Linear robot with double-link arm

Abstract

In one embodiment, an apparatus includes a linear conveyor configured to move in a transport chamber along a linear path; a robot connected to the linear conveyor, where the robot includes a robot driver and a robot arm connected to the robot driver, where the robot arm is a double link arm having a first link connected to the robot driver and a second link forming an end effector for supporting the substrate thereon; a controller connected to the linear conveyor and the robot drive, where the controller is configured to provide movement of the linear conveyor along a linear path while the dual link arm is extended and retracted, thus, the end effector is moved into or out of the substrate processing chamber or the substrate holding area in a state in which both the linear conveyor and the dual link arm are moving.

Description

[0001] This application is a divisional application of application number 202080028495.2, filed on February 12, 2020, with the title “Linear robot with dual-link arm”. TECHNICAL FIELD

[0002] Example and non-limiting embodiments relate generally to a robot, and more particularly to a linear robot. BACKGROUND

[0003] Robots for transporting substrates are known. Linear drive systems for substrate transport robots are also known, such as described in U.S. Patent Publication Nos. US2016 / 0229296 Al, US2013 / 0071218 Al, US2015 / 0214086 Al, and US2017 / 0028546 Al, which are hereby incorporated by reference in their entirety. SUMMARY

[0004] The following summary is merely intended to illustrate example embodiments. The summary is not intended to limit the scope of the claims.

[0005] According to one aspect, there can be provided an apparatus comprising: a linear transporter configured to move along a straight path in a transport chamber; a robot connected to the linear transporter, wherein the robot comprises a robot drive and a robot arm connected to the robot drive, wherein the robot arm comprises a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear transporter and the robot drive, wherein the controller is configured to control movement of the linear transporter along the straight path, wherein the controller is configured to control the robot drive to extend and retract the dual-link arm, wherein the controller is configured to provide movement of the linear transporter along the straight path while the dual-link arm is being extended and retracted, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area in a state where both the linear transporter and the dual-link arm are moving.

[0006] According to another aspect, a method can be provided, the method comprising: providing a robot comprising a robot drive and a robot arm connected to the robot drive, wherein the robot arm comprises a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; mounting the robot to a linear conveyor, wherein the linear conveyor is configured to move along a straight path in a transport chamber; mounting the robot drive and the linear conveyor to a controller, wherein the controller is configured to control movement of the linear conveyor along the straight path, and wherein the controller is configured to control the robot drive to extend and retract the two-link arm, wherein the controller is configured to provide movement of the linear conveyor along the straight path while the two-link arm is being extended and retracted, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area with both the linear conveyor and the two-link arm moving.

[0007] According to another aspect, a method can be provided, the method comprising: moving a linear conveyor along a straight path inside a transport chamber; extending or retracting a robot arm while the linear conveyor is moving along the straight path, wherein the robot arm is part of a robot having a robot drive connected to the robot arm, wherein the robot arm comprises a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; controlling movement of the linear conveyor along the straight path and extension and retraction of the two-link arm by a controller connected to the linear conveyor and the robot drive, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area with both the linear conveyor and the two-link arm moving. BRIEF DESCRIPTION OF DRAWINGS

[0008] The above aspects and other features are explained in the following description, taken in connection with the accompanying drawings, wherein

[0009] Figure 1 is a top view of an example of a cluster tool;

[0010] Figure 2 is a top view of an example of an embodiment comprising features as described herein;

[0011] Figure 3A is Figure 2 is a side view of the robot shown;

[0012] Figure 3B is a schematic cross-sectional view of the robot shown; Figure 3A

[0013] Figure 4 ​This is a top view of an example embodiment including the features described herein;

[0014] Figures 5A-5E This is a schematic top view illustrating the removal of a substrate from a processing module by simultaneously moving a robot and a linear conveyor;

[0015] Figures 5F-5J This is a schematic top view illustrating the placement of a substrate into a processing module by simultaneously moving a robot and a linear conveyor;

[0016] Figure 6 This is a schematic top view illustrating an example embodiment of the loading lock area;

[0017] Figure 7 This is a schematic top view illustrating an example embodiment of the loading lock area;

