A heating power supply system

Abstract

The application relates to the technical field of semiconductors and discloses a heating power supply system which comprises a total control module, a sampling module and at least one unit machine module, wherein the sampling module is used for collecting total output voltage and total output current of the heating power supply system; the total control module is connected with the sampling module; the total control module is used for generating an analog control signal after digital control loop operation based on the total output voltage and the total output current and in combination with a preset given value; each unit machine module is connected with the total control module; each unit machine module is used for generating a driving signal for adjusting self output power after operation by using an analog control loop in the unit machine module based on the analog control signal; and the output power of each unit machine module is collected and used as total output power of the heating power supply system. The application can improve bandwidth, enhance the system disturbance suppression capability and the control capability for stable output, and improve the output precision and stability of the heating power supply.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a heating power supply system. Background Technology

[0002] The lattice uniformity and purity of silicon together determine the quality and grade of semiconductor chips. However, the heating power supplies used in the high-purity silicon preparation process in China cannot meet the precision and stability requirements of silicon fabrication processes for chips, resulting in limited lattice and purity quality of the produced silicon crystals. Therefore, developing high-precision and high-stability heating power supplies is the only solution to improve the quality of silicon for chips.

[0003] However, the accuracy of current heating power supplies is relatively low, for the following reasons:

[0004] (1) The power fluctuation value required by the technology cannot be guaranteed by simply using switching power supply technology with pure digital control or pure analog control.

[0005] (2) The existing power supply is a low-voltage, high-current heating power supply. The uncontrolled rectifier is used as the front-end power supply, which cannot provide a sufficiently low noise and stable front-end power supply. The harmonics and power factor of the power grid are extremely low, and the output voltage fluctuates with the frequency and voltage of the power grid, which cannot provide an ideal voltage source with sufficiently low output impedance.

[0006] (3) The voltage and current detection accuracy is as high as two parts per hundred thousand, which cannot be met by ordinary circuit structures and processes. The power supply of existing signal conditioning circuits is generally integrated, all functional circuits share a common ground, and most of them are powered by switching power supplies. This results in poor anti-interference ability of the circuit and high internal noise, which cannot meet the requirements of high-precision circuit sampling and control. Summary of the Invention

[0007] This invention provides a heating power supply system to solve the problem of low accuracy in traditional heating power supplies.

[0008] This invention provides a heating power supply system, comprising: a central control module, a sampling module, and at least one unit module. The sampling module is used to collect the total output voltage and total output current of the heating power supply system. The central control module is connected to the sampling module and is used to generate an analog control signal after performing digital control loop calculations based on the total output voltage and total output current and in conjunction with preset values. Each unit module is connected to the central control module and is used to generate a drive signal for adjusting its own output power after performing calculations using its internal analog control loop based on the analog control signal. The output power of each unit module is summed to obtain the total output power of the heating power supply system.

[0009] The heating power supply system provided by this invention organically combines the flexibility of digital control with the high bandwidth and fast response characteristics of analog loops. It adopts a dual-loop control scheme of central control and sub-control, fully utilizing the advantages of both digital and analog control loops to significantly improve the system's control bandwidth, enhance its ability to suppress disturbances, and improve its control over stable output. This effectively solves the inherent contradictions of limited bandwidth and slow dynamic response in traditional single control modes. The central control module performs unified calculations based on the system's total output and generates analog control signals, which are then executed in parallel by each unit module. This not only significantly improves the system's control accuracy, output stability, and disturbance rejection capability but also eliminates the current sharing disturbances caused by independent control when multiple modules are connected in parallel. This ensures that the system can achieve extremely high power output stability in both single-machine and multi-machine parallel operation. Simultaneously, this architecture significantly reduces output ripple, providing unprecedented high-precision and high-stability power supply assurance for semiconductor heating processes.

[0010] In one optional implementation, the master control module includes: a digital loop calculation unit and a digital-to-analog converter unit, wherein the digital loop calculation unit is connected to the digital-to-analog converter unit and the sampling module, and the digital loop calculation unit is used to perform digital control loop calculation based on the total output voltage and total output current and combined with a preset given value, and then output a digital control signal; the digital-to-analog converter unit is connected to each unit module, and the digital-to-analog converter unit is used to convert the digital control signal into an analog control signal.

[0011] In one optional implementation, the digital loop calculation unit includes: a voltage loop error amplifier, a current loop error amplifier, a power loop error amplifier, and a digital competition unit. The voltage loop error amplifier, current loop error amplifier, and power loop error amplifier are all connected to the sampling module. The voltage loop error amplifier presets a voltage setpoint and is used to compare the voltage setpoint with the total output voltage. The current loop error amplifier presets a current setpoint and is used to compare the current setpoint with the total output current. The power loop error amplifier presets a power setpoint and is used to compare the power setpoint with the instantaneous power value calculated from the total output voltage and total output current. The digital competition unit is connected to the digital-to-analog converter unit and is used to select the output of one of the voltage loop error amplifier, current loop error amplifier, or power loop error amplifier as the digital control signal output based on the operating mode of the heating power supply system.

