Arc-by-arc compensation method for arc extinguishing time energy loss of magnetron sputtering technology

Abstract

The invention discloses an arc-by-arc compensation method for arc extinguishing time energy loss of a magnetron sputtering technology. The arc-by-arc compensation method comprises the following steps: calculating energy loss and arc extinguishing starting time based on a magnetron sputtering power supply; receiving the energy loss by using a coating machine, and obtaining an energy loss degree value; and the relative movement speed of the target and the substrate is controlled based on the energy loss degree value, so that the sputtering time of the substrate and the target within the arc extinguishing time is prolonged, and the non-uniformity of the film thickness is compensated. According to the invention, the generation moment of each arc is detected through the magnetron sputtering power supply, the energy loss is calculated, the energy loss and the arc extinguishing starting moment are sent to the coating machine table, and the coating machine table calculates the relative movement speed degree of the target and the substrate within the arc extinguishing time after receiving a signal, and the relative movement speed degree is reduced to a certain percentage to compensate the nonuniformity of the film thickness.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of magnetron sputtering technology, and particularly relates to an arc-by-arc compensation method for energy loss during arc extinguishing time in magnetron sputtering technology. BACKGROUND

[0002] Due to the inevitable phenomenon of conversion from glow to arc in the magnetron sputtering process, the magnetron sputtering power current instantaneously increases while the voltage decreases, which accelerates the target evaporation speed and even ejects large particles, seriously affecting the product quality and performance. At present, the general practice is to detect the voltage and current signals of the power supply, determine that the arc has been struck, and then pause the power supply for a period of time to wait for the arc to extinguish before restarting the power supply. This period of time is called arc extinguishing time.

[0003] In the magnetron sputtering mode of relative motion between the target material and the substrate, such as flexible substrate coating, multi-chamber linear coating machine, and coating machine with a rotating drum, etc., during the arc extinguishing time, there is no power supply power on the magnetron sputtering target, but during this period, the substrate and the target material move a certain distance, resulting in a thinning of the film on this length of the substrate or even no film, and a difference in film thickness from the normal coating substrate segment. Therefore, it is necessary to compensate for the thickness of this thin film to make it consistent with the thickness of other segments. However, the existing magnetron sputtering power supply and device have almost no related functions. The magnetron sputtering power supply field proposes a compensation method in which the power supply automatically increases a certain percentage of power in the subsequent pulse, but it is only applicable to the working mode in which the substrate and the target are relatively static. In the working mode in which the substrate and the target are relatively moving, the film thickness of the running length during the arc extinguishing time will still be thin, and the film of the subsequent segment will be thicker due to the increase in power supply power, resulting in greater non-uniformity. This energy compensation method cannot be used in the working mode of relative motion between the substrate and the target in the sputtering process. SUMMARY

[0004] To solve the above technical problems, the present application proposes an arc-by-arc compensation method for energy loss during arc extinguishing time in magnetron sputtering technology. The magnetron sputtering power supply detects the occurrence time of each arc and calculates the energy loss, and sends the energy loss and the arc extinguishing start time to the coating machine. After receiving the signal, the coating machine calculates the degree of reduction of the relative motion speed between the target and the substrate during the arc extinguishing time to a certain percentage to compensate for the non-uniformity of the film thickness.

[0005] To achieve the above purpose, the present application provides an arc-by-arc compensation method for energy loss during arc extinguishing time in magnetron sputtering technology, comprising:

[0006] calculating the energy loss and the arc extinguishing start time based on the magnetron sputtering power supply;

[0007] receiving the energy loss by the coating machine to obtain the energy loss degree value;

[0008] Controlling the relative motion speed of the target and the substrate based on the energy loss degree value, so that the sputtering time of the substrate and the target during the arc extinguishing time is lengthened, and the non-uniformity of the film thickness is compensated.

[0009] Optionally, the magnetron sputtering power supply comprises: a first man-machine interface and a first external control interface, and has the functions of calculating the energy loss per arc and sending the arc extinguishing start time.

[0010] Optionally, the method for calculating the energy loss comprises:

[0011] J Loss =P×t

[0012] wherein, J Loss is the energy loss, P is the output power of the magnetron sputtering power supply in normal working state, and t is the single arc extinguishing time.

[0013] Optionally, the first man-machine interface comprises: a first energy loss per arc compensation function start-stop unit, a first external control or man-machine control unit, a first energy calculation method unit, a first energy representation mode unit, and a first arc extinguishing time unit.