[0018] Figure 8 This is a schematic top view illustrating an example embodiment of the loading lock area;

[0019] Figures 9A-9E A side view showing the movement of the end effector for picking up the substrate is shown; and

[0020] Figures 10A-10E Examples of embodiments having the features described herein are shown. Detailed Implementation

[0021] refer to Figure 1 This diagram shows a schematic top view of a conventional cluster tool configuration for a substrate processing apparatus 10. The apparatus includes a substrate transport device 12 comprising a robot adapted to transport a substrate 14 between or within a substrate processing chamber 16 and a loading lock 18 to an Equipment Front End Module (EFEM) 20. The robot has a substrate cassette lift 22. The loading lock forms a substrate holding area between the transport chamber 32 and the EFEM 20, which is of the type with a movable isolation door or gate.

[0022] To reduce costs and increase efficiency, modern semiconductor factories are constantly striving to install more processing equipment in smaller buildings. A typical factory layout arranges processing tools in linear rows called bays. The number of bays that can be installed on the factory floor is limited by the length (depth) of individual processing tools. The number of tools that can be installed in each row is limited by the width of individual processing tools. Each individual processing tool consists of a processing module and automated hardware for transporting wafers from input / output modules (load locks) to the processing module and back. Traditional processing tool layouts use a single wafer transport robot located at the center of the tool and features such as… Figure 1multiple processing module spaces (such as 4 to 6) in a polar array around the robot as shown in the cluster tool example. Cluster tools typically have a circular footprint and due to their width, their optimal shape is not designed to be placed in a row. Factory planners are working to reduce the width of individual processing tools in order to fit more equipment in each factory bay to increase throughput without the need to increase the footprint. One way to reduce the width of individual tools is to abandon the polar array arrangement of processing modules in favor of a linear array. Linear processing module arrays require more complex automation including the ability to move the robot along a linear axis from the front to the back of the tool. This type of robot is referred to as a "linear robot". The width of the entire tool is limited by the depth of the processing modules and the width of the linear robot. As described herein, a method is disclosed to reduce the width and complexity of the linear robot by folding flat in a retracted position (inside the linear tunnel) using a two-link arm as further described below.

[0023] Further, reference is made to Figure 2 , showing a schematic top view of a substrate processing apparatus 30 incorporating features of example embodiments. Although features are described with reference to the example embodiments shown in the drawings, it should be understood that the features can be embodied in many alternative forms of embodiments. In addition, any suitable size, shape or type of elements or materials can be used.

[0024] The substrate processing apparatus 30 generally includes a substrate transport chamber 32, substrate processing modules 16, load locks 18', an equipment front end module (EFEM) 20 with substrate cassette lifts 22, and a linear robot 34 including a two-link arm 36 and a robot drive 38 (see Figures 3A-3B ). The apparatus 30 is connected to a controller 40 including at least one processor 42 and at least one memory 44 including computer program code 46. Figure 2 is an example of a linear robot with a two-link arm in a compact retracted position.

[0025] Further, reference is made to Figure 3A and Figure 3BThe dual link arm 36 generally includes a first link or upper arm 90 and a second link forming an end effector 92 rotatably connected to a joint 94 of the upper arm 90. The robot drive 38 includes a first motor 52 and a second motor 54 with corresponding first and second encoders 56, 58 coupled to a housing 60 and driving first and second shafts 62, 64, respectively. Herein, the shaft 62 can be coupled to a pulley 66 and the shaft 64 can be coupled to the upper arm 90, with the shafts 62, 64 being concentric or otherwise disposed. In alternative aspects, any suitable drive can be provided. The housing 60 can be in communication with a chamber 68, with the bellows 70, chamber 68, and interior portions of the housing 60 isolating a vacuum environment 72 from an atmospheric environment 74. The housing 60 can slide in the z-direction as a carriage on a rail 76, with a lead screw or other suitable vertical or linear z-drive 78 can be provided to selectively move the housing 60, and the two link arm 36 coupled thereto, in the z-direction 80. The robot 34 is mounted on a linear transport 98 configured to move the robot 36 along a linear path inside the chamber 32, as shown by arrow 100 in Figure 2 The features described herein can include those described in U.S. Patent Nos. 10,269,606, 9,149,936, 10,224,232, and U.S. Patent Publication Nos. US 2019 / 0115238 Al, US 2018 / 0104831 Al, the entire contents of which are incorporated herein by reference.

