Humidity generating device and method
By employing a dual-pump parallel control method and high-precision mass flow control, the problem of unstable humidity in humidification devices has been solved, achieving long-term stable and high-precision humidity generation, which is suitable for on-site detection by online gas analyzers.
Patent Information
- Application Number
- CN202511428301.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-30
- Publication Date
- 2026-01-16
AI Technical Summary
Existing humidification devices suffer from unstable humidity during long-term operation, especially when using peristaltic pumps where the liquid flow is discontinuous, leading to unstable humidity.
A dual-pump parallel control method is adopted. The calculation unit adjusts the operating speed and working mode of the injection pump according to the humidity parameters to ensure uninterrupted and precise control of liquid flow. Combined with a high-precision mass flow controller and mixing chamber, high-precision humidity generation is achieved.
It achieves long-term stable control and high-precision generation of humidity, making it suitable for on-site detection in online gas analyzers and improving the accuracy and efficiency of environmental monitoring.
Smart Images

Figure CN121338567A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to standard gas generation technology, and particularly to a humidity generation device and method. Background Technology
[0002] Humidification gas distribution systems mostly adopt the principle of split humidification, that is, by splitting dry gas into two paths, one path passes directly through the system (dry gas), and the other path passes through a humidification device (such as a permeation tube or saturated water vapor) to become humid gas. Then the two gas paths are mixed in proportion to precisely regulate the humidity of the final gas.
[0003] Currently, most humidifiers use syringe pumps or peristaltic pumps to control the liquid flow rate to regulate humidity, as shown in patents CN217819629U and CN208943860U. Using a single syringe pump cannot achieve continuous humidification over a long period, while using a peristaltic pump can cause a sudden decrease in the discharged liquid due to the alternating release during pumping, resulting in unstable humidity levels. Summary of the Invention
[0004] To address the shortcomings of the existing technical solutions, the present invention provides a humidity generating device.
[0005] The objective of this invention is achieved through the following technical solution: A humidity generating device includes a steam generator and a mixing chamber; the humidity generating device further includes: Two syringe pumps are connected in parallel, with their input ends connected to a water storage container and their output ends connected to the steam generator. A calculation unit that obtains the operating speed V of the injection pump based on the set humidity parameters; A controller is used to adjust the operating speed of the injection pump to V and control the operating mode of the injection pump.
[0006] The present invention also aims to provide a method for generating humidity, which is achieved through the following technical solution.
[0007] A humidity generation method, wherein the humidity generation method is as follows: The input ends of the two parallel injection pumps are connected to a water storage container, and the output ends are connected to the steam generator; The calculation unit obtains the operating speed V of the injection pump based on the set humidity parameters; The controller adjusts the operating speed of the injection pump to V and controls the operating mode of the injection pump, wherein the operating mode of the injection pump is as follows: During each work cycle, the first injection pump starts from zero and runs at a speed V to a position a distance from the top, at which point the second injection pump starts from zero. When the second injection pump reaches a position a distance from zero point a, the first injection pump returns to the zero point position from the top at a speed of V1, where V1 >> V; When the second injection pump reaches a position a distance from the top, the first injection pump starts from zero.
[0008] The basic working principle of this invention is as follows: A high-precision mass flow controller (MFC) precisely controls the flow rates of dilution gas and standard gas. High-concentration standard gas and dilution gas are thoroughly mixed and diluted to dynamically generate the desired low-concentration gas. A constant-flow liquid delivery module, consisting of the dilution gas and dual injection pumps, delivers the liquid to a steam generator for rapid conversion into saturated steam, thus generating humidity. Finally, the standard gas and the humidified dilution gas enter the mixing chamber and mix evenly to produce the desired low-concentration humid gas. Humidity control is achieved by adjusting the injection pump speed to control the mixing ratio of liquid to dry gas (total flow rate).
