Integrated circuit production line management system based on Internet of Things

The IoT-based integrated circuit production line management system enables automated transportation, flipping, and quality analysis of integrated circuits, solving the problem of unstable quality monitoring in production, improving production efficiency and the accuracy of quality control, and reducing the defect rate.

CN121341660AInactive Publication Date: 2026-01-16MUYU GALAXY TECH INNOVATION (GUANGDONG) CO LTD
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Patent Information

Application Number
CN202511545285.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-10-28
Publication Date
2026-01-16
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Existing technologies lack effective quality control methods in integrated circuit manufacturing, resulting in unstable production quality and a high defect rate.

Method used

An IoT-based integrated circuit production line management system is adopted, including a transportation module, a flipping module, a receiving module, an image acquisition module, and a quality analysis module. This system enables automated transportation, flipping, and quality analysis of integrated circuits. Flexible silicone grooves are used to protect the circuits from damage, and quality is evaluated through various feature analyses.

Benefits of technology

It has realized the automated process of orderly transportation, flipping and quality analysis of integrated circuits, reduced the risk of manual operation, improved production efficiency and the accuracy of quality monitoring, reduced the defect rate, and ensured production consistency and timely response to problems.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides an integrated circuit production line management system based on the Internet of Things. The integrated circuit production line management system comprises a transportation module for transporting produced integrated circuits, a turn-over module for turning over the integrated circuits on the transportation module, and a receiving module which is arranged adjacent to the transportation module and is used for receiving the integrated circuits transported by the transportation module, the image acquisition module is used for performing image acquisition on the integrated circuit on the transportation module; and the quality analysis module is used for analyzing and judging image information shot by the image acquisition module so as to analyze the quality condition of the integrated circuit. According to the invention, the production quality of the integrated circuit can be monitored, so that a worker can take measures in time, the defective rate is reduced, the production efficiency and consistency are improved, and batch production of unqualified products can be avoided.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of integrated circuit production, and particularly relates to an integrated circuit production line management system based on Internet of Things. BACKGROUND

[0002] An integrated circuit is a kind of micro electronic device or component. By using certain process, transistors, resistors, capacitors, inductors and other components and wiring interconnections required in a circuit are interconnected together on a small piece or several small pieces of semiconductor wafer or dielectric substrate, and then packaged in a tube shell to become a microstructure with required circuit function; all components have formed an integral whole in structure, which makes electronic components take a big step towards miniaturization, low power consumption, intelligence and high reliability.

[0003] The experimental team has long been engaged in the research and study of a large number of relevant technical records related to integrated circuit production, and relies on relevant resources and conducts a large number of relevant experiments. Through a large number of searches, it is found that the existing technologies such as CN110289218B, CN109273388B, CN114554713B and CN113500473B disclosed by the prior art can change the speed of pushing out the raw material plate, thereby changing the speed of discharging; the height of the polishing plate can be changed, thereby changing the degree of polishing the surface of the raw material plate, including a rounding device, a discharging device, a polishing and flushing device, a belt one, a pushing motor two, a motor two sliding on a motor base, driving the contact position change of the rotating wheel five and the rotating wheel six, thereby changing the rotating speed of the rotating wheel six, changing the rotating speed of the belt two, thereby changing the rotating speed of the sliding block one, thereby changing the speed of pushing out the raw material plate; when the wrench is rotated to drive the rotating wheel eleven to rotate, the belt ten is driven to rotate, thereby driving the two screw rods to rotate, driving the limiting support to rise or lower, driving the polishing plate to rise or lower, thereby changing the degree of polishing the surface of the raw material plate.

[0004] In order to solve the problems such as production quality monitoring of integrated circuits that exist in the field, the present application is made. SUMMARY

[0005] The purpose of the present application is to overcome the deficiencies in the prior art and provide an integrated circuit production line management system based on Internet of Things.

[0006] In order to overcome the deficiencies of the prior art, the present application adopts the following technical solutions:

[0007] The application discloses an integrated circuit production line management system based on an Internet of Things, which comprises a conveying module for conveying finished integrated circuits, a turning module for turning the integrated circuits on the conveying module, a receiving module arranged adjacent to the conveying module and used for receiving the integrated circuits conveyed by the conveying module, an image acquisition module for acquiring images of the integrated circuits on the conveying module, and a quality analysis module for analyzing the quality of the integrated circuits by analyzing the image information acquired by the image acquisition module.