[0026] The two link arm 36 is advantageous over a traditional SCARA arm in a linear system because the arm is elongated when in the folded position or link over link position. As shown in Figure 2 and Figure 1 This results in the ability to use a narrow width 102 linear chamber or passageway 32 and overall system while still being able to reach the extended position at the processing modules 16 and load locks 18'. The two link or dual link arm has only two links connected in series from the robot drive, with one of the links forming an end effector for supporting a substrate.

[0027] Further, referring to Figure 4 This example embodiment illustrates that more than six processing modules 16 can be attached to the transport chamber 32'. This also illustrates the manner in which the transport 98 and robot 34 can be used to access the various processing modules 16 with the two link arms 36 shown in configurations 104a, 104b, 104c. Figure 4An example motion of a linear robot with two-link arms with dual independent end effectors is illustrated. The arm in this example includes a first link 90 attached directly to the drive shaft of the robot drive and two second links 92, 92' connected to the first link 90. Thus, the first dual link arm is provided with links 90, 92 and the second dual link arm is provided with links 90, 92'.

[0028] Each of the two-link arms can support one or more independent end effectors. Using a single end effector system reduces the cost, complexity, and size of the system by reducing the number of axes of motion required to control the robot. Using a robot with multiple end effectors can perform a fast exchange at the load lock and processing modules. A fast exchange includes sequential pick and place transfers at the same station (picking a substrate from a station with one end effector and placing a second substrate to the same station with a second end effector). A robot with multiple end effectors can fast exchange at the load lock and then fast exchange at the processing module. This is illustrated in the snap-shot type sequence of FIGS. 1-6. Figures 5A-5J Figures 5A-5E A substrate 14a is shown being removed from a processing module 16, and Figures 5F-5J A new substrate 14b is shown being inserted into the same module 16.

[0029] Referring to FIG. 1, a robot 10 is shown with a linear transport 12 that moves in direction X. The robot 10 includes a robot drive 20 and a two-link arm 36. The robot drive 20 includes a motor 22 and a drive shaft 24. The two-link arm 36 includes a first link 90 attached directly to the drive shaft 24 of the robot drive 20 and two second links 92, 92' connected to the first link 90. Thus, the first dual link arm is provided with links 90, 92 and the second dual link arm is provided with links 90, 92'. Figures 5A-5E When the linear transport moves in direction X, the robot drive moves the dual link arm 36 to move the end effector into the inlet 17 of the processing module 16. Due to the size, shape, and location of the various components and the reduced width 102 of the transport chamber, the only way for the end effector to enter the inlet 17 is for the rotation of the robot arm 36 to be coordinated with the linear movement of the linear transport to allow the end effector to begin entering the inlet 17 in an inclined direction Y (perpendicular to direction X in this example). For example, the longitudinal length of the second link 92 can be longer than the width 102 of the transport chamber 32. The second link 92 can enter the inlet 17 at an angle and then move directly into the module 16 after initially entering at an angle or along a curved path through the inlet. Thus, the movement of the end effector into the module can be non-translational, but it can then transition to a translational movement within the end stroke of the movement. Once the substrate 14a is lifted by the end effector, the robot motor and linear transport can move in coordination with directions X' and Y' to remove the end effector and substrate from the module.

[0030] In one example, the two-link arm can use the linear axis of the robot (motion in direction 100) to control the orientation of the end effector during arm extension and retraction motion. In another example, the two-link arm cannot use the linear axis of the robot to control the orientation of the end effector during arm extension and retraction motion.

[0031] ​The linear axis of the robot can be moved in either direction, as shown by arrow 100, to control the orientation of the end effectors at different arm extensions. This control can be used to maintain alignment between the end effectors and the stations while the arms are extended and retracted. This can be desirable for certain types of stations, such as process modules.

[0032] The linear axis of the robot can also remain stationary during arm extension and retraction movements, which can allow the arms to be extended and / or retracted to stations where the linear axis cannot move, such as the end of the linear axis travel in either direction.

