal to 0.2M.

[0018] In some embodiments, the protrusion is an arc-shaped protrusion, and the relationship between the maximum width N of the channel formed between two adjacent arc-shaped protrusions and the width M of the arc-shaped protrusion is: N is greater than or equal to 0.2M.

[0019] In some embodiments, the sidewalls on both sides of the channel capture splashed droplets, and the droplets slide from the sidewalls on both sides of the channel into the interior of the channel to form a liquid film covering part or all of the interior wall surface of the channel.

[0020] In some embodiments, a support member is further included, the support member having a support surface, and the protrusion being disposed on the support surface.

[0021] In some embodiments, the channel is inclined or vertically arranged relative to the horizontal plane, such that the height of the first end of the channel is higher than the height of the second end of the channel.

[0022] In some embodiments, the horizontal upward tilt angle of the channel is greater than or equal to 15°.

[0023] In some embodiments, the air blowing pipes are spaced apart along a first direction, and the number of air blowing pipes is less than or equal to the number of channels, such that one of the channels can be blown by at least one of the air blowing pipes.

[0024] In some embodiments, the channel is arranged horizontally, inclined, or vertically.

[0025] A cavity includes a cover and a droplet collection structure as described in any of the preceding claims, the droplet collection structure being disposed on the inner sidewall and / or inner top wall of the cover.

[0026] In some embodiments, the droplet collection structure is disposed on the inner top wall of the cover, the inner top wall is divided into a first region and a second region, the protrusion and the channel are located in the first region, the air blowing assembly is located in the second region, and the air blowing hole of the air blowing assembly faces the first end of the channel.

[0027] In some embodiments, the first region and the second region are arranged in an arch shape.

[0028] A wafer processing apparatus, comprising a cavity as described in any of the preceding claims.

[0029] A droplet collection method based on the droplet collection structure described in any of the preceding claims, comprising:

[0030] The channel captures the splashed droplets, causing them to fall into the channel and form a more wettable area inside the channel;

[0031] Under the action of capillary force, a liquid film is formed in the channel;

[0032] As the droplets are continuously injected, the liquid film gradually bulges, causing a Laplace pressure differential;

[0033] Under the influence of Laplace pressure and external force, the liquid in the liquid film flows directionally along the channel.

[0034] The beneficial effects of this invention are:

[0035] This invention provides a droplet collection structure, cavity, wafer processing equipment, and droplet collection method. The captured droplets undergo the following four stages: In the first stage, the splashed droplets are captured in the channel, and the channel is enveloped by the droplets from the bottom to the opening, forming a region with higher wettability, which further promotes the droplets to spontaneously move towards the channel with higher wettability; In the second stage, under the action of capillary force, the droplets are anchored in the channel to form a liquid film; In the third stage, as the droplets continue to slide into the channel, the liquid film gradually bulges, causing a Laplace pressure difference; In the fourth stage, under the action of the Laplace pressure difference and other external forces (such as gravity), the liquid film in the channel flows directionally along the channel, reducing the thickness of the liquid film. Through the above four stages, the functions of capturing droplets and guiding them are completed, preventing the droplets from falling randomly. When droplet collection structures are used in wafer processing equipment, they can prevent droplets from falling randomly onto the wafer surface. This ensures two things: first, it does not affect the wafer wetting and other processing effects, thus guaranteeing the smooth progress of subsequent processes; second, when the robotic arm picks up and places wafers, no droplets will fall onto the robotic arm, avoiding contamination and corrosion of the robotic arm. Attached Figure Description

[0036] Figure 1 This is a side view of the droplet collection structure provided in a specific embodiment of the present invention;

[0037] Figure 2 This is a schematic diagram of the droplet collection structure provided in the first stage according to a specific embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of the droplet collection structure provided in the second stage according to a specific embodiment of the present invention;

[0039] Figure 4 This is a schematic diagram of the droplet collection structure provided in the third stage according to a specific embodiment of the present invention;

[0040] Figure 5 This is a schematic diagram of the droplet collection structure provided in the fourth stage according to a specific embodiment of the present invention;

[0041] Figure 6 This is a side view of a droplet collection structure according to another embodiment of the present invention;

[0042] Figure 7 This is a side view of a droplet collection structure according to another embodiment of the present invention.

