A high-grade numerical control machine tool with integrated precision machining and measurement

Abstract

The application relates to the technical field of numerical control machine tools, and discloses a precision machining and measuring integrated five-axis linkage high-grade numerical control machine tool, which comprises a main shaft composed of multiple joint arms and capable of moving in multiple degrees of freedom in a machining space; a holder is installed at the tail end of the main shaft and used for clamping a tool; a tool rack is used for storing the tool; an in-machine measuring system comprises multiple types of sensors installed on the holder and used for measuring a workpiece in real time during machining; a rotary table is installed below the main shaft, has rotation and inclination functions, and is used for installing the workpiece or a standard ball; a control module is used for controlling the movement of the main shaft, the holder and the rotary table; an upper computer is used for receiving measuring data, performing error analysis and compensation calculation, and outputting control instructions; and a temperature measuring module is used for monitoring the machining environment temperature in real time; the application significantly improves machining precision and production efficiency and can significantly improve the intelligent level of the overall manufacturing system.

Description

Technical Field

[0001] This invention relates to the field of CNC machine tool technology, and in particular to a high-end CNC machine tool with integrated precision machining and measurement five-axis linkage. Background Technology

[0002] CNC machine tools are widely used in aerospace, mold manufacturing and complex parts processing, and have high precision and high degree of freedom machining capabilities. Although modern CNC machine tools have made significant progress in precision machining, existing technologies still face some important challenges in terms of machining accuracy and production efficiency.

[0003] First, existing CNC machine tools typically separate the machining and measurement processes, with workpieces only inspected after machining is complete using external measuring equipment (such as coordinate measuring machines). This separated machining and measurement process not only leads to repeated clamping and the introduction of potential errors but also significantly prolongs the production cycle and reduces production efficiency. Second, external measuring equipment can usually only be used after machining is complete, making it impossible to monitor errors that may occur during machining in real time. This results in deviations not being corrected in time, ultimately affecting product quality. Third, although some machine tools are equipped with online measurement systems that can acquire workpiece surface data and provide feedback corrections during machining, they suffer from the problem of limited measurement methods, making it difficult to meet the needs of comprehensive measurement of complex workpieces. Furthermore, in five-axis CNC machine tools, the coordination between the workpiece rotation axis and the tool feed axis relies on traditional two-dimensional control. This control method is prone to error accumulation when dealing with complex geometries or multi-angle positioning, especially in the machining of free-form surfaces, where these errors gradually amplify, affecting machining accuracy. Finally, machine tools are affected by thermal deformation during machining, especially temperature changes in the spindle and machine tool structure, which often lead to changes in the dimensions of machine tool components. This directly affects the amount of workpiece machining, thus impacting machining accuracy. Although some machine tool systems have attempted to adopt temperature compensation technology, most of these technologies are limited to single temperature measurement and cannot dynamically adapt to real-time changes during the machining process, making it difficult to effectively compensate for errors caused by temperature changes during machining. Summary of the Invention

[0004] The purpose of this invention is to provide a high-end CNC machine tool that integrates precision machining and measurement with five-axis linkage, aiming to solve or improve at least one of the above-mentioned technical problems.

[0005] To achieve the above objectives, the present invention provides the following solution: The present invention provides a high-end CNC machine tool integrating precision machining and measurement with five-axis linkage, comprising:

[0006] The spindle, composed of multiple articulated arms, is capable of multi-degree-of-freedom movement within the machining space;

[0007] A clamp, installed at the end of the spindle, is used to clamp the cutting tool;

[0008] Tool holder, used to store the tools;

[0009] The in-machine measurement system includes various types of sensors mounted on the gripper for real-time measurement of the workpiece during processing;

[0010] A turntable, mounted below the spindle, has rotation and tilting functions and is used to mount workpieces or standard balls;

[0011] The control module is used to control the movement of the spindle, gripper, and turntable;

[0012] The host computer is used to receive measurement data, perform error analysis and compensation calculations, and output control commands;

[0013] Temperature measurement module is used to monitor the processing environment temperature in real time.