[0012] In one optional implementation, the digital loop computing unit operates in three modes: constant voltage mode, constant current mode, and constant power mode. Specifically, in constant voltage mode, the digital loop computing unit uses the voltage setpoint as the target value and the total output voltage as the feedback value, then outputs a digital control signal using a digitally discretized digital PI calculation. In constant current mode, the digital loop computing unit uses the current setpoint as the target value and the total output current as the feedback value, then outputs a digital control signal using a digitally discretized digital PI calculation. In constant power mode, the digital loop computing unit uses the power setpoint as the target value and the product of the total output voltage and the total output current as the feedback value, then outputs a digital control signal using a digitally discretized digital PI calculation.

[0013] In one optional implementation, the unit module includes: a sampling unit, an analog control loop, and a main power unit. The sampling unit is connected to the analog control loop and the main power unit, and is used to collect the output voltage and output current of the main power unit. The analog control loop is connected to the main power unit and the main control module, and is used to generate a drive signal for adjusting the output power of the main power unit after performing analog control calculations based on the output voltage and output current of the main power unit and the analog control signal.

[0014] In one alternative implementation, the analog control loop includes:

[0015] The system comprises a current analog loop, a voltage analog loop, a current follower circuit, a voltage follower circuit, an analog competition unit, a drive unit, and a modular digital controller. The voltage analog loop is connected to the sampling unit, the analog competition unit, the voltage follower circuit, and the main control module. The voltage analog loop is used for comparing and amplifying the output voltage based on analog control signals. The current analog loop is also connected to the sampling unit, the analog competition unit, the current follower circuit, and the main control module. The current analog loop is used for comparing and amplifying the output current based on analog control signals. The voltage follower circuit is connected to the modular digital controller. The voltage follower circuit works in conjunction with the voltage analog loop to perform voltage analog loop control quantity calculations and sends the output voltage to the modular digital controller. The current follower circuit is also connected to the modular digital controller. A current follower circuit is used in conjunction with a current analog loop to perform current analog loop control quantity calculations and sends the output current to the module digital controller. The module digital controller is connected to the drive unit and the main control module. The module digital controller is used to detect the output current and output voltage and sends the detection results to the main control module. An analog competition unit is connected to the drive unit. The analog competition unit is used to output a working mode based on the heating power supply system, selecting either the voltage analog loop control quantity or the current analog loop control quantity as the analog modulation signal output. The drive unit is connected to the main power unit. The drive unit is used to output a drive signal based on the analog modulation signal.

[0016] The heating power supply system provided by this invention, through the setting of parallel voltage and current analog loops and the coordination of an analog competition unit for operating mode switching, enables the unit module to quickly respond to precise voltage or current control according to system requirements. The voltage follower circuit and current follower circuit effectively achieve impedance transformation and signal isolation, ensuring the stability of control signal transmission. The structure of the analog control loop allows the heating power supply system to maintain ultra-high response speed and control accuracy during constant voltage and constant current mode switching. Simultaneously, the hardware-level competition selection mechanism completely avoids the delays and disturbances caused by digital mode switching, providing nanosecond-level precise power regulation capabilities for semiconductor heating processes.

[0017] In one optional embodiment, the current simulation loop includes: a first resistor, a second resistor, a first capacitor, a second capacitor, a third capacitor, a first amplifier, and a second amplifier. The first input terminal of the first amplifier is connected to the first terminal of the current follower circuit, the first terminal of the first capacitor, the first terminal of the second capacitor, and the first terminal of the third capacitor. The second input terminal of the first amplifier is connected to the first input terminal of the voltage simulation loop and receives an analog control signal. The output terminal of the first amplifier is connected to the first input terminal of the second amplifier, the first terminal of the first resistor, the second terminal of the second capacitor, and the first terminal of the second resistor. The second terminal of the first resistor is connected to the second terminal of the first capacitor. The second terminal of the second resistor is connected to the second terminal of the third capacitor. Connections; the output terminal of the second amplifier is connected to its second input terminal and the first input terminal of the analog competition unit; the voltage analog loop includes: a third resistor, a fourth capacitor, a fifth capacitor, a third amplifier, and a fourth amplifier, wherein the first input terminal of the third amplifier is connected to the second input terminal of the first amplifier, the second input terminal of the third amplifier is connected to the first terminal of the voltage follower circuit, the first terminal of the fourth capacitor, and the first terminal of the fifth capacitor, the output terminal of the third amplifier is connected to the first terminal of the third resistor, the second terminal of the fifth capacitor, and the first input terminal of the fourth amplifier; the second terminal of the third resistor is connected to the second terminal of the fourth capacitor; the output terminal of the fourth amplifier is connected to its second input terminal and the second input terminal of the analog competition unit.

[0018] In one optional implementation, the main power unit includes: a three-phase power factor corrector, a DC-DC converter, a DC converter, and an LCL filter connected in series; the three-phase power factor corrector is used to improve the power factor; the DC-DC converter is used to stabilize the voltage of the DC bus; the DC converter is used to improve the accuracy of the output voltage; and the LCL filter is used to suppress fluctuations in the output voltage.

[0019] In one optional implementation, the sampling module includes: a first isolation unit, a second isolation unit, and a data acquisition unit, wherein the input terminal of the data acquisition unit acquires the total output current of the heating power supply system through the first isolation unit, the output terminal of the data acquisition unit is connected to the input terminal of the second isolation unit, and the output terminal of the second isolation unit is connected to the input terminal of the main control module.

