Electric heating multistage washing tail gas treatment equipment
The electric heating multi-stage water washing exhaust gas treatment equipment solves the problem of silica separation in silicon carbide processing exhaust gas by using electric heaters and multi-stage water mist cooling technology, realizing multi-stage cooling and impurity separation of exhaust gas and protecting equipment safety.
Patent Information
- Application Number
- CN202511975458.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-25
- Publication Date
- 2026-01-23
AI Technical Summary
The exhaust gas generated during silicon carbide processing contains solid particles such as silicon dioxide formed from the combustion of silanes, which need to be effectively separated to avoid affecting the equipment.
The exhaust gas treatment equipment adopts electric heating multi-stage water washing. The exhaust gas is burned by an electric heater in the combustion mechanism. Combined with multi-stage spray water mist cooling, impurities such as silica in the exhaust gas are separated. Multi-stage cooling and separation are carried out by multi-stage three-way pipes and spray towers.
It achieves multi-stage separation of impurities such as silica in the exhaust gas, ensuring that silica is effectively removed during the cooling process and protecting the equipment from damage.
Smart Images
Figure CN121383210A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of semiconductor tail gas treatment, in particular to an electric heating multi-stage water washing tail gas treatment equipment. BACKGROUND
[0002] The tail gas generated in the production process of silicon carbide (SiC) usually contains dust, sulfur oxides, nitrogen oxides, silane, carbon monoxide, carbon dioxide and volatile organic compounds and other pollutants. In order to meet the environmental protection requirements, the tail gas needs to be systematically treated.
[0003] The tail gas generated in the processing of silicon carbide contains silane (SiH4) and other gases, and direct discharge will have an impact on the environment. In order to avoid the impact of the tail gas generated in the processing of silicon carbide on the environment, the tail gas needs to be processed before being discharged.
[0004] Silicon dioxide and water vapor are produced when silane is completely combusted after heating. If the gas containing silicon dioxide is directly discharged, the silicon dioxide will adhere to the surface of other equipment, affecting other equipment. The silicon dioxide and other solid particles in the combusted tail gas need to be separated and treated. SUMMARY
[0005] Therefore, the present application provides an electric heating multi-stage water washing tail gas treatment equipment, which mainly solves the technical problem of treating the tail gas generated in the processing of silicon carbide and removing the silicon dioxide and other solid particles generated after the combustion of silane in the tail gas.
[0006] In order to achieve the above purpose, the present application adopts the following technical scheme: an electric heating multi-stage water washing tail gas treatment equipment, comprising a combustion mechanism, a connecting mechanism is installed at the bottom of the combustion mechanism, a storage mechanism is installed at the bottom of the connecting mechanism, a spraying mechanism is installed on the connecting mechanism, the combustion mechanism comprises an outer cylinder, an inner cylinder is fixedly connected inside the outer cylinder, a fixed frame is fixedly connected to the inner top of the inner cylinder, the number of fixed frames is multiple, an electric heater is installed inside the fixed frame, a protective sleeve is fixedly connected to the bottom of the fixed frame, the protective sleeve is located inside the inner cylinder, the electric heater is located inside the protective sleeve, an outer shell is fixedly connected to the bottom of the outer cylinder, the connecting mechanism comprises a first three-way pipe, a second three-way pipe is fixedly connected to the side end of the first three-way pipe, the top end of the first three-way pipe is fixedly connected to the bottom of the outer shell, the spraying mechanism comprises a spraying tower, the bottom of the spraying tower is fixedly connected to the top of the second three-way pipe, and a third water inlet is formed in the side wall of the spraying tower.
