Valve volume determination method and controller for gas mass flow verification system

Abstract

This application discloses a method and controller for determining the valve volume of a gas mass flow verification system. The method includes: acquiring a first volume verification parameter for a calibration tank; acquiring a second volume verification parameter for the first gas in the calibration tank diffusing only into a second volume; acquiring a third volume verification parameter for the first gas in the calibration tank diffusing into a third volume; acquiring a fourth volume verification parameter; acquiring a fifth volume verification parameter for the second gas in the third volume diffusing only into the second volume; acquiring a sixth volume verification parameter for the second gas in the third volume diffusing into the first volume; and determining the valve volume based on the first volume and the aforementioned volume verification parameters. This application can accurately and reliably determine the valve volume of the second valve and the fourth valve. The valve volume is no longer ignored or treated as an empirical parameter, which helps improve the accuracy of gas flow calculation, thereby meeting the high-precision requirements of semiconductor processes.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a method and controller for determining the valve volume of a gas mass flow verification system. Background Technology

[0002] Precise gas flow control is crucial in semiconductor process environments. Typically, pipelines in these environments are equipped with valves to regulate the output of reactive gases. Gas flow detection equipment is used to measure the pipeline volume and then calculate the gas flow rate. The accuracy of the gas flow rate calculation largely depends on the accuracy of the measured pipeline volume. However, valves themselves can absorb some gas. In practice, gas flow detection equipment often ignores the valve volume during pipeline volume measurement, failing to incorporate it into the calculation. This leads to distortion in the calculated pipeline volume, ultimately resulting in inaccurate and unreliable gas flow rates, which in turn affects the quality of semiconductor products. Summary of the Invention

[0003] One objective of this application is to provide a method and controller for determining the valve volume of a gas mass flow verification system, thereby improving the situation where related technologies cannot obtain accurate and reliable valve volumes.

[0004] In a first aspect, embodiments of this application provide a method for determining the valve volume of a gas mass flow verification system. The gas mass flow verification system includes a calibration system, a calibration tank system, and a dry pump. The calibration system includes a first valve, a second valve, and a third valve. The calibration tank system includes a calibration tank and a fourth valve. The input end of the first valve is used to connect to a gas output module, which is communicatively connected to the calibration system. The output end of the first valve is connected to the input end of the second valve. The output end of the second valve is connected to the input ends of the third valve and the fourth valve, respectively. The output end of the third valve is used to connect to the dry pump, and the output end of the fourth valve is used to connect to the calibration tank. The valve volume determination method includes: in response to the calibration tank being filled with a first gas, obtaining a first volume verification parameter of the calibration tank when the fourth valve is closed, wherein the volume of the calibration tank is a known first volume; obtaining the first volume verification parameter of the calibration tank... A second volume verification parameter is obtained whereby a gas diffuses only into a second volume, the second volume being the volume formed between the second valve, the third valve, and the fourth valve; a third volume verification parameter is obtained whereby a first gas from the calibration vessel diffuses from the second volume into a third volume, the third volume being the volume formed between the first valve and the second valve; in response to the third volume being filled with second gas, a fourth volume verification parameter corresponding to the third volume is obtained; a fifth volume verification parameter is obtained whereby the second gas from the third volume diffuses only into the second volume; a sixth volume verification parameter is obtained whereby the second gas from the third volume diffuses from the second volume into the first volume; based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter, the valve volume of the second valve and the valve volume of the fourth valve are determined.

[0005] Optionally, obtaining the second volume verification parameter by which the first gas from the calibration vessel diffuses only into the second volume includes: in response to the second volume entering a vacuum state, controlling the first gas from the calibration vessel to diffuse only into the second volume; and detecting the second volume verification parameter at the calibration vessel after the first gas has diffused into the second volume.

[0006] Optionally, obtaining the third volume verification parameter of the first gas in the calibration tank diffused from the second volume to the third volume includes: controlling the second valve to enter an open state, so that the first gas in the calibration tank diffuses from the second volume to the third volume; and detecting the third volume verification parameter at the calibration tank after the first gas in the calibration tank diffuses from the second volume to the third volume.

[0007] Optionally, the step of obtaining a fourth volume verification parameter corresponding to the third volume in response to the third volume being filled with the second gas includes: controlling both the first valve and the second valve to enter the open state so that the second gas from the gas output module fills the third volume; after the second gas fills the third volume, controlling both the first valve and the second valve to enter the closed state and setting both the first volume and the second volume to enter the vacuum state; and after both the first valve and the second valve enter the closed state, detecting the fourth volume verification parameter at the third volume.

[0008] Optionally, obtaining the fifth volume verification parameter that the second gas in the third volume diffuses only into the second volume includes: in response to the second volume entering a vacuum state, controlling the second valve to switch from a closed state to an open state so that the second gas in the third volume diffuses only into the second volume; and detecting the fifth volume verification parameter at the third volume.

[0009] Optionally, obtaining the sixth volume verification parameter of the second gas in the third volume diffused from the second volume to the first volume includes: in response to the first volume entering a vacuum state, controlling the fourth valve to switch from a closed state to an open state so that the second gas in the third volume diffused from the second volume to the first volume; and detecting the sixth volume verification parameter at the third volume.

[0010] Optionally, determining the valve volume of the second valve and the valve volume of the fourth valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter includes: determining the valve volume of the second valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, and the sixth volume verification parameter; and determining the valve volume of the fourth valve based on the first volume, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter.

[0011] Optionally, the pipeline space corresponding to the third volume is provided with a first sensing device, which is configured to detect pressure and temperature at the third volume. The fourth, fifth, and sixth volume calibration parameters are the pressure and temperature detected by the first sensing device under different operating conditions, respectively. The pipeline space corresponding to the first volume is provided with a second sensing device, which is configured to detect pressure and temperature at the calibration tank. The first, second, and third volume calibration parameters are the pressure and temperature detected by the second sensing device under different operating conditions, respectively.

[0012] In a second aspect, embodiments of this application provide a controller, including a memory and a processor. The memory is connected to the processor, and the processor is configured to execute one or more computer programs stored in the memory. When the processor executes the one or more computer programs, it causes the controller to implement the valve volume determination method of the gas mass flow verification system described above.

[0013] In a third aspect, embodiments of this application provide a gas mass flow verification system, including a calibration system, a calibration tank system, and a dry pump. The calibration system includes a first valve, a second valve, a third valve, and the aforementioned controller. The calibration tank system includes a calibration tank and a fourth valve. The input end of the first valve is used to connect to a gas output module. The output end of the first valve is connected to the input end of the second valve. The output end of the second valve is connected to the input ends of the third valve and the fourth valve, respectively. The output end of the third valve is used to connect to the dry pump. The output end of the fourth valve is used to connect to the calibration tank. The controller is communicatively connected to the first valve, the second valve, the third valve, the fourth valve, and the gas output module.

