A type of air-breaking device

Abstract

This invention discloses a cavitation-breaking device, relating to the field of vacuum pump technology. Applied to a vacuum chamber, the cavitation-breaking device includes an inlet pipe, an energy-dissipating buffer tank, a filter, a delivery pipe, and an anti-reverse mechanism connected in sequence. The energy-dissipating buffer tank has a connected straight cylindrical section and a conical section, with sound-absorbing cotton and sintered metal cotton layers respectively arranged on the inner walls of the straight and conical sections. The delivery pipe has bends to change the gas flow direction, with a bidirectional sealing diverting valve at the bends. A filter support is installed at the end of the delivery pipe. In this invention, airflow flows from the inlet pipe into the energy-dissipating buffer tank. The reduced airflow through the inlet pipe decreases the gas impact, achieving a first level of deceleration. Friction and reflection occur within the porous sound-absorbing cotton and sintered metal cotton layers, continuously changing the airflow direction and reducing noise, achieving a second level of deceleration. The filter achieves a third level of deceleration, and the filter support achieves a fourth level of deceleration.

Description

Technical Field

[0001] This invention relates to the field of vacuum pump technology, and more specifically to a vacuum breaking device. Background Technology

[0002] Large-cavity vacuum breaking technology is a key component of vacuum engineering, primarily used in semiconductor manufacturing, photovoltaic production, aerospace, and medical equipment. Its core objective is to rapidly and controllably restore a high-vacuum cavity to atmospheric pressure while maintaining the structural safety of the cavity and the integrity of the internal workpiece.

[0003] To create a vacuum, a vacuum pump is used to evacuate the chamber, thus creating a vacuum environment. When the vacuum process is complete, a vacuum-breaking process is needed to restore the pressure inside the chamber to atmospheric pressure. Vacuum-breaking refers to the process of filling the vacuum chamber with clean, dry gas (such as nitrogen or compressed air), gradually increasing the internal pressure from <1 Pa to atmospheric pressure. This process requires overcoming pressures as high as 10... 5 With a pressure difference of Pa, gas rushes in as a shock wave in a very short time, and the instantaneous impact force can exceed 10 N / cm. 2 This can easily lead to workpiece displacement or structural damage.

[0004] After the product is processed in a vacuum environment, due to the large pressure difference between the inside and outside, in order to take the product out, the vacuum environment needs to be unsealed first to allow air to enter and balance the pressure. This step of allowing air to enter is called vacuum breaking, and usually a valve is opened in the vacuum container to achieve the purpose of vacuum breaking.

[0005] Existing venting devices typically employ simple straight-through valves (venting valves). However, when high-pressure atmospheric pressure (atmospheric pressure) rushes into a near-absolute vacuum chamber through the valve, three serious problems arise:

[0006] First, the high-speed airflow passing through the narrow passage of the valve and flowing irregularly in the chamber generates strong high-frequency airflow noise (whistling), which not only pollutes the environment and damages the hearing of operators, but the sound wave vibrations it generates may also interfere with precision equipment or measurement results.

[0007] Second, the rapid expansion of the gas forms a high-speed, high-pressure shock wave (similar to the principle of an air cannon), which directly impacts the inner wall of the chamber, the workpiece holder, the sensor, the coating target and other precision or fragile components, causing physical deformation, displacement or even permanent damage.

[0008] Third, when cavitation is performed, a check valve is used in conjunction with the pump body to prevent backflow. However, the check valve is prone to zero-pressure differential sealing failure and has a slow response time, resulting in poor backflow prevention.

[0009] Therefore, the present invention proposes a device for breaking through air gaps. Summary of the Invention

[0010] The purpose of this invention is to provide a device for breaking through air gaps, in order to solve the problems mentioned in the background art.

[0011] To achieve the above objectives, the present invention specifically adopts the following technical solution:

[0012] A cavitation breaking device is used in a vacuum chamber. The cavitation breaking device includes an air inlet pipe, an energy dissipation buffer tank, a filter, a delivery pipe, and an anti-reverse mechanism connected in sequence.

[0013] The energy dissipation buffer tank has a straight cylindrical section and a conical section that are connected to each other. The inner walls of the straight cylindrical section and the conical section are respectively provided with a sound-absorbing cotton layer and a metal sintered cotton layer.

