Glass substrate logistics conveying dust collection device
By employing a "weak-strong-weak" negative pressure gradient and staggered motion cleaning brush design in the glass substrate logistics conveying device, the problems of dead corners and device blockage in high-generation substrate cleaning are solved, cleaning efficiency and production continuity are improved, and the defect rate is reduced.
Patent Information
- Application Number
- CN202511429288.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-09
- Publication Date
- 2026-01-02
AI Technical Summary
Existing glass substrate material handling equipment has low dust collection efficiency on high-generation substrates, easily creating cleaning dead corners. Furthermore, the cleaning brush design cannot cover the corners and edges of the substrate, leading to an increased defect rate. The equipment is also prone to clogging, affecting production continuity.
Design a dust collection device for conveying glass substrates. The dust collection hood structure adopts a "weak-strong-weak" negative pressure gradient, combined with the staggered movement of the movable ring and cleaning brush to ensure cleaning effect. The height adjustment and staggered movement of the cleaning brush are realized by driving the lead screw and threaded block by a servo motor to avoid damage to the substrate.
It significantly improves the cleanliness of glass substrates, reduces the defect rate, extends the service life of the equipment, and ensures the continuity and safety of production.
Smart Images
Figure CN121244641A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of glass substrate production and manufacturing, in particular to a glass substrate logistics conveying and dust collection device. BACKGROUND
[0002] In the field of display panel manufacturing, high-generation glass substrates are the core basic materials of high-end display devices such as LCDs and OLEDs. They have three key characteristics: large size, high brittleness, and ultra-cleanliness requirements. On the one hand, the increase in substrate size leads to uneven stress during logistics conveying, which can cause deformation. The thinning of the substrate significantly reduces its scratch resistance. On the other hand, if there are 1-5 microns of small particles left on the surface of the substrate, it will directly cause pixel defects, short circuits, and other problems in subsequent film coating and photolithography processes, which will increase the panel scrap rate by 3%-5% and have a serious impact on production efficiency. Therefore, the logistics conveying link of high-generation glass substrates must be equipped with efficient and low-damage dust collection devices to ensure that the substrate surface cleanliness meets the standard requirements.
[0003] Currently, the dust collection devices for glass substrate logistics conveying have formed preliminary applications in the industry, but due to the limitations of design ideas, they still have many technical defects in adapting to the characteristics of high-generation substrates, improving dust collection efficiency, and ensuring substrate safety. The specific manifestations are as follows: most existing dust collection devices use a "single negative pressure chamber + fixed suction port" structure, and the negative pressure intensity is not differentiated along the conveying direction:
[0004] If the negative pressure intensity is too low, it is easy to form a cleaning dead angle. If the overall negative pressure is increased to improve the adsorption effect, it will cause two problems: first, strong negative pressure at the inlet end can easily trap dust from the external environment into the dust removal area, causing "secondary pollution"; second, strong airflow impact can cause deformation of thin substrates. In addition, the cleaning brush is usually straight reciprocating along the conveying direction, with a fixed motion trajectory that cannot cover irregular areas such as corners and edges of the substrate, forming a cleaning blind area. At the same time, the cleaning brush only acts on the surface of the substrate, and the dust collection channel is not cleaned simultaneously. After long-term use, particles can easily adhere to the surface of the mesh sleeve and block the suction port, causing the dust collection efficiency to decrease by 15%-20% per month, which requires frequent shutdown and cleaning, seriously affecting production continuity. SUMMARY
[0005] The purpose of the present application is to provide a glass substrate logistics conveying and dust collection device to solve the problems raised in the background art.