[0014] This application employs two measurement stages to obtain the volume calibration parameters of the gas mass flow verification system under different operating conditions. One measurement stage includes the first volume calibration parameters when the calibration tank is filled with the first gas, and the second and third volume calibration parameters when the first gas in the calibration tank diffuses into the second and third volumes in stages. The other measurement stage includes the fourth volume calibration parameters when the third volume is filled with the second gas, and the fifth and sixth volume calibration parameters when the second gas in the third volume diffuses into the second and first volumes in stages. Finally, based on the first volume, the first volume calibration parameters, the second volume calibration parameters, the third volume calibration parameters, the fourth volume calibration parameters, the fifth volume calibration parameters, and the sixth volume calibration parameters, the valve volumes of the second and fourth valves are accurately and reliably determined. In the subsequent gas flow calculation process, the valve volumes are no longer ignored, nor are they treated as empirical parameters. This helps to improve the accuracy of gas flow calculation, thereby meeting the high precision requirements of semiconductor processes. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of a gas mass flow rate verification system provided in some embodiments of this application;

[0017] Figure 2 Another schematic diagram of the gas mass flow verification system provided in some embodiments of this application;

[0018] Figure 3 A schematic diagram of the piping space and component connections in a gas mass flow verification system provided in some embodiments of this application;

[0019] Figure 4 A schematic diagram illustrating the gas flow detection process performed by the gas mass flow verification system provided in some embodiments of this application;

[0020] Figure 5 A schematic diagram showing the connection between the calibration system and the gas output module in a gas mass flow verification system provided in some embodiments of this application;

[0021] Figure 6 A schematic diagram illustrating the interaction during the calibration volume process in a gas mass flow verification system provided in some embodiments of this application;

[0022] Figure 7 This is a schematic diagram of the controller structure in a calibration system provided in some embodiments of this application;

[0023] Figure 8a A flowchart illustrating the valve volume determination method provided in some embodiments of this application;

[0024] Figure 8b A flowchart illustrating the valve volume determination method provided in some embodiments of this application;

[0025] Figure 9 This is a schematic diagram of the valve volume determination device provided in some embodiments of this application. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0027] It should be noted that, unless there is a conflict, the various features in the embodiments of this application can be combined with each other, all of which are within the protection scope of this application. Furthermore, although functional modules are divided in the device schematic diagram and a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in a different order than the module division in the device or the order in the flowchart. Moreover, the terms "first," "second," and "third" used in this application do not limit the data or execution order, but only distinguish identical or similar items with essentially the same function and effect.

[0028] In semiconductor manufacturing processes, precise gas supply to process chambers is a crucial prerequisite for achieving high-precision control at each step. Therefore, the accuracy of gas flow control to the process chambers is paramount, as flow control errors directly impact the quality of the finished wafer. Semiconductor manufacturing environments are complex scenarios with multiple machines, chambers, and input gas paths. Each gas source is equipped with a corresponding mass flow controller (MFC) to regulate the gas flow into the process chamber. However, individual differences exist between MFCs from different gas sources, making it difficult to guarantee consistent mass flow output across multiple machines, chambers, and gas paths. Furthermore, variations in chamber ambient temperature, volume differences, pressure measurement accuracy, and factors such as high gas consumption or long measurement times further affect the measurement accuracy of the MFC. This directly leads to inconsistent gas parameter control in semiconductor manufacturing, ultimately impacting semiconductor product quality. Therefore, relevant technologies require gas flow detection equipment to calibrate the corresponding pipe volumes for each path, enabling more accurate gas flow calculations and precise control of the reaction gas output based on the gas flow rate.

[0029] Gas flow detection equipment provided by related technologies is typically based on the "pressure-volume" relationship method according to the gas law (such as the ideal gas law) to detect the pipe volume corresponding to each pipeline. The specific operation is as follows:

[0030] The valves in the pipeline under test are controlled to open and close, allowing gas to diffuse freely from a sealed chamber of known volume into another pipeline under test. Once the pressure between the pipeline and the sealed chamber is balanced, the volume of the pipeline under test is calculated using Boyle's Law: Pa·Va=Pb·(Va+Vb), where Va is the known volume of the sealed chamber, Vb is the volume of the pipeline under test, Pa is the initial pressure, and Pb is the equilibrium pressure.

[0031] However, the above approach ignores the valve's own volume. In actual pipeline systems, the valve chamber and diaphragm actuation chamber of valves (especially diaphragm valves) occupy a certain amount of space. Related flow calculation models assume the valve is an ideal, volumeless switching unit. But in reality, during the diffusion of gas from a small volume to a large volume, the gas not only fills the small and large volumes but also the valve volume connecting them. Therefore, the actual volumes involved in the diffusion process are the small volume, the large volume, and the valve volume. However, the calculation formula for the large volume is incorrectly based on the sum of the small and large volumes, leading to a discrepancy between the calculated and actual large volume, typically manifesting as an underestimation of the large volume. This deviation is particularly significant in the calibration of small-volume pipelines. When the small and large volumes themselves are very small, the proportion of the valve volume in the sum of the small and large volumes becomes relatively large and cannot be ignored. Ultimately, this deviation will be passed on to subsequent flow calculations, resulting in inaccurate and unreliable calculated gas flow rates, which in turn affects the product quality of semiconductor processes.

[0032] The inventors also discovered that while related technologies do not ignore the valve volume, another related technology treats the valve volume as an empirical parameter in the calculation of pipeline volume. However, the empirical parameter of the valve differs from the actual valve volume, which easily leads to distortion in the subsequently calculated pipeline volume. Ultimately, this affects the accuracy and reliability of the calculated gas flow rate, thus impacting the product quality of semiconductor processes.

[0033] Based on this, this application provides a gas mass flow rate verification system. Please refer to the following: Figure 1 and Figure 2 , Figure 1 and Figure 2 The schematic diagram illustrates the structure of a gas mass flow rate verification system provided in some embodiments of this application. For example... Figure 1 and Figure 2 As shown, the gas mass flow verification system 100 includes a calibration system 110, a calibration tank system 120, and a dry pump 130. The calibration system 110 includes a first valve VAL1, a second valve VAL2, a third valve VAL3, and a controller 111. The calibration tank system 120 includes a calibration tank 121 and a fourth valve VAL4. It should be understood that the first valve VAL1, second valve VAL2, third valve VAL3, and fourth valve VAL4 can all be any suitable type of valve, such as a solenoid valve or a pneumatic diaphragm valve. Engineers can set the first valve VAL1, second valve VAL2, third valve VAL3, and fourth valve VAL4 in any suitable position according to actual needs; this embodiment does not impose any limitations on this.

[0034] The input terminal of the first valve VAL1 is used to connect to the gas output module 103. The output terminal of the first valve VAL1 is connected to the input terminal of the second valve VAL2. The output terminal of the second valve VAL2 is connected to the input terminals of the third valve VAL3 and the fourth valve VAL4 respectively. The output terminal of the third valve VAL3 is used to connect to the dry pump 130. The output terminal of the fourth valve VAL4 is used to connect to the calibration tank 121. The controller 111 is communicatively connected to the first valve VAL1, the second valve VAL2, the third valve VAL3, the fourth valve VAL4, and the gas output module 103. The gas output module 103 includes a gas source ( Figure 1 and Figure 2 (Not shown in the image), Mass Flow Controller (MFC) 1031 and Gas Control Valve VALSec, the gas source is used to provide various types of gas, the Mass Flow Controller 1031 is used to control the flow rate of the gas output from the gas source, and the Gas Control Valve VALSec is used to control the opening or closing of the gas output channel (i.e., the channel from the Mass Flow Controller 1031 to the chamber or the gas mass flow verification system 100).