[0043] Figure 8 This is a schematic diagram of the cavity provided in a specific embodiment of the present invention;

[0044] Figure 9 This is a partially enlarged schematic diagram of the cavity provided in a specific embodiment of the present invention;

[0045] Figure 10 This is another partially enlarged schematic diagram of the cavity provided in a specific embodiment of the present invention;

[0046] Figure 11 This is a schematic diagram showing the corresponding arrangement of the channel and the air blowing pipe according to a specific embodiment of the present invention.

[0047] In the picture:

[0048] 100, Support component; 110, Support surface; 200, Protrusion; 300, Channel; 400, Air blowing assembly; 410, Air blowing hole; 420, Air blowing pipe; 500, Cover; 510, Inner top wall; 511, First region; 512, Second region; 520, Inner side wall; A, Droplet; B, Liquid film. Detailed Implementation

[0049] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0051] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0052] like Figures 1-7As shown, this embodiment provides a droplet collection structure, including multiple protrusions 200, which are arranged in an array or at equal intervals along a first direction. Along the first direction, the width of any protrusion 200 is M. Along the second direction, the height of any protrusion 200 from the plane in which the protrusions are arranged in the array or at equal intervals along the first direction to the highest point of the protrusion 200 is H. The second direction forms an angle with the first direction. A channel 300 extending linearly along a third direction and opening downwards is formed between any two adjacent protrusions 200. The cross-sectional shape of the channel 300 is the same as or similar to the cross-sectional shape of the protrusion 200, and the maximum width N of the channel 300 is less than or equal to the width M of the protrusion 200. The third direction forms an angle with both the first and second directions. H is greater than or equal to 1.1N and less than or equal to 20N, and the maximum width N of the channel 300 is less than or equal to 1mm. Optionally, the second direction is a vertical direction, and both the first and third directions are perpendicular to the second direction.

[0053] The above dimensions and size settings are designed to capture droplet A and prevent it from falling. This solution is generally only applied to pretreatment processes of wafers before electroplating (including pre-cleaning and pre-wetting processes; the pre-cleaning process removes impurities from the wafer's plating surface to prevent them from affecting subsequent processes; the pre-wetting process applies a liquid film to the surface of the wafer's plating surface. During electroplating, the plating solution contacts the liquid film, and then a metal layer is electroplated onto the wafer's plating surface, preventing the formation of air bubbles in the metal layer during electroplating, which could affect subsequent processes). In the above pretreatment process, the size of the splashed droplet A meets the design requirements for capturing it and preventing it from falling.

[0054] The droplet collection structure includes multiple parallel protrusions 200 and linear channels 300 formed between any two adjacent protrusions 200. The protrusions 200 are arranged in an array along a first direction, forming multiple parallel channels 300 extending along a third direction. The protrusions 200 and channels 300 are alternately arranged, and the sides of the protrusions 200 form the sidewalls of the channels 300. By defining the relationship between the height H of the protrusion 200 and the maximum width N of the channel 300, and the relationship between the maximum width N of the channel 300 and the maximum width M of the protrusion 200, such that N≤M, 1.1N≤H≤20N, and N is less than or equal to 1mm, the maximum width of the channel 300 is less than the maximum width of the protrusion 200, and the maximum width of the channel 300 is less than or equal to 1mm. This makes the droplet collection structure more suitable for applications where the droplet A is extremely small (such as micron-sized droplets), such as in humid environments during pre-cleaning and pre-wetting processes.

[0055] In some cases, when the opening of the channel 300 faces downwards, the extremely small droplet A, with its very weak gravity, is less affected by gravity and is less likely to fall after actively contacting the sidewall of the channel 300, thus achieving the capture of droplet A. Specifically, the captured droplet A undergoes the following four stages: In the first stage, the splashed droplet A is captured in the channel 300, and the channel 300 is enveloped by droplet A from the bottom to the opening, forming a region with higher wettability, further prompting droplet A to spontaneously move towards the channel 300 with higher wettability; In the second stage, under the action of capillary force, droplet A is anchored in the channel 300, forming a liquid film B; In the third stage, as droplet A continues to slide into the channel 300, the liquid film B gradually bulges, causing a Laplace pressure difference; In the fourth stage, under the action of the Laplace pressure difference and other external forces (such as gravity), the liquid film B in the channel 300 flows directionally along the channel 300, reducing the thickness of the liquid film B. The above four stages complete the functions of capturing droplet A and diverting it, preventing droplet A from falling erratically.

