A dynamic calculation method based on switching of piezoresistive resistance composite vacuum transducer

Abstract

The application discloses a dynamic calculation method based on switching of piezoresistance-resistance composite vacuum transmitters, and relates to the technical field of vacuum transmitters, which comprises the following steps: obtaining a vacuum degree trend coefficient through piezoresistance vacuum degree acceleration and resistance vacuum degree acceleration, obtaining a sensitivity compensation coefficient and a vacuum degree change coefficient based on the vacuum degree trend coefficient, obtaining a vacuum degree change abnormality coefficient based on the vacuum degree change coefficient, and finally determining a final vacuum degree based on the vacuum degree trend coefficient, the sensitivity compensation coefficient and the vacuum degree change abnormality coefficient; the output voltage of the piezoresistance-resistance composite vacuum transmitter can be obtained through the vacuum degree, the signal output smoothness can be effectively improved, the measurement accuracy can be improved, and seamless signal connection is realized.

Description

Technical Field

[0001] This application relates to the field of vacuum transmitter technology, specifically to a dynamic calculation method for switching of a piezoresistive composite vacuum transmitter. Background Technology

[0002] The working principle of a piezoresistive vacuum gauge is based on the piezoresistive effect, which uses the resistance change of a semiconductor material (such as single-crystal silicon) to accurately measure vacuum pressure. When a solid material is subjected to pressure, its resistivity changes; all solid materials exhibit this characteristic, with semiconductors showing the most significant change. When a semiconductor material is subjected to force in a certain direction, its resistivity changes significantly; this phenomenon is called the semiconductor piezoresistive effect. Resistors made using this effect are called solid-state piezoresistive resistors, also known as force-sensitive resistors. Devices made using piezoresistive resistors fall into two categories: one is a glued strain gauge made from semiconductor material; the other is a diffused piezoresistive resistor made on a semiconductor substrate using integrated circuit technology. Sensors made using piezoresistive resistors as sensor elements are called solid-state piezoresistive sensors, also known as diffused piezoresistive sensors. The advantages of piezoresistive sensors are high sensitivity, high resolution, fast response, and insensitivity to gas composition; the disadvantage is a narrow measurement range.

[0003] The working principle of a resistance vacuum gauge is as follows: when low-temperature gas molecules collide with a high-temperature filament, they absorb heat from the filament. Pressure is calculated based on the heat absorbed by the gas molecules. During operation, the resistance gauge uses a feedback heating circuit to maintain a constant filament temperature. Under constant ambient temperature, thermal radiation and heat dissipation from the support are constant. The thermal conductivity of air is positively correlated with air pressure (at low pressure). Changes in air pressure will correspondingly change the amount of heat dissipated by the tungsten filament through the air. According to Joule's law, due to the constant temperature, the resistance of the tungsten filament remains constant, while the heating power changes with air pressure, meaning the heating current changes with air pressure. The heating voltage also changes with air pressure; measuring the heating voltage of the gauge tube indirectly measures the vacuum level. The advantages of resistance sensors are a wide measurement range; the disadvantages are a slower response time compared to piezoresistive sensors and susceptibility to gas composition.

[0004] The piezoresistive-resistance hybrid vacuum transmitter integrates two pressure sensors: a piezoresistive gauge and a resistance gauge. These sensors detect the pressure within the same sensing chamber. Electronic circuitry processes the signals from both gauges into digital signals suitable for microcontroller processing, which are then converted into corresponding pressure values. By selecting an appropriate switching point, the measured pressure value is automatically switched, maximizing the advantages of each sensor while minimizing their respective disadvantages. This not only expands the measurement range but also ensures accurate and stable measurements. For pressures above 1000 Pa, the piezoresistive gauge measurement is not limited by gas type and offers high accuracy and reproducibility at atmospheric pressure, enabling reliable and rapid atmospheric pressure detection. For pressures below 1000 Pa, the resistance gauge compensates for the limitations of the piezoresistive gauge in the low-pressure range, ensuring accuracy and reliability across the entire measurement range. Through this hybrid design, the vacuum transmitter provides stable and accurate measurement results across various pressure ranges and is widely used in various industrial and scientific research fields.