[0035] Please combine Figure 3 The first volume V1 is the volume of calibration vessel 121, where the first volume V1 is a known value and can be any suitable volume, such as 326 ml, 286 ml, etc. The second volume V2 is the volume formed between the second valve VAL2, the third valve VAL3, and the fourth valve VAL4. The third volume V3 is the volume formed between the first valve VAL1 and the second valve VAL2. The fourth volume V4 is the volume formed between the first valve VAL1 and the fifth valve VALSec.

[0036] The first pipeline space is composed of the second, third, and fourth pipeline spaces. The second pipeline space is the pipeline space formed between the second valve VAL2, the third valve VAL3, and the fourth valve VAL4. The third pipeline space is the pipeline space formed between the first valve VAL1 and the second valve VAL2. The fourth pipeline space is the pipeline space formed between the output end of the gas output module 103 and the first valve VAL1.

[0037] Please see Figure 4 The process of using a gas mass flow verification system to perform gas flow detection on different MFC output gases in this embodiment is as follows:

[0038] First, the airtightness of the pipelines between the gas output module and the gas mass flow verification system, and between the calibration tank and the gas mass flow verification system, is tested, specifically the airtightness of the second volume V2, the third volume V3, and the fourth volume V4. The fourth valve VAL4 is controlled to close, while the first valve VAL1, the second valve VAL2, and the third valve VAL3 are controlled to open, causing the dry pump 130 to perform a vacuum operation, extracting the gas from the first pipeline space formed by the second volume V2, the third volume V3, and the fourth volume V4. It is then determined whether the first pipeline space has entered a stable gas state. After the first pipeline space enters a stable gas state, the pressure of the first pipeline space is acquired, and after a timeout, it is determined again whether the first pipeline space has entered a stable gas state. After the first pipeline space re-enters a stable gas state, the pressure of the first pipeline space is acquired again. Calculate the pressure difference between the two pressure measurements of the first pipeline space to obtain the pressure difference value. Also calculate the time difference between the two pressure measurements of the first pipeline space to obtain the time difference value. Divide the pressure difference value by the time difference value to obtain the gas leakage rate of the first pipeline space. Compare the gas leakage rate with a preset leakage rate threshold. If the gas leakage rate is less than the preset leakage rate threshold, the airtightness of the first pipeline space is determined to be good. If the gas leakage rate is greater than or equal to the preset leakage rate threshold, the airtightness of the first pipeline space is determined to be faulty. Control the first valve VAL1, the second valve VAL2, and the third valve VAL3 to enter the closed state, ending the airtightness test.

[0039] In this embodiment, a stable gas state refers to a situation where the pressure fluctuation value of the gas in the pipeline space is less than or equal to the actual judgment pressure threshold after a continuous preset number of samplings. For example, if the pressure fluctuation value of the gas is less than or equal to the actual judgment pressure threshold after 300 consecutive samplings, it indicates that the pipeline space has entered a stable gas state. The actual judgment pressure threshold is calculated as: base threshold × threshold multiplier K. For example, if the base threshold is set to 1 mTorr, and K = 1, then the actual judgment pressure threshold is 1 × 1 = 1 mTorr; if K = 0.8, then the actual judgment pressure threshold is 1 × 0.8 = 0.8 mTorr.

[0040] Then, the gas output module and dry pump are used to purge and evacuate the first pipeline space. Specifically, the gas control valve VALSec of the gas output module is opened, and the first valve VAL1 and the second valve VAL2 are opened, while the third valve VAL3 and the fourth valve VAL4 are closed, isolating the dry pump, calibration tank, and first pipeline space. The gas output module outputs gas to purge the first pipeline space. After the purging time reaches a preset reference duration or the pressure in the first pipeline space reaches a preset reference pressure, it indicates that one purging operation has been completed. The gas control valve VALSec of the gas output module is then closed, and the third valve VAL3 is opened, causing the dry pump to perform a vacuum operation, removing impurities and gases remaining in the first pipeline space after purging. This completes one purging and evacuation operation. It should be understood that the first pipeline space can be purged and emptied using the gas output module and dry pump before and after each gas flow rate detection. Obviously, engineers can purge and empty the first pipeline space once or multiple times as needed, and this application embodiment does not limit this in any way.

[0041] Next, the volume of the external pipeline space is calibrated. This is done by diffusing gas from the calibration tank into the corresponding pipeline space and detecting the volume verification parameters (i.e., pressure and temperature) of the corresponding pipeline space. Based on the volume verification parameters of the corresponding pipeline space and the known first volume of the calibration tank, the volume of the external pipeline space is calculated. Thus, the volume of the external pipeline space is calibrated. The external pipeline space includes a second pipeline space and a third pipeline space.

[0042] Furthermore, the volume of the front-end pipeline space is calibrated. Specifically, gas from the calibration tank is diffused into the first pipeline space to detect its volume verification parameters (i.e., pressure and temperature). Based on these parameters, the known volumes of the first, second, and third pipeline spaces, and the calibration tank itself, the volume of the front-end pipeline space is calculated. This process calibrates the volume of the front-end pipeline space. The front-end pipeline space is the fourth pipeline space.

[0043] Finally, the flow rate of the gas output from the gas output module is detected. That is, the gas flow rate is calculated based on the volume of the external pipeline space and the volume of the fourth pipeline space, combined with the volume verification parameters of the external pipeline space and the fourth pipeline space. In this way, the gas flow rate of the gas output module is detected.

[0044] It is worth noting that after the gas flow rate is measured by the gas mass flow rate verification system 100, the data measured by the gas mass flow rate verification system 100 is fed back to the MFC through an additional flow feedback monitoring system. This allows the MFC to further calibrate the output gas flow rate based on the data measured by the gas mass flow rate verification system 100, thereby achieving precise control of the gas source output gas flow rate. The gas mass flow rate verification system 100 does not directly control the gas flow rate; instead, it feeds back the detected gas flow rate to the MFC, causing the MFC to adjust the valve opening according to the detected gas flow rate, thus controlling the output gas flow rate.

[0045] The third volume corresponds to a piping space equipped with a first sensing device, which is configured to detect pressure and temperature at the third volume. Obviously, engineers can place the first sensing device in the third piping space in any suitable manner according to actual needs, such as by fitting or suspending it.

[0046] A second sensor is installed in the piping space corresponding to the first volume. This second sensor is configured to detect the pressure and temperature at the calibration tank. Obviously, engineers can install the second sensor in the reference piping space in any suitable way according to actual needs, such as by attaching or suspending it.

[0047] It is worth noting that the third pipeline space is equipped with a first sensing device with a high range and a low range, and the reference pipeline space is equipped with a second sensing device with a high range and a low range. The first and second sensing devices with high range (e.g., 100 Torr) and low range (e.g., 20 Torr) are two independent sets of sensors, signal amplification circuits and ADC circuits, each with a clearly defined effective range.