[0007] By adopting the technical scheme, the tail gas to be treated is introduced into the inner cylinder in the combustion mechanism, the tail gas is heated to reach the combustion temperature by the electric heater, and the tail gas is combusted in the inner cylinder. The combusted tail gas moves downward and passes through the outer shell to reach the first three-way pipe. At this time, the first water inlet in the side wall of the first three-way pipe sprays water mist to perform primary cooling on the combusted tail gas. The water mist combines with the silicon dioxide in the combusted tail gas to increase the weight of the silicon dioxide, so that the silicon dioxide is separated from the combusted tail gas. Then, the combusted tail gas enters the second three-way pipe. At this time, the second water inlet in the side wall of the second three-way pipe also sprays water mist to assist the cooling of the tail gas and separate the silicon dioxide from the tail gas. Finally, the combusted tail gas enters the spray tower and continues to contact the water mist sprayed from the third water inlet to completely separate the silicon dioxide in the combusted tail gas, so that the combusted tail gas is multi-stage cooled and the impurities such as silicon dioxide are multi-stage separated.
[0008] As a further description of the above technical scheme:
[0009] The top center of the inner cylinder is provided with a tail gas inlet pipe, and the top of the inner cylinder is fixedly connected with a compressed air inlet pipe. The number of the compressed air inlet pipes is multiple.
[0010] By adopting the above technical scheme, the tail gas enters the inner cylinder for combustion from the tail gas inlet pipe, and the compressed air enters the inner cylinder through the compressed air inlet pipe to assist the combustion of the tail gas. The compressed air inlet pipe is located beside the electric heater, and the compressed air inlet pipe has multiple lengths to provide oxygen to different areas of the inner cylinder.
[0011] As a further description of the above technical scheme:
[0012] The bottom of the outer cylinder is fixedly connected with a cyclone hopper, and the inner bottom of the outer shell is fixedly connected with an inner container. The cyclone hopper is located inside the inner container, and a gap is formed between the lower surface of the cyclone hopper and the top of the inner container.
[0013] By adopting the above technical scheme, the combusted tail gas is guided by the cyclone hopper to pass through the outer shell and enter the first three-way pipe.
[0014] As a further description of the above technical scheme:
[0015] A cooling cavity is arranged between the outer shell and the inner container. The outer surface of the outer shell is fixedly connected with a cooling water inlet pipe, and the cooling water inlet pipe is in communication with the cooling cavity.
[0016] By adopting the technical scheme, cooling water can be added into the cooling cavity through the cooling water inlet pipe to cool and protect the shell and other components. The excess cooling water can enter the first three-way pipe through the gap between the lower surface of the cyclone bucket and the top of the inner container.
[0017] As a further description of the above technical scheme:
[0018] The side wall of the first three-way pipe is provided with a first water inlet, and the side wall of the second three-way pipe is provided with a second water inlet.
[0019] By adopting the above technical scheme, water mist can be sprayed into the first three-way pipe and the second three-way pipe to perform staged cooling and impurity removal treatment on the burned exhaust gas.
[0020] As a further description of the above technical scheme:
[0021] The storage mechanism includes a water tank, the top of the water tank is fixedly connected with a cover plate, the bottom of the first three-way pipe is fixedly connected with a first inlet pipe, the first inlet pipe is fixedly connected with the cover plate, and the bottom of the first inlet pipe is located inside the water tank, the bottom of the second three-way pipe is fixedly connected with a second inlet pipe, the second inlet pipe is fixedly connected with the cover plate, and the bottom of the second inlet pipe is located inside the water tank.
[0022] By adopting the above technical scheme, water flow and water mist containing impurities such as silicon dioxide can enter the water tank through the first inlet pipe and the second inlet pipe for treatment.
[0023] As a further description of the above technical scheme:
[0024] The top of the cover plate is fixedly connected with a pump, the inside of the water tank is fixedly connected with a filter plate, the inside of the water tank is divided into a sewage area and a treatment area by the filter plate, and the bottom of the pump is located in the treatment area.
[0025] By adopting the above technical scheme, the water flow in the water tank can be pumped out by the pump, so that the water flow in the sewage area passes through the filter plate and enters the treatment area, and the water flow containing impurities such as silicon dioxide is filtered to facilitate recycling of the water flow.
[0026] As a further description of the above technical scheme:
[0027] The surface of the water tank is provided with an observation window, and the side wall of the water tank is fixedly connected with a discharge pipe.