[0033] A third option, if desired, is to use a combination of using and not using the linear axis of the robot to perform a motion segment of non-traditional extension or retraction motion.

[0034] The narrow transport chamber limits the space available at the end of the chamber to integrate and access load lock modules. The location of the load locks determines the use of two main types of robot motion when accessing the load lock stations:

[0035] a. Robot motion where the primary end effector enters the load lock while one or more secondary end effectors rotate to alternative open spaces in the chamber during load lock transfer, as shown in Figure 6 and Figure 7 .

[0036] b. Robot motion where all end effectors enter the load lock during transfer, as shown in Figure 8 . This type of transfer can require the vertical spacing of the substrate supports in the load lock to be the same as the pitch between the end effectors. The number of slots for substrates can determine the number of wafers transferred. If the robot has two end effectors, the number of load lock slots can be one, as shown in Figures 9A-9E , which Figures 9A-9E shows an example of two end effectors transferring to the station and all end effectors inside the station. The substrates can be placed into one load lock and then removed from another load lock, or multiple substrate support groups can be stacked in a single load lock for pick and place transfer to the same load lock. In an alternative example, there can be any suitable number of end effectors.

[0037] c. Examples of load lock configurations 18, 18', 18", 18"', 18"" between the transport chamber 32 and the EFEM 20 are shown in Figures 10A-10E , which can be used with the robot 34. It should be noted that these are examples only and should not be considered limiting.

[0038] According to one exemplary embodiment, an apparatus is provided, the apparatus comprising a linear carrier configured to move in a transport chamber along a straight path; a robot connected to the linear carrier, wherein the robot comprises a robot drive and a robot arm connected to the robot drive, wherein the robot arm comprises a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear carrier and the robot drive, wherein the controller is configured to control movement of the linear carrier along the straight path, wherein the controller is configured to control the robot drive to extend and retract the dual-link arm, wherein the controller is configured to provide movement of the linear carrier along the straight path while the dual-link arm is being extended and retracted, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area with both the linear carrier and the dual-link arm moving.

[0039] The apparatus can also include a transport chamber and a plurality of substrate processing chambers connected to the transport chamber on opposite sides of the transport chamber, wherein the apparatus is sized and shaped such that the end effector cannot be moved into or out of the substrate processing chambers by the double link arm unless the linear transfer apparatus is moving. The apparatus can also include a second linear transporter configured to move at least partially along the linear path in the transport chamber; and a second robot connected to the second linear transporter, wherein the second robot includes a second robot drive and a second robot arm connected to the second robot drive, wherein the second robot arm includes a second double link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon, wherein the controller is connected to the second linear transporter and the second robot drive, wherein the controller is configured to control movement of the second linear transporter along the linear path, wherein the controller is configured to control the second robot drive to extend and retract the second double link arm, wherein the controller is configured to provide movement of the second linear transporter along the linear path while the second double link arm is being extended or retracted, thereby moving the second end effector into or out of the substrate processing chambers or substrate holding areas in a state where both the second linear transporter and the second double link arm are moving. The transport chamber can include a first section having a generally rectangular shape and a second section at an end of the generally rectangular shape, wherein the second section is wider than the first section and connects to or forms at least two substrate holding areas of the substrate holding area. The apparatus can also include an equipment front end module connected to the second section of the transport chamber, wherein the equipment front end module includes a substrate cassette lift and is configured to move substrates between the substrate cassette lift and the at least two substrate holding areas. The robot arm can include a third link connected to the first link, wherein the first link and the third link form the second double link arm having the second end effector formed on the third link. The apparatus can also include a transport chamber and a plurality of substrate holding areas at ends of the transport chamber, wherein a center axis of each of the substrate holding areas is at least partially offset from or at an angle relative to a center axis along a linear path of the transport chamber.

[0040] An example method can include providing a robot including a robot drive and a robot arm connected to the robot drive, where the robot arm includes a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; mounting the robot to a linear carrier, where the linear carrier is configured to move along a straight path in a transport chamber; connecting the robot drive and the linear carrier to a controller, where the controller is configured to control movement of the linear carrier along the straight path, and where the controller is configured to control the robot drive to extend and retract the dual link arm, where the controller is configured to provide movement of the linear carrier along the straight path while the robot drive extends and retracts the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area with both the linear carrier and the dual link arm moving.

