Electron microscope and scanning equipment

Abstract

The invention relates to the field of microscopes, in particular to an electron microscope and scanning equipment. The electron microscope comprises a lens assembly, a sample bin and an airflow control device. The lens assembly comprises a lens cone, an isolating valve and an objective lens, and the isolating valve is installed between the lens cone and the objective lens so as to communicate or isolate the lens cone and the objective lens; the sample bin is used for placing a sample, and the sample bin is communicated with the objective lens; the airflow control device is communicated with the sample bin so as to exhaust or vacuumize the sample bin. According to the electron microscope provided by the invention, physical isolation between the lens cone and the sample bin is realized through the isolation valve, and the independent airflow control device is matched, so that the stability of a lens cone vacuum system is not influenced in the sample replacement process, and efficient, clean, reliable and rapid sample replacement is realized on the premise of ensuring the imaging quality.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of microscopes, in particular to an electron microscope and a scanning device. BACKGROUND

[0002] A scanning electron microscope (SEM) is a large precision instrument for high-resolution micro-area topography analysis. A very high vacuum degree needs to be maintained in the sample chamber when using the scanning electron microscope. In the traditional desktop scanning electron microscope, the entire vacuum system including the sample chamber, the lens barrel, the gun head, etc. needs to be completely exposed to the atmosphere when changing the sample. This process has the following significant disadvantages: 1. Low sample changing efficiency: After each sample change, the entire vacuum system needs to be re-evacuated, which seriously affects the research and detection efficiency. Moreover, the gun head cannot always maintain a high vacuum state, affecting the stability and service life of the electron source.

[0003] 2. High load on the vacuum system: Frequent breaking of the vacuum and evacuation can cause wear and tear on the vacuum components such as molecular pumps and mechanical pumps, shortening their service life.

[0004] 3. Pollution risk: When the vacuum system is exposed to the atmosphere, water vapor, dust, and other pollutants in the air may enter the vacuum system, contaminating the sample chamber, lens barrel, aperture, and inner wall, affecting the imaging quality. SUMMARY

[0005] The present application aims to provide an electron microscope and a scanning device to solve the problems of low sample changing efficiency, high load on the vacuum system, and pollution risk when changing the sample in the existing electron microscope.

[0006] The present application provides an electron microscope, which comprises a lens assembly, a sample chamber, and an airflow control device. The lens assembly comprises a lens barrel, an isolation valve, and an objective lens. The isolation valve is installed between the lens barrel and the objective lens to communicate or isolate the lens barrel and the objective lens. The sample chamber is used to place a sample, and the sample chamber communicates with the objective lens. The airflow control device communicates with the sample chamber to evacuate or evacuate the sample chamber.

[0007] In the above technical solution, further, the airflow control device comprises an evacuation mechanism. The evacuation mechanism comprises a pump body assembly, a valve assembly, and an evacuation pipeline. The pump body assembly communicates with the sample chamber through the evacuation pipeline. The valve assembly is installed on the evacuation pipeline to open or shut off the evacuation pipeline.

[0008] In the technical scheme, further, the pump body assembly comprises a mechanical pump and a molecular pump; the air extraction pipeline comprises a first pipeline, a second pipeline and a third pipeline; the valve assembly comprises a first valve, a second valve and a third valve; The first pipeline is arranged between the mechanical pump and the molecular pump, and the first valve is installed on the first pipeline; the second pipeline is arranged between the mechanical pump and the sample chamber, and the second valve is installed on the second pipeline; and the third pipeline is arranged between the molecular pump and the sample chamber, and the third valve is installed on the third pipeline.

[0009] In the technical scheme, further, the air flow control device further comprises a gas releasing mechanism. The gas releasing mechanism comprises a gas releasing valve and a gas releasing pipeline, the gas releasing pipeline is in communication with the sample chamber, and the gas releasing valve is installed on the gas releasing pipeline to open or shut off the gas releasing pipeline.

[0010] In the technical scheme, further, the gas releasing mechanism further comprises a gas source container; the gas source container is in communication with one end of the gas releasing pipeline away from the sample chamber to supply dry inert gas to the sample chamber.

[0011] In the technical scheme, further, the air flow control device further comprises a vacuum sensor; the vacuum sensor is installed in the sample chamber to detect the vacuum degree in the sample chamber.

[0012] In the technical scheme, further, the air flow control device further comprises a control mechanism. The control mechanism is in communication connection with the isolation valve to control the opening or shutting off of the isolation valve. The control mechanism is in communication connection with the valve assembly to control the opening or shutting off of the valve assembly. The control mechanism is in communication connection with the gas releasing valve to control the opening or shutting off of the gas releasing valve. The control mechanism is in communication connection with the vacuum sensor.

