A damping device for fixing a scanning electron microscope sample stage and a scanning electron microscope

Abstract

The application relates to the technical field of microscopic observation, and discloses a damping device for fixing a scanning electron microscope sample stage and a scanning electron microscope, wherein the damping device comprises a first gland, a second gland, a magnetic attraction assembly and a spring sheet; the first gland is provided with a first through hole; the second gland is connected with the first gland; the magnetic attraction assembly is clamped between the first gland and the second gland, part of magnets of the magnetic attraction assembly extends out of the first through hole and is suitable for being adsorbed on the inner wall of a sample chamber; the connecting part of the spring sheet is clamped between the first gland and the second gland, the elastic part is connected with the magnetic attraction assembly, and the elastic part of the spring sheet is provided with a plurality of buffer holes at intervals. The magnets are adsorbed on the inner wall of the sample chamber, the sample stage connected with the second gland is supported, a plurality of buffer holes are arranged on the spring sheet, the buffer holes are used for buffering the vibration in the working process, the influence of the vibration on the sample stage is reduced, the stability of the sample stage is improved, and the shooting effect on the sample is improved.

Description

Technical Field

[0001] This invention relates to the field of microscopic observation technology, specifically to a vibration damping device for fixing a scanning electron microscope sample stage and a scanning electron microscope. Background Technology

[0002] With the continuous development of science and technology, the scanning electron microscope (SEM), as a device for observing the microscopic world, has the characteristics of high resolution, large depth of field, and strong stereoscopic effect. It is now widely used in many fields such as materials science, semiconductors, new energy, geology, and life sciences, playing a crucial role in scientific and technological progress. By scanning the sample surface with an electron beam, the scanning electron microscope can be used to observe micro- and nano-scale microstructures.

[0003] In scanning electron microscopy (SEM), the sample stage is a crucial component. It not only serves as the "carrier" for the sample but also acts as a key link between the electron optics system and sample analysis. Currently, in related technologies, the front end of the sample stage is suspended without support, resulting in instability and vibrations during operation that lead to poor image clarity, failing to meet requirements. Summary of the Invention

[0004] In view of this, the present invention provides a vibration damping device for fixing a scanning electron microscope sample stage and a scanning electron microscope, so as to solve the problem of poor image clarity caused by vibration during operation.

[0005] In a first aspect, the present invention provides a shock-absorbing device for fixing a scanning electron microscope sample stage, comprising a first pressure cover, a second pressure cover, a magnetic suction assembly, and a spring sheet; the first pressure cover has a first through hole; the second pressure cover is connected to the first pressure cover, and the second pressure cover has a second through hole, and the second pressure cover is adapted to be connected to the sample stage; the magnetic suction assembly is sandwiched between the first pressure cover and the second pressure cover, the magnetic suction assembly includes a magnet, a portion of the magnet protruding from the first through hole, and the magnet is adapted to be attracted to the inner wall of the sample chamber; the spring sheet includes a connecting portion and an elastic portion, the connecting portion is disposed around the elastic portion and connected to the elastic portion, the connecting portion is sandwiched between the first pressure cover and the second pressure cover, the elastic portion is connected to the side of the magnetic suction assembly away from the first pressure cover, the elastic portion has a plurality of buffer holes, any two adjacent buffer holes are spaced apart, and the elastic portion is correspondingly disposed to the second through hole.

[0006] Beneficial effects: The magnet is attached to the inner wall of the sample chamber to support the sample stage connected to the second pressure cap. Several buffer holes on the spring plate are used to buffer the vibration during operation, reduce the impact of vibration on the sample stage, improve the stability of the sample stage, and improve the imaging effect of the sample.

[0007] In one optional embodiment, the magnetic assembly further includes a base and a first pad, the base having an installation groove, the magnet being disposed in the installation groove, and the first pad being disposed between the first pressure cover and the magnet base.

[0008] Beneficial effects: The first gasket is sandwiched between the first cover and the base, which can effectively buffer the rigid contact between the first cover and the base, reduce the direct collision between the two during vibration transmission, and further weaken the impact of vibration on the overall structure.

