A film pasting machine and wafer production system for wafer production

Abstract

The application provides a film pasting machine and a wafer production system for wafer production, and relates to the technical field of wafer production. The film is sequentially extended from a first film shaft to above the adsorption assembly, and is wound between the adsorption assembly and the first roller shaft, so that the end of the film layer is below the first roller shaft, and the film layer is continuously wound on the second film shaft. The film pulling assembly first pulls the film layer, then the first roller shaft is controlled to be pressed down, the film layer is pressed and pasted on the surface of the workpiece to be pasted, then the film pulling assembly is loosened. The first driving member drives the support assembly to move in the first horizontal direction, so that the first roller shaft pastes the film layer on the workpiece to be pasted during movement, and the second film shaft rotates to synchronously recover the film layer. It can be understood that the film is pasted and torn at the same time during the film pasting process of the first roller shaft, compared with the scheme of pasting the film after tearing the film completely, bubbles can be avoided, the pasting quality of the film and the workpiece is improved, and the subsequent wafer production is not affected.

Description

Technical Field

[0001] This invention relates to the field of wafer manufacturing technology, and in particular to a film laminating machine and wafer manufacturing system for wafer manufacturing. Background Technology

[0002] In the wafer manufacturing process, a blue film is usually first attached to the surface of the workpiece, and then the wafer on the tray is attached to the blue film to facilitate subsequent processing and inspection of the wafer. After the wafer processing and inspection are completed, the wafer is peeled off from the blue film and placed back onto the tray.

[0003] In existing technologies, the blue film bonding process typically involves first peeling off the entire blue film, then cutting it to the workpiece size, and finally bonding the cut blue film onto the workpiece. However, when bonding large workpieces, this method easily traps air during the bonding process, causing air bubbles to form between the blue film and the workpiece. This not only affects the bonding quality of the blue film and the workpiece but also adversely impacts the accuracy of subsequent wafer processing and inspection. Therefore, it is necessary to provide a bonding machine that can effectively avoid air bubble formation during the bonding process. Summary of the Invention

[0004] One objective of the first aspect of this invention is to provide a film laminating machine for wafer production, which solves the technical problem of air bubbles easily generated during the film laminating process in the prior art.

[0005] A further objective of the first aspect of the present invention is to further improve the quality of the film application.

[0006] The second aspect of the present invention is to provide a wafer production system having the above-described film applicator.

[0007] According to a first aspect of the present invention, the present invention provides a film laminating machine for wafer fabrication, comprising:

[0008] Frame;

[0009] A clamping mechanism, mounted on the frame, is used to clamp the workpiece to be coated with film;

[0010] A film winding mechanism is installed on the frame. The film winding mechanism includes a first film shaft and a second film shaft. The first film shaft is used to install the film winding. The film winding includes a thin film layer and a film paper layer.

[0011] The film application mechanism includes a first drive component, a support assembly, and an adsorption assembly, a film pulling assembly, a first roller, a second roller, and a film cutting assembly mounted on the support assembly; the first roller is located on the side of the film cutting assembly facing a first horizontal direction, and the second roller is located on the side of the film cutting assembly away from the first horizontal direction;

[0012] The roll film extends sequentially from the first film shaft to above the adsorption assembly and is wound between the adsorption assembly and the first roller shaft, such that the end of the film layer is located below the first roller shaft, and the film paper layer continues to be wound onto the second film shaft.

[0013] The film-pulling assembly is used to clamp the film layer and pull it to move a first preset distance;

[0014] The first roller is pressed down in a controlled manner to press the film layer onto the surface of the workpiece to be filmed, and then the film pulling assembly releases the film layer;

[0015] The first driving member drives the bracket assembly to move along the first horizontal direction, so that the first roller shaft adheres the film layer to the workpiece to be filmed during the movement, while the second film shaft rotates to synchronously retract the film paper layer;

[0016] When the first roller moves to the end of the workpiece to be coated, the first roller moves upward in a controlled manner, and then the second roller is pressed downward in a controlled manner. The first driving member continues to drive the bracket assembly to move a second preset distance along the first horizontal direction, so that the second roller re-presses the part of the film layer that was carried by the first roller onto the workpiece to be coated. Finally, the film cutting assembly cuts the film layer.