[0006] In order to achieve the above object, the present application provides the following technical scheme: a glass substrate logistics conveying dust collection device, comprising a logistics table, a dust collection box and a dust removal cover, the top of the dust collection box is provided with the logistics table, the upper part of the middle of the top of the logistics table is provided with the dust removal cover, and the inside of the dust removal cover is provided with three net sleeve pipes one, two and three with movable rings mounted on the outside in parallel, the inner wall of the movable ring is uniformly provided with cleaning bristles, and the bottom of the movable ring is provided with a cleaning brush through an electric lifting rod;
[0007] The top of one side of the dust removal cover is provided with three servo motors in parallel, the output end of each servo motor extends to the inside of the dust removal cover and is connected with a screw rod, and the screw rod is provided with a threaded block connected with the three movable rings;
[0008] The other side of the dust removal cover is provided with a distribution pipe, the input end of the distribution pipe extends to the inside of the net sleeve pipe one, two and three through the main pipe and the branch pipes on both sides of the main pipe and is connected with a dust collection inner pipe, and the output end of the distribution pipe is connected with the dust collection box through a negative pressure pipe.
[0009] Preferably, the inside of the dust collection box is provided with a negative pressure pump and a filter element, the input end of the negative pressure pump is connected with the filter element, the output end of the negative pressure pump extends to the outside of the dust collection box, and the inside of the filter element is sequentially provided with a polyester fiber net, a HEPA filter screen and an activated carbon layer from an air inlet.
[0010] Preferably, the inside wall of the top end of the dust removal cover is provided with a guide sliding groove at the position corresponding to the screw rod, and the threaded block provided on each screw rod is fixed with a sliding block extending to the inside of the guide sliding groove.
[0011] Preferably, the main pipe is connected with the dust collection inner pipe in the net sleeve pipe two, and the two branch pipes are respectively connected with the dust collection inner pipes in the net sleeve pipe one and the net sleeve pipe three, the main pipe and the branch pipe are respectively provided with a main regulating valve and a secondary regulating valve, and the negative pressure of the main regulating valve is greater than that of the two secondary regulating valves.
[0012] Preferably, each dust collection inner pipe is arranged at the central position of the net sleeve pipe one, two and three through uniformly distributed stabilizing rods, and the surface of the dust collection inner pipe is uniformly provided with dust collection holes.
[0013] Preferably, the output end of the electric lifting rod is provided with a support plate, and the bottom of the support plate is fixedly connected with the top of the cleaning brush through uniformly arranged springs.
[0014] Preferably, the inside of the logistics table is provided with a conveying belt for conveying the glass substrate, and the outside of the logistics table is provided with a conveying motor connected with the conveying belt
[0015] Preferably, the three movable rings are driven to move interlacedly by the three servo motors.
[0016] The present application relates to a glass substrate conveying and dust collection device, which has significant technical advantages and positive effects compared with the prior art, and the specific advantages are as follows:
[0017] 1. By arranging net sleeve one, net sleeve two and net sleeve three inside the dust removal cover on the top of the conveying table in parallel, combining the scientific layout of the distribution pipe and the dust collection inner pipe, and matching the negative pressure pump inside the dust collection box, the device realizes the construction of "weak-strong-weak" negative pressure gradient along the conveying direction. Specifically, the weak negative pressure at the inlet section effectively prevents external air from carrying particles into the dust removal area, the strong negative pressure at the middle section concentrates and adsorbs the particles generated on the surface of the substrate due to friction, and the weak negative pressure at the outlet section prevents backflow of the airflow. This gradient design significantly improves the dust removal efficiency, ensures the cleanliness of the glass substrate during conveying, and reduces the rate of defective products caused by particle pollution.
[0018] 2. The outer side of each net sleeve is provided with a movable ring, and the bottom of the movable ring is connected with a cleaning brush through an electric lifting rod. This design allows the height of the cleaning brush to be flexibly adjusted according to the thickness of the glass substrate, ensuring that the cleaning brush and the substrate surface always maintain appropriate contact pressure, avoiding damage to the substrate caused by excessive cleaning, and ensuring cleaning effect. In addition, the use of the electric lifting rod simplifies the adjustment process and improves the operation convenience.