[0009] In one optional embodiment, the base includes a main body and a protruding part, the main body is connected to the protruding part, the protruding part has the mounting groove, a portion of the protruding part extends out of the first through hole, the first gasket is disposed between the main body and the first pressure cover, and the main body and the elastic part are correspondingly disposed.

[0010] Beneficial effects: The base consists of a main body and a protruding part. The split structure makes the functions of each part of the base clear and facilitates processing and manufacturing.

[0011] In one optional embodiment, the shock-absorbing device for fixing the scanning electron microscope sample stage further includes a second pad and a fastener. The spring plate has a first mounting hole, the second pad has a second mounting hole, the second pad is disposed on the side of the spring plate away from the base, and the fastener passes through the second mounting hole and the first mounting hole and is fastened in the base.

[0012] Beneficial effect: The second washer is fixed to the base by fasteners to prevent the elastic part from coming out of the second perforation and to prevent the shock absorption device from failing.

[0013] In one optional embodiment, the magnet is a magnetic lock nut, the mounting groove is provided with threads, and the magnet is threadedly connected to the base.

[0014] Beneficial effects: The magnet is threadedly connected to the base, which facilitates the installation and maintenance of the magnet and makes operation simple.

[0015] In one optional embodiment, the shock-absorbing device for fixing the scanning electron microscope sample stage further includes a gasket ring connected to the side of the protrusion away from the main body. The distance from the surface of the gasket ring to the surface of the first pressure cap is L1, and the distance from the surface of the magnet to the surface of the first pressure cap is L2, satisfying L1≤L2.

[0016] Beneficial effect: The distance from the surface of the gasket ring to the surface of the first cap is less than or equal to the distance from the surface of the magnet to the surface of the first cap, ensuring the magnetic adsorption between the magnet and the sample chamber.

[0017] In one alternative embodiment, the washer is a non-metallic washer.

[0018] Beneficial effects: The pad ring is made of non-metallic material, which reduces friction and the generation of metal particles during movement, thus avoiding metal particle contamination of the sample stage.

[0019] In one alternative embodiment, the shock-absorbing device for fixing the scanning electron microscope sample stage further includes a connecting assembly connected to the side of the second pressure cap away from the first pressure cap.

[0020] In one alternative embodiment, the connecting assembly includes a connecting block and an adapter plate, the connecting block being connected to the adapter plate and the connecting block being connected to the second pressure cap, and the adapter plate being adapted to be connected to the sample stage.

[0021] Beneficial effects: By connecting the connecting block and the adapter plate to form a connecting assembly, the size and shape of the adapter plate or connecting block can be adjusted according to different sample stages, thereby improving the applicability of the shock absorption device.

[0022] Secondly, the present invention also provides a scanning electron microscope, including the above-mentioned shock-absorbing device for fixing the scanning electron microscope sample stage. Attached Figure Description

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the exploded structure of the shock absorption device according to an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the overall assembly of the shock absorption device according to an embodiment of the present invention;

[0026] Figure 3This is a schematic diagram of the base structure according to an embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the structure of the spring sheet according to an embodiment of the present invention.

[0028] Explanation of reference numerals in the attached figures:

[0029] 10. First pressure cap; 11. First perforation; 20. Second pressure cap; 21. Second perforation; 30. Magnetic suction assembly; 31. Magnet; 32. Base; 321. Main body; 322. Protrusion; 323. Mounting groove; 33. First gasket; 40. Spring plate; 41. Connecting part; 42. Elastic part; 421. Buffer hole; 50. Second gasket; 60. Fastener; 70. Washer ring; 80. Connecting assembly; 81. Connecting block; 82. Adapter plate. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] The following is combined with Figures 1 to 4 The following describes embodiments of the present invention.

