Grinding pad trimming device

Abstract

The invention provides a grinding pad trimming device. The grinding pad trimming device comprises a trimmer, a trimming disc, a clamp, a mounting structure and a driving structure connected with the clamp. The mounting structure comprises a clamping part and a clamping groove, one of the trimming disc and the clamp is provided with the clamping part, and the other one is provided with the clamping groove; the driving structure is arranged on the dresser in a penetrating mode, the driving structure moves in the axial direction of the dressing disc so as to drive the clamp to generate displacement in the radial direction of the dressing disc, and the clamp moves outwards in the radial direction of the dressing disc so that the clamping part can be connected with the clamping groove in a clamped mode; the clamp moves inwards in the radial direction of the finishing disc so that the clamping part can be separated from the clamping groove. The device has the advantages that the dresser and the dressing disc can be quickly connected, and the phenomena of screw slipping and clamp cracking caused by improper operation can be effectively avoided, so that the effective operation time of a chemical mechanical grinding machine table is prolonged, the productivity is improved, and the pressure of operators is reduced.

Description

Technical Field

[0001] This invention relates to the field of technology, and in particular to a grinding pad dressing device. Background Technology

[0002] In recent years, with the upgrading of wafer fabrication technology and the shrinking of wire and gate dimensions, photolithography has placed increasingly higher demands on the flatness of the wafer surface. As a result, chemical mechanical polishing (CMP) has been widely used and has become an indispensable part of the semiconductor process.

[0003] Currently, the grinding pads of chemical mechanical grinding machines are typically dressed using a dressing device, which includes a dresser and a dressing pad. These are connected and disassembled via screws and a mounting base. This method of assembly and disassembly has at least the following disadvantages:

[0004] 1. The special installation position of the trim disc makes it impossible to observe directly with the naked eye. It is necessary to determine the position by touch and make continuous adjustments. If it is not installed properly, the screws will strip due to uneven force. At the same time, due to the limited position, the screw-tightening tool must be tilted at a certain angle, which makes it easier to cause uneven force.

[0005] 2. The mounting base is usually made of plastic. Long-term pressure from the screws can easily cause the mounting base to crack, resulting in the dressing disc becoming loose. If the dressing disc is further secured by tightening the screws, it will exacerbate the cracking of the plastic mounting base. Summary of the Invention

[0006] The purpose of this invention is to provide a grinding pad dressing device to solve the problems of improper installation and cracking of the mounting base due to the limited position of the existing dressing device and dressing disc installed by screws.

[0007] To solve the above-mentioned technical problems, based on one aspect of the present invention, the present invention provides a grinding pad dressing device, which includes a dresser, a dressing disc, a clamp, a mounting structure, and a driving structure connected to the clamp;

[0008] The mounting structure includes a locking part and a slot, wherein the locking part is provided on one of the trimming disc and the clamp, and the slot is provided on the other.

[0009] The drive structure passes through the dresser, and the drive structure moves along the axial direction of the dressing disc to drive the clamp to produce a radial displacement on the dressing disc.

[0010] The clamp's radial outward displacement along the trimming disc causes the engaging portion and the slot to engage, while the clamp's radial inward displacement along the trimming disc causes the engaging portion and the slot to separate.

[0011] Optionally, the engaging portion is disposed on the dressing disc, the engaging portion having a mounting hole extending through the axial direction of the dressing disc, the slot being disposed on the clamp, the slot being used to extend into or retract from the mounting hole, and the slot being movable radially along the dressing disc.

[0012] Optionally, the mounting hole may be non-circular in shape.

[0013] Optionally, the number of clamps is at least two, and the at least two clamps are arranged in a staggered manner along the same radial direction of the dressing disc.

[0014] Optionally, the drive structure moves in a direction close to the dressing disk to cause the clamp to produce a radially inward displacement along the dressing disk, and the drive structure moves in a direction away from the dressing disk to cause the clamp to produce a radially outward displacement along the dressing disk.