[0005] During testing of the output signal of mainstream piezoresistive composite vacuum transmitters, it was found that the two pressure sensors, piezoresistive and resistance gauges, could not switch smoothly, affecting the transmitter's measurement accuracy. Specifically, there are two abnormal situations:

[0006] (1) The transmitter output signal has repeated values. For example, when the switching point is set to 1000Pa, the pressure gauge signal reaches 1000Pa first during the pressure drop process, and the resistance gauge signal is greater than 1000Pa. In this case, the transmitter output signal will have repeated values.

[0007] (2) The transmitter output signal has a missing value phenomenon. For example, when the switching point is set to 1000Pa, the pressure gauge signal reaches 1000Pa first during the pressure drop process, and the resistance gauge signal is less than 1000Pa. In this case, the transmitter output signal will have a missing value phenomenon.

[0008] Regarding the issue of abnormal output signals in piezoresistive composite vacuum transmitters: For the problem of repeated values, a common approach is to limit the maximum resistance gauge signal to 1000 Pa. This resolves the repeated value issue but introduces a problem of output signal stuttering, where the transmitter output signal remains stuck at 1000 Pa. For the problem of missing values, a weighted algorithm is used to compensate for the missing values, but discontinuities in the output signal still exist, affecting the transmitter's measurement accuracy and user experience. Summary of the Invention

[0009] The purpose of this application is to provide a dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter, which solves the problem of unstable switching in the prior art.

[0010] This application is achieved through the following technical solution:

[0011] A dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter includes:

[0012] Collect the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter;

[0013] The vacuum acceleration of the piezoresistive gauge is obtained based on the target piezoresistive gauge sensing data, and the vacuum acceleration of the resistance gauge is obtained based on the target resistance gauge sensing data;

[0014] The vacuum degree trend coefficient is obtained based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, and the sensitivity compensation coefficient is obtained based on the vacuum degree trend coefficient.

[0015] The vacuum degree change coefficient is obtained based on the vacuum degree trend coefficient, the vacuum degree acceleration of the piezoresistive gauge, and the vacuum degree acceleration of the resistance gauge, and the vacuum degree change anomaly coefficient is obtained based on the vacuum degree change coefficient.

[0016] The vacuum degree is obtained based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, and the output voltage of the piezoresistive-resistive composite vacuum transmitter is obtained based on the vacuum degree.

[0017] One possible design approach also includes:

[0018] If the piezoresistive gauge determines that the instrument is stable under atmospheric conditions for 15 minutes, the gauge will automatically calibrate its full-scale value and store the result.

[0019] When the resistance gauge measures a vacuum level between 200Pa and 500Pa, it automatically calibrates the zero point of the resistance gauge and stores the data.

[0020] In one possible design approach, the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter are collected, including:

[0021] The first set of vacuum level data corresponding to the piezoresistive gauge in the piezoresistive composite vacuum transmitter is collected, and the target piezoresistive gauge sensing data is obtained based on the collected first set of vacuum level data:

[0022]

[0023] in, This represents the target piezoresistive gauge sensing data, which reflects the vacuum level measured by the piezoresistive gauge; This represents the i-th vacuum level data in the first set of vacuum level data; This represents the total number of data points in the first set of vacuum level data;

[0024] The second set of vacuum level data corresponding to the resistance gauge in the piezoresistive-resistive composite vacuum transmitter is collected, and the target resistance gauge sensing data is obtained based on the collected second set of vacuum level data:

[0025]

[0026] in, This represents the target resistance gauge sensing data, which reflects the vacuum level measured by the resistance gauge. This represents the j-th pressure data in the second set of vacuum data; M represents the total number of data in the second set of vacuum data.

[0027] In one possible design approach, the vacuum acceleration of the piezoresistive gauge is obtained based on the target piezoresistive gauge sensing data as follows:

[0028]

[0029] in, Indicates the vacuum acceleration of the piezoresistive gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

[0030] In one possible design approach, the vacuum acceleration of the resistance gauge is obtained based on the target resistance gauge sensing data as follows:

[0031]

[0032] in, Indicates the vacuum acceleration of the resistance gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

[0033] In one possible design approach, the vacuum trend coefficient is obtained based on the vacuum acceleration of the piezoresistive gauge and the vacuum acceleration of the resistance gauge, including:

[0034] If both the piezoresistive gauge vacuum acceleration and the resistance gauge vacuum acceleration are positive, then γ = 1; if both the piezoresistive gauge vacuum acceleration and the resistance gauge vacuum acceleration are negative, then γ = 0; where γ represents the vacuum trend coefficient.

