A large-aperture radio frequency ion source structure with angle adjustment function

Abstract

This invention belongs to the field of radio frequency plasma and large-aperture coating ion source (ICP) technology, specifically relating to a large-aperture radio frequency ion source structure with angle adjustment function, including a vacuum-side component and an atmospheric-side component; the side of the radio frequency source housing is rotatably connected to a rotating shaft disk, which is fixedly connected to a connecting box base; bolts passing through oblong holes fix the relative positions of the rotating shaft disk and the radio frequency source housing; a radio frequency coil is installed inside the radio frequency source housing. This solution utilizes the characteristic that radio frequency output cables are less likely to form ineffective feed sections in an atmospheric environment, and wiring is carried out through a connecting cavity (d) in the connecting box base, which belongs to the atmospheric-side environment. The radio frequency output cable is more exposed to the atmospheric environment and less exposed to the vacuum environment; the rotation of the radio frequency source housing is independent of the shape and length of the cable, reducing the formation of ineffective feed sections. The connecting box sealing cover and the connecting box base adopt an inclined installation structure, making operation more convenient; a compression fitting is used, which has a good high-temperature sealing effect.

Description

Technical Field

[0001] This invention belongs to the field of radio frequency plasma and ICP technology for large-aperture coating, specifically relating to a large-aperture radio frequency ion source structure with angle adjustment function. Background Technology

[0002] Existing radio frequency (RF) ion sources typically consist of components such as an RF source, an automatic impedance matching circuit, a feed cable, an RF oscillating transmitting coil, an RF discharge chamber, a plasma screening system, and an ion beam accelerating grid. Figure 4 As shown. To ensure stable power and efficient transmission of effective power from the radio frequency ion source, high requirements are placed on the radio frequency cable between the radio frequency automatic matching unit and the transmitting coil.

[0003] The effective feed section of an RF cable typically refers to the segment that effectively feeds the RF signal into the RF ion source. The length of this effective feed section is crucial for power stability and efficient power transmission. Conversely, an ineffective feed section refers to a portion of the RF cable that, for various reasons, cannot effectively transmit the RF signal or severely negatively impacts signal transmission quality. Ineffective feed sections will affect effective power and beam current stability, preventing the RF ion source from operating stably for extended periods.

[0004] For radio frequency ion sources operating under high radio frequency power conditions, the ineffective feed section will produce a strong ionization discharge phenomenon. The specific discharge mechanism is mainly caused by the fact that there may be a certain local high pressure on the outside of the ineffective feed cable section under vacuum conditions, which leads to partial discharge of the coil, resulting in impedance matching fluctuations that affect the discharge of the radio frequency source and affect the stability of the ion beam.

[0005] Therefore, it is necessary to design a large-aperture radio frequency ion source structure that can reduce ineffective feed sections. Summary of the Invention

[0006] To address the aforementioned problems in existing technologies, this solution provides a large-aperture radio frequency ion source structure with angle adjustment functionality.

[0007] The technical solution adopted in this invention is as follows:

[0008] A large-aperture radio frequency ion source structure with angle adjustment function includes a vacuum side component and an atmospheric side component;

[0009] The vacuum-side assembly is disposed within the vacuum chamber and includes a radio frequency (RF) source housing and a connecting box. An RF coil is disposed within the RF source housing, and RF ionization discharge is performed by the RF coil. The connecting box is sealed and fixed to the cavity wall of the vacuum chamber, and one side of the RF source housing is rotatably connected to the connecting box via a rotating shaft.

[0010] The atmospheric side component includes an RF power supply and an RF automatic matching unit; the RF power supply is connected to the RF automatic matching unit via an RF input cable; the output of the RF automatic matching unit is connected to an RF output cable.

[0011] The connection cavity inside the connection box is connected to the atmospheric environment; the radio frequency output cable is routed through the connection cavity and electrically connected to the radio frequency coil.

