Anti-corrosion electrostatic chuck

Abstract

The invention provides an anti-corrosion electrostatic chuck which comprises a base, a substrate is fixed to the base, a layered heating unit is integrated on the substrate, an electrode is arranged on the heating unit, and a ceramic plate used for containing adsorbates is arranged at the top of the electrode; the substrate and the base are provided with flow guide parts used for guiding liquid at the edge of the surface of the ceramic plate to flow out. The liquid scraping assembly is arranged on one side of the top of the ceramic plate and can be in lap joint with the ceramic plate, the liquid scraping assembly is arranged on a running path when the ceramic plate is not loaded with the adsorbate, the ceramic plate passes through the bottom of the liquid scraping assembly, and the liquid scraping assembly scrapes corrosive liquid attached to the surface of the ceramic plate and the surfaces of other parts flush with the surface of the ceramic plate. Through the synergistic effect of the flow guide structure and the liquid scraping assembly, corrosive liquid is effectively guided and removed, and the anti-corrosion capacity and use reliability of the electrostatic chuck are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor processing, in particular to a kind of anticorrosive electrostatic chuck. BACKGROUND

[0002] Electrostatic chuck is widely used in the workpiece adsorption, handling and processing process in the field of semiconductor, panel, optical element, especially in the wafer cleaning, wet etching, developing, etching after transport link, electrostatic chuck needs long-term operation in liquid environment or corrosive gas environment.The prior art, electrostatic chuck usually adopts ceramic plate to constitute adsorption surface, and is fixed by electrode structure to realize the adsorption of workpiece.However, in actual operation process, especially when electrostatic chuck is in horizontal upward setting state, the corrosive liquid such as cleaning liquid, etching liquid generated in process is often accumulated on the surface of ceramic plate or its edge area, if it cannot be discharged or removed in time, not only affect the cleanliness of chuck, but also easily lead to liquid infiltration in ceramic plate micropore, electrode contact layer or adhesive layer, thereby causing electrochemical corrosion, shortening the service life of chuck, reducing the stability of equipment operation.

[0003] To solve the above problems, part of the prior art attempts to set drainage hole, coating anticorrosion coating or optimizing material performance to alleviate corrosion risk, but there are still the following technical deficiencies: There is no effective liquid guiding structure, and liquid often accumulates disorderly on the adsorption surface and its edge, which leads to the expansion of corrosion range; The residual liquid on the surface of the chuck cannot be dynamically removed, and needs to rely on manual wiping or supporting cleaning equipment, which is difficult to adapt to automatic continuous operation scene; The drainage process is uncontrollable, and liquid is easy to splash or diffuse, which may contaminate surrounding devices or cause safety hazards.

[0004] Therefore, an anticorrosive electrostatic chuck is provided for the above problems. SUMMARY

[0005] The present application provides an anticorrosive electrostatic chuck to solve the problems of insufficient liquid guiding, difficult automatic removal of residual liquid and uncontrollable drainage process in the prior art.

[0006] The present application solves the above technical problems by the following technical solutions: The present application provides an anticorrosive electrostatic chuck, including base, the base is fixed with substrate, the substrate is integrated with layered heating unit, the electrode is arranged on the heating unit, and the top of the electrode is provided with ceramic plate for placing adsorbing object; The substrate and base are provided with flow guide part for guiding the liquid outflow at the edge of the ceramic plate surface; The liquid scraping assembly is arranged on one side of the top of the ceramic plate and can be overlapped with the ceramic plate, and the liquid scraping assembly is arranged on the running path when the adsorbent is not loaded, the ceramic plate passes through the bottom of the liquid scraping assembly, and the liquid scraping assembly scrapes the corrosive liquid attached to the surface of the ceramic plate and other parts flush with the surface of the ceramic plate.

[0007] In the technical solution, the flow guide part comprises a plurality of liquid guide grooves arranged in an annular array at the edge of the substrate and a liquid delivery channel corresponding to each of the liquid guide grooves; The base of the bottom of the liquid guide groove is provided with a liquid delivery channel, and the other side of the liquid delivery channel is inclined downward and extends to the annular side surface of the base; The annular surface of the base is sleeved with a liquid collecting shell of annular structure, the liquid collecting shell covers the port surface corresponding to the liquid delivery channel, and the bottom of the liquid collecting shell is fixed with a plurality of uniformly distributed liquid outlet pipes.