[0014] The delivery pipe has a bend to change the gas flow direction, and a two-way sealing diversion valve is provided at the bend. A filter screen bracket is installed at the end of the delivery pipe.

[0015] The anti-reverse mechanism includes a main pump chamber and a secondary anti-reverse chamber, with a differential pressure linkage valve between the two chambers. The delivery pipe is connected to the inlet end of the differential pressure linkage valve, and an injection pipe is installed at the outlet end of the differential pressure linkage valve. The injection pipe is connected to the vacuum chamber. A main piston rod is movably inserted in the main pump chamber, and a driving component for driving the main piston rod to slide back and forth is provided on the main pump chamber. A negative pressure piston is movably inserted in the secondary anti-reverse chamber, and the secondary anti-reverse chamber is connected to a vacuum storage tank through a negative pressure pipe.

[0016] Furthermore, a Roots pump is connected to the vacuum storage tank, and a phase change cold storage layer is provided on the inner wall of the vacuum storage tank.

[0017] Furthermore, the filter includes a housing, inside which are disposed two stainless steel sintered meshes, and between the two stainless steel sintered meshes is a layer of sintered metal fiber.

[0018] Furthermore, the number of sound-absorbing cotton layers is two, and a flow guide frame is provided between the two sound-absorbing cotton layers. The flow guide frame includes two ring plates, and a number of spiral strips distributed in a ring are fixed between the two ring plates.

[0019] Furthermore, the metal sintered cotton layer includes a honeycomb backplate layer disposed on the inner wall of the conical section, the honeycomb backplate layer being provided with a sintered cotton layer, and the sintered cotton layer being provided with a microporous damping layer.

[0020] Furthermore, the energy dissipation buffer tank is provided with a conduit that communicates with the air intake pipe. Several conical guide shields are fixedly arranged on the conduit, and several through slots are arranged on the conduit, with each through slot corresponding to one of the conical guide shields.

[0021] Furthermore, a swirl expansion tank is connected between the filter and the delivery pipe, and a number of static swirl blades arranged in a ring are fixed inside the swirl expansion tank.

[0022] Furthermore, the inner wall of the swirl expansion tank is provided with several microgrooves distributed in a ring.

[0023] Furthermore, the surface of the static swirl blades is provided with noise-reducing micropores, and the outer surface of the swirl expansion tank is covered with a sound-insulating layer.

[0024] Furthermore, the filter support includes a sleeve disposed on the conveying pipe, and a plurality of stainless steel filter screens are disposed inside the sleeve.

[0025] The beneficial effects of this invention are as follows:

[0026] 1. In this invention, the airflow flows from the intake pipe into the energy-dissipating buffer tank. The intake pipe reduces the intake volume to reduce gas impact, achieving the first deceleration. Friction and reflection occur inside the porous sound-absorbing cotton layer and the sintered metal cotton layer, continuously changing the airflow direction and reducing noise, achieving the second deceleration. The filter achieves the third deceleration, the filter support achieves the fourth deceleration, and the bidirectional sealing diverting valve achieves the fifth deceleration. This can prevent the components in the chamber from being damaged by gas shock waves. At the same time, the anti-reverse mechanism can smoothly deliver airflow and prevent airflow backflow.

[0027] 2. In this invention, by adding a swirl expansion tank and static swirl blades, the gas forced into the static swirl blades generates a strong swirling flow. During the rotation, the gas converts a large amount of kinetic energy into heat energy through intense turbulent friction, centripetal acceleration, and viscosity. This is another powerful energy dissipation after the energy dissipation buffer tank, achieving the effect of secondary energy dissipation. At the same time, after passing through the swirl expansion tank, the gas velocity and turbulence are optimized, allowing it to enter the subsequent delivery pipe and bidirectional sealing diverter valve more smoothly, thus improving the overall energy dissipation effect. Attached Figure Description

[0028] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0029] Figure 2 This is a three-dimensional structural diagram of the air-breaking device of the present invention;

[0030] Figure 3 This is the present invention. Figure 2 A three-dimensional sectional view of the structure;

[0031] Figure 4 This is the present invention. Figure 2 Another three-dimensional structural sectional view;

[0032] Figure 5 This is the present invention. Figure 3 Enlarged view of point A in the middle;