[0041] The dimensions and shapes of the transport chamber, the robot arm, and the linear carrier can be designed such that the end effector cannot be moved into or out of the substrate processing chamber by the dual link arm unless the linear carrier is moving. The method can also include providing a second robot including a second robot drive and a second robot arm connected to the second robot drive, where the second robot arm includes a third link having connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon; mounting the second robot to a second linear carrier, where the second linear carrier is configured to move at least partially along the straight path in the transport chamber; connecting the second robot drive and the second linear carrier to the controller, where the controller is configured to control movement of the second linear carrier along the straight path, and where the controller is configured to control the second robot drive to extend and retract the second dual link arm, where the controller is configured to provide movement of the second linear carrier along the straight path while the second robot drive extends and retracts the second dual link arm, thereby moving the second end effector into or out of the substrate processing chamber or the substrate holding area with both the second linear carrier and the second dual link arm moving. The transport chamber can include a first section having a generally rectangular shape and a second section at an end of the generally rectangular shape, where the second section is wider than the first section and connects to or forms at least two substrate holding areas of the substrate holding area. The robot arm can include a third link connected to the first link, where the first link and the third link form a second dual link arm having the second end effector formed on the third link. The plurality of substrate holding areas can be disposed at the end of the transport chamber, where a center axis of each of the substrate holding areas is at least partially offset from or angled relative to a center axis along the straight path of the transport chamber.

[0042] An example method can be provided that includes moving a linear carrier along a straight path inside a transport chamber; extending or retracting a robot arm while the linear carrier is moving along the straight path, where the robot arm is part of a robot having a robot drive connected to the robot arm, where the robot arm includes a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; controlling the movement of the linear carrier along the straight path and the extension and retraction of the two-link arm by a controller connected to the linear carrier and the robot drive, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area while both the linear carrier and the two-link arm are moving.

[0043] The dimensions and shapes of the transport chamber, the robot arm, and the linear carrier can be designed such that the end effector cannot be moved into or out of the substrate processing chamber by the two-link arm unless the linear carrier is moving. The method can also include moving a second linear carrier at least partially along a straight path inside the transport chamber; extending or retracting a second robot arm while the second linear carrier is moving along the straight path, where the second robot arm is part of a second robot having a second robot drive connected to the second robot arm, where the second robot arm includes a second two-link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon; controlling the movement of the second linear carrier along the straight path and the extension and retraction of the second two-link arm by a controller connected to the second linear carrier and the second robot drive, thereby moving the second end effector into or out of the substrate processing chamber or the substrate holding area while both the second linear carrier and the second two-link arm are moving. The robot arm can include a third link connected to the first link, where the first link and the third link form the second two-link arm having the second end effector formed on the third link, and the method includes controlling the movement of the linear carrier along the straight path and the extension and retraction of the second two-link arm by the controller connected to the linear carrier and the robot drive, thereby moving the second end effector into or out of the substrate processing chamber or the substrate holding area while both the linear carrier and the second two-link arm are moving.

[0044] One example embodiment can provide in an apparatus comprising: means for moving a linear carrier along a straight path inside a transport chamber; means for extending or retracting a robot arm while the linear carrier is moving along the straight path, wherein the robot arm is part of a robot having a robot drive connected to the robot arm, wherein the robot arm comprises a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; means for controlling the movement of the linear carrier along the straight path and the extension and retraction of the two-link arm by a controller connected to the linear carrier and the robot drive, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area in a state where both the linear carrier and the two-link arm are moving.

[0045] One example embodiment can provide an apparatus comprising: at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to:

[0046] move a linear carrier along a straight path inside a transport chamber;

[0047] extend or retract a robot arm while the linear carrier is moving along the straight path, wherein the robot arm is part of a robot having a robot drive connected to the robot arm, wherein the robot arm comprises a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon;

[0048] control the movement of the linear carrier along the straight path and the extension or retraction of the two-link arm, thereby moving the end effector into or out of a substrate processing chamber or a substrate holding area in a state where both the linear carrier and the two-link arm are moving.

