Multi-stage collaborative cleaning device for TFT-LCD (Thin Film Transistor Liquid Crystal Display) glass substrate

Abstract

The invention provides a TFT-LCD glass substrate multi-stage collaborative cleaning device which comprises a bottom plate, a recycling assembly is installed on the top face of the bottom plate, a lower cleaning assembly is installed in the recycling assembly, and a feeding assembly is installed at the position, located at one end of the recycling assembly, of the top face of the bottom plate; the recycling assembly comprises a recycling pool, and the top face of the bottom plate is fixedly connected with the recycling pool. The lower cleaning assembly comprises a first cleaning part, a second cleaning part, a washing nozzle and an air drying part, the first cleaning part is installed in the first cleaning cavity, the second cleaning part is installed in the second cleaning cavity, and the washing nozzle is installed in the third cleaning cavity; the first cleaning part comprises a cleaning frame, and the cleaning frame is fixedly connected into the first cleaning cavity. Through mutual cooperation of the recycling assembly, the lower cleaning assembly, the feeding assembly, the auxiliary discharging assembly and the upper cleaning assembly, cleaning of the glass substrate can be achieved, and the high-quality requirement for the glass substrate in the TFT-LCD manufacturing process is met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of glass substrate cleaning, and particularly relates to a multi-stage cooperative cleaning device for TFT-LCD glass substrate. BACKGROUND

[0002] In the manufacturing process of thin film transistor liquid crystal display (TFT-LCD), the cleanliness of the surface of the glass substrate is crucial, as the glass substrate is used as a carrier for core components such as thin film transistor array and color filter. During transportation, storage and previous processes, various types of micro-pollutants, including particulate dust, organic residues (such as oil and grease, photoresist), inorganic metal ions, etc., may be attached to the surface of the glass substrate. If these pollutants are not completely removed, they may cause a series of problems such as thin film adhesion, film layer defects, pattern misalignment or short circuit in subsequent film forming (such as CVD, PVD), photolithography, etching and other precision processes, ultimately leading to uneven brightness, line defects, point defects and other defects of the display panel, and seriously reducing the yield of the product.

[0003] Therefore, the industry usually adopts a multi-step combined cleaning method to purify the surface of the glass substrate. A typical existing cleaning process usually includes: soaking or spraying with alkaline or acidic chemical solution containing surfactants to dissolve and peel off organic and inorganic pollutants; physical brushing with nylon brush roller to remove strongly adhered particles; then multiple rinsing with ultrapure water; finally removing surface moisture by centrifugal drying, isopropanol (IPA) vapor drying or air knife drying;

[0004] However, the above-mentioned traditional cleaning method has many inherent defects, and it is difficult to meet the stringent requirements of high-generation and high-resolution TFT-LCD manufacturing for micro-nano level cleanliness of the surface of the glass substrate. Specifically:

[0005] 1. The connection sequence and parameter matching of chemical cleaning, physical brushing and rinsing steps are not optimized. For example, if the brushing step is arranged before the chemical cleaning, the pollutants may be mechanically crushed and embedded deeper into the substrate surface or the substrate may be scratched; and if the chemical solution is not completely removed by the subsequent rinsing step, chemical residues may be caused;

[0006] 2. A single chemical solution formula cannot efficiently remove both polar (such as metal ions) and non-polar (such as organic oil stains) pollutants. For sub-micron and below ultra-fine particles, the traditional brushing and turbulent washing effect is significantly reduced, and residues may be easily formed on the substrate surface, especially in the patterned grooves;

[0007] 3. If the traditional hot air drying or centrifugal drying is not properly controlled, water marks may be left on the substrate surface due to rapid evaporation of water; and IPA vapor drying may introduce new organic pollution due to IPA purity or recovery problems. SUMMARY

[0008] In view of the deficiencies of the prior art, the present application provides a TFT-LCD glass substrate multi-stage collaborative cleaning device, which solves the problems mentioned in the background art.

[0009] To achieve the above object, the present application is implemented by the following technical solutions:

[0010] A TFT-LCD glass substrate multi-stage collaborative cleaning device, comprising a bottom plate, a recovery assembly is installed on the top surface of the bottom plate, a lower cleaning assembly is installed in the recovery assembly, a feeding assembly is installed on one end of the top surface of the bottom plate and located in the recovery assembly, an auxiliary discharging assembly is installed on the other end of the top surface of the bottom plate and located in the recovery assembly, and an upper cleaning assembly is installed on the top surface of the bottom plate and located above the lower cleaning assembly; the recovery assembly comprises a recovery tank, the top surface of the bottom plate is fixedly connected with the recovery tank, a first scraper, a second scraper and a third scraper are sequentially fixedly connected in the recovery tank, and the inner cavity of the recovery tank is divided into a first cleaning cavity, a second cleaning cavity, a third cleaning cavity and a fourth cleaning cavity by the first scraper, the second scraper and the third scraper; the lower cleaning assembly comprises a first cleaning component, a second cleaning component, a water washing nozzle and a air drying component, the first cleaning component is installed in the first cleaning cavity, the second cleaning component is installed in the second cleaning cavity, the water washing nozzle is installed in the third cleaning cavity, the water washing nozzle is fixedly connected on one side of the second scraper, and the air drying component is installed in the fourth cleaning cavity; the first cleaning component comprises a cleaning frame, the cleaning frame is fixedly connected in the first cleaning cavity, and a straight surface nozzle, a first double-sided nozzle and a second double-sided nozzle are respectively fixedly connected in the cleaning frame.

