Wide-temperature-zone temperature control platform

Abstract

The wide-temperature-zone temperature control platform comprises a vacuum chamber, a cold plate is fixedly arranged in the vacuum chamber, a concave containing groove is formed in the top of the cold plate, and the cross section of the concave containing groove is in an arc shape; the cold plate is internally provided with flow channels which are distributed in an S shape, a flow channel inlet and a flow channel outlet are located outside the cold plate and provided with flow channel connectors, one of the flow channel inlet connector and the flow channel outlet connector is a flow channel outlet connector, and the flow channel inlet connector and the flow channel outlet connector are connected with a refrigerating machine through connecting pipes respectively; a heating film is arranged on the cold plate, a temperature sensor is arranged on the concave face of the concave containing groove, and the heating film and the temperature sensor are connected with a temperature control circuit. When the temperature of the concave placing groove is lower than the set temperature, the temperature control circuit controls the heating film to work, and when the temperature of the concave placing groove is higher than the set temperature, the heating film stops working, so that the temperature of the concave placing groove is stabilized at the set temperature.

Description

TECHNICAL FIELD

[0001] The present application relates to temperature control technology field, specifically relates to a wide temperature range temperature control platform. BACKGROUND

[0002] Ultra-stable laser is a laser with extremely narrow linewidth and extremely high frequency stability, which is an important tool for high-precision verification of physical laws, detection of gravitational waves, and precision measurement experiments such as optical clocks. In order to obtain ultra-stable laser, researchers usually use active frequency stabilization to stabilize the laser frequency at the reference frequency; PDH frequency stabilization is one of the important ways to obtain ultra-stable laser.

[0003] PDH frequency stabilization technology is a technology that stabilizes the laser frequency by locking it to the resonance of an ultra-stable and high-precision F-P reference cavity. The F-P reference cavity is composed of two parallel mirrors, and the light vertically incident to the F-P reference cavity forms a stable light field distribution after multiple reflections. The transmission coefficient of the light field intensity is a periodic function of the light field frequency. In the PDH frequency stabilization technology, the stability of the laser frequency is equivalent to the stability of the reference cavity length, which is mainly determined by the vibration sensitivity and temperature sensitivity of the reference cavity length. The long-term stability of the laser frequency depends on the temperature sensitivity of the reference cavity length. In order to achieve long-term stability of the laser frequency, precise temperature control is usually used to reduce the fluctuation of the environment temperature.

[0004] With the development of science and technology, many scientific research work needs to be carried out in a stable vacuum low-temperature environment. The traditional precise temperature control system usually operates above room temperature, and it is difficult to realize temperature control in a low-temperature environment. Therefore, it is an urgent scientific problem to develop a high-stability, high-universality wide-temperature-range temperature control platform. SUMMARY

[0005] In order to overcome the shortcomings of the prior art, the present application provides a high-stability wide-temperature-range temperature control platform. The above-mentioned purpose of the present application is realized by the following technical means:

[0006] A wide-temperature-range temperature control platform, comprising a vacuum chamber, a cold plate is fixedly arranged in the vacuum chamber, and a concave placement groove is arranged on the top of the cold plate, the cross section of the concave placement groove is arc-shaped; a serpentine flow channel is arranged inside the cold plate, the flow channel inlet and the flow channel outlet are located outside the cold plate and are both provided with flow channel connectors, one of which is a flow channel inlet connector and the other is a flow channel outlet connector, the flow channel inlet connector and the flow channel outlet connector are both connected with a refrigerator through a connecting pipe; a heating film is arranged on the cold plate, a temperature sensor is arranged on the concave surface of the concave placement groove, and the heating film and the temperature sensor are connected with a temperature control circuit respectively.

[0007] The temperature sensor is a thin-film thermistor.

[0008] When the temperature of the concave placing groove is lower than the set temperature, the temperature control circuit controls the working of the heating film, and when the temperature of the concave placing groove is higher than the set temperature, the heating film stops working.

[0009] The four sides of the cold plate are provided with heating films, and the heating films on each side are connected with the temperature control circuit.

[0010] The connecting pipe is a prestressed corrugated pipe, and the inner diameter of the connecting pipe is the same as the diameter of the flow channel.

[0011] The refrigerant in the refrigerating machine is anhydrous ethanol.

[0012] The vacuum chamber bottom wall and the cold plate are provided with a plurality of pads.

[0013] The pad includes a pad fixing part and a pad bearing part connected together, the pad fixing part is fixedly connected with the bottom of the vacuum chamber, and the cold plate is arranged on the pad bearing part and fixedly connected with the pad bearing part.

[0014] The groove top cover of the concave placing groove is provided with a cover plate, and the both end covers of the concave placing groove are provided with side plates.

