Light path adjusting device and light path adjusting method for gas discharge lamp

Abstract

The invention discloses a gas discharge lamp light path adjusting device and a light path adjusting method, and belongs to the technical field of gas discharge lamps. The gas discharge lamp light path adjusting device comprises a charge coupling image sensor, a point light source and a light splitting cube; the point light source and the charge-coupled image sensor are respectively positioned in two vertical directions of the light-splitting cube; an optical axis of light emitted by the point light source and a vertical line of a target surface center of the charge-coupled image sensor intersect with an inclined surface of the light-splitting cube; the distance from the target surface center of the charge-coupled image sensor to the inclined surface of the light-splitting cube is equal to the distance from the light outlet of the point light source to the inclined surface of the light-splitting cube. The light path can be quickly and efficiently aligned, the high requirement of the laser-driven gas discharge lamp for the light path precision is effectively met, and the method can be used for assembling, debugging and maintaining a light box optical system of the gas discharge lamp.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas discharge lamp, and particularly relates to a gas discharge lamp light path adjusting device and a light path adjusting method. BACKGROUND

[0002] The laser-driven gas discharge lamp is a high-energy-density continuous spectrum light source, which is widely used in the field of semiconductor defect detection. The gas plasma is maintained by high-power laser, which has the advantages of high light power, high proportion of ultraviolet light, long service life and the like. When the laser-driven gas discharge lamp is working, kilowatt-level high-power laser needs to be focused on the optical center of the lamp, so that the precision of the light path is very high.

[0003] The lamp box optical system of the laser-driven gas discharge lamp comprises an infrared laser, a concave lens, a reflector, a dichroic mirror and a reflector bowl, which are installed in the lamp box of the laser-driven gas discharge lamp. The infrared laser, the concave lens and the reflector are located on a horizontal straight line, and the reflector is placed obliquely; the dichroic mirror and the reflector bowl are sequentially located below the reflector, and are located on a vertical straight line with the dichroic mirror, and the dichroic mirror is opposite to the oblique direction of the reflector. The inner surface of the reflector bowl is an ellipsoidal surface. The center of the laser-driven gas discharge lamp, i.e. the light-emitting center of the laser-driven gas discharge lamp, coincides with the theoretical first focal point of the ellipsoidal surface of the reflector bowl. When in operation, the high-power laser emitted by the infrared laser is irradiated to the ellipsoidal surface of the bottom reflector bowl at a certain divergence angle, is focused on the first focal point of the reflector bowl after being reflected, and the light emitted by the laser-driven gas discharge lamp is collected by the reflector bowl and then output after being reflected by the dichroic mirror, and is focused on the second focal point of the reflector bowl.

[0004] In this optical path, the position and angle relationship of each optical element has a significant influence on the light path precision, especially the accurate coincidence of the actual first focal point of the reflector bowl and the light-emitting center of the laser-driven gas discharge lamp, and the alignment of the light path of the light emitted by the infrared laser and the first focal point, which all need extremely fine adjustment. However, the existing lamp box optical system of the laser-driven gas discharge lamp has the problems of difficult position adjustment, difficult realization of high-precision focusing and light path calibration during assembly, which directly affects the final optical performance and output effect. SUMMARY

[0005] The present application aims to provide a gas discharge lamp light path adjusting device and a light path adjusting method for quickly and efficiently aligning the light path of the laser-driven gas discharge lamp, and accurately adjusting the installation positions of the infrared laser and each optical element.

[0006] To achieve the above-mentioned purpose, the technical scheme of the present application is as follows: A gas discharge lamp light path adjusting device, comprising a charge-coupled image sensor, a point light source and a beam splitter cube. The point light source and the charge coupled image sensor are located in two perpendicular directions of the light splitting cube respectively, the optical axis of the light emitted by the point light source intersects with the perpendicular line of the center of the target surface of the charge coupled image sensor at the inclined surface of the light splitting cube; the distance from the center of the target surface of the charge coupled image sensor to the inclined surface of the light splitting cube is equal to the distance from the light outlet of the point light source to the inclined surface of the light splitting cube.