[0014] Optionally, the center port at the end of the gripper is coaxial with the spindle and is used to grip the tool. The gripper is provided with multiple magnetic suction ports at equal intervals around its circumference for mounting various types of sensors in the in-machine measurement system.

[0015] Optionally, the magnetic port is a prismatic slot with a larger outer diameter and a smaller inner diameter, and an electromagnet is embedded inside. A prismatic metal column is provided on the side of the sensor for attracting the electromagnet.

[0016] Optionally, the in-machine measurement system includes a contact probe, a laser displacement sensor, and a line laser profile scanner.

[0017] Optionally, the in-machine measurement system communicates with the host computer via a cable, which is hidden inside the spindle.

[0018] Optionally, a fixed slot is also included for storing and quickly switching the in-machine measurement system. The fixed slot has a U-shaped structure and a pop-up switch on the inside for activating the measurement control module when the in-machine measurement system is taken out or put in.

[0019] Optionally, the standard ball is mounted on the turntable via a ball stick for calibrating the turntable's rotational and tilting errors.

[0020] Optionally, the host computer calculates the spatial position of a point on the workpiece surface based on the measurement data from the on-machine measurement system using the following formula:

[0021] ;

[0022] in, P probeLet Δ be the spatial position of the on-machine measurement system. P contact These are measured values.

[0023] Optionally, the host computer is used to perform the calibration of the tool running error, the calibration of the turntable rotation error, and the calibration of the turntable tilt error, and to perform real-time error compensation based on the calibration results.

[0024] Optionally, the temperature data collected by the temperature measurement module is used to perform thermal compensation on the measured values ​​of the on-machine measurement system, and the compensation formula is:

[0025] ;

[0026] in, The value after compensation. For measured values, The coefficient of thermal expansion of the workpiece. The dimensions of the workpiece at the reference temperature. Reference temperature This is the current temperature.

[0027] The present invention discloses the following technical effects:

[0028] By integrating precision machining and measurement systems, the errors and time wasted caused by separating machining and measurement are avoided. Real-time collaboration between the machining and measurement processes is achieved, significantly improving machining accuracy and production efficiency.

[0029] Employing dual-axis high-degree-of-freedom linkage technology, the turntable and spindle can perform three-dimensional linkage. Combined with the rapid switching of different types of sensors in the on-machine measurement system, it can meet the measurement needs of complex workpieces, effectively improving the flexibility and accuracy of complex workpiece processing, especially showing significant advantages in free-form surface and multi-angle positioning processing.

[0030] The temperature measurement module can measure the ambient temperature in real time and dynamically adjust the measurement values ​​of the on-machine measurement system to reduce the impact of temperature fluctuations on machining accuracy, thereby ensuring stability and high precision during the machining process.

[0031] The machine tool can automatically switch between cutting tools and different types of on-machine measurement systems, enabling real-time correction of errors in toolpath and rotary table movement, and effectively compensating for errors caused by factors such as tool wear and thermal deformation, thereby further improving machining accuracy and the stability of the machining process.

[0032] By tracking tool wear and machining deviations in real time and monitoring workpiece status, the CNC machine tool will automatically stop processing and issue an alarm signal when an abnormality occurs, thereby effectively avoiding defective products in production and ensuring workpiece quality and equipment safety. Attached Figure Description

[0033] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0034] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 This is a schematic diagram of the fixed slot assembly of the present invention;

[0036] Figure 3 This is a bottom view of the clamp of the present invention.

[0037] In the diagram: 1. Spindle; 2. Clamp; 3. In-machine measurement system; 4. Tool holder; 5. Tool; 6. Magnetic port; 7. Cable; 8. Turntable; 9. Standard ball; 10. Ball bar; 11. Measurement control module; 12. Control module; 13. Host computer; 14. Fixing slot; 15. Temperature measurement module. Detailed Implementation

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] Reference Figures 1 to 3 This invention provides a high-end CNC machine tool integrating precision machining and measurement with five-axis linkage, comprising:

[0041] Spindle 1, composed of multiple articulated arms, is capable of multi-degree-of-freedom movement within the machining space;