[0017] Optionally, before the first driving member drives the support assembly to move along the first horizontal direction, the first driving member first drives the support assembly to move in the opposite direction to the first horizontal direction, so that the first roller presses the portion of the film layer held by the film stretching assembly onto the workpiece to be filmed.

[0018] Optionally, the adsorption component extends along a second horizontal direction and is connected to the support component at both ends. The adsorption component has an air passage communicating with the air extraction device inside, and a plurality of adsorption holes communicating with the air passage are provided on the surface of the adsorption component. The adsorption holes are used to adsorb the roll film.

[0019] Optionally, the film application mechanism further includes:

[0020] The second drive component is mounted on the bracket assembly;

[0021] A rotating arm, one end of which is rotatably connected to the support assembly, and the other end of which is connected to the first roller shaft, the first roller shaft being arranged along a second horizontal direction, the second horizontal direction being perpendicular to the first horizontal direction;

[0022] A rotating shaft is arranged along the second horizontal direction and connected to the rotating arm and the second driving member. Under the drive of the second driving member, the rotating shaft drives the rotating arm to rotate, thereby causing the first roller to press down or move up.

[0023] Optionally, the membrane stretching assembly includes:

[0024] A third driving component is mounted on the bracket assembly;

[0025] A first slide rail assembly is arranged on the bracket assembly along the first horizontal direction;

[0026] Multiple grippers are slidably mounted on the first slide rail assembly, and under the drive of the third drive member, the multiple grippers slide synchronously along the first slide rail assembly.

[0027] Optionally, the film application mechanism further includes:

[0028] The second slide rail assembly is arranged along the first horizontal direction, and the bracket assembly is slidably mounted on the second slide rail assembly;

[0029] The conveying assembly includes a conveyor belt and two synchronous pulleys, the two synchronous pulleys being arranged at intervals along the first horizontal direction on the frame, and one of the synchronous pulleys being connected to the first drive member. The conveyor belt is sleeved on the two synchronous pulleys and connected to the support assembly.

[0030] Driven by the first driving component, the synchronous wheel rotates, driving the conveyor belt to move along the second slide rail assembly.

[0031] Optionally, the support assembly includes:

[0032] The mounting frame is on which the adsorption assembly, the film stretching assembly, the first roller, the second roller, and the film cutting assembly are all mounted.

[0033] A first mounting plate is arranged vertically, and the first mounting plate is slidably connected to the second slide rail assembly and connected to the conveyor belt;

[0034] The fourth driving component is mounted on the first mounting plate and connected to the mounting bracket, and is used to drive the mounting bracket to move up and down.

[0035] Optionally, it also includes:

[0036] The fifth driving component is mounted on the mounting bracket and connected to the second roller shaft, and is used to drive the second roller shaft to move up and down.

[0037] Optionally, the film cutting assembly includes:

[0038] A film-cutting blade is positioned above the workpiece to be coated with film;

[0039] The sixth driving component is located above the film cutting tool and connected to the film cutting tool, and is used to drive the film cutting tool to move up and down;

[0040] The seventh driving component is mounted on the mounting bracket along the second horizontal direction and connected to the sixth driving component. It is used to drive the sixth driving component to move, thereby driving the film cutting tool to move along the second horizontal direction to perform film cutting.

[0041] In particular, according to a second aspect of the present invention, the present invention also provides a wafer manufacturing system including the above-described laminating machine.