[0033] Figure 6 This is the present invention. Figure 3 Enlarged view at point B in the middle;

[0034] Figure 7 This is a three-dimensional structural diagram of the energy dissipation buffer tank of the present invention;

[0035] Figure 8 This is a three-dimensional structural cross-sectional view of the energy dissipation buffer tank of the present invention;

[0036] Figure 9 This is a three-dimensional structural diagram of the swirl expansion tank of the present invention;

[0037] Figure 10 This is a three-dimensional structural cross-sectional view of the swirl expansion tank of the present invention;

[0038] Figure 11 This is a three-dimensional structural diagram of the catheter of the present invention;

[0039] Figure 12 This is a three-dimensional structural diagram of the material guide bracket of the present invention.

[0040] Reference numerals: 1. Vacuum chamber; 2. Inlet pipe; 3. Energy dissipation buffer tank; 4. Filter; 5. Delivery pipe; 6. Anti-reverse mechanism; 7. Sound-absorbing cotton layer; 8. Metal sintered cotton layer; 9. Two-way sealing diverting valve; 10. Filter screen support; 11. Roots pump; 12. Phase change cold storage layer; 13. Flow guide bracket; 14. Conical guide tube; 15. Conical flow guide shroud; 16. Through groove; 17. Swirl expansion tank; 18. Static swirl blade; 19. Microgroove; 20. Sound insulation layer; 401. Shell; 4 02. Stainless steel sintered mesh; 403. Sintered metal fiber layer; 601. Main pump chamber; 602. Secondary anti-reverse chamber; 603. Differential pressure linkage valve; 604. Gas injection pipe; 605. Main piston rod; 606. Drive component; 607. Negative pressure piston; 608. Negative pressure pipe; 609. Vacuum accumulator; 801. Honeycomb backplate layer; 802. Sintered cotton layer; 803. Microporous damping layer; 1001. Sleeve; 1002. Stainless steel filter screen; 1301. Ring plate; 1302. Spiral strip. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0042] like Figures 1-12As shown, an embodiment of the present invention proposes a cavitation breaking device, which is applied to a vacuum chamber 1. The vacuum chamber 1 includes a plurality of cavitation breaking devices. In this embodiment, there are six cavitation breaking devices, distributed in groups of three on both sides of the vacuum chamber 1. The two groups of cavitation breaking devices adopt an alternating symmetrical layout design, which avoids the problem of low cavitation breaking efficiency caused by single-point air intake, avoids the impact on the other side of the chamber wall caused by side-by-side placement, and also avoids the bidirectional impact on the sample in the chamber caused by symmetrical placement. At the same time, the segmented control method can ensure uniform air intake, avoid airflow concentration, and ensure rapid cavitation breaking.

[0043] The air-breaking device includes an intake pipe 2, an energy-dissipating buffer tank 3, a filter 4, a delivery pipe 5, and an anti-reverse mechanism 6, connected in sequence. During air-breaking, the intake pipe 2 is connected to an external gas supply device, and dried nitrogen is preferred. The diameter of the intake pipe 2 is smaller than that of the energy-dissipating buffer tank 3 to reduce gas impact by reducing the intake volume. The energy-dissipating buffer tank 3 has a straight cylindrical section and a conical section connected in series. The inner walls of the straight cylindrical section and the conical section are respectively provided with a sound-absorbing cotton layer 7 and a metal sintered cotton layer 8. When nitrogen is delivered from the intake pipe 2 into the energy-dissipating buffer tank 3, the strong airflow in the center will impact the metal sintered cotton layer 8 on the conical wall, and the airflow in the periphery will impact the sound-absorbing cotton layer 7. The airflow passes through the porous sound-absorbing cotton and metal sintered cotton layers. The sintered cotton inside the container rubs and reflects, constantly changing the airflow direction and reducing noise. At the same time, while dissipating sound energy through airflow friction and reflection, it can also slow down the airflow. The outer surface of the energy-dissipating buffer tank 3 is provided with several annularly distributed heat dissipation fins. When the airflow comes into contact with the sound-absorbing cotton layer 7 and the metal sintered cotton layer 8 for energy dissipation and noise reduction, the energy dissipation process (kinetic energy is converted into heat energy) and the heat of gas compression will cause the temperature of the energy-dissipating buffer tank 3 to rise. The heat dissipation fins significantly increase the heat dissipation surface area of ​​the tank, and timely heat dissipation prevents organic materials such as sound-absorbing cotton from aging, failing or even catching fire due to high temperature. Heat dissipation and temperature control help maintain the filtration and sound absorption performance of materials such as sound-absorbing cotton and sintered cotton.