[0009] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. This invention utilizes a dual-pump operation control method to achieve uninterrupted liquid control and feedback, thereby achieving high-precision humidity generation and gas distribution, and realizing long-term stable humidification and gas distribution; 2. Short response time and rapid stabilization; 3. A multi-parameter coupled control model for humidity, temperature, and flow rate enables high-precision dynamic gas distribution; 4. Adapts to the on-site detection needs of various online gas analyzers, improving the accuracy and efficiency of environmental monitoring. Attached Figure Description
[0010] The disclosure of this invention will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are merely illustrative of the technical solutions of this invention and are not intended to limit the scope of protection of this invention. In the drawings: Figure 1 This is a schematic diagram of the humidity generating device according to the present invention; Figure 2 This is a schematic diagram of the working state of the injection pump according to the present invention.
[0011] In the attached diagram, 11-water storage container, 21-first injection pump, 22-second injection pump, 31-steam generator, 41-mixing chamber, 51-sensor, 61-waste bottle, 62-solenoid valve. Detailed Implementation
[0012] Figures 1-2The following description illustrates optional embodiments of the invention to teach those skilled in the art how to implement and reproduce the invention. Some conventional aspects have been simplified or omitted to teach the technical solutions of the invention. Those skilled in the art should understand that variations or substitutions derived from these embodiments will be within the scope of the invention. Those skilled in the art should understand that the following features can be combined in various ways to form multiple variations of the invention. Therefore, the invention is not limited to the optional embodiments described below, but is defined only by the claims and their equivalents.
[0013] Example 1
[0014] One humidity generating device in this embodiment, such as Figure 1 As shown, the device includes: Steam generator 31 and mixing chamber 41.
[0015] Two syringe pumps (first syringe pump 21 and second syringe pump 22) are connected in parallel, with their input ends connected to the water storage container 11 and their output ends connected to the steam generator 31.
[0016] The calculation unit obtains the operating speed V of the injection pump based on the set humidity parameters.
[0017] The controller is used to adjust the operating speed of the injection pump to V and control the operating mode of the injection pump.
[0018] To ensure a stable output of gas with the set humidity, the syringe pump further operates as follows: During each working cycle, the first injection pump 21 starts from zero (when the volume is at its maximum) and runs at a speed V to a position a distance from the top (when the volume is zero), at which point the second injection pump 22 starts from zero.
[0019] When the second injection pump 22 reaches a position a distance from zero point a, the first injection pump 21 returns to the zero point position from the top at a speed of V1, where V1 >> V.
[0020] When the second injection pump 22 reaches a position a distance from the top, the first injection pump 21 starts from zero.
[0021] In order to stably output the set humidity gas, further, position a is: the ratio of the number of steps from this position to the top to the number of steps from the zero point to the top is a set value, and the set value is 0.12%.
[0022] To ensure a stable output of gas with the set humidity, the operating speed V is further defined as follows: V=1322k·Total flow ·λ(t)·RH set , .
[0023] k is a coefficient, Total flow It sets the total flow rate, RH set t is the set humidity, and t is the set temperature.
[0024] To stably output the gas with the set humidity, the humidity generating device further includes: Sensor 51 is used to obtain the output gas humidity RH. real .
[0025] The comparison unit is used to compare the humidity RH. real And set the range.
[0026] If the deviation ΔRH is within the set range, maintain the operating speed V.
[0027] If the deviation ΔRH is less than the minimum value of the set range, the running speed V is adjusted to V2.
[0028] V2=1322k·Total flow ·[λ(t)·RH set -λ(t real )·RH real ], .
[0029] k is a coefficient, Total flow It sets the total flow rate, RH set 't' represents the set humidity, and 't' represents the set temperature. (RH) real It measures humidity, t real It measures the temperature.
[0030] If the deviation ΔRH is higher than the maximum value of the set range, the running speed V is adjusted to V3.
[0031] V2=1322k·Total flow ·[2λ(t)·RH set -λ(t real )·RH real ].
[0032] The humidity generation method of this embodiment of the invention, that is, the working method of the generating device of this embodiment, the humidity generation method is as follows: The input ends of the two parallel injection pumps (first injection pump 21 and second injection pump 22) are connected to the water storage container 11, and the output ends are connected to the steam generator 31.
[0033] The calculation unit obtains the operating speed V of the injection pump based on the set humidity parameters.