[0048] The measurement range is categorized as follows: High Range (100 Torr): Effective measurement range 0-100 Torr (sensor, amplifier, and ADC circuit all operate linearly). Low Range (20 Torr): Effective measurement range 0-20 Torr (beyond 20 Torr, the sensor / amplifier becomes non-linear or even saturates, causing ADC data distortion). For example, at 40 Torr, the first and second sensors in the high range will correctly measure 40 Torr, while the first and second sensors in the low range will measure close to 20 Torr. In this case, the pressure and temperature values ​​used for calculation are those detected by the first and second sensors in the high range. Engineers can use the appropriate first and second sensors based on the effective measurement range to detect pressure and temperature, thereby calculating pipeline volume, gas flow rate, etc.

[0049] It is understood that engineers can use appropriate components or devices to connect and fix the various systems, modules, or components in the gas mass flow verification system 100 according to actual needs, or strengthen the airtightness of the corresponding systems, modules, or components, etc. This application embodiment does not impose any limitations in this regard; for example, refer to... Figure 3 Engineers use two connectors at both ends (i.e., input and output ends) of the first valve VAL1, the second valve VAL2, the third valve VAL3, and the fourth valve VAL4. The two connectors are used to connect and fix the valves to the pipeline. Alternatively, ball valves or stop valves can be used to enhance the airtightness of the calibration tank 121.

[0050] In practical applications, the gas mass flow verification system 100 can interface with multiple different gas output modules 103. The controller 111 of the calibration system 110 controls the opening and closing of the gas control valves (VALSec) in these modules, thereby transmitting different types of gas. Alternatively, the gas mass flow verification system 100 can interface with a single gas output module 103 equipped with various gas sources. The controller 111 of the calibration system 110 controls the opening and closing of the gas control valves (VALSec) corresponding to different gas sources within the gas output module 103, thus transmitting different types of gas.

[0051] For example, see Figure 5 As shown, the gas mass flow verification system 100 ( Figure 3 Only the calibration system 110 and the dry pump 130 are shown in the diagram. They are connected to a gas output module 103, which is equipped with oxygen ( ),hydrogen( ) and helium ( There are three gas sources. The MFC corresponding to each gas source controls the flow rate of its output gas. The output gas is transported to chamber 400 or gas mass flow verification system 100 through pipeline.

[0052] In practical industrial applications, the gas output module 103 delivers one or more types of gas into the chamber 400 via an MFC (Mechanical Control Controller), where the MFC controls the gas flow rate. For example, if the gas flow rate entering the chamber 400 needs to be controlled to 200 Sccm, originally... If the gas flow rate is 210 Sccm, then the MFC (Mass Flow Controller) will adjust the valve opening to control the gas flow rate at 210 Sccm (but there will be actual deviations; the MFC might actually measure 204 Sccm). This is because different commercial mass flow controllers (MFCs) have usage variations, such as different flow ranges (the measured values ​​will differ between 500 Sccm and 2000 Sccm ranges), and different types of gas also affect gas flow control. The corresponding MFC output gas flow rate is 203 Sccm. The corresponding gas flow rate output by the MFC is 202 Sccm.

[0053] In this embodiment, by measuring the gas flow rate using the gas mass flow rate verification system 100, the gas flow rate measured by the gas mass flow rate verification system 100 can maintain a basically consistent error with the gas flow rate output by the MFC. For example... End gas source, End gas source and The gas flow rates of the end gas source are 203.5 Sccm, 202.5 Sccm, and 201.5 Sccm (each differing by only 0.5 Sccm, or a very small error of 0.1%). The gas flow rate error measured in different chambers 400 also remains within 0.5 Sccm, rather than some gas flow rates deviating by 1 Sccm and others by 3 Sccm. That is, the gas mass flow rate verification system 100 ensures the "consistency" of the gas flow rate measurement error, with a small deviation range and high accuracy.

[0054] Please see Figure 6 In some embodiments, the gas mass flow verification system 100 receives sensor values ​​from a first sensor 101 and a second sensor 102 in real time. The sensor values ​​from the first sensor 101 include the temperature and pressure values ​​of the third pipeline space, and the sensor values ​​from the second sensor 102 include the pressure and temperature of the calibration tank 121. After receiving instructions from a host computer 200 (e.g., a computer, server, or other device) via the network, the system responds to each instruction and executes corresponding calculations and actions. For example, it generates and sends a VALSec control command to the gas control valve VALSec of the gas output module 103 to control the opening or closing of the gas control valve VALSec. It is understood that, in addition to the internal calculations of the gas mass flow verification system 100, some instructions will also call data (e.g., temperature and its coefficient, pressure and its coefficient) from an external calibration device 300 via the network according to actual application needs, and execute corresponding calculations and actions. The gas mass flow verification system 100 completes various process instructions by driving internal valves (i.e., its own first valve VAL1, second valve VAL2, third valve VAL3 and fourth valve VAL4) through internal calculations and internal valve control signals, and by driving the gas control valve VALSec of the gas output module 103 through VALSec control commands. Finally, the gas flow calculation results are fed back to the host computer 200 through the network, thereby completing the gas flow detection.

[0055] In some embodiments, please refer to Figure 6When the gas mass flow verification system 100 is connected to multiple gas output modules 103, the gas mass flow verification system 100 also generates and sends pressure signals of each gas output module 103 to each gas output module 103, so that each gas output module 103 can monitor the pressure of each gas output module 103 in real time, thereby ensuring stable and safe operation, ensuring pressure balance between each gas output module 103 during the production process, and avoiding equipment damage and production accidents caused by pressure fluctuations.

[0056] After the gas flow rate is measured by the gas mass flow rate verification system 100, an additional flow feedback monitoring system further calibrates the output gas flow rate based on the data measured by the gas mass flow rate verification system 100, thereby achieving precise control of the gas source output gas flow rate. Specifically, the gas after reaction in chamber 400 or measurement by the gas mass flow rate verification system 100 can be extracted using a dry pump 130 and stored in a suitable container or used directly; this application embodiment does not impose any limitations on this.

[0057] It is understood that during the gas flow rate measurement process of the gas mass flow rate verification system 100, the pipeline volume of the calibration system 110 itself needs to be calibrated first. In this embodiment, the gas flow rate is measured after the volumes of the fourth pipeline space, the second pipeline space, and the third pipeline space in the calibration system 110 are calibrated.

[0058] It is also understandable that during the calibration of the volumes of the fourth, second, and third pipeline spaces, these volumes are all related to the second valve VAL2 and the fourth valve VAL4. If the valve volumes of the second valve VAL2 and the fourth valve VAL4 are ignored, or if the valve volumes of the second valve VAL2 and the fourth valve VAL4 are treated as empirical parameters, then the volumes of the fourth, second, and third pipeline spaces will deviate from the actual volumes.

[0059] In view of this, embodiments of this application provide a method for determining the valve volume of a gas mass flow verification system. By controlling the diffusion between the first gas and the second gas respectively, and using the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter, the valve volume of the second valve VAL2 and the valve volume of the fourth valve VAL4 can be reliably and accurately measured. This is beneficial to improving the accuracy of pipeline volume measurement, meeting the requirements of semiconductor processes for pipeline volume accuracy, and improving the stability of semiconductor processes.

[0060] Please see Figure 7 , Figure 7 A schematic diagram of the controller structure in a calibration system provided in some embodiments of this application is shown.

