Integrated piezoelectric air pump based on one-way rotating active valve
By designing an integrated piezoelectric pump with a unidirectional rotary active valve, the valve is actively controlled using a rotary drive unit and a piezoelectric vibrator. This solves the response delay and integration problems of traditional piezoelectric pumps, and achieves efficient and stable gas pumping and device integration.
Patent Information
- Application Number
- CN202511691610.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-18
- Publication Date
- 2026-01-09
AI Technical Summary
The passive check valve of traditional piezoelectric pumps cannot be controlled independently, resulting in response delay, performance being affected by changes in gas viscosity and density, and difficulty in achieving high integration in a small volume.
An integrated piezoelectric pump based on a unidirectional rotary active valve was designed. The opening and closing of the valve is actively controlled by the rotary drive unit and the piezoelectric vibrator. Combined with the sealing structure of the pump body and the valve body, efficient gas pumping is achieved.
It achieves high efficiency and stability in gas pumping, reduces energy loss, avoids oscillation and incomplete sealing, and the device is highly integrated to adapt to different working scenarios.
Smart Images

Figure CN121296436A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of valved piezoelectric pump technology, specifically relating to an integrated piezoelectric pump based on a one-way rotary active valve. Background Technology
[0002] Piezoelectric pumps are gas pumping devices based on the vibration of piezoelectric ceramics. They have advantages such as compact structure, no electromagnetic interference, extremely fast response, precise control and extremely long life. They have been widely used in precision instruments, heat dissipation of electronic devices and portable medical devices. In recent years, they have become one of the important research directions for pump researchers at home and abroad.
[0003] Traditional piezoelectric pumps often use passive check valves such as conical or stepped flow channels to achieve unidirectional flow obstruction at the inlet and outlet. These valves cannot be independently controlled, and their opening and closing characteristics depend entirely on the system flow rate and pressure, making it difficult to achieve zero-leakage sealing like active shut-off valves. Therefore, they exhibit significant response delays during use, and their performance is significantly affected by changes in gas viscosity and density. They are also prone to oscillations and incomplete sealing under low flow rates or pressure pulsations. Furthermore, currently used active valve piezoelectric pumps typically have valves that are installed separately from the pump body and require a separate control device, making it difficult to achieve high integration in a small size.
[0004] In summary, given the problems of low pumping efficiency, high energy loss, and sensitivity to gas viscosity and impurities in passive one-way valve pneumatic pumps, there is an urgent need in this field for a more proactive and efficient valved pneumatic pump. Summary of the Invention
[0005] The purpose of this invention is to solve the above-mentioned problems and to provide an integrated piezoelectric pump based on a one-way rotary active valve.
[0006] An integrated piezoelectric pump based on a one-way rotary active valve includes: a piezoelectric vibrator 1, an upper chamber of the valve body 2, a pump body 3, a sealing ring 4, a rotary drive unit 5, and a lower chamber of the valve body 6.
[0007] The upper cavity 2 and lower cavity 6 of the valve body are sealed and fixedly connected, with the pump body 3 connected to the middle shaft between them;
[0008] The upper and lower end faces of the pump body 3 are in contact with the upper cavity 2 and the lower cavity 6 of the valve body;
[0009] The valve body upper cavity 2 is provided with a main air inlet 20, which is an annular through hole;
[0010] The valve body lower cavity 6 is provided with a valve body air outlet 61a at the bottom;
[0011] The pump body 3 is provided with a main pump body auxiliary air inlet 34 at the top and a main pump body 31 at the bottom;
[0012] The piezoelectric vibrator 1 is sealed and fixedly connected to the main pump body 31 to form a pump chamber 31a. The bottom of the pump chamber 31a is provided with an air outlet 32b, which has the same shape as the air outlet 61a of the valve body.
[0013] The auxiliary air inlet 34 of the main pump body is an annular through hole, which communicates with the pump chamber 31a inward;
[0014] The rotary drive unit 5 is located on the side of the main pump body 31 and can drive the pump body 3 to rotate relative to the upper chamber 2 and the lower chamber 6 of the valve body.
[0015] When rotating, the auxiliary air inlet 34 of the upper main pump body and the main air inlet valve 20 can overlap and connect, and the air outlet 32b of the lower part and the air outlet 61a of the valve body can overlap and connect, with the upper and lower parts alternately connected;
[0016] The rotary drive unit 5 includes a piezoelectric drive foot 50 and a drive tooth 51;
[0017] The piezoelectric drive foot 50 includes a rotating piezoelectric vibrator 52, and a crossing foot 53 and a supporting foot 54 located on both sides of the rotating piezoelectric vibrator 52.
[0018] The extended lines of the spanning foot 53 and the supporting foot 54 intersect at the center point of the lower cavity 6 of the valve body;
[0019] The aforementioned straddle foot 53 has an arc-shaped sliding structure 53a on one side and a straight driving structure 53b on the other side;
[0020] A large annular support structure 54a is provided at the lower end of the support foot 54;
[0021] The drive teeth 51 are evenly arranged inside the lower cavity wall 62 of the lower cavity 6 of the valve body, with one side being an arc-shaped tooth surface 51a and the other side being a straight tooth surface 51b, and both facing the same direction.
[0022] The arc-shaped tooth surface 51a is opposite to the arc-shaped sliding structure 53a.
[0023] The straight-face drive structure 53b is initially in close contact with the straight tooth surface 51b.
[0024] When the rotating piezoelectric vibrator 52 vibrates outward, the straddle foot 53 and the supporting foot 54 open outward;
[0025] The bottom plate 60 of the lower cavity 6 of the valve body is provided with an annular groove 64, and a one-way micro-damping structure 65 is provided in the annular groove 64.
[0026] When the pump body 3 rotates counterclockwise relative to the lower chamber 6 of the valve body, the unidirectional micro-damping structure 65 generates a damping force. ;
[0027] During the opening process, the arc-shaped sliding structure 53a gradually comes into contact with the next arc-shaped tooth surface 51a, and the two slide relative to each other, generating a counterclockwise contact force. Contact force Less than the damping force ;
[0028] The vertex of the arc-shaped tooth surface 51a is slightly higher than the movement trajectory of the crossing foot 53. After the crossing is completed, the straight driving structure 53b and the straight tooth surface 51b of the next driving tooth 51 overlap.