[0011] Further, the first cleaning component further comprises a cleaning motor, the cleaning motor is fixedly connected on one side of the cleaning frame, a first cleaning roller is rotationally connected to the output end of the cleaning motor through a worm cooperating with a worm gear, a second cleaning roller is rotationally connected to the surface of the first cleaning roller through a sprocket set cooperating with a transmission chain, the second cleaning roller is located between the straight surface nozzle and the first double-sided nozzle, and the first cleaning roller is located on one side of the second double-sided nozzle.

[0012] Further, the first cleaning component further comprises a reciprocating track, the reciprocating track is fixedly connected in the cleaning frame, the reciprocating track is located between the first double-sided nozzle and the second double-sided nozzle, a reciprocating screw rod is rotationally connected in the reciprocating track, a reciprocating plate is threadedly connected to the surface of the reciprocating screw rod, a cleaning motor is fixedly connected on one side of the reciprocating plate, a cleaning shaft is fixedly connected to the output end of the cleaning motor, and cleaning discs are rotationally connected to the surface of the cleaning shaft through a worm cooperating with a worm gear.

[0013] Further, the second cleaning component comprises a secondary cleaning frame, the secondary cleaning frame is fixedly connected with a slanting nozzle and a straight nozzle respectively, a re-cleaning roller is rotatably connected to the middle of the secondary cleaning frame, the re-cleaning roller is located between the slanting nozzle and the straight nozzle, a secondary cleaning motor is fixedly connected to one side of the secondary cleaning frame, and the output end of the secondary cleaning motor is rotatably connected with the re-cleaning roller through a worm cooperating with a worm wheel.

[0014] Further, the air-drying component comprises an air-drying frame, one side of the third scraper is fixedly connected with the air-drying frame, and the top surface of the air-drying frame is sequentially fixedly connected with a clean water nozzle, a slanted air-blowing nozzle and an air-drying nozzle.

[0015] Further, the upper cleaning assembly comprises a first upper cleaning component, a second upper cleaning component and a first upper air-drying component, the top surface of the bottom plate and above the first cleaning component is provided with the first upper cleaning component, the top surface of the bottom plate and above the second cleaning component is provided with the second upper cleaning component, and the top surface of the bottom plate and above the air-drying component is provided with the first upper air-drying component.

[0016] The first upper cleaning component comprises an adjusting hydraulic rod, the top surface of the bottom plate is fixedly connected with the adjusting hydraulic rod, the output end of the adjusting hydraulic rod is provided with a first upper cleaning structure, and the first upper cleaning structure adopts the same structure as the first cleaning component.

[0017] Further, the second upper cleaning component comprises a lifting hydraulic rod, the top surface of the bottom plate is fixedly connected with the lifting hydraulic rod, the output end of the lifting hydraulic rod is provided with a second upper cleaning structure, the second upper cleaning structure adopts the same structure as the second cleaning component, and the two sides of the second upper cleaning structure are respectively fixedly connected with a first partition plate and a second partition plate.

[0018] Further, the first upper air-drying component comprises an air-blowing frame, the top surface of the bottom plate is fixedly connected with the air-blowing frame, and the air-blowing frame is sequentially provided with a flushing nozzle, a third partition plate and an upper air-drying structure, the upper air-drying structure adopts the same structure as the air-drying component.

[0019] Further, the feeding assembly comprises a feeding frame, the top surface of the bottom plate and above the recycling pool is fixedly connected with the feeding frame, the middle of the feeding frame is rotatably connected with feeding rollers at equal intervals, one side of the feeding frame is fixedly connected with a feeding motor, the output end of the feeding motor is fixedly connected with a transmission rod, the surface of the transmission rod is rotatably connected with the feeding rollers through a worm cooperating with a worm wheel respectively, the bottom surface of the feeding frame is fixedly connected with a bidirectional track, a bidirectional threaded rod is rotatably connected in the bidirectional track, the surface of the bidirectional threaded rod is respectively threadedly connected with opposite blocks, and the bottom surface of the opposite blocks is rotatably connected with a limiting roller.

[0020] Further, the auxiliary blanking assembly comprises a blanking frame, the top surface of the bottom plate and above the recovery pool is fixedly connected with a blanking frame, the driving roller and the driven roller are rotationally connected in the blanking frame respectively, the double-shaft motor is fixedly connected on one side of the blanking frame, the output end of the double-shaft motor is rotationally connected with the driving roller through the worm and the worm gear respectively.

[0021] The application provides a TFT-LCD glass substrate multi-stage cooperative cleaning device.

[0022] 1. The cleaning steps are reasonable, and through the combination of multiple cleaning methods such as secondary fluid cleaning, cleaning disc and dish brush and multiple cleaning operations, different types of pollutants on the surface of the glass substrate can be removed in all directions, and the cleaning effect is remarkable.

[0023] 2. The combination of mechanical friction (rolling brush and cleaning disc) and chemical cleaning (chemical solution) enhances the removal ability of stubborn pollutants through synergistic effect.

