Rotating substrate support for aligning substrates

Abstract

Embodiments of a substrate support for aligning a substrate are provided herein. In some embodiments, a substrate support for aligning a substrate includes: a base plate; a rotating assembly including a stator and a rotor, the stator being coupled to the base plate, the rotor being rotatably coupled to the stator via a bearing disposed between the stator and the rotor; a bellows assembly, the bellows assembly being fixed to the rotor; and a lever having a first end and a second end, the first end coupled to the rotor, the second end configured to be coupled to an actuator; the suction cup assembly is arranged on the top of the bottom plate and fixedly coupled to the corrugated pipe assembly, and the suction cup assembly can rotate and axially move along a central axis relative to the bottom plate; and wherein rotation of the lever about the central axis rotates the bellows assembly and the suction cup assembly relative to the base plate to align the substrate relative to the base plate.

Description

Technical Field

[0001] The embodiments of this disclosure generally relate to substrate processing equipment. Background Technology

[0002] Laser printing systems, including scanners, are suitable for a variety of applications, including printing text on paper, patterning photoresist during integrated circuit manufacturing, and creating masks or reticles for projection lithography systems. For integrated circuit applications, laser printing systems typically require sub-micron precision. Precise scanners must pay attention to the orientation of the workpiece or photomask relative to the laser beam. If the propagation direction and scanning direction are not collinear, the opening and closing of the beam can reduce edge sharpness or introduce undesired skew or directional deviations in the pattern being illuminated. However, conventional methods of rotating and aligning the photomask can be overly complex and imprecise.

[0003] Therefore, the inventors hereby provide embodiments of an improved laser printing system. Summary of the Invention

[0004] This document provides embodiments of a substrate support for aligning substrates. In some embodiments, a substrate support for aligning substrates includes: a base plate; a rotating assembly including a stator and a rotor, the stator being coupled to the base plate and the rotor being rotatably coupled to the stator via a bearing disposed between the stator and the rotor; a bellows assembly fixed to the rotor; a lever having a first end and a second end, the first end being coupled to the rotor and the second end being configured to be coupled to an actuator; and a suction cup assembly disposed on top of the base plate and fixedly coupled to the bellows assembly, wherein the suction cup assembly is rotatably and axially movable relative to the base plate along a central axis, and wherein rotation of the lever about the central axis causes the bellows assembly and the suction cup assembly to rotate relative to the base plate to align the substrate relative to the base plate.

[0005] In some embodiments, a substrate support for aligning a substrate includes: a worktable configured for movement along x, y, and z directions; a part holder assembly disposed on the worktable and including: a base plate; a rotating assembly including a stator and a rotor, the stator being coupled to the base plate and the rotor being rotatably coupled to the stator via a bearing disposed between the stator and the rotor; a bellows assembly fixed to the rotor and configured for vertical movement; a lever having a first end and a second end, the first end being coupled to the rotor and the second end being coupled to an actuator; and a suction cup assembly disposed on top of the base plate and fixedly coupled to the bellows assembly, wherein the suction cup assembly is rotatably and axially movable relative to the base plate along a central axis, and wherein rotation of the lever about the central axis causes the suction cup assembly to rotate relative to the base plate to align the substrate relative to the base plate.

[0006] In some embodiments, a laser printing system for processing photomasks includes: a housing defining an internal volume; a substrate support disposed within the internal volume, the substrate support including: a base plate; a rotating assembly including a stator and a rotor, the stator being coupled to the base plate and the rotor being rotatably coupled to the stator via a bearing disposed between the stator and the rotor; a bellows assembly fixed to the rotor; and a lever having a first end and a second end, the first end being coupled to the rotor and the second end being configured to be coupled to an actuator; and a suction cup assembly disposed on top of the base plate and fixedly coupled to the bellows assembly, wherein the suction cup assembly is rotatably and axially movable relative to the base plate along a central axis, and wherein rotation of the lever about the central axis causes the suction cup assembly to rotate relative to the base plate to align the substrate relative to the base plate; and an edge finder disposed above the base plate and configured to facilitate finding the edge of the photomask when the photomask is placed on the suction cup assembly.