[0029] During the opening process of the supporting foot 54, the large annular supporting structure 54a remains in contact at the apex of the arc-shaped toothed surface 51a, and the two slide relative to each other, generating a clockwise contact force. ;
[0030] Contact force Less than contact force The resultant contact force after the two cancel each other out Much smaller than the damping force Therefore, the pump body 3 does not rotate during the outward vibration phase of the rotating piezoelectric vibrator 52;
[0031] When the rotating piezoelectric vibrator 52 vibrates inward, the straddle foot 53 and the supporting foot 54 retract inward.
[0032] The straight-face drive structure 53b abuts against the straight tooth surface 51b, driving the pump body 3 to rotate;
[0033] The pump body 3 can rotate intermittently relative to the lower chamber 6 of the valve body, and the mechanism is in a steady state during the intermittent phase, during which gas can be pumped in or pumped out.
[0034] When the valve body air outlet 61a and air outlet 32b are connected, the piezoelectric vibrator 1 vibrates downward to realize air outlet of pump chamber 31a;
[0035] When the main air intake valve port 20 and the auxiliary air intake port 34 of the main pump body are connected, the corresponding piezoelectric vibrator 1 vibrates upward, realizing the intake of air into the pump chamber 31a.
[0036] The drive tooth 51 can be fixed to the side of the pump body 3, and the piezoelectric drive foot 50 can be fixed to the inside of the lower cavity wall 62. The same driving effect can still be achieved after the positions of the two are interchanged.
[0037] The lower cavity 6 of the valve body is provided with a transition air chamber 60a, which is connected upward to the auxiliary air inlet 34 of the main pump body and inward to the pump cavity 31a;
[0038] When the rotating piezoelectric vibrator 52 vibrates inward, it generates a low-pressure zone, allowing more gas to enter the transition gas chamber 60a, with the amount of gas entering each time being greater than the amount of gas exiting.
[0039] The valve body vent 61a is provided with a strip-shaped one-way valve plate 61c on the outside.
[0040] During the beginning and end of the air intake phase, the internal pressure of the pump chamber 31a decreases, and the one-way valve plate 61c tightly seals the air outlet 61a of the valve body. During this phase, gas can be drawn in from the transition chamber 60a as a transition.
[0041] The one-way valve plate 61c can bend outward under the impact of airflow, so that the air outlet 61a of the valve body is open.
[0042] The piezoelectric vibrator 1 vibrates vertically, and the rotating piezoelectric vibrator 52 vibrates internally and externally. Both have a period of T, but their phases differ. ;
[0043] The pump body 3 stops during the first half of the cycle and rotates during the second half. The intermittent rotation angle within each cycle T is α. It is an integer;
[0044] The auxiliary air inlets 34 of the main pump body are evenly distributed in m groups in a ring from the inside out, with the pump body 3 axis as the center. Each group 1, total indivual;
[0045] The auxiliary air inlets 34 of the main pump body are all annular through holes with an included angle β;
[0046] The main air intake valve port 20 is arranged in m groups from the inside out, corresponding to the auxiliary air intake port 34 of the main pump body. Each group 1, total indivual;
[0047] The main air intake valve port 20 is all angled. The annular through holes are evenly arranged at intervals of 3β.
[0048] If the vertical projection position of the auxiliary air inlet 34 of the main pump body is located inside the main pump body 31 when it is arranged, a chamber connection hole 31f needs to be added.
[0049] The valve body vent 61a is evenly arranged in a ring around the axis of the pump body 3. indivual;
[0050] The valve body vent 61a and the main intake valve 20 are arranged at different angles. The arrangement is the same.
[0051] A sealing structure and a drag-reducing structure are provided between the upper cavity 2 of the valve body and the pump body 3;
[0052] The main pump body auxiliary air inlet 34 includes an inner pump body auxiliary air inlet hole I 34a and an outer pump body auxiliary air inlet hole II 34b.
[0053] Pump body sealing bosses 35 are provided on both sides of the pump body auxiliary air inlet I 34a and pump body auxiliary air inlet II 34b, forming two sets of sealing structures;
[0054] The sealing structures, consisting of pump body sealing bosses 35, are evenly spaced between each group of sealing structures. A drag-reducing groove and a lubricating medium storage chamber 30c are provided between the two sets of sealing structures to store the lubricating medium;
[0055] The main air intake valve port 20 includes an inner air intake valve port I 20a and an outer air intake valve port II 20b;
[0056] Both sides of the air inlet valve port I 20a and a set of air inlet valve ports II 20b are provided with cavity sealing grooves 24;
[0057] The pump body sealing boss 35 and the cavity sealing groove 24 correspond one-to-one to prevent gas leakage.
[0058] The main pump body 31 has a unidirectional air intake structure 33 arranged in parallel and uniformly on the outer side.
[0059] The pump chamber unidirectional air intake structure 33 is composed of intersecting air intake cone unit I 33a and air intake cone unit II 33c. The intersection is connected to the pump chamber 31a inward through the pump chamber air intake port 33b.
[0060] The piezoelectric vibrator 1 is composed of a circular piezoelectric ceramic 10 and a piezoelectric elastic substrate 11 bonded together.
[0061] The inner and outer sides of the rotating piezoelectric vibrator 52 may be respectively provided with rotating driving piezoelectric ceramic I 52b and rotating driving piezoelectric ceramic II 52c;
[0062] The rotating piezoelectric vibrator 52 may also only have a rotating drive piezoelectric ceramic I 52b. In this case, the span of the piezoelectric drive foot 50 is reduced, and the spacing of the drive teeth 51 is reduced.
[0063] Another objective of this invention is to provide an integrated piezoelectric pump installation method based on a one-way rotary active valve.