[0024] 3. Through the cooperation of circulating water washing and pure water washing, residual chemical solution can be effectively removed, the surface cleanliness of the substrate can be ensured, and water resources can be saved.

[0025] 4. Through the two-stage blowing design, it is ensured that there is no residual water stain on the surface of the substrate, water marks are avoided, and good substrate conditions are provided for subsequent processes. DETAILED DESCRIPTION

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only constitute some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor based on these drawings.

[0027] Figure 1 The overall schematic diagram of the application is shown;

[0028] Figure 2 Another perspective view of the overall schematic diagram of the application is shown;

[0029] Figure 3 The recovery assembly schematic diagram of the application is shown;

[0030] Figure 4 The feeding assembly schematic diagram of the application is shown;

[0031] Figure 5 The overall partial schematic diagram of the application is shown;

[0032] Figure 6 The auxiliary blanking assembly schematic diagram of the application is shown;

[0033] Figure 7 The schematic diagram of the lower cleaning assembly of the present application is shown;

[0034] Figure 8 The partial schematic diagram of the lower cleaning assembly of the present application is shown;

[0035] Figure 9 The schematic diagram of the second cleaning component of the present application is shown;

[0036] Figure 10 The schematic diagram of the recycling assembly and the lower cleaning assembly of the present application is shown;

[0037] Figure 11 The schematic diagram of the first upper cleaning component of the present application is shown;

[0038] Figure 12 The schematic diagram of the second upper cleaning component of the present application is shown;

[0039] Figure 13 The schematic diagram of the first upper air-drying component of the present application is shown;

[0040] The schematic diagram of the present application is shown in the figure:

[0041] 100, base plate;

[0042] 200, recycling assembly; 201, recycling pool; 202, first scraper; 203, second scraper; 204, third scraper; 205, first cleaning cavity; 206, second cleaning cavity; 207, third cleaning cavity; 208, fourth cleaning cavity;

[0043] 300, lower cleaning assembly; 301, water-washing nozzle; 302, cleaning frame; 303, straight-face nozzle; 304, first double-face nozzle; 305, second double-face nozzle; 306, cleaning motor; 307, first cleaning roller; 308, transmission chain; 309, second cleaning roller; 310, reciprocating track; 312, reciprocating plate; 313, sweeping motor; 314, sweeping shaft; 315, sweeping disc; 316, secondary cleaning frame; 317, oblique nozzle; 318, straight nozzle; 319, re-cleaning roller; 320, secondary cleaning motor; 321, air-drying frame; 322, clean water nozzle; 323, oblique air-blowing nozzle; 324, air-drying nozzle;

[0044] 400, feeding assembly; 401, feeding frame; 402, feeding roller; 403, feeding motor; 404, transmission rod; 405, bidirectional track; 406, bidirectional threaded rod; 407, opposite block; 408, limiting roller;

[0045] 500, auxiliary discharging assembly; 501, discharging frame; 502, driving roller; 503, driven roller; 504, double-shaft motor;

[0046] 600, upper cleaning assembly; 601, adjusting hydraulic rod; 602, first upper cleaning structure; 603, lifting hydraulic rod; 604, second upper cleaning structure; 605, first partition plate; 606, second partition plate; 607, blowing frame; 608, flushing nozzle; 609, third partition plate; 610, air-drying structure. DETAILED DESCRIPTION

[0047] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application are described clearly and completely. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0048] In combination with Figures 1-13 As shown in the drawings, the present application provides a TFT-LCD glass substrate multi-stage collaborative cleaning device, which comprises a bottom plate 100, a recovery assembly 200 is installed on the top surface of the bottom plate 100, a lower cleaning assembly 300 is installed in the recovery assembly 200, a feeding assembly 400 is installed on the top surface of the bottom plate 100 and located at one end of the recovery assembly 200, an auxiliary discharging assembly 500 is installed on the top surface of the bottom plate 100 and located at the other end of the recovery assembly 200, and an upper cleaning assembly 600 is installed on the top surface of the bottom plate 100 and located above the lower cleaning assembly 300; the recovery assembly 200 comprises a recovery tank 201, the recovery tank 201 is fixedly connected to the top surface of the bottom plate 100, a first scraper 202, a second scraper 203 and a third scraper 204 are sequentially fixedly connected in the recovery tank 201, and the inner cavity of the recovery tank 201 is divided into a first cleaning cavity 205, a second cleaning cavity 206, a third cleaning cavity 207 and a fourth cleaning cavity 208 by the first scraper 202, the second scraper 203 and the third scraper 204; the lower cleaning assembly 300 comprises a first cleaning part, a second cleaning part, a water washing nozzle 301 and a drying part, the first cleaning part is installed in the first cleaning cavity 205, the second cleaning part is installed in the second cleaning cavity 206, the water washing nozzle 301 is installed in the third cleaning cavity 207, the water washing nozzle 301 is fixedly connected to one side of the second scraper 203, and the drying part is installed in the fourth cleaning cavity 208; the first cleaning part comprises a cleaning frame 302, the cleaning frame 302 is fixedly connected to the first cleaning cavity 205, and a straight-face nozzle 303, a first double-face nozzle 304 and a second double-face nozzle 305 are respectively fixedly connected in the cleaning frame 302.