[0008] In the technical solution, the liquid scraping assembly comprises a liquid scraping part and a bearing plate, the liquid scraping part is arranged at the bottom of the bearing plate, and the bearing plate is fixed at the top of the running path when the electrostatic chuck is not loaded with an adsorbent; The bottom of the liquid scraping part is provided with an auxiliary part that can accelerate the gathering of the liquid on the surface of the ceramic plate; The auxiliary part has two and is respectively installed on both sides of the base, and the connecting line between the two auxiliary parts is consistent with the running path when the adsorbent is not loaded; In the technical solution, the auxiliary part is a first auxiliary part or a second auxiliary part; The liquid scraping part with the gathering function can gather the liquid together when scraping the corrosive liquid on the surface of the electrostatic chuck (ceramic plate), so as to avoid the liquid splashing to other places when the electrostatic chuck passes through the liquid scraping part, and also facilitate the discharge of the liquid.

[0009] The base is provided with an open slot on both sides, and the open slot is communicated with the plurality of liquid delivery channels, and the two open slots are respectively arranged on one side of the corresponding auxiliary part.

[0010] The liquid scraping assembly gathers and scrapes the liquid remaining on the ceramic plate, and the liquid flows into the liquid delivery channel through the open slot.

[0011] In the technical solution, the liquid scraping part is in a "V" shape structure, and the auxiliary part changes the direction passing through the liquid scraping part, so as to facilitate the gathering of the liquid on the surface of the ceramic plate.

[0012] When the electrostatic chuck passes through the bottom of the "V" shape structure liquid scraping part, the liquid on the surface of the electrostatic chuck is pushed inward by the two side plates, so as to achieve the effect of gathering the liquid while scraping.

[0013] The liquid scraping part comprises two connecting plates, the two connecting plates are rotationally connected through a connecting part, and the connecting part and the two connecting plates form a "V"-shaped structure with variable shape. The bottom of the connecting plate is fixed with a liquid scraping plate, the liquid scraping plates on the two connecting plates are connected with each other through a connecting soft plate, the connecting soft plate fills the space between the two liquid scraping plates on the path of movement when no adsorbent is loaded, and the bottom of the connecting soft plate is flush with the bottom of the liquid scraping plate. The distal top of the two connecting plates is slidingly connected with the bearing plate through a sliding part.

[0014] Specifically, in the process of the electrostatic chuck passing through the liquid scraping assembly, the auxiliary part protruding from the whole electrostatic chuck first contacts the liquid scraping part, pushes the liquid scraping part to deform, and makes the liquid scraping part become a "V"-shaped structure open to one side of the electrostatic chuck, so that the liquid can be gathered in the subsequent liquid scraping process.

[0015] Specifically, the sliding part comprises a connecting rod fixed on the connecting plate, and the other end of the connecting rod is fixed to a self-rotating disc inside a sliding block, the self-rotating disc rotates inside the sliding block, the sliding block is slidingly connected to a guide rail, the guide rail is fixed on the sidewall of the bottom of the bearing plate, and the guide rail is arranged perpendicular to the movement path when no adsorbent is loaded.

[0016] The connecting part comprises a connecting column, two annular grooves are formed in the surface of the connecting column, and two self-rotating rotating rings are sleeved in the two annular grooves, and the two rotating rings are fixedly connected with the two connecting plates respectively.

[0017] The self-rotation of the two connecting plates on the connecting column through the corresponding rotating rings forms a "hinge type" rotating connection structure.

[0018] The first auxiliary part comprises a driving rod arranged in the vertical direction, the driving rod is fixed on the surface of the base through an "L"-shaped connecting rod, and protrudes from the base; A first push rod is fixed on the side of the vertical rod away from the base, and the first push rod and the vertical rod are arranged in parallel with each other; The driving rod can be self-driven, elongated and shortened.

[0019] The driving rod is preferably a pneumatic rod, a hydraulic rod or an electric push rod with appropriate specifications and corrosion resistance.

[0020] In the process of the electrostatic chuck passing through the liquid scraping assembly, the driving rod on the first auxiliary part in contact with the liquid scraping part first is elongated, the first push rod on the top of the driving rod protrudes from the top of the electrostatic chuck, and the first push rod moving with the electrostatic chuck pushes the connecting soft plate, so that the opening direction of the "V"-shaped liquid scraping part is changed.

[0021] After the deformation is completed, the driving rod is shortened, and the first push rod is returned to the original position.