[0061] like Figure 7 As shown, the controller 111 includes at least one processor 1111 and a memory 1112 connected in communication. Figure 7 Taking a bus system 1113 and a processor 1111 as an example, the various components in the controller 111 are coupled together through the bus system 1113, which is used to realize the connection and communication between the various components. It is easy to understand that the bus system 1113, in addition to the data bus, may also include a power bus, a control bus, and a status signal bus, etc. However, for the sake of clarity and brevity, in... Figure 7 The general designates all buses as Bus System 1113. Understandably, Figure 7 The structures shown in the embodiments are merely illustrative and do not limit the structure of the controller described above. For example, the controller may also include components that are more... Figure 5 The structure shown has more or fewer components, or has the same as Figure 7 The diagram shows different configurations of the structure.

[0062] Specifically, the processor 1111 provides computational and control capabilities to support the controller 111 in executing corresponding business logic and functions. For example, it supports the controller 111 in executing the valve volume determination method provided in the embodiments of this application, or in executing the steps in any possible implementation of the valve volume determination method provided in the embodiments of this application. Those skilled in the art will understand that the processor 1111 can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0063] The memory 1112, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, instructions, and modules, such as the program and instructions / modules corresponding to the valve volume determination method in the embodiments of this application. In some embodiments, the memory 1112 may include a program storage area and a data storage area. The program storage area may store the operating system and application programs required for at least one function, and the data storage area may store data created according to the use of the processor 1111. The processor 1111 executes various functional applications and data processing of the controller 111 by running the non-transitory software programs, instructions, and modules stored in the memory 1112, thereby implementing the valve volume determination method provided in the embodiments of this application, or executing the steps in any possible implementation of the valve volume determination method provided in the embodiments of this application. In some embodiments, the memory 1112 may include high-speed random access memory and may also include non-transitory memory. For example, at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory 1112 may also include memory remotely located relative to the processor 1111, and these remotely located memories may be connected to the processor 1111 through a communication network. It is understood that examples of the aforementioned communication networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0064] As can be understood from the above, the implementing entity of any valve volume determination method provided in the embodiments of this application can be any suitable type of controller with certain calculation and control capabilities, such as the controller 111 described above. In some feasible implementations, the valve volume determination method provided in the embodiments of this application can be implemented by a processor executing computer program instructions stored in memory.

[0065] The following embodiments of this application provide a method for determining the valve volume of a gas mass flow verification system. Please refer to... Figure 8a In this embodiment of the application, the valve volume is determined through steps S81 to S87, as detailed below:

[0066] Step S81: In response to the calibration tank being filled with the first gas, the first volume verification parameter of the calibration tank is obtained when the fourth valve is closed, and the volume of the calibration tank is the known first volume.

[0067] The first volume calibration parameters include the first pressure and the first temperature. When the gas mass flow verification system enters the initialization state, it sequentially controls the gas control valve VALSec, the first valve VAL1, the second valve VAL2, and the fourth valve VAL4 to open, and controls the third valve VAL3 to close. The first gas from the gas output module 103 is then transferred to the calibration tank, filling it with the first gas. When the pressure of the first volume reaches the preset standard pressure, the gas mass flow verification system controls the gas control valve VALSec, the first valve VAL1, and the fourth valve VAL4 to close, while the second valve VAL2 remains open, and controls the third valve VAL3 to open, causing the dry pump 130 to extract the first gas from the second volume V2 and the third volume V3. The preset standard pressure is customized by the designer based on engineering experience; for example, the preset standard pressure is 80 Torr.

[0068] Simultaneously, the second sensor detects pressure and temperature at the calibration tank, and the gas mass flow verification system acquires the pressure and temperature detected by the second sensor. When the gas mass flow verification system detects that the pressure of the first volume is in a stable state, the gas mass flow verification system saves the pressure and temperature collected by the second sensor at this time as the first volume calibration parameters.

[0069] Step S82: Obtain the second volume verification parameter that the first gas in the calibration tank diffuses only into the second volume, where the second volume is the volume formed between the second valve, the third valve, and the fourth valve.

[0070] When the first gas in the second volume V2 and the first gas in the third volume V3 are extracted by the dry pump 130, the second volume V2 gradually enters a vacuum state. In response to the second volume V2 entering a vacuum state, the gas mass flow verification system controls the first gas in the calibration tank to diffuse only into the second volume V2. After the first gas diffuses into the second volume V2, the calibration parameters of the second volume are detected at the calibration tank.

[0071] A first sensor is installed at the third volume V3. Both the second valve VAL2 and the third valve VAL3 are open, and the fourth valve VAL4 is closed. The second volume V2 and the third volume V3 are connected, and the first gas in both volumes is gradually extracted. The pressure collected by the first sensor indirectly reflects the residual gas situation in the second volume V2. The gas mass flow verification system detects whether the second volume V2 has entered a vacuum state based on the pressure collected by the first sensor. For example, when the pressure collected by the first sensor is less than or equal to a preset vacuum threshold, the gas mass flow verification system determines that the second volume V2 has entered a vacuum state.

[0072] When the second volume V2 enters a vacuum state, the gas mass flow verification system controls the fourth valve VAL4 to open and controls the second valve VAL2 and the third valve VAL3 to close. Therefore, the first gas from the first volume V1 can only diffuse into the second volume V2.

[0073] The second sensor is located at the calibration tank. With the fourth valve VAL4 open, the first volume V1 and the second volume V2 are connected. The gas mass flow verification system detects whether the first gas is in a stable state within the first and second volumes V1 based on the pressure collected by the second sensor. If it is in a stable state, the pressure and temperature of both the first and second volumes V1 and V2 are stable, and gas diffusion has reached equilibrium. When the gas mass flow verification system detects that the pressure in the first volume V1 is stable, it saves the pressure and temperature collected by the second sensor at this time as calibration parameters for the second volume.

[0074] The first volume calibration parameter and the second volume calibration parameter are the pressure and temperature detected by the second sensor under different operating conditions, respectively. The first volume calibration parameter includes the first pressure and the first temperature, and the second volume calibration parameter includes the second pressure and the second temperature. After steps S81 and S82, the gas mass flow verification system outputs the following equation based on Boyle's law:

[0075] Formula 1

[0076] Formula 2

[0077] in, This is the first pressure. The first temperature, This is the second pressure. The second temperature, The valve volume of the fourth valve, VAL4.

[0078] Combining equation one and equation two, we have:

[0079] Formula 3

[0080] Equation 3 can be combined with the equations below to obtain the valve volume of the fourth valve, VAL4. .

[0081] Step S83: Obtain the third volume calibration parameter of the first gas in the calibration tank diffused from the second volume to the third volume. The third volume is the volume formed between the first valve and the second valve.

[0082] When the diffusion of the first gas has reached equilibrium in the first and second volumes, the gas mass flow verification system controls the second valve VAL2 to open, allowing the first gas in the calibration tank to diffuse from the second volume V2 to the third volume V3. After the first gas in the calibration tank diffuses from the second volume V2 to the third volume V3, the calibration parameters of the third volume are detected at the calibration tank.