[0013] In the technical scheme, further, the sample chamber comprises a sample table, a chamber main body and a chamber door. The chamber main body is provided with an opening, the chamber door is installed at the opening, and the chamber door and the chamber main body surround to form a containing cavity. The sample table is connected with the chamber door, and the chamber door can move relative to the chamber main body to drive the sample table to enter or leave the containing cavity from the opening.

[0014] In the technical scheme, further, the chamber door is in adsorptive connection with the chamber main body.

[0015] The application also provides a scanning device, comprising the electron microscope described in the above scheme.

[0016] Compared with the prior art, the application has the following beneficial effects: The electron microscope provided by the application realizes physical isolation of the lens barrel and the sample bin through the isolation valve, and cooperates with the independent airflow control device, so that the sample replacement process no longer affects the stability of the lens barrel vacuum system, thereby realizing efficient, clean and reliable rapid sample replacement under the premise of ensuring imaging quality.

[0017] The application also provides a scanning device, comprising the electron microscope described in the above scheme. Based on the above analysis, the scanning device also has the beneficial effects described above, which will not be described here. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the specific embodiments or prior art of the application, the drawings needed in the specific embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0019] Figure 1 The structure schematic diagram of the electron microscope provided by the application is shown in the figure. Figure 2 The sample replacement process schematic diagram provided by the application is shown in the figure.

[0020] In the figure: 1-sample bin; 2-sample stage; 3-bin door; 4-objective lens; 5-isolation valve; 6-lens barrel; 7-mechanical pump; 8-valve assembly; 801-first valve; 802-second valve; 803-third valve; 9-gas release valve; 10-vacuum gauge; 11-molecular pump; 12-control mechanism. DETAILED DESCRIPTION

[0021] The technical solutions of the application will be described in detail below with reference to the drawings. Obviously, the described embodiments are some of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the application.

[0022] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0023] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0024] Embodiment one Referring to Figure 1 As shown, the electron microscope provided by the present application comprises a lens assembly, a sample chamber 1 and a gas flow control device; the lens assembly comprises a lens barrel 6, an isolation valve 5 and an objective lens 4, the isolation valve 5 is installed between the lens barrel 6 and the objective lens 4 to communicate or isolate the lens barrel 6 and the objective lens 4; the sample chamber 1 is used to place a sample, and the sample chamber 1 communicates with the objective lens 4; the gas flow control device communicates with the sample chamber 1 to exhaust or vacuumize the sample chamber 1.

[0025] Specifically, the isolation valve 5 is arranged between the lens barrel 6 (containing an electron gun and a light path system and the like) and the objective lens 4, forming a switchable physical barrier. The sample chamber 1 is connected with the objective lens 4, and the sample chamber 1 is used to carry a sample to be measured; the sample chamber 1 is a breakable area, and its vacuum state can be independently controlled by an external gas flow control system.

[0026] By closing the isolation valve 5, the communication state between the sample chamber 1 and the lens barrel 6 can be cut off when changing the sample, so that the core components such as the electron gun in the lens barrel 6 can always maintain a high vacuum state. After the sample is changed, there is no need to wait for the lens barrel 6 to be vacuumized again, only to restore the vacuum of the sample chamber 1 and open the isolation valve 5 to make it communicate with the lens barrel 6, so that the observation can be started immediately, greatly improving the efficiency of the equipment. By the isolation valve 5, the lens barrel 6 is effectively prevented from frequently contacting the atmosphere, and the load of the vacuum pump and the pollution risk inside the lens barrel 6 are reduced.

[0027] The electron microscope provided by the application realizes the physical isolation of the lens barrel 6 and the sample chamber 1 through the isolation valve 5, cooperates with the independent air flow control device, so that the sample replacement process no longer affects the stability of the vacuum system of the lens barrel 6, thereby realizing efficient, clean and reliable rapid sample replacement under the premise of ensuring the imaging quality.

[0028] In an optional scheme of the embodiment, the air flow control device comprises a vacuum pumping mechanism; the vacuum pumping mechanism comprises a pump body assembly, a valve assembly 8 and an air pumping pipeline, the pump body assembly is communicated with the sample chamber 1 through the air pumping pipeline, and the valve assembly 8 is installed on the air pumping pipeline to open or shut off the air pumping pipeline.

[0029] In the embodiment, the pump body assembly is directly connected to the sample chamber 1 through the air pumping pipeline, and the precise opening and closing of the valve assembly 8 are cooperated, so that the sample chamber 1 can independently complete the vacuum pumping process in the isolated state from the lens barrel 6. Before sample replacement, the isolation valve 5 is opened, and then the sample chamber 1 is broken to make the sample chamber 1 be under the atmospheric pressure, the sample chamber 1 is opened for sample replacement, and the sample chamber 1 is re-pumped after sample replacement, and in this process, the lens barrel 6 system still maintains high vacuum and does not need to participate in the air pumping cycle.

