A robot gripper mechanism

Abstract

The present application relates to a kind of robot gripper mechanism, including connecting frame assembly, gripper module and power component, the upper side of the receiving plate is movably connected with power component, the lower side of the receiving plate is evenly configured with four gripper modules, connecting frame assembly includes connecting frame assembly including receiving plate, gripper module includes swing frame, mounting bracket, hydraulic cylinder and gripper seat. Improve the adaptability of diversity: through servo motor, gear and rack cooperation, drive swing frame swing around rotating column, can flexibly adjust the angle of swing frame and receiving plate vertical surface, realize the adaptation of different shape, size silicon wafer clamping.

Description

Technical Field

[0001] This invention belongs to the field of robot grippers, specifically a robot gripper mechanism. Background Technology

[0002] In the field of silicon wafer clamping, current robotic grippers need to handle the clamping requirements of silicon wafers of different shapes (square, rectangular) and sizes. Traditional gripper mechanisms usually achieve basic clamping actions by having a robotic arm drive the gripper assembly. However, they lack mature and precise structural designs in areas such as gripper angle adjustment, multi-gripper synchronous control, stable connection with the robotic arm, and adaptive matching of silicon wafer edges during clamping. This makes it difficult to balance clamping stability and adaptability to diverse applications. Therefore, a robotic gripper mechanism is proposed. Summary of the Invention