[0020] The heating power supply system provided by this invention establishes an electrical isolation barrier between the sampling module and the main control module by setting an isolation unit, effectively blocking the propagation path of high-frequency interference from the main power circuit to the control system. This structure decouples the control board power supply and GND from the sampled signal, allowing the sampling conditioning circuit and analog-to-digital converter to operate under ideal conditions, and keeping the control board ground signal stable and pure. This raises the common-mode rejection ratio to a new level, completely solving the quantization error problem caused by ground potential fluctuations in non-isolated sampling schemes, and providing a reliable signal acquisition foundation for high-precision sampling at the level of two parts per ten thousand.

[0021] In one optional embodiment, the heating power supply system further includes: a shielding box, a water-cooled heat exchanger, and a fan, wherein the main control module, the sampling module, the water-cooled heat exchanger, and the fan are all sealed within the shielding box; the main control module and the sampling module are both in contact with the heat conduction surface of the water-cooled heat exchanger, which is used to absorb and dissipate the heat generated during module operation; the fan is disposed on the heat dissipation surface of the water-cooled heat exchanger, and is used to perform air cooling of the water-cooled heat exchanger through convection heat transfer.

[0022] The heating power supply system provided by this invention creates an ideal working environment for high-precision sampling and control circuits by sealing the core circuits such as the main control module and sampling module in a shielded box and integrating a composite heat dissipation scheme of water cooling and air cooling. The metal shielded box effectively blocks the radiation effects of cosmic rays and external electromagnetic interference on the control board, and the sealed structure ensures constant internal humidity and avoids the corrosion of contaminants. The coordinated work of the water-cooled heat exchanger and the air-cooled system ensures that the heat generated inside the shielded box is dissipated in a timely manner, maintaining the stability of the internal temperature of the shell. This avoids accuracy drift caused by changes in parasitic parameters of the sampling circuit due to fluctuations in ambient temperature, and provides a reliable guarantee for the system to maintain high accuracy over a long period of time. Attached Figure Description

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is a first configuration diagram of a heating power supply system according to an embodiment of the present invention;

[0025] Figure 2 This is a second configuration diagram of a heating power supply system according to an embodiment of the present invention;

[0026] Figure 3 This is a third composition diagram of a heating power supply system according to an embodiment of the present invention;

[0027] Figure 4 This is a specific circuit diagram of a heating power supply system according to an embodiment of the present invention;

[0028] Figure 5 This is a flowchart of the dual-loop control of the heating power supply system according to an embodiment of the present invention. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] It is understood that before using the technical solutions disclosed in the various embodiments of the present invention, users should be informed of the types, scope of use, and usage scenarios of the personal information involved in the present invention and their authorization should be obtained in accordance with relevant laws and regulations through appropriate means.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] This embodiment provides a heating power supply system, such as Figure 1 As shown, it includes: a main control module 1, a sampling module 2, and at least one unit machine module (#301~#30n).

[0033] Figure 1 In the process, sampling module 2 is used to collect the total output voltage and total output current of the heating power supply system; the total control module 1 is connected to sampling module 2, and the total control module 1 is used to generate analog control signals after performing digital control loop calculations based on the total output voltage and total output current and combined with preset given values.

[0034] Specifically, Figure 1 In the process, sampling module 2 collects the total output voltage and total output current of the heating power supply system in real time and transmits these key parameters to the main control module 1. Based on the collected system output parameters and combined with preset setpoints, such as voltage, current, or power setpoints, the main control module 1 performs precise calculations through its internally constructed digital control loop to determine the digital control command required to correct the system output deviation. This digital control command is then converted into an analog voltage signal for output.

[0035] Figure 1In this system, each unit module is connected to the main control module. Each unit module is used to generate a drive signal for adjusting its own output power after performing calculations based on the analog control signal and using its own internal analog control loop. The output voltage of each unit module is summed to become the total output voltage of the heating power system, the output current is summed to become the total output current of the heating power system, and the output power is summed to become the total output power of the heating power system.

[0036] Specifically, Figure 1 In this system, analog control signals are simultaneously sent to each unit module, effectively blocking crosstalk from power stage interference to sensitive control signals. Each unit module, based on the analog control signal, utilizes a high-bandwidth analog control loop within its internal circuitry to rapidly compare and amplify its own output local electrical signal with the analog control signal, directly generating drive signals to power its internal power switches, thereby precisely adjusting the unit module's output power. The output power of all unit modules is superimposed on the power bus, collectively constituting the total output power of the heating power system. This embodiment ensures that multiple unit modules can respond quickly and synchronously to the overall system control objective, eliminating the need for complex software current sharing algorithms and fundamentally avoiding current sharing disturbances, thus achieving extremely high system output stability and extremely low ripple.