[0056] In one specific embodiment, the change in the contact angle between the captured droplet A and the surface of the channel 300 of the droplet collection structure is shown in Table 1. During the process of droplet A being captured by adsorption and capillary force to form a liquid film B, the contact angle decreases from number 1 to number 4. Essentially, this represents a process where the surface's contact with droplet A transforms into active adsorption and guided spreading. Each angle corresponds to a key stage in the formation of liquid film B, specifically initial attachment, stable retention, capillary force triggering, and liquid film B formation, ultimately achieving the transformation from an isolated droplet A to a continuous liquid film B. Details are as follows:

[0057] Item 1, with a contact angle of approximately 130° and strong hydrophobicity, functions as follows: the surface energy of the surface is lower than the surface tension of the micron-sized droplet A. Droplet A has not yet significantly spread upon contact with the surface; this process corresponds to the steps preceding the first stage. At this point, because the hydrophilicity of the channel surface is still weak or nonexistent, the contact angle is relatively large when droplet A is captured by channel 300. The material of channel 300 can be various materials such as polymethyl methacrylate.

[0058] Number 2 has a contact angle of about 100° and moderate hydrophobicity. Its function is to increase the force of the surface that captures micron-sized droplet A on droplet A. At this time, the adhesion force of micron-sized droplet A is slightly greater than its gravity. After contact, droplet A will temporarily adhere in a hemispherical shape due to cohesion (no longer rolling directly down), realizing the initial adsorption of droplet A on the structural surface and reducing loss. This process corresponds to the first stage.

[0059] Item 3, with a contact angle of approximately 60° and moderate hydrophilicity, functions as follows: The adhesion force of the moderately hydrophilic surface is greater than the intermolecular cohesive force. After contact, droplet A slowly spreads, and small droplets A continuously aggregate into larger droplets A. The larger droplets A collapse and slide into channel 300. At this point, the width of channel 300, in conjunction with the moderately hydrophilic surface, triggers capillary forces (the narrower the gap in channel 300, the stronger the capillary force), "drawing" the small droplets A dispersed at the opening of channel 300 into the channel 300, preventing them from accumulating at the opening and reducing backflow caused by gravity. This accumulates sufficient liquid volume for the subsequent formation of liquid film B, corresponding to the second stage.

[0060] Item 4, with a contact angle of approximately 40°, exhibits strong hydrophilicity. Its function is as follows: the adhesion force of the strongly hydrophilic surface is much greater than the intermolecular cohesive force of droplet A. Under the combined action of capillary force and surface adsorption force, the liquid concentrated in channel 300 will rapidly diffuse along the channel wall, covering the entire sidewall of channel 300, forming a continuous and unbroken liquid film B on the sidewall of channel 300. At the same time, the strong hydrophilicity can maintain the stability of liquid film B, avoiding the rupture of liquid film B due to local surface repulsion. Finally, the entire process from capture to liquid film formation B is completed, which corresponds to the third stage.

[0061] Table 1 - Variation of water contact angle between droplets and channel surface

[0062]

[0063] It is understood that the contact angle values ​​above are all measured values, representing only one or more measurements. Therefore, the average value only represents an average calculation. These values ​​are not absolute and are allowed to vary moderately.

[0064] By limiting the height of the protrusion 200 to be 1.1 to 20 times the width of the channel 300, the height of the protrusion 200 is prevented from being too small, which would prevent the channel 300 from providing sufficient space for the capillary force, resulting in insufficient adsorption capacity and volume. At the same time, the height of the protrusion 200 is prevented from being too large, which would cause the downward pulling force of gravity on droplet A to far exceed the upward adsorption force of the capillary force, causing the captured droplet A to flow back downward and fall, thus achieving a better capture effect.