[0049] The recovery assembly is divided into four cleaning cavities by three scrapers, so that each stage of "primary cleaning-secondary cleaning-water washing-air drying" is independent, the cleaning liquid in different stages is prevented from mixing, and cross contamination is prevented;

[0050] The upper cleaning assembly is located above the lower cleaning assembly, provides structural support for "double-sided synchronous cleaning of glass substrates", and avoids incomplete single-sided cleaning;

[0051] The "first cleaning (impingement of the spray head) → second cleaning (intensified cleaning) → water washing (removal of residues) → air drying (prevention of marking)" of the lower cleaning assembly forms a basic multi-stage process, covering all aspects of cleaning;

[0052] The straight-face spray head (covering the front surface) and the double-sided spray head (covering the upper and lower surfaces) of the first cleaning component ensure that the fluid impingement in the initial cleaning stage covers the entire surface of the substrate and preliminarily removes large-particle impurities.

[0053] In this embodiment, the first cleaning component further includes a cleaning motor 306, the cleaning frame 302 has one side fixedly connected with the cleaning motor 306, the output end of the cleaning motor 306 is rotationally connected with a first cleaning roller 307 through a worm cooperating with a worm gear, the surface of the first cleaning roller 307 is rotationally connected with a second cleaning roller 309 through a sprocket set cooperating with a transmission chain 308, the second cleaning roller 309 is located between the straight-face spray head 303 and the first double-sided spray head 304, and the first cleaning roller 307 is located on one side of the second double-sided spray head 305.

[0054] The first / second cleaning roller is driven to rotate by the cleaning motor, and the "gas-liquid mixed fluid impingement" of the mechanical friction cooperating with the "mechanical friction + chemical action of the chemical liquid" in the working principle intensifies the removal of stubborn stains.

[0055] The sprocket set ensures that the rotation speeds of the first / second cleaning roller are consistent, avoiding uneven cleaning intensity of the substrate due to speed differences.

[0056] The second cleaning roller is located between the straight-face spray head and the first double-sided spray head, and the first cleaning roller is close to the second double-sided spray head, so that the fluid sprayed by the spray head can synchronously flush the surface of the cleaning roller, avoiding secondary pollution of the substrate caused by residual stains on the cleaning roller.

[0057] In this embodiment, the first cleaning component further includes a reciprocating rail 310, the cleaning frame 302 has the reciprocating rail 310 fixedly connected therein, the reciprocating rail 310 is located between the first double-sided spray head 304 and the second double-sided spray head 305, the reciprocating rail 310 has a reciprocating screw rod 311 rotationally connected therein, the surface of the reciprocating screw rod 311 is threadedly connected with a reciprocating plate 312, one side of the reciprocating plate 312 is fixedly connected with a cleaning motor 313, the output end of the cleaning motor 313 is fixedly connected with a cleaning shaft 314, and the surface of the cleaning shaft 314 is respectively rotationally connected with cleaning discs 315 through a worm cooperating with a worm gear.

[0058] The reciprocating speed of the reciprocating screw rod and the rotation speed of the cleaning motor can be adjusted to adapt to the cleaning requirements of substrates of different stain types.

[0059] The cleaning disc is located between the two groups of double-sided spray heads, and the fluid sprayed by the spray heads can wash the cleaning disc in real time to avoid residual stains and ensure that the cleaning process is free of secondary pollution.

[0060] The reciprocating screw rod drives the reciprocating plate to translate, and the cleaning disc driven by the cleaning motor rotates to form a "translation + rotation" compound motion, covering the cleaning roller blind area in the corners and edges of the substrate, and supplementing the cleaning dead angle.

[0061] In this embodiment, the second cleaning component includes a secondary cleaning frame 316, the secondary cleaning frame 316 is fixedly connected with an oblique spray head 317 and a straight spray head 318 respectively, a middle part of the secondary cleaning frame 316 is rotatably connected with a secondary cleaning roller 319, the secondary cleaning roller 319 is located between the oblique spray head 317 and the straight spray head 318, one side of the secondary cleaning frame 316 is fixedly connected with a secondary cleaning motor 320, and the output end of the secondary cleaning motor 320 is rotatably connected with the secondary cleaning roller 319 through a worm and a worm gear.

[0062] The oblique spray head (non-vertical impact) and the straight spray head (vertical impact) spray gas-liquid mixed fluid from different angles to enhance the impact force on small particles and avoid the omission of single direction impact.

[0063] The secondary cleaning roller rotates with the secondary cleaning motor to perform secondary mechanical friction on the substrate after primary washing, sweep off the residual micro-particles, and ensure the flatness of the substrate surface.

[0064] The straight spray head can spray a specific proportion of chemical liquid (such as the "chemical liquid for removing metal ions and organic matter" in the working principle), and through chemical action + mechanical friction, special pollutants that cannot be removed by primary washing are removed.

[0065] In this embodiment, the air drying component includes an air drying frame 321, one side of the third scraper 204 is fixedly connected with the air drying frame 321, and the top surface of the air drying frame 321 is sequentially fixedly connected with a clean water spray head 322, an inclined air blowing spray head 323 and an air drying spray head 324.