[0037] The heating power supply system provided in this embodiment organically combines the flexibility of digital control with the high bandwidth and fast response characteristics of analog loops. It adopts a dual-loop control scheme of central control and sub-control, making full use of the advantages of digital loops and analog control loops, greatly improving the system's control bandwidth, enhancing the system's ability to suppress disturbances and control stable output, and effectively solving the inherent contradictions of limited bandwidth and slow dynamic response in traditional single control modes. The central control module performs unified calculations based on the system's total output and generates analog control signals, which are then executed in parallel by each unit module. This not only significantly improves the system's control accuracy, output stability, and anti-disturbance capability, but also eliminates the current sharing disturbances caused by independent control when multiple modules are connected in parallel. This ensures that the system can achieve extremely high power output stability in both single-machine and multi-machine parallel operation. At the same time, this architecture significantly reduces output ripple, providing unprecedented high-precision and high-stability power supply protection for semiconductor heating processes.

[0038] In some alternative implementations, such as Figure 2 As shown, the main control module includes a digital loop calculation unit 11 and a digital-to-analog converter unit 12. The digital loop calculation unit 11 is connected to the digital-to-analog converter unit 12 and the sampling module 2. The digital loop calculation unit 11 is used to perform digital control loop calculations based on the total output voltage and total output current, combined with preset given values, and then output digital control signals.

[0039] Figure 2In the digital loop calculation unit 11, there are: a voltage loop error amplifier 111, a current loop error amplifier 112, a power loop error amplifier 113, and a digital competition unit 114. The voltage loop error amplifier 111, current loop error amplifier 112, and power loop error amplifier 113 are all connected to the sampling module 2. The voltage loop error amplifier 111 presets a voltage setpoint and is used to compare the voltage setpoint with the total output voltage. The current loop error amplifier 112 presets a current setpoint and is used to compare the current setpoint with the total output current. The power loop error amplifier 113 presets a power setpoint and is used to compare the power setpoint with the instantaneous power value calculated from the total output voltage and total output current. The digital competition unit 114 is connected to the digital-to-analog converter unit 12 and is used to select the output of one of the following amplifiers—the voltage loop error amplifier 111, the current loop error amplifier 112, or the power loop error amplifier 113—as the digital control signal output based on the operating mode of the heating power supply system.

[0040] Specifically, Figure 2 In the process, after the total output voltage and total output current sampling signals of the heating power supply system enter the digital loop calculation unit 11, three error amplifiers are constructed within the digital loop calculation unit 11: a voltage loop error amplifier 111, a current loop error amplifier 112, and a power loop error amplifier 113. The outputs of the three error amplifiers respectively enter the digital voltage loop PID unit, the digital current loop PID unit, and the digital power loop PID unit, ultimately forming the loop control quantities for the voltage loop, current loop, and power loop, namely, the digital voltage loop control quantity output value, the digital current loop control quantity output value, and the digital power loop control quantity output value. The three output control quantities enter the digital competition unit 114, and ultimately, the operating mode of the heating power supply system or the magnitude of the three loop output quantities determines which control quantity output value is used as the digital control signal output.

[0041] Specifically, Figure 2 In the process, the operating modes of the heating power supply system, i.e., the operating modes of the digital loop computing unit 11, include: constant voltage mode, constant current mode, and constant power mode, wherein:

[0042] (1) When the digital loop calculation unit 11 is in constant voltage mode, the digital loop calculation unit 11 takes the voltage setpoint as the target quantity and the total output voltage as the feedback quantity, and then uses the digital PI operation after digital discretization to output the digital control signal.

[0043] (2) When the digital loop calculation unit 11 is in constant current mode, the digital loop calculation unit 11 takes the current given value as the target quantity and the total output current as the feedback quantity, and then uses the digital PI operation after digital discretization to output the digital control signal.

[0044] (3) When the digital loop calculation unit 11 is in constant power mode, the digital loop calculation unit 11 takes the power setpoint as the target quantity and the product of the total output voltage and the total output current as the feedback quantity, and then uses the digital PI operation after digital discretization to output the digital control signal.

[0045] Figure 2 In this configuration, the digital-to-analog converter 12 is connected to each unit module and is used to convert digital control signals into analog control signals.

[0046] In some alternative implementations, such as Figure 3 As shown, the unit module includes: a sampling unit 31, an analog control loop 32, and a main power unit 33. The sampling unit 31 is connected to the analog control loop 32 and the main power unit 33, and is used to collect the output voltage and output current of the main power unit 33. The analog control loop 32 is connected to the main power unit 33 and the main control module 1. The analog control loop 32 is used to generate a drive signal for adjusting the output power of the main power unit 33 after performing analog control calculations based on the output voltage and output current of the main power unit 33 and the analog control signal.