[0034] The controller adjusts the operating speed of the injection pump to V and controls the operating mode of the injection pump, wherein the operating mode of the injection pump is as follows: During each working cycle, the first injection pump 21 starts from zero and runs at a speed V to a position a distance from the top, at which point the second injection pump 22 starts from zero.
[0035] When the second injection pump 22 reaches a position a distance from zero point a, the first injection pump 21 returns to the zero point position from the top at a speed of V1, where V1 >> V.
[0036] When the second injection pump 22 reaches a position a distance from the top, the first injection pump 21 starts from zero.
[0037] Example 2
[0038] Application examples of the humidity generating device and method of Embodiment 1 of the present invention.
[0039] In this application example, such as Figure 1 As shown, blue arrows indicate liquid paths and black arrows indicate gas paths. The first syringe pump 21 and the second syringe pump 22 are vertical, with the zero point indicating the maximum extraction volume and the top indicating the zero extraction volume.
[0040] The first injection pump 21 and the second injection pump 22 are connected in parallel. Their input ends are connected to the water storage container 11, and their output ends are sequentially connected to the two-position three-way solenoid valve 62, the steam generator, and the mixing chamber 41. The sensor 51 outputs the temperature and humidity of the exhaust gas and sends it to the calculation unit. The waste liquid bottle 61 is connected to the two-position three-way solenoid valve 62.
[0041] The humidity generation method of this embodiment of the invention, that is, the working method of the generating device of this embodiment, the humidity generation method is as follows: Set Total Flow flow =2L, set temperature t=25℃, set humidity RH set =50%, k=1.
[0042] The calculation unit obtains the operating speed V of the syringe pump based on the above-mentioned set parameters: V=1322k·Total flow ·λ(t)·RH set =25.3μL / min.
[0043] The controller adjusts the operating speed of the injection pump to V and controls the operating mode of the injection pump, wherein the operating mode of the injection pump is as follows: Within each work cycle, such as Figure 2 As shown in (a), the first injection pump 21 starts from zero and runs at a speed V.
[0044] like Figure 2 As shown in (b), when the first injection pump 21 is running at a position a distance from the top, the second injection pump 22 starts from zero.
[0045] like Figure 2 As shown in (c), when the second injection pump 22 reaches a position a distance from zero point a, the first injection pump 21 reaches the top and returns to the zero point position from the top at a speed V1, where V1 >> V. Figure 2 As shown in (d).
[0046] When the second injection pump 22 reaches a position a distance from the top, the first injection pump 21 starts from zero.
[0047] 1. Sensor 51 outputs: Measured temperature t real =25℃, humidity RH measured real =40%.
[0048] The calculation unit obtains the gas humidity RH. real and set humidity RH set The deviation between them is ΔRH = -10%.
[0049] The comparison unit compares the deviation ΔRH with the set range [-2%, 2%].
[0050] If the deviation ΔRH is less than the minimum value of the set range, the running speed V is adjusted to V2.
[0051] V2=1322k·Total flow ·[λ(t)·RH set -λ(t real )·RH real = 5.06ul / min.
[0052] 2. Sensor 51 outputs: Measured temperature t real =25℃, humidity RH measured real =56%.
[0053] The calculation unit obtains the gas humidity RH. real and set humidity RH set The deviation between them is ΔRH=6%.
[0054] The comparison unit compares the deviation ΔRH with the set range [-2%, 2%].
[0055] If the deviation ΔRH is higher than the maximum value of the set range, the running speed V is adjusted to V3.
[0056] V2=1322k·Total flow ·[2λ(t)·RH set -λ(t real )·RH real =25.3 ul / min.
[0057] 2. Sensor 51 outputs: Measured temperature treal =25℃, humidity RH measured real =51%.
[0058] The comparison unit compares the deviation ΔRH with the set range [-2%, 2%].
[0059] The deviation ΔRH is within the set range, and the operating speed V remains constant.
[0060] Example 3
[0061] The application examples of the humidity generating device and method of this invention differ from those of Example 2 in that: The setting range is the humidity range [48%, 52%], not the deviation setting range.