[0003] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0004] Given the following technical problems in the existing technology: Insufficient adaptability: Traditional grippers are difficult to flexibly adjust their angles to adapt to square and rectangular silicon wafers (with different aspect ratios), and cannot achieve precise clamping and positioning for silicon wafers of different shapes; Synchronization control difficulties: The angle adjustments of multiple gripper modules are prone to asynchrony, resulting in uneven force on the silicon wafer, affecting clamping stability, and may even damage the silicon wafer; Poor connection and sliding stability: The sliding connection between the gripper assembly and the receiving structure and power assembly is prone to jamming or offset, and the lack of effective limiting and constraint structures affects the accuracy of the gripper's movement trajectory; Lack of adaptive matching: When the gripper contacts the corners of the silicon wafer, it cannot adaptively adjust its angle according to the position of the silicon wafer, making it difficult to completely align the four corners of the silicon wafer, resulting in unstable clamping and the risk of silicon wafer falling off; Inconvenient installation and fixing: The connection between the gripper mechanism and the robotic arm lacks a standardized and convenient fixing structure, and the installation and disassembly process is cumbersome, affecting work efficiency.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a robot gripper mechanism, including a connecting frame assembly, gripper modules and a power assembly, wherein the power assembly is movably connected to the upper side of the receiving plate, and four gripper modules are evenly arranged on the lower side of the receiving plate. The connecting frame assembly includes a receiving plate, and the gripper module includes a swing frame, a mounting frame, a hydraulic cylinder and a gripper seat. Four swing frames are evenly arranged on the receiving plate, and two mounting frames are provided at one end of each swing frame. A hydraulic cylinder is provided on the mounting frame, and the movable end of the hydraulic cylinder is connected to the gripper seat through a connector. As a preferred technical solution for a robot gripper mechanism, the gripper module also includes a rotating column, which is rotatably connected to a receiving plate. One end of the receiving plate is fixedly connected to the swing frame, providing stable rotational support for the swing frame and ensuring structural stability when the swing frame angle is adjusted. As a preferred technical solution for a robot gripper mechanism, the connecting frame assembly also includes a limiting arm, a connecting plate, and connecting holes. A limiting arm is provided on each side of the receiving plate, and a connecting plate is provided in the middle of the upper side of the limiting arm. Two connecting holes are provided on the connecting plate, which not only provides a sliding installation base for the subsequent control frame through the limiting arm, but also realizes a convenient connection between the mechanism and the robotic arm through the connecting plate and connecting holes, simplifying the installation process. The connecting component includes a gripper base, a connecting frame 1, and a sliding frame. A limit groove is provided on the upper side of the swing frame. The movable end of the hydraulic cylinder is provided with the connecting frame 1, and the sliding frame is provided on the connecting frame 1. The bottom end of the sliding frame extends into the limit groove, and the sliding frame is slidably connected to the limit groove. A frustum base is provided at the top of the sliding frame, and the frustum base is rotatably connected to the gripper base. As a preferred technical solution for a robot gripper mechanism, the sliding trajectory of the sliding frame is constrained by the limit groove to ensure the accuracy of the hydraulic cylinder driving the gripper base to move. At the same time, the rotatable connection between the frustum base and the gripper base provides a structural basis for the adjustment of the gripper base angle. As a preferred technical solution for a robot gripper mechanism, the connector includes a gripper base, a connecting frame, and a sliding frame. A limiting groove is formed on the upper side of the swing frame. The movable end of the hydraulic cylinder is provided with the connecting frame, and the sliding frame is provided on the connecting frame. The bottom end of the sliding frame extends into the limiting groove, and the sliding frame is slidably connected to the limiting groove. A frustum is provided at the top of the sliding frame, and the frustum is rotatably connected to the gripper base. Through the sliding engagement between the sliding frame and the limiting groove, the stability of the linear movement of the gripper base is ensured. The rotating structure of the frustum provides structural support for the gripper base to adapt to the edge corner of the silicon wafer. As a preferred technical solution for a robot gripper mechanism, the connecting component also includes a slider and a limiting transverse groove. The limiting transverse groove is formed in the limiting groove, and the slider is provided on the sliding frame. The slider extends into the limiting transverse groove and is slidably connected with the limiting transverse groove. Through the cooperation between the slider and the limiting transverse groove, the movement direction of the sliding frame is further restricted, preventing the sliding frame from disengaging from the limiting groove and improving the stability of the sliding structure. As a preferred technical solution for a robot gripper mechanism, the connecting frame assembly also includes an arc-shaped groove, and the power assembly includes a mating frame. Four arc-shaped grooves are evenly opened on the receiving plate. The mating frame is slidably connected in the arc-shaped grooves. The bottom end of the mating frame is fixedly connected to the swing frame. The arc-shaped grooves provide an arc-shaped sliding trajectory for the mating frame, ensuring the accuracy of the trajectory when the mating frame drives the swing frame to adjust its angle. As a preferred technical solution for a robot gripper mechanism, the power assembly also includes a control frame, a mating groove, a rolling wheel, and a limiting plate. A limiting plate is provided at the top of the mating frame, and the limiting plate is slidably connected to the outer side of the receiving plate. The limiting plate is rotatably connected to the rolling wheel. Two control frames are slidably connected between the two limiting arms. A mating groove is opened on each side of the control frame, and the rolling wheel extends into the mating groove. The rolling wheel is movably connected to the mating groove. The limiting plate prevents the mating frame from disengaging from the arc-shaped groove. The rolling engagement between the rolling wheel and the mating groove reduces the friction between the control frame and the mating frame, improving the smoothness of power transmission. As a preferred technical solution for a robot gripper mechanism, the power assembly also includes a second slider, and the connecting frame assembly also includes a limiting groove. A limiting groove is opened at each end of the limiting arm, and a second slider is set at each end of the control frame. The second slider extends into the limiting groove and is slidably connected to the limiting groove. Through the cooperation between the second slider and the limiting groove, the sliding range of the control frame is limited, avoiding deviation when the control frame slides and ensuring the accuracy of the control frame movement. As a preferred technical solution for a robot gripper mechanism, the power component also includes racks, servo motors, and gears. A servo motor is located in the middle of the receiving plate, and a gear is located on the power output end of the servo motor. Racks are located on both control frames. The racks mesh with the gears, and the meshing structure between the gears and the racks on both sides enables the synchronous transmission of power from the servo motor to the two control frames, ensuring the synchronicity of the movement of the two control frames. As a preferred technical solution for a robot gripper mechanism, the power component also includes a constraint frame. Two constraint frames are provided on the receiving plate, and the constraint frames correspond one-to-one with the rack. The rack is slidably connected to the corresponding constraint frame, and the constraint frame provides sliding support for the rack to prevent bending or deviation when the rack moves, thus ensuring the stability of the meshing between the rack and the gear.