[0019] 3. Under the drive of the servo motor, the screw rod drives the threaded block and the sliding block to move, so that the three movable rings move interlacedly. This design allows the cleaning brush to alternately clean the surface of the substrate, avoiding cleaning dead angles in a single direction and improving the overall cleaning effect. At the same time, the cleaning bristles inside the movable ring can clean the surface of the net sleeve while cleaning the surface of the substrate, preventing the net sleeve from being blocked and prolonging the service life of the device. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 It is an overall internal structure schematic view of the present application;
[0021] Figure 2 It is an internal structure schematic view of the dust removal cover of the present application from the bottom;
[0022] Figure 3 It is an internal structure schematic view of the movable ring of the present application;
[0023] Figure 4 It is an internal structure schematic view of the movable ring of the present application; Figure 1 It is an enlarged structure schematic view of position A of the present application;
[0024] Figure 5 It is an overall structure schematic view of the present application from the top;
[0025] Fig. 1, dust collection box; 2, logistics table; 3, net sleeve one; 4, servo motor; 5, guide chute; 6, dust removal cover; 7, threaded block; 8, sliding block; 9, screw rod; 10, movable ring; 11, negative pressure pipe; 12, conveying belt; 13, negative pressure pump; 14, branch pipe; 15, main pipe; 16, main regulating valve; 17, distribution pipe; 18, auxiliary regulating valve; 19, cleaning brush; 20, net sleeve three; 21, net sleeve two; 22, cleaning bristles; 23, dust suction inner pipe; 24, stabilizing rod; 25, support plate; 26, electric lifting rod; 27, spring; 28, dust suction hole; 29, filter element. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0027] Please refer to Figures 1-5 The present application provides a glass substrate logistics conveying dust collection device, which comprises a logistics table 2, a dust collection box 1 and a dust removal cover 6. The top of the dust collection box 1 is provided with the logistics table 2. The inner side of the logistics table 2 is provided with a conveying belt 12 for conveying the glass substrate. The outer side of the logistics table 2 is provided with a conveying motor connected with the conveying belt 12.
[0028] The upper part of the middle of the top of the logistics table 2 is provided with the dust removal cover 6. The inside of the dust removal cover 6 is provided with three net sleeves in parallel, i.e. the net sleeve one 3, the net sleeve two 21 and the net sleeve three 20, which are provided with movable rings 10 on the outer sides. The inner wall of the movable ring 10 is uniformly provided with cleaning bristles 22. The bottom of the movable ring 10 is provided with a cleaning brush 19 through an electric lifting rod 26.
[0029] The output end of the electric lifting rod 26 is provided with a support plate 25. The bottom of the support plate 25 is fixedly connected with the top of the cleaning brush 19 through uniformly arranged springs 27.
[0030] The top of the dust collection box 1 is provided with the logistics table 2, which is used for carrying and conveying the glass substrate. The inner side of the logistics table 2 is provided with the conveying belt 12, which is used for conveying the glass substrate from one end to the other end. The outer side of the logistics table 2 is provided with the conveying motor, which is connected with the conveying belt 12 through a transmission device to drive the operation of the conveying belt.
[0031] The upper part of the middle of the top of the logistics table 2 is provided with the dust removal cover 6, which is used for dust removal treatment of the glass substrate. The inside of the dust removal cover 6 is provided with three net sleeves in parallel, i.e. the net sleeve one 3, the net sleeve two 21 and the net sleeve three 20. Each net sleeve is provided with a movable ring 10 on the outer side.
[0032] The inner wall of the movable ring 10 is uniformly provided with cleaning bristles 22 for cleaning the glass substrate as it passes through, and the bottom of the movable ring 10 is connected with a cleaning brush 19 through an electric lifting rod 26, and the output end of the electric lifting rod 26 is provided with a support plate 25.
[0033] The bottom of the support plate 25 is fixedly connected with the top of the cleaning brush 19 through uniformly arranged springs 27, and the springs 27 serve to maintain proper pressure between the cleaning brush 19 and the glass substrate, ensuring cleaning effect. The electric lifting rod 26 can control the lifting of the cleaning brush 19 for adjustment as needed.