[0007] Other and further embodiments of this disclosure are described below. Attached Figure Description

[0008] The embodiments of this disclosure, which have been briefly summarized above and discussed in more detail below, can be understood with reference to the exemplary embodiments depicted in the accompanying drawings. However, the drawings illustrate only typical embodiments of this disclosure and are therefore not to be considered as limiting the scope, as other equivalent embodiments are permissible.

[0009] Figure 1 A schematic isometric view of a laser printing system according to at least some embodiments of the present disclosure is depicted.

[0010] Figure 2A schematic cross-sectional side view of a substrate support for a laser printing system according to at least some embodiments of the present disclosure is depicted.

[0011] Figure 3 An enlarged schematic cross-sectional view of the gas port region of a substrate support according to at least some embodiments of the present disclosure is depicted.

[0012] Figure 4 A schematic partial bottom view of a substrate support according to at least some embodiments of the present disclosure is depicted.

[0013] Figure 5 A schematic cross-sectional side view of a substrate support for a laser printing system according to at least some embodiments of the present disclosure is depicted.

[0014] For ease of understanding, common elements in the figures have been labeled with the same element symbols where possible. The figures are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be beneficially incorporated into other embodiments without further description. Detailed Implementation

[0015] This document provides embodiments of a substrate support for use in laser writing systems, such as laser printing systems. The substrate support typically includes a suction cup assembly with a supporting surface. The suction cup assembly is disposed on a base plate, wherein the suction cup assembly is rotatably coupled to the base plate to align a substrate (such as a photomask) when placed on the suction cup assembly. The base plate is coupled to an actuator configured to rotate the suction cup assembly to achieve precise substrate alignment. A gas source may be coupled to the substrate support and is configured to supply gas to the area between the suction cup assembly and the base plate to raise the suction cup assembly relative to the base plate. Once the suction cup assembly is raised, the actuator can be moved to rotate the suction cup assembly to a desired position. Once the suction cup assembly is aligned, it can be lowered and held or clamped to the base plate by any suitable means to maintain the desired position. Conventional devices for rotating the suction cup assembly can use excessive tubing and wiring. The embodiments of the substrate support provided herein advantageously reduce component complexity and promote ease of assembly and maintainability.

[0016] Figure 1A schematic isometric view of a laser printing system 100 according to at least some embodiments of the present disclosure is depicted. The laser printing system 100 may be a laser photomask writer or the like. The laser printing system 100 may have a housing 102 defining an internal volume 118 therein. A substrate support 110 is disposed in the internal volume 118 to support a substrate 116. In some embodiments, the substrate 116 is a photomask. However, the substrate 116 may be any other suitable substrate used in the semiconductor industry. The substrate support 110 typically includes a part holder assembly 104 and a stage 108, wherein the stage 108 is disposed below the part holder assembly 104.

[0017] The worktable 108 is configured to move the part holder assembly 104 along one or more of the x-direction 120, y-direction 130, and z-direction 140. Therefore, the worktable 108 may be coupled to a motion control device 150 configured to move the worktable 108. The motion control device 150 may include any suitable electronic device, such as, for example, one or more motors, one or more actuators, or the like, and associated motion enabling structures (such as gears, belts, chains, or the like). The worktable 108 may include one or more plates. For example, the worktable 108 includes a first plate movable in the x-direction 120 and a second plate movable in the y-direction 130, such that the first and second plates are collectively configured to move the worktable in both the x-direction 120 and the y-direction 130.

[0018] The part holder assembly 104 typically includes a base plate 112 and a suction cup assembly 122 configured to support a substrate and supported by the base plate 112. In some embodiments, the base plate 112 is made of glass. The suction cup assembly 122 is rotatable relative to the base plate 112 such that the substrate 116, when positioned on the suction cup assembly 122, can be aligned with the base plate 112 and, consequently, with the worktable 108. In some embodiments, an edge finder 126 is disposed above the base plate 112 and configured to facilitate finding the edge 119 of the substrate 116 when the substrate 116 is placed on the suction cup assembly 122. A laser assembly 132 is disposed above the base plate 112 and configured to create a pattern on the substrate 116. The laser assembly 132 may include one or more lasers 134 adapted to generate the pattern.