[0044] After passing through the energy-dissipating buffer tank 3, the airflow enters the filter 4, where it is filtered and its velocity is reduced. The airflow then flows into the delivery pipe 5, which has bends to change the gas flow direction. A two-way sealing diverting valve 9 is installed at each bend. Filter supports 10 are installed at both ends of the delivery pipe 5. The L-shaped bends in the delivery pipe 5 force the airflow to change direction, consuming kinetic energy and reducing velocity. The two-way sealing diverting valve 9 at the bends not only optimizes the flow path and reduces noise but also prevents backflow. During airflow, the airflow first passes through the first filter support 10. The dense mesh and small pores of the support effectively reduce the gas velocity. When passing through the two-way sealing diverting valve 9, the airflow needs to turn, thus reducing gas impact and forcing the airflow into violent turbulence and collision, maximizing kinetic energy dissipation. The airflow then passes through another filter support 10, where it is further slowed down.

[0045] The anti-reverse mechanism 6 includes a main pump chamber 601 and a secondary anti-reverse chamber 602. A differential pressure linkage valve 603 is provided between the two chambers. The delivery pipe 5 is connected to the inlet end of the differential pressure linkage valve 603, and the outlet end of the differential pressure linkage valve 603 is connected to the vacuum chamber 1 via an injection pipe 604. A main piston rod 605 is movably inserted into the main pump chamber 601. A driving component 606 for driving the main piston rod 605 to reciprocate is provided on the main pump chamber 601. Preferably, the driving component 606 includes a mounting plate fixed on the main pump chamber 601, and a crankshaft rotatably passes through the mounting plate. One end of the crankshaft is connected to a fixed... The motor on the mounting plate has a connecting rod hinged to the end of the main piston rod 605. The free end of the connecting rod is rotatably sleeved on the curved part of the crankshaft. When the motor does work, it drives the crankshaft to rotate. When the crankshaft rotates, it drives the connecting rod to oscillate back and forth, thereby driving the main piston rod 605 to move back and forth. A negative pressure piston 607 is movably inserted in the secondary anti-reverse cavity 602. The secondary anti-reverse cavity 602 is connected to a vacuum accumulator 609 through a negative pressure pipe 608. When the airflow flows from the delivery pipe 5, the driving component 606 drives the main piston rod 605 to slide back and forth in the main pump cavity 601. Figure 3As shown, the differential pressure linkage valve 603 has a T-shaped structure with a T-shaped flow channel inside. The bottom of its vertical section is connected to the main pump chamber 601, and the delivery pipe 5 and the gas injection pipe 604 are connected to its two horizontal ends respectively. The free end of the gas injection pipe 604 is connected to the vacuum chamber 1. The vacuum accumulator 609 is pre-evacuated to form a container with negative pressure. It is directly connected to the secondary anti-reverse chamber 602 through the negative pressure pipe 608, which provides and maintains the required negative pressure source for the secondary anti-reverse chamber 602. The secondary anti-reverse chamber 602 is connected to the differential pressure linkage valve 603. The main pump chamber 601 is the core working chamber of the pump. The main piston rod 605 reciprocates within it, generating pressure and flow, delivering the gas in the delivery pipe 5 to the gas injection pipe 604. The opening of the differential pressure linkage valve 603... The closed state is entirely determined by the pressure difference between the main pump chamber 601 and the auxiliary anti-reverse chamber 602. When the pressure in the main pump chamber 601 is greater than that in the auxiliary anti-reverse chamber 602, the valve is closed, isolating the two chambers. When the pressure in the main pump chamber 601 is less than that in the auxiliary anti-reverse chamber 602, the valve is open, connecting the two chambers. During normal delivery, the negative pressure piston 607 blocks the connection port of the negative pressure pipe 608, maintaining the negative pressure environment of the vacuum accumulator 609. At this time, the pressure in the main pump chamber 601 is much higher than that in the auxiliary anti-reverse chamber 602. The differential pressure linkage valve 603 senses this pressure difference (the pressure in the main chamber is greater than that in the auxiliary chamber), and therefore remains closed, isolating the main pump chamber 601 and the auxiliary anti-reverse chamber 602. During the gas injection stage, the airflow in the delivery pipe 5 flows to the main pump chamber 601, and the main piston rod 60... 5. The main pump chamber 601 is compressed, and the increased chamber pressure opens the differential pressure linkage valve 603. Airflow is injected unidirectionally into the injection pipe 604. The negative pressure piston 607 is locked by the vacuum accumulator 609, blocking the passage to the secondary anti-reverse chamber 602. During the reset phase, when the main piston rod 605 retracts, the pressure in the main pump chamber 601 drops sharply, triggering the differential pressure linkage valve 603 to close instantaneously, physically isolating the injection pipe 604. The negative pressure in the secondary anti-reverse chamber 602 is released, and the gas in the delivery pipe 5 pushes the negative pressure piston 607 backward, precisely compensating for the negative pressure in the main pump chamber 601. This creates a unidirectional flow path from the delivery pipe 5 to the main pump chamber 601 and then to the injection pipe 604. As the main piston rod 605 slides back and forth, the airflow in the delivery pipe 5 is delivered to the injection pipe 604, preventing airflow from flowing into the secondary anti-reverse chamber 602. When the pump stops, the main piston rod 605 immediately stops moving, the high pressure in the main pump chamber 601 disappears instantly, and the pressure drops sharply (approaching the inlet pressure or atmospheric pressure). At this time, the auxiliary anti-reverse chamber 602, which is always connected to the vacuum accumulator 609, still maintains a stable negative pressure state. The pressure in the main pump chamber 601 instantly becomes lower than the pressure in the auxiliary anti-reverse chamber 602. The differential pressure linkage valve 603 immediately senses this reverse pressure difference (the main chamber pressure is less than the auxiliary chamber pressure) and triggers its rapid opening. After the differential pressure linkage valve 603 opens, the main pump chamber 601 and the auxiliary anti-reverse chamber 602 are directly connected through the valve. The gas will first push up the negative pressure piston 607, and the strong negative pressure in the auxiliary anti-reverse chamber 602 and the connected vacuum accumulator 609 will then be released through the opened valve.The negative pressure, instantaneously applied to the main pump chamber 601, generates a powerful suction force, drawing the airflow from within the main pump chamber 601 and rapidly drawing any residual gas into the auxiliary anti-backflow chamber 602 and the vacuum accumulator 609. This rapid suction action causes a sharp drop in pressure in the area of ​​the main pump chamber 601 near the outlet (or valve assembly), creating a localized vacuum or extremely low-pressure region, thereby preventing backflow and serving as an anti-backflow function.