[0008] The conveying module comprises a transmission mechanism and a plurality of groove members arranged on a transmission belt of the transmission mechanism at preset interval distances, the transmission mechanism comprises a horizontally arranged closed loop conveying belt, at least two driving rollers matched with two sides of the conveying belt and used for tensioning and supporting the conveying belt, and a driving motor used for driving the driving rollers to synchronously rotate and correspondingly driving the conveying belt to perform transmission operation, one end of the transmission mechanism is a sending end, and the other end of the transmission mechanism is a receiving end, the integrated circuits are sequentially placed on the groove members from the receiving end, and the integrated circuits are further conveyed to the sending end of the transmission mechanism and sequentially fall into the receiving module.

[0009] The receiving module is an open dish arranged below the receiving end and used for receiving the integrated circuits sequentially dropped from the groove members of the receiving end, the open dish is a box with an open upper end, the image acquisition module comprises a support plate fixed above the transmission mechanism at a preset distance through a support frame and at least two camera devices fixed on the support plate through corresponding mounting seats and used for shooting the integrated circuits on the conveying belt.

[0010] The groove members are made of flexible silica gel material, the top of the groove member is provided with an opening downwardly recessed, the bottom of the groove member is fixed on the conveying belt, and the opening region of the groove member forms a storage cavity for placing the integrated circuits, and the cross section of the storage cavity is larger than that of the integrated circuit.

[0011] Further, the turning module comprises a horizontal plate horizontally fixed above the conveying module at a preset distance through a support frame and a plurality of turning units fixed on the bottom wall of the horizontal plate and used for respectively turning the integrated circuits in the groove members.

[0012] Further, each of the turnover units comprises a base applied to the bottom wall of the fixed plate, a first telescopic driving rod fixed to the base, a rotating base fixed to the base, a rotating rod vertically and pivotally fixed to the rotating base, a second telescopic driving rod fixedly connected with the bottom of the rotating rod, a fixed block fixed to the bottom of the second telescopic driving rod, a rotating driving motor fixed to the side wall of the fixed block through a corresponding mounting seat and horizontally arranged with a power output shaft, a second adsorption mechanism fixedly connected with the power output shaft of the rotating driving motor, and a first adsorption mechanism fixedly connected with the bottom of the first telescopic driving rod, the base is provided with an open groove upwardly recessed from the bottom wall, and the rotating base is used for driving the rotating rod to pivot.

[0013] Further, the rotating base comprises a speed reducer arranged at least partially in the fixed plate and with a power output shaft penetrating out to the open groove, and a bearing member with an outer ring sleeved on the inner groove wall of the open groove, wherein the rotating rod is sleeved at least partially on the inner ring of the bearing member, the power output shaft of the speed reducer is fixedly connected with one end of the rotating rod, and thus the speed reducer is driven to synchronously pivot the rotating rod.

[0014] Further, the first adsorption mechanism comprises a first housing in a cylindrical structure and with an internal cavity, a first suction hole arranged in communication with the cavity on the shell wall of the first housing, a communication port arranged on the first housing, a first rubber adsorption nozzle arranged in communication on the first suction hole, a first negative pressure pump fixed to the fixed plate through a fixed seat, a communication pipe arranged in communication at one end with the communication port and at the other end with the suction port of the first negative pressure pump, and a first rubber layer applied to the shell wall of the first housing outside the communication port and the first suction hole, wherein the shell top wall of the first housing is fixedly connected with the bottom of the first telescopic driving rod.

[0015] Further, the second adsorption mechanism comprises a second housing in a cylindrical structure and with an internal cavity, a second suction hole arranged in sequence on the shell wall of the second housing, a matching port arranged on the second housing, a second negative pressure pump fixed to the fixed plate through a fixed seat, a connecting pipe arranged in communication at one end with the matching port and at the other end with the suction port of the second negative pressure pump, a second rubber layer applied to the shell wall of the second housing outside the matching port and the second suction hole, and a second rubber adsorption nozzle arranged in sequence on the second suction hole, wherein one end of the second housing is fixedly connected with the power output shaft of the rotating driving motor.

[0016] The present application has the following beneficial effects:

[0017] 1. The system of this invention realizes the automated process of orderly transportation, flipping and quality analysis of integrated circuits, which improves production efficiency. The design of the transportation module and receiving module helps to protect integrated circuits from damage or breakage. The quality analysis module inspects each integrated circuit to obtain the quality status of the corresponding batch of products in a timely manner.