[0019] In some embodiments, the gas source 160 is coupled to the substrate support 110 and configured to supply gas to the area between the suction cup assembly 122 and the base plate 112 (regarding...). Figure 3(Described in more detail), so that the suction cup assembly 122 is raised relative to the base plate 112. In some embodiments, the substrate support 110 is coupled to a vacuum source 170, which is configured to vacuum-tighten the suction cup assembly 122 to the base plate 112 after alignment, to advantageously reduce or prevent movement of the suction cup assembly 122 relative to the base plate 112 after alignment. In some embodiments, the vacuum source 170 may be configured to vacuum-tighten the substrate 116 to the suction cup assembly 122 after alignment. The vacuum source 170 may typically include a pump and associated valves. In some embodiments, the suction cup assembly 122 may be mechanically held together with the base plate 112 after alignment. For example, a clamp 152 coupled to the worktable 108 or the base plate 112 may hold the suction cup assembly 122 against the base plate 112.

[0020] The laser printing system 100 may include a controller 171 for controlling the operation of the laser printing system 100. The controller 171 typically includes a central processing unit (CPU) 172, memory 174, and support circuitry 176. The CPU 172 may be one of any type of general-purpose computer processor suitable for industrial environments. The support circuitry 176 is conventionally coupled to the CPU 172 and may include cache, clock circuitry, input / output subsystems, power supply, and the like. Software routines (such as processing methods as described herein) may be stored in memory 174 and, when executed by the CPU 172, transform the CPU 172 into the controller 171. The software routines may also be stored and / or executed by a second controller (not shown) located remotely to the laser printing system 100.

[0021] In operation, controller 171 collects and provides feedback on data from laser printing system 100 to optimize the performance of laser printing system 100 and provides instructions to system components. For example, controller 171 may be configured to use data from edge finder 126 to determine the position of substrate 116 and provide instructions to laser printing system 100 to control the rotational position of suction cup assembly 122 relative to base plate 112. Memory 174 may be a non-transitory computer-readable storage medium with instructions that, when executed by CPU 172 (or controller 171), perform the methods described herein.

[0022] Embodiments of this disclosure may be implemented in hardware, firmware, software, or any combination thereof. Embodiments may also be implemented as instructions stored using one or more computer-readable media, which may be read and executed by one or more processors. The computer-readable media may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing platform or a “virtual machine” running on one or more computing platforms). For example, the computer-readable media may include any suitable form of volatile or non-volatile memory. In some embodiments, the computer-readable media may include a non-transitory computer-readable medium.

[0023] Figure 2 A schematic side view of a substrate support 110 for a laser printing system according to at least some embodiments of the present disclosure is depicted. A part holder assembly 104 includes a bellows assembly 204 coupled to a suction cup assembly 122. The bellows assembly 204 includes a bellows 248, which may be made of metal. The bellows 248 may have circular pleats that allow the bellows 248 to unfold vertically as the suction cup assembly 122 is lifted, while remaining rotationally rigid. For example, the bellows assembly 204 typically provides vertical flexibility of the suction cup assembly 122 relative to a base plate 112 while limiting rotational flexibility relative to the base plate 112. The base plate 112 includes an opening 208, and a portion of the bellows assembly 204 extends through the opening 208 while maintaining a gap 212 between the bellows assembly 204 and the sidewall of the opening 208.

[0024] In some embodiments, the base plate 112 includes one or more through holes 214, and the part holder assembly 104 includes a gas port 218 fluidly coupled to the one or more through holes 214. The gas port 218 may be coupled to a gas source 160 and configured to facilitate gas flow to the underside 228 of the suction cup assembly 122 to raise the suction cup assembly 122 relative to the base plate 112. The gas port 218 may also be advantageously coupled to a vacuum source 170 to provide vacuum clamping between the base plate 112 and the suction cup assembly 122. In some embodiments, the part holder assembly 104 may include separate ports for supplying gas to the underside 228 and for providing vacuum clamping.