[0012] Optional: An RF insulated vacuum feed connector is inserted into the rotating shaft disk, one end of the RF insulated vacuum feed connector extends into the connecting cavity and is connected to an RF connecting connector, and one end of the RF insulated vacuum feed connector is electrically connected to the RF coil; the RF output cable is electrically connected to the RF connecting connector in the connecting cavity.

[0013] Optional: Multiple radio frequency insulated vacuum feed connectors are inserted into the rotating shaft disk.

[0014] Optionally: the connecting cavity has an oblique opening; a triangular connecting box sealing cover is provided at the oblique opening of the connecting cavity.

[0015] Optionally: the beveled opening is tilted toward the side opposite to the RF source housing.

[0016] Optionally: one side of the RF source housing is rotatably connected to the rotating shaft disk, and the rotating shaft disk is fixedly connected to the connecting box base; the rotating shaft disk or the RF source housing is provided with an oblong hole, and bolts passing through the oblong hole fix the relative position of the rotating shaft disk and the RF source housing.

[0017] Optionally: A gas splitter is provided at the center of the radio frequency coil, which is used to split and eject the process gas; the input end of the gas splitter is connected to an insulating gas filling connector, and a gas filling connection connector is installed at the bottom center of the radio frequency source housing. The gas filling connection connector and the insulating gas filling connector are connected by a pipe, and both adopt compression fittings.

[0018] Optionally: The interior of the RF source housing is provided with a coil insulating base and a coil fixing frame, the RF coil is disposed on the coil insulating base, and the coil insulating base is fixedly connected to the RF source housing through the coil fixing frame.

[0019] Optionally: The top of the RF source housing is provided with an arched grid.

[0020] The beneficial effects of this invention are as follows:

[0021] 1. This solution utilizes the characteristic that RF output cables are less likely to form invalid feed sections in an atmospheric environment. The wiring is carried out through the connection cavity in the connection box, and the connection cavity is in the atmospheric environment, so that the RF output cable is more in the atmospheric environment and less in the vacuum environment, thus reducing invalid feed sections.

[0022] 2. In this solution, the rotating shaft disk or the RF source housing is connected by a slotted hole and corresponding bolts, which facilitates the fixing after the relative angle of the two is adjusted. The source angle can be adjusted without changing the shape of the cable.

[0023] 3. This solution connects to the RF coil via an RF connection connector and an RF insulation vacuum feed connector. The two connectors are located on a rotating disk, so that the rotation of the RF source housing is independent of the shape and length of the cable. This eliminates the need to design redundancy for the RF output cable on the vacuum side and reduces the generation of ineffective feed sections.

[0024] 3. The connector box sealing cover and the connector box base adopt an inclined installation structure, which makes the operation inside the connector box base more convenient, and at the same time reduces the interference and restriction of the connector box base on the position adjustment of the RF source housing.

[0025] 4. Both the inflation connector and the insulating inflation connector use compression fittings, which facilitates matching the pipe lengths between the two after adjusting the position of the RF source housing, resulting in better high-temperature sealing. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this scheme or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0027] Figure 1 This is an internal structural diagram of the large-aperture radio frequency ion source structure in this scheme;

[0028] Figure 2 This is a three-dimensional structural diagram of the large-aperture radio frequency ion source structure in this scheme;

[0029] Figure 3 This is a diagram of the internal structure of the radio frequency source housing;

[0030] Figure 4 This is a schematic diagram of the existing large-aperture radio frequency ion source structure.

[0031] In the diagram: 1-RF power supply; 2-RF automatic matching unit; 3-RF input cable; 4-RF output cable; 5-RF source housing; 6-rotating shaft; 7-RF insulated vacuum feed connector; 8-RF coil; 9-grid; 10-insulated gas filling connector; 11-RF connection connector; 12-gas filling connection connector; 13-coil holder; 14-coil insulation seat; 15-gas shunt; 16-connector box sealing cover; 17-connector box base; 18-vacuum side ineffective feed section; 19-atmospheric feed section. Detailed Implementation

[0032] The technical solutions in this embodiment will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are only a part of the embodiments, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments in this solution without creative effort are within the protection scope of this solution.