[0064] An installation method for an integrated piezoelectric pump based on a one-way rotary active valve, comprising the following steps:
[0065] The piezoelectric vibrator 52 of the piezoelectric drive foot 50 in the rotary drive unit 5 is fixed at both ends on the drive base plate fixing groove 31d on the drive foot fixed top boss 31c on the curved side of the main pump body 31, and the piezoelectric vibrator 1 is bonded to the elastic base plate mounting groove 31b.
[0066] Place the bonded pump body 3 into the lower cavity 6 of the valve body. The lower cavity rotating slider mounting groove 32a of the pump body 3 should be aligned with the lower cavity rotating slider 61b. Rotate the pump body 3 so that the lower cavity rotating slider 61b enters the rotating guide rail II 32c. Insert the sealing ring 4 into the sealing ring placement groove II 62a.
[0067] Rotate the pump body again to the attached 3 Figure 8 The position is such that the drive tooth 51 and the straddle foot 53 are in direct contact.
[0068] Align the upper cover rotating slider 23 with the upper cover rotating slider mounting groove 30d, place the upper cavity 2 of the valve body, and rotate it so that the upper cover rotating slider 23 enters the rotating guide rail Ⅰ30e;
[0069] Rotate the upper cavity 2 of the valve body again to align and fix the valve body fixing part I 22 and the valve body fixing part II 63;
[0070] If the drive gear 51 and the cross foot 53 are not in close contact, there will be an initial empty stroke. Work can begin after the pump body air output stabilizes.
[0071] This invention provides an integrated piezoelectric pump based on a unidirectional rotary active valve, belonging to the technical field of valved piezoelectric pumps. It includes a piezoelectric vibrator, an upper valve body chamber, a pump body, a sealing ring, a rotary drive unit, and a lower valve body chamber. The piezoelectric vibrator is sealed and fixedly connected to the pump body to form a pump chamber. The pump chamber communicates upwards with the auxiliary air inlet of the main pump body and downwards with the air outlet. The upper and lower valve body chambers are sealed and fixedly connected, with the pump body axially connected between them. The upper valve body chamber has a main air inlet valve, and the lower valve body chamber has a valve body air outlet. The rotary drive unit can drive the pump body to rotate relative to the lower valve body chamber. During rotation, the main pump body auxiliary air inlet and the main air inlet valve can overlap and communicate, and the lower air outlet and the valve body air outlet can overlap and communicate, with the upper and lower parts alternately communicating. A damping structure is provided between the pump body and the lower valve body chamber. The rotary drive unit includes an asymmetrical piezoelectric drive foot fixedly connected to the pump body and drive teeth fixedly connected to the inner wall of the lower valve body chamber.
[0072] In summary, the beneficial effects of the technical solution adopted in this invention compared with the prior art are as follows:
[0073] 1. The present invention is equipped with a rotary inlet and outlet active valve that can actively respond, and the pump body inlet is provided with an air intake conical unit flow channel (for cut-off compensation and to improve the cut-off effect); during operation, the rotary drive unit, in conjunction with the piezoelectric vibrator vibration cycle, drives the inlet and outlet valve to actively open and close, thereby achieving efficient gas pumping and reducing the energy loss of the air pump.
[0074] 2. In this invention, the pump body moves intermittently, and can stop rotating relative to the lower chamber of the valve body during the gas output phase, keeping the outlet fully open. This avoids instability in the gas output caused by changes in the pump body outlet, thus achieving stable gas pumping. Furthermore, the pump body outlet is equipped with a one-way valve plate to further limit gas backflow.
[0075] 3. In the device of the present invention, the rotary active valve is highly integrated with the pump body. The opening and closing of the active valve is coupled with the vibration frequency of the piezoelectric vibrator. Furthermore, the opening and closing of the inlet valve and the outlet valve use the same driving source and motion form, avoiding complex control programs and realizing a highly integrated piezoelectric pump.
[0076] 4. The device of the present invention can adjust the rotation speed of the active valve and the number of inlets and outlets of the air pump according to the working scenario, so as to achieve high versatility of the pneumatic electric pump. Attached Figure Description
[0077] Figure 1 This is an exploded view of the overall structure of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0078] Figure 2 This is a schematic diagram of the upper cavity structure of the valve body of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0079] Figure 3 This is a schematic diagram of the pump body of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0080] Figure 4 This is a schematic diagram of the pump body structure of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0081] Figure 5 This is a schematic diagram of the unidirectional air intake structure of the pump chamber of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0082] Figure 6 This is a schematic diagram of the rotary drive unit structure of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0083] Figure 7 This is a schematic diagram of the lower chamber structure of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0084] Figure 8 This is a schematic diagram of the pump body rotation principle of an integrated piezoelectric pump based on a one-way rotary active valve according to the present invention.
[0085] Figure 9 This is a schematic diagram illustrating the working principle of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0086] Figure 10This is a schematic diagram showing the angles of the upper chamber of the valve body, the lower chamber of the valve body, and the pump body during operation of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0087] Figure 11 This is a schematic diagram illustrating the deformation cycle coupling principle of the piezoelectric vibrator and the piezoelectric drive foot during operation of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0088] Figure 12 This is a detailed schematic diagram of Embodiment 2 of the integrated piezoelectric pump based on a unidirectional rotary active valve of the present invention;
[0089] Figure 13 This is a schematic diagram of multiple drive teeth in Embodiment 3 of an integrated piezoelectric pump based on a unidirectional rotary active valve according to the present invention.
