Spin coating chamber atmosphere control structure based on gas assistance and variable inclination angle rectifying plate

Abstract

The invention discloses a spin-coating chamber atmosphere control structure based on gas assistance and a variable-inclination-angle rectifying plate. The spin-coating chamber atmosphere control structure comprises a synchronous cover module and a main chuck. The synchronous cover module and the main chuck are of a concentric circle structure. The synchronous cover module is installed on the upper portion of the main chuck. The variable-inclination-angle rectifying plate structure driven by bevel gear transmission is arranged in the spin-coating cavity, and adjustable control over the direction and strength of airflow in the cavity is achieved. By adjusting the inclination angle of the rectifying plate, radial and axial flow fields in the cavity are distributed more uniformly, and the flow instability caused by vortex, sudden change of a shearing layer and the like in the spin coating process is effectively weakened, so that the uniformity of the flow fields in the cavity is improved, and a stable airflow condition is provided for spin coating film thickness control. The vapor concentration of the solvent in the chamber can be dynamically adjusted, too fast volatilization of the solvent is inhibited, and the nonuniform film thickness caused by the fringe effect and the local concentration gradient is remarkably weakened, so that the uniformity of solvent volatilization is improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of spin coater, and relates to a spin coating chamber atmosphere control structure based on gas assistance and variable angle rectifier plate, which is used for improving the airflow uniformity and solvent volatilization uniformity in the spin coating process. BACKGROUND

[0002] As a common technology for preparing uniform thin films and functional coatings, the spin coating method is widely used in the preparation process of various micro-nano structures such as sensors, gratings and organic optoelectronic devices due to its simple process, fast film forming speed, controllability of film thickness and other advantages. In the spin coating process, the high-speed rotation of the substrate produces strong centrifugal driving, which causes significant shearing and radial flow of the solution on the substrate surface, accompanied by rapid solvent evaporation and solute diffusion migration, and finally forms a solidified thin film with the target thickness and structure. Although a large number of theoretical models and engineering practices have tried to control the rotation speed, solution viscosity, chamber pressure and temperature and other parameters to improve the film thickness uniformity, the flow field inside the spin coating chamber is still very complex in actual industrial and scientific research applications. Due to the uneven distribution of solvent vapor in the chamber, the obvious gas concentration gradient and the frequent local flow field disturbance, there are still problems such as uneven film thickness distribution, large difference in solvent evaporation rate, which seriously affect the film forming quality, interface flatness and process repeatability The fundamental reasons for the above unevenness include the difference between the radial and axial flow velocity profiles in the chamber, the formation of local vortexes and the local enrichment of solvent vapor in the chamber. In the spin coating process, the main flow zone and the near-wall laminar flow formed under the action of centrifugal force are prone to sudden changes in velocity gradient, thereby inducing shear layer and vortex structure, which causes obvious differences in solvent evaporation rate in different regions. At the same time, the temperature gradient and surface tension gradient also induce the Marangoni effect, making the solute migration and evaporation mass transfer process more complex, leading to further deviation of the film thickness from the expected distribution. In the prior art, fixed rectifier plates, closed covers or whole temperature control chambers are usually used to improve the flow stability and temperature uniformity of the spin coating environment. However, fixed structures are difficult to realize individualization and real-time control when facing different substrate sizes, rotation speeds, solution formulations or chamber atmosphere conditions, resulting in limited flow field adjustment range. In addition, the existing chambers are in a natural volatilization environment, and the solvent vapor concentration in the chamber cannot be effectively controlled. When the external airflow or local solvent volatilization is too fast, it is easy to cause edge effects, stripes, spots and other defects.

[0003] Therefore, designing a spin coating chamber atmosphere control structure with gas assistance and a variable-angle rectifier has become a critical issue that urgently needs to be addressed in the spin coating film formation industry. This requires not only that the chamber environment control structure can actively introduce or extract gas or solvent vapor to adjust the solvent concentration distribution within the chamber, thereby suppressing excessively rapid evaporation, but also that the structure can use the variable-angle rectifier to directionally correct and homogenize the flow field within the chamber, achieving precise control of radial and axial flow under different operating conditions. This significantly improves the uniformity of the flow field and evaporation during spin coating, reduces film thickness variations, and enhances product yield and process stability. Summary of the Invention

[0004] To address the aforementioned problems in spin coating technology, this invention aims to design a spin coating chamber atmosphere control structure based on gas assistance and a variable tilt angle rectifier plate, which can effectively improve both the uniformity of the flow field within the chamber and the uniformity of solvent evaporation within the chamber.