[0018] 2. The flipping unit of the present invention is designed to automatically flip integrated circuits, thereby reducing the need for manual operation. The first adsorption mechanism and the second adsorption mechanism ensure that the integrated circuits will not slip or fall during the flipping process, thereby reducing the risk of operation. The transport module and the flipping module are suitable for integrated circuits of different types and sizes, thus having a certain degree of versatility. It realizes efficient and accurate quality monitoring of integrated circuits, thereby helping to improve production efficiency and quality.

[0019] 3. The quality analysis module of this invention comprehensively evaluates the quality of integrated circuits through integrated analysis of multiple features. It can automatically classify integrated circuits with defects as non-conforming products and count their number, which helps to monitor production quality so that staff can take timely measures, reduce the defect rate, and improve production efficiency and consistency. The quality analysis is performed in real time, which can detect and respond to problems immediately during the production process, helping to avoid the mass production of non-conforming products. Attached Figure Description

[0020] The invention will be further understood from the following description taken in conjunction with the accompanying drawings. The components in the drawings are not necessarily drawn to scale, but rather the emphasis is on illustrating the principles of the embodiments. In different views, the same reference numerals designate corresponding parts.

[0021] Figure 1 This is a modular schematic diagram of the Internet of Things-based integrated circuit production line management system of the present invention.

[0022] Figure 2 This is a schematic diagram of the transportation module of the present invention.

[0023] Figure 3 This is a schematic diagram of the flipping module of the present invention.

[0024] Figure 4 Appendix of the present invention Figure 3 A magnified view of point A in the diagram.

[0025] Figure 5 This is a schematic diagram of the structure of the first adsorption mechanism of the present invention.

[0026] Explanation of reference numerals: 1-groove piece; 2-transmission mechanism; 3-open dish; 4-horizontal plate; 5-rotating roller; 6-bearing piece; 7-second telescopic driving rod; 8-second rubber suction nozzle; 9-fixing block; 10-rotating driving motor; 11-conveying belt; 12-second suction mechanism; 13-first suction mechanism; 14-first telescopic driving rod; 15-base; 16-open slot; 17-second housing; 18-connecting pipe; 19-supporting plate. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with its embodiments; it is pointed out that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. Other systems, methods and / or features of the present embodiments will become apparent to those skilled in the art after a review of the following detailed description and drawings. The terms used to describe the positional relationship in the drawings are only used for illustrative description and cannot be understood as limiting the present patent. The specific meanings of the above terms can be understood according to the specific circumstances by those skilled in the art.

[0028] Embodiment one: in combination with the accompanying Figure 1 , the accompanying Figure 2 , the accompanying Figure 3 , the accompanying Figure 4 and the accompanying Figure 5 , the present embodiment constructs an integrated circuit production line management system based on the Internet of Things, which comprises a transportation module for transporting the completed integrated circuits, a turning module for turning the integrated circuits on the transportation module, a receiving module adjacent to the transportation module for receiving the integrated circuits transported by the transportation module, an image acquisition module for acquiring images of the integrated circuits on the transportation module, and a quality analysis module for analyzing the quality of the integrated circuits by analyzing and judging the image information taken by the image acquisition module,

[0029] The transportation module comprises a transmission mechanism and a plurality of groove pieces laid on the transmission belt of the transmission mechanism at a preset interval distance, the transmission mechanism comprises a closed loop conveying belt horizontally arranged, at least two driving rollers matched with both sides of the conveying belt for tensioning and supporting the conveying belt, and a driving motor for driving the transmission roller to rotate synchronously and correspondingly driving the transmission operation of the conveying belt,

[0030] One end of the transmission mechanism is the sending end, and the other end of the transmission mechanism is the receiving end, the integrated circuits are sequentially placed in the groove pieces from the receiving end, and the integrated circuits are further transported to the sending end of the transmission mechanism until they are sequentially dropped into the receiving module,

[0031] The receiving module is an open tray arranged below the receiving end to receive the integrated circuits sequentially falling off from the groove pieces of the receiving end,

[0032] The groove piece is made of flexible silica gel material, the top of the groove piece is an opening arranged downwardly concave, the bottom of the groove piece is fixed on the conveying belt, and the opening area of the groove piece forms a storage cavity for placing the integrated circuits, and the cross section of the storage cavity is larger than the integrated circuit,

[0033] The turning module includes a horizontal plate horizontally fixed above the conveying module at a preset distance by a support frame, and a plurality of turning units respectively fixed to the bottom wall of the horizontal plate for respectively turning the integrated circuits in the groove pieces,

[0034] The system realizes the automatic process of orderly transportation, turning and quality analysis of integrated circuits, improves the production efficiency, and the design of the conveying module and the receiving module helps to protect the integrated circuits from damage or fragmentation, each integrated circuit is checked by the quality analysis module, and the quality of the corresponding batch of products is obtained in time.