[0007] Optionally, the gas discharge lamp light path adjusting device further comprises a light ray terminator, and the light inlet of the light ray terminator is located on the light path of the light emitted by the point light source and passing through the light splitting cube.

[0008] Optionally, the point light source comprises a fiber head and a first laser, and the fiber head is connected with the first laser.

[0009] Optionally, the light outputted from the fiber output port of the fiber head has a divergence angle.

[0010] A gas discharge lamp light path adjusting method applied to the gas discharge lamp light path adjusting device as described in any one of the above embodiments, comprising: installing the gas discharge lamp light path adjusting device at the light outlet of the lamp box of the laser driven gas discharge lamp, so that the target surface of the charge coupled image sensor faces the light path of the light outlet of the lamp box of the laser driven gas discharge lamp, and the target surface of the charge coupled image sensor is located at the theoretical second focal point of the reflector bowl; turning on the first laser of the gas discharge lamp light path adjusting device, the indicating light emitted by the first laser enters the lamp optical system of the laser driven gas discharge lamp after being reflected by the light splitting cube, and returns to the gas discharge lamp light path adjusting device after being reflected to form a light spot on the charge coupled image sensor; adjusting the position of the reflector bowl in the xz plane until the light spot size measured by the charge coupled image sensor is the smallest and symmetrically distributed; turning off the first laser of the gas discharge lamp light path adjusting device and turning on the infrared laser of the lamp optical system of the laser driven gas discharge lamp, the indicating light emitted by the infrared laser enters the gas discharge lamp light path adjusting device after being reflected to form a light spot on the charge coupled image sensor; adjusting the light spot position on the charge coupled image sensor to be the same as the light spot position obtained after turning on the first laser, and adjusting the light spot size on the charge coupled image sensor to be the smallest.

[0011] Optionally, adjusting the light spot position on the charge coupled image sensor to be the same as the light spot position obtained after turning on the first laser comprises: adjusting the position of the infrared laser of the lamp optical system of the laser driven gas discharge lamp in the yz plane so that the light spot position on the charge coupled image sensor is the same as the light spot position obtained after turning on the first laser.

[0012] Optionally, the light spot position on the charge coupled image sensor is adjusted to be the same as the light spot position obtained after the first laser is turned on, and the method further comprises: adjusting the position of the concave lens of the light box optical system of the laser-driven gas discharge lamp in the yz plane, so that the light spot position on the charge coupled image sensor is the same as the light spot position obtained after the first laser is turned on.

[0013] Optionally, the light spot size on the charge coupled image sensor is minimized, and the method further comprises: adjusting the position of the infrared laser of the light box optical system of the laser-driven gas discharge lamp along the x-axis direction, so that the light spot size on the charge coupled image sensor is minimized.

[0014] Optionally, the light spot size on the charge coupled image sensor is minimized, and the method further comprises: adjusting the position of the concave lens of the light box optical system of the laser-driven gas discharge lamp along the x-axis direction, so that the light spot size on the charge coupled image sensor is minimized.

[0015] Optionally, the light spot size on the charge coupled image sensor is minimized, and the method further comprises: adjusting the position of the concave lens of the light box optical system of the laser-driven gas discharge lamp along the x-axis direction, so that the light spot size on the charge coupled image sensor is minimized.

[0016] The gas discharge lamp optical path adjusting device and the optical path adjusting method provided by the present application can quickly and efficiently align the optical path, effectively meeting the high requirements of laser-driven gas discharge lamps on optical path precision. Not only is it suitable for optical path construction during equipment assembly, but also can be used in subsequent debugging and maintenance links, with a wide range of applications and can significantly improve the optical path adjustment efficiency and stability of laser-driven gas discharge lamps in application.

[0017] In order to make the above features and advantages of the application more obvious and easy to understand, the following embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A structural schematic diagram of a gas discharge lamp optical path adjusting device 1 provided by the present application.