[0047] Specifically, Figure 3Taking unit module #301 as an example, the analog control loop 32 includes: a current analog loop 321, a voltage analog loop 322, a current follower circuit 323, a voltage follower circuit 324, an analog competition unit 325, a drive unit 326, and a module digital controller 327. The voltage analog loop 322 is connected to the sampling unit, the analog competition unit, the voltage follower circuit 324, and the main control module. The voltage analog loop 322 is used to compare and amplify the output voltage based on the analog control signal. The current analog loop 321 is connected to the sampling unit, the analog competition unit, the current follower circuit 323, and the main control module. The current analog loop 321 is used to compare and amplify the output current based on the analog control signal. The voltage follower circuit 324 is connected to the second module digital controller. The voltage follower circuit 324 is used to cooperate with the voltage analog loop 322 to perform voltage analog... The analog-loop control quantity is calculated, and the output voltage is sent to the modular digital controller 327. The current follower circuit 323 is connected to the modular digital controller 327. The current follower circuit 323 is used to cooperate with the current analog loop 321 to calculate the current analog loop control quantity and send the output current to the modular digital controller 327. The modular digital controller 327 is connected to the drive unit 326 and the main control module. The modular digital controller 327 is used to detect the output current and output voltage and send the detection results to the main control module 1. The analog competition unit is connected to the drive unit 326. The analog competition unit is used to output the working mode based on the heating power supply system, selecting the voltage analog loop control quantity or the current analog loop control quantity as the analog modulation signal output. The drive unit 326 is connected to the main power unit. The drive unit 326 is used to output discrete PWM drive signals based on the analog modulation signal. Specifically, the current analog loop 321, voltage analog loop 322, current follower circuit 323, voltage follower circuit 324, and drive unit 326 are used to calculate the current analog loop control quantity and send the output current to the modular digital controller 327. Figure 4 In the main control module, there are two components: a DSP digital loop computing unit U00 and a DAC high-precision digital-to-analog converter U3. The main control module also includes a display unit (not shown in the figure) for displaying and monitoring the output current and output voltage of each unit module.

[0048] Specifically, Figure 4In the circuit, the current simulation loop 321 includes: a first resistor R1, a second resistor R2, a first capacitor C3, a second capacitor C4, a third capacitor C7, a first amplifier U9, and a second amplifier U12. The first input terminal of the first amplifier U9 is connected to the first terminal of the current follower circuit 323, the first terminal of the first capacitor C3, the first terminal of the second capacitor C4, and the first terminal of the third capacitor C7. The second input terminal of the first amplifier U9 is connected to the first input terminal of the voltage simulation loop 322 and receives analog control signals. The output terminal of the first amplifier U9 is connected to the first input terminal of the second amplifier U12, the first terminal of the first resistor R1, the second terminal of the second capacitor C4, and the first terminal of the second resistor R2. The second terminal of the first resistor R1 is connected to the second terminal of the first capacitor C3. The second terminal of the second resistor R2 is connected to the second terminal of the third capacitor C7. The output terminal of the second amplifier U12 is connected to its second input terminal and the first input terminal of the analog competition unit 325.

[0049] Specifically, Figure 4 In the voltage analog loop 322, there are: a third resistor R3, a fourth capacitor C5, a fifth capacitor C6, a third amplifier U7, and a fourth amplifier U8. The first input terminal of the third amplifier U7 is connected to the second input terminal of the first amplifier U9. The second input terminal of the third amplifier U7 is connected to the first terminal of the voltage follower circuit 324, the first terminal of the fourth capacitor C5, and the first terminal of the fifth capacitor C6. The output terminal of the third amplifier U7 is connected to the first terminal of the third resistor R3, the second terminal of the fifth capacitor C6, and the first input terminal of the fourth amplifier U8. The second terminal of the third resistor R3 is connected to the second terminal of the fourth capacitor C5. The output terminal of the fourth amplifier U8 is connected to its second input terminal and the second input terminal of the analog competition unit 325.

[0050] Specifically, Figure 4 In the circuit, the output voltage detection of unit module #301 is processed by a differential amplifier circuit centered around U10. R5, R6, R7, R10, and U10 form a differential proportional circuit with a gain of M4 = R10 / R6. R5, R6, R7, R10, and filter capacitors C8 and C10 form a first-order active low-pass filter to remove noise and interference from the sampled signal. Similarly, the output current detection of the unit module is processed by a differential amplifier circuit centered around U11. R4, R11, R13, R18, and U11 form a differential proportional circuit with a gain of M4 = R4 / R13. R4, R11, R13, R18, and filter capacitors C9 and C13 form a first-order active low-pass filter to remove noise and interference from the sampled signal.

[0051] Specifically, Figure 4In this circuit, the output voltage and current of the unit module are conditioned by the aforementioned amplifier circuit and then enter the current simulation loop 321 and the voltage simulation loop 322, respectively. The input of the compensators in the two simulation loops is the analog control signal output by the front-end master control module 1. The voltage simulation loop 322 consists of a type II compensator composed of U7, R3, C5, and C6, which performs the voltage simulation loop function. The output of the voltage simulation loop passes through U8 and undergoes impedance transformation before being sent to the analog competition unit 325. The current simulation loop 321 consists of a type III compensator composed of U9, R1, R2, C3, C4, and C7, which performs the current simulation loop function. The output of the current simulation loop passes through U12 and undergoes impedance transformation before being sent to the analog competition unit 325. The outputs of the current simulation loop 321 and the voltage simulation loop 322 enter the drive unit 326 after passing through the analog competition unit 325. The drive unit 326 has a PWM modulation function, which, together with the peripheral circuit of the drive unit 326, realizes the final PWM signal modulation and generation, thereby completing the output of the drive signal.