[0022] The first auxiliary part has small area, fast response, and is suitable for the condition of small space and short running path without loading adsorbent.

[0023] In the technical solution, the second auxiliary part comprises two trigger units arranged on the running path without loading adsorbent, and the two trigger units are arranged on both sides of the bottom of the liquid scraping part respectively. The second auxiliary part further comprises two ejection units in transmission connection with the trigger units, the two ejection units are arranged on both sides of the base respectively, and the ejection units are fixed on the base, the ejection units protrude from the base, and the connecting line of the two ejection units is on the running path without loading adsorbent. The ejection units run in the process of passing through the trigger units, and the running ejection units change the shape of the liquid scraping part, so as to scrape and gather the liquid on the ceramic plate.

[0024] In the technical solution, the ejection unit comprises two driving members arranged symmetrically, and a ejection member is connected between the two driving members. The driving member comprises a driving gear and a driven gear arranged in meshing with each other, the driving gear and the driven gear are mounted on the same plate body and rotate on the plate body, and the plate body is fixedly connected to the base through a fixing rod. The diameter of the driving gear is greater than that of the driven gear, and a first torsional spring is arranged at the connection position of the driven gear and the plate body. The driving member comprises a transmission rod, two ends of the transmission rod are fixed to the centers of the two driven gears respectively, and an inclined second push rod is fixed to the middle part of the transmission rod, the second push rod is arranged in an inclined state in the idle state, but the highest part of the second push rod is lower than the ceramic plate, and the above state is supported by the first torsional spring to support the second push rod to be arranged in an inclined state. The second push rod is composed of two rod members in rotational connection, and a second torsional spring is arranged at the rotational connection position, the second torsional spring enables the two rod members not to rotate relatively without other external force, the first torsional spring and the second torsional spring are not shown in the figure, and the connection end of the two rod members is always lower than the bottom end of the connection soft plate. The trigger unit comprises two racks, the racks are arranged in the direction of the running path without loading adsorbent, and the two racks are in meshing connection with the two driving gears respectively.

[0025] The second auxiliary part does not need an additional power source, has high reliability, and is suitable for the condition of large space and long running path without loading adsorbent.

[0026] In this technical solution, a rigid strip is fixed at the center of the connecting flexible plate, and the top of the rigid strip is fixed to the bottom of the connecting column. When the second push rod pushes the connecting flexible plate, it comes into direct or indirect contact with the rigid strip, which provides support and prevents the connecting flexible plate from undergoing large deformation.

[0027] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0028] The positive and progressive effects of this invention are as follows: This application incorporates a flow guide at the edge of the electrostatic chuck, connecting it to an internal flow channel structure. This effectively guides liquid accumulated at the edge of the ceramic plate along a predetermined path into the flow channel during chuck operation, preventing liquid stagnation on the chuck surface or edge area. Particularly for upward-facing electrostatic chucks, the ceramic plate surface is more prone to accumulating process liquids (such as wet cleaning solutions, acid / alkali etching solutions, and other corrosive media). If not removed promptly, this can cause potential corrosion to the ceramic plate surface, electrode layer, and bonding structure, shortening the chuck's lifespan. This technical solution, through its structural flow-guiding design, achieves active collection and export of liquid, enhancing overall corrosion resistance.

[0029] Furthermore, this application incorporates a scraping component along the movement path of the electrostatic chuck. As the chuck moves through this component area with the equipment, the liquid carried on its top ceramic plate is physically scraped or shaved off. This scraping process does not rely on the chuck's own motion control and does not interfere with the adsorption process, featuring simple structure, automatic efficiency, and sustainable operation. This design further reduces the residue of corrosive liquids on the surface of the electrostatic chuck, preventing micro-corrosion reactions under high temperature or electric field conditions. It is particularly effective in extending the service life of the ceramic electrode structure, heating film layer, and edge sealing material in the electrostatic chuck.

