Rubber softening device for waste rubber ring for semiconductor

Abstract

The application relates to the field of rubber softening utilization, in particular to a waste rubber softening utilization device for rubber rings for semiconductors. The device comprises a box body, two shaft tubes are horizontally and parallelly rotationally connected in the box body, a plurality of ring knives are uniformly arranged on the outer surfaces of the two shaft tubes in the axial direction, the ring knives on the two shaft tubes are in one-to-one contact correspondence, a plurality of plate cutters are uniformly arranged on the outer surfaces of the two shaft tubes in the circumferential direction, and the plate cutters are in turn in contact correspondence when the two shaft tubes rotate relative to each other; a heating and granulating mechanism is arranged at the lower end of the box body and used for heating, softening and granulating the crushed materials; the device can solve the problem that the rubber ring is extremely easy to slip due to uneven stress when being cut, thereby causing part of the rubber to be not effectively cut.

Description

Technical Field

[0001] This invention relates to the field of rubber softening and utilization, and in particular to a device for softening and utilizing waste rubber from semiconductor rubber rings. Background Technology

[0002] Semiconductor rubber rings are sealing elements used in semiconductor equipment and manufacturing processes. Their main component is rubber, but small amounts of specific ingredients are added to improve performance, such as polyethylene or polypropylene, which can enhance hardness, wear resistance, and processability. During the maintenance, replacement, or decommissioning of semiconductor manufacturing equipment, expired, or unused semiconductor rubber rings are generated. Softening and reusing these waste semiconductor rubber rings allows for raw material recycling. Currently, softening and reusing waste semiconductor rubber rings requires shredding them for heating. However, due to the high elasticity and toughness of rubber, existing softening and reuse devices are prone to slippage during cutting due to uneven force, resulting in some rubber not being effectively cut, affecting the cutting effect and consequently the heating and softening of the rubber granules. Summary of the Invention

[0003] In view of the problem that "slippage" easily occurs due to uneven force when cutting rubber rings in the prior art, resulting in some rubber not being effectively cut, the present invention proposes a device for softening and utilizing waste rubber of semiconductor rubber rings.

[0004] The present invention adopts the following technical solution:

[0005] A device for softening and utilizing waste rubber from semiconductor rubber rings includes a housing. Two horizontally parallel rotatable shafts are connected within the housing. Multiple circular blades are axially and uniformly arranged on the outer surface of each shaft, with each circular blade corresponding to the previous one. Multiple plate cutters are circumferentially and uniformly arranged on the outer surface of each shaft, and these plate cutters sequentially contact each other when the two shafts rotate relative to each other. A heating and granulation mechanism is provided at the lower end of the housing for heating, softening, and granulating the waste material. The multiple circular blades and plate cutters on the two shafts intersect to form a grid-like cutting edge on the shaft surface. As the two shafts rotate relative to each other, the grid-like cutting edge rolls and contacts against each other to complete the cutting, greatly improving cutting efficiency. Simultaneously, the rolling and contacting contact of the grid-like cutting edge greatly avoids uneven force causing slippage, which could lead to some rubber not being effectively cut.

[0006] Preferably, the housing includes an outer shell tube that is parallel to and sleeved around the two shaft tubes. Both ends of the outer shell tube are fixed with circular side plates for supporting the rotation of the shaft tubes. Worm gears are fixed on the same side of both shaft tubes. A worm is rotated on the circular side plate on the corresponding side of the worm gear. The worm is located between the two worm gears and meshes with them for transmission. When the worm rotates, it simultaneously meshes with the two worm gears and drives them to rotate relative to each other, thereby driving the two shaft tubes to rotate synchronously relative to each other to complete the cutting.

[0007] Preferably, a feed pipe is fixed to the upper side of the outer shell tube, and a screen is provided on the lower side of the outer shell tube.

[0008] Preferably, a transmission ring is coaxially rotated on the inner side of each of the two circular side plates, and a lever is fixed between the two transmission rings. The lever slides in contact with the inner wall of the outer casing tube. A power shaft rotates through the two circular side plates and is simultaneously connected to the two transmission rings. By the lever swinging back and forth below inside the outer casing tube, the rubber particles can be moved again to the upper part between the two shaft tubes for further cutting.

[0009] Preferably, the heating granulation mechanism includes a heating box fixed at the lower end of the outer shell tube corresponding to the screen, a heating tube extending from one side of the heating box, a granulation mechanism at the end of the heating tube away from the heating box, and a spiral frame rotating between the heating box and the heating tube.

[0010] Preferably, the granulation mechanism includes a retaining tube sleeved on the end of the heating tube, a perforated plate fixed on the retaining tube, a track frame fixed at the upper end of the perforated plate, a blade holder sliding inside the track frame, and a blade fixed on the blade holder and attached to the perforated plate; the softened rubber is extruded from the through hole of the perforated plate and is cut by the blade sliding back and forth on the outer side of the perforated plate to obtain rubber granules again.