[0066] The clean water spray head (such as the "pure water with resistivity ≥18MΩ·cm" in the working principle) first cleans the substrate for the last time to remove the trace of pollutants remaining after washing, and avoids the solidification of impurities after drying.

[0067] The inclined air blowing spray head blows air obliquely to "push or blow off" the water on the surface of the substrate to achieve preliminary water removal, and the subsequent air drying spray head uses 0.2-0.6MPa strong wind to dry completely, and the two-stage drying ensures that there is no water residue to avoid water marks.

[0068] The air drying frame is fixed on one side of the third scraper, and the third scraper can block the water in the previous washing area from entering the drying area to avoid affecting the drying effect.

[0069] In the embodiment, the upper cleaning assembly 600 includes a first upper cleaning component, a second upper cleaning component, and a first upper air-drying component. The first upper cleaning component is installed on the top surface of the bottom plate 100 above the first cleaning component. The second upper cleaning component is installed on the top surface of the bottom plate 100 above the second cleaning component. The first upper air-drying component is installed on the top surface of the bottom plate 100 above the air-drying component.

[0070] The first upper cleaning component includes an adjusting hydraulic rod 601 fixedly connected to the top surface of the bottom plate 100. An output end of the adjusting hydraulic rod 601 is provided with a first upper cleaning structure 602. The first upper cleaning structure 602 has the same structure as the first cleaning component.

[0071] The three components of the upper cleaning assembly correspond to the three components of the lower cleaning assembly one by one to form an "upper-lower" coordinated "primary cleaning-secondary cleaning-air-drying" whole process, thereby strengthening the overall cleaning effect.

[0072] The first upper cleaning structure has the same structure as the first cleaning component of the lower cleaning assembly, thereby realizing "synchronous primary cleaning of upper and lower surfaces" (fluid impact + mechanical friction) and avoiding the difference in cleanliness caused by single-sided cleaning.

[0073] The adjusting hydraulic rod can be extended or retracted to adjust the height of the first upper cleaning structure, thereby adapting to substrates of different thicknesses and ensuring that the distance between the upper cleaning component and the upper surface of the substrate is always reasonable, thereby avoiding over-cleaning or under-cleaning.

[0074] In the embodiment, the second upper cleaning component includes a lifting hydraulic rod 603 fixedly connected to the top surface of the bottom plate 100. An output end of the lifting hydraulic rod 603 is provided with a second upper cleaning structure 604. The second upper cleaning structure 604 has the same structure as the second cleaning component. The second upper cleaning structure 604 is fixedly connected to a first partition plate 605 and a second partition plate 606 on both sides, respectively.

[0075] The lifting hydraulic rod adjusts the height of the second upper cleaning structure, thereby ensuring that the distance between the primary and secondary cleaning of substrates of different thicknesses is consistent, and the secondary cleaning intensity is uniform.

[0076] The second upper cleaning structure has the same structure as the second cleaning component of the lower cleaning assembly, thereby realizing "synchronous secondary cleaning of upper and lower surfaces" and strengthening the removal of small particles and special contaminants.

[0077] The first partition plate blocks the liquid in the primary cleaning area from entering the secondary cleaning area. The second partition plate blocks the cleaning liquid in the secondary cleaning area from entering the subsequent water washing area, thereby avoiding cross-contamination in each cleaning stage and ensuring the cleanliness of the secondary cleaning.

[0078] In the embodiment, the first upper air drying part comprises a blowing frame 607, the top surface of the bottom plate 100 is fixedly connected with the blowing frame 607, the blowing frame 607 is sequentially provided with a flushing nozzle 608, a third partition plate 609 and an upper air drying structure 610, and the upper air drying structure 610 adopts the same structure as the air drying part.

[0079] The flushing nozzle (upper) cooperates with the water washing nozzle (lower) of the lower cleaning assembly to realize "synchronous water washing of upper and lower surfaces", completely remove the residual liquid after the second washing, and avoid incomplete single-side water washing;

[0080] The third partition plate blocks the moisture in the water washing area from entering the air drying area, and prevents the moisture from being attached to the substrate again in the air drying process.

[0081] The upper air drying structure is the same as the air drying part of the lower cleaning assembly, realizes "synchronous air drying of upper and lower surfaces", ensures that there is no residual moisture on the upper surface of the substrate, and avoids water marks on the upper surface caused by single lower air drying.

[0082] In the embodiment, the feeding assembly 400 comprises a feeding frame 401, the top surface of the bottom plate 100 and above the recovery pool 201 is fixedly connected with the feeding frame 401, the middle part of the feeding frame 401 is rotationally connected with feeding rollers 402 at equal intervals, one side of the feeding frame 401 is fixedly connected with a feeding motor 403, the output end of the feeding motor 403 is fixedly connected with a transmission rod 404, the surface of the transmission rod 404 is rotationally connected with the feeding rollers 402 through a worm and a worm gear respectively, the bottom surface of the feeding frame 401 is fixedly connected with a bidirectional track 405, the bidirectional track 405 is rotationally connected with a bidirectional threaded rod 406, the surface of the bidirectional threaded rod 406 is threadedly connected with opposite blocks 407 respectively, and the bottom surface of the opposite blocks 407 is rotationally connected with a limiting roller 408.