[0030] In summary, this application, through the coordinated use of a flow guiding structure and a scraping device, achieves efficient removal of surface residual liquid without altering the core adsorption function of the electrostatic chuck. This enhances its adaptability in wet corrosion environments or corrosive vapor environments, improves the stability and reliability of the electrostatic chuck, and demonstrates significant technological advancement and engineering practical value. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the external structure of the electrostatic chuck of the present invention; Figure 2 This is a top view of the electrostatic chuck structure of the present invention; Figure 3 For the present invention Figure 2 Schematic diagram of the cross-sectional structure at BB; Figure 4 A local enlarged structure diagram of the application Figure 3 A local enlarged structure diagram of the application Figure 5 A position structure diagram of the application Figure 6 A structure diagram of the application Figure 7 A structure diagram of the application Figure 5 A structure diagram of the application Figure 8 A local enlarged structure diagram of the application Figure 7 A local enlarged structure diagram of the application Figure 9 A connection structure section diagram of the application Figure 10 A structure diagram of the first auxiliary side of the application Figure 11 A structure diagram of the second auxiliary side of the application Figure 12 A structure diagram of the second auxiliary side of the application Figure 13 A position relationship structure diagram of the second auxiliary and the scraping assembly of the application

[0032] Explanation of reference numerals 1, base; 11, ceramic plate; 12, electrode; 13, heating unit; 14, base plate; 15, cooling flow channel; 16, liquid guide groove; 17, liquid delivery channel; 18, liquid collection shell; 181, liquid outlet pipe; 19, open slot; 2, scraping assembly; 21, bearing plate; 22, connecting plate; 23, scraping plate; 24, connecting soft plate; 241, hard strip plate; 25, connecting rod; 26, self-rotating disc; 27, sliding block; 28, guide rail; 29, connecting part; 291, connecting column; 292, rotating ring; 3, first auxiliary part; 31, driving rod; 32, first push rod; 4, second auxiliary part; 41, transmission rod; 42, driving gear; 43, driven gear; 44, fixed rod; 45, second push rod; 46, rack. DETAILED DESCRIPTION

[0033] The application will be further described by way of examples, but the application is not limited to the examples.

[0034] As Figure 1 and Figure 2As shown, the anti-corrosion electrostatic chuck comprises a base 1, the base 1 is fixed with a base plate 14, the base plate 14 is integrated with a layered heating unit 13, the heating unit 13 is provided with an electrode 12, the top of the electrode 12 is provided with a ceramic plate 11 for placing the adsorbed object; The base plate 14 and the base 1 are provided with a flow guide part for guiding the liquid outflow at the edge of the surface of the ceramic plate 11; The liquid scraping assembly 2 is arranged on one side of the top of the ceramic plate 11 and can be overlapped with the ceramic plate 11, the liquid scraping assembly 2 is arranged on the running path when the ceramic plate 11 is not loaded with the adsorbed object, the ceramic plate 11 passes through the bottom of the liquid scraping assembly 2, the liquid scraping assembly 2 scrapes the corrosive liquid attached to the surface of the ceramic plate 11 and other parts flush with the surface of the ceramic plate 11, avoiding the corrosive liquid remaining on the surface of the upwardly arranged electrostatic chuck for a long time, thereby improving the corrosion resistance of the electrostatic chuck and achieving the effect of anti-corrosion.

[0035] The base 1 is provided with a cooling flow channel 15 for helium flow.

[0036] The liquid at the edge of the ceramic plate 11 is guided into the flow guide channel through the flow guide part, avoiding too much corrosive liquid remaining on the surface of the upwardly arranged electrostatic chuck, which corrodes the electrostatic chuck.

[0037] The liquid scraping assembly 2 is arranged in the moving path of the electrostatic chuck loaded with the adsorbed object, when the electrostatic chuck passes through the liquid scraping assembly 2, the liquid on the top ceramic plate 11 is scraped out, further avoiding too much corrosive liquid remaining on the surface of the upwardly arranged electrostatic chuck, thereby improving the corrosion resistance of the electrostatic chuck.

[0038] Embodiment one As shown, Figures 3-4 The flow guide part comprises a plurality of liquid guide grooves 16 arranged in an annular array at the edge of the base plate 14 and a liquid delivery channel 17 corresponding to the liquid guide groove 16; The base 1 at the bottom of the liquid guide groove 16 is provided with a liquid delivery channel 17, the other side of the liquid delivery channel 17 is inclined downward and extends to the annular side surface of the base 1; The annular surface of the base 1 is sleeved with a liquid collecting shell 18 of annular structure, the liquid collecting shell 18 covers the port surface corresponding to the liquid delivery channel 17, and the bottom of the liquid collecting shell 18 is fixed with a plurality of uniformly distributed liquid outlet pipes 181.

[0039] During the static or moving process of the electrostatic chuck, the liquid at the edge of the upper ceramic plate 11 of the chuck and the edge of the base plate 14 flows into the liquid delivery channel 17 through the liquid guide groove 16.