[0035] Embodiment two: combined with Figure 1 , attached Figure 2 , attached Figure 3 , attached Figure 4 and attached Figure 5 , in addition to containing the contents of the above embodiments, each of the turning units includes a base arranged on the bottom wall of the fixed plate, a first telescopic drive rod fixed on the base, a rotating base fixed on the base, a rotating rod vertically and axially fixed on the rotating base, a second telescopic drive rod fixedly connected with the bottom of the rotating rod, a fixed block fixed on the bottom of the second telescopic drive rod, a rotating drive motor fixedly connected with the power output shaft of the rotating drive motor and arranged horizontally through the corresponding mounting seat and the side block wall of the fixed block, a second adsorption mechanism fixedly connected with the power output shaft of the rotating drive motor, and a first adsorption mechanism fixedly connected with the first telescopic drive rod,

[0036] The base is provided with an opening groove upwardly concave from the bottom wall, the rotating base is used for driving the rotating rod to rotate, the rotating base includes a speed reducer motor at least partially embedded on the fixed plate and having a power output shaft penetrating out to the opening groove, and a bearing member having an outer ring sleeved on the inner groove wall of the opening groove, wherein the rotating rod is at least partially sleeved on the inner ring of the bearing member, the power output shaft of the speed reducer motor is fixedly connected with one end of the rotating rod, and when the speed reducer motor is driven, the rotating rod is synchronously rotated,

[0037] The first suction mechanism comprises a first shell with a cylindrical structure and an internal cavity, a first suction hole arranged in sequence on the shell wall of the first shell and communicating with the cavity, a communication port arranged on the first shell, a first rubber suction nozzle arranged in sequence on the first suction hole, a first negative pressure pump fixed to the fixed plate through the fixing seat, a communication pipe with one end communicating with the communication port and the other end communicating with the suction port of the first negative pressure pump, and a first rubber layer laid on the shell wall of the first shell outside the communication port and the first suction hole, wherein the top wall of the first shell is fixedly connected with the bottom of the first telescopic driving rod,

[0038] The second suction mechanism comprises a second shell with a cylindrical structure and an internal cavity, a second suction hole arranged in sequence on the shell wall of the second shell, a matching port arranged on the second shell, a second negative pressure pump fixed to the fixed plate through the fixing seat, a connecting pipe with one end communicating with the matching port and the other end communicating with the suction port of the second negative pressure pump, a second rubber layer laid on the shell wall of the second shell outside the matching port and the second suction hole, and a second rubber suction nozzle arranged in sequence on the second suction hole, wherein one end of the second shell is fixedly connected with the power output shaft of the rotary driving motor,

[0039] The operation process of the turnover unit is as follows:

[0040] S101: Each component of the turnover unit is in standby state, the first telescopic driving rod and the second telescopic driving rod are also in the retracted state, and the suction mechanism of the turnover unit is in the closed state, and the second shell is parallel below the first shell,

[0041] S102: The transmission mechanism starts operation, the integrated circuit is sequentially placed into the storage cavity of the groove piece by the staff and / or the corresponding delivery device, and the turnover unit is aligned with the integrated circuit in sequence,

[0042] S103: The second telescopic driving rod is elongated until the second shell abuts against the integrated circuit in the groove piece, so that the second rubber suction nozzle adsorbs the integrated circuit and keeps it stable,

[0043] S104: The rotary driving motor drives the second shell to rotate 180 degrees to horizontally fix the integrated circuit above the second shell,

[0044] S105: The first telescopic driving rod is elongated until the first shell abuts against the integrated circuit, the first negative pressure pump starts to work, so that the first rubber suction nozzle adsorbs the integrated circuit, at the same time, the second negative pressure pump stops working, the adsorption force of the second rubber nozzle to the integrated circuit disappears, and the first shell adsorbs and fixes the integrated circuit,

[0045] S106: The deceleration motor starts to work, rotates the base to rotate the rotating rod, and drives the second telescopic drive rod to rotate 180 degrees to drive the second shell away from the lower area of the integrated circuit,