[0015] Optionally, the drive structure includes a drive rod, a drive handle, and a crimping assembly. The drive rod is movably inserted through the dresser. One end of the drive rod is connected to the clamp, and the other end of the drive rod is connected to the drive handle. The crimping assembly is disposed on the drive rod and is used to drive the clamp to produce radial displacement in the dresser disc.

[0016] Optionally, the crimping assembly includes a guide head and a crimping portion, the fixture has a first guide groove, the guide head is movable in the first guide groove, and the crimping portion is used to crimp onto the fixture.

[0017] Optionally, the trimmer has a second guide groove, which is arc-shaped, and the clamp is movable within the second guide groove.

[0018] Optionally, the grinding pad dressing device further includes a first limiting elastic element, the two ends of which are fixed on the dressing device, and the middle part of which is connected to the driving structure.

[0019] Optionally, the grinding pad dressing device further includes a second limiting elastic element, the two ends of which are fixed to the dressing device, and the middle part of which is connected to the clamp.

[0020] In summary, the grinding pad dressing device provided by the present invention includes a dresser, a dressing disc, a clamp, a mounting structure, and a drive structure connected to the clamp. The mounting structure includes a locking part and a slot, with one of the dressing disc and the clamp having the locking part and the other having the slot. The drive structure passes through the dresser and moves along the axial direction of the dressing disc to drive the clamp to generate a radial displacement in the dressing disc. The outward radial displacement of the clamp along the dressing disc causes the locking part and the slot to engage, and the inward radial displacement of the clamp along the dressing disc causes the locking part and the slot to separate.

[0021] Existing technologies use screws and a mounting base (which can be understood as a clamp without slots or engaging parts in this application) to install the dresser and dressing disc. This method is inconvenient due to space limitations and can lead to screw stripping due to improper operation, further complicating disassembly and assembly, and even causing deformation and cracking of the mounting base, resulting in base damage requiring replacement or the deformed base becoming a potential source of particles. In contrast, this invention incorporates a drive structure, a mounting structure, and a clamp. By controlling the axial movement of the drive structure along the dressing disc, the engaging and disengaging parts between the slots and engaging parts are activated or deactivated, thus connecting or separating the dresser and dressing disc. Compared to existing technologies, this invention offers the advantages of quick connection between the dresser and dressing disc, and effectively avoids screw stripping and clamp cracking caused by improper operation. This improves the effective operating time of the chemical mechanical grinding machine, increases production capacity, and reduces operator workload. Attached Figure Description

[0022] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0023] Figure 1 This is a schematic diagram of an embodiment of the grinding pad dressing device (omitting the dressing disc) of the present invention;

[0024] Figure 2 This is a schematic diagram of the grinding pad dressing device when the mounting structure is in the installation state according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of a single clamp according to an embodiment of the present invention;

[0026] Figure 4 This is a front view of the fixture when the mounting structure of an embodiment of the present invention is in the mounting state;

[0027] Figure 5 This is a top view of the fixture when the mounting structure of an embodiment of the present invention is in the mounting state;

[0028] Figure 6 This is a schematic diagram of the grinding pad trimming device when the mounting structure of an embodiment of the present invention is in a disassembled state;

[0029] Figure 7 This is a schematic diagram of the grinding pad dressing device (omitting the dressing disc) when the mounting structure of an embodiment of the present invention is in a disassembled state;

[0030] Figure 8 This is a front view of the clamp when the mounting structure of an embodiment of the present invention is in a disassembled state;

[0031] Figure 9 This is a top view of the clamp when the mounting structure of an embodiment of the present invention is in a disassembled state;

[0032] Figure 10 This is a top view of a trimming disc according to an embodiment of the present invention;

[0033] Figure 11 This is a side view of the trimming disc according to an embodiment of the present invention.

[0034] In the attached image:

[0035] 10- Dresser; 11- Second guide groove;

[0036] 20-Trim plate;

[0037] 30-Clamp; 31-First guide groove;

[0038] 40 - Mounting structure; 41 - Engaging part; 410 - Mounting hole; 42 - Slot;

[0039] 50-Drive structure; 51-Drive rod; 52-Drive handle; 53-Crimping assembly; 531-Guide head; 532-Crimping part;

[0040] 60 - First limiting elastic element;

[0041] 70 - Second limiting elastic element. Detailed Implementation

[0042] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.