[0049] Example embodiments can provide a machine-readable non-transitory program storage device tangibly embodying a program of instructions executable by a machine for performing operations comprising:

[0050] causing a linear carrier to move along a straight path inside a transport chamber;

[0051] causing a robot arm to extend or retract while the linear carrier is moving along the straight path, wherein the robot arm is part of a robot having a robot drive connected to the robot arm, wherein the robot arm comprises a two-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon;

[0052] causing the linear carrier to move along a straight path and the extension and retraction of the dual link arm to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear carrier and the dual link arm are moving.

[0053] To reduce cost and increase efficiency, modern semiconductor factories are constantly striving to fit more processing equipment in smaller buildings. A typical factory layout will arrange processing tools in linear rows, known as bays. The number of bays that can be installed on a factory floor is limited by the length (depth) of the individual processing tools. The number of tools that can be installed per row is limited by the width of the individual processing tools. Each individual processing tool is composed of processing modules and automation hardware to transport wafers from input / output modules (load locks) to the processing modules and back. Conventional processing tool layouts use a single wafer transport robot located in the center of the tool and multiple (such as 4 to 6) processing module spaces in a polar array around the robot. This type of layout is known as a "cluster tool" (see, for example, Figure 1 ). Cluster tools typically have a circular footprint and due to their width, they are not optimally designed to be placed in rows. Factory planners are working to reduce the width of individual processing tools in order to fit more equipment in each factory bay, thereby increasing throughput without the need to increase the footprint. One method that can be used to reduce the width of individual tools is to abandon the polar array arrangement of processing modules in favor of a linear array, such as, for example, as shown in Figure 2 . Linear processing module arrays require more complex automation, including the ability to move the robot along a linear axis from the front to the back of the tool. This type of robot is known as a "linear robot". The width of the entire tool is limited by the depth of the processing modules and the width of the linear robot. As described herein, a method is disclosed to reduce the width and complexity of the linear robot by folding flat in the retracted position (inside the linear tunnel) using a two-link arm, as shown in Figure 2 .

[0054] Because the two-link arm is slender when it is in the folded position or link-to-link position, the two-link arm is advantageous over a conventional SCARA arm in a linear system, as shown in Figure 2 . This results in the ability to use a narrow width linear chamber or tunnel and overall system while still being able to reach the extended position at the processing modules and load locks (see, for example, Figures 5A-5J ).

[0055] Two-link arms or dual-link arms can support one or more independent end effectors. Single end effector systems reduce the cost, complexity, and size of the system by reducing the number of axes of motion required to control the robot. Robots with multiple end effectors can perform fast swaps at load locks and processing modules. Fast swaps include sequential pick and place transfers at the same station (picking a substrate from a station with one end effector and placing a second substrate to the same station with a second end effector). Robots with two end effectors can fast swap at a load lock and then fast swap at a processing module. Robots with more than two (n) end effectors can pick multiple substrates at a load lock and then perform fast swaps at n-1 processing modules. For example, a robot with three end effectors can pick two substrates at a load lock and then perform fast swaps at two different processing modules. A robot with 4 end effectors can pick 3 substrates at a load lock and perform fast swaps in 3 different processing modules.

[0056] Two-link arms can use the linear axis of the robot to control the orientation of the end effector during arm extension and retraction motion, or alternatively, in some cases, the two-link arm cannot use the linear axis of the robot to control the orientation of the end effector during arm extension and retraction motion. The linear axis of the robot can be moved in either direction to control the orientation of the end effector at different arm extensions. This control can be used to maintain alignment between the end effector and a station while the arm is extended and retracted. This can be desirable for certain types of stations such as processing modules. The linear axis of the robot can also remain stationary during arm extension and retraction motion, which can allow the arm to be extended and / or retracted to a station where the linear axis cannot move, such as the end of the linear axis travel in either direction. If desired, a third option is to use and not use the linear axis of the robot to perform a motion segment of non-traditional extension or retraction motion.

[0057] Narrow shipping chambers limit the space available at the end of the chamber to integrate and access load lock modules. The location of the load lock determines which of the two main types of robot motion is used when accessing the load lock station:

[0058] Robot motion where the primary end effector enters the load lock and one or more secondary end effectors rotate to an alternate open space in the chamber during load lock transfer (see, for example, Figures 6-7 ).