[0040] Preferably, the number of liquid outlet pipes 181 is reduced, the liquid outlet pipes 181 are connected to the liquid pumping pump through the multi-way pipe, a negative pressure environment is formed at the port of the liquid conveying channel 17, and the liquid guiding efficiency is improved.

[0041] Embodiment two As shown in Figures 5-9 The liquid scraping assembly 2 includes a liquid scraping part and a bearing plate 21. The liquid scraping part is arranged at the bottom of the bearing plate 21, and the bearing plate 21 is fixed at the top of the running path when the electrostatic chuck is not loaded with adsorbents. As shown in Figure 10 and 12 The bottom of the liquid scraping part is provided with an auxiliary part that can accelerate the gathering of the liquid on the surface of the ceramic plate 11. The auxiliary part has two and is respectively installed on both sides of the base 1. The connecting line between the two auxiliary parts is consistent with the running path when the electrostatic chuck is not loaded with adsorbents. The auxiliary part is a first auxiliary part 3 or a second auxiliary part 4.

[0042] The liquid scraping part with the gathering function can gather the liquid together when scraping the corrosive liquid on the surface of the electrostatic chuck (ceramic plate 11), avoid the liquid splashing to other places when the electrostatic chuck passes through the liquid scraping part, prevent the corrosive liquid from polluting other structural parts or remaining in the non-target area, cause the subsequent maintenance difficulty or equipment performance decline, and also facilitate the discharge of the liquid, make the liquid be able to be concentrated and introduced into the liquid discharge path or the flow guide system, improve the liquid cleaning efficiency, reduce the risk of residual liquid on the surface of the chuck, and further enhance the overall device corrosion prevention ability and cleaning management convenience.

[0043] The above-mentioned liquid discharge path or flow guide system is a liquid guide groove 16, a liquid conveying channel 17, and a liquid collecting shell 18.

[0044] The bearing plate 21 is fixed on the ground or the top of the processing space and other suitable rigid structures through the connecting part 29.

[0045] The base 1 is provided with an open slot 19 on both sides, and the open slot 19 is in communication with a plurality of liquid conveying channels 17. Two open slots 19 are respectively arranged on one side of the corresponding auxiliary part.

[0046] The liquid scraping assembly 2 gathers and scrapes the liquid remaining on the ceramic plate 11, and the liquid flows into the liquid conveying channel 17 through the open slot 19.

[0047] The liquid scraping part is in a "V" shape structure, and the auxiliary part changes the direction passing through the liquid scraping part, so as to facilitate the gathering of the liquid on the surface of the ceramic plate 11.

[0048] Specifically, when the electrostatic chuck passes through the bottom of the liquid scraping part in the "V" shape structure, the liquid on the surface of the electrostatic chuck is pushed inward by the two side plates, so as to achieve the effect of gathering the liquid while scraping the liquid, effectively avoiding the outward diffusion or splashing of the liquid during the scraping process, improving the cleanliness and controllability of the scraping process, and facilitating the centralized guidance of the gathered liquid to the preset liquid discharge channel or collection area, thereby improving the overall liquid discharge efficiency and enhancing the protection capability and use reliability of the electrostatic chuck in the corrosive environment.

[0049] Preferably, the liquid scraping part comprises two connecting plates 22, and the two connecting plates 22 are rotationally connected through a connecting part 29, and the connecting part 29 and the two connecting plates 22 form a "V" shape structure with variable shape. The bottom of the connecting plate 22 is fixed with a liquid scraping plate 23, and the liquid scraping plates 23 on the two connecting plates 22 are connected to each other through a connecting soft plate 24. The connecting soft plate 24 compensates for the space between the two liquid scraping plates 23 on the path of operation when the electrostatic chuck is not loaded with adsorbent, and the bottom of the connecting soft plate 24 is flush with the bottom of the liquid scraping plate 23. The distal top of the two connecting plates 22 is slidingly connected between the sliding part and the bearing plate 21.

[0050] In the process that the electrostatic chuck passes through the liquid scraping assembly 2, the auxiliary part protruding from the whole electrostatic chuck first contacts the liquid scraping part, pushes the liquid scraping part to deform, and makes the liquid scraping part become a "V" shape structure opening to one side of the electrostatic chuck, so as to facilitate the gathering of the liquid in the subsequent liquid scraping process.