[0046] In this design, the airflow flows from the intake pipe 2 into the energy-absorbing buffer tank 3, where it rubs and reflects against the porous sound-absorbing cotton and sintered cotton, continuously changing the airflow direction and thus reducing noise. At the same time, reducing the intake volume reduces gas impact, achieving the first level of deceleration. The sound-absorbing cotton layer 7 and the metal sintered cotton layer 8 achieve the second level of deceleration, the filter 4 achieves the third level of deceleration, the filter support 10 achieves the fourth level of deceleration, and the bidirectional sealing diverting valve 9 achieves the fifth level of deceleration. This design can prevent the components in the chamber from being damaged by gas shock waves. Meanwhile, the anti-backflow mechanism 6 can smoothly deliver airflow and prevent airflow backflow.

[0047] like Figure 4 As shown, the present invention discloses a further technical solution for the vacuum storage tank 609. The vacuum storage tank 609 is connected to a Roots pump 11, and a phase change cold storage layer 12 is provided on the inner wall of the vacuum storage tank 609. By connecting to the Roots pump 11, the vacuum storage tank 609 can be kept in a vacuum negative pressure state. By setting the phase change cold storage layer 12, external heat leakage or internal heat generation is offset, ensuring the temperature inside the tank is stable and further maintaining the vacuum negative pressure state inside the tank. Preferably, the phase change cold storage layer 12 is a liquid nitrogen microcapsule layer. Direct injection of liquid nitrogen into the vacuum tank will cause pressure runaway due to boiling and splashing. The microcapsules encapsulate the liquid nitrogen in a polymer / ceramic shell to avoid gas-liquid mixing and flow, ensuring safety.