[0059] Robot motion where all end effectors enter the load lock during transfer (see, for example, Figure 8). This type of transfer can require the vertical spacing of the substrate supports in the load lock to be the same as the pitch between the end effectors. The number of slots of the substrate can determine the number of wafers transferred. If the robot has two end effectors, the number of load lock slots can be one (see Figures 9A-9E ). If the robot has three end effectors, the number of slots of the load lock can be two. The substrates can be placed into one load lock and then removed from another load lock, or multiple substrate support groups can be stacked in a single load lock for pick-and-place transfer to the same load lock.

[0060] It is to be understood that the foregoing description is only illustrative. Various alternatives and modifications can be practiced by those skilled in the art. For example, features recited in the various dependent claims can be combined with each other in any suitable combination. In addition, features from different embodiments described above can be selectively combined into new embodiments. Thus, the foregoing description is intended to be illustrative only. The description thus provided is intended to be illustrative only. The scope of the application is defined by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalents thereof are intended to be embraced therein.

Claims

1. An apparatus comprising: a linear carrier configured to move in a transport chamber along a straight path; a robot connected to the linear carrier, wherein the robot comprises a robot drive and a robot arm connected to the robot drive, wherein the robot arm comprises a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear carrier and the robot drive, wherein the controller is configured to control movement of the linear carrier along the straight path, wherein the controller is configured to control the robot drive to extend and retract the dual link arm, wherein the controller is configured to provide movement of the linear carrier along the straight path while extension and retraction by rotation of the dual link arm to coordinate non-translational motion of the end effector along a curved path relative to an entrance of a substrate processing chamber and through the entrance with translational motion of the end effector from the entrance to an interior of the substrate processing chamber, thereby moving the end effector into or out of the substrate processing chamber or a substrate holding area with both the linear carrier and the dual link arm moving.

2. The apparatus of claim 1, further comprising the transport chamber and a plurality of the substrate processing chambers connected to the transport chamber on opposite sides of the transport chamber, wherein the apparatus is sized and shaped such that the end effector cannot be moved into or out of the substrate processing chambers by the dual link arm unless the linear carrier is moving.

3. The apparatus of claim 2, further comprising: a second linear carrier configured to move in the transport chamber at least partially along the straight path; and a second robot connected to the second linear carrier, wherein the second robot comprises a second robot drive and a second robot arm connected to the second robot drive, wherein the second robot arm comprises a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon, wherein the controller is connected to the second linear carrier and the second robot drive, wherein the controller is configured to control movement of the second linear carrier along the straight path, wherein the controller is configured to control the second robot drive to extend and retract the second dual link arm, wherein the controller is configured to provide the movement of the second linear carrier along the straight path while extension and retraction of the second dual link arm, thereby moving the second end effector into or out of a substrate processing chamber or a substrate holding area with both the second linear carrier and the second dual link arm moving. ​ 4. The apparatus of claim 2, wherein the transport chamber comprises a first section having a generally rectangular shape and a second section at an end of the generally rectangular shape, wherein the second section is wider than the first section and connects to or forms at least two of the substrate holding areas.

5. The apparatus of claim 4, further comprising a front end module connected to the second section of the transport chamber, wherein the front end module comprises a substrate cassette lift and is configured to move substrates between the substrate cassette lift and the at least two substrate holding areas.

6. The apparatus of claim 1, wherein the robot arm comprises a third link connected to the first link, wherein the first link and the third link form a second dual link arm having a second end effector formed on the third link.

7. The apparatus of claim 1, further comprising the transport chamber and a plurality of the substrate holding areas at an end of the transport chamber, wherein a central axis of each of the substrate holding areas is at least partially offset from or at an angle relative to a central axis along the straight path of the transport chamber.