[0014] Optionally, the film coating machine comprises: a second man-machine interface and a second external control interface, and has the functions of calculating the motor speed and controlling the motor speed of the relative motion of the target and the substrate.

[0015] Optionally, the second man-machine interface comprises: a second energy loss compensation function start-stop unit, a second energy calculation method unit, a second energy representation mode unit, a second arc extinguishing time unit, and a second speed reduction factor unit.

[0016] Optionally, the first external control interface or the second external control interface comprises: an energy loss per arc compensation function start-stop signal, an external control or man-machine control signal, an energy calculation method signal, an energy representation mode signal, an arc extinguishing time signal, an arc extinguishing start time signal, an energy loss signal, and a normal working energy signal.

[0017] Optionally, obtaining the energy loss degree value comprises:

[0018] Calculating the normal working energy value:

[0019] J Normal =P×T;

[0020] Based on the normal working energy value and the energy loss, the energy loss degree value is obtained.

[0021] J Per =J Loss / J Normal ;

[0022] wherein, J NormalFor normal work energy value, for energy loss degree value, T is unit working time.

[0023] Optionally, the energy loss degree value controls the relative movement speed of the target and the substrate as:

[0024] Rpeed Val = Factor Cor ×Speed Rel × J Per

[0025] Wherein, Rpeed Val is the relative running speed, Rpeed Rel is the speed before speed reduction, Factor Cor is the correction factor.

[0026] Compared with the prior art, the present application has the following advantages and technical effects:

[0027] The present application provides an arc-by-arc compensation method for the sputtering energy loss caused by the arc extinguishing time interruption of the magnetron sputtering technology, and the energy loss caused by the film thinning during the arc striking is compensated by using this function, which provides more means for the uniformity implementation of the magnetron sputtering film coating and provides a basis for the fine control of the magnetron sputtering film coating. BRIEF DESCRIPTION OF DRAWINGS

[0028] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application and are incorporated in and constitute a part of this application. The embodiments of the present application illustrated in the drawings and their descriptions are used to explain the present application and are not intended to limit the present application. In the drawings:

[0029] Figure 1 is a flow chart of an arc-by-arc compensation method for the energy loss of the arc extinguishing time of the magnetron sputtering technology according to an embodiment of the present application;

[0030] Figure 2 is an interface principle diagram of a magnetron sputtering machine with energy compensation function according to an embodiment of the present application;

[0031] Figure 3 is an interface principle diagram of a magnetron sputtering power supply with energy compensation function according to an embodiment of the present application;

[0032] Figure 4 is a man-machine interface menu schematic diagram of a magnetron sputtering power supply with arc-by-arc energy compensation function according to an embodiment of the present application;

[0033] Figure 5 is a man-machine interface menu schematic diagram of a magnetron sputtering film coating machine with arc-by-arc energy compensation function according to an embodiment of the present application. DETAILED DESCRIPTION

[0034] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0035] It should be noted that the steps shown in the flowchart of the drawings can be executed in a computer system such as a set of computer executable instructions, and although a logical order is shown in the flowchart, in some cases, the steps shown or described herein can be executed in an order different from that shown.

[0036] The present embodiment proposes a magnetic sputtering technology arc extinguishing time energy loss arc-by-arc compensation method, as shown in Figure 1 , specifically comprising the following steps:

[0037] Calculate the energy loss and the arc extinguishing starting time based on the magnetic sputtering power supply;

[0038] Receive the energy loss with the coating machine, and obtain the energy loss degree value;

[0039] Based on the energy loss degree value, control the relative motion speed of the target and the substrate, so that the sputtering time of the substrate and the target during the arc extinguishing time is lengthened, and the non-uniformity of the film thickness is compensated.

[0040] Specifically, the power supply calculates the energy lost during the arc extinguishing time, and sends the related energy loss signal and the arc extinguishing starting time signal to the coating machine through a data signal or an interface. The software control system of the machine starts at the starting time of each arc extinguishing, controls the relative motion speed of the target and the substrate to a certain percentage according to the energy loss degree, so that the sputtering time of the substrate and the target during the arc extinguishing time is lengthened, thereby compensating for the non-uniformity of the film thickness.