[0083] For example, the gas mass flow verification system controls the second valve VAL2 to open, while the fourth valve VAL4 remains open and the third valve VAL3 remains closed. The first gas in the calibration tank diffuses from the second volume V2 to the third volume V3. The gas mass flow verification system detects whether the first gas is in a stable state within the first volume V1, second volume V2, and third volume V3 based on the pressure collected by the second sensor. If it is in a stable state, the pressure and temperature of the first volume V1, the second volume V2, and the third volume V3 are all stable, and gas diffusion has reached equilibrium. When the gas mass flow verification system detects that the pressure in the first volume V1 is stable, it saves the pressure and temperature collected by the second sensor at this time as calibration parameters for the third volume.

[0084] The first volume calibration parameter, the second volume calibration parameter, and the third volume calibration parameter are the pressure and temperature detected by the second sensor under different operating conditions, respectively. The third volume calibration parameter includes the third pressure and the third temperature. After steps S81, S82, and S83, the gas mass flow verification system outputs the following equation based on Boyle's law:

[0085] Formula 4

[0086] Formula 5

[0087] in, This is the third pressure. The third temperature, This refers to the valve volume of the second valve, VAL2.

[0088] Combining equations four and five, we have:

[0089] Formula Six

[0090] In step S84, in response to the third volume being filled with the second gas, the fourth volume verification parameter corresponding to the third volume is obtained.

[0091] When the gas mass flow verification system executes step S84, it needs to re-enter the initialization state and then refill the third volume V3 with the second gas. It is understood that the second gas and the first gas can be the same gas or different gases.

[0092] In response to the third volume being filled with the second gas, obtaining the fourth volume verification parameter corresponding to the third volume includes the following steps: controlling both the first valve and the second valve to enter the open state so that the second gas from the gas output module fills the third volume; after the second gas fills the third volume, controlling both the first valve and the second valve to enter the closed state and setting both the first volume and the second volume to enter the vacuum state; after both the first valve and the second valve enter the closed state, detecting the fourth volume verification parameter at the third volume.

[0093] For example, in the gas mass flow verification system, the control valve VALSec, the first valve VAL1, and the second valve VAL2 are all in the open state, while the third valve VAL3 and the fourth valve VAL4 remain in the closed state. The second gas from the gas output module can diffuse into the fourth volume V4, the third volume V3, and the second volume V2. When the second gas fills the third volume V3 and the pressure of the third volume V3 is a preset standard pressure, the control valve VALSec, the first valve VAL1, and the second valve VAL2 are all in the closed state, while the control valves VAL3 and VAL4 are all in the open state, causing the dry pump 130 to extract the second gas from the first volume V1 and the second volume V2.

[0094] Simultaneously, the first sensor detects pressure and temperature at the third volume V3, and the gas mass flow verification system acquires the pressure and temperature detected by the first sensor. When the gas mass flow verification system detects that the pressure in the third volume V3 is in a stable state, the gas mass flow verification system saves the pressure and temperature collected by the first sensor at this time as the fourth volume verification parameters.

[0095] Step S85: Obtain the fifth volume verification parameter that the second gas in the third volume diffuses only into the second volume.

[0096] When the second gas in the second volume V2 is drawn out by the dry pump 130, the second volume V2 gradually enters a vacuum state. In response to the second volume V2 entering a vacuum state, the gas mass flow verification system controls the second valve VAL2 to switch from a closed state to an open state, so that the second gas in the third volume V3 diffuses only into the second volume V2, and the fifth volume verification parameter is detected at the third volume V3.

[0097] When both the first valve VAL1 and the second valve VAL2 are closed, and both the third valve VAL3 and the fourth valve VAL4 are open, the first volume V1 and the second volume V2 are connected. The first gas in the first volume V1 and the first gas in the second volume V2 are gradually extracted. The pressure collected by the first sensor indirectly reflects the residual gas situation in the second volume V2. The gas mass flow verification system detects whether the second volume V2 has entered a vacuum state by measuring the pressure collected by the first sensor. For example, when the pressure collected by the first sensor is less than or equal to a preset vacuum threshold, the gas mass flow verification system determines that the second volume V2 has entered a vacuum state.

[0098] When the second volume V2 enters a vacuum state, the gas mass flow verification system controls the second valve VAL2 to switch from the closed state to the open state, and controls the third valve VAL3 and the fourth valve VAL4 to switch from the open state to the closed state. Therefore, the second gas from the third volume V3 can only diffuse into the second volume V2.

[0099] With the second valve VAL2 open, the second volume V2 and the third volume V3 are connected. The gas mass flow verification system detects whether the second gas is in a stable state within the second volume V2 and the third volume V3 based on the pressure collected by the first sensor. If it is in a stable state, the pressure and temperature of both the second volume V2 and the third volume V3 are stable, and gas diffusion has reached equilibrium. When the gas mass flow verification system detects that the pressure in the third volume V3 is stable, it saves the pressure and temperature collected by the first sensor at this time as the fifth volume verification parameters.

[0100] The fourth, fifth, and sixth volume calibration parameters are the pressure and temperature detected by the first sensor under different operating conditions, respectively. The fourth volume calibration parameter includes the fourth pressure and the fourth temperature, and the fifth volume calibration parameter includes the fifth pressure and the fifth temperature.

[0101] After steps S84 and S85, the gas mass flow rate verification system outputs the following equation based on Boyle's law:

[0102] Formula 7

[0103] Formula 8

[0104] in, This is the fourth pressure. The fourth temperature, This is the fifth pressure. It is the fifth temperature. This refers to the valve volume of the second valve, VAL2.

[0105] Combining equations seven and eight, we have:

[0106] Formula Nine

[0107] Step S86: Obtain the sixth volume verification parameter for the diffusion of the second gas from the second volume to the first volume in the third volume.

[0108] When the diffusion of the second gas has reached equilibrium in the third and second volumes, the gas mass flow verification system responds to the vacuum state of the first volume V1 by controlling the fourth valve VAL4 to switch from the closed state to the open state, so that the second gas in the third volume V3 diffuses from the second volume V2 to the first volume V1, and the sixth volume verification parameter is detected at the third volume V3.

[0109] For example, when the diffusion of the second gas has reached equilibrium in the third and second volumes, the second valve VAL2 remains open, the first valve VAL1, the third valve VAL3 and the fourth valve VAL4 remain closed, and the first volume V1 has entered a vacuum state.

[0110] Next, the gas mass flow verification system controls the fourth valve VAL4 to open, allowing the second gas in the third volume V3 to diffuse from the second volume V2 to the first volume V1. The gas mass flow verification system uses the pressure data collected by the first sensor to detect whether the second gas is in a stable state within the first volume V1, second volume V2, and third volume V3. If it is in a stable state, the pressure and temperature of the first volume V1, the second volume V2, and the third volume V3 are all stable, indicating that gas diffusion has reached equilibrium. When the gas mass flow verification system detects that the pressure in the third volume V3 is stable, it saves the pressure and temperature data collected by the first sensor at this time as calibration parameters for the third volume.

[0111] The fourth, fifth, and sixth volume calibration parameters are the pressure and temperature detected by the first sensor under different operating conditions, respectively. The sixth volume calibration parameter includes the sixth pressure and the sixth temperature.

[0112] After steps S84, S85, and S86, the gas mass flow rate verification system outputs the following equation based on Boyle's law:

[0113] Formula 10

[0114] Formula 11

[0115] in, This is the sixth pressure. It is the sixth temperature.