[0019] Figure 2 A flowchart of a gas discharge lamp optical path adjusting method provided by the present application.

[0020] Figure 3 A light path schematic diagram of the return of the indicating light emitted by the first laser 122 to the gas discharge lamp optical path adjusting device 1.

[0021] Figure 4 (a) in FIG. 1 is a schematic diagram of the light spot size formed by the indicating light emitted by the first laser 122 on the charge coupled image sensor 11 being minimized and symmetrically distributed.

[0022] Figure 4Figure (b) is a schematic diagram of the indicator light emitted by the first laser 122 shifting up and down as the light spot formed by the charge-coupled image sensor 11 shifts.

[0023] Figure 4 Figure (c) is a schematic diagram of the indicator light emitted by the first laser 122 shifting left and right as the light spot formed by the charge-coupled image sensor 11 shifts.

[0024] Figure 5 This is a schematic diagram of the optical path for the indicator light emitted by the infrared laser 21 to enter the gas discharge lamp path adjustment device 1.

[0025] In the accompanying drawings, similar reference numerals refer to the same elements. Detailed Implementation

[0026] To make the objectives and technical solutions of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the described embodiments of this application without creative effort are within the scope of protection of this application.

[0027] In this application, for clarity, the following explanations are provided: To facilitate the description, a three-dimensional coordinate system is defined. When an observer is looking at the accompanying drawings, the xy-plane in the specification refers to the plane of the paper when the observer is looking at the drawings, and the z-axis in the specification is perpendicular to the paper and points outwards. The up-down and left-right directions in the specification correspond to the up-down and left-right directions when the observer is looking at the accompanying drawings, respectively. The above explanations are merely for the purpose of clearly describing this application and do not indicate or imply that the structures or components referred to must have a specific orientation or be constructed in a specific orientation; therefore, they should not be construed as limitations on this application.

[0028] In one embodiment of this application, please refer to Figure 1 ,like Figure 1 The diagram shown is a schematic representation of a gas discharge lamp path adjustment device 1 proposed in this application. The gas discharge lamp path adjustment device 1 proposed in this application includes: a charge-coupled image sensor (CCD) 11, a point light source 12, and a beam splitter cube 13.

[0029] Point light source 12 and charge-coupled image sensor 11 are located in two perpendicular directions of beam splitting cube 13. The optical axis of the light emitted by point light source 12 and the perpendicular line from the center of the target surface 111 of charge-coupled image sensor 11 intersect the inclined surface of beam splitting cube 13. The distance L1 from the center of the target surface 111 of charge-coupled image sensor 11 to the inclined surface of beam splitting cube is strictly equal to the distance L2 from the light outlet of point light source 12 to the inclined surface of beam splitting cube.

[0030] As an example, the gas discharge lamp light path adjusting device 1 further comprises a light terminator 14, and the light inlet of the light terminator 14 is located on the light path of the light emitted by the point light source 12 and transmitted through the light splitting cube 13.

[0031] As an example, the light splitting cube 13 splits the light emitted by the point light source 12 into transmitted light and reflected light, and the intensity ratio of the transmitted light and the reflected light is 5:5, and the transmitted light and the reflected light are both polarization-independent.

[0032] Specifically, the light terminator 14 is used to collect the transmitted light.

[0033] As an example, the point light source 12 comprises a fiber head 121 and a first laser 122, and the fiber head 121 is connected with the first laser 122.

[0034] As an example, the fiber output port of the fiber head 121 is a high-quality point light source, and the light output by the fiber output port of the fiber head 121 has a certain divergence angle.

[0035] As an example, the first laser 122 is a radiation indicating light source, the power is 1-5 mW, the wavelength is 400-450 nm, and the laser-driven gas discharge lamp optical system has high reflectivity in this wavelength band.

[0036] As an example, the charge coupled image sensor 11, the point light source 12, the light splitting cube 13 and the light terminator 14 are fixed by metal parts to form an integral whole.