[0005] The technical solution of the present invention is as follows: A gas-assisted, variable-angle rectifier-based atmosphere control structure for a spin coating chamber includes a synchronization hood module and a main chuck; the synchronization hood module and the main chuck are concentric circles; the synchronization hood module is mounted on the upper part of the main chuck; the synchronization hood module and the main chuck are driven by friction through a sealing ring. The synchronization cover module, from top to bottom, consists of a connector, a chamber cover, a large bevel gear, a steam chamber guide, a flow divider, a small bevel gear, and a rectifier plate. The connector is bolted to the chamber cover; the chamber cover is screwed to the flow divider; the flow divider is bolted to the steam chamber guide; the rectifier plate is threaded to the small bevel gear; the small bevel gear is mounted on the flow divider; the large bevel gear is mounted on the steam chamber guide; and the small bevel gear meshes with the large bevel gear. The main chuck has a vacuum hole at its center; the bottom surface of the main chuck is a mounting plane for the base support platform.

[0006] The main chuck is provided with a main chuck mounting and positioning ring on the outer side of its bottom; the main chuck mounting and positioning ring is a circular protrusion on the bottom of the main chuck; the top of the main chuck has a sealing ring mounting groove.

[0007] The upper part of the inner wall of the main chuck is cylindrical and the lower part is an expanded conical surface; the expanded conical surface is a splash-proof inclined surface; the bottom of the splash-proof inclined surface is a drain hole.

[0008] Furthermore, the mounting surface of the base support platform is a precision-machined surface; the cross-section of the sealing ring mounting groove is rectangular; the bottom of the main chuck has a main chuck fixing hole and a base fixing bolt hole; the position of the main chuck fixing hole is closer to the center of the main chuck than the position of the base fixing bolt hole.

[0009] Furthermore, the main chuck is made of nylon; the connector is made of stainless steel; and the chamber cover is made of aluminum alloy.

[0010] Furthermore, the connector has a three-layer cylindrical structure, with the top layer cylinder having the smallest diameter and the bottom layer cylinder having the largest diameter; the top layer cylinder is connected to the bearing; and the bottom layer cylinder is connected to the chamber cover.

[0011] Furthermore, the top of the chamber cover is provided with radially reinforcing ribs; there are 8 reinforcing ribs, evenly distributed circumferentially; the chamber cover has chamber cover mounting holes for installation with connecting parts; a temperature sensor is provided on the chamber cover; the chamber cover has 8 temperature sensor mounting holes, of which 6 temperature sensor mounting holes are located near the edge of the chamber cover and 2 temperature sensor mounting holes are located near the center of the chamber cover; the inner edge of the chamber cover has a stepped structure; the outermost edge is driven by the main chuck; the second step of the inner edge of the chamber cover has a flow layer mounting hole. Furthermore, the large bevel gear has a module of 1.25, 60 teeth, and a pressure angle of 20 degrees; the large bevel gear is a spur bevel gear; the upper end of the shaft of the large bevel gear is a hollow shaft; the hollow shaft serves as the central air inlet; the bottom of the hollow shaft has two rings of steam chamber air inlets; each ring of steam chamber air inlets has 4 inlets, and the steam chamber air inlets in the same ring are evenly distributed circumferentially; the centers of adjacent rings of steam chamber air inlets are staggered at a 45-degree angle.

[0012] The small bevel gear has a module of 1.25, 12 teeth, and a pressure angle of 20 degrees; the small bevel gear is a spur bevel gear; there are 4 small bevel gears, which are distributed and meshed around the circumference of the large bevel gear; the shaft of the small bevel gear is connected to the rectifier plate and changes its tilt angle as the small bevel gear rotates; the rectifier plate is a slender rectangular plate; the flow divider and the steam chamber guide form a closed space for installing the large and small bevel gears.

[0013] Furthermore, the steam chamber guide is composed of a central plane, an inclined transition surface, and a bottom plane; the central plane has a large bevel gear mounting hole; the bottom plane has a steam chamber guide mounting hole; the steam chamber guide is installed on the distribution layer using the steam chamber guide mounting hole; the installation height of the steam chamber guide is lower than the steam chamber air inlet on the large bevel gear; a boss is designed at the edge of the distribution layer to cooperate with the step of the chamber cover; the boss protrudes upwards towards the distribution layer; a through hole is opened on the boss to cooperate with the chamber cover; the distribution layer has distribution holes; the distribution holes are distributed in 7 rings radially, with 16 distribution holes in each ring; there is a cylindrical space at the center of the distribution layer; the cylindrical space is a small bevel gear mounting bracket; the side wall of the small bevel gear mounting bracket has 4 small bevel gear mounting holes.