[0083] The feeding motor drives multiple groups of feeding rollers to rotate synchronously through the transmission rod + worm and worm gear, ensures that the substrate is uniformly and stably conveyed, and avoids scratches on the substrate caused by conveying jamming;

[0084] The opposite blocks and the limiting rollers are driven by the bidirectional threaded rod to move "oppositely", which can adapt to substrates of different widths, and the limiting rollers clamp the substrate from both sides to prevent conveying deviation;

[0085] Limiting + synchronous conveying ensures that the substrate accurately enters between the upper cleaning assembly and the lower cleaning assembly, and avoids local cleaning omission caused by deviation.

[0086] In this embodiment, the auxiliary feeding assembly 500 includes a feeding frame 501. The feeding frame 501 is fixedly connected to the top surface of the base plate 100 and above the recycling pool 201. An active roller 502 and a driven roller 503 are rotatably connected inside the feeding frame 501. A dual-axis motor 504 is fixedly connected to one side of the feeding frame 501. The output end of the dual-axis motor 504 is rotatably connected to the active roller 502 through a worm gear and a worm wheel.

[0087] The active roller is driven by a dual-axis motor to rotate, which, together with the driven roller, forms a "power delivery + support" system to ensure that the cleaned substrate is moved out of the system at a uniform speed and smoothly, avoiding surface scratches caused by jamming.

[0088] The active roller provides stable feeding power, ensuring a seamless "feeding-cleaning-unloading" process without manual intervention, and is suitable for automated production line requirements.

[0089] Working principle and usage process of this invention:

[0090] In use:

[0091] Step 1, Loading materials:

[0092] First, the operator places one end of the glass substrate on the feeding roller 402, while the two sides of the glass substrate are positioned between two sets of limiting rollers 408. Then, the bidirectional threaded rod 406 is rotated. As the bidirectional threaded rod 406 rotates, it drives the two sets of opposing blocks 407 and the limiting rollers 408 to move in opposite directions. As the limiting rollers 408 move in opposite directions, they begin to limit the two sides of the glass substrate. At this time, the feeding motor 403 is started. The feeding motor 403 drives multiple sets of feeding rollers 402 to rotate through the transmission rod 404, thereby moving the glass substrate forward and conveying it between the first cleaning component and the first upper cleaning component to begin cleaning.

[0093] The second step is to rinse the surface of the glass substrate with a roller brush:

[0094] First, the external pump is activated, injecting a mixture of compressed air and water into the direct-flow nozzle 303. The sprayed mixture is then directed onto the upper and lower surfaces of the glass substrate. The impact force of the gas-liquid mixture then initially removes larger particulate contaminants and some loosely attached impurities from the surface of the glass substrate.

[0095] Since the first cleaning roller 307 is installed on both sides of the glass substrate, when the glass substrate sprayed with the mixed fluid reaches the two groups of first cleaning rollers 307, the first cleaning roller 307 starts to brush the surface of the glass substrate, and the mixed fluid is evenly applied to both sides of the glass substrate. In addition, the mechanical friction of the first cleaning roller 307 and the chemical action of the cleaning liquid can further remove stubborn contaminants on the surface of the substrate.

[0096] When the glass substrate moves out of the two groups of first cleaning rollers 307, the first double-sided nozzle 304 starts to spray the mixed fluid to the glass substrate. Since the mixed fluid can be sprayed not only on the glass but also on the first cleaning roller 307 and the cleaning disc 315 at this time, the first cleaning roller 307 and the cleaning disc 315 are cleaned and wetted.

[0097] Thirdly, the two sides of the glass substrate are cleaned by the disc brush and the roller.

[0098] When the glass substrate is transported to the two groups of cleaning discs 315, the cleaning motor 313 drives the cleaning disc 315 to rotate through the cleaning shaft 314. When the cleaning disc 315 rotates, it starts to clean the strong stains adhered to the surface of the glass substrate, and also cleans the corners of the glass substrate.

[0099] When the glass substrate moves out of the two groups of cleaning discs 315, the second double-sided nozzle 305 starts to spray clean water or a small amount of cleaning agent. The liquid sprayed by the second double-sided nozzle 305 starts to clean the surface of the glass substrate, which is part of the mixed fluid sprayed in the first step. At the same time, the liquid sprayed by the second double-sided nozzle 305 also sprays on the cleaning disc 315 and the second cleaning roller 309 to wet and clean them.

[0100] When the glass substrate reaches the second cleaning roller 309, the second cleaning roller 309 starts to clean the cleaning liquid on both sides of the glass substrate, which further cleans the glass substrate.

[0101] Fourthly, the glass substrate is cleaned again.

[0102] When the glass substrate moves out of the first cleaning part and the first upper cleaning part, it passes between the first scraper 202 and the first partition plate 605. At this time, the first scraper 202 and the first partition plate 605 start to scrape the cleaning liquid on the glass, so that the preliminary cleaning liquid on the glass substrate does not enter between the second upper cleaning part and the second cleaning part.