[0033] Example

[0034] like Figures 1 to 3 As shown, this embodiment designs a large-aperture radio frequency ion source structure with angle adjustment function, including a vacuum side component and an atmospheric side component.

[0035] The vacuum side assembly is disposed inside the vacuum cavity and includes an RF source housing 5 and a connector base 17.

[0036] The RF source housing 5 has a cylindrical structure, and an RF coil 8 is installed inside the RF source housing 5. The RF coil 8 can generate RF ionization discharge. A connecting box 17 and a rotating seat are respectively provided on both sides of the RF source housing 5.

[0037] The side of the radio frequency source housing 5 is rotatably connected to the rotating shaft disk 6, and the other side is rotatably connected to the rotating base. The two rotation points on both sides of the radio frequency ion source are located on the same axis. The radio frequency source housing 5 can rotate slightly around its rotatably connected parts. The rotation angle is small, generally ±5°.

[0038] The connecting box 17 is fixed to the wall of the vacuum chamber. The rotating shaft 6 is fixedly connected to the connecting box 17. A slotted hole is provided on the rotating shaft 6 or the RF source housing 5. A bolt passes through the slotted hole and is threaded into the other of the rotating shaft 6 and the RF source housing 5, thus fixing the relative position of the rotating shaft 6 and the RF source housing 5. There can be multiple slotted holes, and multiple bolts are used for fixing. The bolts passing through the slotted holes fix the relative position of the rotating shaft 6 and the RF source housing 5. The entire rotation process does not easily affect the RF output cable, and the angle adjustment of the source (RF ion source) can be completed without changing the cable shape.

[0039] The atmospheric side components include an RF power supply 1 and an RF automatic matching unit 2.

[0040] The RF power supply 1 is connected to the RF automatic matching unit 2 via the RF input cable 3; the output end of the RF automatic matching unit 2 is connected to the RF output cable 4, and the RF output cable 4 is electrically connected to the RF coil 8.

[0041] An RF insulated vacuum feed connector 7 is inserted into the rotating shaft disk 6, and multiple RF insulated vacuum feed connectors 7 can be inserted into the rotating shaft disk 6. One end of the RF insulated vacuum feed connector 7 located outside the RF source housing 5 is connected to an RF connector 11. The RF output cable 4 is electrically connected to the RF coil 8 through the RF connector 11 and the RF insulated vacuum feed connector 7, and the RF coil 8 performs RF ionization discharge. In this scheme, the RF coil 8 is connected through the RF connector 11 and the RF insulated vacuum feed connector 7. The rotation structure of the two connectors and the rotation of the RF source housing 5 are independent of the shape and length of the cable, thereby reducing the formation of ineffective feed sections.

[0042] The connector housing 17 has a connector cavity with a slanted opening; a triangular connector housing sealing cover 16 is provided at the slanted opening of the connector cavity; the RF output cable 4 is routed through the connector cavity. The slanted opening is inclined towards the side opposite to the RF source housing 5. The connector housing sealing cover 16 and the connector housing 17 adopt a slanted mounting structure, which makes operation within the connector housing 17 more convenient, and at the same time reduces the interference and restriction of the connector housing 17 on the position adjustment of the RF source housing 5.

[0043] The connection cavity within the connection box 17 is connected to the atmospheric environment; the RF output cable 4 is routed through the connection cavity and then electrically connected to the RF coil 8. Taking advantage of the characteristic that the RF output cable is less likely to form an ineffective feed section in the atmospheric environment, the wiring is routed through the connection cavity within the connection box, which is part of the atmospheric environment. This allows the RF output cable to be more exposed to the atmospheric environment and less exposed to the vacuum environment, thus reducing ineffective feed sections.