[0042] In this invention, the film roll extends sequentially from the first film shaft to above the adsorption assembly and is wound between the adsorption assembly and the first roller shaft, such that the end of the film layer is located below the first roller shaft, and the film paper layer continues to be wound onto the second film shaft. The film pulling assembly first pulls the film layer, and then the first roller shaft is pressed down in a controlled manner to press the film layer onto the surface of the workpiece to be coated. Afterward, the film pulling assembly releases the film layer. The first driving member drives the support assembly to move along the first horizontal direction, so that the first roller shaft adheres the film layer to the workpiece to be coated during the movement. At the same time, the second film shaft rotates to synchronously retract the film paper layer. It can be understood that during the film coating process of the first roller shaft, the film is coated and peeled off simultaneously. Compared with the technical solution of completely peeling off the film before coating, it can avoid the generation of air bubbles, improve the bonding quality between the film layer and the workpiece to be coated, and avoid adverse effects on subsequent wafer production and inspection.

[0043] Furthermore, in this invention, when the first roller moves to the end of the workpiece to be coated, the first roller moves upward under control, and then the second roller is pressed downward under control. The first driving component continues to drive the support assembly to move a second preset distance along the first horizontal direction, so that the second roller re-presses the portion of the film layer lifted by the first roller onto the workpiece to be coated. Finally, the film cutting assembly cuts the film layer. The above technical solution takes into account the coating scenario of coating and peeling off the film at the same time. When the first roller is lifted, it will lift part of the coated film layer, which will affect the bonding quality between the film layer and the workpiece to be coated. Therefore, by re-pressing the lifted film layer onto the workpiece by the second roller before cutting the film, the coating quality can be guaranteed and the impact on subsequent wafer processing can be avoided.

[0044] The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments of the invention in conjunction with the accompanying drawings. Attached Figure Description

[0045] The following sections will describe some specific embodiments of the invention in detail by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or portions. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0046] Figure 1 This is a schematic structural diagram of a film applicator from one angle according to an embodiment of the present invention;

[0047] Figure 2 This is a schematic structural diagram of a film applicator from another angle according to an embodiment of the present invention;

[0048] Figure 3 This is a schematic side view of a film applicator according to an embodiment of the present invention;

[0049] Figure 4 This is a schematic structural diagram of a film-cutting assembly according to an embodiment of the present invention;

[0050] Figure 5 This is a schematic structural diagram of a first roller and a second roller according to an embodiment of the present invention;

[0051] Figure 6 This is a schematic structural diagram of a fifth driving member according to an embodiment of the present invention.

[0052] Figure label:

[0053] 100-Film applicator, 200-Workpiece to be applicated, 10-Wrapping mechanism, 20-Frame, 11-First film shaft, 12-Second film shaft, 31-Support assembly, 311-First mounting plate, 312-Second slide rail assembly, 32-Adsorption assembly, 34-Film cutting assembly, 35-Film pulling assembly, 321-Adsorption hole, 322-Air passage, 331-Second drive component, 332-Rotating shaft, 333-First roller shaft, 334-Rotating arm, 335-Second roller shaft, 313-Fourth drive component, 314-Seventh drive component, 341-Film cutting cutter, 342-Sixth drive component, 351-Gripper, 352-First slide rail assembly, 361-Fifth drive component, 37-Clamping mechanism, 41-Conveyor belt, 42-Synchronous pulley. Detailed Implementation

[0054] Embodiments of the present invention are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0055] In the description of this invention, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0056] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically stated, this indicates that other features are not excluded and may be further included.