[0037] As an example, the gas discharge lamp light path adjusting device 1 provided by the present application is connected with the laser-driven gas discharge lamp optical system, and is used to assist in accurately adjusting the installation position of each optical element of the laser-driven gas discharge lamp optical system.

[0038] Specifically, the gas discharge lamp light path adjusting device 1 is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp. The second focal point of the reflector bowl of the laser-driven gas discharge lamp optical system is located at the center of the target surface of the charge coupled image sensor.

[0039] In another embodiment of the present application, the present application further provides a gas discharge lamp light path adjusting method, which is applied to the above-mentioned gas discharge lamp light path adjusting device and is used to adjust the light path of the laser-driven gas discharge lamp. Please refer to Figure 2 , Figure 2 The flow chart of the gas discharge lamp light path adjusting method provided by the present application, and the gas discharge lamp light path adjusting method comprises steps S1-S5.

[0040] Step S1: install the gas discharge lamp light path adjustment device 1 to the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface 111 of the charge coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge coupled image sensor 11 is located at the theoretical second focal point of the reflector bowl.

[0041] Step S2: turn on the first laser 122 of the gas discharge lamp light path adjustment device 1, and the indicating light emitted by the first laser 122 is reflected by the beam splitter cube 13 and enters the lamp box optical system of the laser-driven gas discharge lamp, and after reflection, it returns to the gas discharge lamp light path adjustment device 1 and irradiates the charge coupled image sensor 11 to form a light spot.

[0042] Step S3: adjust the position of the reflector bowl in the xz plane until the light spot size measured by the charge coupled image sensor 11 is the smallest and symmetrically distributed.

[0043] Step S4: turn off the first laser 122 of the gas discharge lamp light path adjustment device 1, and turn on the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp, and the indicating light emitted by the infrared laser is reflected and enters the gas discharge lamp light path adjustment device 1 and irradiates the charge coupled image sensor 11 to form a light spot.

[0044] Step S5: adjust the light spot position on the charge coupled image sensor 11 to be the same as the light spot position adjusted after turning on the first laser 122, and adjust the light spot size on the charge coupled image sensor 11 to be the smallest.

[0045] The gas discharge lamp light path adjustment device 1 proposed in the present application can quickly and efficiently align the light path, effectively meet the high requirements of laser-driven gas discharge lamps on light path precision. Not only suitable for light path building in equipment assembly stage, but also can be used in subsequent debugging and maintenance links, widely applicable scenarios, can significantly improve the light path adjustment efficiency and stability of laser-driven gas discharge lamps in application.

[0046] In step S1, please refer to Figure 2 Step S1 of the gas discharge lamp light path adjustment device 1 is installed to the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface 111 of the charge coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge coupled image sensor 11 is located at the theoretical second focal point of the reflector bowl.

[0047] Specifically, according to the working principle of the ellipsoidal reflector bowl: the light emitted from any one of the foci of the ellipsoid is reflected by the inner surface of the ellipsoid and is focused on the other focus of the ellipsoid, that is, as long as the position of one of the foci is known, the position of the other focus can be obtained. In the optical system of the lamp box of the laser-driven gas discharge lamp, the ellipsoidal structure of the ellipsoidal reflector bowl is known, and the relative positions of the first focus and the second focus of the reflector bowl can be obtained. Therefore, in the present application, the target surface 111 of the charge-coupled image sensor 11 of the gas discharge lamp light path adjusting device 1 is installed at the position of the theoretical second focus of the known reflector bowl, and the actual first focus position and the actual second focus position of the reflector bowl are aligned with the theoretical first focus position and the theoretical second focus position by adjusting the position of the reflector bowl.

[0048] In step S2, please refer to the S2 step in Figure 2 , turn on the first laser 122 of the gas discharge lamp light path adjusting device 1, and the indicating light emitted by the first laser 122 is reflected by the beam splitter cube 13 and enters the optical system of the lamp box of the laser-driven gas discharge lamp. After reflection, it returns to the gas discharge lamp light path adjusting device 1 and irradiates the charge-coupled image sensor 11 to form a light spot.