[0014] Furthermore, the chamber cover, the steam chamber guide, and the diversion layer constitute the steam chamber; the steam chamber has 8 air inlets; the steam chamber guide forms a funnel-shaped air intake space for the steam chamber.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. This invention achieves adjustable control of the airflow direction and intensity within the spin coating chamber by incorporating a variable-angle rectifier structure driven by bevel gears. By adjusting the rectifier's angle, the radial and axial flow field distribution within the chamber becomes more uniform, effectively reducing flow instability caused by vortices and abrupt shear layer changes during spin coating. This improves the uniformity of the flow field within the chamber and provides stable airflow conditions for controlling the spin coating film thickness.

[0016] 2. This invention achieves directional delivery and uniform distribution of inert gas or solvent vapor by setting a gas-assisted vapor chamber structure between the chamber cover and the distribution layer, combined with a porous air inlet channel and a flared-mouth flow guide design on the large bevel gear shaft. This structure can dynamically adjust the solvent vapor concentration inside the chamber, suppress excessively rapid solvent evaporation, significantly reduce edge effects and uneven film thickness caused by local concentration gradients, thereby improving the uniformity of solvent evaporation.

[0017] 3. This invention achieves synchronous and uniform control of the gas flow field inside the spin coating chamber through the synergistic effect of a gear-linked variable tilt angle rectification system and a gas-assisted chamber structure, forming a stable and controllable atmosphere environment. This integrated control structure effectively reduces film thickness differences during spin coating, improves film uniformity and process repeatability, and provides a reliable chamber environment guarantee for the preparation of high-precision functional films. Attached Figure Description

[0018] Figure 1 This is a top view of the overall structure of the present invention; Figure 2 This is a rear bottom view of the overall structure of the present invention; Figure 3 This is a cross-sectional schematic diagram of the overall structure of the present invention; Figure 4 This is a top view of the flow distribution layer of the present invention; Figure 5 This is a bottom view of the back of the flow divider layer of the present invention; Figure 6 This is a schematic diagram of the steam chamber guide of the present invention; Figure 7 This is a schematic diagram of the connector of the present invention; Figure 8 This is a schematic diagram of the bevel gear transmission mechanism of the present invention; In the diagram: 1-Cavity top cover; 2-Reinforcing rib; 3-Temperature sensor mounting hole; 4-Drain hole; 5-Main chuck; 6-Cavity top cover mounting hole; 7-Connector; 8-Central air inlet; 9-Large bevel gear; 10-Steam chamber guide; 11-Steam chamber; 12-Diverter layer mounting hole; 13-Main chuck mounting positioning ring; 14-Vacuum hole; 15-Base support platform mounting plane; 16-Anti-splash slope; 17-Sealing ring mounting groove; 18-Base fixing bolt hole; 19-Main chuck fixing hole; 20-Diverter layer; 21-Diverter hole; 22-Steam chamber guide mounting hole; 23-Small bevel gear mounting hole; 24-Small bevel gear mounting bracket; 25-Large bevel gear mounting hole; 26-Steam chamber air inlet; 27-Small bevel gear; 28-Rectifier plate. Detailed Implementation

[0019] The specific embodiments of the present invention are further described below with reference to the accompanying drawings and technical solutions. For example... Figures 1-8 As shown, a gas-assisted, variable-angle rectifier-based atmosphere control structure for a spin coating chamber includes a synchronization hood module and a main chuck 5; the synchronization hood module and the main chuck 5 are concentric circles; the synchronization hood module is mounted on the upper part of the main chuck 5; the synchronization hood module and the main chuck 5 are driven by friction through a sealing ring. The synchronization cover module, from top to bottom, consists of a connector 7, a chamber cover 1, a large bevel gear 9, a steam chamber guide 10, a flow divider 20, a small bevel gear 27, and a rectifier plate 28. The connector 7 is bolted to the chamber cover 1; the chamber cover 1 is screwed to the flow divider 20; the flow divider 20 is bolted to the steam chamber guide 10; the rectifier plate 28 is threaded to the small bevel gear 27; the small bevel gear 27 is mounted on the flow divider 20; the large bevel gear 9 is mounted on the steam chamber guide 10; and the small bevel gear 27 meshes with the large bevel gear 9. The main chuck 5 has a vacuum hole 14 at its center; the inner bottom surface of the main chuck 5 is a base support platform mounting plane 15.