[0051] As shown in Figure 8 and Figure 9 The sliding part comprises a connecting rod 25 fixed on the connecting plate 22, and the other end of the connecting rod 25 is fixed to a self-rotating disc 26 inside a sliding block 27, the self-rotating disc 26 rotates inside the sliding block 27, the sliding block 27 is slidingly connected to a guide rail 28, the guide rail 28 is fixed on the bottom side wall of the bearing plate 21, and the guide rail 28 is perpendicular to the running path when the electrostatic chuck is not loaded with adsorbent.

[0052] The auxiliary part first contacts the liquid scraping part before the electrostatic chuck, and the auxiliary part moving synchronously with the electrostatic chuck pushes the connecting soft plate 24 between the two liquid scraping plates 23 to move backward, while the top of the connecting plate 22 is slidingly connected through the sliding block 27 and the guide rail 28, so that the sliding blocks 27 on the two connecting plates 22 slide towards each other, the angle between the connecting plate 22 and the guide rail 28 changes, the connecting rod 25 rotates on the sliding block 27, that is, the two connecting plates 22 are folded inward to form a "V" shape structure.

[0053] Further, the connecting part 29 comprises a connecting column 291, and two annular grooves are formed in the surface of the connecting column 291, and two rotatable rotating rings 292 are sleeved in the two annular grooves respectively, and the two rotating rings 292 are fixedly connected with the two connecting plates 22 respectively.

[0054] The two connecting plates 22 are self-rotated on the connecting column 291 through the corresponding rotating rings 292, so as to form a rotating connection structure in the form of a hinge.

[0055] In one embodiment, the first auxiliary part 3 comprises a driving rod 31 arranged vertically, as shown in the figure. Figure 10 The driving rod 31 is fixed on the surface of the base 1 through the connecting rod in the form of an L-shaped structure, and protrudes from the base 1. The first push rod 32 is fixed on the side of the vertical rod away from the base 1, and the first push rod 32 and the vertical rod are arranged in parallel with each other. The driving rod 31 can be self-driven, elongated and shortened.

[0056] The driving rod 31 is preferably a pneumatic rod, a hydraulic rod or an electric push rod with appropriate specifications and corrosion resistance.

[0057] During the process of the electrostatic chuck passing through the liquid scraping assembly 2, the driving rod 31 on the first auxiliary part 3 in contact with the liquid scraping part first is elongated, the first push rod 32 at the top of the driving rod 31 protrudes from the top of the electrostatic chuck, and the first push rod 32 moving with the electrostatic chuck pushes the connecting soft plate 24, so that the liquid scraping part in the form of a V-shaped structure changes the opening direction.

[0058] After the deformation is completed, the driving rod 31 is shortened, and the first push rod 32 is returned to the original position.

[0059] The first auxiliary part 3 has a small area and a fast response, and is suitable for the working condition that the space is small and the running path of the unloaded adsorbent is short.

[0060] Another embodiment is shown in the figure. Figures 12-13 The second auxiliary part 4 comprises two trigger units arranged on the running path when the adsorbent is not loaded, and the two trigger units are arranged on the two sides of the bottom of the liquid scraping part respectively. The second auxiliary part 4 further comprises two ejection units in transmission connection with the trigger units, and the two ejection units are arranged on the two sides of the base 1 respectively, and the ejection units are fixed on the base 1, the ejection units protrude from the base 1, and the connecting line of the two ejection units is on the running path when the adsorbent is not loaded. The ejection units run in the process of passing through the trigger units, and the running ejection units change the shape of the liquid scraping part, so as to scrape and gather the liquid on the ceramic plate 11.

[0061] The ejection unit comprises two driving members arranged symmetrically, and a ejection member connected between the two driving members; The driving member comprises a driving gear 42 and a driven gear 43 arranged in engagement with each other, both of which are mounted on a same plate body and rotate on the plate body, and the plate body is fixedly connected to the base 1 through a fixing rod 44; The diameter of the driving gear 42 is larger than that of the driven gear 43, and a first torsion spring is arranged at the connection between the driven gear 43 and the plate body; The driving member comprises a transmission rod 41, both ends of which are fixed to the centers of the two driven gears 43, and an obliquely arranged second push rod 45 is fixed to the middle part of the transmission rod 41, as shown in the left side of the second auxiliary part 4. Figure 12 The second push rod 45 is arranged obliquely in the idle state, but the highest part is lower than the ceramic plate 11, and the above state is supported by the first torsion spring to keep the second push rod 45 arranged obliquely; The second push rod 45 is composed of two rod members connected in rotation, and a second torsion spring is arranged at the rotation connection, which makes the two rod members not rotate relative to each other without other external force, and the first torsion spring and the second torsion spring are not shown in the figure, and the connection end of the two rod members is always lower than the bottom end of the connection soft plate 24; The trigger unit comprises two racks 46 arranged along the path direction when the electrostatic chuck runs without loading adsorbents, and the two racks 46 are respectively in engagement with the two driving gears 42.