[0035] In one possible design approach, the sensitivity compensation coefficient is obtained based on the vacuum degree trend coefficient, including:

[0036] When γ=1, then β=1.5; when γ=0, then β=2 / 3; where β represents the sensitivity compensation coefficient.

[0037] In one possible design approach, a vacuum degree change coefficient is obtained based on the vacuum degree trend coefficient, the piezoresistive gauge vacuum degree acceleration, and the resistance gauge vacuum degree acceleration, and a vacuum degree change anomaly coefficient is obtained based on the vacuum degree change coefficient, including:

[0038] When γ=1, the vacuum degree change coefficient is obtained from the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5.

[0039] When γ=0, the vacuum degree change coefficient is obtained from the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5.

[0040] Where γ represents the vacuum degree trend coefficient, and α represents the vacuum degree change anomaly coefficient.

[0041] In one possible design approach, the vacuum level is obtained based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, including:

[0042] like If P ≥ 1000Pa, then P = Py; if Py ≤ 500Pa, then P = Pz; where P represents the vacuum degree.

[0043] At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k Where k represents the weighting coefficient, γ represents the vacuum degree trend coefficient, α represents the vacuum degree change anomaly coefficient, and β represents the sensitivity compensation coefficient.

[0044] At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k ;

[0045] At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k ;

[0046] At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k .

[0047] In one possible design approach, the output voltage of the piezoresistive composite vacuum transmitter is obtained based on the vacuum level as follows:

[0048] U = 3.572 + 1.286 × log 10 P

[0049] Where U represents the output voltage of the piezoresistive composite vacuum transmitter, and P represents the vacuum level.

[0050] This application provides a dynamic calculation method for switching a piezoresistive-resistive composite vacuum transmitter. The method obtains a vacuum degree trend coefficient using the vacuum degree acceleration of a piezoresistive gauge and a resistance gauge, and then obtains a sensitivity compensation coefficient and a vacuum degree variation coefficient based on the vacuum degree trend coefficient. Next, it obtains a vacuum degree variation anomaly coefficient based on the vacuum degree variation coefficient. Finally, it determines the final vacuum degree based on the vacuum degree trend coefficient, sensitivity compensation coefficient, and vacuum degree variation anomaly coefficient. The output voltage of the piezoresistive-resistive composite vacuum transmitter can be obtained through the vacuum degree, effectively improving signal output smoothness, measurement accuracy, and achieving seamless signal connection. Attached Figure Description

[0051] To more clearly illustrate the technical solutions of the exemplary embodiments of this application, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort. In the drawings:

[0052] Figure 1 A flowchart illustrating a dynamic calculation method for switching a piezoresistive composite vacuum transmitter, provided for embodiments of this application;

[0053] Figure 2 A schematic diagram of a dynamic calculation device based on the switching of a piezoresistive composite vacuum transmitter provided in an embodiment of this application;

[0054] Among them, 201-data acquisition module, 202-acceleration calculation module, 203-first coefficient acquisition module, 204-second coefficient acquisition module, and 205-dynamic calculation module. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this application are only for explaining this application and are not intended to limit this application.

[0056] To enable those skilled in the art to accurately understand the technical solutions described in the embodiments of this application, relevant knowledge about piezoresistive composite vacuum transmitters is first introduced, specifically:

[0057] The piezoresistive-resistance composite vacuum transmitter incorporates two pressure sensors, a piezoresistive gauge and a resistance gauge, to detect the pressure within the same sensing chamber. Electronic circuitry processes the signals from both sensors, converting them into digital signals suitable for microcontroller processing and ultimately into corresponding pressure values. By selecting an appropriate switching point, the transmitter automatically switches between the measured pressure values, maximizing the advantages of each sensor while minimizing their respective disadvantages. This not only expands the measurement range but also ensures accurate and stable measurements. The piezoresistive-resistance composite vacuum transmitter outputs a voltage signal U (2.286V~10.00V), corresponding to a vacuum level P (0.1Pa~100000Pa). The relationship between vacuum level P and voltage signal U is: P=10(U-3.572) / 1.286, U =3.572 + 1.286 × log 10 P; where P is in Pa; U is in V.