[0030] In an optional scheme of the embodiment, the pump body assembly comprises a mechanical pump 7 and a molecular pump 11; the air pumping pipeline comprises a first pipeline, a second pipeline and a third pipeline; the valve assembly 8 comprises a first valve 801, a second valve 802 and a third valve 803; the first pipeline is arranged between the mechanical pump 7 and the molecular pump 11, and the first valve 801 is installed on the first pipeline; the second pipeline is arranged between the mechanical pump 7 and the sample chamber 1, and the second valve 802 is installed on the second pipeline; the third pipeline is arranged between the molecular pump 11 and the sample chamber 1, and the third valve 803 is installed on the third pipeline.

[0031] In the embodiment, the mechanical pump 7 is responsible for rough pumping, so that the sample chamber 1 is reduced from the atmospheric pressure to the medium vacuum, and the molecular pump 11 is prevented from being damaged by direct atmospheric impact; the molecular pump 11 further pumps the sample chamber 1 to the high vacuum to a preset value to meet the working requirements of the electron microscope. The first valve 801 arranged in the first pipeline, the second valve 802 arranged in the second pipeline and the third valve 803 arranged in the third pipeline are all gate valves, and the three valves can realize the on-demand conduction of different air pumping paths.

[0032] Specifically, in the initial stage of vacuum pumping, the first valve 801 is closed and the second valve 802 is opened, and the mechanical pump 7 rough pumps the sample chamber 1 through the second pipeline; after the rough pumping is completed, the second valve 802 is closed, the first valve 801 and the third valve 803 are opened, the molecular pump 11 is connected to the sample chamber 1 through the first pipeline and the third pipeline, and the high vacuum air pumping is completed.

[0033] In an optional solution of the embodiment, the gas flow control device further comprises a gas releasing mechanism; the gas releasing mechanism comprises a gas releasing valve 9 and a gas releasing pipeline, the gas releasing pipeline is in communication with the sample chamber 1, and the gas releasing valve 9 is installed on the gas releasing pipeline to open or shut off the gas releasing pipeline.

[0034] In the embodiment, the gas releasing pipeline is arranged to communicate the sample chamber 1 with the external environment, and the gas releasing valve 9 is arranged on the pipeline to control the opening and closing of the gas releasing process. The design enables the system to orderly introduce external gas (such as dry inert gas or air) when needed, gradually release the negative or positive pressure in the sample chamber 1. The gas releasing valve 9 can control the gas inflow rate to avoid the impact of pressure surge, effectively prevent the sample from being damaged, and improve the safety and experimental repeatability of the sample processing.

[0035] In an optional solution of the embodiment, the gas releasing mechanism further comprises a gas source container; the gas source container is in communication with the end of the gas releasing pipeline away from the sample chamber 1 to supply dry inert gas to the sample chamber 1, which effectively avoids the invasion of moisture, oxygen and particulate matter while achieving smooth pressure relief of the sample chamber 1, significantly improving the sample protection level, system cleanliness and environmental adaptability.

[0036] In an optional solution of the embodiment, the gas flow control device further comprises a vacuum sensor; the vacuum sensor is specifically a vacuum gauge 10, and it is installed in the sample chamber 1 to detect the vacuum degree in the sample chamber 1. According to the detection result of the vacuum sensor, the operator can clearly understand the state of the sample chamber 1, so as to correspondingly perform scanning or sample changing operation.

[0037] In an optional solution of the embodiment, the gas flow control device further comprises a control mechanism 12; the control mechanism 12 is in communication connection with the isolation valve 5 to control the opening or closing of the isolation valve 5; the control mechanism 12 is in communication connection with the valve assembly 8 to control the opening or closing of the valve assembly 8; the control mechanism 12 is in communication connection with the gas releasing valve 9 to control the opening or closing of the gas releasing valve 9; and the control mechanism 12 is in communication connection with the vacuum sensor.

[0038] In the embodiment, the first valve 801, the second valve 802, the third valve 803, the isolation valve 5 and the gas releasing valve 9 (specifically an electromagnetic gas releasing valve 9) are all electrically controlled valves, and the control mechanism 12 is in communication connection therewith to realize automatic control of the whole process of the gas flow path, thereby improving the automation level, operation safety, process repeatability and man-machine interaction experience of the system. Figure 2 As shown in the figure, a sample changing flowchart is shown.