[0057] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0059] Figure 1 This is a schematic structural diagram of a film applicator 100 from one angle according to an embodiment of the present invention. Figure 2 This is a schematic structural diagram of a film applicator 100 from another angle according to an embodiment of the present invention. Figure 3 This is a schematic side view of a film applicator 100 according to an embodiment of the present invention. Figure 4 This is a schematic structural diagram of a film-cutting assembly 34 according to an embodiment of the present invention. Figure 5 This is a schematic structural diagram of the first roller 333 and the second roller 335 according to an embodiment of the present invention. Figure 6 This is a schematic structural diagram of a fifth driving member 361 according to an embodiment of the present invention, wherein... Figure 2 The middle arrow indicates the second horizontal direction. Figure 3 The direction of the middle arrow indicates the first horizontal direction. For example... Figures 1 to 6As shown, in a specific embodiment, a film application machine 100 for wafer fabrication includes a frame 20, a clamping mechanism 37, a film winding mechanism 10, and a film application mechanism. The clamping mechanism 37 is mounted on the frame 20 and is used to clamp the workpiece 200 to be film-applied. The film winding mechanism 10 is mounted on the frame 20 and includes a first film shaft 11 and a second film shaft 12. The first film shaft 11 is used to mount the film, which includes a thin film layer and a film paper layer. The film application mechanism includes a first drive member, a support assembly 31, and an adsorption assembly 32, a film pulling assembly 35, a first roller 333, a second roller 335, and a film cutting assembly 34 mounted on the support assembly 31. The first roller 333 is located on the side of the film cutting assembly 34 facing a first horizontal direction, and the second roller 335 is located on the side of the film cutting assembly 34 away from the first horizontal direction. The film roll extends sequentially from the first film shaft 11 above the adsorption assembly 32 and is wound between the adsorption assembly 32 and the first roller shaft 333, such that the end of the film layer is located below the first roller shaft 333, and the film paper layer continues to be wound onto the second film shaft 12. The film pulling assembly 35 is used to clamp the film layer and pull it to move a first preset distance. The first roller shaft 333 is pressed down in a controlled manner to press the film layer onto the surface of the workpiece 200 to be filmed, and then the film pulling assembly 35 releases the film layer. The first driving member drives the support assembly 31 to move along the first horizontal direction, so that the first roller shaft 333 adheres the film layer to the workpiece 200 to be filmed during the movement, while the second film shaft 12 rotates to synchronously retract the film paper layer. When the first roller 333 moves to the end of the workpiece 200 to be coated, the first roller 333 moves upward under control, and then the second roller 335 is pressed downward under control. The first driving component continues to drive the support assembly 31 to move a second preset distance along the first horizontal direction, so that the second roller 335 re-presses the portion of the film layer carried by the first roller 333 onto the workpiece to be coated. Finally, the film cutting assembly 34 cuts the film layer. This can be understood as follows: the film pulling assembly 35 first tears one end of the film layer, separating a small portion of the film layer from the film paper layer. Then, the first roller 333 presses one end of the film layer onto the workpiece 200 to be coated. During the movement of the support assembly 31, the second film shaft 12 winds up the film paper layer, and the first film shaft 11 also rotates synchronously to release the rolled film. The first roller 333 presses the torn film layer onto the workpiece 200 to be coated, thus achieving simultaneous film tearing and coating. The first and second preset distances are determined according to specific design requirements.

[0060] In this embodiment, the film is applied and peeled off simultaneously during the film application process on the first roller 333. Compared with the technical solution of completely peeling off the film before applying it, this can avoid the generation of air bubbles, improve the bonding quality between the film layer and the workpiece 200 to be filmed, and avoid adverse effects on subsequent wafer production and inspection.

[0061] Furthermore, this embodiment takes into account the scenario of applying and peeling the film at the same time. When the first roller 333 is lifted, it will bring up part of the applied film layer, which will affect the bonding quality between the film layer and the workpiece 200 to be applied. Therefore, the second roller 335 presses the film layer that has been brought up back onto the workpiece 200 to be applied, and then the film is cut. This can ensure the quality of film application and avoid affecting subsequent wafer processing.

[0062] In some embodiments, before the first drive member drives the support assembly 31 to move along the first horizontal direction, the first drive member first drives the support assembly 31 to move in the opposite direction to the first horizontal direction, so that the first roller 333 presses the portion of the film layer held by the film stretching assembly 35 onto the workpiece 200 to be laminated. It can be understood that when the film stretching assembly 35 releases the film layer, the small portion previously held by the film stretching assembly 35 needs to be pressed onto the workpiece 200 by the first roller 333. Therefore, the first roller 333 needs to move a certain distance in the opposite direction to the first horizontal direction, which can improve the quality of the lamination.