[0006] The beneficial effects of the robot gripper mechanism of the present invention are as follows: Improved adaptability: Through the cooperation of a servo motor, gears, and racks, the swing frame is driven to swing around a rotating column, allowing flexible adjustment of the angle between the swing frame and the vertical plane of the receiving plate, thus achieving adaptive gripping of silicon wafers of different shapes and sizes; Synchronous and precise control: The gears can simultaneously and synchronously drive the racks on both sides to move, thereby driving the four gripper modules to adjust their angles synchronously, ensuring uniform force on the silicon wafer, improving gripping stability, and preventing damage to the silicon wafer; Enhanced connection and sliding stability: Through multiple sets of limiting and sliding structures such as arc grooves and mating frames, limiting grooves and sliding frames, and limiting grooves and sliders, the movement trajectory of each component is precisely constrained, avoiding jamming and offset, and ensuring the accuracy of the gripper's movements; Adaptive matching capability: The truncated cone base uses magnetic material, allowing the gripper base to adjust its angle and temporarily lock at any time. When the inner side of the gripper base contacts the silicon wafer, it can adaptively change its angle with the truncated cone base due to the obstruction of the silicon wafer, ensuring that the gripper base is completely aligned with the four corners of the silicon wafer, achieving stable clamping and reducing the risk of silicon wafer falling off. Simplified installation and fixing process: Connection holes are opened on the connecting plate, which can be quickly threaded to the robotic arm with bolts, realizing convenient fixing of the receiving plate and the robotic arm, simplifying the installation and disassembly steps, and improving work efficiency. Ensure clamping reliability: Multiple sets of hydraulic cylinders control the movement of the corresponding gripper bases, and together with the constraint of the power components by the limit plates, rolling wheels and other structures, the stability of the gripper clamping is further enhanced, ensuring that the silicon wafer remains stable during the handling process. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein: Figure 1 This is a top view of the structure of the present invention; Figure 2 This is a bottom-view structural diagram of the present invention; Figure 3 This is a cross-sectional view of the front of the present invention; Figure 4 For the present invention Figure 1 A partially enlarged structural diagram of part A in the middle; Figure 5 For the present invention Figure 3 A magnified schematic diagram of part B in the middle section.

[0008] Reference numerals: 100, Connecting frame assembly; 101, Receiving plate; 102, Arc groove; 103, Limiting arm; 104, Limiting groove; 105, Connecting plate; 106, Connecting hole; 200, Gripper module; 201, Gripper seat; 202, Frustum seat; 203, Connecting frame one; 204, Hydraulic cylinder; 205, Mounting frame; 206, Swing frame; 207, Rotating column; 208, Sliding frame; 209, Limiting groove; 210, Slider one; 211, Limiting transverse groove; 300, Power assembly; 301, Control frame; 302, Mating groove; 303, Rolling wheel; 304, Limiting piece; 305, Mating frame; 306, Slider two; 307, Rack; 308, Constraint frame; 309, Servo motor; 310, Gear. Detailed Implementation

[0009] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0010] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0011] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0012] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0013] like Figures 1-5As shown, the present invention proposes a robot gripper mechanism, including a connecting frame assembly 100, gripper modules 200, and a power assembly 300. The power assembly 300 is movably connected to the upper side of the receiving plate 101, and four gripper modules 200 are evenly arranged on the lower side of the receiving plate 101. The connecting frame assembly 100 includes the receiving plate 101, and the gripper module 200 includes a swing frame 206, a mounting frame 205, a hydraulic cylinder 204, and a gripper seat 201. Four swing frames 206 are evenly arranged on the receiving plate 101, and two mounting frames 205 are provided at one end of each swing frame 206. A hydraulic cylinder 204 is provided on the mounting frame 205, and the movable end of the hydraulic cylinder 204 is connected to the gripper seat 201 through a connector.