[0028] By adopting the above technical scheme, the water flow inside the water tank can be observed through the observation window to facilitate cleaning of the inside of the water tank.
[0029] As a further description of the above technical scheme:
[0030] The bottom plate is fixedly connected to the inside of the spray tower, and a through hole is formed in the surface of the bottom plate.
[0031] By adopting the above technical scheme, the tail gas flow after combustion can be adjusted, and the water flow can enter the water tank through the through hole for treatment.
[0032] As a further description of the above technical scheme:
[0033] The exhaust pipe is fixedly connected to the top of the spray tower, the fan is installed in the inside of the exhaust pipe, the fourth water inlet is formed in the side wall of the exhaust pipe, and the detector insertion port is formed in the side wall of the exhaust pipe and located above the fourth water inlet.
[0034] By adopting the above technical scheme, the tail gas in the spray tower can be discharged by the fan working at the top of the exhaust pipe, the water mist can be sprayed through the fourth water inlet to treat the tail gas, and the discharged gas can be detected by inserting the detector into the detector insertion port.
[0035] By adopting the above technical scheme, the electric heating multi-stage water washing tail gas treatment equipment has at least the following beneficial effects:
[0036] Compared with the prior art, the electric heating multi-stage water washing tail gas treatment equipment has the following advantages: when in use, the tail gas to be treated is introduced into the inner cylinder in the combustion mechanism, the electric heater is worked to heat the tail gas to reach the combustion temperature, the tail gas is combusted in the inner cylinder, and then moves downward to pass through the shell to reach the first three-way pipe, at this time, the first water inlet in the side wall of the first three-way pipe sprays water mist to cool the tail gas, the water mist combines with the silicon dioxide in the tail gas to increase the weight of the silicon dioxide, so that the silicon dioxide is separated from the tail gas, then the tail gas enters the second three-way pipe, at this time, the second water inlet in the side wall of the second three-way pipe also sprays water mist to assist the cooling of the tail gas and separate the silicon dioxide from the tail gas, finally, the tail gas enters the spray tower, and the tail gas continues to contact the water mist sprayed from the third water inlet in the spray tower to completely separate the silicon dioxide in the tail gas, so that the tail gas after combustion is multi-stage cooled, and the impurities such as silicon dioxide are multi-stage separated. BRIEF DESCRIPTION OF DRAWINGS
[0037] Figure 1 It is a first perspective overall structure schematic view of the present application;
[0038] Figure 2 It is a second perspective overall structure schematic view of the present application;
[0039] Figure 3 It is a first perspective internal structure sectional view of the present application;
[0040] Figure 4 Second perspective internal structure cross-sectional view for the present invention.
[0041] Legend:
[0042] 1, combustion mechanism; 101, outer cylinder; 102, inner cylinder; 103, fixed frame; 104, electric heater; 105, tail gas inlet pipe; 106, compressed air inlet pipe; 107, cyclone hopper; 108, shell; 109, inner container; 110, cooling water inlet pipe; 2, connecting mechanism; 201, first three-way pipe; 202, first inlet pipe; 203, second three-way pipe; 204, second inlet pipe; 205, first water inlet; 206, second water inlet; 3, storage mechanism; 301, water tank; 302, cover plate; 303, pump; 304, filter plate; 305, observation window; 306, discharge pipe; 4, spraying mechanism; 401, spraying tower; 402, bottom plate; 403, third water inlet; 404, exhaust pipe; 405, fourth water inlet; 406, fan; 407, detector insertion port. DETAILED DESCRIPTION