[0052] Specifically, Figure 5 In the process, after the system's total output voltage and total output current sampling signals enter the main control module, the main control module internally constructs three error amplifiers: the voltage loop digital error amplifier receives the system's given voltage value as input, the current loop digital error amplifier receives the system's given current value as input, and the power loop digital error amplifier receives the system's given power value as input. The outputs of the three error amplifiers then enter the voltage digital loop PID unit, the current digital loop PID unit, and the power loop PID unit, respectively, outputting voltage loop control quantities, current loop control quantities, and power loop control quantities, i.e., digital voltage loop control quantity output value, digital current loop control quantity output value, and digital power loop control quantity output value. The three output control quantities enter the loop competition unit, where the final control quantity is determined by the system's operating mode or the magnitude of the loop output. The output of the three-loop competition unit enters the analog-to-digital converter unit, converting the controller's digital control signal into an analog control signal.

[0053] Specifically, Figure 5In the process, the analog control signal then enters the unit module. After impedance transformation using the internal signal buffer unit, the output current of the unit module serves as the feedback input of the analog current loop error amplifier, and the output voltage serves as the feedback input of the analog voltage loop error amplifier. The analog voltage loop error amplifier, in conjunction with the voltage analog loop PID, outputs the voltage analog loop control quantity, and the analog current loop error amplifier, in conjunction with the current analog loop PID, outputs the current analog loop control quantity. The outputs of the voltage analog loop PID and the current analog loop PID enter the loop competition unit to complete the final analog loop output. The final output analog modulation signal then enters the PWM analog chip to form a PWM modulation circuit. After modulation of the PWM signal by the chip's external circuitry, the signal is amplified by the drive circuit to output the drive signal, thereby driving the main power unit and completing the entire dual-loop closed-loop control process of digital and analog loop coordination.

[0054] The dual-loop closed-loop control architecture that combines digital and analog loops provided in this embodiment can solve the following problems:

[0055] (1) Due to the limitations of discretization, controller operating frequency, and switching frequency, the control bandwidth of a single digital loop is very low. At a switching frequency of 20kHz, its bandwidth is around 1kHz. However, with a dual-loop control architecture, the system control bandwidth is close to that of an analog loop, reaching over 7kHz. The increase in system control bandwidth significantly improves the power supply system's output disturbance rejection capability. The higher the bandwidth, the smaller the output ripple and output fluctuation, which greatly reduces the output ripple. This is also the core factor in improving the stability of the power supply output power.

[0056] (2) The existing single-loop architecture achieves dynamic current sharing for multiple parallel modules through communication current sharing and software droop control. Each power module receives the control input from the main control board and then controls its own output. This results in current sharing control disturbances in both steady-state and dynamic processes, causing low-frequency current sharing adjustment fluctuations in the output clock, ultimately failing to achieve satisfactory output power stability control. The dual-loop architecture eliminates the need to distinguish between the number of DC power modules in parallel, because the main controller outputs an analog signal. The analog loops of each module receive the same analog quantity, eliminating current sharing control quantities between modules and thus eliminating fluctuations caused by control quantities. This perfectly solves the disturbance fluctuations caused by current sharing in multi-module parallel systems. The dual-loop control architecture further improves output stability and avoids disturbances caused by system control.

[0057] (3) Under the dual-loop control architecture, since the output signal of the front-end digital loop is the total control analog signal, in the application scenario of multiple power module units in parallel, the current disturbance and asynchronous problem of the current sharing loop between modules caused by the parallel current sharing is effectively eliminated, which leads to the problem of slow dynamic output current and unstable output current. This further improves the dynamics and stability of the output of the high-power parallel system.

[0058] In some optional implementations, the main power unit includes: a three-phase power factor corrector, a DC-DC converter, a DC converter, and an LCL filter connected in series; the three-phase power factor corrector is used to improve the power factor; the DC-DC converter is used to stabilize the voltage of the DC bus; the DC converter is used to improve the accuracy of the output voltage; and the LCL filter is used to suppress fluctuations in the output voltage.

[0059] In some alternative implementations, such as Figure 4 As shown, the sampling module 2 includes a first isolation unit 21, a second isolation unit 22, and a data acquisition unit 23. The input terminal of the data acquisition unit 23 acquires the total output current of the heating power supply system through the first isolation unit 21, and the output terminal of the data acquisition unit 23 is connected to the input terminal of the second isolation unit 22. The output terminal of the second isolation unit 22 is connected to the input terminal of the main control module 1.

[0060] Specifically, Figure 4 In this circuit, the first isolation unit 21 is a current Hall effect sensor, and the second isolation unit 22 consists of a current isolation chip U1 and a voltage isolation chip U2. Since the sampling module collects the output signal from the main power unit, which is a strong source of electromagnetic interference, it is necessary to isolate the sampling module from the main power unit's power supply to prevent differential-mode and common-mode interference from the high-voltage output side from entering the control circuit. Therefore, the two isolation bands of the first isolation unit 21 and the second isolation unit 22 can block most of the differential-mode and common-mode signals, preventing direct connection between the secondary sides and blocking interference paths. This ensures that the power supply, GND, and sampled signal of the main control module 1 are independent, thereby guaranteeing the sampling accuracy of the sampling circuit.

[0061] In addition, the analog control signals output by the master control module are not isolated from each unit module. Therefore, the unit modules have a lot of noise and electromagnetic interference. The high-precision digital-to-analog converter U3 can effectively isolate the interference from the high voltage side of the unit modules to the master control module.