[0014] The gripper module 200 also includes a rotating column 207, which is rotatably connected to the receiving plate 101. One end of the receiving plate 101 is fixedly connected to the swing frame 206, providing stable rotational support for the swing frame 206 and ensuring the structural stability of the swing frame 206 when adjusting its angle. The connecting frame assembly 100 also includes a limiting arm 103, a connecting plate 105, and connecting holes 106. A limiting arm 103 is provided on each side of the receiving plate 101. A connecting plate 105 is provided in the middle of the upper side of the limiting arm 103. Two connecting holes 106 are provided on the connecting plate 105. The limiting arm 103 provides a sliding installation base for the subsequent control frame 301, and the connecting plate 105 and connecting holes 106 enable convenient connection between the mechanism and the robotic arm, simplifying the installation process. The connecting components include a gripper seat 201, a connecting frame 203, and a sliding frame 208. A limiting groove 209 is provided on the upper side of the swing frame 206. The movable end of the hydraulic cylinder 204 is provided with the connecting frame 203, and the sliding frame 208 is provided on the connecting frame 203. The bottom end of the sliding frame 208 extends into the limiting groove 209, and the sliding frame 208 is slidably connected to the limiting groove 209. A frustum seat 202 is provided at the top of the sliding frame 208, and the frustum seat 202 is rotatably connected to the gripper seat 201. As a preferred technical solution for a robot gripper mechanism, the sliding trajectory of the sliding frame 208 is constrained by the limiting groove 209, ensuring the accuracy of the hydraulic cylinder 204 driving the gripper seat 201 to move. At the same time, the rotatable connection between the frustum seat 201 and the gripper seat 201 provides a structural basis for the angle adjustment of the gripper seat 201. The connector includes a gripper seat 201, a connecting frame 203, and a sliding frame 208. A limiting groove 209 is provided on the upper side of the swing frame 206. The movable end of the hydraulic cylinder 204 is provided with the connecting frame 203. The sliding frame 208 is provided on the connecting frame 203. The bottom end of the sliding frame 208 extends into the limiting groove 209. The sliding frame 208 is slidably connected to the limiting groove 209. The top of the sliding frame 208 is provided with a frustum seat 202. The frustum seat 202 is rotatably connected to the gripper seat 201. The sliding engagement between the sliding frame 208 and the limiting groove 209 ensures the stability of the linear movement of the gripper seat 201. The rotating structure of the frustum seat 202 provides structural support for the gripper seat 201 to adapt to the edge corner of the silicon wafer. The connector also includes a slider 210 and a limiting transverse groove 211. The limiting groove 211 is provided in the limiting groove 209. The slider 210 is provided on the sliding frame 208. The slider 210 extends into the limiting transverse groove 211 and is slidably connected to the limiting transverse groove 211. Through the cooperation of the slider 210 and the limiting transverse groove 211, the movement direction of the sliding frame 208 is further restricted, preventing the sliding frame 208 from disengaging from the limiting groove 209 and improving the stability of the sliding structure.

[0015] The connecting frame assembly 100 also includes an arc groove 102, and the power assembly 300 includes a mating frame 305. Four arc grooves 102 are evenly provided on the receiving plate 101. The mating frame 305 is slidably connected in the arc groove 102. The bottom end of the mating frame 305 is fixedly connected to the swing frame 206. The arc groove 102 provides an arc-shaped sliding trajectory for the mating frame 305 to ensure the accuracy of the trajectory when the mating frame 305 drives the swing frame 206 to adjust the angle. The power assembly 300 also includes a control frame 301, a mating groove 302, a rolling wheel 303, and a limiting piece 304. The top of the mating frame 305 is provided with a limiting piece 304, which is slidably connected to the outer side of the receiving plate 101. The limiting piece 304 is rotatably connected to the rolling wheel 303. Two control frames 301 are slidably connected between the two limiting arms 103. A mating groove 302 is opened on each side of the control frame 301. The rolling wheel 303 extends into the mating groove 302 and is movably connected to the mating groove 302. The limiting piece 304 prevents the mating frame 305 from disengaging from the arc-shaped groove 102. The rolling engagement of the rolling wheel 303 and the mating groove 302 reduces the friction between the control frame 301 and the mating frame 305, improving the smoothness of power transmission. The power assembly 300 also includes a second slider 306, and the connecting frame assembly 100 also includes a limiting groove 104. A limiting groove 104 is provided at each end of the limiting arm 103, and a second slider 306 is provided at each end of the control frame 301. The second slider 306 extends into the limiting groove 104 and is slidably connected to the limiting groove 104. Through the cooperation between the second slider 306 and the limiting groove 104, the sliding range of the control frame 301 is limited, so as to avoid the control frame 301 from deviating when sliding and to ensure the accuracy of the movement of the control frame 301. The power assembly 300 also includes a rack 307, a servo motor 309, and a gear 310. The servo motor 309 is located in the middle of the receiving plate 101, and the gear 310 is located on the power output end of the servo motor 309. The control frame 301 is equipped with racks 307, which mesh with the gears 310. The meshing structure between the gears 310 and the racks 307 on both sides enables the synchronous transmission of power from the servo motor 309 to the two control frames 301, ensuring the synchronicity of the movement of the two control frames 301. The power assembly 300 also includes a constraint frame 308. Two constraint frames 308 are provided on the receiving plate 101. The constraint frame 308 corresponds to the rack 307 one by one. The rack 307 is slidably connected to the corresponding constraint frame 308. The constraint frame 308 provides sliding support for the rack 307 to prevent the rack 307 from bending or deviating when it moves, and to ensure the stability of the meshing between the rack 307 and the gear 310.