[0043] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “distal end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral part; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two elements or an interaction between two elements. Furthermore, as used in this invention, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements, and the connection, coupling, cooperation, or transmission between the two elements can be direct or indirect through an intermediate element. It should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0044] Figure 1 This is a schematic diagram of a polishing pad dressing device (omitting the dressing disc 20) according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the grinding pad dressing device when the mounting structure is in the installation state according to an embodiment of the present invention. Figure 3 This is a schematic diagram of a single clamp (the mounting structure is in a disassembled state) according to an embodiment of the present invention. See also... Figure 1 , Figure 2 and Figure 3 This invention schematically provides a grinding pad dressing device according to one embodiment. The device includes a dresser 10, a dressing disc 20, a clamp 30, a mounting structure 40, and a drive structure 50 connected to the clamp 30. The mounting structure 40 includes an engaging portion 41 and a slot 42. One of the dressing disc 20 and the clamp 30 is provided with the engaging portion 41, and the other is provided with the slot 42. For example, see [reference needed]. Figure 2The dressing disc 20 is provided with the aforementioned engaging portion 41, and the clamp 30 is provided with the aforementioned slot 42. A drive structure 50 is inserted into the dressing device 10 along the axial direction of the dressing disc 20. The drive structure 50 is movable along the axial direction of the dressing disc 20. The movement of the drive structure 50 can cause the clamp 30 to displace radially in the dressing disc 20. This radial displacement of the clamp 30 allows the mounting structure 40 to be in an installed or disassembled state. Furthermore, at least a portion of the clamp 30 is disposed within the dressing device 10. The movement of the drive structure 50 applies force to the clamp 30, and under the constraint of the internal structure of the dressing device 10, the clamp 30 displaces radially in the dressing disc 20. This internal structure can be a second guide groove 11 provided within the dressing device 10.

[0045] Figure 4 This is a front view of the clamp when the mounting structure of an embodiment of the present invention is in the mounting state. Figure 5 This is a top view of the clamp in the installation state according to an embodiment of the present invention. (See attached image.) Figure 2 , Figure 4 and Figure 5 The mounting structure 40 is configured such that the engaging portion 41 and the slot 42 engage in a radially outward direction along the dressing disc 20. Specifically, the drive structure 50 moves to apply force to the clamp 30, causing the clamp 30 to displace in a radially outward direction along the dressing disc 20. This causes the engaging portion 41 or the slot 42 on the clamp 30 to move in a radially outward direction along the dressing disc 20, thereby achieving the engaging connection between the engaging portion 41 and the slot 42. Figure 6 This is a schematic diagram of the grinding pad trimming device when the mounting structure of an embodiment of the present invention is in a disassembled state. Figure 7 This is a schematic diagram of the grinding pad dressing device (omitting the dressing disc) when the mounting structure of an embodiment of the present invention is in a disassembled state. Figure 8 This is a front view of the clamp when the mounting structure of an embodiment of the present invention is in the disassembled state. Figure 9 This is a top view of the clamp in the disassembled state of the mounting structure according to an embodiment of the present invention. (See reference...) Figure 6 , Figure 7 , Figure 8 and Figure 9The disassembled state is configured such that the engaging portion 41 and the slot 42 separate radially inward along the dressing disc 20. Specifically, the drive structure 50 moves to cause the clamp 30 to displace radially inward in the dressing disc 20, causing the engaging portion 41 or the slot 42 on the clamp 30 to move radially inward along the dressing disc 20, thereby separating the engaging portion 41 and the slot 42. In this way, the engaging portion 41 and the slot 42 engage together to connect the dresser 10 and the dressing disc 20, and the engaging portion 41 and the slot 42 separate to disassemble the dresser 10 and the dressing disc 20. The two can be flexibly assembled and disassembled through the cooperation between the mounting structure 40, the clamp 30 and the drive structure 50.