[0042] Clamp 2, installed at the end of spindle 1, is used to clamp tool 5;

[0043] Tool holder 4, used to store tools 5;

[0044] The on-machine measurement system 3 includes various types of sensors mounted on the gripper 2 for real-time measurement of the workpiece during the machining process;

[0045] Turntable 8, mounted below spindle 1, has rotation and tilt functions and is used to mount workpieces or standard balls 9;

[0046] Control module 12 is used to control the movement of spindle 1, gripper 2 and turntable 8;

[0047] The host computer 13 is used to receive measurement data, perform error analysis and compensation calculations, and output control commands;

[0048] The temperature measurement module 15 is used to monitor the processing environment temperature in real time and send the monitoring data to the host computer 13 in real time.

[0049] By employing dual-axis synchronous control technology and rapid switching between the on-machine measurement system 3 (with different types of sensors) and the cutting tool 5, high-degree-of-freedom three-dimensional linkage between the spindle 1 and the rotary table 8 is achieved. The machine tool integrates calibration methods for the running error of the cutting tool 5 and the rotation and tilting errors of the rotary table 8, improving machining accuracy and stability. Simultaneously, real-time temperature compensation technology effectively reduces the impact of temperature changes on the measurement accuracy of different types of on-machine measurement systems. By integrating precision machining with online measurement, dynamic compensation, and real-time error feedback, machining accuracy and production efficiency are significantly improved, avoiding error accumulation caused by repeated clamping. This technology has broad industrial application prospects and can significantly enhance the overall intelligence level of the manufacturing system.

[0050] The host computer 13 calculates different compensation values ​​based on the current on-machine measurement system 3 to correct the measurement values ​​of the current on-machine measurement system 3. During the processing, after each process is completed, the tool 5 quickly switches to the on-machine measurement system 3 through the clamp 2 to measure the workpiece size. The host computer 13 automatically calculates the correction value and adjusts the tool 5 path and the movement trajectory of the turntable 8 based on the deviation between the measurement result of the on-machine measurement system 3 and the preset value to achieve precise processing. When the error exceeds the set threshold, the machine tool automatically stops processing and issues an alarm signal.

[0051] In one embodiment of the present invention, the center port at the end of the clamp 2 is coaxial with the spindle 1 and is used to clamp the tool 5. The clamp 2 is provided with a plurality of magnetic suction ports 6 at equal intervals around the circumference for installing various types of sensors in the machine measurement system 3.

[0052] Specifically, there are three magnetic ports 6, and the angular interval between the three magnetic ports is 120°.

[0053] In one embodiment of the present invention, the magnetic attraction port 6 is a prismatic slot with a larger outer diameter and a smaller inner diameter, and an electromagnet is embedded inside. A prismatic metal column is provided on the side of the sensor for attracting the electromagnet.

[0054] The prismatic metal column can slide into the groove wall of the magnetic suction port 6 on the clamp 2 until the top surface of the prismatic metal column is in complete contact with the bottom surface of the magnetic suction port 6. After the electromagnet embedded in the bottom surface of the magnetic suction port 6 is energized, the bottom surface of the magnetic suction port 6 is tightly attached to the top surface of the prismatic metal column, thereby realizing the fixation of the sensor to the clamp 2 and the connection to the cable 7 in the in-machine measurement system.

[0055] In one embodiment of the present invention, the on-machine measurement system 3 includes a contact probe, a laser displacement sensor, and a line laser profile scanner. The dimensions of the prismatic metal columns on the sides of each sensor are different. The dimensions of each magnetic port 6 on the holder 2 correspond to the dimensions of the prismatic metal columns on the sides of each sensor. The prismatic metal columns on the sides of each sensor can achieve rapid switching of sensors through different magnetic ports 6 on the holder 2.

[0056] In one embodiment of the present invention, the on-machine measurement system 3 communicates with the host computer 13 via a cable 7, which is hidden inside the spindle 1.

[0057] Electromagnetic adsorption ensures that the in-machine measurement system 3 is securely installed and connected to the in-machine cable 7.