[0058] Full-scale calibration: When the vacuum level is at atmospheric level, the calibration time is 15 minutes. Press the "ADJ" button on the top of the transmitter to automatically calibrate to atmospheric level. The transmitter will automatically save the calibration after each calibration.

[0059] Zero point calibration: This operation only supports point operation. When the vacuum degree is determined to be higher than 5.0×10-2 Pa, you can press the "ADJ" button on the top of the transmitter to automatically calibrate the transmitter's zero point output. After pressing, the transmitter will directly output the minimum value. If the vacuum degree is lower than 5.0×10-2 Pa, zero point calibration can also be performed, but it will cause deviation in the measurement results.

[0060] In current mainstream piezoresistive composite vacuum transmitters, during output signal testing, it was found that the two pressure sensing sensors, piezoresistive and resistance gauges, cannot switch smoothly, affecting the transmitter's measurement accuracy. Specifically, there are two abnormal situations:

[0061] (1) The transmitter output signal has repeated values. For example, when the switching point is set to 1000Pa, the pressure gauge signal reaches 1000Pa first during the pressure drop process, and the resistance gauge signal is greater than 1000Pa. In this case, the transmitter output signal will have repeated values.

[0062] (2) The transmitter output signal has a missing value phenomenon. For example, when the switching point is set to 1000Pa, the pressure gauge signal reaches 1000Pa first during the pressure drop process, and the resistance gauge signal is less than 1000Pa. In this case, the transmitter output signal will have a missing value phenomenon.

[0063] Regarding the issue of abnormal output signals in piezoresistive composite vacuum transmitters: For the problem of repeated values, a common approach is to limit the maximum resistance gauge signal to 1000 Pa. This resolves the repeated value issue but introduces a problem of output signal stuttering, where the transmitter output signal remains stuck at 1000 Pa. For the problem of missing values, a weighted algorithm is used to compensate for the missing values, but discontinuities in the output signal still exist, affecting the transmitter's measurement accuracy and user experience.

[0064] Therefore, this application provides a dynamic calculation method for switching of a piezoresistive composite vacuum transmitter to solve the technical problems existing in the prior art.

[0065] like Figure 1 As shown in the figure, this application provides a dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter, including:

[0066] S101. Collect the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter.

[0067] In one possible design approach, the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter are collected, including:

[0068] The first set of vacuum level data corresponding to the piezoresistive gauge in the piezoresistive composite vacuum transmitter is collected, and the target piezoresistive gauge sensing data is obtained based on the collected first set of vacuum level data:

[0069]

[0070] in, This represents the target piezoresistive gauge sensing data, which reflects the vacuum level measured by the piezoresistive gauge; This represents the i-th ion data in the first set of vacuum level data; This represents the total number of vacuum level data points in the first set of vacuum level data.

[0071] The second set of vacuum level data corresponding to the resistance gauge in the piezoresistive-resistive composite vacuum transmitter is collected, and the target resistance gauge sensing data is obtained based on the collected second set of vacuum level data:

[0072]

[0073] in, This represents the target resistance gauge sensing data, which reflects the vacuum level measured by the resistance gauge. This represents the j-th ion data in the second set of vacuum data; M represents the total number of vacuum data in the second ion flow data.

[0074] Optionally, both the first and second sets of vacuum level data can be collected periodically using a pre-set data sampling frequency. The sampling frequency significantly impacts data processing efficiency. An excessively high sampling frequency may reduce processing efficiency and cause delays. Conversely, an excessively low sampling frequency may increase processing efficiency but reduce data fidelity, leading to signal distortion and loss of critical information. Therefore, a suitable sampling frequency can be pre-set by staff to ensure a balance between processing speed and fidelity.

[0075] S102. Obtain the vacuum acceleration of the piezoresistive gauge based on the target piezoresistive gauge sensing data and obtain the vacuum acceleration of the resistance gauge based on the target resistance gauge sensing data.