[0041] The application range of the energy loss arc-by-arc compensation technology is: it can be used for magnetic sputtering generation, and can also be used for power supply with substrate bias acceleration, including but not limited to direct current magnetic sputtering power supply, pulse magnetic sputtering power supply, bipolar pulse magnetic sputtering power supply, twin pulse magnetic sputtering power supply, high-power pulse magnetic sputtering power supply, radio frequency power supply; direct current bias power supply, pulse bias power supply, direct current superimposed pulse bias power supply, trapezoidal pulse bias power supply, bipolar pulse bias power supply.

[0042] Further, the magnetic sputtering power supply comprises: a function of calculating arc-by-arc energy loss and sending arc extinguishing starting time, a first man-machine interface and a first external control interface.

[0043] Specifically, the power supply has the following functions: as shown in Figure 3 The power supply has the functions of calculating arc-by-arc energy loss and sending arc extinguishing starting time, and is equipped with related man-machine interface and external control interface.

[0044] As shown in Figure 4The human-machine interface of the power supply shown refers to the presence of an arc-by-arc energy loss compensation menu on the power supply end human-machine interface. The menu includes options such as start / stop of the arc-by-arc energy loss compensation function, external control or human-machine control, energy calculation method, energy representation method, and arc extinguishing time.

[0045] Data signals or interfaces refer to signals or interfaces related to energy loss arc compensation function start / stop signals, external control or human-machine control signals, energy calculation method signals, energy representation method signals, arc extinguishing time signals, arc extinguishing start time signals, energy loss signals, and normal operating energy signals at the power supply end.

[0046] Furthermore, the method for calculating energy loss is as follows:

[0047] J Loss =P×t

[0048] Among them, J Loss For energy loss, P is the output power of the magnetron sputtering power supply when it is working normally, and t is the single arc extinguishing time.

[0049] Furthermore, the coating machine includes: a motor speed calculation function that can control the relative motion between the target and the substrate in real time, a second human-machine interface, and a second external control interface.

[0050] Specifically, such as Figure 2 As shown, the relevant functions of the coating machine refer to the ability of the magnetron sputtering coating machine equipped with arc compensation function to calculate the motor speed and control the motor speed of the target and substrate relative to each other in real time, and to have relevant human-machine interface and external control interface.

[0051] like Figure 5 The human-machine interface of the coating machine shown has an energy loss arc compensation menu, which includes options for starting and stopping the energy loss compensation function, energy calculation method, energy representation method, arc extinguishing time, and speed reduction factor.

[0052] Data signals or interfaces refer to the signals or interfaces on the external control interface of the coating machine that are equipped with energy loss arc compensation function start / stop signals, energy calculation method signals, energy representation mode signals, arc extinguishing time signals, arc extinguishing start time signals, energy loss signals, normal operation energy signals, etc.

[0053] Data signals or interface transmission methods can be various types of signals, such as digital, analog, parallel, serial, RS232, 485, and PROFIBUS.

[0054] The energy loss arc-by-arc compensation function start / stop function refers to the ability to activate and deactivate the energy loss arc-by-arc compensation function. This function can be set on the power supply or coating machine and is transmitted bidirectionally. The activation / deactivation is determined by process engineers based on process requirements.

[0055] The external control or human-machine interface control option refers to the control options at the power supply end, such as whether the parameters related to the start / stop of the energy loss arc compensation function, energy calculation method, energy representation method, and arc extinguishing time are set directly by the power supply end human-machine interface or by the coating machine control and transmitted between them.

[0056] Energy representation refers to the amount of energy lost, which can be the actual energy lost or a percentage of the working energy. It can be set on the power supply or coating machine and is bidirectional. The representation method is determined by process engineers based on process requirements.

[0057] Furthermore, obtaining the energy loss level value includes:

[0058] Calculate the normal operating energy value;

[0059] Based on the normal working energy value and energy loss, obtain the energy loss level value.

[0060] Specifically, the calculation method for normal working energy data: J Normal =P×T, where P is the output power of the magnetron sputtering power supply when it is working normally, and the calculation method is as follows; T is the unit working time, usually in seconds (s).

[0061] The power P is calculated by the magnetron sputtering power supply based on the output voltage U and current I during normal sputtering; it can be expressed as DC power, pulse peak power, or equivalent DC power in pulse mode. The specific choice is made by the process engineer according to process requirements. The specific calculation method for P is as follows:

[0062] In DC mode: the power P is calculated as follows: P = U × I, where U and I are the average or effective values ​​of multiple samples.