[0065] Optionally, the value of N can be 0.1mm, 0.2mm, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm or 1mm, etc.; the value of H can be 1.1N, 2N, 4N, 6N, 8N, 10N, 12N, 14N, 16N, 18N or 20N, etc.

[0066] The side walls on both sides of the channel 300 capture the splashed droplets A, and the droplets A slide down from the side walls of the channel 300 into the interior of the channel 300, forming a liquid film B covering part or all of the interior wall surface of the channel 300. In addition, the top of the protrusion 200 can also capture liquid, but the capture effect of the top is worse than that of the side walls of the channel 300.

[0067] In some embodiments, such as Figure 1 As shown, protrusion 200 is a triangular protrusion, and two adjacent triangular protrusions are connected to each other, making the channel 300 formed by two adjacent triangular protrusions a triangular channel. The side of the triangular protrusion or the sidewall of the triangular channel is inclined. When it is enveloped by droplet A to form a region with higher wettability, it has a guiding function and can easily move into the channel 300. The maximum width N of the triangular channel is related to the width M of the triangular protrusion as follows: N is greater than or equal to 0.2M and less than or equal to M, and N is less than or equal to 1mm. By limiting the width of the triangular protrusion and the width relationship of the triangular channel, the stability of the triangular protrusion is improved, preventing problems such as tilting or breakage, reducing deformation of the sidewall of the channel 300, and effectively avoiding capillary force failure. Specifically, N can be equal to 0.2M, 0.3M, 0.4M, 0.5M, 0.6M, 0.7M, 0.8M, 0.9M, or M, etc., but of course, N is less than or equal to 1mm.

[0068] Optionally, the included angle at the top of the triangular protrusion is between 45° and 75°. This included angle affects the opening size of the channel 300; a larger angle results in a larger opening, and a smaller angle results in a smaller opening. A larger opening of the channel 300 provides a larger contact area with the outside, making it easier to capture droplet A. Conversely, a smaller opening results in a stronger capillary force. Therefore, by limiting the included angle at the top of the triangular protrusion, the effectiveness of capturing droplet A can be ensured. Specifically, the included angle at the top of the triangular protrusion can be 45 degrees, 60 degrees, or 75 degrees, etc.

[0069] like Figure 6 As shown, in some embodiments, the protrusion 200 is a rectangular protrusion. The relationship between the width N of the channel 300 formed between two adjacent rectangular protrusions and the width M of the rectangular protrusion is: N is greater than or equal to 0.2M and less than or equal to M. By setting it as a rectangular protrusion and limiting the width relationship between the rectangular protrusion and the channel 300, the stability of the rectangular protrusion is improved, preventing problems such as tilting or breakage, reducing deformation of the sidewall of the channel 300, and effectively avoiding capillary force failure. Optionally, the side of the rectangular protrusion forms the sidewall of the channel 300, the channel 300 is formed as a rectangular channel 300, the four corners of the rectangular protrusion are right angles, the sidewall of the channel 300 is a plane, the height of the rectangular protrusion is the depth of the channel 300, and the height of the channel 300 is 1 to 5 times the width of the channel 300.

[0070] like Figure 7 As shown, in some embodiments, the protrusion 200 is an arc-shaped protrusion. The relationship between the maximum width N of the channel 300 formed between two adjacent arc-shaped protrusions and the width M of the arc-shaped protrusion is: N is greater than or equal to 0.2M and less than or equal to M. The channel 300 has a small width and a certain depth. Under the action of capillary force, the droplet A is easily anchored in the channel 300 to form a liquid film B. By limiting the relationship between the maximum width N of the channel 300 and the width M of the arc-shaped protrusion, the stability of the arc-shaped protrusion is improved, preventing problems such as tilting or breakage. This reduces the deformation of the sidewall of the channel 300 and effectively avoids capillary force failure.

[0071] The above lists different shapes of protrusions. This embodiment is not limited to the specific shapes listed above; they are provided to better illustrate the technology involved in this invention. Other similar structures are equivalent solutions that can be implemented in this embodiment, and they will not be described in detail here. Furthermore, the limiting relationships between N and M, and N and H defined above, all apply to the structures described above.