[0032] According to an embodiment of the present invention, in a first aspect, a shock-absorbing device for fixing a scanning electron microscope sample stage is provided, comprising a first pressure cover 10, a second pressure cover 20, a magnetic suction assembly 30, and a spring sheet 40; the first pressure cover 10 has a first through hole 11; the second pressure cover 20 is connected to the first pressure cover 10, and the second pressure cover 20 has a second through hole 21, and the second pressure cover 20 is adapted to be connected to the sample stage; the magnetic suction assembly 30 is sandwiched between the first pressure cover 10 and the second pressure cover 20, and the magnetic suction assembly 30 includes a magnet 31, a portion of which extends outwards. Due to the first perforation 11, the magnet 31 is suitable for adsorbing onto the inner wall of the sample chamber; the spring sheet 40 includes a connecting part 41 and an elastic part 42. The connecting part 41 is arranged around the elastic part 42 and connected to the elastic part 42. The connecting part 41 is sandwiched between the first pressure cover 10 and the second pressure cover 20. The elastic part 42 is connected to the side of the magnetic suction assembly 30 away from the first pressure cover 10. A plurality of buffer holes 421 are opened on the elastic part 42. Any two adjacent buffer holes 421 are spaced apart. The elastic part 42 is correspondingly arranged with the second perforation 21.

[0033] The vibration damping device for fixing the scanning electron microscope sample stage in this embodiment uses a magnet 31 to be attracted to the inner wall of the sample chamber to support the sample stage connected to the second pressure cover 20. Through a number of buffer holes 421 opened on the spring sheet 40, the vibration during the operation is buffered, reducing the impact of vibration on the sample stage, improving the stability of the sample stage, and improving the imaging effect of the sample.

[0034] It should be noted that in the relevant technology, the front end of the sample stage is suspended without support, and the sample stage is not stable. The vibration generated during operation results in poor image clarity, which cannot meet the requirements.

[0035] Therefore, in this embodiment, the second pressure cap 20 is connected to the sample stage, and the sample stage is attracted and fixed in the sample chamber by the magnet 31 of the magnetic suction assembly 30, thereby supporting the sample stage; at the same time, the buffer hole 421 of the spring sheet 40 is used to buffer the vibration during the working process, reduce the impact of vibration on the sample stage, improve the stability of the sample stage, and improve the shooting effect.

[0036] It is worth noting that a second perforation 21 is provided on the second pressure cap 20 to facilitate the provision of buffer space for the elastic part 42.

[0037] Specifically, such as Figure 4 As shown, the buffer holes 421 are provided in three layers from the inside to the outside, and the buffer holes 421 in each layer are spaced apart and surround each other to form a ring.

[0038] It should be noted that in other alternative embodiments, the number and shape of the buffer holes 421 can be selected according to the actual situation.

[0039] Specifically, the first pressure cover 10 and the second pressure cover 20 are detachably connected by bolts to facilitate the disassembly and assembly of the main structure of the shock absorber.

[0040] Specifically, such as Figure 4 As shown, the elastic part 42 is disc-shaped to adapt to the shape of the magnetic assembly 30.

[0041] Of course, in other alternatives, the shape of the elastic part 42 can be adjusted according to the shape of the magnetic assembly 30.

[0042] In one embodiment, such as Figure 1 As shown, the magnetic assembly 30 also includes a base 32 and a first pad 33. The base 32 has an installation groove 323, the magnet 31 is disposed in the installation groove 323, and the first pad 33 is disposed between the first pressure cover 10 and the base 32 of the magnet 31.

[0043] It is worth noting that the first gasket 33 is sandwiched between the first pressure cover 10 and the base 32, which can effectively buffer the rigid contact between the first pressure cover 10 and the base 32, reduce the direct collision between the two during the vibration transmission process, and further weaken the impact of vibration on the overall structure.

[0044] Furthermore, such as Figure 3 As shown, the base 32 includes a main body 321 and an extension 322. The main body 321 is connected to the extension 322. The extension 322 has an installation groove 323. Part of the extension 322 extends out of the first through hole 11. The first gasket 33 is disposed between the main body 321 and the first pressure cover 10. The main body 321 and the elastic part 42 are correspondingly disposed.

[0045] It is worth noting that the base 32 includes a main body 321 and a protruding part 322. The split structure makes the functions of each part of the base 32 clear and facilitates processing and manufacturing.