[0076] In one possible design approach, the vacuum acceleration of the piezoresistive gauge is obtained based on the target piezoresistive gauge sensing data as follows:

[0077]

[0078] in, Indicates the vacuum acceleration of the piezoresistive gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

[0079] In one possible design approach, the vacuum acceleration of the resistance gauge is obtained based on the target resistance gauge sensing data as follows:

[0080]

[0081] in, Indicates the vacuum acceleration of the resistance gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

[0082] Vacuum acceleration reflects the drastic change in pressure within a vacuum system; a larger value indicates a faster change in vacuum, and vice versa. In this invention, calculating vacuum acceleration can predict the degree of vacuum change, thus yielding a vacuum change coefficient.

[0083] S103. Obtain the vacuum degree trend coefficient based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, and obtain the sensitivity compensation coefficient based on the vacuum degree trend coefficient.

[0084] In one possible design approach, the vacuum trend coefficient is obtained based on the vacuum acceleration of the piezoresistive gauge and the vacuum acceleration of the resistance gauge, including:

[0085] If both the piezoresistive gauge vacuum acceleration and the resistance gauge vacuum acceleration are positive, then γ = 1; if both the piezoresistive gauge vacuum acceleration and the resistance gauge vacuum acceleration are negative, then γ = 0; where γ represents the vacuum trend coefficient.

[0086] The vacuum trend coefficient is used to determine whether the piezoresistive transmitter is switching from piezoresistive to resistive or from resistive to piezoresistive.

[0087] It is worth noting that Ay and Az usually have the same sign within the effective measurement range. Therefore, the embodiments of this application only include cases where the vacuum acceleration of the piezometer and the vacuum acceleration of the resistance gauge are both positive or both are negative.

[0088] In one possible design approach, the sensitivity compensation coefficient is obtained based on the vacuum degree trend coefficient, including:

[0089] The response time of the piezoresistive gauge is Try≤10ms; the response time of the resistance gauge is Trz≤100ms. When γ=1, the vacuum level increases, and the switching occurs from piezoresistive to resistive, with β=1.5. When γ=0, the switching occurs from resistive to piezoresistive, with β=2 / 3. Here, β represents the sensitivity compensation coefficient.

[0090] Due to the difference in response time between the two sensors, a β sensitivity compensation coefficient is introduced to compensate for the vacuum level of the resistance sensor during measurement switching.

[0091] S104. Obtain the vacuum degree change coefficient based on the vacuum degree trend coefficient, the vacuum degree acceleration of the piezometer, and the vacuum degree acceleration of the resistance gauge, and obtain the vacuum degree change anomaly coefficient based on the vacuum degree change coefficient.

[0092] In one possible design approach, a vacuum degree change coefficient is obtained based on the vacuum degree trend coefficient, the piezoresistive gauge vacuum degree acceleration, and the resistance gauge vacuum degree acceleration, and a vacuum degree change anomaly coefficient is obtained based on the vacuum degree change coefficient, including:

[0093] When γ=1, the vacuum degree change coefficient is obtained from the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5.

[0094] When γ=0, the vacuum degree change coefficient is obtained from the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5.

[0095] Where γ represents the vacuum degree trend coefficient, and α represents the vacuum degree change anomaly coefficient.

[0096] Since the two sensors of the two composite transmitters may be out of sync near the switching point, an α vacuum degree change anomaly coefficient is introduced to compensate for the vacuum degree of the resistance sensor.

[0097] S105. Obtain the vacuum degree based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, and obtain the output voltage of the piezoresistive-resistive composite vacuum transmitter based on the vacuum degree.

[0098] In one possible design approach, the vacuum level is obtained based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, including:

[0099] like If P ≥ 1000Pa, then P = Py; if Py ≤ 500Pa, then P = Pz; where P represents the vacuum degree.

[0100] At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k Where, k represents the weighting coefficient, and the weighting coefficient k (0~1) is specified as 500Pa~1000Pa to ensure that the piezoresistive resistor can switch smoothly. γ represents the vacuum degree trend coefficient, α represents the vacuum degree change abnormality coefficient, and β represents the sensitivity compensation coefficient.