[0048] like Figure 5 The specific structure of the filter 4 of the present invention is disclosed. The filter 4 includes a housing 401, inside which are two stainless steel sintered meshes 402. A sintered metal fiber layer 403 is disposed between the two stainless steel sintered meshes 402. Preferably, the housing 401 can be connected to the energy dissipation buffer tank 3 or the conveying pipe 5 by means of flanges, bolts and nuts, so that the filter 4 is detachably connected. After the airflow is reduced in noise and slowed down, it will pass through the filter 4. The filter 4 is a three-layer sandwich structure (composite filter) composed of two stainless steel sintered meshes 402 and a sintered metal fiber layer 403. The stainless steel sintered meshes 402 provide strong support and coarse or medium-efficiency filtration. The sintered metal fiber layer 403 has an extremely high specific surface area and an extremely fine pore size, achieving submicron-level high-efficiency precision filtration, ensuring that the cleanliness of the gas entering the chamber is extremely high, protecting the internal components and processes. The filter 4 not only filters and intercepts water vapor and dust in the gas, but also further slows down the gas flow rate.

[0049] like Figure 8 and Figure 12 As shown, the present invention discloses a further technical solution for the sound-absorbing cotton layer 7. The sound-absorbing cotton layer 7 consists of two layers, with a flow guide 13 disposed between the two layers. By designing the sound-absorbing cotton layer 7 as two layers and distributing the flow guide 13 between them, the double-layer design significantly improves the absorption capacity for mid-to-high frequency noise. Simultaneously, it creates a cavity between the two layers, preventing airflow from directly penetrating the center of the sound-absorbing cotton layer 7 and forming a short circuit. This forces the airflow to meander between the layers, resulting in a more uniform airflow distribution. The sound-absorbing cotton layer 7 is dispersed through the flow-guiding frame 13, which includes two ring plates 1301. Several spiral strips 1302 arranged in a ring are fixed between the two ring plates 1301. Preferably, the ring plates 1301 are fixedly connected to the inner walls of both ends of the energy-dissipating buffer tank 3. The ring plates 1301 and the spiral strips 1302 form the flow-guiding frame 13, which can not only support the two sound-absorbing cotton layers 7 and ensure that there is a cavity between them, but also provide a path for sound reflection between two adjacent spiral strips 1302, thereby ensuring that sound energy is reflected and dissipated to improve the noise reduction effect.

[0050] like Figure 8 As shown, a further technical solution for the metal sintered cotton layer 8 of the present invention is disclosed. The metal sintered cotton layer 8 includes a honeycomb backplate layer 801 disposed on the inner wall of the conical section, a sintered cotton layer 802 disposed on the honeycomb backplate layer 801, and a microporous damping layer 803 disposed on the sintered cotton layer 802. The honeycomb backplate layer 801 provides high-strength support, protecting the internal sintered cotton layer 802 from erosion or compaction by high-speed airflow. Its honeycomb structure itself also has a certain sound absorption (Helmholtz resonant cavity effect) and airflow guiding effect. The sintered cotton layer 802 is made of ceramic fiber / PDA-rGO composite cotton, which serves as the core energy dissipation and filtration layer. It utilizes the complex pore structure of the fiber to achieve efficient kinetic energy dissipation and noise reduction. The microporous damping layer 803 is made of laser-drilled microporous stainless steel plate, which is used to break the boundary layer of high-speed airflow and suppress turbulent regeneration noise. At the same time, it can also protect the sintered cotton layer 802 and withstand the first wave of impact. These three layers work together to provide extremely excellent impact resistance, energy dissipation efficiency and wide-band (especially high-frequency) noise reduction capability.