[0058] In one embodiment of the present invention, a fixed slot 14 is also included for storing and quickly switching the on-machine measurement system 3. The fixed slot 14 has a U-shaped structure and a pop-up switch on the inner side for activating the measurement control module 11 when the on-machine measurement system 3 is taken out or put in.

[0059] The sensor in the in-machine measurement system 3 can be disengaged from the fixed slot 14 along the slot opening. When disengaged, the pop-up switch pops up, thereby activating the measurement control module 11 and activating the measurement system.

[0060] In one embodiment of the present invention, a standard ball 9 is mounted on a turntable 8 via a ball stick 10 for calibrating the rotational and tilting errors of the turntable 8.

[0061] The standard ball 9 is fixed on the turntable 8 by the ball rod 10 and can rotate and tilt according to the preset program. The on-machine measurement system 3 can continuously monitor the surface of the standard ball 9, and the host computer 13 analyzes the data measured by the on-machine measurement system 3 in real time, compares it with the preset path of the turntable 8, obtains the rotation and tilt error of the turntable 8, and transmits the error information to the control module 12 for error compensation.

[0062] In one embodiment of the present invention, the host computer 13 calculates the spatial position of a point on the workpiece surface based on the measurement data from the on-machine measurement system 3 using the following formula:

[0063] ;

[0064] Where Pprobe is the spatial position of the in-machine measurement system 3, and ΔPcontact is the measured value.

[0065] Specifically, the coordinate position of the gripper is The rotation matrix of the gripper is , The pitch angle, For the deflection angle, The roller angle is the coordinate of the gripper in the in-machine measurement system. Then the spatial position of the on-machine measurement system is:

[0066]

[0067] Based on the spatial location of the on-machine measurement system and measured values It can obtain the position of any point on the workpiece surface in space. :

[0068]

[0069] Based on the dimensions of different types of in-machine measurement systems and cutting tools, the host computer tracks the spatial positions of the in-machine measurement systems and cutting tools. Synchronous control with the rotary table pose is achieved by adjusting the position of any point on the workpiece surface in space. This enables high-degree-of-freedom synchronous linkage control between the spindle and the turntable.

[0070] In one embodiment of the present invention, the host computer 13 is used to perform calibration of the running error of the tool 5, calibration of the rotation error of the turntable 8 and calibration of the tilt error of the turntable, and to perform real-time error compensation based on the calibration results.

[0071] Specifically:

[0072] The calibration method for the running error of the CNC machine tool 5 is as follows: the tool 5 performs the first cutting operation on the workpiece, the coordinate position of the tool 5 is recorded, and then the on-machine measurement system 3 is switched to record the current measurement value. Then the tool 5 performs the second cutting operation, and the coordinate position of the tool 5 is recorded again. Then the on-machine measurement system 3 is switched to measure again, thereby obtaining the deviation E1 between the set value and the measured value of the cutting amount. The host computer 13 loads the deviation E1 to the control module to correct the running deviation of the tool 5.

[0073]

[0074] in, This is the first cutting position of tool 5. This is the first measurement value from the in-machine measurement system 3. This is the second cutting position for tool 5. This is the second measurement value from the in-machine measurement system 3.

[0075] The rotation error calibration method for the rotary table 8 of the CNC machine tool is as follows: A standard ball 9 with radius R is fixed on the rotary table 8 by a ball rod 10 with height h. Then, the rotary table 8 rotates according to the program. The clamp 2 holds the measuring system 3 parallel to the rotary table 8 and measures the outer contour of the standard ball 9. The resulting measurement curve is then... Dividing the rotation angle into n intervals, by comparing the set curve with the measurement curve of the on-machine measurement system 3, the rotation angle of the turntable 8 within any interval is obtained. Rotational deviation between The host computer 13, based on this deviation The error during the rotation of turntable 8 is corrected.