[0020] The main chuck 5 has a main chuck mounting and positioning ring 13 on its bottom outer side; the main chuck mounting and positioning ring 13 is a circular protrusion on the bottom of the main chuck 5; the main chuck 5 has a sealing ring mounting groove 17 on its top.

[0021] The upper part of the inner wall of the main chuck 5 is cylindrical and the lower part is an expanded conical surface; the expanded conical surface is a splash-proof inclined surface 16; the bottom of the splash-proof inclined surface 16 is a drain hole 4.

[0022] Furthermore, the mounting surface 15 of the base support platform is a precision-machined surface; the cross-section of the sealing ring mounting groove 17 is rectangular; the bottom of the main chuck 5 has a main chuck fixing hole 19 and a base fixing bolt hole 18; the position of the main chuck fixing hole 19 is closer to the center of the main chuck 5 than the position of the base fixing bolt hole 18.

[0023] Furthermore, the main chuck 5 is made of nylon; the connector 7 is made of stainless steel; and the chamber cover 1 is made of aluminum alloy.

[0024] Furthermore, the connector 7 has a three-layer cylindrical structure, with the highest layer cylinder having the smallest diameter and the lowest layer cylinder having the largest diameter; the highest layer cylinder is connected to the bearing; and the lowest layer cylinder is connected to the chamber cover 1.

[0025] Furthermore, the top of the chamber cover 1 is provided with a radial reinforcing rib 2; there are 8 reinforcing ribs 2, evenly distributed circumferentially; the chamber cover 1 has chamber cover mounting holes 6 for installation with the connector 7; a temperature sensor is provided on the chamber cover 1; the chamber cover 1 has 8 temperature sensor mounting holes 3, of which 6 temperature sensor mounting holes 3 are located near the edge of the chamber cover 1, and 2 temperature sensor mounting holes 3 are located near the center of the chamber cover 1; the inner edge of the chamber cover 1 has a stepped structure; the outermost edge is in drive engagement with the main chuck 5; the second step of the inner edge of the chamber cover 1 has a diversion layer mounting hole 12.

[0026] Furthermore, the large bevel gear 9 has a module of 1.25, 60 teeth, and a pressure angle of 20 degrees. The large bevel gear 9 is a spur bevel gear; the upper end of the shaft of the large bevel gear 9 is a hollow shaft; the hollow shaft serves as the central air inlet 8; the bottom of the hollow shaft has two rings of steam chamber air inlets 26; there are 4 steam chamber air inlets 26 per ring, and the steam chamber air inlets 26 in the same ring are evenly distributed circumferentially; the centers of adjacent rings of steam chamber air inlets 26 are staggered at a 45-degree angle.

[0027] The small bevel gear 27 has a module of 1.25, 12 teeth, and a pressure angle of 20 degrees; the small bevel gear 27 is a spur bevel gear; there are 4 small bevel gears 27, which are distributed and meshed around the large bevel gear 9; the shaft of the small bevel gear 27 is connected to the rectifier plate 28 and changes its tilt angle as the small bevel gear 27 rotates; the rectifier plate 28 is a slender rectangular plate; the flow divider layer 20 and the steam chamber guide 10 form a closed space for installing the large bevel gear 9 and the small bevel gear 27. Furthermore, the steam chamber guide 10 is composed of a central plane, an inclined transition surface, and a bottom plane; the central plane has a large bevel gear mounting hole 25; the bottom plane has a steam chamber guide mounting hole 22; the steam chamber guide 10 is mounted on the flow divider 20 using the steam chamber guide mounting hole 22; the mounting height of the steam chamber guide 10 is lower than the steam chamber air inlet 26 on the large bevel gear 9; the edge of the flow divider 20 is designed with... A boss is installed to mate with the upper cover 1 of the chamber; the boss protrudes upward toward the diversion layer 20; the boss has a through hole to mate with the upper cover 1 of the chamber; the diversion layer 20 has diversion holes 21; the diversion holes 21 are distributed in 7 rings along the radial direction, with 16 diversion holes 21 in each ring; the diversion layer 20 has a cylindrical space at its center; the cylindrical space is a small bevel gear mounting bracket 24; the side wall of the small bevel gear mounting bracket 24 has 4 small bevel gear mounting holes 23.