[0103] When the glass substrate enters between the second upper cleaning component and the second cleaning component, the oblique spray head 317 sprays the gas-liquid mixed fluid (mainly water and air) to the surface of the glass substrate, and the impact force of the fluid is used to clean the surface of the substrate to remove the fine particles and impurities remaining after the multiple brush rolling;

[0104] Then, the glass substrate comes between the two groups of re-cleaning rollers 319, and the fine particles that may be attached to the surface of the glass substrate can be swept off by the re-cleaning rollers 319 to ensure the flatness of the surface;

[0105] When the glass substrate moves out from between the two groups of re-cleaning rollers 319, the straight spray head 318 starts to spray the liquid medicine with a specific ratio, which can be adjusted according to the type of pollutants on the surface of the substrate. Through the chemical action combined with the impact force of the fluid, the pollutants (such as metal ions and organic matter) remaining on the surface of the substrate are removed;

[0106] The glass after removing the impurities will pass between the second scraper 203 and the second partition plate 606, and the glass substrate passing through will be cleaned by the liquid medicine on both sides of the second scraper 203 and the second partition plate 606;

[0107] The fifth step is to clean and dry the glass substrate:

[0108] When the glass substrate comes to the water washing spray head 301 and the flushing spray head 608, the circulating water sprayed by the water washing spray head 301 and the flushing spray head 608 starts to clean the surface of the glass substrate. When cleaning, the temperature of the circulating water needs to be controlled between 30 degrees and 60 degrees. Such circulating water can not only clean the liquid medicine remaining on the surface of the substrate, but also reduce the influence of the liquid medicine on the subsequent process, and save water resources;

[0109] When the glass substrate moves out from the water washing spray head 301 and the flushing spray head 608, it will also move out from the third partition plate 609 and the third scraper 204. In this way, the circulating water adhered to the surface of the glass substrate can be cleaned down;

[0110] When the glass substrate passes out from the third partition plate 609 and the third scraper 204, the glass substrate will be located on the driven roller 503 at this time, and one end of the glass substrate will come to the two groups of clean water spray heads 322. At this time, the clean water spray head 322 starts to spray the pure water with a resistivity ≥18MΩ·cm to clean the surface of the glass substrate. The pure water does not contain impurities and can completely remove the trace pollutants that may be contained in the circulating water remaining on the surface of the substrate, so as to ensure that the surface of the substrate reaches an extremely high cleanliness;

[0111] The cleaned glass substrate will come to the two sets of inclined air blowing nozzles 323, at this time, the air blown by the inclined air blowing nozzles 323 is blown obliquely on the surface of the glass substrate, the pure water on the surface of the glass substrate is blown forward or falls off, and the glass substrate that is preliminarily dried comes to the air drying nozzle 324, at this time, the strong air blown by the air drying nozzle 324 starts to dry the surface of the glass substrate, finally, the glass substrate is moved out of the device under the action of the driving roller 502, and the cleaning of the glass substrate is completed, during the air blowing, the clean air flow with a pressure of 0.2-0.6 MPa is used to dry the surface of the glass substrate again. Through the two-stage air blowing structure, the residual water stains on the surface of the substrate can be completely dried, and the water stains on the surface of the substrate can be avoided to form water marks, which affect the subsequent process.