[0090] In the attached diagram:
[0091] 1. Piezoelectric vibrator; 10. Piezoelectric ceramic for air pump; 11. Elastic substrate for air pump;
[0092] 2. Upper cavity of valve body; 20. Main air inlet valve port; 20a. Air inlet valve port I; 20b. Air inlet valve port II; 21. Piezoelectric vibrator mounting port; 22. Valve body fixing part I; 22a. Fixing hole I; 23. Top cover rotating slider; 24. Cavity sealing groove; 24a. Sealing groove I; 24b. Sealing groove II; 24c. Sealing groove III; 24d. Sealing groove IV; 25. Sealing ring placement groove I;
[0093] 3. Pump body; 30. Auxiliary air inlet cover; 30a. Drag reduction groove I; 30b. Drag reduction groove II; 30c. Lubricating medium storage chamber; 30d. Upper cover rotating slider mounting groove; 30e. Rotary guide rail I; 31. Main pump body; 31a. Pump chamber; 31b. Elastic base plate mounting groove; 31c. Drive foot fixed boss; 31d. Drive base plate fixing groove; 31e. Connecting air inlet; 31f. Chamber connecting hole; 32. Air outlet chamber; 32a. Lower chamber rotating slider mounting groove; 32b. Air outlet. 32c. Rotary guide rail II; 33. Pump chamber unidirectional air intake structure; 33a. Air intake cone unit I; 33b. Pump chamber air inlet; 33c. Air intake cone unit II; 33d. Pump body air inlet I; 33e. Pump body air inlet II; 34. Main pump body auxiliary air inlet; 34a. Pump body auxiliary air inlet I; 34b. Pump body auxiliary air inlet II; 35. Pump body sealing boss; 35a. Sealing boss I; 35b. Sealing boss II; 35c. Sealing boss III; 35d. Sealing boss IV;
[0094] 4. Sealing ring;
[0095] 5. Rotary drive unit; 50. Piezoelectric drive foot; 51. Drive tooth; 51a. Arc-shaped tooth surface; 51b. Straight tooth surface; 52. Rotary piezoelectric vibrator; 52a. Rotary elastic substrate; 52b. Rotary drive piezoelectric ceramic I; 52c. Rotary drive piezoelectric ceramic II; 53. Crossing foot; 53a. Arc-shaped sliding structure; 53b. Straight drive structure; 54. Support foot; 54a. Large ring support structure;
[0096] 6. Lower chamber of valve body; 60. Base plate; 60a. Transition air chamber; 61. Air outlet structure of valve body; 61a. Air outlet of valve body; 61b. Rotary slider of lower chamber; 61c. One-way valve plate; 62. Lower chamber wall; 62a. Sealing ring placement groove II; 63. Valve body fixing part II; 63a. Fixing hole II; 64. Annular groove; 65. One-way micro-damping structure. Detailed Implementation
[0097] Example 1: An integrated piezoelectric pump based on a one-way rotary active valve
[0098] An integrated piezoelectric pump based on a one-way rotary active valve includes: a piezoelectric vibrator 1, an upper chamber of the valve body 2, a pump body 3, a sealing ring 4, a rotary drive unit 5, and a lower chamber of the valve body 6.
[0099] The upper cavity 2 and lower cavity 6 of the valve body are sealed and fixedly connected, with the pump body 3 connected to the middle shaft between them;
[0100] The upper and lower end faces of the pump body 3 are in contact with the upper cavity 2 and the lower cavity 6 of the valve body;
[0101] The valve body upper cavity 2 is a cylindrical chamber with a main air inlet valve 20 on its top surface, a circular piezoelectric vibrator mounting port 21 in the center, three upper cover rotating sliders 23 evenly distributed on the inner wall, three valve body fixing parts I 22 evenly distributed on the outer wall, and a sealing ring placement groove I 25 at the bottom.
[0102] The main air intake valve port 20 is divided into two groups, inner and outer, namely the inner air intake valve port I 20a and the outer air intake valve port II 20b, which are evenly distributed in a ring around the axis of the upper cavity 2 of the valve body.
[0103] The inner air intake valve port Ⅰ20a and the outer air intake valve port Ⅱ20b are arranged opposite each other. Both are annular vertical through holes with an included angle of 15°, and are arranged one at a distance of 30°, that is, there are 12 of each.
[0104] The upper cover rotating slider 23 is an annular block with a dovetail-shaped cross-section;
[0105] The valve body fixing part I22 is provided with a circular fixing hole I22a in the middle;
[0106] The sealing ring placement groove I25 is a dovetail-shaped annular groove;
[0107] The lower chamber 6 of the valve body is a cylindrical chamber, including a bottom plate 60, a lower chamber wall 62, and a valve body fixing part II 63;
[0108] The base plate 60 is provided with a valve body air outlet structure 61 and an annular groove 64;
[0109] The valve body vent structure 61 is columnar and located at the center of the base plate 60. It has 12 valve body vent holes 61a evenly distributed on the top, 3 lower chamber rotating sliders 61b evenly distributed on the side, and a one-way valve plate 61c at the bottom.
[0110] The valve body air outlet 61a are all vertical through holes, with the same shape as the air outlet 32b, totaling 12, which are evenly distributed in a ring around the axis of the lower cavity 6 of the valve body. After fixing, the arrangement angle is 15° different from that of the air inlet valve port I20a.
[0111] Unidirectional micro-damping structures 65 are evenly distributed within the annular groove 64.
[0112] The unidirectional micro-damping structure 65 is a convex tip that bends toward the rotation direction of the pump body 3;
[0113] The lower cavity rotating slider 61b is an annular block with a dovetail-shaped cross-section;
[0114] The lower cavity wall 62 is provided with a sealing ring placement groove II 62a at the top, which is a dovetail-shaped annular groove;
[0115] The valve body fixing parts II 63 are evenly distributed on the outer side of the lower cavity wall 62, totaling 3, with a fixing hole II 63a in the middle;
[0116] After the lower cavity 6 and the upper cavity 2 of the valve body are fixed, the valve body fixing part II 63 is in close contact with the valve body fixing part I 22, the fixing hole I 22a and the fixing hole II 63a are aligned, and the sealing ring 4 is located in the sealing ring placement groove II 62a and the sealing ring placement groove I 25.
[0117] The one-way valve plate 61c is a rectangular thin plate with an area larger than the air outlet 61a. Its outer root is fixed to the bottom of the lower cavity 6 of the valve body and can be bent outward to open.
[0118] The pump body 3 is provided with an auxiliary air inlet cover 30 on the upper part and a main pump body 31 on the lower part;
[0119] The piezoelectric vibrator 1 is sealed and fixedly connected to the main pump body 31 to form a pump cavity 31a;
[0120] The auxiliary air intake cover 30 is in the shape of a ring and is fixed to the top of the main pump body 31. The top surface is provided with the main pump body auxiliary air intake 34, the inner ring is provided with the elastic base plate mounting groove 31b, and the outer wall is provided with the rotating guide rail I 30e.