[0076] ,

[0077] The tilt error calibration method for the rotary table 8 of a CNC machine tool is as follows: A standard ball 9 with radius R is fixed on the rotary table 8 via a ball rod 10 with height h. Then, the rotary table 8 tilts according to the program. In the tilt direction of the rotary table 8, the clamp 2 holds the on-machine measurement system 3 and moves accordingly to ensure that the on-machine measurement system 3 always maintains contact with a point on the surface of the standard ball 9. The resulting measurement curve is then... Dividing the rotation angle into n intervals, by comparing the ideal curve with the measurement curve of the on-machine measurement system, the rotation angle of the turntable 8 within any interval is obtained. Rotational deviation between The host computer 13, based on the deviation The error during the tilting process of turntable 8 is corrected.

[0078] ,

[0079] After each machining operation, the clamp 2 switches the tool 5 held by the clamp 2 at the end of the spindle 1 to the on-machine measurement system 3. The on-machine measurement system 3 measures the machined part of the workpiece. The host computer 13 judges the degree of tool wear based on the measurement difference. When the machining amount is insufficient, it adjusts the subsequent cutting parameters based on the calculated difference and automatically sends a supplementary cutting command to the control module 12 to realize thermal compensation and spindle thermal extension compensation during the machining process of the integrated five-axis linkage high-end CNC machine tool.

[0080] In one embodiment of the present invention, the temperature data collected by the temperature measurement module 15 is used to perform thermal compensation on the measured values ​​of the on-machine measurement system 3, and the compensation formula is:

[0081] ;

[0082] in, The value after compensation. For measured values, The coefficient of thermal expansion of the workpiece. The dimensions of the workpiece at the reference temperature. Reference temperature This is the current temperature.

[0083] Method and steps:

[0084] The cutting tool 5 performs the first cutting operation on the workpiece, and the coordinate position of the cutting tool 5 is recorded. Then, the system switches to the on-machine measurement system 3 to record the current measurement value. Next, the system switches to the cutting tool 5 to perform the second cutting operation, and the coordinate position of the cutting tool 5 is recorded again. Then, the system switches to the on-machine measurement system 3 to perform the measurement again, thereby obtaining the deviation E1 between the set value and the measured value of the cutting amount. The host computer 13 loads the deviation E1 to the control module 12 to correct the tool running deviation.

[0085]

[0086] in, This is the position where the tool first cuts. This is the first measurement value from the in-machine measurement system. This is the second cutting position of the tool. This is the second measurement value from the in-machine measurement system.

[0087] Step 2: A standard ball 9 with radius R is fixed on a turntable 8 using a ball rod 10 of height h. The turntable 8 then rotates according to the program. The clamp 2 holds the measuring system 3 parallel to the turntable 8 and measures the outer contour of the standard ball 9. The resulting measurement curve is then recorded. Dividing the rotation angle into n intervals, by comparing the set curve with the measurement curve of the on-machine measurement system 3, the rotation angle of the turntable 8 within any interval is obtained. Rotational deviation between The host computer 13, based on this deviation Correcting errors during the rotation of the turntable.

[0088] ,

[0089] Step 3: A standard sphere 9 with radius R is fixed to a turntable 8 via a ball rod 10 of height h. The turntable 8 is then tilted according to a program. In the tilting direction of the turntable 8, the clamp 2 holds the on-machine measurement system 3, which moves accordingly to ensure that the on-machine measurement system 3 always maintains contact with a point on the surface of the standard sphere 9. The resulting measurement curve is then... Dividing the rotation angle into n intervals, by comparing the ideal curve with the measurement curve of the on-machine measurement system 3, the rotation angle of the turntable 8 within any interval is obtained. Rotational deviation between The host computer 13, based on this deviation The error during the tilting process of turntable 8 is corrected.

[0090] ,

[0091] Step 4: Spindle 1 performs one machining operation according to the machining instruction.

[0092] Step 5: The clamp 2 switches the tool 5 to the in-machine measurement system. The in-machine measurement system 3 measures the machined part of the workpiece. The host computer 13 calculates the measurement difference based on the set value and the measurement value of the in-machine measurement system 3, and determines whether the measurement difference is within the range. When the measurement difference is too large, the correction amount is calculated based on the measurement difference, and the control module 12 is automatically issued a supplementary cutting command.

[0093] Step 6: After receiving the supplementary cutting command, the control module 12 controls the holder 2 to return the machine measurement system 3 to its original position, and then moves the holder 2 to the tool holder 4 and switches back to the tool 5 to perform the supplementary cutting operation.