[0043] Reference Figures 1-4The application provides an electric heating multistage water washing tail gas treatment equipment, which comprises a combustion mechanism 1, a connecting mechanism 2 is arranged at the bottom of the combustion mechanism 1, a storage mechanism 3 is arranged at the bottom of the connecting mechanism 2, a spraying mechanism 4 is arranged on the connecting mechanism 2, the combustion mechanism 1, the storage mechanism 3 and the spraying mechanism 4 are connected through the connecting mechanism 2, the combustion mechanism 1 comprises an outer cylinder 101, an inner cylinder 102 is fixedly connected in the outer cylinder 101, a fixed frame 103 is fixedly connected to the inner top of the inner cylinder 102, the number of the fixed frame 103 is plural, an electric heater 104 is arranged in the fixed frame 103, an electric heating wire is arranged in the electric heater 104, the electric heating wire generates high temperature when electrified, so that tail gas can be combusted in the inner cylinder 102, a protective sleeve is fixedly connected to the bottom of the fixed frame 103, a plurality of connecting holes are arranged on the surface of the protective sleeve, the protective sleeve is arranged in the inner cylinder 102, the bottom of the electric heater 104 is arranged in the protective sleeve, the electric heater 104 is protected through the protective sleeve, a tail gas inlet pipe 105 is arranged at the top center of the inner cylinder 102, a compressed air inlet pipe 106 is fixedly connected to the top of the inner cylinder 102, the number of the compressed air inlet pipe 106 is plural, tail gas enters the inner cylinder 102 to be combusted from the tail gas inlet pipe 105, compressed air enters the inner cylinder 102 through the compressed air inlet pipe 106 to assist the combustion of the tail gas, the compressed air inlet pipe 106 is arranged beside the electric heater 104, and the compressed air inlet pipe 106 has a plurality of lengths, so that oxygen can be provided to different regions of the inner cylinder 102, an outer shell 108 is fixedly connected to the bottom of the outer cylinder 101, the connecting mechanism 2 comprises a first three-way pipe 201, a second three-way pipe 203 is fixedly connected to the side end of the first three-way pipe 201, a first water inlet 205 is formed in the side wall of the first three-way pipe 201, and a second water inlet 206 is formed in the side wall of the second three-way pipe 203, so that water mist can be sprayed into the first three-way pipe 201 and the second three-way pipe 203, the tail gas after combustion can be subjected to staged cooling and impurity removal treatment, the top end of the first three-way pipe 201 is fixedly connected to the bottom of the outer shell 108, the spraying mechanism 4 comprises a spraying tower 401, the bottom of the spraying tower 401 is fixedly connected to the top of the second three-way pipe 203, and a third water inlet 403 is formed in the side wall of the spraying tower 401, in use, tail gas to be treated is introduced into the inner cylinder 102 in the combustion mechanism 1, the electric heater 104 is operated to heat the tail gas to a combustion temperature, the tail gas is combusted in the inner cylinder 102, the tail gas after combustion moves downwards, passes through the outer shell 108 and reaches the first three-way pipe 201, a first water inlet pipe is arranged at the first water inlet 205, at this moment, water mist is sprayed from the first water inlet 205 in the side wall of the first three-way pipe 201 to cool the tail gas after combustion, the water mist is combined with silicon dioxide in the tail gas after combustion to increase the weight of the silicon dioxide, so that the silicon dioxide can be separated from the tail gas after combustion, then the tail gas after combustion enters the second three-way pipe 203, a second water inlet pipe is arranged at the second water inlet 206,At this time, the second water inlet 206 of the sidewall of the second three-way pipe 203 also sprays water mist, which assists in cooling the tail gas and separates silica and the like from the tail gas. Finally, the burned tail gas enters the spray tower 401. A third water inlet pipe is installed at the third water inlet 403. The burned tail gas continues to contact the water mist sprayed at the third water inlet 403 in the spray tower 401, so as to completely separate silica and the like from the burned tail gas, achieve multi-stage cooling of the burned tail gas, and achieve the purpose of multi-stage separation of silica and the like impurities.