[0063] In pulse mode: Pulse peak power calculation method:

[0064] The power P is calculated as follows: P = U × I, where U and I can be the average or effective value of multiple pulses sampled at the same position point. The same position point means that when the power supply is working with the same set parameters, it is the same distance from the start time of each pulse.

[0065] In pulse mode: Equivalent DC power calculation method:

[0066] The power P is calculated as follows: P = U × I × D, where U and I are calculated in the same way as above, and D is the pulse duty cycle.

[0067] For multiple sampling or multiple pulses, the lengths are usually selected as 8, 16, 32, 64, etc. in current control systems.

[0068] The formula for calculating energy loss data in terms of actual energy loss is: JLoss = P x t, t is single arc extinguishing time.

[0069] The calculation formula of energy loss data expressed in percentage of working energy is: J Per = J Loss / J Normal .

[0070] The arc extinguishing starting time refers to the time point when the power supply judges the arc and closes the power output. This time point needs instant communication, and its signal can be a digital level, a coating machine polling or a related signal such as the energy loss output signal triggering the machine control system.

[0071] The arc extinguishing time is between 20us-500ms; it can be set in the power supply or the coating machine, and is bidirectional transmission. The specific time value is set by the process personnel according to the process requirements.

[0072] Further, the energy loss degree value controls the relative motion speed of the target and the substrate as:

[0073] Rpeed Val = Factor Cor ×Speed Rel × J Per

[0074] Wherein, Rpeed Val is the relative running speed, Rpeed Rel is the speed before speed reduction, Factor Cor is the correction factor, and the range is 0%-200%, and the specific value is set by the process personnel according to the process requirements.

[0075] The method of directly controlling the relative motion speed of the target and the substrate by the power supply: the power supply needs to increase the motor control signal system, and the other specific calculation method is the same as above.

[0076] The present embodiment is described in detail as follows:

[0077] First step: select 30KW DC magnetron sputtering power supply. Design arc-by-arc compensation function for magnetron sputtering power supply, and add energy loss calculation module in its software function module.

[0078] Increase the energy loss arc-by-arc compensation menu in the man-machine interface, increase the energy loss compensation function start-stop options, external control or man-machine control options, energy calculation method options, energy representation method options, arc extinguishing time options in the pull-down menu, increase three sub-options of DC calculation, pulse peak calculation and pulse peak equivalent DC calculation in the energy calculation method option submenu, and increase two sub-options of percentage and real value in the energy representation method option submenu.

[0079] The energy loss compensation function start-stop signal, the external control or man-machine control signal, the energy calculation method signal, the energy representation mode signal, the arc extinguishing time signal, the energy loss signal, the normal working energy signal and other related signals are added on the original RS485 communication system of the external control interface.

[0080] The arc extinguishing starting time signal line is added on the external control interface, which is high level when there is no arc and low level when arc extinguishing occurs, and is used to trigger the external control interrupt of the host computer platform.

[0081] In the second step, the self-developed LH-100 type magnetron sputtering coating machine is selected, and the arc extinguishing energy loss reduction speed sub-module is added in the DSP real-time control system of the magnetron sputtering coating machine platform.

[0082] The energy loss arc-by-arc compensation menu is added on the man-machine interface, and the energy loss compensation function start-stop option, the energy calculation method option, the energy representation mode option, and the arc extinguishing time option are added in the pull-down menu. The direct current calculation, pulse peak value calculation and pulse peak equivalent direct current calculation three sub-options are added in the energy calculation method option sub-menu, and the percentage and real value two sub-options are added in the energy representation mode option sub-menu.

[0083] The energy loss compensation function start-stop signal, the energy calculation method signal, the energy representation mode signal, the arc extinguishing time signal, the energy loss signal, the normal working energy signal and other related signals are added on the original RS485 communication system of the external control interface.

[0084] The arc extinguishing starting time signal line is added on the external control interface, which is high level when there is no arc and low level when arc extinguishing occurs, and is used to receive the arc extinguishing starting time signal of the power supply.

[0085] In the third step, the coating machine is powered on and works normally. The energy loss arc-by-arc compensation function is selected to be turned on at the power supply end, the external control or man-machine control option is selected to be man-machine control, the energy calculation method is selected to be direct current mode, and the energy representation mode is selected to be percentage. The speed correction factor is selected to be 80% at the control end of the coating machine.