[0034] Three servo motors 4 are arranged side by side on the top of one side of the dust cover 6, the output ends of each servo motor 4 respectively extend to the inside of the dust cover 6 and are connected with a screw rod 9, and the screw rod 9 is respectively provided with a threaded block 7 connected with three movable rings 10, and the three movable rings 10 are driven to move interlacedly by the three servo motors 4.
[0035] A guide sliding groove 5 is arranged at the position corresponding to the screw rod 9 on the inner wall of the top end of the dust cover 6, and the top of the threaded block 7 arranged on each screw rod 9 is fixedly provided with a sliding block 8 extending into the guide sliding groove 5.
[0036] The servo motor 4 is selected from a high-precision and high-torque model to ensure sufficient power and accurate control when driving the screw rod 9.
[0037] The output end of each servo motor 4 is connected with a screw rod 9, the screw rod 9 is made of high-strength stainless steel material, and the surface is precisely threaded to ensure the cooperation accuracy with the threaded block 7, one end of the screw rod 9 is fixed on the output shaft of the servo motor 4, and the other end extends into the inside of the dust cover 6.
[0038] A threaded block 7 is arranged on each screw rod 9, the threaded block 7 is tightly matched with the outer thread of the screw rod 9 through the inner thread, and can move along the axial direction of the screw rod 9 under the rotation drive of the screw rod 9, and the top of the threaded block 7 is fixedly provided with a sliding block 8.
[0039] The three movable rings 10 are respectively connected with the three threaded blocks 7, the movable ring 10 is made of light weight and high strength material, has good wear resistance and anti-deformation ability, and can move interlacedly under the drive of the three servo motors 4, to realize dynamic adjustment of the space inside the dust cover 6.
[0040] A guide sliding groove 5 is arranged at the position corresponding to the screw rod 9 on the inner wall of the top end of the dust cover 6, the guide sliding groove 5 is made of wear-resistant material, the inner surface of the groove is smooth to ensure smooth sliding of the sliding block 8, and the length and width of each guide sliding groove 5 are matched with the size of the sliding block 8.
[0041] Each threaded block 7 is fixed with a slider 8 on the top, the slider 8 extends to the inside of the guide chute 5 and can slide in the guide chute 5, the material of the slider 8 is selected from high wear-resistant materials, so that the slider 8 will not be worn or deformed during long-term use.
[0042] The other side of the dust removal cover 6 is provided with a distribution pipe 17, the input end of the distribution pipe 17 extends to the inside of the net sleeve pipe one 3, the net sleeve pipe two 21 and the net sleeve pipe three 20 through the main pipe 15 and the branch pipes 14 on both sides of the main pipe 15 and is connected with the dust suction inner pipe 23, each dust suction inner pipe 23 is arranged at the central position of the net sleeve pipe one 3, the net sleeve pipe two 21 and the net sleeve pipe three 20 through the uniformly distributed stabilizing rods 24, and the surface of the dust suction inner pipe 23 is uniformly provided with the dust suction holes 28.
[0043] The overall structure of the dust removal cover 6 of the application includes a main body part and several auxiliary components, and the other side of the dust removal cover 6 is provided with the distribution pipe 17, and the main function of the distribution pipe 17 is to uniformly distribute the airflow of the main pipe 15 into each net sleeve pipe.
[0044] The input end of the distribution pipe 17 is connected through the main pipe 15, the main pipe 15 is located at the central position of the dust removal cover 6, and the branch pipes 14 are arranged on both sides of the main pipe 15, and the branch pipes 14 are arranged on both sides of the main pipe 15.
[0045] The branch pipes 14 extend to the inside of the net sleeve pipe one 3, the net sleeve pipe two 21 and the net sleeve pipe three 20, respectively, the distal end of each branch pipe 14 is connected with the inside of the corresponding net sleeve pipe, and the airflow is transmitted through the dust suction inner pipe 23.