[0044] A gas splitter 15 is located at the center of the RF coil 8, which is used to divert and eject process gas. An insulated inflation connector 10 is connected to the input end of the gas splitter 15. An inflation connector 12 is installed at the center of the bottom of the RF source housing 5. The inflation connector 12 and the insulated inflation connector 10 are connected by a pipe, and both use compression fittings. This facilitates matching the pipe lengths between the two after adjusting the position of the RF source housing 5, resulting in better high-temperature sealing. Compared with the traditional nut sealing method, this reduces process gas leakage, and the compression fitting structure has higher adaptability to high-temperature environments, improving high-temperature resistance.

[0045] The radio frequency source housing 5 is provided with a coil insulating base 14 and a coil fixing frame 13 inside. The radio frequency coil 8 is disposed on the coil insulating base 14, and the coil insulating base 14 is fixedly connected to the radio frequency source housing 5 through the coil fixing frame 13.

[0046] The top of the radio frequency source housing 5 is provided with an arched grid 9. The grid 9 is used for plasma screening and ion beam acceleration.

[0047] Existing radio frequency ion source structures, such as Figure 4 As shown, it consists of components such as an RF ion source, an RF automatic matching unit 2, a feed cable, an RF coil 8, an RF discharge chamber, a plasma screen, and an ion beam acceleration grid 9. The portion of the feed cable located inside the RF discharge chamber (i.e., the vacuum chamber) can be defined as the vacuum feed section. Due to reasons such as the excessive length of the vacuum feed section, an ineffective feed section is easily formed at the vacuum feed section. The portion of the feed cable located outside the RF discharge chamber (i.e., the atmospheric side) can be defined as the atmospheric feed section 19.

[0048] This solution mounts the RF source housing 5 to the wall of the vacuum chamber, effectively shortening the feed cable length and reducing the likelihood of ineffective feed segments. Furthermore, the RF coil 8 is connected via the RF connector 11 and the RF insulated vacuum feed connector 7. The rotation of both connectors and the RF source housing 5 is independent of the cable's shape and length, further minimizing the formation of ineffective feed segments.

[0049] The working principle of the large-aperture radio frequency ion source structure in this embodiment is as follows:

[0050] The RF power supply 1 delivers RF energy to the RF automatic matching unit 2 via the RF input cable 3. The RF automatic matching unit 2 matches the RF network impedance value to the standard value by adjusting the corresponding capacitors and inductors. Then, it inputs the RF energy of the corresponding power to the RF coil 8 via the RF output cable 4 (atmospheric side). The RF insulation vacuum feed connector 7 can insulate the RF energy delivered to the RF coil 8 and the RF ion source housing. That is, the insulation part of the RF insulation vacuum feed connector 7 can achieve insulation of the RF ion source housing.

[0051] Testing revealed that in the structure of this embodiment, there is no invalid vacuum side transition distance from the entire RF feed to the RF coil 8, thus avoiding the formation of an invalid feed section, reducing the risk of discharge, and improving power transfer efficiency.

[0052] The angle adjustment principle of the RF source: The RF source operates in a vacuum environment to etch or assist in deposition of products. Different uniformity requirements need to be met under different working conditions, necessitating angle adjustment to satisfy the uniformity requirements of the specific process. Traditional RF sources often require an ineffective transition section in the RF vacuum chamber in conjunction with its angle adjustment mechanism. When the required adjustment angle is too large, the RF cable of the ineffective section needs to be longer (RF cables are generally copper tubes, which are not easily deformed, hence the longer length). This also results in an excessively long distance for the RF ineffective section, increasing the risk of discharge. The impact on the atmospheric side of the RF section is generally small because its atmospheric environmental impedance is high, making ionization discharge less likely. This solution's angle adjustment principle involves a rotating shaft disk 6 connected to a fixed flange on the RF source housing 5. Through a pre-drilled elongated hole on the outer circumference of the fixed flange, the bolts can move slightly relative to the fixed flange, thus achieving RF source angle adjustment. During adjustment, first loosen the corresponding bolts, and after reaching the required angle, tighten the bolts to complete one RF source angle adjustment.