[0046] It should be noted that the movement of the drive structure 50 causes the mounting structure 40 to move in opposite directions between the installed and disassembled states. For example, the drive structure 50 moving towards the trimming disc 20 can drive the mounting structure 40 into the disassembled state. Figure 6 , Figure 7 As shown), the drive structure 50 can drive the mounting structure 40 into the mounting state by moving in a direction away from the trimming disc 20. Figure 2 (As shown).

[0047] Existing technologies use screws and a mounting base (which can be understood as a clamp 30 without the slot 42 and engaging portion 41 in this application) to install the dresser 10 and the dressing disc 20. This method is inconvenient due to space limitations and can lead to screw stripping due to improper operation, further complicating disassembly and assembly, and even causing deformation and cracking of the mounting base, resulting in base damage requiring replacement or deformation that creates a potential source of particles. In contrast, this invention features a drive structure 50, a mounting structure 40, and a clamp 30. By controlling the axial movement of the drive structure 50 along the dressing disc 20, the engaging portion 41 and the slot 42 are engaged or disengaged, thus achieving the connection or separation of the dresser 10 and the dressing disc 20. Compared to existing technologies, this invention offers the advantages of quickly connecting the dresser 10 and the dressing disc 20, effectively preventing screw stripping and clamp cracking caused by improper operation, thereby increasing the effective operating time of the chemical mechanical grinding machine, improving productivity, and reducing operator workload.

[0048] Furthermore, the number of clamps 30 is at least two, and the at least two clamps 30 are arranged in a staggered manner along the same radial direction of the dressing disc 20. Understandably, since the slots 42 of the mounting structure 40 are either located on the clamps 30 or on the dressing disc 20, and due to the limitations imposed by the mounting positions of the engaging portion 41 and the slots 42, the slots 41 of the at least two mounting structures 40 are also arranged in a staggered manner along the same radial direction of the dressing disc 20. Providing at least two clamps 30 and corresponding mounting structures 40 makes the connection between the dressing disc 20 and the dressing device 10 via the mounting structures 40 more secure.

[0049] Figure 10 This is a top view of a trimming disc according to an embodiment of the present invention. Figure 11 This is a side view of a trimming disc according to an embodiment of the present invention. See also: Figure 1 , Figure 10 and Figure 11The engaging portion 41 of the mounting structure 40 is disposed on the dressing disc 20. The engaging portion 41 has a mounting hole 410 extending axially along the dressing disc 20. The slot 42 is disposed on the clamp 30, that is, the slot 42 is recessed into the clamp 30 (for example, it can be recessed into the side wall of the clamp 30). The moving drive structure 50 drives the clamp 30 to move, thereby allowing the slot 42 on the clamp 30 to move radially along the dressing disc 20. The slot 42 enters or exits the mounting hole 410, thereby achieving engagement or disengagement with the engaging portion 41. Preferably, the mounting hole 410 is a non-circular hole, which can serve as an irregular shape to prevent mistaken insertion, allowing the engaging portion 41 and the slot 42 to be assembled in the correct manner and position. For example, the mounting hole 410 is Z-shaped, corresponding to the staggered arrangement of the two clamps 30, facilitating the correct assembly of the engaging parts 41 and slots 42 of the two mounting structures 40. This ensures accurate engagement of the engaging parts 41 and slots 42 due to positional and structural physical constraints. Furthermore, the drive structure 50 includes a drive rod 51, a drive handle 52, and a crimping assembly 53. The drive rod 51 movably passes through the dresser 10, with one end connected to the clamp 30, a portion of which is located within the dresser 10. The other end of the drive rod 51 is connected to the drive handle 52, which is located outside the dresser 10. The crimping assembly 53 is mounted on the drive rod 51 and is used to drive the clamp 30 to radially displace the dresser disc 20, thus placing the mounting structure 40 in an installed or disassembled state. In practice, the operator holds the drive handle 52, thereby manipulating the drive rod 51 to move axially along the dressing disc 20. The drive rod 51 drives the crimping assembly 53 to move synchronously, causing the crimping assembly 53 to force the clamp 30 to displace radially along the dressing disc 20, thereby causing the engaging part 41 and the slot 42 to engage or disengage. For example, the operator can manipulate the drive rod 51 away from the dressing disc 20 to disengage the engaging part 41 and the slot 42, or the operator can manipulate the drive rod 51 closer to the dressing disc 20 to engage the engaging part 41 and the slot 42.