[0121] The main pump body auxiliary air inlet 34 is divided into two groups, inner and outer, namely the inner pump body auxiliary air inlet I 34a and the outer pump body auxiliary air inlet II 34b, which are evenly distributed in a ring around the axis of the pump body 3.
[0122] The inner pump body auxiliary air inlet I 34a and the outer pump body auxiliary air inlet II 34b are staggered, and both are annular vertical through holes with an included angle of 5°, and are set one at a distance of 60°, that is, there are 6 of each.
[0123] The rotary guide rail Ⅰ30e is a dovetail-shaped annular groove, through which the auxiliary air intake cover 30 slides in cooperation with the upper cover rotary slider 23; for installation purposes, three upper cover rotary slider mounting slots 30d that are evenly distributed on the auxiliary air intake cover 30 and communicate with the rotary guide rail Ⅰ30e are provided.
[0124] The upper cover rotating slider 23 can slide within the rotating guide rail I 30e;
[0125] The main pump body 31 is a hexagonal prism with alternating concave curved surfaces and straight surfaces. It has a cylindrical pump chamber 31a in the middle and an air outlet chamber 32 at the bottom. Three sets of pump chamber unidirectional air inlet structures 33 are provided on the three straight sides of the main pump body 31.
[0126] The air outlet chamber 32 is a cylindrical chamber with an opening at the bottom, and 12 air outlet holes 32b are evenly distributed on its surface. The side wall is provided with a rotating guide rail II 32c.
[0127] The air outlet 32b is an annular vertical through hole with an included angle of 5°, and is set at 30° intervals, for a total of 12 holes. It is distributed in correspondence with the auxiliary air inlet 34 of the main pump body and is connected to the pump chamber 31a inward.
[0128] The rotary guide rail II 32c is a dovetail-shaped annular groove, and three lower cavity rotary slider mounting slots 32a, which are evenly distributed at the lower end of the air outlet chamber 32 and communicate with the rotary guide rail II 32c, are provided.
[0129] The lower cavity rotating slider mounting groove 32a is an alternating arrangement of an annular groove and an upper cover rotating slider mounting groove 30d;
[0130] The lower cavity rotating slider 61b can slide within the rotating guide rail II 32c;
[0131] The rotary drive unit 5 is located on the curved side of the main pump body 31, which can drive the pump body 3 to rotate relative to the upper cavity 2 and the lower cavity 6 of the valve body.
[0132] When rotating, the auxiliary air inlet 34 of the upper main pump body and the main air inlet valve 20 can overlap and connect, and the air outlet 32b of the lower part and the air outlet 61a of the valve body can overlap and connect, with the upper and lower parts alternately connected;
[0133] The rotary drive unit 5 includes a piezoelectric drive foot 50 and a drive tooth 51;
[0134] The piezoelectric drive foot 50 includes a rotating piezoelectric vibrator 52, and a crossing foot 53 and a supporting foot 54 located at both ends of the rotating piezoelectric vibrator 52;
[0135] The rotating piezoelectric vibrator 52 includes a rotating elastic substrate 52a, a rotating driving piezoelectric ceramic I 52b, and a rotating driving piezoelectric ceramic II 52c.
[0136] Rectangular rotary-driven piezoelectric ceramic I 52b and rotary-driven piezoelectric ceramic II 52c are respectively bonded to the inner and outer sides of the rotary elastic substrate 52a.
[0137] The extended lines of the spanning foot 53 and the supporting foot 54 intersect at the center point of the lower cavity 6 of the valve body;
[0138] The aforementioned straddle foot 53 has an arc-shaped sliding structure 53a on one side and a straight driving structure 53b on the other side;
[0139] A large annular support structure 54a is provided at the lower end of the support foot 54;
[0140] The drive teeth 51 are evenly arranged inside the lower cavity wall 62 of the lower cavity 6 of the valve body, with one side being an arc-shaped tooth surface 51a and the other side being a straight tooth surface 51b, and both facing the same direction.
[0141] The arc-shaped tooth surface 51a is opposite to the arc-shaped sliding structure 53a.
[0142] The pump body 3, the lower chamber of the valve body 6 and the rotary drive unit 5 are assembled to form 6 transition air chambers 60a. A connecting air inlet 31e is provided between each pair of transition air chambers 60a on the main pump body 31.
[0143] The transition air chamber 60a is connected upward to the auxiliary air inlet 34 of the main pump body, and is connected inward to the pump chamber 31a through the pump chamber one-way air inlet structure 33;
[0144] The pump chamber unidirectional air intake structure 33 is composed of intersecting air intake cone unit I 33a and air intake cone unit II 33c. The intersection is connected to the pump chamber 31a inward through the pump chamber air intake port 33b. The air intake cone unit conducts gas inward and cuts off gas outward.
[0145] The pump chamber unidirectional air inlet structure 33 is provided with a pump body air inlet I 33d and a pump body air inlet II 33e at its outer end, which are connected to the transition air chamber 60a;
[0146] When the rotating piezoelectric vibrator 52 vibrates inward, it generates a low-pressure zone, allowing gas to enter the transition chamber 60a. Each time, the amount of gas stored in the transition chamber is greater than the amount of gas discharged. After each cycle, the transition chamber 60a will have residual gas, which can be used as a transition at the beginning and end of the next gas intake.
[0147] During use, the piezoelectric vibrator 1 vibrates vertically, and the rotating piezoelectric vibrator 52 vibrates internally and externally. Both vibration periods are T, but their vibration phases differ by a certain amount. ;
[0148] The pump body 3 front Stop, then The rotation is intermittent, with an angle of 30° within each cycle T.