[0016] When the vertical angle between the swing frame 206 and the receiving plate 101 is 45 degrees, it is used to clamp square silicon wafers of different sizes. When the angle changes to other angles, such as when the vertical angle between the swing frame 206 and the receiving plate 101 is 30 or 60 degrees, it can clamp rectangular silicon wafers. At this time, the length-to-width ratio of the silicon wafer is √3:1.

[0017] Two racks 307 are located on both sides of the gear 310, and the sliding frame 208 is constrained by the limiting groove 209 and moves along the trajectory of the limiting groove 209.

[0018] The gear 310 simultaneously and synchronously controls the movement of the rack 307, thereby simultaneously and synchronously controlling the four swing frames 206 to adjust their angles.

[0019] During the adjustment of the angle of the swing frame 206: The initial position of the swing frame 206 is that the vertical angle between the swing frame 206 and the receiving plate 101 is 45 degrees. When the hydraulic cylinder 204 controls the movement of the gripper seat 201, the inner part of the gripper seat 201 can touch the silicon wafer. Due to the obstruction of the silicon wafer, the angle between the gripper seat 201 and the frustum seat 202 is adaptively changed, so that the gripper seat 201 can correspond and match with the corner of the silicon wafer, thereby being able to completely align and correspond to the four corners of the silicon wafer, and thus being able to firmly clamp the silicon wafer.

[0020] The specific implementation method is as follows: the servo motor 309 controls the gear 310 to rotate, the gear 310 causes the two racks 307 to move in opposite directions, the racks 307 move the control frame 301, causing the control frames 301 to move closer or further apart, the control frame 301 moves the rolling wheel 303, the rolling wheel 303 rotates less than or equal to 90 degrees due to the cooperation constraint of the mating frame 305 and the arc groove 102, the rolling wheel 303 slides in the mating groove 302, the arc groove 102 is an arc groove of a quarter circumference, and the mating frame 305 moves along the trajectory of the arc groove 102; The mating frame 305 swings the swing frame 206 around the central axis of the rotating column 207, causing the relative angle of the swing frame 206, the connecting parts on the swing frame 206 and the gripper seat 201 to change. The frustum seat 202 is made of magnet, so that the gripper seat 201 can be adjusted in angle and temporarily locked at any time. By adjusting the angle of the swing frame 206, it can clamp silicon wafers of different shapes and sizes. The connecting plate 105 is connected to the robotic arm and threadedly connected to the connecting hole 106 by bolts, so that the receiving plate 101 is fixed to the robotic arm. The robotic arm, with the four gripper seats 201 on the receiving plate 101, aligns with the silicon wafer. The gripper seats 201 are adjusted so that they are aligned with the four corners of the silicon wafer. The four hydraulic cylinders 204 control the four gripper seats 201 to move closer to each other so that the gripper seats 201 clamp the silicon wafer.