[0046] Each dust suction inner pipe 23 is arranged at the central position of the net sleeve pipe one 3, the net sleeve pipe two 21 and the net sleeve pipe three 20 through the uniformly distributed stabilizing rods 24, and the stabilizing rods 24 can ensure that the dust suction inner pipe 23 remains stable in the net sleeve pipe and does not deviate.
[0047] The surface of the dust suction inner pipe 23 is uniformly provided with the dust suction holes 28, and the distribution design of the holes 28 ensures that the airflow can uniformly suck dust from the inside of the net sleeve pipe, thereby improving the dust removal efficiency.
[0048] The main pipe 15 is connected with the dust suction inner pipe 23 in the inside of the net sleeve pipe two 21, and the two branch pipes 14 are respectively connected with the dust suction inner pipes 23 in the inside of the net sleeve pipe one 3 and the net sleeve pipe three 20, and the main adjusting valve 16 and the auxiliary adjusting valve 18 are arranged on the main pipe 15 and the branch pipes 14, respectively, and the negative pressure of the main adjusting valve 16 is greater than that of the two auxiliary adjusting valves 18.
[0049] The dust suction system mainly includes the following components:
[0050] The main pipe 15 is the core component of the system, which is responsible for connecting the dust suction inner pipe 23 to the main air inlet of the dust suction equipment.
[0051] Branch pipe 14: The system contains two branch pipes 14, which are connected to the net sleeve pipe one 3 and the net sleeve pipe three 20 respectively.
[0052] Net sleeve pipe two 21: The net sleeve pipe two 21 is internally provided with a dust suction inner pipe 23, which is directly connected to the main pipe 15.
[0053] Net sleeve pipe one 3 and net sleeve pipe three 20: The two net sleeve pipes are also internally provided with a dust suction inner pipe 23, which is connected to the two branch pipes 14 respectively.
[0054] Dust suction inner pipe 23: The dust suction inner pipe 23 penetrates the inside of each net sleeve pipe and is responsible for sucking dust and other impurities into the system.
[0055] Main regulating valve 16: The main regulating valve 16 is arranged on the main pipe 15 and is used to adjust the negative pressure of the main pipe 15.
[0056] Sub-regulating valve 18: The sub-regulating valve 18 is arranged on the two branch pipes 14 respectively and is used to adjust the negative pressure of the branch pipes 14.
[0057] The negative pressure of the main regulating valve 16 is designed to be greater than the negative pressure of the two sub-regulating valves 18, specifically, the negative pressure value of the main regulating valve 16 is set as P1, and the negative pressure values of the two sub-regulating valves 18 are set as P2 and P3 respectively, satisfying the conditions of P1>P2 and P1>P3. This design ensures that the main pipe 15 always maintains a high negative pressure during the dust suction process, thereby ensuring the dust suction effect.
[0058] The output end of the distribution pipe 17 is connected to the dust collection box 1 through the negative pressure pipe 11.
[0059] The dust collection box 1 is internally provided with a negative pressure pump 13 and a filter core 29, and the input end of the negative pressure pump 13 is connected to the filter core 29. The output end of the negative pressure pump 13 extends to the outside of the dust collection box 1. The inside of the filter core 29 is sequentially provided with a polyester fiber net, a HEPA filter screen and an activated carbon layer from the air inlet.
[0060] The negative pressure pipe 11 is made of soft and pressure-resistant materials such as PVC or rubber pipe to ensure that it will not deform or break under the action of negative pressure.
[0061] The negative pressure pump 13 is arranged inside the dust collection box 1, with its input end connected to the filter core 29 and its output end extending to the outside of the dust collection box 1. The function of the negative pressure pump 13 is to generate negative pressure to suck dust particles from the distribution pipe 17 into the dust collection box 1 through the negative pressure pipe 11. The selection of the negative pressure pump 13 should consider its working efficiency and noise level, and a high-efficiency and low-noise centrifugal negative pressure pump is usually used.
[0062] The filter core 29 is used to filter dust particles entering the dust collection box 1. The inside of the filter core 29 is sequentially provided with a polyester fiber net, a HEPA filter screen and an activated carbon layer from the air inlet.