[0046] S107: The first telescopic drive rod is further elongated until the second shell is moved into the storage cavity of the groove piece, and at the same time, the first negative pressure pump stops working, the adsorption force of the first rubber nozzle to the integrated circuit disappears, and the turning process of the integrated circuit is completed,

[0047] S108: After the turning process is completed, the turning unit returns to the initial state and is ready to receive the next integrated circuit for turning operation;

[0048] The design of the turning unit of the present application allows the integrated circuit to be automatically turned over, thereby reducing the need for manual operation. The first and second adsorption mechanisms ensure that the integrated circuit does not slip or fall during the turning process, thereby reducing the risk of operation. The transport module and the turning module are suitable for different types and sizes of integrated circuits, thereby having certain universality. The high-precision quality monitoring of the integrated circuit is realized, thereby helping to improve the production efficiency and quality.

[0049] Example three: combined with the attached Figure 1 , attached Figure 2 , attached Figure 3 , attached Figure 4 and attached Figure 5 , in addition to containing the contents of the above examples, the image acquisition module includes a support plate fixed on the transmission mechanism at a preset distance above the support frame, and at least two camera devices fixed on the support plate through corresponding mounting seats for shooting the integrated circuits on the conveying belt, one camera device is used for image shooting of the integrated circuit without turning in the groove piece, and the other camera device is used for image shooting of the integrated circuit after turning in the groove piece. The processing steps of the quality analysis module are realized as follows:

[0050] 201: The unturned picture and the turned picture of the same integrated circuit taken by the two camera devices are combined into a processing picture,

[0051] 202: The processing picture is subjected to denoising and contrast enhancement processing to obtain a preprocessed image, and the integrated circuit region in the preprocessed image is segmented by an image segmentation algorithm and edge detection to obtain an integrated circuit pattern,

[0052] 203: The shape, color and texture features of the integrated circuit pattern are extracted by Canny edge detection algorithm, contour extraction and boundary box calculation and texture analysis algorithm,

[0053] 204: comparing the extracted feature shape, color, and texture with expected stored features, and marking the integrated circuit image with shape change and defects as defective according to the result of the comparison analysis, wherein the expected stored features include shape, color, and texture features of a normal circuit board,

[0054] 205: listing the integrated circuits with defects as unqualified products, and counting the number of unqualified products in the production batch,

[0055] 206: when the number of unqualified products is greater than a threshold, stopping the production operation of the production line, and triggering a notification or feedback mechanism so that the staff can take timely measures to adjust the operation of the production line.

[0056] The quality analysis module of the present application can more comprehensively evaluate the quality of the integrated circuit through comprehensive analysis of multiple features, can automatically list the integrated circuit with defects as unqualified products, and can count the number of unqualified products, which helps to monitor the production quality so that the staff can take timely measures to reduce the rate of defective products and improve the production efficiency and consistency. The quality analysis is performed in real time, which can immediately detect and respond to problems during production, which helps to avoid mass production of unqualified products.

[0057] Although the present application has been described above with reference to various embodiments, it should be understood that many changes and modifications can be made without departing from the scope of the present application. That is, the methods, systems, and devices discussed above are examples. Various configurations can omit, substitute, or add various procedures or components as appropriate. For instance, the methods can be performed in an order different from that described, and / or various steps can be added, omitted, and / or combined. Also, features described with respect to certain configurations can be combined in various other configurations, for instance, different aspects and elements of configurations can be combined in a similar manner. Also, technology evolves and, thus, many of the elements are examples and do not limit the scope of the disclosure or claims. And, as will be understood by those skilled in the art, various equivalents can be substituted for elements described and these are intended to be encompassed by the disclosure. Moreover, in some embodiments, features can be added to or removed from the device without departing from the scope of the claims. Furthermore, many of the features of the claimed invention can be used to good advantage without the user having to implement other features described. The elements and acts of the various examples described above are referred to using general terms or terminology specific to the art. Such specific terminology is used herein merely to refer to the corresponding functions of the various examples.