[0063] In some embodiments, the adsorption component 32 extends along a second horizontal direction and is connected to the support component 31 at both ends. The adsorption component 32 has an internal air passage 322 communicating with an air extraction device, and its surface has multiple adsorption holes 321 communicating with the air passage 322. These adsorption holes 321 are used to adsorb the rolled film. It can be understood that since the workpiece 200 to be coated is relatively large, the size of the matching film layer will also be large. This embodiment uses the adsorption component 32 to adsorb the rolled film, preventing it from floating up and down under the airflow and affecting the coating quality. It should be noted that the adsorption component 32 only provides a certain adsorption force and does not affect the transport of the rolled film; that is, when the second film shaft 12 is wound up, the rolled film on the first film shaft 11 is transported synchronously.

[0064] In some embodiments, the film-applying mechanism further includes a second drive member 331, a rotating arm 334, and a rotating shaft 332. The second drive member 331 is mounted on the support assembly 31. One end of the rotating arm 334 is rotatably connected to the support assembly 31, and the other end is connected to a first roller shaft 333, which is arranged along a second horizontal direction perpendicular to the first horizontal direction. The rotating shaft 332 is arranged along the second horizontal direction and is connected to the rotating arm 334 and the second drive member 331. Driven by the second drive member 331, the rotating shaft 332 drives the rotating arm 334 to rotate, thereby causing the first roller shaft 333 to press down or move up. See [reference needed]. Figure 5 Here, the second driving component 331 is a cylinder. In other embodiments, the first roller 333 can also be moved up and down by other means.

[0065] This embodiment avoids generating large impact forces by driving the rotating arm 334 to rotate, and can prevent the first roller 333 from having an adverse effect on the film layer or the workpiece 200 to be filmed when applying the film.

[0066] In some embodiments, the membrane stretching assembly 35 includes a third drive member, a first slide rail assembly 352, and a plurality of grippers 351. The third drive member is mounted on the support assembly 31, and the first slide rail assembly 352 is arranged on the support assembly 31 along a first horizontal direction. The plurality of grippers 351 are slidably mounted on the first slide rail assembly 352. Under the drive of the third drive member, the plurality of grippers 351 slide synchronously along the first slide rail assembly 352. (See also...) Figure 3 Here, the gripper 351 is mounted on the first slide rail assembly 352 via a slider. It can be understood that the gripper 351 has two positions: a first position and a second position, with the first position being closer to the first roller shaft 333. When the gripper 351 moves to the first position, it can grip the film layer located below the first roller shaft 333, and then grip the film layer as it moves from the first position to the second position. Figure 3 The first roller 333 moves from right to left, pulling the film layer. Simultaneously, the second film shaft 12 retracts the film layer. When the gripper 351 moves to the second position, the first roller 333 presses down to press the film layer onto the workpiece 200 to be coated, after which the gripper 351 releases the film layer. The third driving component is a cylinder, which drives the gripper 351 to switch between the first and second positions.

[0067] In some embodiments, the film-applying mechanism further includes a second slide rail assembly 312 and a conveying assembly. The second slide rail assembly 312 is arranged along a first horizontal direction, and the support assembly 31 is slidably mounted on the second slide rail assembly 312. The conveying assembly includes a conveyor belt 41 and two synchronous pulleys 42. The two synchronous pulleys 42 are spaced apart on the frame 20 along the first horizontal direction, and one of the synchronous pulleys 42 is connected to a first driving member. The conveyor belt 41 is sleeved on the two synchronous pulleys 42 and connected to the support assembly 31. Driven by the first driving member, the synchronous pulleys 42 rotate, driving the conveyor belt 41 to drive, thereby moving the support assembly 31 along the second slide rail assembly 312. Here, the first driving member is a motor, and the output shaft of the motor is connected to one of the synchronous pulleys 42, thereby driving the synchronous pulley 42 to rotate. During the movement of the support assembly 31 along the second slide rail assembly 312, the first roller 333 is always in a downward pressure state, thus continuously applying film during this movement.