[0049] As an example, please refer to Figure 3 , Figure 3 , which is a schematic diagram of the light path of the indicating light emitted by the first laser 122 returning to the gas discharge lamp light path adjusting device 1. The indicating light emitted by the first laser 122 passes through the beam splitter cube 13, a part of which is reflected and enters the optical system of the lamp box of the laser-driven gas discharge lamp, and the other part passes through the beam splitter cube 13 and enters the light terminator 14. The indicating light that enters the optical system of the lamp box of the laser-driven gas discharge lamp is reflected twice by the dichroic mirror 24 and the reflector bowl 25, and part of the indicating light returns to the gas discharge lamp light path adjusting device 1 and irradiates the charge-coupled image sensor 11 to form a light spot. At this time, a light spot image can be seen on the software of the charge-coupled image sensor 11.

[0050] In step S3, please refer to the S3 step in Figure 2 , adjust the position of the reflector bowl 25 in the xz plane until the light spot size measured by the charge-coupled image sensor 11 is the smallest and symmetrically distributed.

[0051] As an example, please refer to Figure 4 , Figure 4 , which is a schematic diagram of the light spot formed by the indicating light emitted by the first laser 122 on the charge-coupled image sensor 11 when the light spot size is the smallest and symmetrically distributed, Figure 4 , which is a schematic diagram of the light spot formed by the indicating light emitted by the first laser 122 on the charge-coupled image sensor 11 when the light spot is shifted up and down, Figure 4Figure (c) shows a schematic diagram of the indicator light emitted by the first laser 122 shifting left and right in the light spot formed by the charge-coupled image sensor 11. When the reflector bowl 25 deviates in the x-axis direction, the light spot measured by the charge-coupled image sensor 11 is as follows. Figure 4 As shown in Figure (b), the light spot is distributed in a ring shape and the center of the light spot shifts vertically; when the reflector bowl 25 deviates in the z-axis direction, the light spot measured by the charge-coupled image sensor 11 is as follows. Figure 4 As shown in Figure (c), the light spot is distributed in a ring shape and the center of the light spot shifts to the left and right.

[0052] Specifically, the offset direction of the halo generated by the light spot is consistent with the offset direction of the reflector bowl 25.

[0053] Specifically, when the spot size measured by the charge-coupled image sensor 11 is the smallest and symmetrically distributed, the second focal point of the reflector bowl 25 is located on the target surface 111 of the charge-coupled image sensor 11.

[0054] Specifically, the position of the reflector bowl 25 is adjusted by the indicator light emitted by the first laser 122 so that the actual second focal position of the reflector bowl 25 is aligned with the theoretical second focal position, and the actual first focal position of the reflector bowl 25 is aligned with the theoretical first focal position. Furthermore, the actual first focal position of the reflector bowl 25 coincides with the light-emitting center of the laser-driven gas discharge lamp.

[0055] In step S4, please refer to Figure 2 In step S4, the first laser 122 of the gas discharge lamp path adjustment device 1 is turned off, and the infrared laser 21 of the lamp box optical system 2 of the laser-driven gas discharge lamp is turned on. The indicator light emitted by the infrared laser 21 is reflected and enters the gas discharge lamp path adjustment device 1 to illuminate the charge-coupled image sensor 11 to form a light spot.

[0056] For example, please refer to Figure 5 , Figure 5 This is a schematic diagram of the optical path of the indicator light emitted by the infrared laser 21 entering the gas discharge lamp path adjustment device 1. After being diverged by the concave lens 22 and reflected by the reflector 23, the indicator light emitted by the infrared laser 21 passes through the dichroic mirror 24 and illuminates the ellipsoidal surface of the bottom reflector bowl 25 at a certain divergence angle. After being reflected again by the reflector bowl 25 and the dichroic mirror 24, it enters the gas discharge lamp path adjustment device 1 and illuminates the charge-coupled image sensor 11 to form a light spot. At this time, an image of a light spot can be seen on the software of the charge-coupled image sensor 11.