[0116] Step S87: Based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter, determine the valve volume of the second valve and the valve volume of the fourth valve.

[0117] This application embodiment determines the valve volume of the second valve based on a first volume, a first volume verification parameter, a second volume verification parameter, a third volume verification parameter, a fourth volume verification parameter, and a sixth volume verification parameter. For example, this application embodiment determines the valve volume of the second valve according to the following formula, as shown below:

[0118] Formula Twelve

[0119] By combining equations 3, 6, 9, and 12, the valve volume of the second valve is obtained.

[0120] This application embodiment determines the valve volume of the fourth valve based on the first volume, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter. For example, this application embodiment determines the valve volume of the fourth valve according to the following formula, as shown below:

[0121] Formula Thirteen

[0122] By combining equations 3, 5, 10, and 13, the valve volume of the fourth valve is obtained.

[0123] To facilitate understanding of the valve volume determination method provided in the embodiments of this application, the embodiments of this application are combined with... Figure 8b The following is a detailed explanation of the method for determining the valve volume:

[0124] S801, the gas mass flow verification system enters the initialization state.

[0125] S802, open VALSec, VAL1, VAL2 and VAL4 respectively.

[0126] S803, after the pressure of the calibration tank reaches 80 Torr, close VALSec, VAL1 and VAL4 respectively, and open VAL3.

[0127] S804, after the state stabilizes, obtain the first volume verification parameter.

[0128] S805, wait until the third volume V3 is evacuated to a vacuum, then close VAL2 and VAL3, and open VAL4.

[0129] S806, wait for the state to stabilize, and obtain the second volume verification parameters.

[0130] S807, open VAL2, wait for the status to stabilize, and obtain the third volume verification parameter.

[0131] S808, the gas mass flow verification system has re-entered the initialization state.

[0132] S809, open VALSec, VAL1, and VAL2 respectively.

[0133] S8010, after the gas in the third volume V3 reaches 80 Torr, close VALSec, VAL1, and VAL2, and open VAL3 and VAL4.

[0134] S8011, waiting for the state to stabilize, obtain the fourth volume verification parameter.

[0135] S8012, wait until the second volume V2 is evacuated to a vacuum, then close VAL4 and VAL3, and open VAL2.

[0136] S8013, waiting for the state to stabilize, obtain the fifth volume verification parameter.

[0137] S8014, open VAL4, wait for the status to stabilize, and obtain the sixth volume verification parameter.

[0138] S8015, calculate the valve volume based on the above-mentioned volume verification parameters.

[0139] In summary, the embodiments of this application employ two measurement stages to obtain the volume calibration parameters of the gas mass flow verification system under different operating conditions. One measurement stage includes the first volume calibration parameter when the calibration tank is filled with the first gas, and the second and third volume calibration parameters when the first gas in the calibration tank diffuses into the second and third volumes in stages. The other measurement stage includes the fourth volume calibration parameter when the third volume is filled with the second gas, and the fifth and sixth volume calibration parameters when the second gas in the third volume diffuses into the second and first volumes in stages. Finally, based on the first volume, the first volume calibration parameters, the second volume calibration parameters, the third volume calibration parameters, the fourth volume calibration parameters, the fifth volume calibration parameters, and the sixth volume calibration parameters, the valve volumes of the second and fourth valves are accurately and reliably determined. In the subsequent gas flow calculation process, the valve volumes are no longer ignored, nor are they treated as empirical parameters. This helps to improve the accuracy of gas flow calculation, thereby meeting the high precision requirements of semiconductor processes. In high-precision semiconductor manufacturing processes, the method provided in this application is of particular value.

[0140] It should be noted that in the above embodiments, there is no necessarily a certain order between the steps. Those skilled in the art can understand from the description of the embodiments of this application that the above steps may have different execution orders in different embodiments, that is, they may be executed in parallel or in turn, etc.

[0141] As another aspect of the embodiments of this application, this application also provides a valve volume determination device. The valve volume determination device can be a software module, which includes several instructions stored in a memory. A processor can access the memory and execute the instructions to complete the valve volume determination method described in the various embodiments above.

[0142] In some embodiments, the valve volume determining device can also be constructed from hardware components. For example, the valve volume determining device can be constructed from one or more chips, which can work in coordination to complete the valve volume determining method described in the various embodiments above. As another example, the valve volume determining device can also be constructed from various logic devices, such as general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), microcontrollers, ARM (Acorn RISC Machine) or other programmable logic devices, discrete gate or transistor logic, discrete hardware components, or any combination of these components.

[0143] Please see Figure 9 The valve volume determination device 900 includes a first parameter acquisition module 91, a second parameter acquisition module 92, a third parameter acquisition module 93, a fourth parameter acquisition module 94, a fifth parameter acquisition module 95, a sixth parameter acquisition module 96, and a volume calculation module 97.

[0144] The first parameter acquisition module 91 is used to acquire a first volume verification parameter of the calibration tank when the fourth valve is closed, in response to the calibration tank being filled with a first gas, wherein the volume of the calibration tank is a known first volume; the second parameter acquisition module 92 is used to acquire a second volume verification parameter of the calibration tank where the first gas diffuses only into a second volume, wherein the second volume is the volume formed between the second valve, the third valve, and the fourth valve; the third parameter acquisition module 93 is used to acquire a third volume verification parameter of the calibration tank where the first gas diffuses from the second volume into the third volume, wherein the third volume is the volume formed between the first valve and the second valve; the fourth parameter acquisition module 94 is used to respond to Since the third volume has been filled with the second gas, a fourth volume verification parameter corresponding to the third volume is obtained; a fifth parameter acquisition module 95 is used to obtain a fifth volume verification parameter that the second gas in the third volume diffuses only into the second volume; a sixth parameter acquisition module 96 is used to obtain a sixth volume verification parameter that the second gas in the third volume diffuses from the second volume into the first volume; a volume calculation module 97 is used to determine the valve volume of the second valve and the valve volume of the fourth valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter.

[0145] In some embodiments, the second parameter acquisition module 92 is specifically configured to: in response to the second volume entering a vacuum state, control the first gas of the calibration tank to diffuse only into the second volume; and after the first gas diffuses into the second volume, detect the second volume calibration parameter at the calibration tank.

[0146] In some embodiments, the third parameter acquisition module 93 is specifically used to: control the second valve to enter the open state, so that the first gas in the calibration tank diffuses from the second volume to the third volume; after the first gas in the calibration tank diffuses from the second volume to the third volume, verify the parameter in the third volume at the calibration tank.

[0147] In some embodiments, the fourth parameter acquisition module 94 is specifically used to: control both the first valve and the second valve to enter the open state, so that the second gas from the gas output module fills the third volume; after the second gas fills the third volume, control both the first valve and the second valve to enter the closed state and set both the first volume and the second volume to enter the vacuum state; after both the first valve and the second valve enter the closed state, detect the fourth volume verification parameter at the third volume.

[0148] In some embodiments, the fifth parameter acquisition module 95 is specifically used to: control the second valve to switch from a closed state to an open state in response to the second volume entering a vacuum state, so that the second gas in the third volume diffuses only into the second volume; and detect the fifth volume verification parameter at the third volume.