[0101] At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k ;

[0102] At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k ;

[0103] At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k .

[0104] In one possible design approach, the output voltage of the piezoresistive composite vacuum transmitter is obtained based on the vacuum level as follows:

[0105] U = 3.572 + 1.286 × log 10 P

[0106] Where U represents the output voltage of the piezoresistive composite vacuum transmitter, and P represents the vacuum level.

[0107] The switching range is 500Pa to 1000Pa. By dynamically adjusting the signal integration coefficient k, the algorithm eliminates the interruptions and discontinuities in transmitter output caused by sensor signal switching in traditional technologies, achieving a smooth and continuous transition of the output curve. This algorithm can automatically identify the sensor's operating state and dynamically match the optimal switching point based on full-scale and zero-point calibration, avoiding the lag inherent in existing technologies.

[0108] One possible design approach also includes:

[0109] If the piezoresistive gauge determines that the instrument is stable under atmospheric conditions for 15 minutes, the gauge will automatically calibrate its full-scale value and store the result.

[0110] When the resistance gauge measures a vacuum level between 200Pa and 500Pa, it automatically calibrates the zero point of the resistance gauge and stores the data.

[0111] Existing solutions only calibrate the transmitter's full-scale and zero-point, that is, only calibrate the piezoresistive full-scale and the resistance gauge's zero-point, without separately calibrating the resistance gauge's full-scale and piezoresistive zero-point. This invention can achieve automatic full-scale calibration of the resistance gauge and zero-point calibration of the piezoresistive gauge.

[0112] The following are the steps and principles of intelligent calibration:

[0113] Generally, the accuracy class of a piezoresistive gauge is 0.5, with a maximum error of ±0.5%FS. The error under atmospheric conditions is ±0.5%. The maximum permissible error of a resistance gauge under atmospheric conditions is ±50%, requiring calibration to obtain a relatively accurate value. Traditional resistance gauges generally require manual full-scale calibration by pressing the full-scale calibration button under atmospheric conditions. However, with a piezoresistive-resistance hybrid transmitter, the piezoresistive gauge can accurately measure under atmospheric conditions. When the piezoresistive gauge determines that it has been stable under atmospheric conditions for 15 minutes, it automatically calibrates the full-scale value of the resistance gauge and automatically stores it.

[0114] Under normal circumstances, the maximum error of a piezoresistive gauge is ±100% at the lower limit of 500Pa, and the error of a resistance gauge is generally ±15% at 500Pa. Therefore, we can automatically calibrate the zero point of the piezoresistive gauge when the resistance gauge measures the vacuum degree between 200Pa and 500Pa, and automatically store the result.

[0115] Based on the above technical solution, this application has the following advantages and beneficial effects compared with the prior art:

[0116] Through an innovative combination of full-scale calibration of resistance sensors, zero-point calibration of piezoresistive sensors, and dynamic shifting algorithms, significant technological breakthroughs have been achieved in the field of sensor signal processing. The following is a detailed analysis of its core advantages:

[0117] 1. Improved signal output smoothness and optimized dynamic shifting algorithm: By adjusting the signal integration in real time, the algorithm eliminates the stuttering and discontinuity in transmitter output caused by sensor signal switching in traditional technologies, achieving a continuous and smooth transition of the output curve. This algorithm can automatically identify the sensor's operating status and dynamically match the optimal switching point based on full-scale and zero-point calibration, avoiding the lag inherent in existing technologies.

[0118] 2. Significantly improved measurement accuracy, thanks to the synergistic effect of dual calibration mechanisms:

[0119] Full-scale resistance calibration: The resistance sensor is automatically calibrated using a more accurate piezoresistive sensor, eliminating nonlinear errors in the resistance sensor and avoiding the manual calibration of the original technology, thus avoiding the lag and uncontrollability of manual intervention.

[0120] Piezoresistive zero-point calibration: Automatically calibrate the piezoresistive sensor using a resistance sensor to eliminate nonlinear errors in the piezoresistive sensor.

[0121] 3. Seamless signal connection, resulting in a significantly improved user experience compared to previous technologies.