[0057] In step S5, please refer to Figure 2The step S5 in the method for adjusting the position of the light spot on the charge coupled image sensor 11 is the same as the position of the light spot obtained after the first laser 122 is turned on, and the size of the light spot on the charge coupled image sensor 11 is minimized.

[0058] Specifically, after the position of the reflector 25 is adjusted, only the optical position of the focal point is aligned, and the optical path of the light emitted by the infrared laser 21 may not match the focusing optical path of the first focal point of the reflector 25. It is necessary to ensure that the optical path of the light emitted by the infrared laser 21 can be accurately focused on the first focal point of the reflector 25, that is, whether the optical path of the light emitted by the infrared laser 21 is equivalent to the reverse incidence path from the first focal point is verified by the indicating light emitted by the infrared laser 21. If equivalent, according to the working principle of the ellipsoidal reflector, the indicating light emitted by the infrared laser 21 is reflected by the reflector 25 and first focused on the first focal point, and then propagates along the optical path pointing to the second focal point and is focused on the second focal point of the reflector 25.

[0059] As an example, the step of adjusting the position of the light spot on the charge coupled image sensor 11 to be the same as the position of the light spot obtained after the first laser 122 is turned on includes: adjusting the position of the infrared laser 21 in the yz plane, so that the position of the light spot on the charge coupled image sensor 11 is the same as the position of the light spot obtained after the first laser 122 is turned on.

[0060] As an example, the step of adjusting the position of the light spot on the charge coupled image sensor 11 to be the same as the position of the light spot obtained after the first laser 122 is turned on further includes: adjusting the position of the concave lens 22 in the yz plane, so that the position of the light spot on the charge coupled image sensor 11 is the same as the position of the light spot obtained after the first laser 122 is turned on.

[0061] As an example, the step of minimizing the size of the light spot on the charge coupled image sensor 11 includes: adjusting the position of the infrared laser 21 along the x-axis direction, so that the size of the light spot on the charge coupled image sensor 11 is minimized.

[0062] As an example, the step of minimizing the size of the light spot on the charge coupled image sensor 11 further includes: adjusting the position of the concave lens 22 along the x-axis direction, so that the size of the light spot on the charge coupled image sensor 11 is minimized.

[0063] As an example, the step of minimizing the size of the light spot on the charge coupled image sensor 11 further includes: adjusting the position of the mirror 23 along the x-axis direction, so that the size of the light spot on the charge coupled image sensor 11 is minimized.

[0064] Specifically, when the spot position of the indication light emitted by the infrared laser 21 is the same as the position obtained after adjusting the first laser 122 and the spot size on the charge coupled image sensor 11 is the smallest, the second focal point of the reflector bowl 25 obtained by the indication light emitted by the infrared laser 21 is located on the target surface 111 of the charge coupled image sensor 11, and is the same as the position of the second focal point of the reflector bowl 25 obtained after adjusting the first laser 122, the light path of the light emitted by the infrared laser 21 matches the focusing light path of the first focal point of the reflector bowl 25, and the alignment of the light path of the laser-driven gas discharge lamp is completed.

[0065] The gas discharge lamp light path adjusting device and the light path adjusting method provided by the present application can quickly and efficiently align the light path, effectively meet the high requirements of the laser-driven gas discharge lamp on the light path precision, are not only suitable for the light path building in the equipment assembly stage, but also can be used in the subsequent debugging and maintenance links, have a wide range of application scenarios, and can significantly improve the light path adjusting efficiency and stability of the laser-driven gas discharge lamp in application.

[0066] Although the present application has been disclosed as above with examples, it is not intended to limit the present application, and anyone with ordinary knowledge in the art can make some changes and modifications without departing from the spirit and scope of the present application, so the protection scope of the present application shall be defined by the appended patent claim scope.