[0063] Polyester fiber mesh: located at the outermost layer of the filter core 29, mainly used for filtering larger dust particles and impurities, the polyester fiber mesh has good air permeability and filtering effect, which can effectively prolong the service life of the subsequent filter mesh.
[0064] HEPA filter mesh: located inside the polyester fiber mesh, mainly used for filtering small dust particles and bacteria, the HEPA filter mesh has a filtering efficiency of up to 99.97%, which can effectively purify the air and ensure the filtering effect of the system.
[0065] Activated carbon layer: located inside the HEPA filter mesh, mainly used for adsorbing harmful gases and odors in the air, the activated carbon layer has good adsorption performance, which can effectively improve the air quality.
[0066] In use, according to the thickness of the glass substrate to be conveyed, the electric lifting rod 26 is started to adjust the height of the support plate 25, so that the cleaning brush 19 is aligned with the preset contact position of the substrate, and the compression state of the spring 27 is observed to ensure that the cleaning brush 19 is in contact with the surface of the substrate. Then, the main adjusting valve 16 on the main pipe 15 and the two secondary adjusting valves 18 on the branch pipes 14 are adjusted to set a "weak-strong-weak" negative pressure gradient, so that the negative pressure value of the net sleeve pipe two 21 (corresponding to the main pipe 15) is higher than that of the net sleeve pipe one 3 and the net sleeve pipe three 20 (corresponding to the branch pipes 14), and after completion, the negative pressure pump 13 is started to test the dust suction effect of the dust suction inner pipe 23, and the stable airflow is confirmed without backflow.
[0067] The three servo motors 4 are started, the rotation direction and speed of the screw rod 9 are set through the control system, the threaded block 7 on the screw rod 9 drives the sliding block 8 to move smoothly along the guide sliding groove 5, and then drives the three movable rings 10 to form a mutually interlaced motion trail (to avoid overlapping or omission of the cleaning path), the movement process of the movable ring 10 is observed to ensure that there is no jamming, and the cleaning bristles 22 can uniformly cover the outer wall of the net sleeve pipe and the edges and corner areas of the substrate conveying path.
[0068] The conveying motor outside the logistics table 2 is started to drive the conveyor belt 12 to run at a preset speed, the glass substrate is smoothly placed on the feeding end of the conveyor belt 12, and the substrate enters the inside of the dust removal cover 6 with the conveyor belt 12; first, it passes through the net sleeve pipe one 3 area, the weak negative pressure in this area adsorbs the initial external particles carried on the surface of the substrate through the dust suction holes 28 of the dust suction inner pipe 23, and at the same time, the movable ring 10 drives the cleaning bristles 22 to preliminarily clean the surface of the substrate; then, the substrate enters the net sleeve pipe two 21 area, the strong negative pressure concentrates to adsorb the particles generated by friction during the conveying process of the substrate, the cleaning brush 19 cleans the surface of the substrate under the buffering action of the spring 27, and the cleaning bristles 22 inside the movable ring 10 synchronously clean the inner wall of the net sleeve pipe two 21 to prevent blockage; finally, the substrate enters the net sleeve pipe three 20 area, the weak negative pressure again adsorbs the residual particles to avoid the secondary adhesion of particles caused by airflow backflow, and the substrate after dust removal is conveyed to the next process with the conveyor belt 12.
[0069] During the dust removal process, the negative pressure pump 13 continuously generates negative pressure, and the airflow containing particles enters the branch pipe 14, the main pipe 15 through the dust suction inner pipe 23, and then enters the dust collection box 1 through the distribution pipe 17 and the negative pressure pipe 11; the airflow first passes through the polyester fiber net of the filter core 29 to filter out particles with a larger particle size; then passes through the HEPA filter screen to intercept small particles (such as PM2.5, bacteria); finally, the activated carbon layer adsorbs peculiar smell in the airflow, and the filtered clean air is discharged from the output end of the negative pressure pump 13, and the intercepted particles are deposited in the dust collection box 1.