[0039] Embodiment Two The electron microscope in the embodiment two is an improvement on the basis of the above-mentioned embodiment, and the technical content disclosed in the above-mentioned embodiment is not repeatedly described, and the content disclosed in the above-mentioned embodiment also belongs to the content disclosed in the embodiment two.

[0040] Referring to Figure 1 As shown in the figure, in the optional solution of the embodiment, the sample bin 1 comprises a sample table 2, a bin body and a bin door 3; the bin body is provided with an opening, the bin door 3 is installed at the opening, and the bin door 3 and the bin body surround to form a containing cavity; the sample table 2 is connected with the bin door 3, and the bin door 3 can move relative to the bin body to drive the sample table 2 to enter or leave the containing cavity from the opening.

[0041] In this embodiment, the sample table 2 is connected with the bin door 3, so that the bin door 3 can support and fix the sample table 2, and the structure is more simplified. When the operator changes the sample, the bin door 3 can be opened from the outside to move the sample table 2 out of the containing cavity, so as to facilitate the operator to load the sample on the sample table 2, and then close the bin door 3 to automatically send the sample into the containing cavity, thereby improving the operation convenience.

[0042] In the optional solution of the embodiment, the bin door 3 is connected with the bin body by adsorption. Alternatively, the bin door 3 and the bin body are connected by magnetic attraction, which is convenient for the operator to quickly open or seal the sample bin 1.

[0043] Embodiment three Embodiment three of the present application provides a scanning device comprising an electron microscope of any of the above embodiments, so as to have all the beneficial technical effects of the electron microscope of any of the above embodiments, which will not be repeated here.

[0044] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application. In addition, those skilled in the art can understand that although some embodiments include certain features instead of other features included in other embodiments, the combination of features of different embodiments means that it is within the scope of the present application and forms different embodiments.

Claims

1. An electron microscope, characterized in that, Includes lens assembly, sample chamber and airflow control device; The lens assembly includes a lens barrel, an isolation valve, and an objective lens. The isolation valve is installed between the lens barrel and the objective lens to connect or isolate the lens barrel and the objective lens. The sample chamber is used to hold the sample, and the sample chamber is in communication with the objective lens; The airflow control device is connected to the sample chamber to exhaust or evacuate the sample chamber.

2. The electron microscope according to claim 1, characterized in that, The airflow control device includes a vacuum pumping mechanism; The vacuuming mechanism includes a pump assembly, a valve assembly, and a vacuum pipe. The pump assembly is connected to the sample chamber via the vacuum pipe, and the valve assembly is installed on the vacuum pipe to open or close the vacuum pipe.

3. The electron microscope according to claim 2, characterized in that, The pump assembly includes a mechanical pump and a molecular pump; the evacuation conduit includes a first conduit, a second conduit, and a third conduit; the valve assembly includes a first valve, a second valve, and a third valve. The first pipeline is disposed between the mechanical pump and the molecular pump, and the first valve is installed in the first pipeline; the second pipeline is disposed between the mechanical pump and the sample chamber, and the second valve is installed in the second pipeline; the third pipeline is disposed between the molecular pump and the sample chamber, and the third valve is installed in the third pipeline.

4. The electron microscope according to claim 2, characterized in that, The airflow control device also includes a venting mechanism; The venting mechanism includes a venting valve and a venting pipe. The venting pipe is connected to the sample chamber, and the venting valve is installed on the venting pipe to open or close the venting pipe.

5. The electron microscope according to claim 4, characterized in that, The venting mechanism also includes a gas source container; the gas source container is connected to the end of the venting pipe away from the sample chamber to supply dry inert gas to the sample chamber.

6. The electron microscope according to claim 5, characterized in that, The airflow control device also includes a vacuum sensor; the vacuum sensor is installed inside the sample chamber to detect the vacuum level inside the sample chamber.

7. The electron microscope according to claim 6, characterized in that, The airflow control device also includes a control mechanism; The control mechanism is communicatively connected to the isolation valve to control the opening or closing of the isolation valve; The control mechanism is communicatively connected to the valve assembly to control the valve assembly to open or close. The control mechanism is communicatively connected to the vent valve to control the vent valve to open or close. The control mechanism is communicatively connected to the vacuum sensor.

8. The electron microscope according to claim 1, characterized in that, The sample chamber includes a sample stage, a main chamber body, and a chamber door; The main body of the compartment has an opening, the compartment door is installed at the opening, and the compartment door and the main body of the compartment enclose a receiving cavity; The sample stage is connected to the compartment door, which is movable relative to the main body of the compartment to allow the sample stage to enter or leave the receiving cavity through the opening.

9. The electron microscope according to claim 8, characterized in that, The door is magnetically attached to the main body of the compartment.

10. A scanning device, characterized in that, Including an electron microscope as described in any one of claims 1 to 9.

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