[0011] Preferably, an elongated perforated plate is fixed on the tool holder along the direction of the heating tube, and a rotating disk is rotated at the upper end of the heating tube. An eccentric pin is fixed at the eccentric part of the rotating disk, and the eccentric pin slides in the elongated hole of the elongated perforated plate. The rotating disk drives the eccentric pin to rotate, which pushes the elongated perforated plate to drive the tool holder to slide back and forth on the track frame, and then drives the blade to slide back and forth on the outer side of the perforated plate.

[0012] Preferably, air holes are provided at the corresponding shaft tubes in the intersecting interval areas of two adjacent circular cutters and two adjacent plate cutters, and pistons slide inside both shaft tubes; by the axial reciprocating movement of the pistons inside the shaft tubes, particles that enter the intersecting interval areas of two adjacent circular cutters and two adjacent plate cutters during cutting can be blown out, avoiding particles from remaining in this area and affecting continuous cutting.

[0013] Preferably, a connecting bracket is fixed on the two pistons to allow the two pistons to slide synchronously.

[0014] Preferably, an electric telescopic rod is installed between the connecting frame and the corresponding circular side plate.

[0015] The beneficial effects of this invention are:

[0016] 1. By intersecting multiple circular blades and multiple plate cutters to form a grid-like blade on the surface of the shaft tube, the cutting efficiency is greatly improved when the two shaft tubes rotate relative to each other. At the same time, it greatly avoids the problem of "slippage" caused by uneven force, which would result in some rubber not being effectively cut.

[0017] 2. By swinging the lever back and forth inside the outer casing tube, the rubber particles can be moved back to the upper part between the two shaft tubes for further cutting, ensuring that all rubber particles can pass through the sieve holes on the screen.

[0018] 3. It can blow out particles that enter the area between two adjacent circular cutters and two adjacent plate cutters during cutting, preventing particles from remaining in this area and affecting continuous cutting. Attached Figure Description

[0019] Figure 1 and Figure 2 This is a schematic diagram of a device for softening and utilizing waste rubber in semiconductor rubber rings;

[0020] Figure 3 This is a cross-sectional schematic diagram of a device for softening and utilizing waste rubber in semiconductor rubber rings;

[0021] Figure 4 It is a partial cross-sectional structural diagram of the outer shell tube, screen, heating box and heating tube;

[0022] Figure 5 This is a schematic diagram of the internal structure of the box;

[0023] Figure 6 This is a structural diagram of the shaft tube, the ring cutter, and the plate cutter;

[0024] Figure 7 This is a structural diagram of the piston and connecting frame;

[0025] Figure 8 This is a schematic diagram of the transmission ring and the lever plate;

[0026] Figure 9 and Figure 10 This is a schematic diagram of the granulation mechanism.

[0027] In the picture:

[0028] 1. Outer shell tube; 2. Screen; 3. Heating box; 4. Heating tube; 5. Feed tube; 6. Circular side plate; 7. Shaft tube; 8. Circular ring knife; 9. Plate cutter; 10. Worm gear; 11. Worm; 12. Piston; 13. Connecting frame; 14. Electric telescopic rod; 15. Transmission ring; 16. Pulley; 17. Power shaft; 18. Perforated plate; 19. Buckle tube; 20. Track frame; 21. Blade; 22. Rotary disk; 23. Long perforated plate; 24. Eccentric pin. Detailed Implementation

[0029] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0030] Reference Figure 1-6 A device for softening and utilizing waste rubber for semiconductor rubber rings includes a housing. Inside the housing, two horizontally parallel rotatable shaft tubes 7 are connected. The outer surfaces of the two shaft tubes 7 are axially and uniformly provided with multiple circular blades 8, and the circular blades 8 on the two shaft tubes 7 are in contact with each other. The outer surfaces of the two shaft tubes 7 are circumferentially and uniformly provided with multiple plate cutters 9. When the two shaft tubes 7 rotate relative to each other, the plate cutters 9 sequentially contact each other. The lower end of the housing is provided with a heating and granulation mechanism for heating, softening and granulating the scrap material.

[0031] When in use, the waste rubber ring is placed at the upper end between the two shaft tubes 7. Since the multiple circular blades 8 on the two shaft tubes 7 intersect with the multiple plate cutters 9 to form a grid-like blade on the surface of the shaft tubes 7, and the circular blades 8 on the two shaft tubes 7 correspond one-to-one, and when the two shaft tubes 7 rotate relative to each other, the multiple plate cutters 9 on the two shaft tubes 7 face each other in turn, forming a rolling contact and pressing between the grid-like blades on the surface of the two shaft tubes 7, thus completing the cutting. This greatly improves the cutting efficiency. At the same time, the rolling contact and pressing between the grid-like blades greatly avoids the problem of uneven force causing "slippage" and resulting in some rubber not being effectively cut.