[0015] Compared with the prior art, the present application has the following beneficial effects:

[0016] 1. All devices of the present application are placed in the vacuum chamber, so that all physical processes involved in the present application are carried out in a vacuum environment, realizing temperature control in a low temperature range in a vacuum environment; at the same time, the vacuum environment can reduce the sensitivity of the temperature control platform to external temperature fluctuations and vibrations.

[0017] 2. The refrigerating machine of the present application works continuously, so that the temperature of the cold plate and the concave placing groove is lowered, and the heating film block works intermittently, so that the temperature of the cold plate and the concave placing groove is raised, and through the joint action of the uninterrupted working of the refrigerant and the intermittent working of the heating film, the temperature of the wide temperature range temperature control platform is maintained at the set temperature.

[0018] 3. When alcohol is used as the refrigerant, by setting different set temperatures, the present application can realize precise temperature control from minus 60 DEG C to plus 80 DEG C.

[0019] 4. The setting of the pad can reduce the contact area of the cold plate and the vacuum chamber, and further improve the temperature control precision. DETAILED DESCRIPTION

[0020] Figure 1 is a schematic diagram of the three-dimensional structure of the present application;

[0021] Figure 2 is a schematic diagram of the three-dimensional structure of the cold plate;

[0022] Figure 3 is a schematic diagram of the structure of the flow channel provided in the cold plate;

[0023] Figure 4 Connection diagram of flow channel, flow channel joint, connecting pipe and refrigerator;

[0024] Figure 5 Connection diagram of heating film, temperature sensor and temperature control circuit;

[0025] Figure 6 Structure diagram of cushion block;

[0026] Among them, 1-cold plate, 2-concave placement groove, 3-flow channel joint, 4-flow channel, 5-cover plate, 6-side plate, 7-refrigerator, 8-connecting pipe, 9-temperature control circuit, 10-heating film, 11-temperature sensor, 12-cushion block, 13-vacuum chamber, 14-cushion block fixing part, 15-cushion block bearing part. DETAILED DESCRIPTION

[0027] In order to facilitate those skilled in the art to understand and implement the present application, the present application will be further described in detail below in combination with the embodiments. It should be understood that the embodiments described herein are only used to illustrate and explain the present application, and are not used to limit the present application.

[0028] Embodiment 1:

[0029] As shown in Figure 1 A wide temperature range temperature control platform, comprising a cold plate 1, the top of the cold plate 1 is provided with a concave placement groove 2, the cross section of the concave placement groove 2 is arc-shaped, the concave placement groove 2 is used for placing the target to be temperature controlled, the cold plate 1 is internally provided with a serpentine flow channel 4, the flow channel inlet and the flow channel outlet are located outside the cold plate 1 and are both provided with a flow channel joint 3, one is a flow channel inlet joint and the other is a flow channel outlet joint. The flow channel inlet joint and the flow channel outlet joint are both connected with a refrigerator 7 through a connecting pipe 8, under the action of the refrigerator 7, the heat carrier flows out from the refrigerator 7, enters the flow channel 4 from the inlet joint through the connecting pipe 8 connected with the inlet joint, and flows in the flow channel 4, then flows out from the outlet joint through the connecting pipe 8 connected with the outlet joint, and finally returns to the refrigerator 7, forming a circulating flow of the heat carrier, so as to realize the refrigeration of the cold plate 1.

[0030] The cold plate 1 is provided with a heating film 10, and the concave surface of the concave placing groove 2 is provided with a temperature sensor 11. The heating film 10 and the temperature sensor 11 are connected with a temperature control circuit 9. The temperature control circuit 9 monitors the temperature of the concave placing groove 2 in real time through the temperature sensor 11. When the temperature of the concave placing groove 2 is lower than the set temperature, the temperature control circuit 9 controls the heating film 10 to work. When the temperature of the concave placing groove 2 is higher than the set temperature, the heating film 10 stops working. Since the concave placing groove 2 is integrally arranged with the cold plate 1, the cold plate 1 is always in a refrigeration state under the circulation of the cooling medium. When the heat generated by the heating film 10 is greater than the heat taken away from the cold plate 1 by the cooling medium, the temperature of the cold plate 1 rises. Since the concave placing groove 2 is integrally arranged with the cold plate 1, the temperature of the concave placing groove 2 also rises. After the heating film 10 stops working, the temperature of the concave placing groove 2 decreases along with the cold plate 1. Through uninterrupted refrigeration of the cold plate 1 and intermittent heating of the heating film 10, the temperature of the concave placing groove 2 is stabilized at the set temperature, so that the precise temperature control of the temperature control platform is realized.

[0031] In the embodiment, the temperature sensor 11 is a thin-film type thermistor.

[0032] Further, in order to realize faster heating of the cold plate 1, the heating film 10 is arranged on each of the four sides of the cold plate 1, and the heating film 10 on each side is connected with the temperature control circuit 9.

[0033] In some embodiments, the connecting pipe 8 is a prestressed corrugated pipe, which can reduce the displacement of the cold plate caused by stress changes.