[0072] The droplet collection structure also includes a support member 100, which has a support surface 110. A protrusion 200 is disposed on the support surface 110. When the protrusion 200 is a rectangular protrusion, the support surface 110 forms the bottom wall of the channel 300. Optionally, the support member 100 and the protrusion 200 are an integral structure. For example, the channel 300 is machined on the support member 100 to form the protrusion 200, making the integral structure more stable.

[0073] The channel 300 is inclined or extended vertically relative to the horizontal plane, so that the height of the first end of the channel 300 is higher than the height of the second end of the channel 300. The liquid film B in the channel 300 is subjected to the Laplace pressure difference and gravity, so that the liquid film B in the channel 300 is subjected to a downward component force and flows directionally from the high position to the low position.

[0074] The horizontal upward tilt angle of the channel 300 is generally greater than or equal to 15°. The larger the tilt angle, the greater the downward force on the liquid film B in the channel 300, and the easier it is to flow from the high position to the low position. For example, the tilt angle of the channel 300 is 15°, 30°, 45°, 60°, 75° or 90°, etc.

[0075] The droplet collection structure also includes an air blowing assembly 400, which includes multiple air blowing pipes. The air blowing holes 410 of the air blowing pipes 420 face the first end of the channel 300. The external force on the liquid film B in the channel 300 comes from the air blowing of the air blowing pipes 420. The liquid film B in the channel 300 is subjected to the force of the Laplace pressure difference and the air blowing holes 410, causing the liquid film B in the channel 300 to flow directionally from the starting end (first end) to the tail end (second end) along the direction of the force.

[0076] Air blowing pipes 420 are spaced apart along a first direction, and the number of air blowing pipes 420 is less than or equal to the number of channels 300, such that a channel 300 can be blown by at least one air blowing pipe 420, for example, a channel 300 can be blown by one air blowing pipe 420, or a channel 300 can be blown by two or more air blowing pipes 420 simultaneously. The air blowing pipes 420 can be arranged vertically or at an angle. In one embodiment, the air blowing ports of the air blowing pipes 420 correspond one-to-one with the channels 300 to ensure that the liquid film B within the channels 300 is subjected to uniform force. In another embodiment, such as... Figure 11 As shown, Figure 11 In the diagram, on the left side, the first, second, and third air-blowing pipes are arranged sequentially from top to bottom. On the right side, starting from the numbered sections, nine channels 300 are arranged sequentially from top to bottom, numbered one to nine. The first air-blowing pipe corresponds to the first channel, the second air-blowing pipe corresponds to the fourth channel, and the third air-blowing pipe corresponds to the seventh channel. The air-blowing components 400 and the channels 300 are spaced apart, allowing the air blown by the air-blowing pipe 420 to act on adjacent channels 300. Thus, the first air-blowing pipe blows air into the first channel with a stronger blowing force, and can also blow air into the second and third channels with a weaker blowing force. Similarly, the second air-blowing pipe blows air into the fourth channel with a stronger blowing force, and can also blow air into the second and third channels, as well as the fifth and sixth channels with a weaker blowing force. However, the second and third channels receive air from both the first and second air-blowing pipes simultaneously, resulting in a combined blowing force that makes the blowing force more even across the first, second, third, and fourth channels. Similarly, the third air-blowing pipe can blow air into the seventh channel with a stronger force, while it can blow air into the fifth and sixth, as well as the eighth and ninth channels, with a weaker force. The fifth and sixth channels receive air from both the second and third air-blowing pipes simultaneously, with their blowing forces also combined, and so on, ensuring that the blowing force is even across all channels 300.

[0077] Furthermore, the channel 300 can be arranged horizontally, inclined downwards, or vertically. When the channel 300 is arranged horizontally, the liquid film B inside the channel 300 is only subjected to the Laplace pressure difference and the force from the air blowing pipe 420; when the channel 300 is arranged inclined, the liquid film B inside the channel 300 is subjected to the Laplace pressure difference, the vertical component of gravity, and the force from the air blowing pipe 420; when the channel 300 is arranged vertically, the liquid film B inside the channel 300 is subjected to the Laplace pressure difference, gravity, and the force from the air blowing pipe 420.