[0032] Further:

[0033] The housing includes an outer shell tube 1 that is sleeved parallel to the outside of the two shaft tubes 7. Both ends of the outer shell tube 1 are fixed with circular side plates 6 for supporting the rotation of the shaft tubes 7. Both ends of the two shaft tubes 7 are fixed with worm gears 10. A worm 11 rotates on the circular side plate 6 on the corresponding side of the worm gear 10. The worm 11 is located between the two worm gears 10 and engages with them for transmission.

[0034] The first motor installed on the circular side plate 6 drives the worm gear 11, so that when the worm gear 11 rotates, it simultaneously meshes with the two worm wheels 10 to rotate relative to each other, which in turn drives the two shaft tubes 7 to rotate synchronously relative to each other, thus completing the cutting.

[0035] Further:

[0036] A feed pipe 5 is fixed on the upper side of the outer casing tube 1, and a screen 2 is provided on the lower side of the outer casing tube 1.

[0037] Waste rubber rings are added into the outer shell tube 1 through the feed pipe 5, and then fall above the two shaft tubes 7 to complete the cutting. The screen 2 is used to screen the cut rubber particles, so that qualified rubber particles can fall into the heating granulation mechanism through the screen holes on the screen 2 to continue the next step of processing, while unqualified ones remain in the outer shell tube 1.

[0038] Furthermore, refer to Figure 5 and Figure 8 :

[0039] Both circular side plates 6 have a transmission ring 15 that rotates coaxially on their inner sides. A lever 16 is fixed between the two transmission rings 15. The lever 16 slides in contact with the inner wall of the outer casing tube 1. A power shaft 17 rotates through the two circular side plates 6. The power shaft 17 is simultaneously connected to the two transmission rings 15.

[0040] A second motor mounted on one of the circular side plates 6 reciprocates the drive shaft 17, causing the two drive rings 15 to rotate inside the two circular side plates 6. This, in turn, drives the paddle plate 16 to swing back and forth below the outer casing tube 1, thus pushing the rubber particles stuck in the outer casing tube 1 to both sides. When the paddle plate 16 rotates above the shaft tube 7, the paddle plate 16 is in an inclined state, with the end near the inner wall of the outer casing tube 1 higher than the end near the shaft tube 7. At this time, the rubber particles lifted by the paddle plate 16 will slide down along the paddle plate 16 due to their own gravity, and then fall back to the top between the two shaft tubes 7 for further cutting, ensuring that all rubber particles can pass through the sieve holes on the screen 2.

[0041] Furthermore, refer to Figure 3-4 :

[0042] The heating granulation mechanism includes a heating box 3 fixed at the lower end of the outer shell tube 1 corresponding to the screen 2. A heating tube 4 extends from one side of the heating box 3. A granulation mechanism is provided at the end of the heating tube 4 away from the heating box 3. A screw frame 18 rotates between the heating box 3 and the heating tube 4.

[0043] The heating box 3 is used to collect the rubber particles that fall from the screen 2 and heat the rubber particles. At the same time, a third motor is installed on the side of the heating box 3 to drive the spiral frame 18. The rotating spiral frame 18 pushes the rubber particles in the heating box 3 into the heating tube 4 and heats them continuously until they move to the granulation mechanism, where the softened rubber is squeezed out, granulated, and stored.

[0044] It should be noted that the lower part of the heating box 3 is equipped with a resistance heating plate, and the inner wall of the heating tube 4 is equipped with a resistance heating plate.

[0045] Furthermore, refer to Figure 9-10 :

[0046] The granulation mechanism includes a retaining tube 19 sleeved on the end of the heating tube 4, a perforated plate 18 fixed on the retaining tube 19, a track frame 20 fixed on the upper end of the perforated plate 18, a knife holder sliding inside the track frame 20, and a blade 21 fixed on the knife holder and attached to the perforated plate 18.

[0047] The softened rubber is spirally pushed by the screw frame 18 to the orifice plate 18 and extruded through the through hole of the orifice plate 18. At the same time, the transmission cutter head drives the blade 21 to slide back and forth on the outer side of the orifice plate 18, thereby cutting the rubber strip extruded through the through hole on the orifice plate 18 and obtaining rubber granules again.

[0048] It should be noted that in the softening and utilization of waste rubber, the waste rubber cut into granules is heated and softened to form a plastic "recycled rubber material", which can be mixed with other raw materials again to process other rubber products. The solution of this invention is to granulate again, which is convenient for storage and subsequent processing.