[0122] like Figure 2 As shown, based on the same inventive concept, this application provides a dynamic calculation device based on the switching of a piezoresistive composite vacuum transmitter, comprising:

[0123] Data acquisition module 201 is used to acquire the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter.

[0124] Acceleration calculation module 202 is used to obtain the vacuum degree acceleration of the piezoresistive gauge based on the target piezoresistive gauge sensing data and to obtain the vacuum degree acceleration of the resistance gauge based on the target resistance gauge sensing data;

[0125] The first coefficient acquisition module 203 is used to acquire a vacuum degree trend coefficient based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, and to acquire a sensitivity compensation coefficient based on the vacuum degree trend coefficient.

[0126] The second coefficient acquisition module 204 is used to acquire the vacuum degree change coefficient based on the vacuum degree trend coefficient, the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, and to acquire the vacuum degree change anomaly coefficient based on the vacuum degree change coefficient.

[0127] The dynamic calculation module 205 is used to obtain the vacuum degree based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, and to obtain the output voltage of the piezoresistive-resistive composite vacuum transmitter based on the vacuum degree.

[0128] The dynamic calculation device based on the switching of a piezoresistive composite vacuum transmitter provided in this application embodiment can execute the above-mentioned method and technical solution. Its principle and beneficial effects are similar, and will not be repeated here.

[0129] Based on the same inventive concept, this application also provides a dynamic computing device based on the switching of a piezoresistive composite vacuum transmitter, including a processor and a memory; the memory and the processor are interconnected via a bus.

[0130] The memory stores computer-executed instructions;

[0131] The processor executes computer execution instructions stored in the memory, causing the processor to perform a dynamic calculation method for switching a piezoresistive composite vacuum transmitter as described in any embodiment of this application.

[0132] For specific examples, memory may include, but is not limited to, random access memory (RAM), read-only memory (ROM), flash memory, first-in-first-out (FIFO) memory, and / or first-in-last-out (FILO) memory, etc.; specifically, processor may include one or more processing cores, such as a 4-core processor, an 8-core processor, etc. The processor may be implemented using at least one hardware form of DSP (Digital Signal Processing), FPGA (Field-Programmable Gate Array), PLA (Programmable Logic Array). Furthermore, the processor may include a main processor and coprocessors. The main processor, also known as the CPU (Central Processing Unit), is used to process data in the wake-up state; the coprocessor is a low-power processor used to process data in the standby state.

[0133] This application provides a computer-readable storage medium storing computer-executable instructions. When these instructions are executed by a processor, they are used to implement the dynamic calculation method for switching a piezoresistive composite vacuum transmitter as described in any of the above embodiments.

[0134] This application embodiment can also provide a computer program product, including a computer program that, when executed by a processor, implements the dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter as described in any of the above embodiments.

[0135] All or part of the steps in the above method embodiments can be implemented by hardware related to program instructions. The aforementioned program can be stored in a readable memory. When the program is executed, it performs the steps of the above method embodiments; and the aforementioned memory (storage medium) includes: read-only memory (ROM), RAM, flash memory, hard disk, solid-state drive, magnetic tape, floppy disk, optical disk, and any combination thereof.

[0136] This application describes embodiments with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It should be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processing unit of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processing unit of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0137] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0138] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0139] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the claims.