[0112] The above examples are only used to illustrate the technical solutions of the present application, but not limit the same; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that the technical solutions recorded in the foregoing examples can be modified, or some technical features can be replaced by equivalent ones; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A multi-stage collaborative cleaning device for TFT-LCD glass substrates, characterized in that: The utility model provides a kind of recycling system, including bottom plate (100), the top surface of the bottom plate (100) is equipped with recycling assembly (200), recycling assembly (200) is equipped with lower cleaning assembly (300) in, the top surface of the bottom plate (100) and located recycling assembly (200) one end is equipped with feeding assembly (400), the top surface of the bottom plate (100) and located recycling assembly (200) other end is equipped with auxiliary discharging assembly (500), the top surface of the bottom plate (100) and located lower cleaning assembly (300) above is equipped with upper cleaning assembly (600); The recycling assembly (200) includes a recycling tank (201), the top surface of the bottom plate (100) is fixedly connected with the recycling tank (201), the recycling tank (201) is sequentially fixedly connected with a first scraper (202), a second scraper (203) and a third scraper (204), and the inner cavity of the recycling tank (201) is divided into a first cleaning cavity (205), a second cleaning cavity (206), a third cleaning cavity (207) and a fourth cleaning cavity (208) by the first scraper (202), the second scraper (203) and the third scraper (204), respectively. The lower cleaning assembly (300) includes a first cleaning component, a second cleaning component, a water washing nozzle (301) and an air drying component, the first cleaning component is installed in the first cleaning cavity (205), the second cleaning component is installed in the second cleaning cavity (206), the water washing nozzle (301) is installed in the third cleaning cavity (207), one side of the second scraper (203) is fixedly connected with the water washing nozzle (301), and the air drying component is installed in the fourth cleaning cavity (208). The first cleaning component includes a cleaning frame (302), the cleaning frame (302) is fixedly connected in the first cleaning cavity (205), and the cleaning frame (302) is fixedly connected with a straight-face nozzle (303), a first double-face nozzle (304) and a second double-face nozzle (305), respectively. 2.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 1, characterized in that: The first cleaning component further includes a cleaning motor (306), one side of the cleaning frame (302) is fixedly connected with the cleaning motor (306), the output end of the cleaning motor (306) is rotatably connected with a first cleaning roller (307) through a worm cooperating with a worm gear, the surface of the first cleaning roller (307) is rotatably connected with a second cleaning roller (309) through a chain sprocket set cooperating with a transmission chain (308), the second cleaning roller (309) is located between the straight-face nozzle (303) and the first double-face nozzle (304), and the first cleaning roller (307) is located on one side of the second double-face nozzle (305). 3.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 2, characterized in that: The first cleaning component further comprises a reciprocating track (310), the reciprocating track (310) is fixedly connected in the cleaning frame (302), the reciprocating track (310) is located between the first double-sided nozzle (304) and the second double-sided nozzle (305), a reciprocating screw rod (311) is rotatably connected in the reciprocating track (310), a reciprocating plate (312) is threadedly connected to the surface of the reciprocating screw rod (311), a cleaning motor (313) is fixedly connected to one side of the reciprocating plate (312), a cleaning shaft (314) is fixedly connected to the output end of the cleaning motor (313), and cleaning discs (315) are rotatably connected to the surface of the cleaning shaft (314) through a worm and a worm gear respectively. 4.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 3, characterized in that: The second cleaning component comprises a secondary cleaning frame (316), oblique nozzles (317) and straight nozzles (318) are fixedly connected in the secondary cleaning frame (316) respectively, a re-cleaning roller (319) is rotatably connected to the middle part of the secondary cleaning frame (316), the re-cleaning roller (319) is located between the oblique nozzles (317) and the straight nozzles (318), a secondary cleaning motor (320) is fixedly connected to one side of the secondary cleaning frame (316), and the re-cleaning roller (319) is rotatably connected to the output end of the secondary cleaning motor (320) through a worm and a worm gear. 5.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 4, characterized in that: The air drying component comprises an air drying frame (321), the air drying frame (321) is fixedly connected to one side of the third scraper (204), and a clean water nozzle (322), an inclined surface air blowing nozzle (323) and an air drying nozzle (324) are fixedly connected to the top surface of the air drying frame (321) in sequence. 6.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 5, characterized in that: The upper cleaning assembly (600) comprises a first upper cleaning component, a second upper cleaning component and a first upper air drying component, the first upper cleaning component is mounted on the top surface of the bottom plate (100) and above the first cleaning component, the second upper cleaning component is mounted on the top surface of the bottom plate (100) and above the second cleaning component, and the first upper air drying component is mounted on the top surface of the bottom plate (100) and above the air drying component. The first upper cleaning component comprises an adjusting hydraulic rod (601), the adjusting hydraulic rod (601) is fixedly connected to the top surface of the bottom plate (100), a first upper cleaning structure (602) is mounted at the output end of the adjusting hydraulic rod (601), and the first upper cleaning structure (602) adopts the same structure as the first cleaning component. 7.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 6, characterized in that: The second upper cleaning component comprises a lifting hydraulic rod (603), the lifting hydraulic rod (603) is fixedly connected to the top surface of the bottom plate (100), a second upper cleaning structure (604) is mounted at the output end of the lifting hydraulic rod (603), the second upper cleaning structure (604) adopts the same structure as the second cleaning component, and a first partition plate (605) and a second partition plate (606) are fixedly connected to the two sides of the second upper cleaning structure (604) respectively. 8.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 7, characterized in that: The first upper air-drying component comprises a blow stand (607), the top surface of the bottom plate (100) is fixedly connected with the blow stand (607), the blow stand (607) is sequentially provided with a flushing nozzle (608), a third partition plate (609) and an upper air-drying structure (610), and the upper air-drying structure (610) adopts the same structure as the air-drying component. 9.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 8, characterized in that: The upper feeding assembly (400) comprises an upper feeding frame (401), the top surface of the bottom plate (100) and above the recycling pool (201) is fixedly connected with the upper feeding frame (401), the middle part of the upper feeding frame (401) is rotatably connected with upper feeding rollers (402) at equal intervals, one side of the upper feeding frame (401) is fixedly connected with an upper feeding motor (403), the output end of the upper feeding motor (403) is fixedly connected with a transmission rod (404), the surface of the transmission rod (404) is rotatably connected with the upper feeding rollers (402) through a worm and a worm gear respectively, the bottom surface of the upper feeding frame (401) is fixedly connected with a bidirectional track (405), the bidirectional track (405) is rotatably connected with a bidirectional threaded rod (406) inside, the surface of the bidirectional threaded rod (406) is threadedly connected with opposite blocks (407) respectively, and the bottom surface of the opposite blocks (407) is rotatably connected with limiting rollers (408). 10.The multi-stage collaborative cleaning device for TFT-LCD glass substrate according to claim 9, characterized in that: The auxiliary lower feeding assembly (500) comprises a lower feeding frame (501), the top surface of the bottom plate (100) and above the recycling pool (201) is fixedly connected with the lower feeding frame (501), the lower feeding frame (501) is rotatably connected with a driving roller (502) and a driven roller (503) respectively inside, one side of the lower feeding frame (501) is fixedly connected with a double-shaft motor (504), and the output end of the double-shaft motor (504) is rotatably connected with the driving roller (502) through a worm and a worm gear respectively.

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