[0068] In some embodiments, the support assembly 31 includes a mounting frame, a first mounting plate 311, and a fourth drive member 313. The adsorption assembly 32, the film pulling assembly 35, the first roller 333, the second roller 335, and the film cutting assembly 34 are all mounted on the mounting frame. The first mounting plate 311 is arranged vertically and is slidably connected to the second slide rail assembly 312 and connected to the conveyor belt 41. The fourth drive member 313 is mounted on the first mounting plate 311 and connected to the mounting frame, for driving the mounting frame to move up and down. Here, the first mounting plate 311 is arranged vertically, and the fourth drive member 313 is a cylinder. This embodiment allows adjustment of the height of the film application mechanism by driving the entire mounting frame to move up and down.

[0069] In some embodiments, the laminating machine 100 further includes a fifth driving member 361, which is mounted on a mounting frame and connected to the second roller shaft 335 for driving the second roller shaft 335 to move up and down. Here, the fifth driving member 361 is a cylinder. In other embodiments, the fifth driving member 361 may also be other driving components.

[0070] In this embodiment, after the second roller 335 completes the film application process, that is, when the film layer is completely covered on the workpiece 200 to be filmed, the first roller 333 needs to be lifted for the subsequent film cutting process. However, during the lifting process, a part of the pressed film layer will be lifted up, and the second roller 335 needs to be pressed down to press the lifted film layer back onto the workpiece 200 to be filmed. Then the film cutting assembly 34 performs film cutting.

[0071] In some embodiments, the film cutting assembly 34 includes a film cutting blade 341, a sixth drive member 342, and a seventh drive member 314. The film cutting blade 341 is located above the workpiece 200 to be coated with film, and the sixth drive member 342 is located above and connected to the film cutting blade 341, driving the film cutting blade 341 to move up and down. The seventh drive member 314 is mounted on a mounting bracket along a second horizontal direction and is connected to the sixth drive member 342, driving the sixth drive member 342 to move, thereby causing the film cutting blade 341 to move along the second horizontal direction for film cutting. Here, the seventh drive member 314 is a sliding module, and the sixth drive member 342 is a cylinder. In other embodiments, the sixth drive member 342 and the seventh drive member 314 may also be other driving components.

[0072] After the film cutting is completed, the sixth drive unit 342 drives the film cutting cutter 341 to move upward, and simultaneously, the fifth drive unit 361 drives the second roller 335 to move upward. The workpiece 200 to be filmed after film application is conveyed to the next process. After the next workpiece 200 to be filmed moves onto the film application machine 100 and is clamped by the clamping mechanism 37, the above film application action is repeated.

[0073] This embodiment also provides a wafer fabrication system, which further includes the aforementioned laminator 100. Details regarding the laminator 100 will not be provided here.

[0074] Therefore, those skilled in the art should recognize that although numerous exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Thus, the scope of the present invention should be understood and construed as covering all such other variations or modifications.

Claims

1. A film attaching machine for wafer production, characterized by comprising: The application relates to a film pasting machine. The film pasting machine comprises a frame body, a clamping mechanism mounted on the frame body and used for clamping a workpiece to be pasted with a film, a film roll mechanism mounted on the frame body, the film roll mechanism comprising a first film shaft and a second film shaft, the first film shaft being used for mounting a film roll, the film roll comprising a film layer and a film paper layer, a film pasting mechanism comprising a first driving element, a support assembly, an adsorption assembly mounted on the support assembly, a film pulling assembly, a first roller shaft, a second roller shaft and a film cutting assembly, the first roller shaft being located on one side of the film cutting assembly facing a first horizontal direction, and the second roller shaft being located on the other side of the film cutting assembly away from the first horizontal direction, the film roll extending from the first film shaft to above the adsorption assembly in sequence and being arranged around the adsorption assembly and the first roller shaft, so that the end of the film layer is located below the first roller shaft, and the film paper layer is arranged around the second film shaft, the film pulling assembly being used for clamping the film layer and pulling the film layer to move a first preset distance, the first roller shaft being controlled to be pressed down to press the film layer onto the surface of the workpiece to be pasted with the film, and then the film pulling assembly is loosened, the first driving element drives the support assembly to move along the first horizontal direction, so that the first roller shaft pastes the film layer onto the workpiece to be pasted with the film during the movement, and the second film shaft rotates to synchronously recover the film paper layer, when the first roller shaft moves to the end of the workpiece to be pasted with the film, the first roller shaft is controlled to be lifted up, then the second roller shaft is controlled to be pressed down, the first driving element continues to drive the support assembly to move along the first horizontal direction by a second preset distance, so that the second roller shaft re-presses the part of the film layer lifted up by the first roller shaft onto the workpiece to be pasted with the film, and finally the film cutting assembly cuts the film layer.