[0062] During the work, the humidity (RH) was measured. real Compare with the set range [48%, 52%].
Claims
1. A humidity generating device comprising a steam generator and a mixing chamber; characterized in that, The humidity generating device further comprises: two injection pumps connected in parallel, the input end of which is connected to the water storage container, and the output end of which is connected to the steam generator; a calculation unit for obtaining the running speed V of the injection pump according to the set humidity parameter; a controller for adjusting the running speed of the injection pump to V and controlling the working mode of the injection pump.
2. The humidity generating device according to claim 1, characterized in that The working mode of the injection pump is: In each working cycle, the first injection pump starts from zero and runs to a position a away from the top at the speed V, and the second injection pump starts from zero; When the second injection pump runs to a position a away from zero, the first injection pump returns to the zero position from the top at the speed V1, V1 >> V; When the second injection pump runs to a position a away from the top, the first injection pump starts from zero.
3. The humidity generating device according to claim 2, wherein The position a is: the ratio of the number of steps from this position to the top to the number of steps from zero to the top is a set value.
4. The humidity generating device according to claim 3, wherein The set value is 0.12%.
5. The humidity generating device according to claim 2, wherein The running speed V is: V = 1322k • Total flow • λ(t) • RH set , ; k is a coefficient, Total flow is the set total flow, RH set is the set humidity, t is the set temperature.
6. The humidity generating device according to claim 2, wherein The humidity generating device further comprises: a sensor for obtaining an output of gas humidity RH real ; a comparison unit for comparing the humidity RH real and a set range; If the deviation ΔRH is within the set range, the running speed V is maintained; If the deviation ΔRH is less than the minimum value of the set range, the running speed V is adjusted to V2; V2 = 1322 k - Total flow • [λ(t) - RH set - λ(t real ) - RH real ], ; k is a coefficient, Total flow is the set total flow, RH set is the set humidity, t is the set temperature, RH real is the measured humidity, t real is the measured temperature; If the deviation ΔRH is higher than the maximum value of the set range, the running speed V is adjusted to V3; V2 = 1322 k - Total flow • [2λ(t) - RH set - λ(t real ) - RH real ].
7. A humidity generating method, the humidity generating method comprising: two injection pumps connected in parallel, the input end of which is connected to the water storage container, and the output end of which is connected to the steam generator; a calculation unit for obtaining the running speed V of the injection pump according to the set humidity parameter; a controller for adjusting the running speed of the injection pump to V and controlling the working mode of the injection pump, the working mode of the injection pump being: In each working cycle, the first injection pump starts from zero and runs to a position a away from the top at the speed V, and the second injection pump starts from zero; When the second injection pump runs to a position a away from zero, the first injection pump returns to the zero position from the top at the speed V1, V1 >> V; When the second injection pump runs to a position a away from the top, the first injection pump starts from zero.
8. The humidity generating method according to claim 7, wherein, The position a is: the ratio of the number of steps from this position to the top to the number of steps from zero to the top is a set value.
9. The humidity generating method according to claim 7, wherein, The running speed V is: V = 1322k • Total flow • λ(t) • RH set , ; k is a coefficient, Total flow is the set total flow, RH set is the set humidity, t is the set temperature.
10. The humidity generating method according to claim 7, wherein The humidity generating device further comprises: a sensor for obtaining an output of gas humidity RH real ; a comparison unit for comparing the humidity RH real and a set range; If the deviation ΔRH is within the set range, the running speed V is maintained; If the deviation ΔRH is less than the minimum value of the set range, the running speed V is adjusted to V2; V2 = 1322 k - Total flow • [λ(t) - RH set - λ(t real ) - RH real ], ; k is a coefficient, Total flow is the set total flow, RH set is the set humidity, t is the set temperature, RH real is the measured humidity, t real is the measured temperature; If the deviation ΔRH is higher than the maximum value of the set range, the running speed V is adjusted to V3; V2 = 1322 k - Total flow • [2λ(t) - RH set - λ(t real ) - RH real ].
Citation Information
Patent Citations
High-precision dilution gas distribution instrument
CN208943860U