[0028] Furthermore, the chamber cover 1, the steam chamber guide 10, and the diversion layer 20 constitute the steam chamber 11; the steam chamber 11 has 8 air inlets; the steam chamber guide 10 forms a funnel-shaped air intake space for the steam chamber 11.

[0029] The operating mode of this invention is as follows: Before spin coating begins, parameters such as the angle of the rectifier plate and the air inlet flow rate are determined based on parameters such as the target film thickness, solution viscosity, spin coating speed, spin coating time, and solvent type. After completing the pre-spray coating preparation process, spin coating can begin.

[0030] First, the cleaned substrate support platform is installed in the corresponding position on the main chuck 5, and the substrate to be coated is precisely placed in the center area of ​​the support platform. After confirming that the substrate position is coaxial with the rotation center of the main chuck 5, the substrate is fixed with substrate fixing bolts to ensure its stability during spin coating. A predetermined volume of spin coating liquid is evenly distributed onto the substrate surface, allowing the solution to cover the entire effective area in a static state, forming an initial liquid film. After completing the liquid distribution operation, the synchronization cover module is installed on the main chuck 5 and the gas-assisted system is turned on, slowly introducing solvent vapor that matches the composition of the spin coating liquid into the spin coating chamber to regulate the atmosphere inside the chamber. By precisely controlling the inlet flow rate and concentration, a uniform solvent vapor distribution is gradually established in the chamber, thereby effectively reducing local evaporation rate differences and suppressing uneven evaporation between the liquid film edge and the center area. After a short atmosphere stabilization phase, the concentration gradient of solvent vapor in the chamber tends to balance, and the vapor partial pressure distribution above the liquid film surface tends to be uniform, making the solvent evaporation rate of the liquid film interface layer tend to be uniform. Finally, after setting the spin coating process parameters, spin coating can begin.

[0031] As described above, those skilled in the art can make various other corresponding changes and modifications based on the technical solutions and concepts of this invention, and all such changes and modifications should fall within the protection scope of the claims of this invention.

Claims

1. A spin-coating chamber atmosphere control structure based on gas assistance and variable-tilt rectification plate, characterized by: It comprises a synchronous cover module and a main chuck (5); the synchronous cover module and the main chuck (5) are concentric circular structures; the synchronous cover module is installed on the upper part of the main chuck (5); the synchronous cover module and the main chuck (5) are frictionally driven through a sealing ring; The synchronous cover module is sequentially connected from top to bottom by a connecting piece (7), a chamber upper cover (1), a large bevel gear (9), a steam chamber flow guide (10), a shunt layer (20), a small bevel gear (27) and a rectifier plate (28); the connecting piece (7) is connected with the chamber upper cover (1) through bolts; the chamber upper cover (1) is connected with the shunt layer (20) through screws; the shunt layer (20) is connected with the steam chamber flow guide (10) through bolts; the rectifier plate (28) is connected with the small bevel gear (27) through threads; the small bevel gear (27) is installed on the shunt layer (20); the large bevel gear (9) is installed on the steam chamber flow guide (10); the small bevel gear (27) is engaged with the large bevel gear (9); The main chuck (5) is provided with a vacuum extraction hole (14) in the center; the inner bottom surface of the main chuck (5) is a substrate bearing platform installation plane (15); The outer side of the bottom of the main chuck (5) is provided with a main chuck installation positioning ring (13); the main chuck installation positioning ring (13) is a circular ring protrusion at the bottom of the main chuck (5); the top of the main chuck (5) has a sealing ring installation groove (17); The inner side wall of the main chuck (5) is a cylindrical surface at the upper part and an expanding conical surface at the lower part; the expanding conical surface is a splash-proof inclined surface (16); the bottom of the splash-proof inclined surface (16) is a liquid discharge hole (4).

2. The gas-assisted and variable-tilt-plate-based atmosphere control structure for a spin-coating chamber according to claim 1, wherein: The substrate bearing platform installation plane (15) is a finished plane; the cross section of the sealing ring installation groove (17) is rectangular; the bottom of the main chuck (5) is provided with a main chuck fixing hole (19) and a substrate fixing bolt hole (18); the position of the main chuck fixing hole (19) is closer to the center of the main chuck (5) than the position of the substrate fixing bolt hole (18).