[0025] In some embodiments, such as Figure 5 As illustrated, the suction cup assembly 122 may include one or more holes 526 configured to vacuum-tighten the substrate 116 to the suction cup assembly 122. In some embodiments, the one or more holes 526 have a diameter smaller than that of the one or more through holes 214.

[0026] Back Figure 2The part holder assembly 104 includes a rotating assembly 230 comprising a stator 234 and a rotor 238. The stator is coupled to a base plate 112, for example, via one or more fasteners 219, and the rotor is rotatably coupled to the stator 234 via a bearing 242 disposed between the stator and rotor. The stator 234 includes retaining components of the rotating assembly 230, which are fixed to the base plate 112. A bellows assembly 204 is attached to the rotor 238 and configured for vertical movement. The bellows assembly 204 rotates together with the rotor 238. In some embodiments, the rotor 238 includes a cup 244. In some embodiments, the bellows assembly 204 includes a bellows 248 partially disposed within the cup 244. In some embodiments, a lower flange 252 of the bellows 248 is coupled to a bottom 245 of the cup 244, for example, via one or more fasteners 215. In some embodiments, an upper flange 254 of the bellows 248 is coupled to a suction cup assembly 122, for example, via one or more fasteners 217.

[0027] The part holder assembly 104 includes a lever 262 having a first end 264 and a second end 266, the first end being coupled to a rotor 238 and the second end being coupled to an actuator 280. In some embodiments, the lever 262 is coupled to the rotor 238 via one or more fasteners 231. A suction cup assembly 122 is disposed on top of a base plate 112 and fixedly coupled to a bellows assembly 204. The suction cup assembly 122 is rotatably and axially (e.g., in the z-direction 140) relative to the base plate 112 along a central axis 268. Rotation of the lever 262 about the central axis 268 via the actuator 280 rotates the suction cup assembly 122 relative to the base plate 112 to align the substrate with the base plate. The actuator 280 is configured to make precise rotational movements of the lever 262. For example, the actuator 280 is configured to rotate the suction cup assembly 122 about the central axis 268 by approximately ±5 degrees.

[0028] Figure 3An enlarged view of a gas port region 300 of a substrate support 210 according to at least some embodiments of the present disclosure is depicted. A gas port 218 may be defined in a bushing 302 coupled to a substrate 112. In some embodiments, a body 308 is coupled to the bushing 302 to facilitate the coupling of a conduit 304 to the gas port 218 to supply gas or vacuum to the gas port 218. For example, the conduit 304 may be selectively coupled to a first port 312 for receiving gas from a gas source 160 and a second port 316 coupled to a vacuum source 170. In some embodiments, a junction 314 is provided near the intersection of the conduit 304, the first port 312, and the second port 316. In some embodiments, the junction 314 includes one or more valves for selectively opening or closing the first port 312 and the second port 316. In some embodiments, the junction 314 is a T-junction without any valves or flow restrictors.

[0029] In some embodiments, the lower side 228 of the suction cup assembly 122 includes a channel 318 defining a trapped volume 310 adjacent to the gas port 218 disposed between the suction cup assembly 122 and the base plate 112. In some embodiments, the channel 318 is an annular channel. In some embodiments, the channel 318 has a width greater than the diameter of one or more through holes 214. The trapped volume 310 advantageously provides a larger volume for gas from the gas source 160 to diffuse into it, and thereby provides a greater force on the lower side 228 to raise the suction cup assembly 122 slightly above the upper surface 326 of the base plate 112. As the suction cup assembly 122 is raised, the suction cup assembly 122 can advantageously rotate via the lever 262 with minimal or no friction between the upper surface 326 of the base plate 112 and the lower side 228 of the suction cup assembly 122.

[0030] Figure 4 A partial bottom view of a substrate support 110 according to at least some embodiments of the present disclosure is depicted. An actuator 270 is coupled to a second end 266 of a lever 262. In some embodiments, the actuator is a linear actuator. A power supply 410 may be coupled to the actuator 270 to provide power to the actuator 270 to move the actuator's shaft 402. In some embodiments, the shaft 402 may be actuated via a pneumatic line.