[0149] The straight-face drive structure 53b is initially in close contact with the straight tooth surface 51b;
[0150] When the rotating piezoelectric vibrator 52 vibrates outward, the straddle foot 53 and the supporting foot 54 open outward;
[0151] When the pump body 3 rotates counterclockwise relative to the lower chamber 6 of the valve body, the unidirectional micro-damping structure 65 generates a damping force. ;
[0152] During the opening process, the arc-shaped sliding structure 53a gradually comes into contact with the next arc-shaped tooth surface 51a, and the two slide relative to each other, generating a counterclockwise contact force. Contact force Less than the damping force ;
[0153] The vertex of the arc-shaped tooth surface 51a is slightly higher than the movement trajectory of the crossing foot 53. After the crossing is completed, the straight driving structure 53b and the straight tooth surface 51b of the next driving tooth 51 overlap.
[0154] During the opening process of the supporting foot 54, the large annular supporting structure 54a remains in contact at the apex of the arc-shaped toothed surface 51a, and the two slide relative to each other, generating a clockwise contact force. ;
[0155] Contact force Less than contact force Even after the two forces cancel each other out, the resultant contact force still acts on pump body 3 in a clockwise direction. Contact resultant force Much smaller than the damping force Therefore, the pump body 3 does not rotate during the outward vibration phase of the rotating piezoelectric vibrator 52;
[0156] When the rotating piezoelectric vibrator 52 vibrates inward, the straddle foot 53 and the supporting foot 54 retract inward.
[0157] The straight-face drive structure 53b abuts against the straight tooth surface 51b, driving the pump body 3 to rotate 30°;
[0158] See appendix Figure 9The pump body 3 rotates intermittently relative to the lower chamber 6 of the valve body, and the mechanism is in a steady state during the intermittent phase. During this phase, gas can be pumped out. When the valve body outlet 61a and outlet 32b are fully connected, the piezoelectric vibrator 1 vibrates downward, and the one-way valve plate 61c bends outward under the impact of the airflow, so that the valve body outlet 61a is connected to the outside, and gas is discharged from the pump chamber 31a.
[0159] Subsequently, the main air intake valve port 20 and the auxiliary air intake port 34 of the main pump body gradually connect, and the corresponding piezoelectric vibrator 1 vibrates upward to realize the intake of air into the pump chamber 31a.
[0160] During the beginning and end of the air intake phase, the internal pressure of the pump chamber 31a decreases, and the one-way valve plate 61c tightly seals the air outlet 61a of the valve body. During this phase, gas can be drawn in from the transition chamber 60a as a transition.
[0161] A gas sealing structure and a drag reduction structure are provided between the upper cavity 2 of the valve body and the pump body 3;
[0162] Pump body sealing bosses 35 are provided on both sides of the pump body auxiliary air inlet I 34a and pump body auxiliary air inlet II 34b, forming two sets of sealing structures;
[0163] The pump body sealing bosses 35, from the outside to the inside, are sealing boss I 35a, sealing boss II 35b, sealing boss III 35c, and sealing boss IV 35d, all of which are annular bosses;
[0164] Six drag-reducing grooves I30a and II30b are uniformly arranged on the plane between sealing boss I35a and sealing boss II35b and between sealing boss III35c and sealing boss IV35d, respectively, to reduce the frictional contact area between the upper cavity 2 of the valve body and the pump body 3.
[0165] A lubricating medium storage cavity 30c is provided between the sealing boss II 35b and the sealing boss III 35c, which can store the lubricating medium and reduce drag.
[0166] Both sides of the air inlet valve port I 20a and a set of air inlet valve ports II 20b are respectively provided with cavity sealing grooves 24;
[0167] The cavity sealing grooves 24, from the inside out, are sealing groove I 24a, sealing groove II 24b, sealing groove III 24c and sealing groove IV 24d, all of which are annular groove structures;
[0168] The pump body sealing boss 35 and the cavity sealing groove 24 correspond one-to-one, with the top surface and side surface in contact, which can prevent gas leakage.
[0169] The piezoelectric vibrator 1 is composed of a circular piezoelectric ceramic 10 and a piezoelectric elastic substrate 11 bonded together.
[0170] Example 2:
[0171] See appendix Figure 9 In some embodiments, the structure of the pump body 3 is changed, and the number of auxiliary air inlets 34 and valve body outlets 61a of the main pump body is set to six, the number of auxiliary air inlets I 34a and auxiliary air inlets II 34b of the pump body are both three, and they are arranged alternately; the number of main air inlets 20 is 12, and the number of valve body outlets 61a is 6, thereby achieving an air inlet and outlet interval of 60°. At this time, the number of drive teeth 51 is 12, and the straddle foot 53 straddles one drive tooth 51 each time.
[0172] Example 3:
[0173] See appendix Figure 10 In some embodiments, increasing the number of drive teeth 51 can meet the needs of different air intake and exhaust intervals. The number of drive teeth 51 is 48. By replacing the piezoelectric ceramics with different amplitudes, the span foot 53 can span different numbers of drive teeth 51, thereby achieving variable angle spans between angles such as 15°, 30°, 45°, and 60°.
[0174] Example 4:
[0175] In some embodiments, the auxiliary air inlet 34 of the main pump body can be arranged in a single group or in multiple groups. Taking the auxiliary air inlet 34 of the main pump body in Embodiment 1 as an example, it can be arranged in a single group of 12; or in 3 groups of 4; or in 4 groups of 3; and so on. It can be flexibly arranged from the inside to the outside according to the size of the auxiliary air inlet cover 30. When the vertical projection position of the auxiliary air inlet 34 of the main pump body is inside the main pump body 31, it is necessary to add a chamber connection hole 31f.
[0176] Example 5:
[0177] In some embodiments, the shape of the main pump body 31 can be changed to other 2k-sided prisms, with k piezoelectric drive feet 50 fixedly connected; a quadrilateral prism can be used, with 2 piezoelectric drive feet 50 fixedly connected; or an octagonal prism can be used, with 4 piezoelectric drive feet 50 fixedly connected. It has been verified that the larger k is, the smoother the rotation of the pump body 3 will be, but at the same time the requirements for the consistency of the vibration of the piezoelectric ceramic will also be higher.