[0050] Furthermore, the crimping assembly 53 includes a guide head 531 and a crimping portion 532. The guide head 531 may be disposed, for example, at the end of the drive rod 51 facing the dressing disc 20, and the crimping portion 532 may be disposed, for example, on the side wall of the drive rod 51. The clamp 30 has a first guide groove 31, in which the guide head 531 is movable, and the crimping portion 532 is used to crimp the clamp 30. Thus, when the drive rod 51 moves, the clamp 30 can undergo lateral deformation (radial deformation along the dressing disc 20) under the action of the guide head 531 and the crimping portion 532, thereby causing the clamp 30 to undergo radial displacement in the dressing disc 20.

[0051] Preferably, the pressing part 532 has a pressing surface that is axially inclined relative to the dressing disc 20. The pressing surface can contact the inclined surface of the top of the clamp 30. When the drive rod 51 moves close to the dressing disc 20, the pressing surface contacts the top of the clamp 30, causing the clamp 30 to undergo lateral deformation, thereby generating a radial displacement along the dressing disc 20. The setting of the pressing surface of the pressing part 532 and the inclined surface of the top of the clamp 30 facilitates the smooth pressing of the pressing part 532 onto the clamp 30 when the drive structure 50 moves, reducing the force applied by the operator to the drive rod 51. In one embodiment, the pressing part 532 is a wedge-shaped block, and the inclined surface of the wedge-shaped block is the pressing surface. In other embodiments, the specific structure of 532 is not limited, as long as the pressing part 532 can press onto the clamp 30 during the movement with the drive rod 51, thereby causing the clamp to undergo lateral deformation.

[0052] Furthermore, the trimmer 10 has a second guide groove 11, which is arc-shaped, and the clamp 30 is movable within the second guide groove 11. Specifically, the drive structure 50 drives the clamp 30 to produce displacement, and the second guide groove 11 defines the displacement trajectory of the clamp 30, so that the slot 42 or engaging part 41 on the clamp 30 can move approximately radially along the trimmer disc 20, thereby completing the assembly or disassembly of the mounting structure 40.

[0053] Furthermore, the grinding pad dressing device also includes a first limiting elastic element 60, with both ends of the first limiting elastic element 60 fixed to the dressing device 10, and the middle part of the first limiting elastic element 60 connected to the drive structure 50. The mechanical elastic force of the first limiting elastic element 60 itself can limit the position of the drive structure 50, ensuring the stability of the mounting structure 40 in the installed or disassembled state. As illustrated, when the operator does not press the drive structure 50, the first limiting elastic element 60 applies an elastic force away from the dressing disc 20 to the drive structure 50, preventing the drive structure 50 from applying pressure to the clamp 30, and the mounting structure 40 remains in the mounted state. When the operator presses the drive structure 50, it applies pressure to the clamp 30. The first limiting elastic element 60 deforms synchronously with the movement of the drive structure 50, and the clamp 30 simultaneously displaces radially in front of the dressing disc 20 until the mounting structure 40 is in the disassembled state. At this point, the deformation of the first limiting elastic element 60 is complete, and it applies an elastic force closer to the dressing disc 20 to the drive structure 50, thus maintaining the disassembled state of the drive structure 50. In one embodiment, the first limiting elastic element 60 is a steel disc spring.