[0046] In one embodiment, such as Figure 1 As shown, the shock-absorbing device for fixing the scanning electron microscope sample stage also includes a second pad 50 and a fastener 60. The spring plate 40 has a first mounting hole, and the second pad 50 has a second mounting hole. The second pad 50 is located on the side of the spring plate 40 away from the base 32. The fastener 60 passes through the second mounting hole and the first mounting hole and is fastened in the base 32.

[0047] Specifically, there are four of each of the first mounting hole, the second mounting hole, and the fastener 60, with each fastener 60 corresponding to one first mounting hole and one second mounting hole.

[0048] Of course, in other alternative embodiments, the number of the first mounting hole, the second mounting hole, and the fastener 60 can be adjusted according to the actual situation.

[0049] It should be noted that when the elastic part 42 of the spring sheet 40 buffers vibration, it will be displaced. If the displacement is too large, the buffer hole 421 may be damaged, and the elastic part 42 will come out through the second through hole 21.

[0050] It is worth noting that the second washer 50 is fixed to the base 32 by the fastener 60 to prevent the elastic part 42 from coming out of the second through hole 21 and to prevent the shock absorption device from failing.

[0051] Specifically, such as Figure 1 and Figure 3 As shown, magnet 31 is a magnetic lock nut, and the mounting groove 323 is provided with threads, and magnet 31 is threadedly connected to base 32.

[0052] It should be noted that the magnet 31 can also be connected to the base 32 in other ways, such as by snap-fit.

[0053] It is worth noting that the magnet 31 is threadedly connected to the base 32, which facilitates the installation and maintenance of the magnet 31 and makes the operation simple.

[0054] In one embodiment, such as Figure 1 and Figure 2 As shown, the shock-absorbing device for fixing the scanning electron microscope sample stage also includes a washer 70. The washer 70 is connected to the side of the protrusion 322 away from the main body 321. The distance from the surface of the washer 70 to the surface of the first pressure cover 10 is L1, and the distance from the surface of the magnet 31 to the surface of the first pressure cover 10 is L2, satisfying L1≤L2.

[0055] Specifically, the washer 70 and the protrusion 322 are detachably connected by bolts, which facilitates the replacement and maintenance of the washer 70.

[0056] It should be noted that when L2 < L1, the magnet 31 does not come into contact with the sample chamber, and the adsorption force between the magnet 31 and the sample chamber is small, which may cause the shock absorption device to slip off.

[0057] It is worth noting that the distance from the surface of the gasket 70 to the surface of the first pressure cap 10 is less than or equal to the distance from the surface of the magnet 31 to the surface of the first pressure cap 10, ensuring the magnetic adsorption of the magnet 31 to the sample chamber.

[0058] Furthermore, the washer 70 is a non-metallic washer 70.

[0059] It is worth noting that the gasket 70 is made of non-metallic material, which reduces friction and the generation of metal particles during movement, thus avoiding metal particle contamination of the sample stage.

[0060] In one embodiment, such as Figure 1 As shown, the shock-absorbing device for fixing the scanning electron microscope sample stage also includes a connecting assembly 80, which is connected to the side of the second pressure cover 20 away from the first pressure cover 10.

[0061] Furthermore, such as Figure 1 As shown, the connecting assembly 80 includes a connecting block 81 and an adapter plate 82. The connecting block 81 is connected to the adapter plate 82, and the connecting block 81 is connected to the second pressure cover 20. The adapter plate 82 is adapted to be connected to the sample stage.

[0062] Specifically, both the connecting block 81 and the adapter plate 82 are provided with oblong holes to further improve the applicability of the overall device.

[0063] It is worth noting that the connecting assembly 80 is formed by connecting the connecting block 81 and the adapter plate 82. The size and shape of the adapter plate 82 or the connecting block 81 can be adjusted according to different sample stages, thereby improving the applicability of the shock absorption device.