[0062] Optionally, power supply isolation can be designed for the external communication unit circuit of the heating power supply system. This prevents communication peripherals from transmitting data to the sampling module through the communication interface. Besides inherent interference, the communication peripherals' long communication lines act as good antennas, easily picking up noise from the surrounding environment. Therefore, by cutting off the direct connection between the communication peripherals and the heating power supply system, noise and interference from peripheral communication can be avoided.

[0063] Optionally, each component in the heating power supply system is powered by a separate low-noise and low-ripple linear power supply, which ensures the power supply quality of the circuit. The isolation between modules and the isolation of signal transmission avoid signal crosstalk, so that there is no interference in the signal chain of the main control module, resulting in very low noise on the signal chain, which greatly improves the signal-to-noise ratio and sampling accuracy of the circuit, and provides an ideal power supply environment for the heating power supply system.

[0064] In some optional embodiments, the heating power supply system further includes: a shielding box, a water-cooled heat exchanger, and a fan, wherein the main control module, the sampling module, the water-cooled heat exchanger, and the fan are all sealed within the shielding box; the main control module and the sampling module are both in contact with the heat conduction surface of the water-cooled heat exchanger, which is used to absorb and dissipate the heat generated during module operation; the fan is disposed on the heat dissipation surface of the water-cooled heat exchanger, and the fan is used to perform air cooling of the water-cooled heat exchanger through convection heat transfer.

[0065] Specifically, the main control module and sampling module are integrated on the circuit board. The shielding box uses a sealed metal wall. To improve shielding performance, the shielding cover is 1mm thick, and all contact surfaces are covered with double-sided metal adhesive to ensure shielding integrity. A water-cooled heat exchanger is placed inside the shielding box. The circuit board is located on one side of the water-cooled heat exchanger, and a fan is located on the other side. Suction ventilation ensures that after the heat source inside the shielding box is transferred out, there is minimal air convection above the circuit board, resulting in uniform air temperature and preventing airflow from affecting the components on the circuit board. The water inlet of the shielding box is directly connected to the system water inlet, avoiding direct coupling with the water circuits of other power modules. This ensures a constant water temperature in the shielding box, thereby ensuring a stable air temperature inside the shielding box. The water-cooled heat exchanger and fan effectively dissipate the heat generated in the sealed space of the shielding box, providing an ideal and stable operating environment for the temperature stability of the circuit board and the stable sampling of the circuit board signal chain.

[0066] Specifically, the sealed design of the shielding box ensures a constant internal humidity level, preventing contamination, and shields the control board from interference from surrounding electromagnetic fields and cosmic rays. The outer shell of the shielding box is directly grounded, acting as a natural shield to increase shielding effectiveness. The circuit board input uses twisted-pair shielded cables, which enter the internal circuit board signal interface through the metal terminals of the shielding box, ensuring shielding effectiveness.

[0067] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A heating power supply system, characterized in that, include: The system comprises a central control module, a sampling module, and at least one unit computer module, wherein... The sampling module is used to collect the total output voltage and total output current of the heating power supply system; The main control module is connected to the sampling module. The main control module is used to generate an analog control signal after performing digital control loop calculations based on the total output voltage and the total output current and in combination with a preset given value. Each of the unit modules is connected to the main control module. Each unit module is used to generate a drive signal for adjusting its own output power based on the analog control signal and its own internal analog control loop. The total output power of the heating power system is obtained by summing the output power of each unit module. The overall control module includes a digital loop calculation unit, which is used to perform digital control loop calculations based on the total output voltage and the total output current, and in combination with preset given values, and then output a digital control signal. The unit module includes: a sampling unit, an analog control loop, and a main power unit, wherein... The sampling unit is connected to the analog control loop and the main power unit, and the sampling unit is used to collect the output voltage and output current of the main power unit. The analog control loop is connected to the main power unit and the main control module. The analog control loop is used to generate a drive signal for adjusting the output power of the main power unit after performing analog control calculations based on the output voltage and output current of the main power unit and the analog control signal. The analog control loop includes: a current analog loop, a voltage analog loop, a current follower circuit, a voltage follower circuit, an analog competition unit, a drive unit, and a modular digital controller. The voltage analog loop is connected to the sampling unit, the analog competition unit, the voltage follower circuit, and the main control module. The voltage analog loop is used to compare and amplify the output voltage based on the analog control signal. The current simulation loop is connected to the sampling unit, the analog competition unit, the current follower circuit and the main control module. The current simulation loop is used to compare and amplify the output current based on the analog control signal. The voltage follower circuit is connected to the module digital controller. The voltage follower circuit is used to cooperate with the voltage analog loop to perform voltage analog loop control quantity calculation and send the output voltage to the module digital controller. The current follower circuit is connected to the module digital controller. The current follower circuit is used to cooperate with the current analog loop to perform current analog loop control quantity calculation and send the output current to the module digital controller. The modular digital controller is connected to the drive unit and the main control module. The modular digital controller is used to perform output current detection and output voltage detection, and sends the detection results to the main control module. The analog competition unit is connected to the drive unit, and the analog competition unit is used to output an analog modulation signal output for selecting the voltage analog loop control quantity or the current analog loop control quantity as the analog modulation signal based on the working mode of the heating power supply system. The driving unit is connected to the main power unit, and the driving unit is used to output a driving signal based on the analog modulation signal.