[0070] Obviously, the above-described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Various modifications and changes can be made by those skilled in the art based on the embodiments of the present application. All other embodiments obtained by those skilled in the art without creative labor based on the embodiments of the present application shall belong to the protection scope of the present application.
Claims
1. A dust collection device for conveying glass substrates, comprising a material handling table (2), a dust collection box (1), and a dust removal hood (6), characterized in that: The top of the dust collection box (1) is provided with a logistics platform (2), and a dust removal hood (6) is provided above the middle of the top of the logistics platform (2). Inside the dust removal hood (6), mesh sleeve tube one (3), mesh sleeve tube two (21) and mesh sleeve tube three (20) of the movable ring (10) are arranged side by side. Cleaning bristles (22) are evenly arranged on the inner wall of the movable ring (10), and a cleaning brush (19) is provided at the bottom of the movable ring (10) through an electric lifting rod (26). Three servo motors (4) are arranged side by side on the top of one side of the dust removal hood (6). The output end of each servo motor (4) extends into the interior of the dust removal hood (6) and is connected to a lead screw (9). The lead screw (9) is provided with a threaded block (7) that is connected to three movable rings (10). On the other side of the dust removal hood (6), there is a distribution pipe (17). The input end of the distribution pipe (17) extends through the main pipe (15) and the branch pipes (14) on both sides of the main pipe (15) to the inside of the first mesh sleeve (3), the second mesh sleeve (21) and the third mesh sleeve (20) respectively, and is connected to the dust suction inner pipe (23). The output end of the distribution pipe (17) is connected to the dust collection box (1) through the negative pressure pipe (11).
2. The dust collection device for conveying glass substrates according to claim 1, characterized in that: The dust collection box (1) is equipped with a negative pressure pump (13) and a filter element (29). The input end of the negative pressure pump (13) is connected to the filter element (29), and the output end of the negative pressure pump (13) extends to the outside of the dust collection box (1). The filter element (29) is equipped with a polyester fiber mesh, a HEPA filter and an activated carbon layer in sequence from the air inlet.
3. The dust collection device for conveying glass substrates according to claim 1, characterized in that: The dust collector (6) has a guide groove (5) at the position of the lead screw (9) on the inner wall of the top of the dust collector (6), and the top of the threaded block (7) on each lead screw (9) is fixed with a slider (8) extending into the guide groove (5).
4. The dust collection device for conveying glass substrates according to claim 1, characterized in that: The main pipe (15) is connected to the suction pipe (23) inside the second mesh sleeve (21), and the two branch pipes (14) are respectively connected to the suction pipes (23) inside the first mesh sleeve (3) and the third mesh sleeve (20). The main pipe (15) and the branch pipes (14) are respectively equipped with a main regulating valve (16) and a secondary regulating valve (18). The negative pressure of the main regulating valve (16) is greater than the negative pressure of the two secondary regulating valves (18).
5. The dust collection device for conveying glass substrates according to claim 1, characterized in that: Each of the suction tubes (23) is located at the center of the first mesh tube (3), the second mesh tube (21) and the third mesh tube (20) by a uniformly distributed stabilizing rod (24), and the surface of the suction tube (23) is uniformly provided with suction holes (28).
6. The dust collection device for conveying glass substrates according to claim 1, characterized in that: The output end of the electric lifting rod (26) is provided with a support plate (25), and the bottom of the support plate (25) is fixedly connected to the top of the cleaning brush (19) by evenly arranged springs (27).
7. A dust collection device for conveying glass substrates according to claim 1, characterized in that: The logistics platform (2) is provided with a conveyor belt (12) for transporting glass substrates on its inner side, and a conveyor motor connected to the conveyor belt (12) is provided on the outer side of the logistics platform (2).
8. The dust collection device for conveying glass substrates according to claim 1, characterized in that: The three active rings (10) move in an alternating manner under the drive of the three servo motors (4).