3. The gas-assisted and variable-tilt-plate-based atmosphere control structure for a spin-coating chamber of claim 1, wherein: The material of the main chuck (5) is nylon material; the material of the connecting piece (7) is stainless steel; the material of the chamber upper cover (1) is aluminum alloy.

4. The gas-assisted and variable-tilt- angle-iris-based atmosphere control structure for a spin-coating chamber according to claim 1, wherein: The structure of the connecting piece (7) is a three-layer cylindrical structure, the highest layer has the smallest diameter, and the lowest layer has the largest diameter; the highest layer is connected with a bearing; the lowest layer is connected with the chamber upper cover (1).

5. The gas-assisted and variable-tilt- angle-iris-based atmosphere control structure for a spin-coating chamber according to claim 1, wherein: The top of the chamber upper cover (1) is provided with radial stiffeners (2); the number of stiffeners (2) is 8, evenly distributed along the circumference; the chamber upper cover (1) is provided with chamber upper cover mounting holes (6) matched with connecting pieces (7); the chamber upper cover (1) is provided with temperature sensors; the chamber upper cover (1) is provided with 8 temperature sensor mounting holes (3), of which 6 temperature sensor mounting holes (3) are located near the edge of the chamber upper cover (1), and 2 temperature sensor mounting holes (3) are located near the center of the chamber upper cover (1); the inner side edge of the chamber upper cover (1) is a stepped structure; the most edge is matched with the main chuck (5) for transmission; the second step of the inner side edge of the chamber upper cover (1) is provided with a shunt layer mounting hole (12).

6. The gas-assisted and variable-tilt- angle-iris-based atmosphere control structure for a spin-coating chamber of claim 1, wherein: The modulus of the large bevel gear (9) is 1.25, the number of teeth is 60, and the pressure angle is 20 degrees; the large bevel gear (9) is a straight bevel gear; the upper end of the shaft of the large bevel gear (9) is a hollow shaft; the hollow shaft serves as a central air inlet (8); the bottom of the hollow shaft is provided with two rings of steam chamber air inlet holes (26); each ring has 4 steam chamber air inlet holes (26), and the steam chamber air inlet holes (26) in the same ring are evenly distributed along the circumference; the centers of adjacent two rings of steam chamber air inlet holes (26) are staggered at an angle of 45 degrees; The modulus of the small bevel gear (27) is 1.25, the number of teeth is 12, and the pressure angle is 20 degrees; the small bevel gear (27) is a straight bevel gear; the small bevel gear (27) has 4, which are distributed along the circumference of the large bevel gear (9) and meshed for transmission; the shaft of the small bevel gear (27) is connected with the rectifier plate (28) to change the inclination angle with the rotation of the small bevel gear (27); the rectifier plate (28) is an elongated rectangular plate; the shunt layer (20) and the steam chamber flow guide (10) form a closed space for installing the large bevel gear (9) and the small bevel gear (27).

7. The gas-assisted and variable-tilt- angle-iris-based atmosphere control structure for a spin-coating chamber of claim 1, wherein: The steam chamber flow guide (10) is composed of a central plane, an inclined transition surface and a bottom plane; the central plane is provided with a large bevel gear mounting hole (25); the bottom plane is provided with a steam chamber flow guide mounting hole (22); the steam chamber flow guide (10) is installed on the shunt layer (20) by means of the steam chamber flow guide mounting hole (22); the installation height of the steam chamber flow guide (10) is lower than that of the steam chamber air inlet hole (26) on the large bevel gear (9); the edge position of the shunt layer (20) is designed with a boss matched with the step of the chamber upper cover (1) for installation; the boss protrudes upward above the shunt layer (20); the boss is provided with a through hole matched with the chamber upper cover (1) for installation; the shunt layer (20) is provided with a shunt hole (21); the shunt hole (21) is distributed along the radial direction with 7 rings, each ring has 16 shunt holes (21); the center of the shunt layer (20) has a cylindrical space; the cylindrical space is a small bevel gear mounting bracket (24); the side wall of the small bevel gear mounting bracket (24) is provided with 4 small bevel gear mounting holes (23).

8. The gas-assisted and variable-tilt- angle-iris-based atmosphere control structure for a spin-coating chamber according to claim 1, wherein: The chamber upper cover (1), the steam chamber flow director (10) and the shunt layer (20) constitute a steam chamber (11); the steam chamber (11) has eight air inlets; the steam chamber flow director (10) forms a horn mouth type air inlet space for the steam chamber (11).

Images