[0062] During the process that the electrostatic chuck passes through the liquid scraping assembly 2, the driving gear 42 at the bottom of the electrostatic chuck first contacts the rack 46, and then engages with it, the driving gear 42 rotates on the rack 46 during movement, the driving gear 42 rotates to drive the driven gear 43, thereby driving the second push rod 45 on the rotating rod to lift up, and the first torsion spring deforms, during the lifting process, the top end of the second push rod 45 is higher than the top of the electrostatic chuck, so that during the continuous movement, the top end of the second push rod 45 pushes the connection soft plate 24 backward, so that the liquid scraping part is deformed.

[0063] The second push rod 45 continues to move until the connection soft plate 24 is pushed to the limit position, the rod member at the top of the second push rod 45 bends and rotates backward, at this time, the second torsion spring deforms, until the end of the bent second push rod 45 is separated from the connection soft plate 24, and the first torsion spring and the second torsion spring recover the deformation.

[0064] In the above process, only the top end of the second push rod 45 is higher than the top of the electrostatic chuck during lifting, when the length of the rack 46 is longer, the lifting angle of the second push rod 45 tends to 90°, and the best lifting angle is between 50° and 60°.

[0065] Factors affecting the lifting angle include the diameters of the driving gear 42 and the driven gear 43, the number of teeth, and the length of the rack 46, etc. More influencing factors can improve the design tolerance, and the lifting angle is affected by multiple factors, which reduces the design difficulty in the production process. By comprehensively considering the above numerical factors, only the height of the second push rod 45 after being lifted is higher than the top surface of the electrostatic chuck.

[0066] The second auxiliary part 4 does not require an additional power source and has high reliability, and is suitable for a working condition in which the space is large and the running path of the unloaded adsorbent is long.

[0067] The hard strip plate 241 is fixed at the center of the connecting soft plate 24, and the top end of the hard strip plate 241 is fixed at the bottom of the connecting column 291. When the second push rod 45 pushes the connecting soft plate 24, the hard strip plate 241 is directly or indirectly contacted, and plays a supporting role to avoid large deformation of the connecting soft plate 24.

[0068] The present application is not limited to the above-mentioned embodiments, and any changes in shape or structure fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims, and those skilled in the art can make various changes or modifications to the embodiments without departing from the principles and essence of the present application.