8. A method comprising: providing a robot comprising a robot drive and a robot arm connected to the robot drive, wherein the robot arm comprises a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; mounting the robot to a linear transporter, wherein the linear transporter is configured to move in a transport chamber along a straight path; connecting the robot drive and the linear transporter to a controller, wherein the controller is configured to control movement of the linear transporter along the straight path, and wherein the controller is configured to control the robot drive to extend and retract the dual link arm, wherein the controller is configured to provide movement of the linear transporter along the straight path at the same time as the robot drive extends and retracts the dual link arm by rotation of the dual link arm to coordinate non-translational motion of the end effector along a curved path through an entrance of a substrate processing chamber that is curved relative to the entrance with translational motion of the end effector from the entrance to an interior of the substrate processing chamber, thereby moving the end effector into or out of the substrate processing chamber or substrate holding area with both the linear transporter and the dual link arm moving.

9. The method of claim 8, wherein the transport chamber, the robot arm, and the linear transporter are sized and shaped such that the end effector cannot be moved into or out of the substrate processing chamber by the dual link arm unless the linear transporter is moving.

10. The method of claim 8, further comprising: providing a second robot including a second robot drive and a second robot arm connected to the second robot drive, wherein the second robot arm includes a second dual-link arm having a third link connected to the second robot drive and a fourth link for a second end effector to support a substrate thereon; mounting the second robot to a second linear carrier, wherein the second linear carrier is configured to move at least partially along the straight path in the transport chamber; connecting the second robot drive and the second linear carrier to the controller, wherein the controller is configured to control movement of the second linear carrier along the straight path, and wherein the controller is configured to control the second robot drive to extend and retract the second dual-link arm, wherein the controller is configured to provide movement of the second linear carrier along the straight path while the second robot drives extension and retraction of the second dual-link arm, thereby moving the second end effector into or out of the substrate processing chamber or substrate holding area in a state where both the second linear carrier and the second dual-link arm are moving.

11. The method of claim 8, wherein the transport chamber includes a first section having a generally rectangular shape and a second section located at an end of the generally rectangular shape, wherein the second section is wider than the first section and connects to or forms at least two of the substrate holding areas.

12. The method of claim 8, wherein the robot arm includes a third link connected to the first link, wherein the first link and the third link form a second dual-link arm having a second end effector formed on the third link.

13. The method of claim 8, wherein a plurality of the substrate holding areas are disposed at an end of the transport chamber, wherein a center axis of each of the substrate holding areas is at least partially offset from or angled relative to a center axis along the straight path of the transport chamber.

14. A method, comprising: moving a linear carrier along a straight path inside a transport chamber; extending or retracting a robot arm while the linear carrier is moving along the straight path, wherein the robot arm is part of a robot having a robot drive connected to the robot arm, wherein the robot arm includes a dual-link arm having a first link connected to the robot drive and a second link forming an end effector to support a substrate thereon; movement of the end effector from the entrance to an interior of the substrate processing chamber, through the control of movement of the linear transporter along the straight path by a controller connected to the linear transporter and the robot drive, while the linear transporter and the dual-link arm are both moving, to move the end effector into or out of the substrate processing chamber or substrate holding area.

15. The method of claim 14, wherein the dimensions and shapes of the transport chamber, the robot arm, and the linear transporter are designed such that the end effector cannot be moved into or out of the substrate processing chamber by the dual-link arm unless the linear transporter is moving.

16. The method of claim 14, further comprising: moving a second linear transporter at least partially along the straight path inside the transport chamber; extending or retracting a second robot arm while the second linear transporter is moving along the straight path, wherein the second robot arm is part of a second robot having a second robot drive connected to the second robot arm, wherein the second robot arm comprises a second dual-link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon; controlling movement of the second linear transporter along the straight path and extension and retraction of the second dual-link arm by the controller connected to the second linear transporter and the second robot drive, to move the second end effector into or out of a substrate processing chamber or substrate holding area while the second linear transporter and the second dual-link arm are both moving.

17. The method of claim 14, wherein the robotic arm includes a third link connected to the first link, wherein the first link and the third link form a second two-link arm, the second two-link arm having a second end effector formed on the third link, and the method includes: controlling movement of the linear transporter along the straight path and extension and retraction of the second dual-link arm by the controller connected to the linear transporter and the robot drive, to move the second end effector into or out of a substrate processing chamber or substrate holding area while the linear transporter and the second dual-link arm are both moving.

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