2. The heating power supply system according to claim 1, characterized in that, The overall control module further includes: a digital-to-analog conversion unit, wherein... The digital loop calculation unit is connected to the digital-to-analog conversion unit and the sampling module; The digital-to-analog converter is connected to each of the unit modules, and the digital-to-analog converter is used to convert the digital control signal into the analog control signal.

3. The heating power supply system according to claim 2, characterized in that, The digital loop calculation unit includes: a voltage loop error amplifier, a current loop error amplifier, a power loop error amplifier, and a digital competition unit, wherein... The voltage loop error amplifier, current loop error amplifier, and power loop error amplifier are all connected to the sampling module. The voltage loop error amplifier has a preset voltage setpoint, and the voltage loop error amplifier is used to compare the voltage setpoint with the total output voltage; The current loop error amplifier presets a current setpoint, and the current loop error amplifier is used to compare the current setpoint with the total output current; The power loop error amplifier has a preset power setpoint, and the power loop error amplifier is used to compare the power setpoint with the instantaneous power value calculated from the total output voltage and the total output current; The digital competition unit is connected to the digital-to-analog conversion unit. The digital competition unit is used to select the output of one of the voltage loop error amplifier, the current loop error amplifier, or the power loop error amplifier as the digital control signal output based on the working mode of the heating power supply system.

4. The heating power supply system according to claim 3, characterized in that, The operating modes of the digital loop computing unit include: constant voltage mode, constant current mode, and constant power mode. When the digital loop calculation unit is in constant voltage mode, the digital loop calculation unit takes the voltage setpoint as the target quantity and the total output voltage as the feedback quantity, and then uses the digitally discretized digital PI operation to output a digital control signal. When the digital loop calculation unit is in constant current mode, the digital loop calculation unit takes the current setpoint as the target quantity and the total output current as the feedback quantity, and then uses the digitally discretized digital PI operation to output a digital control signal. When the digital loop calculation unit is in constant power mode, the digital loop calculation unit takes the power setpoint as the target quantity and the product of the total output voltage and the total output current as the feedback quantity, and then uses the digitally discretized digital PI operation to output a digital control signal.

5. The heating power supply system according to claim 1, characterized in that, The current simulation loop includes: a first resistor, a second resistor, a first capacitor, a second capacitor, a third capacitor, a first amplifier, and a second amplifier, wherein, The first input terminal of the first amplifier is connected to the first terminal of the current follower circuit, the first terminal of the first capacitor, the first terminal of the second capacitor, and the first terminal of the third capacitor. The second input terminal of the first amplifier is connected to the first input terminal of the voltage analog loop and receives the analog control signal. The output terminal of the first amplifier is connected to the first input terminal of the second amplifier, the first terminal of the first resistor, the second terminal of the second capacitor, and the first terminal of the second resistor. The second end of the first resistor is connected to the second end of the first capacitor; The second terminal of the second resistor is connected to the second terminal of the third capacitor; The output terminal of the second amplifier is connected to its second input terminal and the first input terminal of the analog competition unit; The voltage simulation loop includes: a third resistor, a fourth capacitor, a fifth capacitor, a third amplifier, and a fourth amplifier, wherein, The first input terminal of the third amplifier is connected to the second input terminal of the first amplifier. The second input terminal of the third amplifier is connected to the first terminal of the voltage follower circuit, the first terminal of the fourth capacitor, and the first terminal of the fifth capacitor. The output terminal of the third amplifier is connected to the first terminal of the third resistor, the second terminal of the fifth capacitor, and the first input terminal of the fourth amplifier. The second terminal of the third resistor is connected to the second terminal of the fourth capacitor; The output terminal of the fourth amplifier is connected to its second input terminal and the second input terminal of the analog competition unit.

6. The heating power supply system according to claim 1, characterized in that, The main power unit includes: A three-phase power factor corrector, a DC-DC converter, a DC-DC converter, and an LCL filter are connected in series. The three-phase power factor corrector is used to improve the power factor; The DC-DC converters are all used to stabilize the voltage of the DC bus. The DC-DC converter is used to improve the accuracy of the output voltage; The LCL filter is used to suppress fluctuations in the output voltage.

7. The heating power supply system according to claim 1, characterized in that, The sampling module includes: a first isolation unit, a second isolation unit, and a data acquisition unit, wherein, The input terminal of the acquisition unit acquires the total output current of the heating power supply system through the first isolation unit, and the output terminal of the acquisition unit is connected to the input terminal of the second isolation unit. The output of the second isolation unit is connected to the input of the main control module.

8. The heating power supply system according to claim 1, characterized in that, Also includes: Shielding box, water-cooled heat exchanger and fan, among which, The main control module, sampling module, water-cooled heat exchanger, and fan are all sealed inside the shielded box. Both the main control module and the sampling module are in contact with the heat conduction surface of the water-cooled heat exchanger, which is used to absorb and remove the heat generated by the module during operation. The fan is disposed on the heat dissipation surface of the water-cooled heat exchanger, and the fan is used to perform air cooling heat dissipation on the water-cooled heat exchanger through convection heat transfer.

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