Claims

1. An arrangement for light path adjustment of a gas discharge lamp, characterized in that The device comprises a charge coupled image sensor, a point light source, and a light splitting cube. The point light source and the charge coupled image sensor are located in two perpendicular directions of the light splitting cube respectively, the optical axis of the light emitted by the point light source intersects with the perpendicular line of the center of the target surface of the charge coupled image sensor at the inclined surface of the light splitting cube, and the distance from the center of the target surface of the charge coupled image sensor to the inclined surface of the light splitting cube is equal to the distance from the light outlet of the point light source to the inclined surface of the light splitting cube.

2. The gas discharge lamp light path adjustment device of claim 1, wherein The device further comprises a light ray terminator, and the light inlet of the light ray terminator is located on the light path of the light emitted by the point light source and passing through the light splitting cube.

3. The gas discharge lamp light path adjustment device of claim 1, wherein The point light source comprises: The optical fiber head is connected with the first laser.

4. The gas discharge lamp light path adjustment device of claim 3, wherein the light path adjustment device is configured to adjust the light path of the light emitted by the gas discharge lamp by moving the light path adjustment device in a direction parallel to the longitudinal axis of the gas discharge lamp. The light outputted from the optical fiber outlet of the optical fiber head has a divergence angle.

5. A method of adjusting the optical path of a gas discharge lamp, applied to the apparatus for adjusting the optical path of a gas discharge lamp according to any one of claims 1 to 4, characterized by, The device comprises: The device is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, the target surface of the charge coupled image sensor faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface of the charge coupled image sensor is located at the theoretical second focal point of the reflector bowl. The first laser of the device is turned on, the indicating light emitted by the first laser enters the optical system of the lamp box of the laser-driven gas discharge lamp after being reflected by the light splitting cube, and the indicating light returns to the device after being reflected to form a light spot on the charge coupled image sensor. The position of the reflector bowl is adjusted in the xz plane until the light spot size measured by the charge coupled image sensor is the smallest and is symmetrically distributed. The first laser of the device is turned off, the infrared laser of the optical system of the lamp box of the laser-driven gas discharge lamp is turned on, the indicating light emitted by the infrared laser enters the device after being reflected to form a light spot on the charge coupled image sensor. The position of the light spot on the charge coupled image sensor is adjusted to be the same as the position of the light spot obtained after the first laser is turned on, and the size of the light spot on the charge coupled image sensor is adjusted to be the smallest.

6. A method of light path adjustment of a gas discharge lamp as claimed in claim 5, characterized in that, The position of the light spot on the charge coupled image sensor is adjusted to be the same as the position of the light spot obtained after the first laser is turned on, and the size of the light spot on the charge coupled image sensor is adjusted to be the smallest.

7. A method for light path adjustment of a gas discharge lamp as claimed in claim 5, characterized in that The position of the light spot on the charge coupled image sensor is adjusted to be the same as the position of the light spot obtained after the first laser is turned on, and the size of the light spot on the charge coupled image sensor is adjusted to be the smallest.

8. A method of light path adjustment for a gas discharge lamp as defined in claim 5, characterized in that The position of the light spot on the charge coupled image sensor is adjusted to be the same as the position of the light spot obtained after the first laser is turned on, and the size of the light spot on the charge coupled image sensor is adjusted to be the smallest.

9. A method of light path adjustment for a gas discharge lamp as defined in claim 5, characterized in that The position of the light spot on the charge coupled image sensor is adjusted to be the same as the position of the light spot obtained after the first laser is turned on, and the size of the light spot on the charge coupled image sensor is adjusted to be the smallest.

10. A method of light path adjustment for a gas discharge lamp as defined in claim 5, wherein The method for adjusting the spot size on the charge-coupled image sensor to be minimum also includes adjusting the position of the mirror of the light box optical system of the laser-driven gas discharge lamp in the x-axis direction to make the spot size on the charge-coupled image sensor to be minimum.

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