[0178] Example 6:
[0179] In some embodiments, the drive tooth 51 can be fixed to the side of the pump body 3, and the piezoelectric drive foot 50 can be fixed to the inner side of the lower cavity wall 62. The same driving effect can still be achieved after the positions of the two are interchanged.
[0180] In summary, this invention provides an integrated piezoelectric pump based on a unidirectional rotary active valve. It utilizes the up-and-down vibration of the piezoelectric vibrator 1 to change the volume of the pump chamber 31a, causing the volume of the pump chamber 31a to change periodically. The asymmetrical piezoelectric drive foot 50 and drive tooth 51 achieve intermittent steady-state rotation of the pump body, thereby realizing the periodic active opening and closing of the inlet and outlet valves. The volume change cycle of the pump chamber 31a is coupled with the valve opening cycle, achieving adaptive coordination between the pump and the active valve. The number of inlet and outlet ports can be increased to improve fluid pumping efficiency and flexibly adjust the pumping cycle.
[0181] This invention discloses an integrated piezoelectric pump based on a one-way rotary active valve, the installation method of which is as follows:
[0182] The piezoelectric vibrator 52 of the piezoelectric drive foot 50 in the rotary drive unit 5 is fixed at both ends on the drive base plate fixing groove 31d on the drive foot fixed top boss 31c on the curved side of the main pump body 31, and the piezoelectric vibrator 1 is bonded to the elastic base plate mounting groove 31b.
[0183] Place the bonded pump body 3 into the lower cavity 6 of the valve body. The lower cavity rotating slider mounting groove 32a of the pump body 3 should be aligned with the lower cavity rotating slider 61b. Rotate the pump body 3 so that the lower cavity rotating slider 61b enters the rotating guide rail II 32c. Insert the sealing ring 4 into the sealing ring placement groove II 62a.
[0184] Rotate the pump body again to the attached 3 Figure 8 The position is such that the drive tooth 51 and the straddle foot 53 are in direct contact.
[0185] Align the upper cover rotating slider 23 with the upper cover rotating slider mounting groove 30d, place the upper cavity 2 of the valve body, and rotate it so that the upper cover rotating slider 23 enters the rotating guide rail Ⅰ30e;
[0186] Rotate the upper cavity 2 of the valve body again to align and fix the valve body fixing part I 22 and the valve body fixing part II 63;
[0187] If the drive gear 51 and the cross foot 53 are not in close contact, there will be an initial empty stroke. Work can begin after the pump body air output stabilizes.
[0188] This invention discloses an integrated piezoelectric pump based on a one-way rotary active valve, the materials used and the manufacturing method of which are as follows:
[0189] The upper chamber 2 of the valve body, the pump body 3, and the lower chamber 6 of the valve body can preferably be made of engineering plastics or special polymers (PEEK, PTFE, PMMA, etc.). These materials have advantages such as low cost, light weight, good chemical inertness, and vibration and noise reduction. In addition, ceramic materials can also be used as needed.
[0190] The upper cavity 2 of the valve body, the pump body 3, and the lower cavity 6 of the valve body can be manufactured by injection molding;
[0191] The piezoelectric driven foot 50 is made of rigid materials, such as stainless steel (314, 306), which have advantages such as high strength, high rigidity and long fatigue life. The piezoelectric driven foot 50 has a relatively complex three-dimensional structure and can be integrally formed by selective laser melting (SLM) technology.
[0192] The drive gear 51 can be injection molded from nylon or polymer (PEEK, PTFE, etc.).
Claims
1. An integrated piezoelectric pump based on a unidirectional rotary active valve, comprising: Piezoelectric vibrator (1), upper chamber of valve body (2), pump body (3), sealing ring (4), rotary drive unit (5), lower chamber of valve body (6); The upper chamber (2) and the lower chamber (6) of the valve body are sealed and fixed together, and the pump body (3) is connected to the middle shaft between them. The upper and lower end faces of the pump body (3) are in contact with the upper cavity (2) and lower cavity (6) of the valve body; The top of the upper cavity (2) of the valve body is provided with a main air inlet (20), which is an annular through hole; The bottom of the lower chamber (6) is provided with a valve body vent (61a); The pump body (3) has an auxiliary air inlet (34) at the top and a main pump body (31) at the bottom. The piezoelectric vibrator (1) is sealed and fixed to the main pump body (31) to form a pump chamber (31a). The bottom of the pump chamber (31a) is provided with an air outlet (32b), and the air outlet (32b) has the same shape as the air outlet (61a) of the valve body. The auxiliary air inlet (34) of the main pump body is an annular through hole that communicates with the pump chamber (31a) inward; The rotary drive unit (5) is located on the side of the main pump body (31) and drives the pump body (3) to rotate relative to the upper chamber (2) and lower chamber (6) of the valve body.
2. An integrated piezoelectric pump based on a unidirectional rotary active valve, characterized in that, The rotary drive unit (5) includes a piezoelectric drive foot (50) and a drive tooth (51). The piezoelectric drive foot (50) includes a rotating piezoelectric vibrator (52), and a crossing foot (53) and a support foot (54) located on both sides of the rotating piezoelectric vibrator (52). The extension lines of the crossing foot (53) and the supporting foot (54) intersect at the center point of the lower cavity (6) of the valve body; The cross foot (53) has an arc-shaped sliding structure (53a) on one side and a straight driving structure (53b) on the other side. A large ring-shaped support structure (54a) is provided at the lower end of the support foot (54); The drive teeth (51) are evenly arranged on the inner side of the lower cavity wall (62) of the lower cavity (6) of the valve body, with one side being an arc-shaped tooth surface (51a) and the other side being a straight tooth surface (51b), and they face the same direction. The arc-shaped tooth surface (51a) is opposite to the arc-shaped sliding structure (53a).
3. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 2, characterized in that: The straight-face drive structure (53b) is initially in close contact with the straight tooth surface (51b). When the rotating piezoelectric vibrator (52) vibrates outward, the straddle foot (53) and the supporting foot (54) open outward; The bottom plate (60) of the lower cavity (6) of the valve body is provided with an annular groove (64), and a one-way micro-damping structure (65) is provided in the annular groove (64). When the pump body (3) rotates counterclockwise relative to the lower cavity (6) of the valve body, the unidirectional micro-damping structure (65) generates a damping force. ; During the opening process, the arc-shaped sliding structure (53a) gradually comes into contact with the next arc-shaped tooth surface (51a), and the two slide relative to each other, generating a counterclockwise contact force. Contact force Less than the damping force ; The vertex of the arc-shaped tooth surface (51a) is slightly higher than the movement trajectory of the crossing foot (53). After crossing, the straight drive structure (53b) and the straight tooth surface (51b) of the next drive tooth (51) overlap. During the opening process of the supporting foot (54), the large annular supporting structure (54a) is always in contact at the apex of the arc-shaped toothed surface (51a), and the two slide relative to each other, generating a clockwise contact force. ; Contact force Less than contact force The resultant contact force after the two cancel each other out Much smaller than the damping force Therefore, the pump body (3) does not rotate during the outward vibration stage of the rotating piezoelectric vibrator (52); When the rotating piezoelectric vibrator (52) vibrates inward, the straddle foot (53) and the supporting foot (54) contract inward; The straight-face drive structure (53b) abuts against the straight tooth surface (51b) to drive the pump body (3) to rotate; The pump body (3) rotates intermittently relative to the lower chamber (6) of the valve body, and the mechanism is in a steady state during the intermittent phase, during which gas is pumped in or out. When the valve body vent (61a) and vent (32b) are connected, the piezoelectric vibrator (1) vibrates downward to realize the venting of the pump chamber (31a); When the main air intake valve (20) and the auxiliary air intake (34) of the main pump body are connected, the corresponding piezoelectric vibrator (1) vibrates upward to realize the intake of the pump chamber (31a).
4. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 3, characterized in that: The drive tooth (51) is fixed to the side of the pump body (3), and the piezoelectric drive foot (50) is fixed to the inside of the lower cavity wall (62).
5. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 2, 3, or 4, characterized in that: The lower cavity (6) of the valve body is provided with a transition air chamber (60a), which is connected upward to the auxiliary air inlet (34) of the main pump body and inward to the pump cavity (31a); When the rotating piezoelectric oscillator (52) vibrates inward, it generates a low-pressure zone, allowing more gas to enter the transition gas chamber (60a), and the amount of gas stored each time is greater than the amount of gas discharged. A strip-shaped one-way valve plate (61c) is provided on the outside of the vent (61a) of the valve body. During the beginning and end of the intake phase, the internal pressure of the pump chamber (31a) decreases, and the one-way valve plate (61c) tightly seals the valve body outlet (61a). During this phase, gas is drawn in from the transition chamber 60a as a transition. The one-way valve plate (61c) bends outward under the impact of airflow, making the air outlet (61a) of the valve body open.
6. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 5, characterized in that: The piezoelectric vibrator (1) vibrates up and down, and the rotating piezoelectric vibrator (52) vibrates inward and outward. The vibration period of both is T, and the vibration phases are different. ; The pump body (3) stops during the first half of the cycle and rotates during the second half of the cycle. The intermittent rotation angle within each cycle T is α. It is an integer; The auxiliary air inlets (34) of the main pump body are evenly distributed in m groups in a ring from the inside to the outside, with the pump body (3) axis as the center. Each group 1, total indivual; The auxiliary air inlets (34) of the main pump body are all annular through holes with an included angle β; The main air intake valve port (20) is arranged in m groups from the inside to the outside, corresponding to the auxiliary air intake port (34) of the main pump body. 1, total indivual; All intake valve ports (20) are angled. The annular through holes are evenly arranged at intervals of 3β. If the vertical projection position of the auxiliary air inlet (34) of the main pump body is located inside the main pump body (31) when it is arranged, a chamber connection hole (31f) needs to be added. The valve body vent (61a) is evenly arranged in a ring around the axis of the pump body (3). indivual; The angular difference between the valve body outlet (61a) and the main inlet valve (20) is... The arrangement is the same.
7. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 6, characterized in that: A sealing structure and a drag-reducing structure are provided between the upper cavity (2) of the valve body and the pump body (3); The main pump body auxiliary air inlet (34) includes the inner pump body auxiliary air inlet port I (34a) and the outer pump body auxiliary air inlet port II (34b). Pump body sealing bosses (35) are provided on both sides of pump body auxiliary air inlet I (34a) and pump body auxiliary air inlet II (34b), forming two sets of sealing structures; The sealing structures, consisting of pump body sealing bosses (35), are evenly spaced between each group of sealing structures. A drag-reducing groove and a lubricating medium storage chamber (30c) are provided between the two sets of sealing structures to store the lubricating medium; The main intake valve port (20) includes an inner intake valve port I (20a) and an outer intake valve port II (20b); Both sides of the intake valve port I (20a) and a set of intake valve ports II (20b) are provided with cavity sealing grooves (24); The pump body sealing boss (35) and the cavity sealing groove (24) correspond one-to-one to prevent gas leakage.
8. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 7, characterized in that: The main pump body (31) has a unidirectional air intake structure (33) arranged in parallel and uniformly on the outer side of the pump chamber. The pump chamber unidirectional air intake structure (33) consists of intersecting air intake cone unit I (33a) and air intake cone unit II (33c), and the intersection is connected to the pump chamber 31a through the pump chamber air intake port (33b).
9. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 8, characterized in that: The piezoelectric vibrator (1) is composed of a circular piezoelectric ceramic (10) and a piezoelectric elastic substrate (11) bonded together.
10. An integrated piezoelectric pump based on a unidirectional rotary active valve according to claim 9, characterized in that: The rotating piezoelectric vibrator (52) is provided with rotating driving piezoelectric ceramic I (52b) and rotating driving piezoelectric ceramic II (52c) on its inner and outer sides, respectively. The rotating piezoelectric vibrator (52) is only provided with rotating drive piezoelectric ceramic I (52b). At this time, the span distance of the piezoelectric drive foot (50) is reduced, and the arrangement spacing of the drive teeth (51) is reduced.