[0049] Further:

[0050] A long hole plate 23 is fixed on the knife holder along the direction of the heating tube 4. A rotating disk 22 is rotated at the upper end of the heating tube 4. An eccentric pin 24 is fixed at the eccentric part of the rotating disk 22. The eccentric pin 24 slides in the long hole of the long hole plate 23.

[0051] The upper end of the heating tube 4 is fixed with a motor mounting plate, and a third motor is mounted on the motor mounting plate. The third motor drives the rotating disk 22 to rotate the eccentric pin 24, so that the eccentric pin 24 slides back and forth in the long hole of the long hole plate 23, while pushing the long hole plate 23 to drive the tool holder to slide back and forth on the track frame 20, and then drive the blade 21 to slide back and forth on the outer side of the hole plate 18.

[0052] Reference Figure 6-7 :

[0053] Air holes are provided at the corresponding shaft tubes 7 in the intersecting and spaced areas of two adjacent circular cutters 8 and two adjacent plate cutters 9, and pistons 12 slide inside both shaft tubes 7.

[0054] By reciprocating axially within the shaft tube 7, the piston 12 draws air back and forth at the air hole, thereby blowing out particles that have entered the area between the two adjacent circular cutters 8 and the two adjacent plate cutters 9 during cutting, preventing particles from remaining in this area and affecting continuous cutting.

[0055] The stomata are not shown in the diagram.

[0056] Further:

[0057] A connecting bracket 13 is fixed on the two pistons 12; the connecting bracket 13 enables the two pistons 12 to slide synchronously, thereby synchronously blowing and sucking the air holes on the two shaft tubes 7.

[0058] An electric telescopic rod 14 is installed between the connecting frame 13 and the corresponding circular side plate 6. The two pistons 12 can be synchronously driven by the connecting frame 13 through the extension and retraction of the electric telescopic rod 14.

[0059] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A device for softening and utilizing waste rubber from semiconductor rubber rings, comprising a housing, characterized in that, The box body has two horizontally parallel rotating shaft tubes (7). The outer surfaces of the two shaft tubes (7) are axially and evenly provided with multiple circular cutters (8), and the circular cutters (8) on the two shaft tubes (7) are in contact with each other. The outer surfaces of the two shaft tubes (7) are circumferentially and evenly provided with multiple plate cutters (9). When the two shaft tubes (7) rotate relative to each other, the plate cutters (9) contact each other in sequence. The lower end of the box body is provided with a heating granulation mechanism for heating, softening and granulating the crushed material. The housing includes an outer shell tube (1) that is sleeved parallel to the outside of the two shaft tubes (7). Both ends of the outer shell tube (1) are fixed with round side plates (6) for supporting the rotation of the shaft tubes (7). Both ends of the two shaft tubes (7) are fixed with worm gears (10). A worm (11) rotates on the round side plate (6) on the corresponding side of the worm gear (10). The worm (11) is located between the two worm gears (10) and meshes with them for transmission. A feed pipe (5) is fixed on the upper side of the outer shell tube (1), and a screen (2) is provided on the lower side of the outer shell tube (1). Two circular side plates (6) have a transmission ring (15) rotating coaxially on their inner sides. A lever (16) is fixed between the two transmission rings (15). The lever (16) slides in contact with the inner wall of the outer casing tube (1). A power shaft (17) rotates through the two circular side plates (6). The power shaft (17) is simultaneously connected to the two transmission rings (15). The heating granulation mechanism includes a heating box (3) fixed at the lower end of the outer shell tube (1) corresponding to the screen (2), a heating tube (4) extending on one side of the heating box (3), a granulation mechanism at the end of the heating tube (4) away from the heating box (3), and a screw frame (18) rotating between the heating box (3) and the heating tube (4). The granulation mechanism includes a buckle tube (19) sleeved on the end of the heating tube (4), a perforated plate (18) fixed on the buckle tube (19), a track frame (20) fixed on the upper end of the perforated plate (18), a knife holder sliding inside the track frame (20), and a blade (21) fixed on the knife holder and attached to the perforated plate (18). The tool holder is fixed with a long hole plate (23) along the direction of the heating tube (4). A rotating disk (22) rotates at the upper end of the heating tube (4). An eccentric pin (24) is fixed at the eccentric part of the rotating disk (22). The eccentric pin (24) slides in the long hole of the long hole plate (23).

2. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 1, characterized in that, Air holes are provided at the corresponding shaft tubes (7) in the intersecting interval area between two adjacent circular cutters (8) and two adjacent plate cutters (9), and pistons (12) slide inside both shaft tubes (7).

3. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 2, characterized in that, Connecting brackets (13) are fixed on the two pistons (12).

4. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 3, characterized in that, An electric telescopic rod (14) is installed between the connecting frame (13) and the corresponding circular side plate (6).

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