[0053] The above embodiments are merely illustrative examples and are not intended to limit the implementation; it is neither necessary nor possible to exhaustively list all possible implementations. However, obvious variations or modifications derived therefrom remain within the scope of this technology.

Claims

1. A large-aperture radio frequency ion source structure with angle adjustment function, characterized in that: Includes vacuum-side components and atmospheric-side components; The vacuum side assembly is disposed in the vacuum cavity and includes a radio frequency source housing (5) and a connecting box (17); a radio frequency coil (8) is disposed in the radio frequency source housing (5) and radio frequency ionization discharge is performed by the radio frequency coil (8); the connecting box (17) is sealed and fixed on the cavity wall of the vacuum cavity, and one side of the radio frequency source housing (5) is rotatably connected to the connecting box (17) through a rotating shaft disk (6); The atmospheric side component includes an RF power supply (1) and an RF automatic matching unit (2); the RF power supply (1) is connected to the RF automatic matching unit (2) via an RF input cable (3); the output end of the RF automatic matching unit (2) is connected to an RF output cable (4). The connection cavity inside the connection box (17) is connected to the atmospheric environment; the radio frequency output cable (4) is routed through the connection cavity and electrically connected to the radio frequency coil (8).

2. The large-aperture RF ion source structure with angle adjustment function according to claim 1, characterized in that: A radio frequency insulated vacuum feed connector (7) is inserted into the rotating shaft disk (6). One end of the radio frequency insulated vacuum feed connector (7) extends into the connection cavity and is connected to a radio frequency connection connector (11). One end of the radio frequency insulated vacuum feed connector (7) is electrically connected to the radio frequency coil (8). The radio frequency output cable (4) is electrically connected to the radio frequency connection connector (11) in the connection cavity.

3. The large-aperture RF ion source structure with angle adjustment function according to claim 1, characterized in that: Multiple radio frequency insulated vacuum feed connectors (7) are inserted into the rotating shaft disk (6).

4. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 1, characterized in that: The connecting cavity has an oblique opening; a triangular connecting box sealing cover (16) is provided at the oblique opening of the connecting cavity.

5. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 4, characterized in that: The oblique opening is tilted toward the side opposite to the radio frequency source housing (5).

6. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 1, characterized in that: One side of the RF source housing (5) is rotatably connected to the rotating shaft disk (6), and the rotating shaft disk (6) is fixedly connected to the connecting box base (17); the rotating shaft disk (6) or the RF source housing (5) is provided with a waist-shaped hole, and the bolt passing through the waist-shaped hole fixes the relative position of the rotating shaft disk (6) and the RF source housing (5).

7. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 1, characterized in that: A gas splitter (15) is provided at the center of the radio frequency coil (8). The gas splitter (15) is used to split and spray out the process gas. An insulating gas filling connector (10) is connected to the input end of the gas splitter (15). A gas filling connector (12) is installed at the bottom center of the radio frequency source housing (5). The gas filling connector (12) and the insulating gas filling connector (10) are connected by a pipe, and both adopt compression fittings.

8. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 1, characterized in that: The radio frequency source housing (5) is provided with a coil insulating seat (14) and a coil fixing frame (13) inside. The radio frequency coil (8) is disposed on the coil insulating seat (14), and the coil insulating seat (14) is fixedly connected to the radio frequency source housing (5) through the coil fixing frame (13).

9. The large-aperture radio frequency ion source structure with angle adjustment function according to claim 1, characterized in that: The top of the radio frequency source housing (5) is provided with an arched grid (9).

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