[0140] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter, characterized in that, include: Collect the target piezoresistive gauge sensing data and the target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter; The vacuum acceleration of the piezoresistive gauge is obtained based on the target piezoresistive gauge sensing data, and the vacuum acceleration of the resistance gauge is obtained based on the target resistance gauge sensing data; The vacuum degree trend coefficient is obtained based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, and the sensitivity compensation coefficient is obtained based on the vacuum degree trend coefficient. The vacuum degree change coefficient is obtained based on the vacuum degree trend coefficient, the vacuum degree acceleration of the piezoresistive gauge, and the vacuum degree acceleration of the resistance gauge, and the vacuum degree change anomaly coefficient is obtained based on the vacuum degree change coefficient. The vacuum degree is obtained based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, and the output voltage of the piezoresistive-resistive composite vacuum transmitter is obtained based on the vacuum degree. The vacuum degree trend coefficient is obtained based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge, including: when both the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge are positive, then γ=1; when both the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge are negative, then γ=0; where γ represents the vacuum degree trend coefficient. The sensitivity compensation coefficient is obtained based on the vacuum degree trend coefficient, including: when γ=1, then β=1.5; when γ=0, then β=2 / 3; where β represents the sensitivity compensation coefficient. The vacuum degree change coefficient is obtained based on the vacuum degree trend coefficient, the vacuum degree acceleration of the piezoresistive gauge, and the vacuum degree acceleration of the resistance gauge. An abnormal vacuum degree change coefficient is then obtained based on this coefficient, including: when γ=1, the vacuum degree change coefficient is obtained based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5; when γ = 0, the vacuum degree change coefficient is obtained based on the vacuum degree acceleration of the piezoresistive gauge and the vacuum degree acceleration of the resistance gauge. If 2 / 3 ≤ A ≤ 1.5, then α = A; if A < 2 / 3, then α = 2 / 3; if A > 1.5, then α = 1.5; where α represents the vacuum degree variation anomaly coefficient. Indicates the vacuum acceleration of the piezoresistive gauge. Indicates the vacuum acceleration of the resistance gauge; The vacuum level is obtained based on the target piezoresistive gauge sensing data, the target resistance gauge sensing data, the vacuum degree trend coefficient, the sensitivity compensation coefficient, and the vacuum degree change anomaly coefficient, including: like If P ≥ 1000Pa, then P = Py; if Py ≤ 500Pa, then P = Pz; where P represents the vacuum degree. This represents the target piezoresistive gauge sensor data. This represents the target resistance gauge sensor data; At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k Where k represents the weighting coefficient; At 500Pa <1000Pa, and with γ=1, if Then determine And determine based on k ; At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k ; At 500Pa <1000Pa, and with γ=0, if Then determine And determine based on k .

2. The dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter according to claim 1, characterized in that, Also includes: If the piezoresistive gauge determines that the instrument is stable under atmospheric conditions for 15 minutes, the gauge will automatically calibrate its full-scale value and store the result. When the resistance gauge measures a vacuum level between 200Pa and 500Pa, it automatically calibrates the zero point of the resistance gauge and stores the data.

3. The dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter according to claim 1, characterized in that, Collect target piezoresistive gauge sensing data and target resistance gauge sensing data corresponding to the piezoresistive-resistive composite vacuum transmitter, including: The first set of vacuum level data corresponding to the piezoresistive gauge in the piezoresistive composite vacuum transmitter is collected, and the target piezoresistive gauge sensing data is obtained based on the collected first set of vacuum level data: ； in, This represents the target piezoresistive gauge sensing data, which reflects the vacuum level measured by the piezoresistive gauge; This represents the i-th ion data in the first set of vacuum level data; This represents the total number of vacuum level data points in the first set of vacuum level data. The second set of vacuum level data corresponding to the resistance gauge in the piezoresistive-resistive composite vacuum transmitter is collected, and the target resistance gauge sensing data is obtained based on the collected second set of vacuum level data: ； in, This represents the target resistance gauge sensing data, which reflects the vacuum level measured by the resistance gauge. This represents the j-th ion data in the second set of vacuum data; M represents the total number of vacuum data in the second set of vacuum data.

4. The dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter according to any one of claims 1-3, characterized in that, Based on the target piezoresistive gauge sensing data, the vacuum acceleration of the piezoresistive gauge is obtained as follows: ； in, Indicates the vacuum acceleration of the piezoresistive gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

5. The dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter according to any one of claims 1-3, characterized in that, Based on the target resistance gauge sensing data, the vacuum acceleration of the resistance gauge is obtained as follows: ； in, Indicates the vacuum acceleration of the resistance gauge. This represents the latest sampled target piezoresistive gauge sensor data. This represents the target piezoresistive gauge sensor data of the latest sample, and t represents the sampling time interval.

6. The dynamic calculation method for switching based on a piezoresistive composite vacuum transmitter according to claim 1, characterized in that, The output voltage of the piezoresistive composite vacuum transmitter is obtained based on the vacuum level as follows: U = 3.572 + 1.286 × log 10 P; Where U represents the output voltage of the piezoresistive composite vacuum transmitter, and P represents the vacuum level.

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