[0031] In some embodiments, lever 262 includes a circular plate 426 coupled to rotor 238 and an extended arm 436 extending from circular plate 426 and having a second end 266 of lever 262. In some embodiments, flexure 412 is disposed between and coupled to actuator 270 and the second end 266 of lever 262. Flexure 412 advantageously facilitates the conversion of linear motion of shaft 402 into rotational movement of lever 262.

[0032] While the foregoing describes embodiments of this disclosure, other and further embodiments of this disclosure may be conceived without departing from the basic scope of this disclosure.

Claims

1. A substrate support for aligning a substrate, the substrate support comprising: a part holder assembly, the part holder assembly comprising: a base plate; a rotary assembly, the rotary assembly comprising a stator and a rotor, the stator coupled to the base plate, the rotor rotatably coupled to the stator via a bearing disposed between the stator and the rotor; a bellows assembly fixed to the rotor; and a lever having a first end coupled to the rotor and a second end configured to be coupled to an actuator; and a chuck assembly configured to support the substrate, the chuck assembly disposed atop the base plate and fixedly coupled to the bellows assembly, wherein the chuck assembly is rotatably and axially movable along a central axis relative to the base plate, and wherein rotation of the lever about the central axis rotates the bellows assembly and the chuck assembly relative to the base plate to align the substrate relative to the base plate when the substrate is disposed on the chuck assembly.

2. The substrate support of claim 1, further comprising an actuator coupled to the second end of the lever.

3. The substrate support of claim 2, further comprising a flexure disposed between the second end of the lever and the actuator.

4. The substrate support of claim 2, wherein the actuator is a linear actuator configured to move the lever to rotate the chuck assembly.

5. The substrate support of claim 1, wherein the substrate support comprises a gas port and the gas port is fluidly coupled to a through-hole in the base plate configured to facilitate a flow of gas to an underside of the chuck assembly to raise the chuck assembly relative to the base plate and extend bellows of the bellows assembly.

6. The substrate support of claim 5, further comprising a hold volume disposed between the chuck assembly and the base plate proximate the gas port.

7. The substrate support of any of claims 1-6, wherein the base plate comprises one or more holes configured for vacuum chucking the chuck assembly to the base plate.

8. The substrate support of any of claims 1-6, further comprising a clamp configured to selectively hold the chuck assembly against the base plate.

9. The substrate support of any of claims 1-6, wherein the rotor comprises a cup and wherein the bellows assembly comprises a bellows partially disposed in the cup, wherein a lower flange of the bellows is coupled to a bottom of the cup and an upper flange of the bellows is coupled to the chuck assembly.

10. A substrate support for aligning a substrate, the substrate support comprising: a worktable configured for movement in x, y, and z directions; and the part holder assembly of any of claims 1-6 disposed on the worktable.

11. The substrate support of claim 10, wherein the base plate comprises a through hole, and the part holder assembly comprises a gas port fluidly coupled to the through hole.

12. The substrate support of any of claims 1-6, wherein the substrate is a photomask.

13. The substrate support of any of claims 1-6, wherein the base plate is made of glass.

14. The substrate support of any of claims 1-6, wherein the base plate comprises an opening, and a portion of the bellows assembly extends through the opening while maintaining a gap between the bellows assembly and a sidewall of the opening.

15. A laser printing system for processing a photomask, the laser printing system comprising: a housing defining an interior volume; the substrate support of any of claims 1-6 disposed in the interior volume; and an edge finder disposed above the base plate and configured to facilitate finding an edge of the photomask when the photomask is placed on the chuck assembly.

16. The laser printing system of claim 15, further comprising a worktable disposed in the interior volume below the base plate and configured to move the base plate in x, y, and z directions.

17. The laser printing system of claim 15, further comprising a gas source coupled to the substrate support and configured to supply gas to an area between the chuck assembly and the base plate to raise the chuck assembly relative to the base plate.

18. The laser printing system of claim 15, further comprising a laser assembly disposed above the base plate and configured to create a pattern on the photomask when the photomask is disposed on the chuck assembly.

19. The laser printing system of claim 15, further comprising a clamp configured to selectively hold the chuck assembly against the base plate.

20. The laser printing system of claim 15, wherein the base plate comprises one or more holes configured for vacuum chucking the chuck assembly to the base plate.

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