[0044] The bottom of the outer cylinder 101 is fixedly connected with a cyclone hopper 107. The inner bottom of the shell 108 is fixedly connected with an inner container 109. The cyclone hopper 107 is located inside the inner container 109, and a gap is arranged between the lower surface of the cyclone hopper 107 and the top of the inner container 109. The burned tail gas is guided by the cyclone hopper 107 to pass through the shell 108 and enter the first three-way pipe 201. A cooling cavity is arranged between the shell 108 and the inner container 109. The outer surface of the shell 108 is fixedly connected with a cooling water inlet pipe 110. The cooling water inlet pipe 110 is in communication with the cooling cavity. Cooling water can be added to the cooling cavity through the cooling water inlet pipe 110 to cool and protect the shell 108 and other components. The excess cooling water enters the first three-way pipe 201 through the gap between the lower surface of the cyclone hopper 107 and the top of the inner container 109.
[0045] The storage mechanism 3 includes a water tank 301. The top of the water tank 301 is fixedly connected with a cover plate 302. The bottom of the first three-way pipe 201 is fixedly connected with a first inlet pipe 202. The first inlet pipe 202 is fixedly connected with the cover plate 302, and the bottom of the first inlet pipe 202 is located inside the water tank 301. The bottom of the second three-way pipe 203 is fixedly connected with a second inlet pipe 204. The second inlet pipe 204 is fixedly connected with the cover plate 302, and the bottom of the second inlet pipe 204 is located inside the water tank 301. Therefore, water flow and water mist containing silica and other impurities can enter the water tank 301 through the first inlet pipe 202 and the second inlet pipe 204 for treatment. The top of the cover plate 302 is fixedly connected with a pump 303. The inside of the water tank 301 is fixedly connected with a filter plate 304. The filter plate 304 divides the inside of the water tank 301 into a sewage area and a treatment area. The bottom of the pump 303 is located in the treatment area. The pump 303 can extract water flow in the water tank 301, so that the water flow in the sewage area passes through the filter plate 304 and enters the treatment area, and the water flow containing silica and other impurities is filtered, so as to recycle the water flow. An observation window 305 is installed on the surface of the water tank 301. A discharge pipe 306 is fixedly connected to the sidewall of the water tank 301. The water flow in the water tank 301 can be observed through the observation window 305, so as to clean the inside of the water tank 301.
[0046] The bottom plate 402 is fixedly connected to the inside of the spray tower 401, and a through hole is formed in the surface of the bottom plate 402, so as to adjust the flow of the tail gas after combustion, and the water flow can enter the water tank 301 for treatment through the through hole. The exhaust pipe 404 is fixedly connected to the top of the spray tower 401, and the fan 406 is installed in the inside of the exhaust pipe 404. The fourth water inlet 405 is formed in the side wall of the exhaust pipe 404, and the detector insertion port 407 is formed in the side wall of the exhaust pipe 404 and located above the fourth water inlet 405. The tail gas in the spray tower 401 can be discharged by the fan 406 working at the top of the exhaust pipe 404. The fourth water inlet pipe is installed at the fourth water inlet 405, and the water mist sprayed through the fourth water inlet 405 can treat the tail gas. The detector inserted at the detector insertion port 407 can detect the discharged gas.
[0047] Working principle: when in use, the tail gas to be treated is introduced into the inner cylinder 102 in the combustion mechanism 1, and the tail gas is heated to reach the combustion temperature by the electric heater 104, and then burns in the inner cylinder 102. The tail gas after combustion moves downward and passes through the shell 108 to reach the first three-way pipe 201. At this time, the first water inlet 205 in the side wall of the first three-way pipe 201 sprays water mist to cool the tail gas after combustion. The water mist combines with the silicon dioxide in the tail gas after combustion to increase the weight of the silicon dioxide, so as to separate the silicon dioxide from the tail gas after combustion. Then, the tail gas after combustion enters the second three-way pipe 203, and the second water inlet 206 in the side wall of the second three-way pipe 203 also sprays water mist to assist the cooling of the tail gas and separate the silicon dioxide from the tail gas. Finally, the tail gas after combustion enters the spray tower 401, and continues to contact with the water mist sprayed at the third water inlet 403 to completely separate the silicon dioxide in the tail gas after combustion, so as to realize the multi-stage cooling of the tail gas after combustion and the multi-stage separation of the impurities such as silicon dioxide.