[0086] In the fourth step, the coating machine is started, and Ag film is prepared on the PET film with a width of 0.8 m and a thickness of 36 μm. The relative running speed of the target and the substrate is 0.1 m / minute, and the sputtering time is 90 minutes. The thickness of the sample is tested every 10 cm along the length direction. The comparison of the same parameters without starting the arc-by-arc compensation function is shown in Table 1. After starting the arc-by-arc compensation function, the uniformity along the length direction is greatly improved.

[0087] Table 1

[0088] Result comparison Start arc-by-arc compensation function Stop arc-by-arc compensation function Thickness 1 1.127 μm 0.932 Thickness 2 1.123 μm 0.978 Thickness 3 1.125 μm 0.945 Thickness 4 1.117 μm 0.967 Thickness 5 1.126 μm 0.985 Thickness 6 1.118 μm 0.923 Thickness 7 1.123 μm 0.975 Thickness 8 1.119 μm 0.951 Average thickness 1.122 μm 0.957 μm Lengthwise uniformity 10 nm (0.89%) 53 nm (5.5%)

[0089] The above merely provides the preferred embodiments of the present application, and the protection scope of the present application is not limited thereto, and any changes or substitutions within the technical scope disclosed by the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A method for arc-by-arc compensation of the energy loss in the extinction time of an arc in a magnetron sputtering technique, characterized in that The application relates to a magnetron sputtering power supply, a coating machine and a method for calculating energy loss and arc extinguishing starting time. The energy loss is received by the coating machine to obtain an energy loss degree value. The relative motion speed of the target and the substrate is controlled based on the energy loss degree value, so that the sputtering time of the target and the substrate is prolonged during arc extinguishing, and the non-uniformity of the film thickness is compensated. The magnetron sputtering power supply comprises a first human-machine interface and a first external control interface.

2. The method for arc-by-arc compensation of the energy loss in the extinction time of the arc in a magnetron sputtering technique according to claim 1, characterized in that, The method for calculating energy loss comprises the following steps:

3. The method for arc-by-arc compensation of extinction time energy loss in a magnetron sputtering technique as claimed in claim 1, wherein, The first human-machine interface comprises a first energy loss arc-by-arc compensation function starting and stopping unit, a first external control or human-machine control unit, a first energy calculation method unit, a first energy representation mode unit and a first arc extinguishing time unit. J Loss =P×t where J Loss is the energy loss, P is the output power of the magnetron sputtering power supply when it is working normally, and t is the single arc extinguishing time.

4. The method for arc-by-arc compensation of extinction time energy loss in a magnetron sputtering technique as claimed in claim 2, wherein, The coating machine comprises a second human-machine interface and a second external control interface.

5. The method for arc-by-arc compensation of extinction time energy loss in a magnetron sputtering technique as claimed in claim 1, wherein, The second human-machine interface comprises a second energy loss compensation function starting and stopping unit, a second energy calculation method unit, a second energy representation mode unit, a second arc extinguishing time unit and a second speed reduction factor unit.

6. The method for arc-by-arc compensation of extinction time energy losses in a magnetron sputtering technique as claimed in claim 5, wherein, The first external control interface or the second external control interface comprises energy loss arc-by-arc compensation function starting and stopping signals, external control or human-machine control signals, energy calculation method signals, energy representation mode signals, arc extinguishing time signals, arc extinguishing starting time signals, energy loss signals and normal working energy signals.

7. The method for arc-by-arc compensation of the energy loss in the extinction time of the arc in a magnetron sputtering technique according to claim 2 or 5, characterized in that, The energy loss degree value is obtained by the following steps:

8. The method for arc-by-arc compensation of extinction time energy losses in a magnetron sputtering technique as claimed in claim 3, wherein, The normal working energy value is calculated. The energy loss degree value is obtained based on the normal working energy value and the energy loss. J Normal =P×T; The relative motion speed of the target and the substrate is controlled based on the energy loss degree value. J Per =J Loss / J Normal ; wherein J Normal is the normal working energy value, T is the unit working time.

9. The method for arc-by-arc compensation of extinction time energy losses in a magnetron sputtering technique as claimed in claim 8, wherein, ​ Rpeed Val = Factor Cor ×Speed Rel × J Per where Rpeed Val is the relative running speed, Rpeed Rel is the speed before the speed reduction, Factor Cor is the correction factor.

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