[0078] like Figures 8-10As shown, this embodiment also provides a cavity, including a cover 500 and a droplet collection structure as described above. The droplet collection structure is disposed on the inner sidewall 520 and / or the inner top wall 510 of the cover 500. When the droplet collection structure is used in the cavity, it can prevent droplets A on the cover 500 from falling irregularly.

[0079] The droplet collection structure is located on the inner top wall 510 of the cover 500. The inner top wall 510 is divided into a first region 511 and a second region 512. The droplet collection structure also includes an air blowing assembly 400. The protrusion 200 and the channel 300 are located in the first region 511, and the air blowing assembly 400 is located in the second region 512. The air blowing hole 410 of the air blowing assembly 400 faces the first end of the channel 300, which facilitates the reasonable layout of the protrusion 200, the channel 300, and the air blowing assembly 400. Furthermore, the first region 511 and the second region 512 are arranged in an arch shape, so that the liquid film B in the channel 300 is simultaneously subjected to the Laplace pressure difference, the component of gravity, and the force from the air blowing pipe 420, thereby achieving directional movement.

[0080] Optionally, the liquid collection structure can be manufactured separately or integrally formed with the cover 500. For example, the liquid collection structure includes a support member 100, which supports and connects the protrusion 200, allowing it to be mounted on the cover 500 via the support member 100. Alternatively, the liquid collection structure may only include the protrusion 200, which is mounted on the cover 500 by bonding or welding. Alternatively, the cover 500 may form the support member 100, with the protrusion 200 and the channel 300 integrally machined on its surface.

[0081] This embodiment also provides a wafer processing apparatus, including the cavity as described in any of the above embodiments. When the cavity is used in the wafer processing apparatus, it can prevent droplets A on the cover 500 from falling irregularly onto the wafer surface. Firstly, this will not affect the wafer wetting and other processing effects, thereby ensuring the smooth progress of subsequent processes. Secondly, when the robotic arm picks up and places wafers, no droplets will fall onto the robotic arm, avoiding contamination and corrosion of the robotic arm.

[0082] This embodiment also provides a droplet collection method based on any of the above droplet collection structures, comprising the following steps:

[0083] S100, the channel 300 captures the splashed droplet A, causing droplet A to fall into the interior of the channel 300, and forming a more wettable area inside the channel 300;

[0084] S200, Under the action of capillary force, a liquid film B is formed in the channel 300;

[0085] S300. As droplet A is continuously injected, liquid film B gradually bulges, causing a Laplace pressure difference.

[0086] S400, Under the action of Laplace pressure and external force, the liquid in the liquid film B flows directionally along the channel 300.

[0087] The above method can be implemented in conjunction with the specific content of this embodiment. Specifically, when droplet A is captured in channel 300 (the surface of channel 300 is completely dry), the instantaneous contact angle is relatively large due to the non-hydrophilic nature of channel 300. As channel 300 comes into contact with the droplet, the hydrophobicity of channel 300 decreases and the hydrophilicity increases, and the contact angle gradually decreases. For example, it decreases to a target value, indicating that the hydrophilicity of channel 300 has reached its maximum. This target value is generally the minimum contact angle, which can be 40 degrees or 60 degrees, etc. The increased hydrophilicity of channel 300 strengthens its adsorption capacity for droplet A, and under the action of capillary force in channel 300, a liquid film B is formed. As droplet A is captured, liquid film B gradually expands or bulges, causing a Laplace pressure difference. Under the action of the Laplace pressure difference and gravity, the liquid in liquid film B flows directionally along channel 300, completing the drainage.