Claims

1. An Internet of Things-based integrated circuit production line management system, characterized by, The integrated circuit production line management system comprises a conveying module for conveying the completed integrated circuits, a turning module for turning the integrated circuits on the conveying module, a receiving module adjacent to the conveying module for receiving the integrated circuits conveyed by the conveying module, an image acquisition module for acquiring images of the integrated circuits on the conveying module, and a quality analysis module for analyzing the quality of the integrated circuits by analyzing the image information captured by the image acquisition module, The conveying module comprises a transmission mechanism and a plurality of groove members laid on the transmission belt of the transmission mechanism at preset interval distances. The transmission mechanism comprises a horizontally arranged closed loop transmission belt, at least two driving rods matched with the two sides of the transmission belt for tensioning and supporting the transmission belt, and a driving motor for driving the transmission rod to synchronously rotate and correspondingly drive the transmission belt to perform transmission operation. One end of the transmission mechanism is a sending end, and the other end is a receiving end. The integrated circuits are sequentially placed in the groove members from the receiving end and are further conveyed to the sending end of the transmission mechanism until they sequentially fall into the receiving module. The receiving module is an open dish arranged below the receiving end to receive the integrated circuits sequentially falling out of the groove members from the receiving end. The open dish is a box with an open upper end. The image acquisition module comprises a support plate fixed above the transmission mechanism at a preset distance by a support frame, and at least two camera devices fixed on the support plate by corresponding mounting seats to capture images of the integrated circuits on the transmission belt. The groove members are made of flexible silica gel material. The top of the groove member is recessed downward to form an opening. The bottom of the groove member is fixed on the transmission belt. The opening area of the groove member forms a storage cavity for placing the integrated circuits. The cross section of the storage cavity is larger than the integrated circuit.

2. The integrated circuit production line management system according to Claim 1, wherein The turning module comprises a horizontal plate horizontally fixed above the conveying module at a preset distance by a support frame, and a plurality of turning units fixed on the bottom wall of the horizontal plate to respectively turn the integrated circuits in each groove member.

3. The integrated circuit production line management system according to claim 2, wherein, Each turning unit comprises a base laid on the bottom wall of the fixed plate, a first telescopic driving rod fixed on the base, a rotating base fixed on the base, a rotating rod vertically and axially fixed on the rotating base, a second telescopic driving rod fixedly connected with the bottom of the rotating rod, a fixed block fixed on the bottom of the second telescopic driving rod, a rotating driving motor fixed on the side wall of the fixed block by a corresponding mounting seat and horizontally arranged on the power output shaft, a second suction mechanism fixed horizontally on the power output shaft of the rotating driving motor, and a first suction mechanism fixed horizontally on the bottom of the first telescopic driving rod. The base is recessed upward from its bottom wall to form an opening groove. The rotating base is used to drive the rotating rod to axially rotate.

4. The integrated circuit production line management system according to claim 3, wherein, The rotating base comprises a speed reducer motor embedded at least partially on the fixed plate and a power output shaft penetrating to the opening slot, and a bearing member with an outer ring sleeved on the inner slot wall of the opening slot, wherein the rotating stick is sleeved at least partially on the inner ring of the bearing member, the power output shaft of the speed reducer motor is fixedly connected with one end of the rotating stick, and when the speed reducer motor is driven, the rotating stick is synchronously rotated.

5. The integrated circuit production line management system according to claim 4, wherein, The first suction mechanism comprises a first shell with a cylindrical structure and an empty cavity inside, a first suction hole arranged in sequence on the shell wall of the first shell and communicated with the cavity, a communication port arranged on the first shell, a first rubber suction nozzle arranged in sequence on the first suction hole, a first negative pressure pump fixed to the fixed plate through a fixing seat, a communication pipe with one end communicated with the communication port and the other end communicated with the suction port of the first negative pressure pump, and a first rubber layer arranged on the shell wall of the first shell outside the communication port and the first suction hole, wherein the shell top wall of the first shell is fixedly connected with the bottom of the first telescopic driving rod.

6. The integrated circuit production line management system of claim 5, wherein, The second suction mechanism comprises a second shell with a cylindrical structure and a cavity inside, a second suction hole arranged in sequence on the shell wall of the second shell, a matching port arranged on the second shell, a second negative pressure pump fixed to the fixed plate through a fixing seat, a connecting pipe with one end communicated with the matching port and the other end communicated with the suction port of the second negative pressure pump, a second rubber layer arranged on the shell wall of the second shell outside the matching port and the second suction hole, and a second rubber suction nozzle arranged in sequence on the second suction hole, wherein one end of the second shell is fixedly connected with the power output shaft of the rotating driving motor.

Citation Information

Patent Citations

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    CN109273388B

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    CN110289218B

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    CN114554713B