[0054] Furthermore, the grinding pad dressing device also includes a second limiting elastic element 70. Both ends of the second limiting elastic element 70 are fixed to the dressing device 10, and the middle part of the second limiting elastic element 70 is connected to the clamp 30. The elastic force of the second limiting elastic element 70 itself can limit the position and deformation state of the clamp 30. For example, when the operator applies a force away from the dressing disc 20 to the clamp 30 through the drive structure 50, the mounting structure 40 is in the installed state. The second limiting elastic element 70 applies an elastic force away from the dressing disc 20 to the clamp 30, maintaining the position and shape of the clamp 30, thereby maintaining the installed state of the mounting structure 40. When the operator applies a force close to the dressing disc 20 to the clamp 30 through the drive structure 50, the clamp 30 deforms and shifts until the mounting structure 40 is in the disassembled state. The second limiting elastic element 70 applies an elastic force close to the dressing disc 20 to the clamp 30, maintaining the deformed state of the clamp 30, thereby maintaining the disassembled state of the mounting structure 40. Furthermore, the second limiting elastic element 70 can also restrict the position of the clamp 30 in the radial direction of the trimming disc 20, thereby positioning the clamp 30 and preventing it from shaking and causing the engaging part 41 and the slot 42 to separate in the installed state. In one embodiment, the second limiting elastic element 70 is a steel disc spring.

[0055] While the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A polishing pad conditioning apparatus, comprising: The polishing apparatus comprises a polisher, a polishing pad, a clamp, a mounting structure, and a driving structure connected with the clamp; The mounting structure comprises a clamping portion and a clamping groove, one of the polishing pad and the clamp is provided with the clamping portion, and the other is provided with the clamping groove; The driving structure is arranged through the polisher, and the driving structure moves along the axial direction of the polishing pad to drive the clamp to move in the radial direction of the polishing pad; The clamping portion and the clamping groove are clamped when the clamp moves outward in the radial direction of the polishing pad, and the clamping portion and the clamping groove are separated when the clamp moves inward in the radial direction of the polishing pad.

2. The polishing pad conditioning apparatus of claim 1, wherein, The clamping portion is arranged on the polishing pad, and the clamping portion is provided with a mounting hole penetrating through the axial direction of the polishing pad; the clamping groove is arranged on the clamp, and the clamping groove is used for extending into or withdrawing from the mounting hole, and the clamping groove is movable in the radial direction of the polishing pad.

3. The polishing pad conditioning apparatus of claim 2, wherein, The mounting hole is non-circular.

4. The polishing pad conditioning apparatus of claim 1, wherein, The number of the clamps is at least two, and the at least two clamps are arranged in a staggered manner in the same radial direction of the polishing pad.

5. The polishing pad conditioning apparatus of claim 1, wherein, The driving structure moves in the direction close to the polishing pad to drive the clamp to move inward in the radial direction of the polishing pad, and the driving structure moves in the direction away from the polishing pad to drive the clamp to move outward in the radial direction of the polishing pad.

6. The polishing pad conditioning apparatus of claim 5, wherein, The driving structure comprises a driving rod, a driving handle, and a pressing assembly, the driving rod is movably arranged through the polisher, one end of the driving rod is connected with the clamp, the other end of the driving rod is connected with the driving handle, and the pressing assembly is arranged on the driving rod and used for driving the clamp to move in the radial direction of the polishing pad.

7. The polishing pad conditioning apparatus of claim 6, wherein, The pressing assembly comprises a guide head and a pressing portion, the clamp is provided with a first guide groove, the guide head is movable in the first guide groove, and the pressing portion is used for pressing on the clamp.

8. The polishing pad conditioning apparatus of claim 1, wherein, The polisher is provided with a second guide groove, the second guide groove is arc-shaped, and the clamp is movable in the second guide groove.

9. The polishing pad conditioning apparatus of claim 1, wherein, The polishing pad trimming device further comprises a first limiting elastic member, both ends of the first limiting elastic member are fixed on the polisher, and the first limiting elastic member is connected with the driving structure.

10. The polishing pad conditioning apparatus of claim 1, wherein, The polishing pad trimming device further comprises a second limiting elastic member, both ends of the second limiting elastic member are fixed on the polisher, and the second limiting elastic member is connected with the clamp.

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