[0051] like Figure 8 and Figure 11As shown, a further technical solution for the energy dissipation buffer tank 3 of the present invention is disclosed. The energy dissipation buffer tank 3 is provided with a conduit 14 communicating with the air inlet pipe 2. A plurality of conical guide shields 15 are fixedly arranged in an array on the conduit 14. A plurality of through slots 16 are arranged in an array on the conduit 14, each corresponding to one of the conical guide shields 15. When airflow flows from the air inlet pipe 2 into the energy dissipation buffer tank 3, the airflow will flow into the conduit 14. Preferably, the end of the conical guide shield 15 with the smaller opening at the top is inserted into the conduit 14 to form a guide edge, and the airflow flows along... When the airflow flows inside the conduit 14, guided by the guide edge, some of the airflow will flow through the outer conical surface of the conical guide shroud 15, thereby guiding the airflow to better impact the sound-absorbing cotton layer 7. At the same time, the combination of the conduit 14, the conical guide shroud 15 and the through groove 16 forms a physical sound-absorbing structure, which can also disperse the airflow, diffusing the concentrated high-speed jet into multiple airflows with a wider coverage and lower speed. The conical structure can smoothly guide the gas to change direction and work with the sound-absorbing cotton layer 7 to not only play a dual sound-absorbing role, but also slow down the flow rate of the airflow and perform initial energy dissipation.

[0052] like Figure 9 and Figure 10 As shown, a further technical solution for airflow energy dissipation of the present invention is disclosed. A swirl expansion tank 17 is connected between the filter 4 and the delivery pipe 5. Several static swirl blades 18 arranged in a ring are fixed inside the swirl expansion tank 17. After the airflow passes through the energy dissipation buffer tank 3 and the filter 4, the gas pressure is still relatively high. By adding the swirl expansion tank 17 and the static swirl blades 18, the gas forced into the static swirl blades 18 generates a strong rotating flow (swirl). A low-pressure zone is formed at the center of the swirl. During the rotation, the gas converts a large amount of kinetic energy into heat energy through intense turbulent friction, centripetal acceleration and viscosity. This is another powerful energy dissipation after the energy dissipation buffer tank 3, realizing the function of secondary energy dissipation. At the same time, after passing through the swirl expansion tank 17, the flow rate and turbulence of the gas are optimized, making it enter the subsequent delivery pipe 5 and the bidirectional sealing diverting valve 9 more smoothly, improving the overall energy dissipation effect.

[0053] like Figure 10 As shown, a further technical solution of the swirl expansion tank 17 of the present invention is disclosed. The inner wall of the swirl expansion tank 17 is provided with a plurality of annularly distributed microgrooves 19. Preferably, the microgrooves 19 are straight grooves and parallel to the axial direction of the swirl expansion tank 17. Their cross-section can be rectangular or triangular. The microgrooves 19 disturb the laminar boundary layer that is close to the tank wall and promote its transformation into turbulence. This not only enhances the friction between the airflow and the wall surface and further improves the kinetic energy dissipation efficiency, but also helps to break the possible airflow resonance or whistling (aerodynamic noise) and reduce noise at a specific frequency.

[0054] like Figure 10As shown, the present invention discloses a further technical solution for the swirl expansion tank 17. Noise-reducing micropores are formed on the surface of the static swirl blades 18, and the outer surface of the swirl expansion tank 17 is covered with a sound insulation layer 20. The noise-reducing micropores formed on the surface of the static swirl blades 18 form a Helmholtz resonator or a micro-perforated plate sound-absorbing structure, which can effectively absorb the mid-to-high frequency noise generated by the swirl blades themselves or by the airflow through the blades, especially the pitch noise generated by blade vortex shedding, etc. The sound insulation layer 20 is composed of a damping material (rubber or plastic) and a metal shell (steel or aluminum alloy). The damping material suppresses the vibration of the tank wall, and the metal shell blocks the transmission of noise, thus forming a physical isolation to prevent the noise generated inside the tank from propagating outward, thereby further improving the noise reduction effect.

[0055] like Figure 6 As shown, the specific structure of the filter support 10 of the present invention is disclosed. The filter support 10 includes a sleeve 1001 disposed on the conveying pipe 5. A plurality of stainless steel filter screens 1002 are disposed inside the sleeve 1001. Preferably, the sleeve 1001 can be connected to the conveying pipe 5 by the cooperation of flanges, bolts and nuts. The design of multiple stainless steel filter screens 1002 forms a multi-layer series deceleration. The pore size of the multi-layer filter screens can gradually become finer, further improving the deceleration effect on the airflow and allowing it to flow smoothly into the vacuum chamber 1.