Claims

1. An anti-corrosion electrostatic chuck, comprising a base (1) fixed with a base plate (14) integrated with a layered heating unit (13) provided with an electrode (12) on the top of which a ceramic plate (11) for placing an adsorbed object is arranged, characterized in that: the base plate (14) and the base (1) are provided with a flow guide portion for guiding the liquid outflow at the edge of the surface of the ceramic plate (11); a liquid scraping assembly (2) is arranged on one side of the top of the ceramic plate (11) and can be overlapped with the ceramic plate (11), the liquid scraping assembly (2) is arranged on the running path when the ceramic plate (11) is not loaded with the adsorbed object, the ceramic plate (11) passes through the bottom of the liquid scraping assembly (2), and the liquid scraping assembly (2) scrapes the corrosive liquid adhered to the surface of the ceramic plate (11) and other parts in the same plane as the surface of the ceramic plate (11). The flow guide portion comprises a plurality of liquid guide grooves (16) arranged in an annular array at the edge of the base plate (14) and a liquid delivery channel (17) corresponding to each liquid guide groove (16); The base (1) at the bottom of the liquid guide groove (16) is provided with a liquid delivery channel (17), and the other side of the liquid delivery channel (17) is inclined downward and extends to the annular side surface of the base (1); 2. The corrosion resistant electrostatic chuck of claim 1, wherein: The annular surface of the base (1) is sleeved with a liquid collecting shell (18) of an annular structure, the liquid collecting shell (18) covers the port surface corresponding to the liquid delivery channel (17), and the bottom of the liquid collecting shell (18) is fixed with a plurality of uniformly distributed liquid outlet pipes (181). The liquid scraping assembly (2) comprises a scraping portion and a bearing plate (21), the scraping portion is arranged at the bottom of the bearing plate (21), and the bearing plate (21) is fixed at the top of the running path when the ceramic plate (11) is not loaded with the adsorbed object; The bottom of the scraping portion is provided with an auxiliary portion for accelerating the gathering of the liquid on the surface of the ceramic plate (11); 3. The corrosion resistant electrostatic chuck of claim 1, wherein: The auxiliary portion has two and is respectively installed on both sides of the base (1), and the connecting line between the two auxiliary portions is consistent with the running path when the ceramic plate (11) is not loaded with the adsorbed object; The auxiliary portion is a first auxiliary portion (3) or a second auxiliary portion (4). The scraping portion has a "V" shape structure, and the auxiliary portion changes the direction of the opening of the passing scraping portion. The scraping portion comprises two connecting plates (22), the two connecting plates (22) are rotationally connected through a connecting portion (29), and the connecting portion (29) and the two connecting plates (22) form a "V" shape structure with variable form; 4. The corrosion resistant electrostatic chuck of claim 3, wherein: The bottom of the connecting plate (22) is fixed with a scraping plate (23), the scraping plates (23) on the two connecting plates (22) are connected with each other through a connecting soft plate (24), and the connecting soft plate (24) is on the running path when the ceramic plate (11) is not loaded with the adsorbed object; 5. The corrosion resistant electrostatic chuck of claim 4, wherein: The distal top of the two connecting plates (22) is slidingly connected with the bearing plate (21) through a sliding portion. ​ ​ 6. The corrosion resistant electrostatic chuck of claim 5, wherein: The sliding part comprises a connecting rod (25) fixed on the connecting plate (22), and the other end of the connecting rod (25) is fixed to a rotating disc (26) inside the sliding block (27), the rotating disc (26) rotates inside the sliding block (27), the sliding block (27) is slidingly connected on a guide rail (28) fixed on the bottom side wall of the bearing plate (21), and the guide rail (28) is arranged perpendicular to the running path when no adsorbent is loaded.

7. The corrosion resistant electrostatic chuck of claim 5, wherein: The connecting part (29) comprises a connecting column (291), two annular grooves are formed in the surface of the connecting column (291), and two rotating rings (292) are sleeved in the annular grooves, and the two rotating rings (292) are fixedly connected with the two connecting plates (22) respectively.

8. The corrosion resistant electrostatic chuck of claim 3, wherein: The first auxiliary part (3) comprises a driving rod (31) arranged in the vertical direction, the driving rod (31) is fixed on the surface of the base (1) through the connecting rod of the "L" type structure, and protrudes from the base (1); A first push rod (32) is fixed on the side of the vertical rod away from the base (1), and the first push rod (32) and the vertical rod are arranged in parallel.

9. The corrosion resistant electrostatic chuck of claim 3, wherein: The second auxiliary part (4) comprises two trigger units arranged on the running path when no adsorbent is loaded, and the two trigger units are arranged on the bottom of the liquid scraping part on both sides respectively; Further comprising two ejection units in transmission connection with the trigger units, the two ejection units are arranged on both sides of the base (1) respectively, and the ejection units are fixed on the base (1), the ejection units protrude from the base (1), and the connecting line of the two ejection units is on the running path when no adsorbent is loaded; The ejection unit runs in the process of passing through the trigger unit, and the running ejection unit changes the shape of the liquid scraping part.

10. The corrosion resistant electrostatic chuck of claim 9, wherein: The ejection unit comprises two symmetrical driving members, and a ejection member is connected between the two driving members; The driving member comprises a driving gear (42) and a driven gear (43) arranged in meshing relationship, the driving gear (42) and the driven gear (43) are mounted on the same plate body and rotate on the plate body, and the plate body is fixedly connected on the base (1) through a fixing rod (44); The driving member comprises a transmission rod (41), both ends of the transmission rod (41) are fixed to the centers of the two driven gears (43), and an inclined second push rod (45) is fixed to the middle part of the transmission rod (41); The second push rod (45) is composed of two rod members in rotary connection, and a second torsional spring is arranged at the rotary connection; The trigger unit comprises two racks (46), the racks (46) are arranged in the direction of the running path when no adsorbent is loaded, and the two racks (46) are in meshing connection with the two driving gears (42) respectively.

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