[0021] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0022] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A robot gripper mechanism, characterized in that: The assembly includes a connecting frame assembly (100), a gripper module (200), and a power assembly (300). The power assembly (300) is movably connected to the upper side of the receiving plate (101), and four gripper modules (200) are evenly arranged on the lower side of the receiving plate (101). The connecting frame assembly (100) includes the receiving plate (101), and the gripper module (200) includes a swing frame (206), a mounting frame (205), a hydraulic cylinder (204), and a gripper seat (201). Four swing frames (206) are evenly arranged on the receiving plate (101), and two mounting frames (205) are provided at one end of each swing frame (206). A hydraulic cylinder (204) is provided on the mounting frame (205), and the movable end of the hydraulic cylinder (204) is connected to the gripper seat (201) through a connector. The gripper module (200) also includes a rotating column (207), which is rotatably connected to the receiving plate (101). The connecting frame assembly (100) also includes a limiting arm (103), a connecting plate (105), and connecting holes (106). A limiting arm (103) is provided on each side of the receiving plate (101). A connecting plate (105) is provided in the middle of the upper side of the limiting arm (103). Two connecting holes (106) are provided on the connecting plate (105). The connecting parts include a gripper seat (201), a connecting frame (203), and a sliding frame (208). A limiting groove (209) is provided on the upper side of the swing frame (206). A connecting hole is provided at the movable end of the hydraulic cylinder (204). The first frame (203) is provided with a sliding frame (208). The bottom end of the sliding frame (208) extends into the limiting groove (209). The sliding frame (208) is slidably connected to the limiting groove (209). The top end of the sliding frame (208) is provided with a frustum base (202). The frustum base (202) is rotatably connected to the gripper base (201). The connecting component also includes a slider (210) and a limiting transverse groove (211). The limiting groove (209) is provided with a limiting transverse groove (211). The sliding frame (208) is provided with a slider (210). The slider (210) extends into the limiting transverse groove (211). The slider (210) is slidably connected to the limiting transverse groove (211). The connecting frame assembly (100) also includes an arc groove (102), the power assembly (300) includes a mating frame (305), four arc grooves (102) are evenly provided on the receiving plate (101), the mating frame (305) is slidably connected in the arc groove (102), and the bottom end of the mating frame (305) is fixedly connected to the swing frame (206); The power assembly (300) also includes a control frame (301), a mating groove (302), a rolling wheel (303), and a limiting piece (304). The top of the mating frame (305) is provided with a limiting piece (304). The limiting piece (304) is slidably connected to the outer side of the receiving plate (101). The limiting piece (304) is rotatably connected to the rolling wheel (303). Two control frames (301) are slidably connected between the two limiting arms (103). A mating groove (302) is opened on each side of the control frame (301). The rolling wheel (303) extends into the mating groove (302). The rolling wheel (303) is movably connected to the mating groove (302). The power assembly (300) also includes a second slider (306), and the connecting frame assembly (100) also includes a limiting groove (104). A limiting groove (104) is opened at both ends of the limiting arm (103), and a second slider (306) is provided at both ends of the control frame (301). The second slider (306) extends into the limiting groove (104), and the second slider (306) is slidably connected to the limiting groove (104). When the vertical angle between the swing frame (206) and the receiving plate (101) is 45 degrees, it is used to clamp square silicon wafers of different sizes. When the angle changes to other angles, it can clamp rectangular silicon wafers.

2. The robot gripper mechanism according to claim 1, characterized in that: The power assembly (300) also includes a rack (307), a servo motor (309) and a gear (310). The servo motor (309) is provided in the middle of the receiving plate (101), and the gear (310) is provided on the power output end of the servo motor (309). The control frame (301) is provided with racks (307), and the racks (307) mesh with the gears (310).

3. The robot gripper mechanism according to claim 1, characterized in that: The power assembly (300) also includes a constraint frame (308). Two constraint frames (308) are provided on the receiving plate (101). The constraint frames (308) correspond one-to-one with the rack (307). The rack (307) is slidably connected to the corresponding constraint frame (308).

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