[0094] Step 7: After the recutting is completed, the tool 5 is returned to the tool holder 4, and the clamp 2 will be re-clamped by the machine measurement system 3 and measured again.

[0095] Step 8: Repeat steps 5 to 7 until the measurement difference falls within the preset tolerance range to ensure that the processing accuracy meets the requirements.

[0096] Step 9: The clamp 2 switches back to the tool 5 for the next machining operation, and repeats the process from Step 4 to Step 8 until the workpiece is machined and meets the required accuracy.

[0097] During the processing, the host computer continuously monitors the deviation between the measured values ​​provided by the on-machine measurement system and the preset values. If the deviation exceeds the preset range, the processing will be stopped automatically and an alarm will be triggered.

[0098] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0099] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A high-end CNC machine tool integrating precision machining and measurement with five-axis linkage, characterized in that, include: The spindle (1) is composed of multiple articulated arms and is capable of multi-degree-of-freedom motion within the machining space; A clamp (2) is installed at the end of the spindle (1) for clamping the tool (5); Tool holder (4) is used to store the tool (5); The in-machine measurement system (3) includes various types of sensors mounted on the gripper (2) for real-time measurement of the workpiece during the machining process; A turntable (8) is installed below the spindle (1) and has rotation and tilting functions for mounting workpieces or standard balls (9). The control module (12) is used to control the movement of the spindle (1), the gripper (2) and the turntable (8); The host computer (13) is used to receive measurement data, perform error analysis and compensation calculations, and output control commands; Temperature measurement module (15) is used to monitor the processing environment temperature in real time; The center port at the end of the clamp (2) is coaxial with the spindle (1) and is used to clamp the tool (5). The clamp (2) is provided with multiple magnetic suction ports (6) at equal intervals around the circumference for installing various types of sensors in the in-machine measurement system (3). The in-machine measurement system (3) includes a contact probe, a laser displacement sensor, and a line laser profile scanner; The standard ball (9) is mounted on the turntable (8) via a ball stick (10) for calibrating the rotation error and tilt error of the turntable (8); The host computer (13) is used to perform the calibration of the running error of the tool (5), the calibration of the rotation error of the turntable (8) and the calibration of the tilt error of the turntable, and to perform real-time error compensation based on the calibration results.

2. The high-end CNC machine tool integrating precision machining and measurement with five-axis linkage as described in claim 1, characterized in that, The magnetic port (6) is a prismatic slot with a larger outer diameter and a smaller inner diameter. An electromagnet is embedded inside. A prismatic metal column is provided on the side of the sensor to attract the electromagnet.

3. The high-end CNC machine tool integrating precision machining and measurement with five-axis linkage as described in claim 1, characterized in that, The on-machine measurement system (3) communicates with the host computer (13) via a cable (7), which is hidden inside the spindle (1).

4. The high-end CNC machine tool integrating precision machining and measurement with five-axis linkage as described in claim 1, characterized in that, It also includes a fixed slot (14) for storing and quickly switching the on-machine measurement system (3). The fixed slot (14) has a U-shaped structure and a pop-up switch on the inside, which is used to activate the measurement control module (11) when the on-machine measurement system (3) is taken out or put in.

5. A high-end CNC machine tool integrating precision machining and measurement with five-axis linkage as described in claim 1, characterized in that, The host computer (13) calculates the spatial position of the workpiece surface point based on the measurement data of the on-machine measurement system (3) using the following formula: ； Among them, P probe ΔP represents the spatial position of the on-machine measurement system (3). contact These are measured values.

6. A high-end CNC machine tool integrating precision machining and measurement with five-axis linkage as described in claim 1, characterized in that, The temperature data collected by the temperature measurement module (15) is used to perform thermal compensation on the measured values ​​of the on-machine measurement system (3). The compensation formula is as follows: ； in, The value after compensation. For measured values, The coefficient of thermal expansion of the workpiece. The dimensions of the workpiece at the reference temperature. Reference temperature This is the current temperature.

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