[0149] In some embodiments, the sixth parameter acquisition module 96 is specifically used to: control the fourth valve to switch from a closed state to an open state in response to the third volume entering a vacuum state, so that the second gas in the third volume diffuses from the second volume to the first volume; and detect the sixth volume verification parameter at the third volume.

[0150] In some embodiments, the volume calculation module 97 is specifically used to: determine the valve volume of the second valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, and the sixth volume verification parameter; and determine the valve volume of the fourth valve based on the first volume, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter, and the sixth volume verification parameter.

[0151] In some embodiments, the pipeline space corresponding to the third volume is provided with a first sensing device, which is configured to detect pressure and temperature at the third volume. The third volume calibration parameter, the fourth volume calibration parameter, and the sixth volume calibration parameter are the pressure and temperature detected by the first sensing device under different operating conditions, respectively. The pipeline space corresponding to the first volume is provided with a second sensing device, which is configured to detect pressure and temperature at the calibration tank. The first volume calibration parameter, the second volume calibration parameter, and the third volume calibration parameter are the pressure and temperature detected by the first sensing device under different operating conditions, respectively.

[0152] It should be noted that, for the sake of simplicity and brevity, the valve volume determining device described above can execute the corresponding functional modules of the valve volume determining method provided in the embodiments of this application and achieve the corresponding beneficial effects. Technical details not described in detail in the embodiments of the valve volume determining device can be found in the valve volume determining method provided in the embodiments of this application. The specific working process of the valve volume determining device described above can also be found in the specific execution process corresponding to the valve volume determining method provided in the foregoing embodiments of this application, and will not be elaborated upon here.

[0153] This application also provides a computer-readable storage medium storing a computer program, the computer program including program instructions, which, when executed by a computer, cause the computer to perform the valve volume determination method as described in the foregoing embodiments.

[0154] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0155] The above-disclosed embodiments are merely preferred embodiments of this application and should not be construed as limiting the scope of this application. Therefore, any equivalent variations made in accordance with the claims of this application shall still fall within the scope of this application.

Claims

1. A valve volume determination method for a gas mass flow verification system, characterized by, The gas mass flow verification system comprises a calibration system, a calibration tank system and a dry pump, the calibration system comprises a first valve, a second valve and a third valve, the calibration tank system comprises a calibration tank and a fourth valve, an input end of the first valve is used for docking a gas output module, the gas output module is in communication connection with the calibration system, an output end of the first valve is in communication with an input end of the second valve, an output end of the second valve is respectively docked with an input end of the third valve and an input end of the fourth valve, an output end of the third valve is used for docking the dry pump, and an output end of the fourth valve is used for docking the calibration tank, the valve volume determination method comprises: in response to the calibration tank being filled with a first gas, obtaining a first volume verification parameter of the calibration tank when the fourth valve is in a closed state, the volume of the calibration tank being a known first volume; obtaining a second volume verification parameter of the first gas of the calibration tank diffusing only to a second volume, the second volume being a volume formed between the second valve, the third valve and the fourth valve, the obtaining of the second volume verification parameter of the first gas of the calibration tank diffusing only to the second volume comprising: in response to the second volume entering a vacuum state, controlling the first gas of the calibration tank to diffuse only to the second volume; after the first gas diffuses to the second volume, detecting a second volume verification parameter at the calibration tank; obtaining a third volume verification parameter of the first gas of the calibration tank diffusing from the second volume to a third volume, the third volume being a volume formed between the first valve and the second valve, the obtaining of the third volume verification parameter of the first gas of the calibration tank diffusing from the second volume to the third volume comprising: controlling the second valve to enter an open state, so that the first gas of the calibration tank diffuses from the second volume to the third volume; after the first gas of the calibration tank diffuses from the second volume to the third volume, detecting a third volume verification parameter at the calibration tank; in response to the third volume being filled with a second gas, obtaining a fourth volume verification parameter corresponding to the third volume; obtaining a fifth volume verification parameter of the second gas of the third volume diffusing only to the second volume; obtaining a sixth volume verification parameter of the second gas of the third volume diffusing from the second volume to the first volume; based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter and the sixth volume verification parameter, determining a valve volume of the second valve and a valve volume of the fourth valve.

2. The valve volume determination method according to claim 1, characterized in that The response to the third volume being filled with a second gas, obtaining a fourth volume verification parameter corresponding to the third volume, comprises: controlling the first valve and the second valve to enter an open state, so that the second gas of the gas output module fills the third volume; after the second gas in the third volume, control the first valve and the second valve to enter a closed state and set the first volume and the second volume to enter a vacuum state; after the first valve and the second valve enter a closed state, detect a fourth volume verification parameter at the third volume.

3. The valve volume determination method of claim 1, wherein, the fifth volume verification parameter of obtaining the second gas in the third volume diffusing to the second volume only, comprising: in response to the second volume entering a vacuum state, control the second valve to switch from a closed state to an open state, so that the second gas in the third volume diffuses to the second volume only; detect a fifth volume verification parameter at the third volume.

4. The valve volume determination method of claim 1, wherein, the sixth volume verification parameter of obtaining the second gas in the third volume diffusing to the first volume from the second volume, comprising: in response to the first volume entering a vacuum state, control the fourth valve to switch from a closed state to an open state, so that the second gas in the third volume diffuses to the first volume from the second volume; detect a sixth volume verification parameter at the third volume.

5. The valve volume determination method according to any one of claims 1 to 4, characterized in that, the valve volume of the second valve and the valve volume of the fourth valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter and the sixth volume verification parameter, comprising: determine the valve volume of the second valve based on the first volume, the first volume verification parameter, the second volume verification parameter, the third volume verification parameter, the fourth volume verification parameter and the sixth volume verification parameter; determine the valve volume of the fourth valve based on the first volume, the third volume verification parameter, the fourth volume verification parameter, the fifth volume verification parameter and the sixth volume verification parameter.

6. The valve volume determination method according to any one of claims 1 to 4, characterized in that: the pipeline space corresponding to the third volume is provided with a first sensing device configured to detect pressure and temperature at the third volume, and the fourth volume verification parameter, the fifth volume verification parameter and the sixth volume verification parameter are respectively the pressure and temperature detected by the first sensing device in different working states; the pipeline space corresponding to the first volume is provided with a second sensing device configured to detect pressure and temperature at the calibration tank, and the first volume verification parameter, the second volume verification parameter and the third volume verification parameter are respectively the pressure and temperature detected by the second sensing device in different working states.

7. A controller characterized by comprising: a memory and a processor, the memory being connected to the processor, the processor being used to execute one or more computer programs stored in the memory, and the processor, when executing the one or more computer programs, causing the controller to implement the valve volume determination method of the gas mass flow verification system according to any one of claims 1 to 6.

8. A gas mass flow verification system characterized by, The calibration system comprises a first valve, a second valve, a third valve and a controller as claimed in claim 7, the calibration tank system comprises a calibration tank and a fourth valve, an input end of the first valve is used for docking a gas output module, an output end of the first valve is communicated with an input end of the second valve, output ends of the second valve are respectively docked with input ends of the third valve and the fourth valve, an output end of the third valve is used for docking the dry pump, an output end of the fourth valve is used for docking the calibration tank, and the controller is respectively connected in communication with the first valve, the second valve, the third valve, the fourth valve and the gas output module.

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