[0034] Further, the inner diameter of the connecting pipe 8 is the same as the diameter of the flow channel 4, so that the flow of the cooling medium is smoother.

[0035] In some embodiments, the cooling medium is anhydrous ethanol, which can realize a temperature control range of the temperature control platform of-60℃~80℃, and a temperature control precision of less than 1mk, so that the temperature control platform is a wide-temperature-range temperature control platform.

[0036] In some embodiments, the cold plate 1 is arranged inside the vacuum chamber 13 and located at the bottom of the vacuum chamber 13. The vacuum chamber 13 is provided with a vacuum interface connected with a vacuum pump. The temperature control platform works in a vacuum environment, which can reduce the influence of external environmental temperature fluctuations and vibrations on the temperature control platform.

[0037] Further, in order to reduce the heat transfer between the cold plate 1 and the bottom wall of the vacuum chamber 13, a plurality of pads 12 are arranged between the cold plate 1 and the bottom wall of the vacuum chamber 13.

[0038] The cushion block 12 comprises a cushion block fixing part 14 and a cushion block bearing part 15, the cushion block fixing part 14 and the cushion block bearing part 15 are connected, the cushion block fixing part 14 is fixedly connected with the bottom of the vacuum chamber 13 (by screw connection, which is common, and is not described in detail), the cold plate 1 is arranged on the cushion block bearing part 15 and is fixedly connected with the cushion block bearing part 15 (by screw connection, which is common, and is not described in detail), by arranging a plurality of cushion blocks 12, the contact area of the cold plate 1 and the vacuum chamber 13 is reduced, thereby reducing the heat transfer between the cold plate 1 and the vacuum chamber 13.

[0039] Further, in order to realize better heat transfer between the target to be temperature-controlled and the concave placement groove 2, the groove top cover of the concave placement groove 2 is provided with a cover plate 5, and the two end covers of the concave placement groove 2 are provided with side plates 6, the arrangement of the cover plate 5 and the side plates 6 can increase the contact area of the target to be temperature-controlled and the concave placement groove 2, thereby realizing better heat transfer between the target to be temperature-controlled and the concave placement groove 2.

[0040] It should be noted that the embodiments described in the present application are only examples illustrating the spirit of the present application. Those skilled in the art to which the present application belongs can make various modifications or supplements to the described embodiments or replace them with similar ways, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.

Claims

1. A wide-temperature-range temperature control platform, comprising a vacuum chamber (13), characterized in that, A cold plate (1) is fixedly installed inside the vacuum chamber (13), and a concave placement groove (2) is provided on the top of the cold plate (1). The cross-section of the concave placement groove (2) is arc-shaped. A serpentine flow channel (4) is provided inside the cold plate (1). The flow channel inlet and flow channel outlet are located outside the cold plate (1) and are both provided with flow channel connectors (3). One of them is the flow channel inlet connector and the other is the flow channel outlet connector. The flow channel inlet connector and the flow channel outlet connector are respectively connected to the refrigerator (7) through the connecting pipe (8). A heating film (10) is provided on the cold plate (1). A temperature sensor (11) is provided on the concave surface of the concave placement groove (2). The heating film (10) and the temperature sensor (11) are respectively connected to the temperature control circuit (9).

2. The wide-temperature-range temperature control platform according to claim 1, characterized in that, The temperature sensor (11) is a thin-film thermistor.

3. The wide-temperature-range temperature control platform according to claim 2, characterized in that, When the temperature of the concave placement groove (2) is lower than the set temperature, the temperature control circuit (9) controls the heating film (10) to work. When the temperature of the concave placement groove (2) is higher than the set temperature, the heating film (10) stops working.

4. The wide-temperature-range temperature control platform according to claim 1, characterized in that, Heating films (10) are provided on all four sides of the cold plate (1), and each heating film (10) on each side is connected to the temperature control circuit (9).

5. A wide-temperature-range temperature control platform according to claim 1, characterized in that, The connecting pipe (8) is a prestressed corrugated pipe, and the inner diameter of the connecting pipe (8) is the same as the diameter of the flow channel (4).

6. A wide-temperature-range temperature control platform according to claim 1, characterized in that, The refrigerant in the refrigeration unit (7) is anhydrous ethanol.

7. A wide-temperature-range temperature control platform according to claim 1, characterized in that, Multiple pads (12) are provided between the bottom wall of the vacuum chamber (13) and the cold plate (1).

8. A wide-temperature-range temperature control platform according to claim 7, characterized in that, The pad (12) includes a pad fixing part (14) and a pad bearing part (15) connected together. The pad fixing part (14) is fixedly connected to the bottom of the vacuum chamber (13). The cold plate (1) is disposed on the pad bearing part (15) and fixedly connected to the pad bearing part (15).

9. A wide-temperature-range temperature control platform according to claim 1, characterized in that, The concave placement groove (2) is covered with a cover plate (5) on the top and side plates (6) are covered at both ends.

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