[0088] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A droplet collection structure, characterized by, The application relates to a liquid droplet collecting structure, comprising: a plurality of protrusions (200), wherein the protrusions (200) are arranged in an array or equidistantly along a first direction; along the first direction, the maximum width of any one of the protrusions (200) is M; along a second direction, the height between the plane where the protrusions (200) are arranged in an array or equidistantly along the first direction and the highest point of any one of the protrusions (200) is H, and the second direction is arranged at an angle with the first direction; any two adjacent protrusions (200) form a channel (300) extending linearly along a third direction and opening downward, the cross-sectional shape of the channel (300) is the same as or similar to that of the protrusion (200), and the maximum width N of the channel (300) is less than or equal to the maximum width M of the protrusion (200), and the third direction is arranged at an angle with the first direction and the second direction; wherein H is greater than or equal to 1.1N and less than or equal to 20N, and the maximum width N of the channel (300) is less than or equal to 1mm; the liquid droplet collecting structure further comprises a blowing assembly (400), and the blowing assembly (400) comprises a plurality of blowing pipes (420), and the blowing holes (410) of the blowing pipes (420) are directed towards the first end of the channel (300).

2. The droplet collection structure of claim 1, wherein, the protrusions (200) are triangular protrusions, and two adjacent triangular protrusions are connected to each other, so that the channel (300) formed by the two adjacent triangular protrusions is a triangular channel, and the relationship between the maximum width N of the triangular channel and the width M of the triangular protrusion is N greater than or equal to 0.2M.

3. The droplet collection structure of claim 2, wherein, the top angle of the triangular protrusion is 45-75 degrees.

4. The droplet collection structure of claim 1, wherein, the protrusions (200) are rectangular protrusions, and the relationship between the width N of the channel (300) formed between two adjacent rectangular protrusions and the width M of the rectangular protrusion is N greater than or equal to 0.2M.

5. The droplet collection structure of claim 1, wherein, the protrusions (200) are arc-shaped protrusions, and the relationship between the maximum width N of the channel (300) formed between two adjacent arc-shaped protrusions and the width M of the arc-shaped protrusion is N greater than or equal to 0.2M.

6. The droplet collection structure of claim 1, wherein, the side walls on both sides of the channel (300) capture the splashed liquid droplets (A), and the liquid droplets (A) slide from the side walls on both sides of the channel (300) to the inside of the channel (300) to form a liquid film (B) covering part or all of the wall surface inside the channel (300).

7. The droplet collection structure of claim 1, wherein, a support (100) is further provided, and the support (100) is provided with a support surface (110), and the protrusions (200) are arranged on the support surface.

8. The droplet collection structure of claim 1, wherein, the channel (300) is arranged at an angle or vertically relative to a horizontal plane, so that the height of the first end of the channel (300) is higher than that of the second end of the channel (300).

9. The droplet collection structure of claim 8, wherein, the angle of inclination of the channel (300) in the horizontal direction is greater than or equal to 15 degrees.

10. The droplet collection structure of claim 1, wherein, The blowing tubes (420) are arranged along a first direction, and the number of the blowing tubes (420) is less than or equal to the number of the grooves (300), so that one groove (300) can be blown by at least one blowing tube (420).

11. The droplet collection structure of claim 1, wherein, The grooves (300) are arranged along a horizontal, inclined or vertical direction.

12. A cavity, characterized in that The cover (500) and the droplet collection structure according to any one of claims 1-11 are included, and the droplet collection structure is arranged on the inner side wall (520) or / and the inner top wall (510) of the cover (500).

13. The chamber of claim 12, wherein, The droplet collection structure is arranged on the inner top wall (510) of the cover (500), the inner top wall (510) is divided into a first area (511) and a second area (512), the protrusions (200) and the grooves (300) are located in the first area (511), and the blowing assembly (400) is located in the second area (512), and the blowing hole (410) of the blowing assembly (400) faces the first end of the groove (300).

14. The chamber of claim 13, wherein, The first area (511) and the second area (512) are arranged in an arc shape.

15. A wafer processing apparatus, characterized by, The cavity according to any one of claims 12-14 is included.

16. A droplet collection method based on the droplet collection structure according to any one of claims 1 to 11, characterized by, The cavity according to any one of claims 12-14 is included. The grooves (300) capture the splashed droplets (A) to make the droplets (A) fall into the grooves (300) and form a higher wetting area inside the grooves (300); Under the action of capillary force, a liquid film (B) is formed in the grooves (300); With the continuous injection of the droplets (A), the liquid film (B) gradually protrudes, causing a Laplace pressure difference; Under the action of the Laplace pressure and external force, the liquid in the liquid film (B) flows along the grooves (300) in a directional manner.

Images