2. The film pasting machine according to claim 1, wherein before the first driving element drives the support assembly to move along the first horizontal direction, the first driving element drives the support assembly to move along a direction opposite to the first horizontal direction, so that the part of the film layer clamped by the film pulling assembly is pressed onto the workpiece to be pasted with the film by the first roller shaft.

3. The film pasting machine according to claim 2, wherein the adsorption assembly extends along a second horizontal direction, and two ends of the adsorption assembly are connected with the support assembly, respectively, an inner part of the adsorption assembly is provided with an air channel communicated with an air suction device, and a surface of the adsorption assembly is provided with a plurality of adsorption holes communicated with the air channel, the adsorption holes being used for adsorbing the film roll. The film pasting mechanism further comprises a second driving element mounted on the support assembly, a rotating arm having one end rotatably connected with the support assembly and the other end connected with the first roller shaft, the first roller shaft being arranged along a second horizontal direction, the second horizontal direction being perpendicular to the first horizontal direction, a rotating shaft arranged along the second horizontal direction and connected with the rotating arm and the second driving element, under the driving of the second driving element, the rotating shaft drives the rotating arm to rotate, so as to drive the first roller shaft to be pressed down or lifted up. The film pulling assembly comprises ​ ​ ​ ​ ​ ​ ​ ​ 4. The film laminating machine according to claim 3, wherein ​ ​ ​ ​ 5. The film laminating machine according to claim 4, wherein ​ A third driving member is installed on the bracket assembly; A first slide rail assembly is arranged on the bracket assembly along the first horizontal direction; A plurality of clamping jaws are slidably installed on the first slide rail assembly, and the plurality of clamping jaws are synchronously slid along the first slide rail assembly under the driving of the third driving member.

6. The film laminating machine according to any one of claims 1 to 5, characterized in that, The film pasting mechanism further comprises: A second slide rail assembly is arranged along the first horizontal direction, and the bracket assembly is slidably installed on the second slide rail assembly; A conveying assembly comprises a conveying belt and two synchronous wheels, the two synchronous wheels are arranged on the frame body along the first horizontal direction, one of the synchronous wheels is connected with the first driving member, the conveying belt is sleeved on the two synchronous wheels and connected with the bracket assembly; Under the driving of the first driving member, the synchronous wheels rotate to drive the conveying belt to drive the bracket assembly to move along the second slide rail assembly.

7. The film laminating machine according to claim 6, wherein The bracket assembly comprises: A mounting frame, the adsorption assembly, the film pulling assembly, the first roller shaft, the second roller shaft and the film cutting assembly are all installed on the mounting frame; A first mounting plate is arranged vertically, the first mounting plate is slidably connected with the second slide rail assembly and connected with the conveying belt; A fourth driving member is installed on the first mounting plate and connected with the mounting frame, and is used to drive the mounting frame to move up and down.

8. The film laminating machine according to claim 7, wherein Further comprising: A fifth driving member is installed on the mounting frame and connected with the second roller shaft, and is used to drive the second roller shaft to move up and down.

9. The film laminating machine according to claim 8, wherein The film cutting assembly comprises: A film cutting tool is located above the workpiece to be pasted with film; A sixth driving member is located above the film cutting tool and connected with the film cutting tool, and is used to drive the film cutting tool to move up and down; A seventh driving member is installed on the mounting frame along the second horizontal direction and connected with the sixth driving member, and is used to drive the sixth driving member to move, thereby driving the film cutting tool to move along the second horizontal direction to cut film.

10. A wafer production system characterized by comprising: The film pasting machine comprises the film pasting mechanism as claimed in any one of claims 1-9.

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