[0056] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A breaking device for a vacuum chamber (1), characterized in that, The breaking device comprises a gas inlet pipe (2), an energy-dissipation buffer tank (3), a filter (4), a conveying pipe (5) and a reverse-preventing mechanism (6) connected in sequence. The energy-dissipation buffer tank (3) has a straight cylinder section and a conical cylinder section connected in sequence, and the inner walls of the straight cylinder section and the conical cylinder section are respectively provided with an acoustic cotton layer (7) and a metal sintered cotton layer (8). The conveying pipe (5) has a bending part to change the flow direction of the gas, and the bending part is provided with a bidirectional sealing diversion valve (9), and the end of the conveying pipe (5) is provided with a filter screen support (10). The reverse-preventing mechanism (6) comprises a main pump cavity (601) and a secondary reverse-preventing cavity (602), and a differential pressure linkage valve (603) is arranged between the two cavities, the conveying pipe (5) is connected with the inlet end of the differential pressure linkage valve (603), the outlet end of the differential pressure linkage valve (603) is provided with a gas injection pipe (604), the gas injection pipe (604) is connected with the vacuum chamber (1), a main piston rod (605) is movably arranged in the main pump cavity (601), a driving member (606) is arranged on the main pump cavity (601) and used to drive the main piston rod (605) to reciprocate, a negative pressure piston (607) is movably arranged in the secondary reverse-preventing cavity (602), the secondary reverse-preventing cavity (602) is connected with a vacuum energy storage tank (609) through a negative pressure pipe (608), the differential pressure linkage valve (603) has a T-shaped flow channel, the vertical section of the T-shaped flow channel is connected with the main pump cavity (601), and the conveying pipe (5) and the gas injection pipe (604) are respectively connected with the two horizontal ends of the T-shaped flow channel, when the pressure of the main pump cavity (601) is greater than the pressure of the secondary reverse-preventing cavity (602), the valve is closed to isolate the two cavities, and when the pressure of the main pump cavity (601) is less than the pressure of the secondary reverse-preventing cavity (602), the valve is opened to connect the two cavities.

2. The hollowing device according to claim 1, characterized in that The vacuum energy storage tank (609) is connected with a Roots pump (11), and the inner wall of the vacuum energy storage tank (609) is provided with a phase change cold storage layer (12).

3. The hollowing device of claim 1, wherein, The filter (4) comprises a sleeve shell (401), two stainless steel sintered screens (402) are arranged in the sleeve shell (401), and a sintered metal fiber layer (403) is arranged between the two stainless steel sintered screens (402).

4. The evacuated device of claim 1, wherein, The number of the acoustic cotton layers (7) is two, and a flow guide partition (13) is arranged between the two acoustic cotton layers (7), the flow guide partition (13) comprises two ring plates (1301), and a plurality of spiral strips (1302) are fixedly arranged between the two ring plates (1301) in a ring shape.

5. The evacuated device of claim 1, wherein, The metal sintered cotton layer (8) comprises a honeycomb back plate layer (801) arranged on the inner wall of the conical cylinder section, a sintered cotton layer (802) arranged on the honeycomb back plate layer (801), and a microporous damping layer (803) arranged on the sintered cotton layer (802).

6. The evacuated device of claim 1, wherein, The energy-dissipation buffer tank (3) is provided with a guide pipe (14) connected with the gas inlet pipe (2), a plurality of conical flow guide covers (15) are fixedly arranged on the guide pipe (14) in an array, a plurality of through grooves (16) are arranged on the guide pipe (14) in an array, and the plurality of through grooves (16) correspond to the plurality of conical flow guide covers (15) one by one.

7. The evacuated device of claim 1, wherein, A cyclone expansion tank (17) is communicated between the filter (4) and the conveying pipe (5), and a plurality of annular static cyclone blades (18) are fixedly arranged in the cyclone expansion tank (17).

8. The evacuated device of claim 7, wherein, A plurality of annular micro-grooves (19) are arranged on the inner wall of the cyclone expansion tank (17).

9. The evacuated device of claim 7, wherein, A plurality of noise reduction micro-holes are arranged on the surface of the static cyclone blade (18), and the outer surface of the cyclone expansion tank (17) is covered with a sound insulation layer (20).

10. The evacuated device of claim 1, wherein, The filter screen support (10) comprises a sleeve (1001) arranged on the conveying pipe (5), and a plurality of stainless steel filter screens (1002) are arranged in the sleeve (1001).

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