[0048] Finally, it should be noted that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent replacements to some technical features, as long as they are within the spirit and principles of the present application. Any modification, equivalent replacement, improvement, etc. made within the scope of the present application shall be included in the protection scope of the present application.
Claims
1. An electrically heated multi-stage water scrubbing off-gas treatment apparatus comprising a combustion mechanism (1), characterized in that: The bottom of the combustion mechanism (1) is provided with a connecting mechanism (2), the bottom of the connecting mechanism (2) is provided with a storage mechanism (3), the connecting mechanism (2) is provided with a spraying mechanism (4), the combustion mechanism (1) comprises an outer cylinder (101), the inner top of the inner cylinder (102) is fixedly connected with a fixed frame (103), the inside of the fixed frame (103) is provided with an electric heater (104), the bottom of the electric heater (104) is located in the inside of the protection sleeve, the bottom of the outer cylinder (101) is fixedly connected with an outer shell (108), the connecting mechanism (2) comprises a first three-way pipe (201), the side end of the first three-way pipe (201) is fixedly connected with a second three-way pipe (203), the top end of the first three-way pipe (201) is fixedly connected with the bottom of the outer shell (108), the spraying mechanism (4) comprises a spraying tower (401), the bottom of the spraying tower (401) is fixedly connected with the top of the second three-way pipe (203), and the side wall of the spraying tower (401) is provided with a third water inlet (403).
2. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The top center of the inner cylinder (102) is provided with a tail gas inlet pipe (105), and the top of the inner cylinder (102) is fixedly connected with a compressed air inlet pipe (106).
3. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The bottom of the outer cylinder (101) is fixedly connected with a cyclone hopper (107), the inner bottom of the outer shell (108) is fixedly connected with an inner container (109), the cyclone hopper (107) is located in the inner container (109), and a gap is formed between the lower surface of the cyclone hopper (107) and the top of the inner container (109).
4. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 3, wherein: The outer shell (108) and the inner container (109) are provided with a cooling cavity, and the outer surface of the outer shell (108) is fixedly connected with a cooling water inlet pipe (110).
5. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The side wall of the first three-way pipe (201) is provided with a first water inlet (205), and the side wall of the second three-way pipe (203) is provided with a second water inlet (206).
6. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The storage mechanism (3) comprises a water tank (301), the top of the water tank (301) is fixedly connected with a cover plate (302), the bottom of the first three-way pipe (201) is fixedly connected with a first inlet pipe (202), the first inlet pipe (202) is fixedly connected with the cover plate (302), and the bottom of the first inlet pipe (202) is located in the inside of the water tank (301), the bottom of the second three-way pipe (203) is fixedly connected with a second inlet pipe (204), the second inlet pipe (204) is fixedly connected with the cover plate (302), and the bottom of the second inlet pipe (204) is located in the inside of the water tank (301).
7. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 6, wherein: The top of the cover plate (302) is fixedly connected with a pump (303), the inside of the water tank (301) is fixedly connected with a filter plate (304), the filter plate (304) divides the inside of the water tank (301) into a sewage area and a treatment area, and the bottom of the pump (303) is located in the treatment area.
8. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 6, wherein: The surface of the water tank (301) is provided with an observation window (305), and the side wall of the water tank (301) is fixedly connected with a discharge pipe (306).
9. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The inside of the spray tower (401) is fixedly connected with a bottom plate (402), and the surface of the bottom plate (402) is provided with a through hole.
10. The electrically heated multi-stage water scrubbed off-gas treatment apparatus of claim 1, wherein: The top of the spray tower (401) is fixedly connected with an exhaust pipe (404), the inside of the exhaust pipe (404) is provided with a fan (406), the side wall of the exhaust pipe (404) is provided with a fourth water inlet (405), the side wall of the exhaust pipe (404) is provided with a detector insertion opening (407), and the detector insertion opening (407) is located above the fourth water inlet (405).