[0064] Working principle: The connecting component 80 in the shock absorption device is connected to the sample stage. The magnet 31 in the magnetic component 30 attracts the shock absorption device and the sample stage to the inner wall of the sample chamber, thus supporting the sample stage. The buffer hole 421 on the spring plate 40 buffers the vibration generated during operation, reducing the impact of vibration on the shooting effect.

[0065] According to an embodiment of the present invention, in a second aspect, a scanning electron microscope is also provided, including the above-described shock-absorbing device for fixing the scanning electron microscope sample stage.

[0066] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and all such modifications and variations fall within the scope defined by the invention.

Claims

1. A shock-absorbing device for fixing a scanning electron microscope sample stage, characterized in that, include: The first pressure cap (10) has a first through hole (11). The second pressure cap (20) is connected to the first pressure cap (10), and the second pressure cap (20) has a second through hole (21) and is adapted to be connected to the sample stage; A magnetic suction assembly (30) is sandwiched between the first pressure cap (10) and the second pressure cap (20). The magnetic suction assembly (30) includes a magnet (31), a portion of which extends out of the first perforation (11). The magnet (31) is adapted to be adsorbed onto the inner wall of the sample chamber. A spring sheet (40) includes a connecting part (41) and an elastic part (42). The connecting part (41) is arranged around the elastic part (42) and connected to the elastic part (42). The connecting part (41) is sandwiched between the first pressure cover (10) and the second pressure cover (20). The elastic part (42) is connected to the side of the magnetic suction assembly (30) away from the first pressure cover (10). The elastic part (42) has a plurality of buffer holes (421). Any two adjacent buffer holes (421) are spaced apart. The elastic part (42) is correspondingly arranged with the second through hole (21).

2. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 1, characterized in that, The magnetic suction assembly (30) also includes a base (32) and a first gasket (33). The base (32) has an installation groove (323) and the magnet (31) is disposed in the installation groove (323). The first gasket (33) is disposed between the first pressure cover (10) and the magnet (31) base (32).

3. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 2, characterized in that, The base (32) includes a main body (321) and a protrusion (322). The main body (321) is connected to the protrusion (322). The protrusion (322) has the mounting groove (323). Part of the protrusion (322) extends out of the first through hole (11). The first gasket (33) is disposed between the main body (321) and the first pressure cap (10). The main body (321) is correspondingly disposed with the elastic part (42).

4. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 2, characterized in that, The shock-absorbing device for fixing the scanning electron microscope sample stage further includes a second pad (50) and a fastener (60). The spring plate (40) has a first mounting hole, and the second pad (50) has a second mounting hole. The second pad (50) is located on the side of the spring plate (40) away from the base (32). The fastener (60) passes through the second mounting hole and the first mounting hole and is fastened in the base (32).

5. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 2, characterized in that, The magnet (31) is a magnetic lock nut, and the mounting groove (323) is provided with threads. The magnet (31) is threadedly connected to the base (32).

6. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 3, characterized in that, The shock-absorbing device for fixing the scanning electron microscope sample stage also includes a gasket (70), which is connected to the side of the protrusion (322) away from the main body (321). The distance from the surface of the gasket (70) to the surface of the first pressure cover (10) is L1, and the distance from the surface of the magnet (31) to the surface of the first pressure cover (10) is L2, satisfying L1≤L2.

7. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 6, characterized in that, The washer (70) is a non-metallic washer (70).

8. The shock-absorbing device for fixing a scanning electron microscope sample stage according to any one of claims 1-7, characterized in that, The shock-absorbing device for fixing the scanning electron microscope sample stage further includes a connecting component (80), which is connected to the side of the second pressure cap (20) away from the first pressure cap (10).

9. The shock-absorbing device for fixing a scanning electron microscope sample stage according to claim 8, characterized in that, The connection assembly (80) includes a connection block (81) and an adapter plate (82), the connection block (81) being connected to the adapter plate (82), the connection block (81) being connected to the second pressure cap (20), and the adapter plate (82) being adapted to be connected to the sample stage.

10. A scanning electron microscope, characterized in that, The device includes any one of claims 1 to 9 for fixing a scanning electron microscope sample stage.

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